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VenusEntity
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5a2ac08f6f
fix bug in MoveWafer Dialog && SEMFPickRoutine
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1 年之前 |
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MFControlPressureRoutine.cs
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03063bae6a
Enhance the routine framework.
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1 年之前 |
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MFHomeRoutine.cs
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03063bae6a
Enhance the routine framework.
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1 年之前 |
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MFLeakCheckRoutine.cs
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03063bae6a
Enhance the routine framework.
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1 年之前 |
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MFPMExtendRoutine.cs
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03063bae6a
Enhance the routine framework.
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1 年之前 |
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MFPMPickRoutine.cs
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6d7ee9b8a3
1.根据新版kepler2200A IO跟新kepler2200A PM功能
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1 年之前 |
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MFPMPlaceRoutine.cs
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6d7ee9b8a3
1.根据新版kepler2200A IO跟新kepler2200A PM功能
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1 年之前 |
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MFPMRetractRoutine.cs
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03063bae6a
Enhance the routine framework.
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1 年之前 |
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MFPMSwapRoutine.cs
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c48ba3a928
添加初版kepler2200A Pick/Place功能（PLC点位未跟新）
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1 年之前 |
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MFPickRoutine.cs
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03063bae6a
Enhance the routine framework.
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1 年之前 |
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MFPlaceRoutine.cs
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2694bdc96c
Enhance the Pre-rotation function
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1 年之前 |
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MFPumpRoutine.cs
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03063bae6a
Enhance the routine framework.
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1 年之前 |
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MFPurgeRoutine.cs
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03063bae6a
Enhance the routine framework.
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1 年之前 |
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MFSwapRoutine.cs
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73f0d306a7
Enhance routing algorithm.
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1 年之前 |
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MFVentRoutine.cs
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187a5c453d
Kepler operation页面增加PMB、PMC、TM压力值和真空大气信号 去除MFVentRoutine结束后关闭N2valve
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1 年之前 |
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TMEntity.cs
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31bbc4482b
update ui && rt && simu for Venus SE
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1 年之前 |
zhouhr
5a2ac08f6f
fix bug in MoveWafer Dialog && SEMFPickRoutine