SimulatorSystem.cs 143 KB

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  1. using Aitex.Core.RT.DataCenter;
  2. using Aitex.Core.RT.IOCore;
  3. using Aitex.Core.RT.Log;
  4. using Aitex.Core.Util;
  5. using MECF.Framework.Common.Equipment;
  6. using MECF.Framework.Simulator.Core.Driver;
  7. using System;
  8. using System.Collections.Generic;
  9. using Venus_Simulator.Devices;
  10. using System.Threading;
  11. using Venus_Core;
  12. using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.PMs;
  13. using System.Diagnostics.Eventing.Reader;
  14. using MECF.Framework.Common.CommonData;
  15. using MECF.Framework.Common.DataCenter;
  16. using System.Configuration;
  17. namespace Venus_Simulator.Instances
  18. {
  19. public class SimulatorSystem : Singleton<SimulatorSystem>
  20. {
  21. private PeriodicJob _thread;
  22. private Random _rd = new Random();
  23. ConfigType type;
  24. private RD_TRIG _trigATM = new RD_TRIG();
  25. private RD_TRIG _trigVAC = new RD_TRIG();
  26. private R_TRIG _trigLLExtend = new R_TRIG();
  27. private R_TRIG _trigLLRetract = new R_TRIG();
  28. private static int count = 0;
  29. private readonly float ATM_THRESHOLD = 750000;
  30. private readonly float ATM_PRESSURE = 760000;
  31. private readonly float ATM_LoadLock_PRESSURE = 760000;
  32. private readonly uint VAC_SW_PRESSURE = 9500;
  33. private readonly uint PROCESS_GAUGE = 10000;
  34. private Dictionary<ModuleName, DeviceSimulator> _MockDevices = new Dictionary<ModuleName, DeviceSimulator>();
  35. private Dictionary<ModuleName, JetChamber> jetChambers = new Dictionary<ModuleName, JetChamber>();
  36. public SimulatorSystem()
  37. {
  38. //_MockDevices.Add(ModuleName.PMB, new SkyPumpMock());
  39. //_MockDevices.Add(ModuleName.PMB, new AdTecGeneratorMock());
  40. //_MockDevices.Add(ModuleName.PMB, new AdTecMatchMock());
  41. // TODO
  42. var section = ConfigurationManager.GetSection("customSettings") as System.Collections.Specialized.NameValueCollection;
  43. type = (ConfigType)Convert.ToInt32(section["SimulatorType"]);
  44. jetChambers.Add(ModuleName.PMA, SimulatorJetChamber.CurrentPMAChamber);
  45. jetChambers.Add(ModuleName.PMB, SimulatorJetChamber.CurrentPMBChamber);
  46. jetChambers.Add(ModuleName.PMC, SimulatorJetChamber.CurrentPMCChamber);
  47. jetChambers.Add(ModuleName.PMD, SimulatorJetChamber.CurrentPMDChamber);
  48. }
  49. ~SimulatorSystem()
  50. {
  51. _thread?.Stop();
  52. }
  53. public void Initialize()
  54. {
  55. SetDefaultValue(ModuleName.PMA, SimulatorJetChamber.CurrentPMAChamber);
  56. SetDefaultValue(ModuleName.PMB, SimulatorJetChamber.CurrentPMBChamber);
  57. SetDefaultValue(ModuleName.PMC, SimulatorJetChamber.CurrentPMCChamber);
  58. SetDefaultValue(ModuleName.PMD, SimulatorJetChamber.CurrentPMDChamber);
  59. if (type == ConfigType.Kepler2200)
  60. {
  61. SetKepler2200TMDefaultValue();
  62. }
  63. else if (type == ConfigType.Kepler2300)
  64. {
  65. SetKepler2300TMDefaultValue();
  66. }
  67. else if (type == ConfigType.VenusSE)
  68. {
  69. SetSETMDefaultValue();
  70. }
  71. else if (type == ConfigType.VenusDE)
  72. {
  73. SetDETMDefaultValue();
  74. }
  75. Singleton<DataManager>.Instance.Initialize(false);
  76. _thread = new PeriodicJob(500, OnMonitor, nameof(SimulatorSystem), true);
  77. }
  78. private void SetDefaultValue(ModuleName mod, JetChamber jetChamber)
  79. {
  80. switch (jetChamber)
  81. {
  82. case JetChamber.VenusSE:
  83. IO.DI[$"{mod}.DI_Lid_Closed"].Value = true;
  84. IO.DI[$"{mod}.DI_ATM_Switch"].Value = true;
  85. IO.DI[$"{mod}.DI_PM_VAC_Switch"].Value = false;
  86. IO.DI[$"{mod}.DI_ESC_Coolant_Flow_SW"].Value = true;
  87. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  88. IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
  89. IO.DI[$"{mod}.DI_Lift_Pin_Up_POS"].Value = false;
  90. IO.DI[$"{mod}.DI_Lift_Pin_Down_POS"].Value = true;
  91. //IO.DI[$"{mod}.DI_RF_Generator_Interlock"].Value = true;
  92. //IO.DI[$"{mod}.DI_Source_RF_Fan"].Value = true;
  93. IO.DI[$"{mod}.DI_RF_HV_Interlock_OK"].Value = true;
  94. IO.DI[$"{mod}.DI_Turbo_Pump_Interlock"].Value = true;
  95. IO.DI[$"{mod}.DI_Coolant_Inlet_TC_Broken_Alarm"].Value = false;
  96. IO.DI[$"{mod}.DI_Coolant_Outlet_TC_Broken_Alarm"].Value = false;
  97. IO.DI[$"{mod}.DI_Chamber_Pressure_10t_Gauge_Alarm"].Value = false;
  98. IO.DI[$"{mod}.DI_Process_Pressure_100mt_Gauge_Alarm"].Value = false;
  99. IO.DI[$"{mod}.DI_Foreline_Pressure_10t_Gauge_Alarm"].Value = false;
  100. IO.DI[$"{mod}.DI_Valve_Control_TC_Broken_Alarm"].Value = false;
  101. IO.DI[$"{mod}.DI_Foreline_Control_TC_Broken_Alarm"].Value = false;
  102. IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = false;
  103. IO.DI[$"{mod}.DI_CHB_Wall_TC_Deviation_out_of_range"].Value = true;
  104. IO.DI[$"{mod}.DI_CHB_Wall_Control_TC_Broken_Alarm"].Value = true;
  105. IO.DI[$"{mod}.DI_CHB_Wall_Monitor_TC_Broken_Alarm"].Value = true;
  106. IO.DI[$"{mod}.DI_CHB_Wall_Heater_On_FB"].Value = true;
  107. IO.DI[$"{mod}.DI_CHB_Wall_OT_Switch_Alarm"].Value = true;
  108. IO.DI[$"{mod}.DI_PN2_Pressure_Switch"].Value = true;
  109. IO.DI[$"{mod}.DI_MFC1_Pressure_Switch"].Value = true;
  110. IO.DI[$"{mod}.DI_MFC2_Pressure_Switch"].Value = true;
  111. IO.DI[$"{mod}.DI_MFC3_Pressure_Switch"].Value = true;
  112. IO.DI[$"{mod}.DI_MFC4_Pressure_Switch"].Value = true;
  113. IO.DI[$"{mod}.DI_MFC5_Pressure_Switch"].Value = true;
  114. IO.DI[$"{mod}.DI_MFC6_Pressure_Switch"].Value = true;
  115. IO.DI[$"{mod}.DI_MFC7_Pressure_Switch"].Value = true;
  116. IO.DI[$"{mod}.DI_MFC8_Pressure_Switch"].Value = true;
  117. IO.DI[$"{mod}.DI_MFC9_Pressure_Switch"].Value = true;
  118. IO.DI[$"{mod}.DI_MFC10_Pressure_Switch"].Value = true;
  119. IO.DI[$"{mod}.DI_MFC11_Pressure_Switch"].Value = true;
  120. IO.DI[$"{mod}.DI_MFC12_Pressure_Switch"].Value = true;
  121. IO.DI[$"{mod}.DI_He_Pressure_Switch"].Value = true;
  122. IO.DI[$"{mod}.DI_ESC_He_Pressure_100t_Gauge_Alarm"].Value = true;
  123. IO.DI[$"{mod}.DI_Gas_Box_Door_Switch"].Value = true;
  124. IO.DI[$"{mod}.DI_Gas_Box_Pressure_Switch"].Value = true;
  125. IO.DI[$"{mod}.DI_Turbo_Pump_Water_Flow_Switch"].Value = true;
  126. IO.DI[$"{mod}.DI_SOURCE_RF_Water_Flow_Switch"].Value = true;
  127. IO.DI[$"{mod}.DI_TM_ROB_NOT_EXTEND_TO_PM"].Value = true;
  128. IO.DI[$"{mod}.DI_TM_Slit_Door_Closed"].Value = true;
  129. IO.DI[$"{mod}.DI_Source_Match_interlock_ok"].Value = true;
  130. IO.DI[$"{mod}.DI_Bias_Match_interlock_ok"].Value = true;
  131. IO.DI[$"{mod}.DI_GASLINE_TC_Deviation_out_of_range"].Value = true;
  132. IO.DI[$"{mod}.DI_GASLINE_Control_TC_Broken_Alarm"].Value = true;
  133. IO.DI[$"{mod}.DI_GASLINE_Monitor_TC_Broken_Alarm"].Value = true;
  134. IO.DI[$"{mod}.DI_GASLINE_Heater_On_FB"].Value = true;
  135. IO.DI[$"{mod}.DI_CTRL_BOX_1#FAN_OK"].Value = true;
  136. IO.DI[$"{mod}.DI_CTRL_BOX_2#FAN_OK"].Value = true;
  137. IO.DI[$"{mod}.DI_POWER_BOX_FAN_OK"].Value = true;
  138. //// pressure
  139. SetAiValue($"{mod}.AI_Process_Pressure_100mt", 100);
  140. //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  141. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  142. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 5001);
  143. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5000);
  144. //// Temperature
  145. SetAiValue($"{mod}.AI_Valve_Control_TC_Temp", 28);
  146. //SetAiValue($"{mod}.AI_Valve_Monitor_TC_Temp", 27);
  147. SetAiValue($"{mod}.AI_Fline_Control_TC_Temp", 28);
  148. //SetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp", 27);
  149. SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", 28);
  150. SetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp", 27);
  151. SetAiValue($"{mod}.AI_Coolant_Inlet_Temp", 28);
  152. // Datetime
  153. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  154. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  155. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  156. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  157. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  158. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  159. break;
  160. case JetChamber.VenusDE:
  161. IO.DI[$"{mod}.DI_Lid_Closed"].Value = true;
  162. IO.DI[$"{mod}.DI_ATM_Switch"].Value = true;
  163. IO.DI[$"{mod}.DI_PM_VAC_Switch"].Value = false;
  164. IO.DI[$"{mod}.DI_ESC_Coolant_Flow_SW"].Value = true;
  165. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  166. IO.DI[$"{mod}.DI_Lift_Pin_Up_POS"].Value = false;
  167. IO.DI[$"{mod}.DI_Lift_Pin_Down_POS"].Value = true;
  168. IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
  169. //IO.DI[$"{mod}.DI_RF_Generator_Interlock"].Value = true;
  170. //IO.DI[$"{mod}.DI_Source_RF_Fan"].Value = true;
  171. IO.DI[$"{mod}.DI_RF_HV_Interlock_OK"].Value = true;
  172. IO.DI[$"{mod}.DI_Turbo_Pump_Interlock"].Value = true;
  173. IO.DI[$"{mod}.DI_Liner_Door_Open_Position"].Value = true;
  174. IO.DI[$"{mod}.DI_Liner_Door_Close_Position"].Value = false;
  175. IO.DI[$"{mod}.DI_ESC_Coolant_Inlet_TC_Broken_Alarm"].Value = false;
  176. IO.DI[$"{mod}.DI_Magnets_Coils_ON_FB"].Value = false;
  177. IO.DI[$"{mod}.DI_ESC_Coolant_Outlet_TC_Broken_Alarm"].Value = false;
  178. IO.DI[$"{mod}.DI_Chamber_Pressure_10t_Gauge_Alarm"].Value = false;
  179. IO.DI[$"{mod}.DI_Process_Pressure_1t_Gauge_Alarm"].Value = false;
  180. IO.DI[$"{mod}.DI_Foreline_Pressure_10t_Gauge_Alarm"].Value = false;
  181. IO.DI[$"{mod}.DI_Valve_Control_TC_Broken_Alarm"].Value = false;
  182. IO.DI[$"{mod}.DI_Valve_Heater_On_FB"].Value = false;
  183. IO.DI[$"{mod}.DI_Foreline_TC_Deviation_out_of_range"].Value = false;
  184. IO.DI[$"{mod}.DI_Foreline_Control_TC_Broken_Alarm"].Value = false;
  185. IO.DI[$"{mod}.DI_Foreline_Monitor_TC_Broken_Alarm"].Value = false;
  186. IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = false;
  187. //IO.DI[$"{mod}.DI_CHB_Wall_TC_Deviation_out_of_range"].Value = true;
  188. //IO.DI[$"{mod}.DI_CHB_Wall_Control_TC_Broken_Alarm"].Value = true;
  189. //IO.DI[$"{mod}.DI_CHB_Wall_Monitor_TC_Broken_Alarm"].Value = true;
  190. //IO.DI[$"{mod}.DI_CHB_Wall_Heater_On_FB"].Value = true;
  191. //IO.DI[$"{mod}.DI_CHB_Wall_OT_Switch_Alarm"].Value = true;
  192. IO.DI[$"{mod}.DI_PN2_Pressure_Switch"].Value = true;
  193. IO.DI[$"{mod}.DI_MFC1_Pressure_Switch"].Value = true;
  194. IO.DI[$"{mod}.DI_MFC2_Pressure_Switch"].Value = true;
  195. IO.DI[$"{mod}.DI_MFC3_Pressure_Switch"].Value = true;
  196. IO.DI[$"{mod}.DI_MFC4_Pressure_Switch"].Value = true;
  197. IO.DI[$"{mod}.DI_MFC5_Pressure_Switch"].Value = true;
  198. IO.DI[$"{mod}.DI_MFC6_Pressure_Switch"].Value = true;
  199. IO.DI[$"{mod}.DI_MFC7_Pressure_Switch"].Value = true;
  200. IO.DI[$"{mod}.DI_MFC8_Pressure_Switch"].Value = true;
  201. IO.DI[$"{mod}.DI_MFC9_Pressure_Switch"].Value = true;
  202. IO.DI[$"{mod}.DI_MFC10_Pressure_Switch"].Value = true;
  203. IO.DI[$"{mod}.DI_MFC11_Pressure_Switch"].Value = true;
  204. IO.DI[$"{mod}.DI_MFC12_Pressure_Switch"].Value = true;
  205. IO.DI[$"{mod}.DI_He_Pressure_Switch"].Value = true;
  206. //IO.DI[$"{mod}.DI_ESC_He_Pressure_100t_Gauge_Alarm"].Value = true;
  207. IO.DI[$"{mod}.DI_Gas_Box_Door_Switch"].Value = true;
  208. IO.DI[$"{mod}.DI_Gas_Box_Pressure_Switch"].Value = true;
  209. IO.DI[$"{mod}.DI_Turbo_Pump_Water_Flow_Switch"].Value = true;
  210. IO.DI[$"{mod}.DI_BIAS_RF_Water_Flow_Switch"].Value = true;
  211. IO.DI[$"{mod}.DI_CHB_Coolant_Flow_SW"].Value = true;
  212. //IO.DI[$"{mod}.DI_SOURCE_RF_Water_Flow_Switch"].Value = true;
  213. IO.DI[$"{mod}.DI_TM_ROB_NOT_EXTEND_TO_PM"].Value = true;
  214. IO.DI[$"{mod}.DI_TM_Slit_Door_Closed"].Value = true;
  215. //IO.DI[$"{mod}.DI_Source_Match_interlock_ok"].Value = true;
  216. IO.DI[$"{mod}.DI_Bias_Match_interlock_ok"].Value = true;
  217. //IO.DI[$"{mod}.DI_GASLINE_TC_Deviation_out_of_range"].Value = true;
  218. //IO.DI[$"{mod}.DI_GASLINE_Control_TC_Broken_Alarm"].Value = true;
  219. //IO.DI[$"{mod}.DI_GASLINE_Monitor_TC_Broken_Alarm"].Value = true;
  220. //IO.DI[$"{mod}.DI_GASLINE_Heater_On_FB"].Value = true;
  221. IO.DI[$"{mod}.DI_CTRL_BOX_1#FAN_OK"].Value = true;
  222. IO.DI[$"{mod}.DI_CTRL_BOX_2#FAN_OK"].Value = true;
  223. IO.DI[$"{mod}.DI_POWER_BOX_FAN_OK"].Value = true;
  224. IO.DI[$"{mod}.DI_MAGNET_BOX_FAN_OK"].Value = true;
  225. //// pressure
  226. SetAiValue($"{mod}.AI_Process_Pressure_1t", 100);
  227. //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  228. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  229. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 5001);
  230. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5000);
  231. //// Temperature
  232. SetAiValue($"{mod}.AI_Valve_Control_TC_Temp", 28);
  233. //SetAiValue($"{mod}.AI_Gasline_Control_TC_Temp", 27);
  234. SetAiValue($"{mod}.AI_Fline_Control_TC_Temp", 28);
  235. SetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp", 28);
  236. //SetAiValue($"{mod}.AI_Gasline_Monitor_TC_Temp", 27);
  237. SetAiValue($"{mod}.AI_CHB_Coolant_Inlet_Temp", 28);
  238. SetAiValue($"{mod}.AI_CHB_Coolant_Outlet_Temp", 27);
  239. SetAiValue($"{mod}.AI_ESC_Coolant_Inlet_Temp", 28);
  240. SetAiValue($"{mod}.AI_ESC_Coolant_Outlet_Temp", 28);
  241. // Datetime
  242. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  243. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  244. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  245. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  246. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  247. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  248. break;
  249. case JetChamber.Kepler2300:
  250. // chamber
  251. IO.DI[$"{mod}.DI_Lid_Closed"].Value = true;
  252. IO.DI[$"{mod}.DI_ATM_Switch"].Value = true;
  253. IO.DI[$"{mod}.DI_VAC_Switch"].Value = false;
  254. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  255. IO.DI[$"{mod}.DI_Lift_Pin_Up_POS"].Value = false;
  256. IO.DI[$"{mod}.DI_Lift_Pin_Down_POS"].Value = true;
  257. IO.DI[$"{mod}.DI_Source_RF_Generator_Interlock"].Value = true;
  258. IO.DI[$"{mod}.DI_Source_RF_Fan"].Value = true;
  259. IO.DI[$"{mod}.DI_Turbo_Pump_Interlock"].Value = true;
  260. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = false;
  261. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = true;
  262. IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
  263. IO.DI[$"{mod}.DI_S_Valve_TC_Deviation_out_of_range"].Value = false;
  264. IO.DI[$"{mod}.DI_S_Valve_Control_TC_Broken_Alarm"].Value = false;
  265. IO.DI[$"{mod}.DI_S_Valve_Monitor_TC_Broken_Alarm"].Value = false;
  266. IO.DI[$"{mod}.DI_S_Valve_Heater_On_FB"].Value = false;
  267. IO.DI[$"{mod}.DI_Foreline_TC_Deviation_out_of_range"].Value = false;
  268. IO.DI[$"{mod}.DI_Foreline_Control_TC_Broken_Alarm"].Value = false;
  269. IO.DI[$"{mod}.DI_Foreline_Monitor_TC_Broken_Alarm"].Value = false;
  270. IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = false;
  271. IO.DI[$"{mod}.DI_CHB_Wall_TC_Deviation_out_of_range"].Value = false;
  272. IO.DI[$"{mod}.DI_CHB_Wall_Control_TC_Broken_Alarm"].Value = false;
  273. IO.DI[$"{mod}.DI_CHB_Wall_Monitor_TC_Broken_Alarm"].Value = false;
  274. IO.DI[$"{mod}.DI_CHB_Wall_Heater_On_FB"].Value = false;
  275. IO.DI[$"{mod}.DI_CHB_Wall_OT_Switch_Alarm"].Value = false;
  276. IO.DI[$"{mod}.DI_PN2_Pressure_Switch"].Value = true;
  277. IO.DI[$"{mod}.DI_MFC1_Pressure_Switch"].Value = true;
  278. IO.DI[$"{mod}.DI_MFC2_Pressure_Switch"].Value = true;
  279. IO.DI[$"{mod}.DI_MFC3_Pressure_Switch"].Value = true;
  280. IO.DI[$"{mod}.DI_MFC4_Pressure_Switch"].Value = true;
  281. IO.DI[$"{mod}.DI_MFC5_Pressure_Switch"].Value = true;
  282. IO.DI[$"{mod}.DI_MFC6_Pressure_Switch"].Value = true;
  283. IO.DI[$"{mod}.DI_MFC7_Pressure_Switch"].Value = true;
  284. IO.DI[$"{mod}.DI_MFC8_Pressure_Switch"].Value = true;
  285. IO.DI[$"{mod}.DI_ESC_He_Pressure_Switch"].Value = true;
  286. IO.DI[$"{mod}.DI_ESC_He_Pressure_100t_Guage_Alarm"].Value = false;
  287. IO.DI[$"{mod}.DI_Gas_Box_Door_Switch"].Value = true;
  288. IO.DI[$"{mod}.DI_Gas_Box_Pressure_Switch"].Value = true;
  289. IO.DI[$"{mod}.DI_Source_RF_Water_Flow_Switch"].Value = true;
  290. IO.DI[$"{mod}.DI_S_Valve_OT_Switch_Alarm"].Value = false;
  291. IO.DI[$"{mod}.DI_Foreline_OT_Switch_Alarm"].Value = false;
  292. IO.DI[$"{mod}.DI_Arm_Not_Extend_to_PM"].Value = true;
  293. IO.DI[$"{mod}.DI_EFEM_Door_Colse"].Value = true;
  294. IO.DI[$"{mod}.DI_ESC_Inner_Coolant_Flow_SW"].Value = true;
  295. IO.DI[$"{mod}.DI_ESC_Outer_Coolant_Flow_SW"].Value = true;
  296. //// pressure
  297. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 5001);
  298. //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5000);
  299. SetAiValue($"{mod}.AI_Process_Pressure_100mt", 100);
  300. //SetAiValue($"{mod}.AI_Chamber_Pressure_760t", ATM_PRESSURE);
  301. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  302. //// Temperature
  303. SetAiValue($"{mod}.AI_S_Valve_Control_TC_Temp", 28);
  304. SetAiValue($"{mod}.AI_Foreline_Control_TC_Temp", 28);
  305. SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", 28);
  306. SetAiValue($"{mod}.AI_ESC_inner_coolant_outlet_TC_Temp", 20);
  307. SetAiValue($"{mod}.AI_ESC_outer_coolant_outlet_TC_Temp", 30);
  308. SetAiValue($"{mod}.AI_Top_Plate_coolant_outlet_TC_Temp", 40);
  309. // Datetime
  310. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  311. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  312. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  313. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  314. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  315. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  316. break;
  317. case JetChamber.Kepler2200A:
  318. case JetChamber.Kepler2200B:
  319. if (jetChamber == JetChamber.Kepler2200B)
  320. {
  321. IO.DI[$"{mod}.DI_RF_Box_Interlock"].Value = true;
  322. }
  323. IO.DI[$"{mod}.DI_Wafer_Transfer_Posi_SW"].Value = true;
  324. IO.DI[$"{mod}.DI_Lid_Closed"].Value = true;
  325. IO.DI[$"{mod}.DI_ATM_Switch"].Value = true;
  326. IO.DI[$"{mod}.DI_VAC_Switch"].Value = false;
  327. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  328. IO.DI[$"{mod}.DI_Source_RF_Generator_Interlock"].Value = true;
  329. IO.DI[$"{mod}.DI_Source_RF_Match_Interlock"].Value = true;
  330. IO.DI[$"{mod}.DI_Turbo_Pump_Interlock"].Value = true;
  331. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = false;
  332. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = true;
  333. IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
  334. IO.DI[$"{mod}.DI_CHB_M-HT_Control_TC_Broken_Alarm"].Value = false;
  335. IO.DI[$"{mod}.DI_CHB_M-HT_Heater_On_FB"].Value = false;
  336. IO.DI[$"{mod}.DI_CHB_M-HT_OT_Switch_Alarm"].Value = false;
  337. IO.DI[$"{mod}.DI_PN2_Pressure_Switch"].Value = true;
  338. IO.DI[$"{mod}.DI_MFC1_Pressure_Switch"].Value = true;
  339. IO.DI[$"{mod}.DI_MFC2_Pressure_Switch"].Value = true;
  340. IO.DI[$"{mod}.DI_MFC3_Pressure_Switch"].Value = true;
  341. IO.DI[$"{mod}.DI_MFC4_Pressure_Switch"].Value = true;
  342. IO.DI[$"{mod}.DI_MFC5_Pressure_Switch"].Value = true;
  343. IO.DI[$"{mod}.DI_MFC6_Pressure_Switch"].Value = true;
  344. IO.DI[$"{mod}.DI_MFC7_Pressure_Switch"].Value = true;
  345. IO.DI[$"{mod}.DI_MFC8_Pressure_Switch"].Value = true;
  346. IO.DI[$"{mod}.DI_N2_Purge_Pressure_Switch"].Value = true;
  347. IO.DI[$"{mod}.DI_GasBox_N2_Flow_Switch"].Value = true;
  348. IO.DI[$"{mod}.DI_Gas_Box_Door_Switch"].Value = true;
  349. IO.DI[$"{mod}.DI_Lid_Up_Limit_Pos_SW"].Value = true;
  350. //IO.DI[$"{mod}.DI_S_Valve_OT_Switch_Alarm"].Value = false;
  351. IO.DI[$"{mod}.DI_Lid_Down_Limit_Pos_SW"].Value = true;
  352. IO.DI[$"{mod}.DI_Gas_Box_Pressure_Switch"].Value = true;
  353. //IO.DI[$"{mod}.DI_TM_Safety_Door_Colse"].Value = true;
  354. IO.DI[$"{mod}.DI_Arm_Not_Extend_to_PM"].Value = true;
  355. IO.DI[$"{mod}.DI_CHB_Water_Flow_Switch"].Value = true;
  356. //IO.DI[$"{mod}.DI_Source_RF_Water_Flow_Switch"].Value = true;
  357. //// pressure
  358. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 100);
  359. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 100);
  360. SetAiValue($"{mod}.AI_Process_Pressure_2t", 0);
  361. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  362. //// Temperature
  363. // SetAiValue($"{mod}.AI_S_Valve_Control_TC_Temp", 28);
  364. SetAiValue($"{mod}.AI_CHB_M-HT_Control_TC_Temp", 28);
  365. SetAiValue($"{mod}.AI_Penning_Gauge_Pressure1", 100);
  366. // Datetime
  367. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  368. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  369. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  370. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  371. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  372. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  373. break;
  374. }
  375. }
  376. private void SetKepler2200TMDefaultValue()
  377. {
  378. ModuleName mod = ModuleName.TM;
  379. IO.DI[$"{mod}.DI_TM_Power_On"].Value = true;
  380. IO.DI[$"{mod}.DI_TM_In_Safety"].Value = true;
  381. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  382. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMA"].Value = true;
  383. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMB"].Value = true;
  384. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMC"].Value = true;
  385. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMD"].Value = true;
  386. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_LLA"].Value = true;
  387. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_LLB"].Value = true;
  388. IO.DI[$"{mod}.DI_EFEM_RB_Not_Extend_LLA"].Value = true;
  389. IO.DI[$"{mod}.DI_EFEM_RB_Not_Extend_LLB"].Value = true;
  390. IO.DI[$"{mod}.DI_EFEM_Side_Door_Closed"].Value = true;
  391. IO.DI[$"{mod}.DI_TM_CHB_PCW_Flow_Switch"].Value = true;
  392. IO.DI[$"{mod}.DI_LLA_PCW_Flow_Switch"].Value = true;
  393. IO.DI[$"{mod}.DI_LLB_PCW_Flow_Switch"].Value = true;
  394. IO.DI[$"{mod}.DI_TM_CHB_Door_Closed"].Value = true;
  395. IO.DI[$"{mod}.DI_LLA_Lid_Door_Closed"].Value = true;
  396. IO.DI[$"{mod}.DI_LLB_Lid_Door_Closed"].Value = true;
  397. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_open_Position"].Value = false;
  398. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_close_Position"].Value = true;
  399. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_open_Position"].Value = false;
  400. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_close_Position"].Value = true;
  401. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_open_Position"].Value = false;
  402. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_close_Position"].Value = true;
  403. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_open_Position"].Value = false;
  404. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_close_Position"].Value = true;
  405. IO.DI[$"{mod}.DI_PMA_SlitDoor_Open_Position"].Value = false;
  406. IO.DI[$"{mod}.DI_PMA_SlitDoor_Close_Position"].Value = true;
  407. IO.DI[$"{mod}.DI_PMB_SlitDoor_Open_Position"].Value = false;
  408. IO.DI[$"{mod}.DI_PMB_SlitDoor_Close_Position"].Value = true;
  409. IO.DI[$"{mod}.DI_PMC_SlitDoor_Open_Position"].Value = false;
  410. IO.DI[$"{mod}.DI_PMC_SlitDoor_Close_Position"].Value = true;
  411. IO.DI[$"{mod}.DI_PMD_SlitDoor_Open_Position"].Value = false;
  412. IO.DI[$"{mod}.DI_PMD_SlitDoor_Close_Position"].Value = true;
  413. IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
  414. IO.DI[$"{mod}.DI_Vaccum_Pressure_Switch"].Value = true;
  415. IO.DI[$"{mod}.DI_N2_Pressure_Switch"].Value = true;
  416. IO.DI[$"{mod}.DI_TM_Chamber_VAC_Gauge_Alarm"].Value = false;
  417. IO.DI[$"{mod}.DI_TM_Foreline_VAC_Gauge_Alarm"].Value = false;
  418. IO.DI[$"{mod}.DI_LLA_Chamber_VAC_Gauge_Alarm"].Value = false;
  419. IO.DI[$"{mod}.DI_LLA_Foreline_VAC_Gauge_Alarm"].Value = false;
  420. IO.DI[$"{mod}.DI_LLB_Chamber_VAC_Gauge_Alarm"].Value = false;
  421. IO.DI[$"{mod}.DI_LLB_Foreline_VAC_Gauge_Alarm"].Value = false;
  422. IO.DI[$"{mod}.DI_TM_ATM_Switch"].Value = true;
  423. IO.DI[$"{mod}.DI_LLA_ATM_Switch"].Value = true;
  424. IO.DI[$"{mod}.DI_LLB_ATM_Switch"].Value = true;
  425. IO.DI[$"{mod}.DI_PMA_Lid_Closed"].Value = true;
  426. IO.DI[$"{mod}.DI_PMB_Lid_Closed"].Value = true;
  427. IO.DI[$"{mod}.DI_PMC_Lid_Closed"].Value = true;
  428. IO.DI[$"{mod}.DI_PMD_Lid_Closed"].Value = true;
  429. // Datetime
  430. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  431. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  432. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  433. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  434. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  435. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  436. SetAiValue($"{mod}.AI_TM_Foreline_Pressure", 100);
  437. SetAiValue($"{mod}.AI_LLA_Foreline_Pressure", 150);
  438. SetAiValue($"{mod}.AI_LLB_Foreline_Pressure", 200);
  439. if (SystemConfig.Instance.GetValue<bool>("System.IsATMMode"))
  440. {
  441. SetAiValue($"{mod}.AI_TM_CHB_Pressure", ConvertPressureUnit.ConvertmTorrToPa(760000));
  442. SetAiValue($"{mod}.AI_LLA_CHB_Pressure", ConvertPressureUnit.ConvertmTorrToPa(760000));
  443. SetAiValue($"{mod}.AI_LLB_CHB_Pressure", ConvertPressureUnit.ConvertmTorrToPa(760000));
  444. }
  445. else
  446. {
  447. SetAiValue($"{mod}.AI_TM_CHB_Pressure", 666);
  448. SetAiValue($"{mod}.AI_LLA_CHB_Pressure", 666);
  449. SetAiValue($"{mod}.AI_LLB_CHB_Pressure", 666);
  450. }
  451. }
  452. private void SetKepler2300TMDefaultValue()
  453. {
  454. ModuleName mod = ModuleName.TM;
  455. IO.DI[$"{mod}.DI_TM_Power_On"].Value = true;
  456. IO.DI[$"{mod}.DI_TM_In_Safety"].Value = true;
  457. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  458. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMA"].Value = true;
  459. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMB"].Value = true;
  460. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMC"].Value = true;
  461. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMD"].Value = true;
  462. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_LLA"].Value = true;
  463. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_LLB"].Value = true;
  464. IO.DI[$"{mod}.DI_EFEM_RB_Not_Extend_LLA"].Value = true;
  465. IO.DI[$"{mod}.DI_EFEM_RB_Not_Extend_LLB"].Value = true;
  466. IO.DI[$"{mod}.DI_EFEM_Side_Door_Closed"].Value = true;
  467. IO.DI[$"{mod}.DI_TM_CHB_PCW_Flow_Switch"].Value = true;
  468. IO.DI[$"{mod}.DI_LLA_PCW_Flow_Switch"].Value = true;
  469. IO.DI[$"{mod}.DI_LLB_PCW_Flow_Switch"].Value = true;
  470. IO.DI[$"{mod}.DI_TM_CHB_Door_Closed"].Value = true;
  471. IO.DI[$"{mod}.DI_LLA_Lid_Door_Closed"].Value = true;
  472. IO.DI[$"{mod}.DI_LLB_Lid_Door_Closed"].Value = true;
  473. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_open_Position"].Value = false;
  474. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_close_Position"].Value = true;
  475. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_open_Position"].Value = false;
  476. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_close_Position"].Value = true;
  477. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_open_Position"].Value = false;
  478. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_close_Position"].Value = true;
  479. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_open_Position"].Value = false;
  480. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_close_Position"].Value = true;
  481. IO.DI[$"{mod}.DI_PMA_SlitDoor_Open_Position"].Value = false;
  482. IO.DI[$"{mod}.DI_PMA_SlitDoor_Close_Position"].Value = true;
  483. IO.DI[$"{mod}.DI_PMB_SlitDoor_Open_Position"].Value = false;
  484. IO.DI[$"{mod}.DI_PMB_SlitDoor_Close_Position"].Value = true;
  485. IO.DI[$"{mod}.DI_PMC_SlitDoor_Open_Position"].Value = false;
  486. IO.DI[$"{mod}.DI_PMC_SlitDoor_Close_Position"].Value = true;
  487. IO.DI[$"{mod}.DI_PMD_SlitDoor_Open_Position"].Value = false;
  488. IO.DI[$"{mod}.DI_PMD_SlitDoor_Close_Position"].Value = true;
  489. IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
  490. IO.DI[$"{mod}.DI_Vaccum_Pressure_Switch"].Value = true;
  491. IO.DI[$"{mod}.DI_N2_Pressure_Switch"].Value = true;
  492. IO.DI[$"{mod}.DI_TM_Chamber_VAC_Gauge_Alarm"].Value = false;
  493. IO.DI[$"{mod}.DI_TM_Foreline_VAC_Gauge_Alarm"].Value = false;
  494. IO.DI[$"{mod}.DI_LLA_Chamber_VAC_Gauge_Alarm"].Value = false;
  495. IO.DI[$"{mod}.DI_LLA_Foreline_VAC_Gauge_Alarm"].Value = false;
  496. IO.DI[$"{mod}.DI_LLB_Chamber_VAC_Gauge_Alarm"].Value = false;
  497. IO.DI[$"{mod}.DI_LLB_Foreline_VAC_Gauge_Alarm"].Value = false;
  498. IO.DI[$"{mod}.DI_TM_ATM_Switch"].Value = true;
  499. IO.DI[$"{mod}.DI_LLA_ATM_Switch"].Value = true;
  500. IO.DI[$"{mod}.DI_LLB_ATM_Switch"].Value = true;
  501. IO.DI[$"{mod}.DI_PMA_Lid_Closed"].Value = true;
  502. IO.DI[$"{mod}.DI_PMB_Lid_Closed"].Value = true;
  503. IO.DI[$"{mod}.DI_PMC_Lid_Closed"].Value = true;
  504. IO.DI[$"{mod}.DI_PMD_Lid_Closed"].Value = true;
  505. // Datetime
  506. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  507. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  508. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  509. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  510. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  511. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  512. SetAiValue($"{mod}.AI_TM_Foreline_Pressure", 100);
  513. SetAiValue($"{mod}.AI_LLA_Foreline_Pressure", 150);
  514. SetAiValue($"{mod}.AI_LLB_Foreline_Pressure", 200);
  515. if (SystemConfig.Instance.GetValue<bool>("System.IsATMMode"))
  516. {
  517. SetAiValue($"{mod}.AI_TM_CHB_Pressure", 760000);
  518. SetAiValue($"{mod}.AI_LLA_CHB_Pressure", 760000);
  519. SetAiValue($"{mod}.AI_LLB_CHB_Pressure", 760000);
  520. }
  521. else
  522. {
  523. SetAiValue($"{mod}.AI_TM_CHB_Pressure", 5000);
  524. SetAiValue($"{mod}.AI_LLA_CHB_Pressure", 5002);
  525. SetAiValue($"{mod}.AI_LLB_CHB_Pressure", 5004);
  526. }
  527. }
  528. private void SetSETMDefaultValue()
  529. {
  530. string mod = "SETM";
  531. IO.DI[$"{mod}.DI_System_CDA_Pressure_OK"].Value = true;
  532. IO.DI[$"{mod}.DI_LID_DOOR_CLOSED"].Value = true;
  533. IO.DI[$"{mod}.DI_VCE_SLIT_DOOR_OPEN_ENABLE"].Value = true;
  534. IO.DI[$"{mod}.DI_PMA_SLIT_DOOR_OPEN_ENABLE"].Value = true;
  535. IO.DI[$"{mod}.DI_PMB_SLIT_DOOR_OPEN_ENABLE"].Value = true;
  536. IO.DI[$"{mod}.DI_VCE_ATM_SW"].Value = true;
  537. IO.DI[$"{mod}.DI_TM_ATM_SW"].Value = true;
  538. IO.DI[$"{mod}.DI_VCE_Wafer_Senser"].Value = true;
  539. IO.DI[$"{mod}.DI_PMA_Wafer_Senser"].Value = true;
  540. IO.DI[$"{mod}.DI_PMB_Wafer_Senser"].Value = true;
  541. IO.DI[$"{mod}.DI_PMC_Wafer_Senser"].Value = true;
  542. IO.DI[$"{mod}.DI_AC_RACK_FAN_OK"].Value = true;
  543. IO.DI[$"{mod}.DI_AC_RACK_Smoke_SW1"].Value = false;
  544. IO.DI[$"{mod}.DI_AC_RACK_Smoke_SW2"].Value = false;
  545. IO.DI[$"{mod}.DI_FA_Smoke_SW"].Value = false;
  546. IO.DI[$"{mod}.DI_Gas_Treatment_Alarm"].Value = false;
  547. IO.DI[$"{mod}.DI_SYSTEM_N2_Pressure_SW"].Value = true;
  548. IO.DI[$"{mod}.DI_VCE_TM_Slit_Door_Open_Pos"].Value = false;
  549. IO.DI[$"{mod}.DI_VCE_TM_Slit_Door_Close_Pos"].Value = true;
  550. IO.DI[$"{mod}.DI_TM_PMA_Slit_Door_Open_Pos"].Value = false;
  551. IO.DI[$"{mod}.DI_TM_PMA_Slit_Door_Close_Pos"].Value = true;
  552. IO.DI[$"{mod}.DI_TM_PMB_Slit_Door_Open_Pos"].Value = false;
  553. IO.DI[$"{mod}.DI_TM_PMB_Slit_Door_Close_Pos"].Value = true;
  554. IO.DI[$"{mod}.DI_TM_PMC_Slit_Door_Open_Pos"].Value = false;
  555. IO.DI[$"{mod}.DI_TM_PMC_Slit_Door_Close_Pos"].Value = true;
  556. IO.DI[$"{mod}.DI_TM_HE_Pressure_SW"].Value = true;
  557. IO.DI[$"{mod}.DI_TM_N2_Pressure_SW"].Value = true;
  558. IO.DI[$"{mod}.DI_PMC_SLIT_DOOR_OPEN_ENABLE"].Value = true;
  559. IO.DI[$"{mod}.DI_PCW_Leak_SW"].Value = true;
  560. IO.DI[$"{mod}.DI_TM_CDA_Pressure_SW"].Value = true;
  561. IO.DI[$"{mod}.DI_VCE_VAC_SW"].Value = false;
  562. IO.DI[$"{mod}.DI_TM_VAC_SW"].Value = false;
  563. IO.DI[$"{mod}.DI_TM_ROBOT_NOT_EXTEND_VCE"].Value = true;
  564. IO.DI[$"{mod}.DI_TM_ROBOT_NOT_EXTEND_PMA"].Value = true;
  565. IO.DI[$"{mod}.DI_TM_ROBOT_NOT_EXTEND_PMB"].Value = true;
  566. IO.DI[$"{mod}.DI_TM_ROBOT_NOT_EXTEND_PMC"].Value = true;
  567. SetAiValue($"{mod}.AI_MFC_Flow", 3000);
  568. SetAiValue($"{mod}.AI_VCE_Pressure", 3000);
  569. SetAiValue($"{mod}.AI_Foreline_Pressure", 3000);
  570. SetAiValue($"{mod}.AI_TM_Pressure", 20);
  571. }
  572. private void SetDETMDefaultValue()
  573. {
  574. string mod = "DETM";
  575. IO.DI[$"{mod}.DI_Smif1_Ready_to_load"].Value = true;
  576. IO.DI[$"{mod}.DI_Smif1_Ready_to_unload"].Value = true;
  577. IO.DI[$"{mod}.DI_Smif2_Ready_to_load"].Value = true;
  578. IO.DI[$"{mod}.DI_Smif2_Ready_to_unload"].Value = true;
  579. IO.DI[$"{mod}.DI_PMA_SLIT_DOOR_OPEN_ENABLE"].Value = true;
  580. IO.DI[$"{mod}.DI_PMB_SLIT_DOOR_OPEN_ENABLE"].Value = true;
  581. IO.DI[$"{mod}.DI_PMC_SLIT_DOOR_OPEN_ENABLE"].Value = true;
  582. IO.DI[$"{mod}.DI_ROBOT_TO_VCEA_RETRACT"].Value = true;
  583. IO.DI[$"{mod}.DI_ROBOT_TO_VCEB_RETRACT"].Value = true;
  584. IO.DI[$"{mod}.DI_ROBOT_TO_PMA_RETRACT"].Value = true;
  585. IO.DI[$"{mod}.DI_ROBOT_TO_PMB_RETRACT"].Value = true;
  586. IO.DI[$"{mod}.DI_ROBOT_TO_PMC_RETRACT"].Value = true;
  587. IO.DI[$"{mod}.DI_ROBOT_TO_PMD_RETRACT"].Value = true;
  588. IO.DI[$"{mod}.DI_VCEA_Wafer_Sensor"].Value = true;
  589. IO.DI[$"{mod}.DI_VCEB_Wafer_Sensor"].Value = true;
  590. IO.DI[$"{mod}.DI_PMA_Wafer_Sensor"].Value = true;
  591. IO.DI[$"{mod}.DI_PMB_Wafer_Sensor"].Value = true;
  592. IO.DI[$"{mod}.DI_PMC_Wafer_Sensor"].Value = true;
  593. IO.DI[$"{mod}.DI_PMD_Wafer_Sensor"].Value = true;
  594. IO.DI[$"{mod}.DI_VCEA_SlitDoor_Open_POS"].Value = false;
  595. IO.DI[$"{mod}.DI_VCEA_SlitDoor_Close_POS"].Value = true;
  596. IO.DI[$"{mod}.DI_VCEB_SlitDoor_Open_POS"].Value = false;
  597. IO.DI[$"{mod}.DI_VCEB_SlitDoor_Close_POS"].Value = true;
  598. IO.DI[$"{mod}.DI_TM_N2_1_SW"].Value = true;
  599. IO.DI[$"{mod}.DI_TM_N2_2_SW"].Value = true;
  600. IO.DI[$"{mod}.DI_TM_CDA_SW"].Value = true;
  601. IO.DI[$"{mod}.DI_TM_He_SW"].Value = true;
  602. IO.DI[$"{mod}.DI_LEAK"].Value = true;
  603. IO.DI[$"{mod}.DI_VCEA_ATM_SW"].Value = true;
  604. IO.DI[$"{mod}.DI_VCEB_ATM_SW"].Value = true;
  605. IO.DI[$"{mod}.DI_TM_ATM_SW"].Value = true;
  606. IO.DI[$"{mod}.DI_AC_RACK_FAN_OK"].Value = true;
  607. IO.DI[$"{mod}.DI_AC_RACK_SMOKE_Out1"].Value = false;
  608. IO.DI[$"{mod}.DI_AC_RACK_SMOKE_Out2"].Value = false;
  609. IO.DI[$"{mod}.DI_FACTORY_SMOKE_Out"].Value = false;
  610. IO.DI[$"{mod}.DI_Abnormal_Exhaust_Gas"].Value = true;
  611. IO.DI[$"{mod}.DI_VCEA_Cassette_Present"].Value = true;
  612. IO.DI[$"{mod}.DI_VCEB_Cassette_Present"].Value = true;
  613. IO.DI[$"{mod}.DI_VCEA_ADR_LOCKED"].Value = true;
  614. IO.DI[$"{mod}.DI_VCEB_ADR_LOCKED"].Value = true;
  615. IO.DI[$"{mod}.DI_TM_LID_Close"].Value = true;
  616. IO.DI[$"{mod}.DI_LEFT_SMIF_READY"].Value = true;
  617. IO.DI[$"{mod}.DI_LEFT_SMIF_POD_INPLACE"].Value = true;
  618. IO.DI[$"{mod}.DI_RIGHT_SMIF_POD_INPLACE"].Value = true;
  619. IO.DI[$"{mod}.DI_LEFT_SMIF_ERROR"].Value = true;
  620. IO.DI[$"{mod}.DI_RIGHT_SMIF_ERROR"].Value = true;
  621. IO.DI[$"{mod}.DI_VCEA_EXTEND_ENABLE"].Value = true;
  622. IO.DI[$"{mod}.DI_VCEB_EXTEND_ENABLE"].Value = true;
  623. IO.DI[$"{mod}.DI_PMA_EXTEND_ENABLE"].Value = true;
  624. IO.DI[$"{mod}.DI_PMB_EXTEND_ENABLE"].Value = true;
  625. IO.DI[$"{mod}.DI_PMC_EXTEND_ENABLE"].Value = true;
  626. IO.DI[$"{mod}.DI_EMO"].Value = false;
  627. IO.DI[$"{mod}.DI_TM_Soft_Pump"].Value = true;
  628. IO.DI[$"{mod}.DI_TM_Soft_Vent"].Value = true;
  629. SetAiValue($"{mod}.AI_MFC_Flow", 3000);
  630. SetAiValue($"{mod}.AI_Left_VCE_Pressure", 3000);
  631. SetAiValue($"{mod}.AI_Right_VCE_Pressure", 3000);
  632. SetAiValue($"{mod}.AI_VCE_Foreline_Pressure", 20);
  633. SetAiValue($"{mod}.AI_TM_Foreline_Pressure", 20);
  634. SetAiValue($"{mod}.AI_TM_Pressure", 20);
  635. }
  636. private bool OnMonitor()
  637. {
  638. try
  639. {
  640. foreach (var item in jetChambers)
  641. {
  642. switch (item.Value)
  643. {
  644. case JetChamber.Kepler2300:
  645. MonitorSlitDoorInTM(item.Key);
  646. MonitorPin(item.Key);
  647. MonitorPressure_Kepler(item.Key);
  648. //MonitorTemperature(item.Key);
  649. MonitorGas(item.Key);
  650. this.SimulateHe(item.Key);
  651. //MonitorRF(item.Key);
  652. ChangeTime(item.Key);
  653. //MonitorIOPumpCtrl(item.Key);
  654. MonitorLid(item.Key);
  655. break;
  656. case JetChamber.Kepler2200A:
  657. case JetChamber.Kepler2200B:
  658. MonitorSlitDoorInTM(item.Key);
  659. MonitorPressure_Kepler2200(item.Key);
  660. //MonitorTemperature(item.Key);
  661. MonitorGas(item.Key);
  662. // MonitorRF(item.Key);
  663. ChangeTime(item.Key);
  664. //MonitorIOPumpCtrl(item.Key);
  665. MonitorLid(item.Key);
  666. MonitorIOHighTemperatureHeater(item.Key);
  667. MonitorKepler2200Heater(item.Key);
  668. break;
  669. case JetChamber.VenusSE:
  670. MonitorPin(item.Key);
  671. //MonitorVenuSESlitDoor(item.Key);
  672. MonitorSEPressure(item.Key);
  673. MonitorSEGas(item.Key);
  674. ChangeTime(item.Key);
  675. this.SimulateSEHe(item.Key);
  676. break;
  677. case JetChamber.VenusDE:
  678. MonitorPin(item.Key);
  679. MonitorDEGas(item.Key);
  680. //MonitorVenuDESlitDoor(item.Key);
  681. MonitorDEPressure(item.Key);
  682. ChangeTime(item.Key);
  683. MonitorLinerDoor(item.Key);
  684. this.SimulateDEHe(item.Key);
  685. break;
  686. }
  687. }
  688. //ChangeTime(ModuleName.TM);
  689. if (type == ConfigType.Kepler2200)
  690. {
  691. ChangeTime(ModuleName.TM);
  692. MonitorMFSlitDoor();
  693. MonitorMFKepler2200Pressure();
  694. }
  695. else if (type == ConfigType.Kepler2300)
  696. {
  697. ChangeTime(ModuleName.TM);
  698. MonitorMFSlitDoor();
  699. MonitorMFKepler2300Pressure();
  700. }
  701. else if (type == ConfigType.VenusSE)
  702. {
  703. MonitorSEMFSlitDoor();
  704. MonitorSEMFPressure();
  705. //MonitorDEMFSlitDoor();
  706. //MonitorDEMFPressure();
  707. }
  708. else if (type == ConfigType.VenusDE)
  709. {
  710. MonitorDEMFSlitDoor();
  711. MonitorDEMFPressure();
  712. }
  713. }
  714. catch (Exception e)
  715. {
  716. LOG.WriteExeption(e);
  717. }
  718. return true;
  719. }
  720. private void ChangeTime(ModuleName mod)
  721. {
  722. // Heartbeat with PLC
  723. SetAiValue($"{mod}.AI_Heartbeat_FB", GetAoValue($"{mod}.AO_Heartbeat"));
  724. SetAiValue($"{mod}.AI_Year", DateTime.Now.Year);
  725. SetAiValue($"{mod}.AI_Month", DateTime.Now.Month);
  726. SetAiValue($"{mod}.AI_Day", DateTime.Now.Day);
  727. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  728. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  729. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  730. }
  731. //void MonitorVenuSESlitDoor(ModuleName mod)
  732. //{
  733. //}
  734. void MonitorSlitDoorInPM(ModuleName mod)
  735. {
  736. // slit door open
  737. if (IO.DO[$"{mod}.DO_Slit_Door_Open"].Value)
  738. {
  739. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = true;
  740. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = false;
  741. }
  742. // slit door close
  743. if (IO.DO[$"{mod}.DO_Slit_Door_Close"].Value)
  744. {
  745. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = false;
  746. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = true;
  747. }
  748. }
  749. void MonitorLinerDoor(ModuleName mod)
  750. {
  751. // slit door open
  752. if (IO.DO[$"{mod}.DO_PM_Liner_Door_Open"].Value)
  753. {
  754. IO.DI[$"{mod}.DI_Liner_Door_Open_Position"].Value = true;
  755. IO.DI[$"{mod}.DI_Liner_Door_Close_Position"].Value = false;
  756. }
  757. // slit door close
  758. if (IO.DO[$"{mod}.DO_PM_Liner_Door_Close"].Value)
  759. {
  760. IO.DI[$"{mod}.DI_Liner_Door_Open_Position"].Value = false;
  761. IO.DI[$"{mod}.DI_Liner_Door_Close_Position"].Value = true;
  762. }
  763. }
  764. void MonitorSlitDoorInTM(ModuleName mod)
  765. {
  766. // slit door open
  767. if (IO.DO[$"TM.DO_{mod}_SlitDoor_Open"].Value)
  768. {
  769. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = true;
  770. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = false;
  771. }
  772. // slit door close
  773. if (IO.DO[$"TM.DO_{mod}_SlitDoor_Close"].Value)
  774. {
  775. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = false;
  776. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = true;
  777. }
  778. }
  779. void MonitorMFSlitDoor()
  780. {
  781. ModuleName mod = ModuleName.TM;
  782. // LLA T door open
  783. if (IO.DO[$"{mod}.DO_LLA_Slit_Door_T_Open"].Value)
  784. {
  785. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_open_Position"].Value = true;
  786. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_close_Position"].Value = false;
  787. }
  788. // LLB T door open
  789. if (IO.DO[$"{mod}.DO_LLB_Slit_Door_T_Open"].Value)
  790. {
  791. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_open_Position"].Value = true;
  792. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_close_Position"].Value = false;
  793. }
  794. // LLA E door open
  795. if (IO.DO[$"{mod}.DO_LLA_Slit_Door_E_Open"].Value)
  796. {
  797. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_open_Position"].Value = true;
  798. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_close_Position"].Value = false;
  799. }
  800. // LLB E door open
  801. if (IO.DO[$"{mod}.DO_LLB_Slit_Door_E_Open"].Value)
  802. {
  803. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_open_Position"].Value = true;
  804. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_close_Position"].Value = false;
  805. }
  806. // LLA T door close
  807. if (IO.DO[$"{mod}.DO_LLA_Slit_Door_T_Close"].Value)
  808. {
  809. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_open_Position"].Value = false;
  810. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_close_Position"].Value = true;
  811. }
  812. // LLB T door close
  813. if (IO.DO[$"{mod}.DO_LLB_Slit_Door_T_Close"].Value)
  814. {
  815. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_open_Position"].Value = false;
  816. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_close_Position"].Value = true;
  817. }
  818. // LLA E door close
  819. if (IO.DO[$"{mod}.DO_LLA_Slit_Door_E_Close"].Value)
  820. {
  821. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_open_Position"].Value = false;
  822. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_close_Position"].Value = true;
  823. }
  824. // LLB E door close
  825. if (IO.DO[$"{mod}.DO_LLB_Slit_Door_E_Close"].Value)
  826. {
  827. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_open_Position"].Value = false;
  828. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_close_Position"].Value = true;
  829. }
  830. // PMA slitdoor door close/open
  831. if (IO.DO[$"{mod}.DO_PMA_SlitDoor_Close"].Value)
  832. {
  833. IO.DI[$"{mod}.DI_PMA_SlitDoor_Open_Position"].Value = false;
  834. IO.DI[$"{mod}.DI_PMA_SlitDoor_Close_Position"].Value = true;
  835. }
  836. if (IO.DO[$"{mod}.DO_PMA_SlitDoor_Open"].Value)
  837. {
  838. IO.DI[$"{mod}.DI_PMA_SlitDoor_Open_Position"].Value = true;
  839. IO.DI[$"{mod}.DI_PMA_SlitDoor_Close_Position"].Value = false;
  840. }
  841. // PMB slitdoor door close/open
  842. if (IO.DO[$"{mod}.DO_PMB_SlitDoor_Close"].Value)
  843. {
  844. IO.DI[$"{mod}.DI_PMB_SlitDoor_Open_Position"].Value = false;
  845. IO.DI[$"{mod}.DI_PMB_SlitDoor_Close_Position"].Value = true;
  846. }
  847. if (IO.DO[$"{mod}.DO_PMB_SlitDoor_Open"].Value)
  848. {
  849. IO.DI[$"{mod}.DI_PMB_SlitDoor_Open_Position"].Value = true;
  850. IO.DI[$"{mod}.DI_PMB_SlitDoor_Close_Position"].Value = false;
  851. }
  852. // PMC slitdoor door close/open
  853. if (IO.DO[$"{mod}.DO_PMC_SlitDoor_Close"].Value)
  854. {
  855. IO.DI[$"{mod}.DI_PMC_SlitDoor_Open_Position"].Value = false;
  856. IO.DI[$"{mod}.DI_PMC_SlitDoor_Close_Position"].Value = true;
  857. }
  858. if (IO.DO[$"{mod}.DO_PMC_SlitDoor_Open"].Value)
  859. {
  860. IO.DI[$"{mod}.DI_PMC_SlitDoor_Open_Position"].Value = true;
  861. IO.DI[$"{mod}.DI_PMC_SlitDoor_Close_Position"].Value = false;
  862. }
  863. // PMD slitdoor door close/open
  864. if (IO.DO[$"{mod}.DO_PMD_SlitDoor_Close"].Value)
  865. {
  866. IO.DI[$"{mod}.DI_PMD_SlitDoor_Open_Position"].Value = false;
  867. IO.DI[$"{mod}.DI_PMD_SlitDoor_Close_Position"].Value = true;
  868. }
  869. if (IO.DO[$"{mod}.DO_PMD_SlitDoor_Open"].Value)
  870. {
  871. IO.DI[$"{mod}.DI_PMD_SlitDoor_Open_Position"].Value = true;
  872. IO.DI[$"{mod}.DI_PMD_SlitDoor_Close_Position"].Value = false;
  873. }
  874. }
  875. void MonitorSEMFSlitDoor()
  876. {
  877. string mod = "SETM";
  878. // VCE T door open
  879. if (IO.DO[$"{mod}.DO_VCE_Slit_Door_Open"].Value)
  880. {
  881. IO.DI[$"{mod}.DI_VCE_TM_Slit_Door_Open_Pos"].Value = true;
  882. IO.DI[$"{mod}.DI_VCE_TM_Slit_Door_Close_Pos"].Value = false;
  883. }
  884. // VCE T door Close
  885. if (IO.DO[$"{mod}.DO_VCE_Slit_Door_Close"].Value)
  886. {
  887. IO.DI[$"{mod}.DI_VCE_TM_Slit_Door_Open_Pos"].Value = false;
  888. IO.DI[$"{mod}.DI_VCE_TM_Slit_Door_Close_Pos"].Value = true;
  889. }
  890. //pma
  891. if (IO.DO[$"{mod}.DO_PMA_Slit_Door_Open"].Value)
  892. {
  893. IO.DI[$"{mod}.DI_TM_PMA_Slit_Door_Open_Pos"].Value = true;
  894. IO.DI[$"{mod}.DI_TM_PMA_Slit_Door_Close_Pos"].Value = false;
  895. }
  896. if (IO.DO[$"{mod}.DO_PMA_Slit_Door_Close"].Value)
  897. {
  898. IO.DI[$"{mod}.DI_TM_PMA_Slit_Door_Open_Pos"].Value = false;
  899. IO.DI[$"{mod}.DI_TM_PMA_Slit_Door_Close_Pos"].Value = true;
  900. }
  901. //pmb
  902. if (IO.DO[$"{mod}.DO_PMB_Slit_Door_Open"].Value)
  903. {
  904. IO.DI[$"{mod}.DI_TM_PMB_Slit_Door_Open_Pos"].Value = true;
  905. IO.DI[$"{mod}.DI_TM_PMB_Slit_Door_Close_Pos"].Value = false;
  906. }
  907. if (IO.DO[$"{mod}.DO_PMB_Slit_Door_Close"].Value)
  908. {
  909. IO.DI[$"{mod}.DI_TM_PMB_Slit_Door_Open_Pos"].Value = false;
  910. IO.DI[$"{mod}.DI_TM_PMB_Slit_Door_Close_Pos"].Value = true;
  911. }
  912. //pmc
  913. if (IO.DO[$"{mod}.DO_PMC_Slit_Door_Open"].Value)
  914. {
  915. IO.DI[$"{mod}.DI_TM_PMC_Slit_Door_Open_Pos"].Value = true;
  916. IO.DI[$"{mod}.DI_TM_PMC_Slit_Door_Close_Pos"].Value = false;
  917. }
  918. if (IO.DO[$"{mod}.DO_PMC_Slit_Door_Close"].Value)
  919. {
  920. IO.DI[$"{mod}.DI_TM_PMC_Slit_Door_Open_Pos"].Value = false;
  921. IO.DI[$"{mod}.DI_TM_PMC_Slit_Door_Close_Pos"].Value = true;
  922. }
  923. }
  924. void MonitorDEMFSlitDoor()
  925. {
  926. string mod = "DETM";
  927. // VCE L door open
  928. if (IO.DO[$"{mod}.DO_VCEA_SlitDoor_Open"].Value)
  929. {
  930. IO.DI[$"{mod}.DI_VCEA_SlitDoor_Open_POS"].Value = true;
  931. IO.DI[$"{mod}.DI_VCEA_SlitDoor_Close_POS"].Value = false;
  932. }
  933. // VCE R door open
  934. if (IO.DO[$"{mod}.DO_VCEB_SlitDoor_Open"].Value)
  935. {
  936. IO.DI[$"{mod}.DI_VCEB_SlitDoor_Open_POS"].Value = true;
  937. IO.DI[$"{mod}.DI_VCEB_SlitDoor_Close_POS"].Value = false;
  938. }
  939. // VCE L door Close
  940. if (IO.DO[$"{mod}.DO_VCEA_SlitDoor_Close"].Value)
  941. {
  942. IO.DI[$"{mod}.DI_VCEA_SlitDoor_Open_POS"].Value = false;
  943. IO.DI[$"{mod}.DI_VCEA_SlitDoor_Close_POS"].Value = true;
  944. }
  945. // VCE R door Close
  946. if (IO.DO[$"{mod}.DO_VCEB_SlitDoor_Close"].Value)
  947. {
  948. IO.DI[$"{mod}.DI_VCEB_SlitDoor_Open_POS"].Value = false;
  949. IO.DI[$"{mod}.DI_VCEB_SlitDoor_Close_POS"].Value = true;
  950. }
  951. //pma
  952. if (IO.DO[$"{mod}.DO_PMA_SlitDoor_Open"].Value)
  953. {
  954. IO.DI[$"{mod}.DI_PMA_SlitDoor_Open_POS"].Value = true;
  955. IO.DI[$"{mod}.DI_PMA_SlitDoor_Close_POS"].Value = false;
  956. }
  957. if (IO.DO[$"{mod}.DO_PMA_SlitDoor_Close"].Value)
  958. {
  959. IO.DI[$"{mod}.DI_PMA_SlitDoor_Open_POS"].Value = false;
  960. IO.DI[$"{mod}.DI_PMA_SlitDoor_Close_POS"].Value = true;
  961. }
  962. //pmb
  963. if (IO.DO[$"{mod}.DO_PMB_SlitDoor_Open"].Value)
  964. {
  965. IO.DI[$"{mod}.DI_PMB_SlitDoor_Open_POS"].Value = true;
  966. IO.DI[$"{mod}.DI_PMB_SlitDoor_Close_POS"].Value = false;
  967. }
  968. if (IO.DO[$"{mod}.DO_PMB_SlitDoor_Close"].Value)
  969. {
  970. IO.DI[$"{mod}.DI_PMB_SlitDoor_Open_POS"].Value = false;
  971. IO.DI[$"{mod}.DI_PMB_SlitDoor_Close_POS"].Value = true;
  972. }
  973. //pmc
  974. if (IO.DO[$"{mod}.DO_PMC_SlitDoor_Open"].Value)
  975. {
  976. IO.DI[$"{mod}.DI_PMC_SlitDoor_Open_POS"].Value = true;
  977. IO.DI[$"{mod}.DI_PMC_SlitDoor_Close_POS"].Value = false;
  978. }
  979. if (IO.DO[$"{mod}.DO_PMC_SlitDoor_Close"].Value)
  980. {
  981. IO.DI[$"{mod}.DI_PMC_SlitDoor_Open_POS"].Value = false;
  982. IO.DI[$"{mod}.DI_PMC_SlitDoor_Close_POS"].Value = true;
  983. }
  984. if (IO.DO[$"{mod}.DO_PMD_SlitDoor_Open"].Value)
  985. {
  986. IO.DI[$"{mod}.DI_PMD_SlitDoor_Open_POS"].Value = true;
  987. IO.DI[$"{mod}.DI_PMD_SlitDoor_Close_POS"].Value = false;
  988. }
  989. if (IO.DO[$"{mod}.DO_PMD_SlitDoor_Close"].Value)
  990. {
  991. IO.DI[$"{mod}.DI_PMD_SlitDoor_Open_POS"].Value = false;
  992. IO.DI[$"{mod}.DI_PMD_SlitDoor_Close_POS"].Value = true;
  993. }
  994. if (IO.DO[$"{mod}.DO_TM_Soft_Pump"].Value)
  995. {
  996. IO.DI[$"{mod}.DI_TM_Soft_Pump"].Value = true;
  997. }
  998. else
  999. {
  1000. IO.DI[$"{mod}.DI_TM_Soft_Pump"].Value = false;
  1001. }
  1002. if (IO.DO[$"{mod}.DO_TM_Fast_Pump"].Value)
  1003. {
  1004. IO.DI[$"{mod}.DI_TM_Fast_Pump"].Value = true;
  1005. }
  1006. else
  1007. {
  1008. IO.DI[$"{mod}.DI_TM_Fast_Pump"].Value = false;
  1009. }
  1010. if (IO.DO[$"{mod}.DO_TM_Soft_Vent"].Value)
  1011. {
  1012. IO.DI[$"{mod}.DI_TM_Soft_Vent"].Value = true;
  1013. }
  1014. else
  1015. {
  1016. IO.DI[$"{mod}.DI_TM_Soft_Vent"].Value = false;
  1017. }
  1018. }
  1019. void MonitorPin(ModuleName mod)
  1020. {
  1021. // lift pin up
  1022. if (IO.DO[$"{mod}.DO_Lift_Pin_Up"].Value != IO.DO[$"{mod}.DO_Lift_Pin_Down"].Value)
  1023. {
  1024. IO.DI[$"{mod}.DI_Lift_Pin_Up_POS"].Value = IO.DO[$"{mod}.DO_Lift_Pin_Up"].Value;
  1025. IO.DI[$"{mod}.DI_Lift_Pin_Down_POS"].Value = IO.DO[$"{mod}.DO_Lift_Pin_Down"].Value;
  1026. }
  1027. }
  1028. void MonitorLid(ModuleName mod)
  1029. {
  1030. // lift pin up
  1031. if (IO.DO[$"{mod}.DO_Lid_Up"].Value != IO.DO[$"{mod}.DO_Lid_Down"].Value)
  1032. {
  1033. IO.DI[$"{mod}.DI_Lid_Closed"].Value = IO.DO[$"{mod}.DO_Lid_Down"].Value;
  1034. }
  1035. }
  1036. void MonitorExtendAndRetract(ModuleName mod)
  1037. {
  1038. // Extend
  1039. _trigLLExtend.CLK = IO.DO[$"{mod}.DO_Loadlock_Arm_Extend"].Value;
  1040. if (_trigLLExtend.Q)
  1041. {
  1042. _trigLLRetract.RST = true;
  1043. Thread.Sleep(500);
  1044. IO.DI[$"{mod}.DI_Loadlock_Arm_Extend_POS"].Value = true;
  1045. IO.DI[$"{mod}.DI_Loadlock_Arm_Retract_POS"].Value = false;
  1046. IO.DI[$"{mod}.DI_Small_Wafer_In_POS"].Value = false;
  1047. IO.DI[$"{mod}.DI_Big_Wafer_In_POS"].Value = false;
  1048. }
  1049. // Retract
  1050. _trigLLRetract.CLK = IO.DO[$"{mod}.DO_Loadlock_Arm_Retract"].Value;
  1051. if (_trigLLRetract.Q)
  1052. {
  1053. count++;
  1054. _trigLLExtend.RST = true;
  1055. Thread.Sleep(500);
  1056. IO.DI[$"{mod}.DI_Loadlock_Arm_Extend_POS"].Value = false;
  1057. IO.DI[$"{mod}.DI_Loadlock_Arm_Retract_POS"].Value = true;
  1058. if (count == 1)
  1059. {
  1060. IO.DI[$"{mod}.DI_Small_Wafer_In_POS"].Value = false;
  1061. IO.DI[$"{mod}.DI_Big_Wafer_In_POS"].Value = false;
  1062. }
  1063. else if (count == 2)
  1064. {
  1065. count = 0;
  1066. IO.DI[$"{mod}.DI_Small_Wafer_In_POS"].Value = true;
  1067. IO.DI[$"{mod}.DI_Big_Wafer_In_POS"].Value = false;
  1068. }
  1069. }
  1070. }
  1071. void MonitorPressure(ModuleName mod)
  1072. {
  1073. string sAI_Foreline = "AI_Foreline_Pressure_760t";
  1074. // Loadlock pressure
  1075. string sAI_LoadLockPressure = "AI_LL_Pressure_760t";
  1076. // Foreline
  1077. if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open)
  1078. {
  1079. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(500, 600));
  1080. }
  1081. else
  1082. {
  1083. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(500, 600));
  1084. }
  1085. // PLC 模拟量范围[0,4000], 电压[0, 10V], 压力[0, 760Torr]
  1086. string sAI_ChamberPressure = "AI_Chamber_Pressure_10t";
  1087. string sAI_ProcessPressure = "AI_Chamber_Pressure_Virtual";
  1088. //float chamber_pressure = GetMockChamberPressure(mod);
  1089. //float process_pressure = GetAiValue($"{mod}.AI_Chamber_Pressure_Virtual");
  1090. // soft pump & fast pump
  1091. DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"];
  1092. DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"];
  1093. DOAccessor turbo_pump_vlv = IO.DO[$"{mod}.DO_Turbo_Pump_Pumping_Valve"];
  1094. if (fast_pump_vlv.Value || soft_pump_vlv.Value || turbo_pump_vlv.Value)
  1095. {
  1096. //任意泵打开
  1097. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1098. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1099. if (fast_pump_vlv.Value && soft_pump_vlv.Value)
  1100. {//开双泵
  1101. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1102. {
  1103. float targetChamberPressure = getAiValue_ChamberPressure - 30000 > 0 ? getAiValue_ChamberPressure - 30000 : 0;
  1104. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1105. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1106. }
  1107. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1108. {
  1109. float targetChamberPressure = getAiValue_ProcessPressure - 1500 > 0 ? getAiValue_ProcessPressure - 1500 : 0;
  1110. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1111. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1112. }
  1113. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(15000, 16000));
  1114. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(150, 160));
  1115. }
  1116. else if (fast_pump_vlv.Value)//开
  1117. {
  1118. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1119. {
  1120. float targetChamberPressure = getAiValue_ChamberPressure - 25000 > 0 ? getAiValue_ChamberPressure - 25000 : 0;
  1121. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1122. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1123. }
  1124. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1125. {
  1126. float targetChamberPressure = getAiValue_ProcessPressure - 1300 > 0 ? getAiValue_ProcessPressure - 1300 : 0;
  1127. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1128. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1129. }
  1130. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(12000, 13000));
  1131. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(120, 130));
  1132. }
  1133. else if (soft_pump_vlv.Value)
  1134. {
  1135. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1136. {
  1137. float targetChamberPressure = getAiValue_ChamberPressure - 10000 > 0 ? getAiValue_ChamberPressure - 10000 : 0;
  1138. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1139. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1140. }
  1141. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1142. {
  1143. float targetChamberPressure = getAiValue_ProcessPressure - 1100 > 0 ? getAiValue_ProcessPressure - 1100 : 0;
  1144. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1145. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1146. }
  1147. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(13000, 14000));
  1148. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(100, 110));
  1149. }
  1150. else if (turbo_pump_vlv.Value)
  1151. {
  1152. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1153. if ((getAiValue_ChamberPressure - 500) >= 0)
  1154. SetAiValue($"{mod}.{sAI_ChamberPressure}", getAiValue_ChamberPressure - 500);
  1155. else
  1156. SetAiValue($"{mod}.{sAI_ChamberPressure}", 0);
  1157. if ((getAiValue_ProcessPressure - 500) >= 0)
  1158. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1159. else
  1160. SetAiValue($"{mod}.{sAI_ProcessPressure}", 0);
  1161. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1162. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1163. }
  1164. }
  1165. // fast vent & purge
  1166. DOAccessor vent_vlv = IO.DO[$"{mod}.DO_N2_Valve"];
  1167. //DOAccessor purge_vlv = IO.DO[$"{mod}.DO_Chamber_purge_valve"];
  1168. //if (vent_vlv.Value || purge_vlv.Value)
  1169. //{
  1170. // if (vent_vlv.Value && purge_vlv.Value)
  1171. // {
  1172. // float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1173. // float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1174. // if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1175. // {
  1176. // SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 30000);
  1177. // //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1178. // }
  1179. // else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1180. // {
  1181. // getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1182. // SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1500);
  1183. // SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1500);
  1184. // }
  1185. // //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(45000, 50000));
  1186. // //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(150, 160));
  1187. // }
  1188. // else
  1189. //
  1190. if (vent_vlv.Value)
  1191. {
  1192. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1193. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1194. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1195. {
  1196. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1197. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1198. }
  1199. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1200. {
  1201. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1202. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1203. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1204. }
  1205. else
  1206. {
  1207. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1208. }
  1209. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(25000, 30000));
  1210. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(130, 150));
  1211. }
  1212. // Loadlock Pumping Valve
  1213. DOAccessor Loadlock_pump_vlv = IO.DO[$"{mod}.DO_Loadlock_Pumping_Valve"];
  1214. if (Loadlock_pump_vlv.Value)
  1215. {
  1216. SetAiValue($"{mod}.{sAI_LoadLockPressure}", GetAiValue($"{mod}.{sAI_LoadLockPressure}") - 30000);
  1217. }
  1218. // Loadlock vent
  1219. DOAccessor Loadlock_vent_vlv = IO.DO[$"{mod}.DO_Loadlock_Vent_Valve"];
  1220. if (Loadlock_vent_vlv.Value)
  1221. {
  1222. SetAiValue($"{mod}.{sAI_LoadLockPressure}", GetAiValue($"{mod}.{sAI_LoadLockPressure}") + 30000);
  1223. }
  1224. // 压力值越界,复位
  1225. float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1226. if (chamber_pressure1 > ATM_PRESSURE)
  1227. {
  1228. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  1229. }
  1230. else if (chamber_pressure1 < 20)
  1231. {
  1232. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 20);
  1233. }
  1234. float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1235. if (process_pressure1 > PROCESS_GAUGE)
  1236. {
  1237. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  1238. }
  1239. else if (process_pressure1 < 20)
  1240. {
  1241. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", 20);
  1242. }
  1243. float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}");
  1244. if (foreline_pressure > 10000)
  1245. {
  1246. SetAiValue($"{mod}.AI_Foreline_Pressure_760t", 10000);
  1247. }
  1248. else if (foreline_pressure < 150)
  1249. {
  1250. SetAiValue($"{mod}.AI_Foreline_Pressure_760t", 150);
  1251. }
  1252. // 模拟压力计漂移
  1253. //int p1 = (int)GetMockChamberPressure(mod);
  1254. //int new_p1 = _rd.Next(p1 - 2, p1 + 2);
  1255. //SetAiValue($"{mod}.AI_Chamber_Pressure_760t", new_p1);
  1256. //int p2 = (int)GetAiValue($"{mod}.AI_Foreline_Pressure_10t");
  1257. //int new_p2 = _rd.Next(p2 - 1, p2 + 1);
  1258. //SetAiValue($"{mod}.AI_Foreline_Pressure_10t", new_p2);
  1259. //int p3 = (int)GetAiValue($"{mod}.AI_Chamber_Pressure_Virtual");
  1260. //int new_p3 = _rd.Next(p3 - 1, p3 + 1);
  1261. //SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", new_p3);
  1262. // 根据当前压力值设定信号
  1263. //float chamber_pressure2 = GetMockChamberPressure(mod);
  1264. // ATM switch
  1265. IO.DI[$"{mod}.DI_PM_ATM_SW"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ATM_THRESHOLD;
  1266. // VAC switch
  1267. IO.DI[$"{mod}.DI_PM_VAC_SW"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < VAC_SW_PRESSURE;
  1268. // Throttle valve
  1269. //var pos_sp = IO.AO[$"{mod}.AO_Throttle_Valve_Pressure_Setpoint"].Value;
  1270. //var mock_pos_fb = _rd.Next(pos_sp - 2, pos_sp + 2);
  1271. ////IO.AI[$"{mod}.AI_Throttle_Valve_Real_Pressure"].Value = (short)mock_pos_fb;
  1272. //SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", mock_pos_fb);
  1273. // 压力值
  1274. //if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") < GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"))
  1275. //{
  1276. // short increase = (short)_rd.Next(20, 30);
  1277. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") + increase);
  1278. // if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") > GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"))
  1279. // {
  1280. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"));
  1281. // }
  1282. //}
  1283. //else
  1284. //{
  1285. // short increase = (short)_rd.Next(20, 30);
  1286. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") - increase);
  1287. // if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") < GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"))
  1288. // {
  1289. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"));
  1290. // }
  1291. //}
  1292. //// 位置值
  1293. //if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") < GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"))
  1294. //{
  1295. // short increase = (short)_rd.Next(20, 30);
  1296. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") + increase);
  1297. // if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") > GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"))
  1298. // {
  1299. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"));
  1300. // }
  1301. //}
  1302. //else
  1303. //{
  1304. // short increase = (short)_rd.Next(20, 30);
  1305. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") - increase);
  1306. // if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") < GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"))
  1307. // {
  1308. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"));
  1309. // }
  1310. //}
  1311. }
  1312. void MonitorSEPressure(ModuleName mod)
  1313. {
  1314. string sAI_Foreline = "AI_Foreline_Pressure_10t";
  1315. string sAI_ChamberPressure = "AI_Chamber_Pressure_10t";
  1316. string sAI_ProcessPressure = "AI_Chamber_Pressure_Virtual";
  1317. // Foreline
  1318. if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open)
  1319. {
  1320. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(500, 600));
  1321. }
  1322. else
  1323. {
  1324. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(500, 600));
  1325. }
  1326. // PLC 模拟量范围[0,4000], 电压[0, 10V], 压力[0, 760Torr]
  1327. // soft pump & fast pump
  1328. DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"];
  1329. DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"];
  1330. DOAccessor turbo_pump_vlv = IO.DO[$"{mod}.DO_Turbo_Pump_Pumping_Valve"];
  1331. if (fast_pump_vlv.Value || soft_pump_vlv.Value || turbo_pump_vlv.Value)
  1332. {
  1333. //任意泵打开
  1334. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1335. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1336. if (fast_pump_vlv.Value && soft_pump_vlv.Value)
  1337. {//开双泵
  1338. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1339. {
  1340. float targetChamberPressure = getAiValue_ChamberPressure - 30000 > 0 ? getAiValue_ChamberPressure - 30000 : 0;
  1341. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1342. }
  1343. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1344. {
  1345. float targetChamberPressure = getAiValue_ProcessPressure - 1500 > 0 ? getAiValue_ProcessPressure - 1500 : 0;
  1346. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1347. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1348. }
  1349. }
  1350. else if (fast_pump_vlv.Value)//开
  1351. {
  1352. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1353. {
  1354. float targetChamberPressure = getAiValue_ChamberPressure - 25000 > 0 ? getAiValue_ChamberPressure - 25000 : 0;
  1355. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1356. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1357. }
  1358. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1359. {
  1360. float targetChamberPressure = getAiValue_ProcessPressure - 1300 > 0 ? getAiValue_ProcessPressure - 1300 : 0;
  1361. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1362. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1363. }
  1364. }
  1365. else if (soft_pump_vlv.Value)
  1366. {
  1367. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1368. {
  1369. float targetChamberPressure = getAiValue_ChamberPressure - 10000 > 0 ? getAiValue_ChamberPressure - 10000 : 0;
  1370. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1371. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1372. }
  1373. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1374. {
  1375. float targetChamberPressure = getAiValue_ProcessPressure - 1100 > 0 ? getAiValue_ProcessPressure - 1100 : 0;
  1376. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1377. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1378. }
  1379. }
  1380. else if (turbo_pump_vlv.Value)
  1381. {
  1382. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1383. if ((getAiValue_ChamberPressure - 500) >= 0)
  1384. SetAiValue($"{mod}.{sAI_ChamberPressure}", getAiValue_ChamberPressure - 500);
  1385. else
  1386. SetAiValue($"{mod}.{sAI_ChamberPressure}", 0);
  1387. if ((getAiValue_ProcessPressure - 500) >= 0)
  1388. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1389. else
  1390. SetAiValue($"{mod}.{sAI_ProcessPressure}", 0);
  1391. }
  1392. }
  1393. // fast vent & purge
  1394. DOAccessor vent_vlv = IO.DO[$"{mod}.DO_N2_Valve"];
  1395. if (vent_vlv.Value)
  1396. {
  1397. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1398. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1399. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1400. {
  1401. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1402. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1403. }
  1404. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1405. {
  1406. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1407. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1408. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1409. }
  1410. else
  1411. {
  1412. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1413. }
  1414. }
  1415. // Loadlock Pumping Valve
  1416. // 压力值越界,复位
  1417. float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1418. if (chamber_pressure1 > ATM_PRESSURE)
  1419. {
  1420. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  1421. }
  1422. else if (chamber_pressure1 < 20)
  1423. {
  1424. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5);
  1425. }
  1426. float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1427. if (process_pressure1 > PROCESS_GAUGE)
  1428. {
  1429. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  1430. }
  1431. else if (process_pressure1 < 20)
  1432. {
  1433. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", 5);
  1434. }
  1435. float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}");
  1436. if (foreline_pressure > 1999)
  1437. {
  1438. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 1999);
  1439. }
  1440. else if (foreline_pressure < 150)
  1441. {
  1442. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 150);
  1443. }
  1444. // ATM switch
  1445. IO.DI[$"{mod}.DI_ATM_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ATM_THRESHOLD;
  1446. // VAC switch
  1447. IO.DI[$"{mod}.DI_PM_VAC_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < VAC_SW_PRESSURE;
  1448. }
  1449. void MonitorDEPressure(ModuleName mod)
  1450. {
  1451. string sAI_Foreline = "AI_Foreline_Pressure_10t";
  1452. string sAI_ChamberPressure = "AI_Chamber_Pressure_10t";
  1453. string sAI_ProcessPressure = "AI_Chamber_Pressure_Virtual";
  1454. // Foreline
  1455. if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open)
  1456. {
  1457. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(500, 600));
  1458. }
  1459. else
  1460. {
  1461. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(500, 600));
  1462. }
  1463. // PLC 模拟量范围[0,4000], 电压[0, 10V], 压力[0, 760Torr]
  1464. // soft pump & fast pump
  1465. DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"];
  1466. //DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"];
  1467. DOAccessor turbo_pump_vlv = IO.DO[$"{mod}.DO_Turbo_Pump_Pumping_Valve"];
  1468. if (fast_pump_vlv.Value || turbo_pump_vlv.Value)
  1469. {
  1470. //任意泵打开
  1471. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1472. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1473. if (fast_pump_vlv.Value)
  1474. {//开双泵
  1475. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1476. {
  1477. float targetChamberPressure = getAiValue_ChamberPressure - 25000 > 0 ? getAiValue_ChamberPressure - 25000 : 0;
  1478. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1479. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1480. }
  1481. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1482. {
  1483. float targetChamberPressure = getAiValue_ProcessPressure - 1300 > 0 ? getAiValue_ProcessPressure - 1300 : 0;
  1484. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1485. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1486. }
  1487. }
  1488. else if (turbo_pump_vlv.Value)
  1489. {
  1490. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1491. if ((getAiValue_ChamberPressure - 500) >= 0)
  1492. SetAiValue($"{mod}.{sAI_ChamberPressure}", getAiValue_ChamberPressure - 500);
  1493. else
  1494. SetAiValue($"{mod}.{sAI_ChamberPressure}", 0);
  1495. if ((getAiValue_ProcessPressure - 500) >= 0)
  1496. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1497. else
  1498. SetAiValue($"{mod}.{sAI_ProcessPressure}", 0);
  1499. }
  1500. }
  1501. // fast vent & purge
  1502. DOAccessor vent_vlv = IO.DO[$"{mod}.DO_N2_Valve"];
  1503. if (vent_vlv.Value)
  1504. {
  1505. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1506. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1507. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1508. {
  1509. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1510. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1511. }
  1512. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1513. {
  1514. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1515. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1516. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1517. }
  1518. else
  1519. {
  1520. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1521. }
  1522. }
  1523. // Loadlock Pumping Valve
  1524. // 压力值越界,复位
  1525. float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1526. if (chamber_pressure1 > ATM_PRESSURE)
  1527. {
  1528. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  1529. }
  1530. else if (chamber_pressure1 < 20)
  1531. {
  1532. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5);
  1533. }
  1534. float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1535. if (process_pressure1 > PROCESS_GAUGE)
  1536. {
  1537. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  1538. }
  1539. else if (process_pressure1 < 20)
  1540. {
  1541. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", 5);
  1542. }
  1543. float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}");
  1544. if (foreline_pressure > 10000)
  1545. {
  1546. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 10000);
  1547. }
  1548. else if (foreline_pressure < 150)
  1549. {
  1550. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 150);
  1551. }
  1552. // ATM switch
  1553. IO.DI[$"{mod}.DI_ATM_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ATM_THRESHOLD;
  1554. // VAC switch
  1555. IO.DI[$"{mod}.DI_PM_VAC_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < VAC_SW_PRESSURE;
  1556. }
  1557. void MonitorPressure_Kepler(ModuleName mod)
  1558. {
  1559. string sAI_Foreline = "AI_Foreline_Pressure_10t";
  1560. if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open)
  1561. {
  1562. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(500, 600));
  1563. }
  1564. else
  1565. {
  1566. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(500, 600));
  1567. }
  1568. // PLC 模拟量范围[0,4000], 电压[0, 10V], 压力[0, 760Torr]
  1569. string sAI_ChamberPressure = "AI_Chamber_Pressure_10t";
  1570. string sAI_ProcessPressure = "AI_Chamber_Pressure_Virtual";
  1571. //float chamber_pressure = GetMockChamberPressure(mod);
  1572. //float process_pressure = GetAiValue($"{mod}.AI_Chamber_Pressure_Virtual");
  1573. // soft pump & fast pump
  1574. DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"];
  1575. DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"];
  1576. DOAccessor turbo_pump_vlv = IO.DO[$"{mod}.DO_Turbo_Pump_Pumping_Valve"];
  1577. if (fast_pump_vlv.Value || soft_pump_vlv.Value || turbo_pump_vlv.Value)
  1578. {
  1579. //任意泵打开
  1580. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1581. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1582. if (fast_pump_vlv.Value && soft_pump_vlv.Value)
  1583. {//开双泵
  1584. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1585. {
  1586. float targetChamberPressure = getAiValue_ChamberPressure - 30000 > 0 ? getAiValue_ChamberPressure - 30000 : 0;
  1587. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1588. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1589. }
  1590. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1591. {
  1592. float targetChamberPressure = getAiValue_ProcessPressure - 1500 > 0 ? getAiValue_ProcessPressure - 1500 : 0;
  1593. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1594. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1595. }
  1596. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(15000, 16000));
  1597. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(150, 160));
  1598. }
  1599. else if (fast_pump_vlv.Value)//开
  1600. {
  1601. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1602. {
  1603. float targetChamberPressure = getAiValue_ChamberPressure - 25000 > 0 ? getAiValue_ChamberPressure - 25000 : 0;
  1604. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1605. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1606. }
  1607. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1608. {
  1609. float targetChamberPressure = getAiValue_ProcessPressure - 1300 > 0 ? getAiValue_ProcessPressure - 1300 : 0;
  1610. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1611. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1612. }
  1613. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(12000, 13000));
  1614. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(120, 130));
  1615. }
  1616. else if (soft_pump_vlv.Value)
  1617. {
  1618. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1619. {
  1620. float targetChamberPressure = getAiValue_ChamberPressure - 10000 > 0 ? getAiValue_ChamberPressure - 10000 : 0;
  1621. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1622. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1623. }
  1624. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1625. {
  1626. float targetChamberPressure = getAiValue_ProcessPressure - 1100 > 0 ? getAiValue_ProcessPressure - 1100 : 0;
  1627. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1628. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1629. }
  1630. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(13000, 14000));
  1631. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(100, 110));
  1632. }
  1633. else if (turbo_pump_vlv.Value)
  1634. {
  1635. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1636. if ((getAiValue_ChamberPressure - 500) >= 0)
  1637. SetAiValue($"{mod}.{sAI_ChamberPressure}", getAiValue_ChamberPressure - 500);
  1638. else
  1639. SetAiValue($"{mod}.{sAI_ChamberPressure}", 0);
  1640. if ((getAiValue_ProcessPressure - 500) >= 0)
  1641. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1642. else
  1643. SetAiValue($"{mod}.{sAI_ProcessPressure}", 0);
  1644. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1645. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1646. }
  1647. }
  1648. // fast vent & purge
  1649. DOAccessor vent_vlv = IO.DO[$"{mod}.DO_N2_Valve"];
  1650. if (vent_vlv.Value)
  1651. {
  1652. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1653. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1654. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1655. {
  1656. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1657. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1658. }
  1659. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1660. {
  1661. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1662. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1663. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1664. }
  1665. else
  1666. {
  1667. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1668. }
  1669. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(25000, 30000));
  1670. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(130, 150));
  1671. }
  1672. // Loadlock Pumping Valve
  1673. // 压力值越界,复位
  1674. float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1675. if (chamber_pressure1 > ATM_PRESSURE)
  1676. {
  1677. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  1678. }
  1679. else if (chamber_pressure1 < 20)
  1680. {
  1681. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 20);
  1682. }
  1683. float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1684. if (process_pressure1 > PROCESS_GAUGE)
  1685. {
  1686. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  1687. }
  1688. else if (process_pressure1 < 20)
  1689. {
  1690. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", 20);
  1691. }
  1692. float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}");
  1693. if (foreline_pressure > 10000)
  1694. {
  1695. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 10000);
  1696. }
  1697. else if (foreline_pressure < 150)
  1698. {
  1699. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 150);
  1700. }
  1701. // ATM switch
  1702. IO.DI[$"{mod}.DI_ATM_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ATM_THRESHOLD;
  1703. // VAC switch
  1704. IO.DI[$"{mod}.DI_VAC_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < VAC_SW_PRESSURE;
  1705. }
  1706. void MonitorPressure_Kepler2200(ModuleName mod)
  1707. {
  1708. string sAI_Foreline = "AI_Foreline_Pressure_10t";
  1709. if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open)
  1710. {
  1711. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(50, 60));
  1712. }
  1713. else
  1714. {
  1715. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(50, 60));
  1716. }
  1717. //SetAiValue($"{mod}.{sAI_Foreline}", 3000);
  1718. // PLC 模拟量范围[0,4000], 电压[0, 10V], 压力[0, 760Torr]
  1719. string sAI_ChamberPressure = "AI_Chamber_Pressure_10t";
  1720. string sAI_ProcessPressure = "AI_Chamber_Pressure_Virtual";
  1721. //float chamber_pressure = GetMockChamberPressure(mod);
  1722. //float process_pressure = GetAiValue($"{mod}.AI_Chamber_Pressure_Virtual");
  1723. // soft pump & fast pump
  1724. DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"];
  1725. DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"];
  1726. DOAccessor turbo_pump_vlv = IO.DO[$"{mod}.DO_Turbo_Pump_Pumping_Valve"];
  1727. if (fast_pump_vlv.Value || soft_pump_vlv.Value || turbo_pump_vlv.Value)
  1728. {
  1729. //任意泵打开
  1730. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1731. //float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1732. if (fast_pump_vlv.Value && soft_pump_vlv.Value)
  1733. {
  1734. //开双泵
  1735. if ((getAiValue_ChamberPressure - 12000) >= 0)
  1736. {
  1737. SetAiValue($"{mod}.{sAI_ChamberPressure}", getAiValue_ChamberPressure - 12000);
  1738. }
  1739. else
  1740. {
  1741. SetAiValue($"{mod}.{sAI_ChamberPressure}", 0);
  1742. }
  1743. //if (getAiValue_ChamberPressure > 1000)
  1744. //{
  1745. // float targetChamberPressure = ConvertPressureUnit.ConvertmTorrToPa( getAiValue_ChamberPressure - 3000 > 0 ? getAiValue_ChamberPressure - 3000 : 0);
  1746. // SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1747. // //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1748. //}
  1749. //else if ( getAiValue_ChamberPressure <= 1000)
  1750. //{
  1751. // float targetChamberPressure = ConvertPressureUnit.ConvertmTorrToPa(getAiValue_ProcessPressure - 150 > 0 ? getAiValue_ProcessPressure - 150 : 0);
  1752. // SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1753. // SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1754. //}
  1755. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(15000, 16000));
  1756. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(150, 160));
  1757. }
  1758. else if (fast_pump_vlv.Value)//开
  1759. {
  1760. if ((getAiValue_ChamberPressure - 8000) >= 0)
  1761. SetAiValue($"{mod}.{sAI_ChamberPressure}", getAiValue_ChamberPressure - 8000);
  1762. else
  1763. SetAiValue($"{mod}.{sAI_ChamberPressure}", 0);
  1764. }
  1765. else if (soft_pump_vlv.Value)
  1766. {
  1767. if ((getAiValue_ChamberPressure - 4000) >= 0)
  1768. {
  1769. SetAiValue($"{mod}.{sAI_ChamberPressure}", getAiValue_ChamberPressure - 4000);
  1770. }
  1771. else
  1772. {
  1773. SetAiValue($"{mod}.{sAI_ChamberPressure}", 0);
  1774. }
  1775. //if (getAiValue_ChamberPressure > 5000)
  1776. //{
  1777. // float targetChamberPressure = ConvertPressureUnit.ConvertmTorrToPa(getAiValue_ChamberPressure - 1000 > 0 ? getAiValue_ChamberPressure - 1000 : 0);
  1778. // SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1779. // //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1780. //}
  1781. //else if (getAiValue_ChamberPressure <= 1000)
  1782. //{
  1783. // float targetChamberPressure = ConvertPressureUnit.ConvertmTorrToPa(getAiValue_ProcessPressure - 110 > 0 ? getAiValue_ProcessPressure - 110 : 0);
  1784. // SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1785. // SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1786. //}
  1787. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(13000, 14000));
  1788. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(100, 110));
  1789. }
  1790. else if (turbo_pump_vlv.Value)
  1791. {
  1792. if ((getAiValue_ChamberPressure - 50) >= 0)
  1793. SetAiValue($"{mod}.{sAI_ChamberPressure}", getAiValue_ChamberPressure - 50);
  1794. else
  1795. SetAiValue($"{mod}.{sAI_ChamberPressure}", 0);
  1796. }
  1797. }
  1798. // fast vent & purge
  1799. DOAccessor vent_vlv = IO.DO[$"{mod}.DO_N2_Valve"];
  1800. DOAccessor gas_final_vlv = IO.DO[$"{mod}.DO_Gas_Final_Valve"];
  1801. if (vent_vlv.Value && gas_final_vlv.Value)
  1802. {
  1803. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1804. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1805. if (getAiValue_ChamberPressure > 1000)
  1806. {
  1807. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1808. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1809. }
  1810. else if (getAiValue_ChamberPressure <= 1000)
  1811. {
  1812. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1813. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 130);
  1814. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 130);
  1815. }
  1816. else
  1817. {
  1818. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 2500);
  1819. }
  1820. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(25000, 30000));
  1821. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(130, 150));
  1822. }
  1823. // Loadlock Pumping Valve
  1824. // 压力值越界,复位
  1825. float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1826. if (chamber_pressure1 > ConvertPressureUnit.ConvertmTorrToPa(ATM_PRESSURE))
  1827. {
  1828. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ConvertPressureUnit.ConvertmTorrToPa(ATM_PRESSURE));
  1829. }
  1830. else if (chamber_pressure1 < 20)
  1831. {
  1832. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 20);
  1833. }
  1834. //float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1835. //if (process_pressure1 > ConvertPressureUnit.ConvertmTorrToPa(PROCESS_GAUGE))
  1836. //{
  1837. // SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  1838. //}
  1839. //else if (process_pressure1 < 20)
  1840. //{
  1841. // SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", 20);
  1842. //}
  1843. float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}");
  1844. if (foreline_pressure > 1000)
  1845. {
  1846. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 1000);
  1847. }
  1848. else if (foreline_pressure < 15)
  1849. {
  1850. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 15);
  1851. }
  1852. // ATM switch
  1853. IO.DI[$"{mod}.DI_ATM_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ConvertPressureUnit.ConvertmTorrToPa(ATM_THRESHOLD);
  1854. // VAC switch
  1855. IO.DI[$"{mod}.DI_VAC_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < ConvertPressureUnit.ConvertmTorrToPa(VAC_SW_PRESSURE);
  1856. SetAiValue($"{mod}.AI_Process_Pressure_2t", 0);
  1857. //var chamberPressure = GetAiValue($"{mod}.AI_Chamber_Pressure_10t");
  1858. //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ConvertPressureUnit.ConvertmTorrToPa( GetAiValue($"{mod}.AI_Chamber_Pressure_10t")));
  1859. //SetAiValue($"{mod}.AI_Foreline_Pressure_10t", ConvertPressureUnit.ConvertmTorrToPa(GetAiValue($"{mod}.AI_Foreline_Pressure_10t")));
  1860. SetAiValue($"{mod}.{sAI_Foreline}",200);
  1861. }
  1862. void MonitorSEMFPressure()
  1863. {
  1864. string mod = "SETM";
  1865. string VCE_ChamberPressure = "AI_VCE_Pressure";
  1866. string TM_AI_ChamberPressure = "AI_TM_Pressure";
  1867. DOAccessor TM_fast_pump_vlv = IO.DO[$"{mod}.DO_TM_Fast_Pumping"];
  1868. DOAccessor TM_soft_pump_vlv = IO.DO[$"{mod}.DO_TM_Soft_Pumping"];
  1869. DOAccessor TM_fast_Vent_vlv = IO.DO[$"{mod}.DO_TM_Fast_Vent"];
  1870. DOAccessor TM_soft_Vent_vlv = IO.DO[$"{mod}.DO_TM_Soft_Vent"];
  1871. DOAccessor VCE_fast_pump_vlv = IO.DO[$"{mod}.DO_VCE_Fast_Pumping"];
  1872. DOAccessor VCE_soft_pump_vlv = IO.DO[$"{mod}.DO_VCE_Soft_Pumping"];
  1873. DOAccessor VCE_fast_Vent_vlv = IO.DO[$"{mod}.DO_VCE_Fast_Vent"];
  1874. DOAccessor VCE_soft_Vent_vlv = IO.DO[$"{mod}.DO_VCE_Soft_Vent"];
  1875. float getAiValue_VCE_ChamberPressure = GetAiValue($"{mod}.{VCE_ChamberPressure}");
  1876. float getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  1877. if (TM_fast_pump_vlv.Value || TM_soft_pump_vlv.Value)
  1878. {
  1879. if (getAiValue_TM_ChamberPressure > 10000)
  1880. {
  1881. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 30000);
  1882. }
  1883. else if (getAiValue_TM_ChamberPressure <= 10000)
  1884. {
  1885. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 1500);
  1886. }
  1887. }
  1888. if (TM_fast_Vent_vlv.Value || TM_soft_Vent_vlv.Value)
  1889. {
  1890. if (getAiValue_TM_ChamberPressure > 10000)
  1891. {
  1892. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 30000);
  1893. }
  1894. else if (getAiValue_TM_ChamberPressure <= 10000)
  1895. {
  1896. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 1500);
  1897. }
  1898. }
  1899. if (VCE_fast_pump_vlv.Value || VCE_soft_pump_vlv.Value)
  1900. {
  1901. if (getAiValue_VCE_ChamberPressure > 10000)
  1902. {
  1903. SetAiValue($"{mod}.{VCE_ChamberPressure}", GetAiValue($"{mod}.{VCE_ChamberPressure}") - 30000);
  1904. }
  1905. else if (getAiValue_VCE_ChamberPressure <= 10000)
  1906. {
  1907. SetAiValue($"{mod}.{VCE_ChamberPressure}", GetAiValue($"{mod}.{VCE_ChamberPressure}") - 1500);
  1908. }
  1909. }
  1910. if (VCE_fast_Vent_vlv.Value || VCE_soft_Vent_vlv.Value)
  1911. {
  1912. if (getAiValue_VCE_ChamberPressure > 10000)
  1913. {
  1914. SetAiValue($"{mod}.{VCE_ChamberPressure}", GetAiValue($"{mod}.{VCE_ChamberPressure}") + 30000);
  1915. }
  1916. else if (getAiValue_VCE_ChamberPressure <= 10000)
  1917. {
  1918. SetAiValue($"{mod}.{VCE_ChamberPressure}", GetAiValue($"{mod}.{VCE_ChamberPressure}") + 1500);
  1919. }
  1920. }
  1921. getAiValue_VCE_ChamberPressure = GetAiValue($"{mod}.{VCE_ChamberPressure}");
  1922. if (getAiValue_VCE_ChamberPressure > ATM_PRESSURE)
  1923. {
  1924. SetAiValue($"{mod}.{VCE_ChamberPressure}", ATM_PRESSURE);
  1925. }
  1926. else if (getAiValue_VCE_ChamberPressure < 20)
  1927. {
  1928. SetAiValue($"{mod}.{VCE_ChamberPressure}", 20);
  1929. }
  1930. getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  1931. if (getAiValue_TM_ChamberPressure > ATM_PRESSURE)
  1932. {
  1933. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", ATM_PRESSURE);
  1934. }
  1935. else if (getAiValue_TM_ChamberPressure < 20)
  1936. {
  1937. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", 20);
  1938. }
  1939. IO.DI[$"{mod}.DI_VCE_VAC_SW"].Value = GetAiValue($"{mod}.{VCE_ChamberPressure}") < VAC_SW_PRESSURE;
  1940. // VAC switch
  1941. IO.DI[$"{mod}.DI_TM_VAC_SW"].Value = GetAiValue($"{mod}.{TM_AI_ChamberPressure}") < VAC_SW_PRESSURE;
  1942. }
  1943. void MonitorDEMFPressure()
  1944. {
  1945. string mod = "DETM";
  1946. string AI_Left_VCE_Pressure = "AI_Left_VCE_Pressure";
  1947. string AI_Right_VCE_Pressure = "AI_Right_VCE_Pressure";
  1948. string TM_AI_ChamberPressure = "AI_TM_Pressure";
  1949. DOAccessor TM_fast_pump_vlv = IO.DO[$"{mod}.DO_TM_Fast_Pump"];
  1950. DOAccessor TM_soft_pump_vlv = IO.DO[$"{mod}.DO_TM_Soft_Pump"];
  1951. DOAccessor TM_fast_Vent_vlv = IO.DO[$"{mod}.DO_TM_Fast_Vent"];
  1952. DOAccessor TM_soft_Vent_vlv = IO.DO[$"{mod}.DO_TM_Soft_Vent"];
  1953. DOAccessor DO_VCEA_Fast_Pump = IO.DO[$"{mod}.DO_VCEA_Fast_Pump"];
  1954. DOAccessor DO_VCEA_Soft_Pump = IO.DO[$"{mod}.DO_VCEA_Soft_Pump"];
  1955. DOAccessor DO_VCEB_Fast_Pump = IO.DO[$"{mod}.DO_VCEB_Fast_Pump"];
  1956. DOAccessor DO_VCEB_Soft_Pump = IO.DO[$"{mod}.DO_VCEB_Soft_Pump"];
  1957. DOAccessor DO_VCEA_Fast_Vent = IO.DO[$"{mod}.DO_VCEA_Fast_Vent"];
  1958. DOAccessor DO_VCEA_Soft_Vent = IO.DO[$"{mod}.DO_VCEA_Soft_Vent"];
  1959. DOAccessor DO_VCEB_Fast_Vent = IO.DO[$"{mod}.DO_VCEB_Fast_Vent"];
  1960. DOAccessor DO_VCEB_Soft_Vent = IO.DO[$"{mod}.DO_VCEB_Soft_Vent"];
  1961. float getAiValue_AI_Left_VCE_Pressure = GetAiValue($"{mod}.{AI_Left_VCE_Pressure}");
  1962. float getAiValue_AI_Right_VCE_Pressure = GetAiValue($"{mod}.{AI_Right_VCE_Pressure}");
  1963. float getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  1964. if (DO_VCEA_Fast_Pump.Value || DO_VCEA_Soft_Pump.Value)
  1965. {
  1966. if (getAiValue_AI_Left_VCE_Pressure > 10000)
  1967. {
  1968. SetAiValue($"{mod}.{AI_Left_VCE_Pressure}", GetAiValue($"{mod}.{AI_Left_VCE_Pressure}") - 30000);
  1969. }
  1970. else if (getAiValue_AI_Left_VCE_Pressure <= 10000)
  1971. {
  1972. SetAiValue($"{mod}.{AI_Left_VCE_Pressure}", GetAiValue($"{mod}.{AI_Left_VCE_Pressure}") - 1500);
  1973. }
  1974. }
  1975. if (DO_VCEB_Fast_Pump.Value || DO_VCEB_Soft_Pump.Value)
  1976. {
  1977. if (getAiValue_AI_Right_VCE_Pressure > 10000)
  1978. {
  1979. SetAiValue($"{mod}.{AI_Right_VCE_Pressure}", GetAiValue($"{mod}.{AI_Right_VCE_Pressure}") - 30000);
  1980. }
  1981. else if (getAiValue_AI_Right_VCE_Pressure <= 10000)
  1982. {
  1983. SetAiValue($"{mod}.{AI_Right_VCE_Pressure}", GetAiValue($"{mod}.{AI_Right_VCE_Pressure}") - 1500);
  1984. }
  1985. }
  1986. if (TM_fast_pump_vlv.Value || TM_soft_pump_vlv.Value)
  1987. {
  1988. if (getAiValue_TM_ChamberPressure > 10000)
  1989. {
  1990. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 30000);
  1991. }
  1992. else if (getAiValue_TM_ChamberPressure <= 10000)
  1993. {
  1994. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 1500);
  1995. }
  1996. }
  1997. if (DO_VCEA_Fast_Vent.Value || DO_VCEA_Soft_Vent.Value)
  1998. {
  1999. if (getAiValue_AI_Left_VCE_Pressure > 10000)
  2000. {
  2001. SetAiValue($"{mod}.{AI_Left_VCE_Pressure}", GetAiValue($"{mod}.{AI_Left_VCE_Pressure}") + 30000);
  2002. }
  2003. else if (getAiValue_AI_Left_VCE_Pressure <= 10000)
  2004. {
  2005. SetAiValue($"{mod}.{AI_Left_VCE_Pressure}", GetAiValue($"{mod}.{AI_Left_VCE_Pressure}") + 1500);
  2006. }
  2007. }
  2008. if (DO_VCEB_Fast_Vent.Value || DO_VCEB_Soft_Vent.Value)
  2009. {
  2010. if (getAiValue_AI_Right_VCE_Pressure > 10000)
  2011. {
  2012. SetAiValue($"{mod}.{AI_Right_VCE_Pressure}", GetAiValue($"{mod}.{AI_Right_VCE_Pressure}") + 30000);
  2013. }
  2014. else if (getAiValue_AI_Right_VCE_Pressure <= 10000)
  2015. {
  2016. SetAiValue($"{mod}.{AI_Right_VCE_Pressure}", GetAiValue($"{mod}.{AI_Right_VCE_Pressure}") + 1500);
  2017. }
  2018. }
  2019. if (TM_fast_Vent_vlv.Value || TM_soft_Vent_vlv.Value)
  2020. {
  2021. if (getAiValue_TM_ChamberPressure > 10000)
  2022. {
  2023. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 30000);
  2024. }
  2025. else if (getAiValue_TM_ChamberPressure <= 10000)
  2026. {
  2027. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 1500);
  2028. }
  2029. }
  2030. getAiValue_AI_Left_VCE_Pressure = GetAiValue($"{mod}.{AI_Left_VCE_Pressure}");
  2031. if (getAiValue_AI_Left_VCE_Pressure > ATM_PRESSURE)
  2032. {
  2033. SetAiValue($"{mod}.{AI_Left_VCE_Pressure}", ATM_PRESSURE);
  2034. }
  2035. else if (getAiValue_AI_Left_VCE_Pressure < 20)
  2036. {
  2037. SetAiValue($"{mod}.{AI_Left_VCE_Pressure}", 20);
  2038. }
  2039. getAiValue_AI_Right_VCE_Pressure = GetAiValue($"{mod}.{AI_Right_VCE_Pressure}");
  2040. if (getAiValue_AI_Right_VCE_Pressure > ATM_PRESSURE)
  2041. {
  2042. SetAiValue($"{mod}.{AI_Right_VCE_Pressure}", ATM_PRESSURE);
  2043. }
  2044. else if (getAiValue_AI_Right_VCE_Pressure < 20)
  2045. {
  2046. SetAiValue($"{mod}.{AI_Right_VCE_Pressure}", 20);
  2047. }
  2048. getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  2049. if (getAiValue_TM_ChamberPressure > ATM_PRESSURE)
  2050. {
  2051. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", ATM_PRESSURE);
  2052. }
  2053. else if (getAiValue_TM_ChamberPressure < 20)
  2054. {
  2055. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", 20);
  2056. }
  2057. // ATM switch
  2058. IO.DI[$"{mod}.DI_TM_ATM_SW"].Value = GetAiValue($"{mod}.{TM_AI_ChamberPressure}") > ATM_THRESHOLD;
  2059. // VAC switch
  2060. // ATM switch
  2061. IO.DI[$"{mod}.DI_VCEA_ATM_SW"].Value = GetAiValue($"{mod}.{AI_Left_VCE_Pressure}") > ATM_THRESHOLD;
  2062. // ATM switch
  2063. IO.DI[$"{mod}.DI_VCEB_ATM_SW"].Value = GetAiValue($"{mod}.{AI_Right_VCE_Pressure}") > ATM_THRESHOLD;
  2064. }
  2065. void MonitorMFKepler2200Pressure()
  2066. {
  2067. //if (SimulatorJetTM.CurrentTM == JetTMType.Venus)
  2068. //{
  2069. string LLA_AI_ChamberPressure = "AI_LLA_CHB_Pressure";
  2070. string LLB_AI_ChamberPressure = "AI_LLB_CHB_Pressure";
  2071. string TM_AI_ChamberPressure = "AI_TM_CHB_Pressure";
  2072. ModuleName mod = ModuleName.TM;
  2073. DOAccessor LLA_fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve_LLA"];
  2074. DOAccessor LLA_soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve_LLA"];
  2075. DOAccessor LLB_fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve_LLB"];
  2076. DOAccessor LLB_soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve_LLB"];
  2077. DOAccessor TM_fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve_TM"];
  2078. DOAccessor TM_soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve_TM"];
  2079. DOAccessor LLA_fast_Vent_vlv = IO.DO[$"{mod}.DO_Vent_Valve_LLA"];
  2080. DOAccessor LLA_soft_Vent_vlv = IO.DO[$"{mod}.DO_Purge_Valve_LLA"];
  2081. DOAccessor LLB_fast_Vent_vlv = IO.DO[$"{mod}.DO_Vent_Valve_LLB"];
  2082. DOAccessor LLB_soft_Vent_vlv = IO.DO[$"{mod}.DO_Purge_Valve_LLB"];
  2083. DOAccessor TM_fast_Vent_vlv = IO.DO[$"{mod}.DO_Vent_Valve_TM"];
  2084. DOAccessor TM_soft_Vent_vlv = IO.DO[$"{mod}.DO_Purge_Valve_TM"];
  2085. float getAiValue_LLA_ChamberPressure = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}");
  2086. float getAiValue_LLB_ChamberPressure = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}");
  2087. float getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  2088. if (LLA_fast_pump_vlv.Value || LLA_soft_pump_vlv.Value)
  2089. {
  2090. if (getAiValue_LLA_ChamberPressure > 10000)
  2091. {
  2092. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") - 30000);
  2093. }
  2094. else if (getAiValue_LLA_ChamberPressure <= 10000)
  2095. {
  2096. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") - 1500);
  2097. }
  2098. }
  2099. if (LLB_fast_pump_vlv.Value || LLB_soft_pump_vlv.Value)
  2100. {
  2101. if (getAiValue_LLB_ChamberPressure > 10000)
  2102. {
  2103. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") - 30000);
  2104. }
  2105. else if (getAiValue_LLB_ChamberPressure <= 10000)
  2106. {
  2107. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") - 1500);
  2108. }
  2109. }
  2110. if (TM_fast_pump_vlv.Value || TM_soft_pump_vlv.Value)
  2111. {
  2112. if (getAiValue_TM_ChamberPressure > 10000)
  2113. {
  2114. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 30000);
  2115. }
  2116. else if (getAiValue_TM_ChamberPressure <= 10000)
  2117. {
  2118. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 1500);
  2119. }
  2120. }
  2121. if (LLA_fast_Vent_vlv.Value || LLA_soft_Vent_vlv.Value)
  2122. {
  2123. if (getAiValue_LLA_ChamberPressure > 10000)
  2124. {
  2125. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") + 30000);
  2126. }
  2127. else if (getAiValue_LLA_ChamberPressure <= 10000)
  2128. {
  2129. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") + 1500);
  2130. }
  2131. }
  2132. if (LLB_fast_Vent_vlv.Value || LLB_soft_Vent_vlv.Value)
  2133. {
  2134. if (getAiValue_LLB_ChamberPressure > 10000)
  2135. {
  2136. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") + 30000);
  2137. }
  2138. else if (getAiValue_LLB_ChamberPressure <= 10000)
  2139. {
  2140. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") + 1500);
  2141. }
  2142. }
  2143. if (TM_fast_Vent_vlv.Value || TM_soft_Vent_vlv.Value)
  2144. {
  2145. if (getAiValue_TM_ChamberPressure > 10000)
  2146. {
  2147. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 30000);
  2148. }
  2149. else if (getAiValue_TM_ChamberPressure <= 10000)
  2150. {
  2151. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 1500);
  2152. }
  2153. }
  2154. getAiValue_LLA_ChamberPressure = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}");
  2155. if (getAiValue_LLA_ChamberPressure > ConvertPressureUnit.ConvertmTorrToPa(ATM_PRESSURE))
  2156. {
  2157. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", ConvertPressureUnit.ConvertmTorrToPa(ATM_PRESSURE));
  2158. }
  2159. else if (getAiValue_LLA_ChamberPressure < 3)
  2160. {
  2161. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", 3);
  2162. }
  2163. getAiValue_LLB_ChamberPressure = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}");
  2164. if (getAiValue_LLB_ChamberPressure > ConvertPressureUnit.ConvertmTorrToPa(ATM_PRESSURE))
  2165. {
  2166. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", ConvertPressureUnit.ConvertmTorrToPa(ATM_PRESSURE));
  2167. }
  2168. else if (getAiValue_LLB_ChamberPressure < 3)
  2169. {
  2170. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", 3);
  2171. }
  2172. getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  2173. if (getAiValue_TM_ChamberPressure > ConvertPressureUnit.ConvertmTorrToPa(ATM_PRESSURE))
  2174. {
  2175. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", ConvertPressureUnit.ConvertmTorrToPa(ATM_PRESSURE));
  2176. }
  2177. else if (getAiValue_TM_ChamberPressure < 3)
  2178. {
  2179. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", 3);
  2180. }
  2181. // ATM switch
  2182. IO.DI[$"{mod}.DI_TM_ATM_Switch"].Value = GetAiValue($"{mod}.{TM_AI_ChamberPressure}") > ConvertPressureUnit.ConvertmTorrToPa(ATM_THRESHOLD);
  2183. // VAC switch
  2184. IO.DI[$"{mod}.DI_TM_VAC_Switch"].Value = GetAiValue($"{mod}.{TM_AI_ChamberPressure}") < ConvertPressureUnit.ConvertmTorrToPa(VAC_SW_PRESSURE);
  2185. // ATM switch
  2186. IO.DI[$"{mod}.DI_LLA_ATM_Switch"].Value = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") > ConvertPressureUnit.ConvertmTorrToPa(ATM_THRESHOLD);
  2187. // VAC switch
  2188. IO.DI[$"{mod}.DI_LLA_VAC_Switch"].Value = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") < ConvertPressureUnit.ConvertmTorrToPa(VAC_SW_PRESSURE);
  2189. // ATM switch
  2190. IO.DI[$"{mod}.DI_LLB_ATM_Switch"].Value = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") > ConvertPressureUnit.ConvertmTorrToPa(ATM_THRESHOLD);
  2191. // VAC switch
  2192. IO.DI[$"{mod}.DI_LLB_VAC_Switch"].Value = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") < ConvertPressureUnit.ConvertmTorrToPa(VAC_SW_PRESSURE);
  2193. }
  2194. void MonitorMFKepler2300Pressure()
  2195. {
  2196. //if (SimulatorJetTM.CurrentTM == JetTMType.Venus)
  2197. //{
  2198. string LLA_AI_ChamberPressure = "AI_LLA_CHB_Pressure";
  2199. string LLB_AI_ChamberPressure = "AI_LLB_CHB_Pressure";
  2200. string TM_AI_ChamberPressure = "AI_TM_CHB_Pressure";
  2201. ModuleName mod = ModuleName.TM;
  2202. DOAccessor LLA_fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve_LLA"];
  2203. DOAccessor LLA_soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve_LLA"];
  2204. DOAccessor LLB_fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve_LLB"];
  2205. DOAccessor LLB_soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve_LLB"];
  2206. DOAccessor TM_fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve_TM"];
  2207. DOAccessor TM_soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve_TM"];
  2208. DOAccessor LLA_fast_Vent_vlv = IO.DO[$"{mod}.DO_Vent_Valve_LLA"];
  2209. DOAccessor LLA_soft_Vent_vlv = IO.DO[$"{mod}.DO_Purge_Valve_LLA"];
  2210. DOAccessor LLB_fast_Vent_vlv = IO.DO[$"{mod}.DO_Vent_Valve_LLB"];
  2211. DOAccessor LLB_soft_Vent_vlv = IO.DO[$"{mod}.DO_Purge_Valve_LLB"];
  2212. DOAccessor TM_fast_Vent_vlv = IO.DO[$"{mod}.DO_Vent_Valve_TM"];
  2213. DOAccessor TM_soft_Vent_vlv = IO.DO[$"{mod}.DO_Purge_Valve_TM"];
  2214. float getAiValue_LLA_ChamberPressure = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}");
  2215. float getAiValue_LLB_ChamberPressure = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}");
  2216. float getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  2217. if (LLA_fast_pump_vlv.Value || LLA_soft_pump_vlv.Value)
  2218. {
  2219. if (getAiValue_LLA_ChamberPressure > 10000)
  2220. {
  2221. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") - 30000);
  2222. }
  2223. else if (getAiValue_LLA_ChamberPressure <= 10000)
  2224. {
  2225. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") - 1500);
  2226. }
  2227. }
  2228. if (LLB_fast_pump_vlv.Value || LLB_soft_pump_vlv.Value)
  2229. {
  2230. if (getAiValue_LLB_ChamberPressure > 10000)
  2231. {
  2232. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") - 30000);
  2233. }
  2234. else if (getAiValue_LLB_ChamberPressure <= 10000)
  2235. {
  2236. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") - 1500);
  2237. }
  2238. }
  2239. if (TM_fast_pump_vlv.Value || TM_soft_pump_vlv.Value)
  2240. {
  2241. if (getAiValue_TM_ChamberPressure > 10000)
  2242. {
  2243. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 30000);
  2244. }
  2245. else if (getAiValue_TM_ChamberPressure <= 10000)
  2246. {
  2247. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 1500);
  2248. }
  2249. }
  2250. if (LLA_fast_Vent_vlv.Value || LLA_soft_Vent_vlv.Value)
  2251. {
  2252. if (getAiValue_LLA_ChamberPressure > 10000)
  2253. {
  2254. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") + 30000);
  2255. }
  2256. else if (getAiValue_LLA_ChamberPressure <= 10000)
  2257. {
  2258. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") + 1500);
  2259. }
  2260. }
  2261. if (LLB_fast_Vent_vlv.Value || LLB_soft_Vent_vlv.Value)
  2262. {
  2263. if (getAiValue_LLB_ChamberPressure > 10000)
  2264. {
  2265. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") + 30000);
  2266. }
  2267. else if (getAiValue_LLB_ChamberPressure <= 10000)
  2268. {
  2269. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") + 1500);
  2270. }
  2271. }
  2272. if (TM_fast_Vent_vlv.Value || TM_soft_Vent_vlv.Value)
  2273. {
  2274. if (getAiValue_TM_ChamberPressure > 10000)
  2275. {
  2276. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 30000);
  2277. }
  2278. else if (getAiValue_TM_ChamberPressure <= 10000)
  2279. {
  2280. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 1500);
  2281. }
  2282. }
  2283. getAiValue_LLA_ChamberPressure = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}");
  2284. if (getAiValue_LLA_ChamberPressure > ATM_PRESSURE)
  2285. {
  2286. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", ATM_PRESSURE);
  2287. }
  2288. else if (getAiValue_LLA_ChamberPressure < 20)
  2289. {
  2290. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", 20);
  2291. }
  2292. getAiValue_LLB_ChamberPressure = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}");
  2293. if (getAiValue_LLB_ChamberPressure > ATM_PRESSURE)
  2294. {
  2295. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", ATM_PRESSURE);
  2296. }
  2297. else if (getAiValue_LLB_ChamberPressure < 20)
  2298. {
  2299. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", 20);
  2300. }
  2301. getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  2302. if (getAiValue_TM_ChamberPressure > ATM_PRESSURE)
  2303. {
  2304. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", ATM_PRESSURE);
  2305. }
  2306. else if (getAiValue_TM_ChamberPressure < 20)
  2307. {
  2308. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", 20);
  2309. }
  2310. // ATM switch
  2311. IO.DI[$"{mod}.DI_TM_ATM_Switch"].Value = GetAiValue($"{mod}.{TM_AI_ChamberPressure}") > ATM_THRESHOLD;
  2312. // VAC switch
  2313. IO.DI[$"{mod}.DI_TM_VAC_Switch"].Value = GetAiValue($"{mod}.{TM_AI_ChamberPressure}") < VAC_SW_PRESSURE;
  2314. // ATM switch
  2315. IO.DI[$"{mod}.DI_LLA_ATM_Switch"].Value = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") > ATM_THRESHOLD;
  2316. // VAC switch
  2317. IO.DI[$"{mod}.DI_LLA_VAC_Switch"].Value = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") < VAC_SW_PRESSURE;
  2318. // ATM switch
  2319. IO.DI[$"{mod}.DI_LLB_ATM_Switch"].Value = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") > ATM_THRESHOLD;
  2320. // VAC switch
  2321. IO.DI[$"{mod}.DI_LLB_VAC_Switch"].Value = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") < VAC_SW_PRESSURE;
  2322. // }
  2323. //else if (SimulatorJetTM.CurrentTM == JetTMType.VenusSE)
  2324. //{
  2325. // ModuleName mod = ModuleName.TM;
  2326. // //float getAiValue_LLA_ChamberPressure = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}");
  2327. // //float getAiValue_LLB_ChamberPressure = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}");
  2328. // //float getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  2329. //}
  2330. }
  2331. void SetAiValue(string name, float value)
  2332. {
  2333. byte[] flow = BitConverter.GetBytes(value);
  2334. short high1 = BitConverter.ToInt16(flow, 0);
  2335. short low1 = BitConverter.ToInt16(flow, 2);
  2336. IO.AI[name].Buffer[IO.AI[name].Index] = BitConverter.ToInt16(flow, 0);
  2337. IO.AI[name].Buffer[IO.AI[name].Index + 1] = BitConverter.ToInt16(flow, 2);
  2338. byte[] high = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index]);
  2339. byte[] low = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index + 1]);
  2340. float readback = BitConverter.ToSingle(new[] { high[0], high[1], low[0], low[1] }, 0);
  2341. }
  2342. float GetAiValue(string name)
  2343. {
  2344. byte[] high = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index]);
  2345. byte[] low = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index + 1]);
  2346. float flow = BitConverter.ToSingle(new[] { high[0], high[1], low[0], low[1] }, 0);
  2347. return flow;
  2348. }
  2349. float GetAoValue(string name)
  2350. {
  2351. byte[] high = BitConverter.GetBytes(IO.AO[name].Buffer[IO.AO[name].Index]);
  2352. byte[] low = BitConverter.GetBytes(IO.AO[name].Buffer[IO.AO[name].Index + 1]);
  2353. float flow = BitConverter.ToSingle(new[] { high[0], high[1], low[0], low[1] }, 0);
  2354. return flow;
  2355. }
  2356. void MonitorTemperature(ModuleName mod)
  2357. {
  2358. //IO.DI[$"{mod}.DI_Substrate_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_Substrate_Heater_On"].Value;
  2359. IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_Forline_Heater_On"].Value;
  2360. IO.DI[$"{mod}.DI_CHB_Wall_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_CHB_Wall_Heater_On"].Value;
  2361. IO.DI[$"{mod}.DI_Foreline_TC_Deviation_out_of_range"].Value = false;
  2362. IO.DI[$"{mod}.DI_Substrate_TC_Deviation_out_of_range"].Value = false;
  2363. // 底座
  2364. //if (IO.DO[$"{mod}.DO_Substrate_Heater_On"].Value &&
  2365. // GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") < GetAoValue($"{mod}.AO_Substrate_Temperature_Setpoint"))
  2366. //{
  2367. // SetAiValue($"{mod}.AI_Substrate_Control_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") + _rd.Next(1, 2));
  2368. // SetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp") + _rd.Next(1, 2));
  2369. //}
  2370. //else if (IO.DO[$"{mod}.DO_Substrate_Heater_On"].Value &&
  2371. // GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") > GetAoValue($"{mod}.AO_Substrate_Temperature_Setpoint"))
  2372. //{
  2373. // SetAiValue($"{mod}.AI_Substrate_Control_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") - _rd.Next(1, 2));
  2374. // SetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp") - _rd.Next(1, 2));
  2375. //}
  2376. // Foreline
  2377. if (IO.DO[$"{mod}.DO_Forline_Heater_On"].Value &&
  2378. GetAiValue($"{mod}.AI_Fline_Control_TC_Temp") < GetAoValue($"{mod}.AO_Foreline_Temperature_Setpoint"))
  2379. {
  2380. SetAiValue($"{mod}.AI_Fline_Control_TC_Temp", GetAiValue($"{mod}.AI_Fline_Control_TC_Temp") + _rd.Next(1, 2));
  2381. SetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp") + _rd.Next(1, 2));
  2382. }
  2383. else if (IO.DO[$"{mod}.DO_Forline_Heater_On"].Value &&
  2384. GetAiValue($"{mod}.AI_Fline_Control_TC_Temp") > GetAoValue($"{mod}.AO_Foreline_Temperature_Setpoint"))
  2385. {
  2386. SetAiValue($"{mod}.AI_Fline_Control_TC_Temp", GetAiValue($"{mod}.AI_Fline_Control_TC_Temp") - _rd.Next(1, 2));
  2387. SetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp") - _rd.Next(1, 2));
  2388. }
  2389. // Wall
  2390. if (IO.DO[$"{mod}.DO_CHB_Wall_Heater_On"].Value &&
  2391. GetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp") < GetAoValue($"{mod}.AO_CHB_Wall_Temperature_Setpoint"))
  2392. {
  2393. SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp") + _rd.Next(1, 2));
  2394. SetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp") + _rd.Next(1, 2));
  2395. }
  2396. else if (IO.DO[$"{mod}.DO_CHB_Wall_Heater_On"].Value &&
  2397. GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") > GetAoValue($"{mod}.AO_CHB_Wall_Temperature_Setpoint"))
  2398. {
  2399. SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp") - _rd.Next(1, 2));
  2400. SetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp") - _rd.Next(1, 2));
  2401. }
  2402. }
  2403. void MonitorGas(ModuleName mod)
  2404. {
  2405. // gas
  2406. this.SimulateMFC(mod, 1);
  2407. this.SimulateMFC(mod, 2);
  2408. this.SimulateMFC(mod, 3);
  2409. this.SimulateMFC(mod, 4);
  2410. this.SimulateMFC(mod, 5);
  2411. this.SimulateMFC(mod, 6);
  2412. this.SimulateMFC(mod, 7);
  2413. this.SimulateMFC(mod, 8);
  2414. this.SimulateN2(mod);
  2415. }
  2416. void MonitorSEGas(ModuleName mod)
  2417. {
  2418. SimulateMFC(mod, 1);
  2419. SimulateMFC(mod, 2);
  2420. SimulateMFC(mod, 3);
  2421. SimulateMFC(mod, 4);
  2422. SimulateMFC(mod, 5);
  2423. SimulateMFC(mod, 6);
  2424. SimulateMFC(mod, 7);
  2425. SimulateMFC(mod, 8);
  2426. SimulateMFC(mod, 9);
  2427. SimulateMFC(mod, 10);
  2428. SimulateMFC(mod, 11);
  2429. SimulateMFC(mod, 12);
  2430. }
  2431. void MonitorDEGas(ModuleName mod)
  2432. {
  2433. SimulateMFC(mod, 1);
  2434. SimulateMFC(mod, 2);
  2435. SimulateMFC(mod, 3);
  2436. SimulateMFC(mod, 4);
  2437. SimulateMFC(mod, 5);
  2438. SimulateMFC(mod, 6);
  2439. SimulateMFC(mod, 7);
  2440. SimulateMFC(mod, 8);
  2441. SimulateMFC(mod, 9);
  2442. SimulateMFC(mod, 10);
  2443. SimulateMFC(mod, 11);
  2444. SimulateMFC(mod, 12);
  2445. }
  2446. private void SimulateMFC(ModuleName mod, byte gasNum)
  2447. {
  2448. var sp = GetAoValue($"{mod}.AO_MFC{gasNum}_Flow_Setpoint");
  2449. //var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  2450. SetAiValue($"{mod}.AI_MFC{gasNum}_Flow", (float)sp);
  2451. }
  2452. private void SimulateN2(ModuleName mod)
  2453. {
  2454. var sp = GetAoValue($"{mod}.AO_Turbo_Pump_N2_Flow_Setpoint");
  2455. //var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  2456. SetAiValue($"{mod}.AI_Turbo_Pump_N2_Flow", (float)sp);
  2457. }
  2458. private void SimulateSEHe(ModuleName mod)
  2459. {
  2460. var sp = GetAoValue($"{mod}.AO_ESC_He_Pressure_Setpoint");
  2461. var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  2462. SetAiValue($"{mod}.AI_He_Flow", (float)mock_fb);
  2463. }
  2464. private void SimulateDEHe(ModuleName mod)
  2465. {
  2466. var sp = GetAoValue($"{mod}.AO_ESC_He_Pressure_Setpoint1");
  2467. var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  2468. SetAiValue($"{mod}.AI_MFC_He1_Flow", (float)mock_fb);
  2469. }
  2470. private void SimulateHe(ModuleName mod)
  2471. {
  2472. var sp = GetAoValue($"{mod}.AO_He_Flow_Setpoint");
  2473. var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  2474. SetAiValue($"{mod}.AI_ESC_He_Flow", (float)mock_fb);
  2475. }
  2476. void MonitorRF(ModuleName mod)
  2477. {
  2478. // RF generator
  2479. var sp = GetAoValue($"{mod}.AO_Generator_Power_Setpoint");
  2480. var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  2481. //var mock_sp = _rd.Next(sp - 3, sp + 3);
  2482. SetAiValue($"{mod}.AI_Generator_Forward_Power", (float)mock_fb);
  2483. //IO.DI[$"{mod}.DI_Generator_Power_Status"].Value = IO.DO[$"{mod}.DO_Generator_Power_ON"].Value;
  2484. }
  2485. void MonitorIOPumpCtrl(ModuleName mod)
  2486. {
  2487. if (IO.DO[$"{mod}.DO_Pump_Run"].Value) IO.DI[$"{mod}.DI_Dry_Pump_Running"].Value = true;
  2488. if (IO.DO[$"{mod}.DO_Pump_Stop"].Value) IO.DI[$"{mod}.DI_Dry_Pump_Running"].Value = false;
  2489. }
  2490. void MonitorIOHighTemperatureHeater(ModuleName mod)
  2491. {
  2492. if (IO.DO[$"{mod}.DO_Lift_Servo_Go_Position1"].Value)
  2493. {
  2494. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = true;
  2495. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = false;
  2496. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = false;
  2497. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position4_Complete"].Value = false;
  2498. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position5_Complete"].Value = false;
  2499. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = false;
  2500. }
  2501. if (IO.DO[$"{mod}.DO_Lift_Servo_Go_Position2"].Value)
  2502. {
  2503. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = false;
  2504. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = true;
  2505. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = false;
  2506. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position4_Complete"].Value = false;
  2507. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position5_Complete"].Value = false;
  2508. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = false;
  2509. }
  2510. if (IO.DO[$"{mod}.DO_Lift_Servo_Go_Position3"].Value)
  2511. {
  2512. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = false;
  2513. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = false;
  2514. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = true;
  2515. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position4_Complete"].Value = false;
  2516. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position5_Complete"].Value = false;
  2517. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = false;
  2518. }
  2519. if (IO.DO[$"{mod}.DO_Lift_Servo_Go_Position4"].Value)
  2520. {
  2521. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = false;
  2522. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = false;
  2523. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = false;
  2524. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position4_Complete"].Value = true;
  2525. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position5_Complete"].Value = false;
  2526. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = false;
  2527. }
  2528. if (IO.DO[$"{mod}.DO_Lift_Servo_Go_Position5"].Value)
  2529. {
  2530. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = false;
  2531. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = false;
  2532. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = false;
  2533. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position4_Complete"].Value = false;
  2534. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position5_Complete"].Value = true;
  2535. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = false;
  2536. }
  2537. if (IO.DO[$"{mod}.DO_Lift_Servo_Origin"].Value)
  2538. {
  2539. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = false;
  2540. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = false;
  2541. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = false;
  2542. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position4_Complete"].Value = false;
  2543. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position5_Complete"].Value = false;
  2544. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = true;
  2545. }
  2546. IO.DI[$"{mod}.DI_CHB_M-HT_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_CHB_M-HT_Heater_On"].Value;
  2547. var sp = GetAoValue($"{mod}.AO_CHB_M-HT_Temperature_Setpoint");
  2548. var mock_fb = _rd.Next((int)sp - 1, (int)sp + 1) + _rd.NextDouble();
  2549. //var mock_sp = _rd.Next(sp - 3, sp + 3);
  2550. SetAiValue($"{mod}.AI_CHB_M-HT_Control_TC_Temp", (float)mock_fb);
  2551. }
  2552. void MonitorKepler2200Heater(ModuleName mod)
  2553. {
  2554. var pendulumHeaterSetpoint = GetAoValue($"{mod}.AO_P_Valve_Temperature_Setpoint");
  2555. SetAiValue($"{mod}.AI_P_Valve_Control_TC_Temp", (float)pendulumHeaterSetpoint);
  2556. }
  2557. public void Terminate()
  2558. {
  2559. _thread.Stop();
  2560. }
  2561. public void SetCoolantOutletTemp(string module, int Temp)
  2562. {
  2563. //if (SimulatorJetChamber.CurrentChamber == JetChamber.Venus)
  2564. //{
  2565. //SetAiValue($"{module}.AI_Coolant_Outlet_Temp", Temp);
  2566. //}
  2567. }
  2568. }
  2569. }