VenusDevice.cs 4.4 KB

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  1. namespace Venus_Core
  2. {
  3. public enum VenusDevice
  4. {
  5. ValveMfc1,
  6. ValveMfc2,
  7. ValveMfc3,
  8. ValveMfc4,
  9. ValveMfc5,
  10. ValveMfc6,
  11. ValveMfc7,
  12. ValveMfc8,
  13. ValvePVN21,
  14. ValvePVN22,
  15. ValvePV11,
  16. ValvePV12,
  17. ValvePV21,
  18. ValvePV22,
  19. ValvePV31,
  20. ValvePV32,
  21. ValvePV41,
  22. ValvePV42,
  23. ValveN2,
  24. ValvePVHe1,
  25. ValvePVHe2,
  26. ValveGasFinal,
  27. ValveSoftPump,
  28. ValveFastPump,
  29. ValveCHBPurge,
  30. ValveTurboPumpPumping,
  31. ValveTurboPumpPurge,
  32. ValveGuage,
  33. ValveLoadlockVent,
  34. ValveLoadlockPumping,
  35. MfcGas1,
  36. MfcGas2,
  37. MfcGas3,
  38. MfcGas4,
  39. MfcGas5,
  40. GasStick1,
  41. GasStick2,
  42. GasStick3,
  43. TemperatureControl,
  44. ChamberLid,
  45. ATM_SW,
  46. VAC_SW,
  47. WaterFlow_SW,
  48. N2_Pressure,
  49. ProcessGauge,
  50. PressureGauge,
  51. ForelineGauge,
  52. MainPump,
  53. Chiller,
  54. Rf,
  55. BiasRf,
  56. Match,
  57. BiasMatch,
  58. PressureControl,
  59. ThrottleValve,
  60. HeaterChamber,
  61. ForelineHeater,
  62. Heartbeat,
  63. ResetPlcSignal,
  64. LiftPin,
  65. SlitDoor,
  66. SmallPin,
  67. MediumPin,
  68. LoadLockArm,
  69. StatisticsRfOnTime,
  70. StatisticsPumpOnTime,
  71. PlcDateTime,
  72. Lid,
  73. LidLoadlock,
  74. LidLocker,
  75. ESCHV,
  76. PendulumValve,
  77. TurboPump,
  78. EndPoint,
  79. }
  80. public enum StateData
  81. {
  82. RecipeProcessTime,
  83. RecipeStepNo,
  84. RecipeStepMode,
  85. RecipeName,
  86. RecipeBaseName,
  87. RecipeStepTimeElapsed,
  88. RecipeStepTimeSetPoint,
  89. RecipeStepRfTimeSetPoint,
  90. RecipeStepElectrodeTemp,
  91. SmallWafer,
  92. MidWafer,
  93. BigWafer,
  94. RfTimeElapsed,
  95. PumpTime,
  96. PMState,
  97. TMState,
  98. IsAutoMode,
  99. IsPmOnline,
  100. IsTmOnline,
  101. PMJobState,
  102. TMJobState,
  103. PmPlatformState,
  104. JobState,
  105. JobTmRecipe,
  106. JobPmRecipe,
  107. JobStartTime,
  108. JobStopTime,
  109. JobProcessCount,
  110. IsPumpingOkForProcess,
  111. IsCoolingOkForProcess,
  112. IsGasFlowingOkForProcess,
  113. IsRfPowering,
  114. TotalCycle,
  115. ProcessStatus,
  116. AlarmEvent,
  117. LeakCheckElapseTime,
  118. DataLogName,
  119. LotName,
  120. CurrentMagazineType,
  121. SchedulerRecipe,
  122. SchedulerState,
  123. SchedulerLoadStationInSubstrate,
  124. SchedulerRailInSubstrate,
  125. SchedulerPmSubstrate,
  126. SchedulerRailOutSubstrate,
  127. SchedulerLoadStationOutSubstrate,
  128. }
  129. public enum RtOperation
  130. {
  131. DeviceOperation,
  132. LockLid,
  133. UnlockLid,
  134. StartPump,
  135. StartTurboPump,
  136. Pump,
  137. PumpLoadLock,
  138. StopPump,
  139. GasFlow,
  140. StopGasFlow,
  141. Cooling,
  142. StopCooling,
  143. /// <summary>
  144. ///
  145. /// 0:Step mode
  146. /// 1:Power on time
  147. /// 2:Electrode temperature
  148. /// 3:Electrode Critical temperature
  149. /// </summary>
  150. RfPower,
  151. Vent,
  152. VentLoadLock,
  153. Purge,
  154. PurgeLoadLock,
  155. Abort,
  156. Heat,
  157. SetConfig,
  158. SetPMBChillerState,
  159. SetHardwareConfig,
  160. RunRecipe,
  161. SkipCurrentStep,
  162. ResumeRecipe,
  163. AbortRecipe,
  164. Reset,
  165. LeakCheck,
  166. DeleteLeakCheck,
  167. MFCVerification,
  168. AllMFCVerification,
  169. SwitchOffBuzzer,
  170. // Lift pin & Guide pin
  171. MoveLiftPin,
  172. MoveGuidePin,
  173. StartAutoRun,
  174. StopAutoRun,
  175. PauseAutoRun,
  176. ResumeAutoRun,
  177. InitAll,
  178. AckError,
  179. TmRun,
  180. TmStop,
  181. PmAuto,
  182. PmManual,
  183. PmOnline,
  184. PmOffline,
  185. JobAuto,
  186. JobManual,
  187. JobRun,
  188. JobStop,
  189. JobAbort,
  190. JobPmLoadRecipe,
  191. JobTmLoadRecipe,
  192. JobTmRun,
  193. JobTmStop,
  194. JobPmOnline,
  195. JobPmOffline,
  196. JobPmProcessDone,
  197. JobTmRecovered,
  198. }
  199. public enum MovementPosition
  200. {
  201. Down, Up, Left, Right, Middle, Unknown
  202. }
  203. public enum RState
  204. {
  205. Init,
  206. Running,
  207. End,
  208. Failed,
  209. Timeout,
  210. }
  211. }