| 123456789101112131415161718192021222324252627282930313233343536373839404142434445464748495051525354555657585960616263646566676869707172737475767778798081828384858687888990919293949596979899100101102103104105106107108109110111112113114115116117118119120121122123124125126127128129 | //using Aitex.Core.RT.Routine;//using Aitex.Core.RT.SCCore;//using Venus_RT.Devices;//using Aitex.Core.Util;//using MECF.Framework.Common.Equipment;//using MECF.Framework.Common.SubstrateTrackings;//using System.Diagnostics;//using System.Collections.Generic;//using Venus_Core;//using Venus_RT.Modules;//namespace Venus_RT.Modules.PMs//{//    class LLPlaceRoutine : PMRoutineBase, IRoutine//    {//        private enum LLPlaceStep//        {//            kPrepareTransfer,//            kExtend,//            KDelay2s,//            kPinUp,//            kRetract,//            kPostTransfer,//            kOpenFastPump,//        }//        private int _prepareTransferTimeout = 120;//        private int _transferWaferTimeout = 120;//        public LLPlaceRoutine(JetPMBase chamber) : base(chamber)//        {//            Name = "PlaceWafer";//        }//        public RState Start(params object[] objs)//        {//            _prepareTransferTimeout = SC.GetValue<int>($"{Module}.PrepareTransferTimeout");//            _transferWaferTimeout = SC.GetValue<int>($"{Module}.TransferWaferTimeout");//            if (WaferManager.Instance.CheckHasWafer(ModuleName.PMA, 0))//            {//                Stop("腔体里面有 Wafer,不能执行放片动作");//                return RState.Failed;//            }//            if (WaferManager.Instance.CheckNoWafer(ModuleName.LLA, 0))//            {//                Stop("Loadlock 里面没有 Wafer,不能执行放片动作");//                return RState.Failed;//            }//            if (RouteManager.IsATMMode)//            {//                if (!_chamber.IsATM || !_chamber.IsATMLoadlock)//                {//                    Stop("腔体非大气状态,请先执行充气动作");//                    return RState.Failed;//                }//            }//            else//            {//                if (!_chamber.IsVAC || !_chamber.IsVACLoadLock)//                {//                    Stop("腔体非真空状态,请先执行抽真空动作");//                    return RState.Failed;//                }//            }//            _chamber.OpenValve(ValveType.FastPump, false);//            _chamber.OpenValve(ValveType.LoadlockPumping, false);//            Reset();//            return Runner.Start(Module, Name);//        }//        public RState Monitor()//        {//            Runner.Run(LLPlaceStep.kPrepareTransfer,   PrepareTransfer,        IsPrepareReady,                                     _prepareTransferTimeout * 1000)//                .Run(LLPlaceStep.kExtend,              _chamber.ExtendWafer,   () => { return _chamber.IsLoadlockArmExtend; },     _transferWaferTimeout * 1000)//                .Delay(LLPlaceStep.KDelay2s, 2000)//                .Run(LLPlaceStep.kPinUp,               SetLiftPinUp,           () => { return _chamber.CheckLiftUp(); })//                .Run(LLPlaceStep.kRetract,             _chamber.RetractWafer,  () => { return _chamber.IsLoadlockArmRetract; },    _transferWaferTimeout * 1000)//                .Run(LLPlaceStep.kPostTransfer,        PostTransfer,           IsPostTransferReady,                                _prepareTransferTimeout * 1000)//                .End(LLPlaceStep.kOpenFastPump,        OpenFastPump,           _delay_50ms);//            return Runner.Status;//        }//        private bool PrepareTransfer()//        {//            _chamber.SetLiftPin(MovementPosition.Down, out _);//            _chamber.SetSlitDoor(true, out _);//            return true;//        }//        private bool IsPrepareReady()//        {//            return _chamber.CheckLiftDown() && _chamber.CheckSlitDoorOpen();//        }//        private bool PostTransfer()//        {//            WaferManager.Instance.WaferMoved(ModuleName.LLA, 0, ModuleName.PMA, 0);//            _chamber.SetLiftPin(MovementPosition.Down, out _);//            _chamber.SetSlitDoor(false, out _);//            return true;//        }//        private bool IsPostTransferReady()//        {//            return _chamber.CheckLiftDown() && _chamber.CheckSlitDoorClose();//        }//        private bool SetLiftPinUp()//        {//            return _chamber.SetLiftPin(MovementPosition.Up, out _);//        }//        private bool OpenFastPump()//        {//            if (!RouteManager.IsATMMode)//                _chamber.OpenValve(ValveType.FastPump, true);//            return true;//        }//        public void Abort()//        {//        }//    }//}
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