PumpDownRoutine.cs 9.9 KB

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  1. using System;
  2. using Aitex.Core.RT.Routine;
  3. using Aitex.Core.RT.SCCore;
  4. using Venus_RT.Devices;
  5. using MECF.Framework.Common.Routine;
  6. using Venus_Core;
  7. using Aitex.Core.RT.Log;
  8. namespace Venus_RT.Modules.PMs
  9. {
  10. class PumpDownRoutine : PMRoutineBase, IRoutine
  11. {
  12. private enum PumpStep
  13. {
  14. kDelay_2s,
  15. kCloseISOValve,
  16. kSoftPump,
  17. kFastPump,
  18. kHe2ExDelay,
  19. kPVHe2,
  20. kISOValve,
  21. kTurboN2Purge,
  22. kVATValve,
  23. kOpenTurboPumpPurgeGasFinal,
  24. kOpenTurboPump,
  25. kGasFinal,
  26. kFinalStep,
  27. kEnd,
  28. }
  29. //private int _ventTime;
  30. private int _pump_delay = 5000;
  31. private int _roughPumpPressure = 75000;
  32. private int _vHe2FlowPressure = 200;
  33. private int _basePressure = 10;
  34. private JetChamber jetChamber = JetChamber.None;
  35. //private bool needsoft = true;
  36. public PumpDownRoutine(JetPMBase chamber) : base(chamber)
  37. {
  38. jetChamber = (JetChamber)SC.GetValue<int>($"{chamber.Name}.ChamberType");
  39. Name = "PumpDown";
  40. //if (jetChamber == JetChamber.VenusDE)
  41. //{
  42. // needsoft = false;
  43. //}
  44. }
  45. public RState Start(params object[] objs)
  46. {
  47. if (CheckLid() &&
  48. CheckSlitDoor())
  49. {
  50. Reset();
  51. _chamber.CloseValves();
  52. _roughPumpPressure = SC.GetValue<int>($"{Module}.Pump.PumpCrossingPressure");
  53. _pump_delay = SC.GetValue<int>($"{Module}.Pump.PumpValveDelay") * 1000;
  54. _basePressure = (objs.Length >= 1) ? Convert.ToInt32(objs[0]) : SC.GetValue<int>($"{Module}.Pump.PumpBasePressure");
  55. _chamber.OpenValve(ValveType.PVN22, true);
  56. _chamber.OpenValve(ValveType.TurboPumpPumping, true);
  57. _chamber.TurnPendulumValve(false);
  58. _vHe2FlowPressure = SC.GetValue<int>($"{Module}.Pump.PumpVHe2FlowPressure");
  59. //前端压力值高于某个数值
  60. if (!_chamber.IsPumpRunning || _chamber.ForelinePressure > 500)
  61. {
  62. LOG.Write(eEvent.ERR_PM,Module, $"Cannot start pumpdown, drypump running:{_chamber.IsPumpRunning}, ForelinePressure:{_chamber.ForelinePressure}");
  63. return RState.Failed;
  64. }
  65. return Runner.Start(Module, Name);
  66. }
  67. return RState.Failed;
  68. }
  69. public RState Monitor()
  70. {
  71. switch (jetChamber)
  72. {
  73. //case JetChamber.Venus:
  74. case JetChamber.VenusSE:
  75. Runner.Delay(PumpStep.kDelay_2s, _delay_2s)
  76. .Run(PumpStep.kCloseISOValve, HOFs.WrapAction(_chamber.OpenValve, ValveType.TurboPumpPumping, false), _delay_2s)
  77. .Run(PumpStep.kSoftPump, HOFs.WrapAction(_chamber.OpenValve, ValveType.SoftPump, true), () => { return _chamber.ChamberPressure < _roughPumpPressure; })
  78. .Run(PumpStep.kFastPump, OpenFastPump, () => { return _chamber.ChamberPressure < _vHe2FlowPressure; })
  79. .Run(PumpStep.kPVHe2, OpenHe2Valve, _delay_2s)
  80. .Run(PumpStep.kISOValve, OpenISOValve, _delay_2s)
  81. .Run(PumpStep.kVATValve, OpenVATValve, _delay_5s)
  82. .Run(PumpStep.kOpenTurboPumpPurgeGasFinal, OpenTurboPumpPurgeGasFinalValve, _delay_3s)
  83. .Run(PumpStep.kFinalStep, FinalStep, () => { return _chamber.ChamberPressure < _basePressure; })
  84. .End(PumpStep.kEnd, NullFun, _delay_1s);
  85. break;
  86. case JetChamber.Kepler2300:
  87. case JetChamber.Kepler2200A:
  88. case JetChamber.Kepler2200B:
  89. Runner.Delay(PumpStep.kDelay_2s, _delay_2s)
  90. .Run(PumpStep.kCloseISOValve, HOFs.WrapAction(_chamber.OpenValve, ValveType.TurboPumpPumping, false), _delay_2s)
  91. .Run(PumpStep.kSoftPump, HOFs.WrapAction(_chamber.OpenValve, ValveType.SoftPump, true), () => { return _chamber.ChamberPressure < _roughPumpPressure; })
  92. .Run(PumpStep.kFastPump, OpenFastPump, () => { return _chamber.ChamberPressure < _vHe2FlowPressure; })
  93. .Run(PumpStep.kISOValve, OpenISOValve, _delay_2s)
  94. .Run(PumpStep.kVATValve, OpenVATValve, _delay_5s)
  95. .Run(PumpStep.kOpenTurboPumpPurgeGasFinal, OpenTurboPumpPurgeGasFinalValve, _delay_3s)
  96. .Run(PumpStep.kFinalStep, FinalStep, () => { return _chamber.ChamberPressure < _basePressure; })
  97. .End(PumpStep.kEnd, NullFun, _delay_1s);
  98. break;
  99. case JetChamber.VenusDE:
  100. Runner.Delay(PumpStep.kDelay_2s, _delay_2s)
  101. .Run(PumpStep.kCloseISOValve, HOFs.WrapAction(_chamber.OpenValve, ValveType.TurboPumpPumping, false), _delay_2s)
  102. .Run(PumpStep.kFastPump, OpenDEFastPump, () => { return _chamber.ChamberPressure < _vHe2FlowPressure; })
  103. .Delay(PumpStep.kHe2ExDelay, 3000)
  104. .Run(PumpStep.kPVHe2, OpenHe2Valve, _delay_5s)
  105. .Run(PumpStep.kISOValve, OpenISOValve, _delay_5s)
  106. .Run(PumpStep.kOpenTurboPump, OpenTurboValve, _delay_3s)
  107. .Run(PumpStep.kVATValve, OpenVATValve, _delay_2s)
  108. .Run(PumpStep.kOpenTurboPump, OpenGuageGasFinalValve, _delay_3s)
  109. .Run(PumpStep.kFinalStep, FinalStep, () => { return _chamber.ChamberPressure < _basePressure; })
  110. .End(PumpStep.kEnd, NullFun, _delay_1s);
  111. break;
  112. }
  113. //if (jetChamber == JetChamber.VenusDE)
  114. //{
  115. // Runner.Delay(PumpStep.kDelay_2s, _delay_2s)
  116. // .Run(PumpStep.kCloseISOValve, HOFs.WrapAction(_chamber.OpenValve, ValveType.TurboPumpPumping, false), _delay_2s)
  117. // .Run(PumpStep.kPVHe2, OpenHe2Valve, _delay_5s)
  118. // .Run(PumpStep.kFastPump, OpenFastPump, () => { return _chamber.ChamberPressure < _vHe2FlowPressure; })
  119. // .Run(PumpStep.kISOValve, OpenISOValve, _delay_5s)
  120. // .Run(PumpStep.kOpenTurboPump, OpenTurboValve, _delay_3s)
  121. // .Run(PumpStep.kVATValve, OpenVATValve, _delay_2s)
  122. // .Run(PumpStep.kOpenTurboPump, OpenGuageGasFinalValve, _delay_3s)
  123. // .Run(PumpStep.kFinalStep, FinalStep, () => { return _chamber.ChamberPressure < _basePressure; })
  124. // .End(PumpStep.kEnd, NullFun, _delay_1s);
  125. //}
  126. //else
  127. //{
  128. // Runner.Delay(PumpStep.kDelay_2s, _delay_2s)
  129. // .Run(PumpStep.kCloseISOValve, HOFs.WrapAction(_chamber.OpenValve, ValveType.TurboPumpPumping, false), _delay_2s)
  130. // .RunIf(PumpStep.kSoftPump, needsoft, HOFs.WrapAction(_chamber.OpenValve, ValveType.SoftPump, true), () => { return _chamber.ChamberPressure < _roughPumpPressure; })
  131. // .Run(PumpStep.kFastPump, OpenFastPump, () => { return _chamber.ChamberPressure < _vHe2FlowPressure; })
  132. // .Run(PumpStep.kPVHe2, OpenHe2Valve, _delay_2s)
  133. // .Run(PumpStep.kISOValve, OpenISOValve, _delay_2s)
  134. // .Run(PumpStep.kVATValve, OpenVATValve, _delay_5s)
  135. // .Run(PumpStep.kOpenTurboPumpPurgeGasFinal, OpenTurboPumpPurgeGasFinalValve, _delay_3s)
  136. // .Run(PumpStep.kFinalStep, FinalStep, () => { return _chamber.ChamberPressure < _basePressure; })
  137. // .End(PumpStep.kEnd, NullFun, _delay_1s);
  138. //}
  139. return Runner.Status;
  140. }
  141. private bool OpenTurboPumpPurgeGasFinalValve()
  142. {
  143. _chamber.OpenValve(ValveType.TurboPumpPurge, true);
  144. _chamber.OpenValve(ValveType.GasFinal, true);
  145. return true;
  146. }
  147. private bool OpenTurboValve()
  148. {
  149. _chamber.OpenValve(ValveType.TurboPumpPurge, true);
  150. return true;
  151. }
  152. private bool OpenGuageGasFinalValve()
  153. {
  154. _chamber.OpenValve(ValveType.GasFinal, true);
  155. _chamber.OpenValve(ValveType.Guage, true);
  156. return true;
  157. }
  158. private bool OpenFastPump()
  159. {
  160. _chamber.OpenValve(ValveType.SoftPump, false);
  161. _chamber.OpenValve(ValveType.FastPump, true);
  162. return true;
  163. }
  164. private bool OpenDEFastPump()
  165. {
  166. //_chamber.OpenValve(ValveType.SoftPump, false);
  167. _chamber.OpenValve(ValveType.PVHe2, false);
  168. _chamber.OpenValve(ValveType.FastPump, true);
  169. return true;
  170. }
  171. private bool OpenHe2Valve()
  172. {
  173. _chamber.OpenValve(ValveType.FastPump, false);
  174. _chamber.OpenValve(ValveType.PVHe2, true);
  175. return true;
  176. }
  177. private bool OpenISOValve()
  178. {
  179. _chamber.OpenValve(ValveType.FastPump, false);
  180. _chamber.OpenValve(ValveType.PVHe2, false);
  181. // ISO Valve
  182. _chamber.OpenValve(ValveType.TurboPumpPumping, true);
  183. return true;
  184. }
  185. private bool OpenVATValve()
  186. {
  187. return _chamber.TurnPendulumValve(true);
  188. }
  189. private bool FinalStep()
  190. {
  191. _chamber.OpenValve(ValveType.Guage, true);
  192. //2023/04/25修改
  193. //_chamber.OpenValve(ValveType.TurboPumpPurge, true);
  194. //_chamber.OpenValve(ValveType.GasFinal, true);
  195. return true;
  196. }
  197. public void Abort()
  198. {
  199. CloseAllValves();
  200. }
  201. }
  202. }