Kepler-Release/Venus/Venus_RT/Modules/PMs/LoadLockLeakCheckRoutine.cs

//using Aitex.Core.RT.Routine;
//using Aitex.Core.RT.SCCore;
//using Venus_RT.Devices;
//using MECF.Framework.Common.Routine;
//using Venus_Core;
//namespace Venus_RT.Modules.PMs
//{
//    class LoadLockLeakCheckRoutine : PMRoutineBase, IRoutine
//    {
//        private enum LeakCheckStep
//        {
//            kCloseValves,
//            kPumpToBasePressure,
//            kPumpingDelay,
//            kLeakCheckDelay,
//            kLeakCheckCalc,
//            kPumpToBasePressure_2,
//            kEnd,
//        }
//        public double LeakRate { get; private set; }

//        private int _basePressureLL = 100;
//        private int _leakcheckPumpTimeLL = 180;
//        private int _leakcheckWaitTimeLL = 300;

//        private double _startPressure = 0;
//        private double _endPressure = 0;
//        private double _leakRate = 30.0;


//        public LoadLockLeakCheckRoutine(JetPMBase chamber) : base(chamber)
//        {
//            Name = "Loadlock Leakcheck";
//        }

//        public RState Start(params object[] objs)
//        {
//            if (CheckLidLoadLock() &&
//                CheckSlitDoor() &&
//                CheckDryPump())
//            {
//                Reset();

//                _chamber.CloseValves();
//                _basePressureLL = SC.GetValue<int>($"{Module}.Pump.LoadLockPumpBasePressure");
//                _leakcheckPumpTimeLL = SC.GetValue<int>($"{Module}.Pump.LoadLockLeakCheckPumpTime");
//                _leakcheckWaitTimeLL = SC.GetValue<int>($"{Module}.Pump.LoadLockLeakCheckWaitTime");
//                _leakRate = SC.GetValue<double>($"{Module}.Pump.LoadLockLeakRate");

//                return Runner.Start(Module, Name);
//            }
//            return RState.Failed;
//        }

//        public RState Monitor()
//        {
//            Runner.Delay(LeakCheckStep.kCloseValves,       _delay_1s)
//                .Run(LeakCheckStep.kPumpToBasePressure,    HOFs.WrapAction(_chamber.OpenValve, ValveType.LoadlockPumping, true),   () => { return _chamber.LoadlockPressure <= _basePressureLL; })
//                .Delay(LeakCheckStep.kPumpingDelay,        _leakcheckPumpTimeLL * 1000)
//                .Run(LeakCheckStep.kLeakCheckDelay,        StartLeakCheck,                                                         _leakcheckWaitTimeLL * 1000)
//                .Run(LeakCheckStep.kLeakCheckCalc,         CalcLeakCheckResult,                                                    _delay_50ms)
//                .Run(LeakCheckStep.kPumpToBasePressure_2,  HOFs.WrapAction(_chamber.OpenValve, ValveType.LoadlockPumping, true),   () => { return _chamber.LoadlockPressure <= _basePressureLL; })
//                .End(LeakCheckStep.kEnd,                   LeakCheckEnd,                                                           _delay_50ms);

//            return Runner.Status;
//        }

//        public void Abort()
//        {
//            CloseAllValves();
//        }

//        bool StartLeakCheck()
//        {
//            _chamber.OpenValve(ValveType.LoadlockPumping, false);
//            _startPressure = _chamber.LoadlockPressure;

//            Notify($"LoadLock压力开始值 {_startPressure} mt");
//            return true;
//        }

//        bool CalcLeakCheckResult()
//        {
//            _endPressure = _chamber.LoadlockPressure;

//            LeakRate = (_endPressure - _startPressure) * 60.0 / _leakcheckWaitTimeLL;

//            if(LeakRate < _leakRate)
//            {
//                Notify($"LoadLock Leakcheck完成， 压力结束值: {_startPressure} mt， 漏率：{LeakRate} mt/min");
//            }
//            else
//            {
//                Stop($"LoadLock Leakcheck失败， 腔体漏率 [{LeakRate}] mt/min, 高于 [{_leakRate}] mt/min");
//            }
            
//            return true;
//        }

//        bool LeakCheckEnd()
//        {
//            // 临时版试验机， 关Pumping Valve, 正式版保持 Pumping Valve 打开
//            _chamber.OpenValve(ValveType.LoadlockPumping, false);
//            return true;
//        }
//    }
//}