Kepler-Release/Venus/Venus_RT/Config/TM/TMInterlock.xml

<?xml version="1.0" encoding="utf-8"?>
<Interlock xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:xsd="http://www.w3.org/2001/XMLSchema">


	<!--TM-->
	<Action do="DO_N2_Valve"					value="true" tip="N2 Valve"	tip.zh-CN="" tip.en-US="DO-00" >
		<Limit di="DI_TM_CHB_Door_Closed"			value="true" tip="TM CHB Lid Door Closed"		tip.zh-CN="" tip.en-US="DI-17" />
		<Limit di="DI_CDA_Pressure_Switch"			value="true" tip="CDA Pressure Switch"		tip.zh-CN="" tip.en-US="DI-19" />
		<Limit di="DI_N2_Pressure_Switch"			value="true" tip="N2 Pressure Switch"		tip.zh-CN="" tip.en-US="DI-21" />
	</Action>

	<Action do="DO_Soft_Pumping_Valve_TM"					value="true" tip="Soft Pumping Valve TM"	tip.zh-CN="" tip.en-US="DO-01" >
		<Limit di="DI_TM_CHB_Door_Closed"			value="true" tip="TM CHB Lid Door Closed"		tip.zh-CN="" tip.en-US="DI-17" />
		<Limit di="DI_CDA_Pressure_Switch"			value="true" tip="CDA Pressure Switch"		tip.zh-CN="" tip.en-US="DI-19" />
		<Limit di="DI_LLA_Lid_Door_Closed"			value="true" tip="LLA Lid Door Closed"		tip.zh-CN="" tip.en-US="DI-26" />
		<Limit di="DI_LLB_Lid_Door_Closed"			value="true" tip="LLB Lid Door Closed"		tip.zh-CN="" tip.en-US="DI-31" />
	</Action>

	<Action do="DO_Fast_Pumping_Valve_TM"					value="true" tip="Fast Pumping Valve TM"	tip.zh-CN="" tip.en-US="DO-02" >
		<Limit di="DI_TM_CHB_Door_Closed"	value="true" tip="TM CHB Lid Door Closed"			tip.zh-CN="" tip.en-US="DI-17" />
		<Limit di="DI_CDA_Pressure_Switch"			value="true" tip="CDA Pressure Switch"		tip.zh-CN="" tip.en-US="DI-19" />
		<Limit di="DI_LLA_Lid_Door_Closed"			value="true" tip="LLA Lid Door Closed"		tip.zh-CN="" tip.en-US="DI-26" />
		<Limit di="DI_LLB_Lid_Door_Closed"			value="true" tip="LLB Lid Door Closed"		tip.zh-CN="" tip.en-US="DI-31" />
	</Action>

	<Action do="DO_Purge_Valve_TM"					value="true" tip="Purge Valve TM"	tip.zh-CN="" tip.en-US="DO-03" >
		<Limit di="DI_TM_CHB_Door_Closed"	value="true" tip="TM CHB Lid Door Closed"			tip.zh-CN="" tip.en-US="DI-17" />
		<Limit di="DI_CDA_Pressure_Switch"			value="true" tip="CDA Pressure Switch"		tip.zh-CN="" tip.en-US="DI-19" />
		<Limit di="DI_N2_Pressure_Switch"			value="true" tip="N2 Pressure Switch"		tip.zh-CN="" tip.en-US="DI-21" />	
	</Action>

	<Action do="DO_Vent_Valve_TM"					value="true" tip="Soft Vent Valve TM"	tip.zh-CN="" tip.en-US="DO-04" >
		<Limit di="DI_TM_CHB_Door_Closed"	value="true" tip="TM CHB Lid Door Closed"			tip.zh-CN="" tip.en-US="DI-17" />
		<Limit di="DI_CDA_Pressure_Switch"			value="true" tip="CDA Pressure Switch"		tip.zh-CN="" tip.en-US="DI-19" />
		<Limit di="DI_N2_Pressure_Switch"			value="true" tip="N2 Pressure Switch"		tip.zh-CN="" tip.en-US="DI-21" />
	</Action>

	<Action do="DO_Soft_Pumping_Valve_LLA"					value="true" tip="Soft Pumping Valve LLA"	tip.zh-CN="" tip.en-US="DO-06" >
		<Limit di="DI_CDA_Pressure_Switch"			value="true" tip="CDA Pressure Switch"		tip.zh-CN="" tip.en-US="DI-19" />
		<Limit di="DI_LLA_E_Slit_Door_close_Position"			value="true" tip="LLA In Slit Door close Position"		tip.zh-CN="" tip.en-US="DI-23" />
		<Limit di="DI_LLA_Lid_Door_Closed"			value="true" tip="LLA Lid Door Closed"		tip.zh-CN="" tip.en-US="DI-26" />
		<Limit do="DO_Purge_Valve_LLA"					value="false" tip="Purge Valve LLA"	tip.zh-CN="" tip.en-US="DO-08" />
		<Limit do="DO_Vent_Valve_LLA"					value="false" tip="Vent Valve LLA"	tip.zh-CN="" tip.en-US="DO-09" />
		<Limit do="DO_Soft_Pumping_Valve_LLB"	value="false" tip="Soft Pumping Valve LLB"		tip.zh-CN="" tip.en-US="DO-16" />
		<Limit do="DO_Fast_Pumping_Valve_LLB"				value="false" tip="Fast Pumping Valve LLB"			tip.zh-CN="" tip.en-US="DO-17" />
	</Action>

	<Action do="DO_Fast_Pumping_Valve_LLA"					value="true" tip="Fast Pumping Valve LLA"	tip.zh-CN="" tip.en-US="DO-07" >
		<Limit di="DI_CDA_Pressure_Switch"			value="true" tip="CDA Pressure Switch"		tip.zh-CN="" tip.en-US="DI-19" />
		<Limit di="DI_LLA_E_Slit_Door_close_Position"			value="true" tip="LLA In Slit Door close Position"		tip.zh-CN="" tip.en-US="DI-23" />
		<Limit di="DI_LLA_Lid_Door_Closed"			value="true" tip="LLA Lid Door Closed"		tip.zh-CN="" tip.en-US="DI-26" />
		<Limit do="DO_Purge_Valve_LLA"					value="false" tip="Purge Valve LLA"	tip.zh-CN="" tip.en-US="DO-08" />
		<Limit do="DO_Vent_Valve_LLA"					value="false" tip="Vent Valve LLA"	tip.zh-CN="" tip.en-US="DO-09" />
		<Limit do="DO_Soft_Pumping_Valve_LLB"					value="false" tip="Soft Pumping Valve LLB"	tip.zh-CN="" tip.en-US="DO-16" />
		<Limit do="DO_Fast_Pumping_Valve_LLB"					value="false" tip="Fast Pumping Valve LLB"	tip.zh-CN="" tip.en-US="DO-17" />
	</Action>

	<Action do="DO_Purge_Valve_LLA"					value="true" tip="Purge Valve LLA"	tip.zh-CN="" tip.en-US="DO-08" >
		<Limit di="DI_CDA_Pressure_Switch"			value="true" tip="CDA Pressure Switch"		tip.zh-CN="" tip.en-US="DI-19" />
		<Limit di="DI_N2_Pressure_Switch"			value="true" tip="N2 Pressure Switch"		tip.zh-CN="" tip.en-US="DI-21" />
		<Limit di="DI_LLA_Lid_Door_Closed"			value="true" tip="LLA Lid Door Closed"		tip.zh-CN="" tip.en-US="DI-26" />
	</Action>

	<Action do="DO_Vent_Valve_LLA"					value="true" tip="Vent Valve LLA"	tip.zh-CN="" tip.en-US="DO-09" >
		<Limit di="DI_CDA_Pressure_Switch"			value="true" tip="CDA Pressure Switch"		tip.zh-CN="" tip.en-US="DI-19" />
		<Limit di="DI_N2_Pressure_Switch"			value="true" tip="N2 Pressure Switch"		tip.zh-CN="" tip.en-US="DI-21" />
		<Limit di="DI_LLA_Lid_Door_Closed"			value="true" tip="LLA Lid Door Closed"		tip.zh-CN="" tip.en-US="DI-26" />
	</Action>

	<Action do="DO_LLA_Slit_Door_E_Open"					value="true" tip="LLA Slit Door/I Open"	tip.zh-CN="" tip.en-US="DO-11" >
		<Limit di="DI_TM_RB_Not_Extend_LLA"			value="true" tip="TM RB Not Extend LLA"		tip.zh-CN="" tip.en-US="DI-8" />
		<Limit di="DI_EFEM_RB_Not_Extend_LLA"			value="true" tip="EFEM Robot Net Extend to LLA"		tip.zh-CN="" tip.en-US="DI-11" />
		<Limit di="DI_EFEM_Side_Door_Closed"				value="true" tip="EFEM Side Panel Closed"			tip.zh-CN="" tip.en-US="DI-13" />
		<Limit di="DI_CDA_Pressure_Switch"			value="true" tip="CDA Pressure Switch"		tip.zh-CN="" tip.en-US="DI-19" />
		<Limit di="DI_LLA_T_Slit_Door_close_Position"	value="true" tip="LLA TM Side Door Closed"			tip.zh-CN="" tip.en-US="DI-25" />
		<Limit di="DI_LLA_Lid_Door_Closed"				value="true" tip="LLA Lid Closed"					tip.zh-CN="" tip.en-US="DI-26" />
		<Limit di="DI_LLA_ATM_Switch"				value="true" tip="LLA ATM Switch"					tip.zh-CN="" tip.en-US="DI-35" />
	</Action>

	<Action do="DO_LLA_Slit_Door_E_Close"				value="true" tip="LLA Slit Door/I Close"	tip.zh-CN="" tip.en-US="DO-12" >
		<Limit di="DI_TM_RB_Not_Extend_LLA"			value="true" tip="TM RB Not Extend LLA"		tip.zh-CN="" tip.en-US="DI-8" />
		<Limit di="DI_EFEM_RB_Not_Extend_LLA"			value="true" tip="EFEM Robot Net Extend to LLA"		tip.zh-CN="" tip.en-US="DI-11" />
		<Limit di="DI_EFEM_Side_Door_Closed"				value="true" tip="EFEM Side Panel Closed"			tip.zh-CN="" tip.en-US="DI-13" />
		<Limit di="DI_CDA_Pressure_Switch"			value="true" tip="CDA Pressure Switch"		tip.zh-CN="" tip.en-US="DI-19" />
		<Limit di="DI_LLA_Lid_Door_Closed"				value="true" tip="LLA Lid Closed"					tip.zh-CN="" tip.en-US="DI-26" />
	</Action>



	<Action do="DO_LLA_Slit_Door_T_Open"					value="true" tip="Loadlock A TM Side Door Open"		tip.zh-CN="" tip.en-US="DO-13" >
		<Limit di="DI_TM_RB_Not_Extend_LLA"				value="true" tip="TM Robot Net Extend to LLA"		tip.zh-CN="" tip.en-US="DI-8" />
		<Limit di="DI_EFEM_RB_Not_Extend_LLA"			value="true" tip="EFEM Robot Net Extend to LLA"		tip.zh-CN="" tip.en-US="DI-11" />
		<Limit di="DI_TM_CHB_Door_Closed"	value="true" tip="TM CHB Lid Door Closed"			tip.zh-CN="" tip.en-US="DI-17" />
		<Limit di="DI_CDA_Pressure_Switch"			value="true" tip="CDA Pressure Switch"		tip.zh-CN="" tip.en-US="DI-19" />
		<Limit di="DI_LLA_E_Slit_Door_close_Position"	value="true" tip="LLA EFEM Side Door Closed"		tip.zh-CN="" tip.en-US="DI-23" />
		<Limit di="DI_LLA_Lid_Door_Closed"				value="true" tip="LLA Lid Closed"					tip.zh-CN="" tip.en-US="DI-26" />
	</Action>


	<Action do="DO_LLA_Slit_Door_T_Close"				value="true" tip="Loadlock A TM Side Door Close"	tip.zh-CN="" tip.en-US="DO-14" >
		<Limit di="DI_TM_RB_Not_Extend_LLA"				value="true" tip="TM Robot Net Extend to LLA"		tip.zh-CN="" tip.en-US="DI-8" />
		<Limit di="DI_EFEM_RB_Not_Extend_LLA"			value="true" tip="EFEM Robot Net Extend to LLA"		tip.zh-CN="" tip.en-US="DI-11" />
		<Limit di="DI_TM_CHB_Door_Closed"	value="true" tip="TM CHB Lid Door Closed"			tip.zh-CN="" tip.en-US="DI-17" />
		<Limit di="DI_CDA_Pressure_Switch"			value="true" tip="CDA Pressure Switch"		tip.zh-CN="" tip.en-US="DI-19" />
		<Limit di="DI_LLA_Lid_Door_Closed"				value="true" tip="LLA Lid Closed"					tip.zh-CN="" tip.en-US="DI-26" />
	</Action>

	<Action do="DO_Soft_Pumping_Valve_LLB"				value="true" tip="Soft Pumping Valve LLB"	tip.zh-CN="" tip.en-US="DO-16" >
		<Limit di="DI_CDA_Pressure_Switch"			value="true" tip="CDA Pressure Switch"		tip.zh-CN="" tip.en-US="DI-19" />
		<Limit di="DI_LLB_E_Slit_Door_close_Position"	value="true" tip="LLB In Slit Door close Position"		tip.zh-CN="" tip.en-US="DI-28" />
		<Limit di="DI_EFEM_Side_Door_Closed"				value="true" tip="EFEM Side Panel Closed"			tip.zh-CN="" tip.en-US="DI-31" />
		<Limit do="DO_Soft_Pumping_Valve_LLA"					value="false" tip="Soft Pumping Valve LLA"	tip.zh-CN="" tip.en-US="DO-06" />
		<Limit do="DO_Fast_Pumping_Valve_LLA"					value="false" tip="Fast Pumping Valve LLA"	tip.zh-CN="" tip.en-US="DO-07" />
	</Action>

	<Action do="DO_Fast_Pumping_Valve_LLB"			value="true"  tip="Fast Pumping Valve LLB"		tip.zh-CN="" tip.en-US="DO-17" >
		<Limit di="DI_CDA_Pressure_Switch"			    value="true"  tip="CDA Pressure Switch"		tip.zh-CN="" tip.en-US="DI-19" />
		<Limit di="DI_LLB_E_Slit_Door_close_Position"	value="true"  tip="LLB EFEM Side Door Closed"		tip.zh-CN="" tip.en-US="DI-28" />
		<Limit di="DI_LLB_Lid_Door_Closed"				value="true"  tip="LLB Lid Closed"					tip.zh-CN="" tip.en-US="DI-31" />
		<Limit do="DO_Soft_Pumping_Valve_LLA"			value="false" tip="Soft Pumping Valve LLA"	tip.zh-CN="" tip.en-US="DO-06" />
		<Limit do="DO_Fast_Pumping_Valve_LLA"			value="false" tip="Fast Pumping Valve LLA"	tip.zh-CN="" tip.en-US="DO-07" />
	</Action>

	<Action do="DO_Purge_Valve_LLB"					value="true" tip="Purge Valve LLB"		tip.zh-CN="" tip.en-US="DO-18" >
		<Limit di="DI_CDA_Pressure_Switch"			value="true" tip="CDA Pressure Switch"		tip.zh-CN="" tip.en-US="DI-19" />
		<Limit di="DI_N2_Pressure_Switch"			value="true" tip="N2 Pressure Switch"		tip.zh-CN="" tip.en-US="DI-21" />
		<Limit di="DI_LLB_Lid_Door_Closed"				value="true" tip="LLB Lid Closed"					tip.zh-CN="" tip.en-US="DI-31" />
	</Action>

	<Action do="DO_Vent_Valve_LLB"					value="true" tip="Vent Valve LLB"		tip.zh-CN="" tip.en-US="DO-19" >
		<Limit di="DI_CDA_Pressure_Switch"			value="true" tip="CDA Pressure Switch"		tip.zh-CN="" tip.en-US="DI-19" />
		<Limit di="DI_N2_Pressure_Switch"			value="true" tip="N2 Pressure Switch"		tip.zh-CN="" tip.en-US="DI-21" />
		<Limit di="DI_LLB_Lid_Door_Closed"				value="true" tip="LLB Lid Closed"					tip.zh-CN="" tip.en-US="DI-31" />
	</Action>

	<Action do="DO_LLB_Slit_Door_E_Open"					value="true" tip="LLB Slit Door/I Open"		tip.zh-CN="" tip.en-US="DO-21" >
		<Limit di="DI_TM_RB_Not_Extend_LLB"			value="true" tip="TM RB Not Extend LLB"		tip.zh-CN="" tip.en-US="DI-09" />
		<Limit di="DI_EFEM_RB_Not_Extend_LLB"				value="true" tip="EFEM RB Not Extend LLB"			tip.zh-CN="" tip.en-US="DI-12" />
		<Limit di="DI_EFEM_Side_Door_Closed"				value="true" tip="EFEM Side Panel Closed"			tip.zh-CN="" tip.en-US="DI-13" />
		<Limit di="DI_CDA_Pressure_Switch"			value="true" tip="CDA Pressure Switch"		tip.zh-CN="" tip.en-US="DI-19" />
		<Limit di="DI_LLB_T_Slit_Door_close_Position"			value="true" tip="LLB Out Slit Door close Position"		tip.zh-CN="" tip.en-US="DI-30" />
		<Limit di="DI_LLB_Lid_Door_Closed"				value="true" tip="LLB Lid Closed"					tip.zh-CN="" tip.en-US="DI-31" />
		<Limit di="DI_LLB_ATM_Switch"	value="true" tip="LLB ATM Switch"		tip.zh-CN="" tip.en-US="DI-37" />
	</Action>

	<Action do="DO_LLB_Slit_Door_E_Close"					value="true" tip="LLB Slit Door/I Close"		tip.zh-CN="" tip.en-US="DO-22" >
		<Limit di="DI_TM_RB_Not_Extend_LLB"			value="true" tip="TM RB Not Extend LLB"		tip.zh-CN="" tip.en-US="DI-09" />
		<Limit di="DI_EFEM_RB_Not_Extend_LLB"				value="true" tip="EFEM RB Not Extend LLB"			tip.zh-CN="" tip.en-US="DI-12" />
		<Limit di="DI_EFEM_Side_Door_Closed"				value="true" tip="EFEM Side Panel Closed"			tip.zh-CN="" tip.en-US="DI-13" />
		<Limit di="DI_CDA_Pressure_Switch"			value="true" tip="CDA Pressure Switch"		tip.zh-CN="" tip.en-US="DI-19" />
		<Limit di="DI_LLB_Lid_Door_Closed"				value="true" tip="LLB Lid Closed"					tip.zh-CN="" tip.en-US="DI-31" />
	</Action>

	<Action do="DO_LLB_Slit_Door_T_Open"					value="true" tip="LLB Slit Door/O Open"		tip.zh-CN="" tip.en-US="DO-23" >
		<Limit di="DI_TM_RB_Not_Extend_LLB"				value="true" tip="TM Robot Net Extend to LLB"		tip.zh-CN="" tip.en-US="DI-9" />
		<Limit di="DI_EFEM_RB_Not_Extend_LLB"				value="true" tip="EFEM RB Not Extend LLB"			tip.zh-CN="" tip.en-US="DI-12" />
		<Limit di="DI_TM_CHB_Door_Closed"	value="true" tip="TM CHB Lid Door Closed"			tip.zh-CN="" tip.en-US="DI-17" />
		<Limit di="DI_CDA_Pressure_Switch"			value="true" tip="CDA Pressure Switch"		tip.zh-CN="" tip.en-US="DI-19" />
		<Limit di="DI_LLB_E_Slit_Door_close_Position"	value="true" tip="LLB EFEM Side Door Closed"		tip.zh-CN="" tip.en-US="DI-28" />
		<Limit di="DI_LLB_Lid_Door_Closed"				value="true" tip="LLB Lid Closed"					tip.zh-CN="" tip.en-US="DI-31" />
	</Action>


	<Action do="DO_LLB_Slit_Door_T_Close"				value="true" tip="LLB Slit Door/O Close"	tip.zh-CN="" tip.en-US="DO-24" >
		<Limit di="DI_TM_RB_Not_Extend_LLB"				value="true" tip="TM Robot Net Extend to LLB"		tip.zh-CN="" tip.en-US="DI-9" />
		<Limit di="DI_EFEM_RB_Not_Extend_LLB"				value="true" tip="EFEM RB Not Extend LLB"			tip.zh-CN="" tip.en-US="DI-12" />
		<Limit di="DI_TM_CHB_Door_Closed"	value="true" tip="TM CHB Lid Door Closed"			tip.zh-CN="" tip.en-US="DI-17" />
		<Limit di="DI_CDA_Pressure_Switch"			value="true" tip="CDA Pressure Switch"		tip.zh-CN="" tip.en-US="DI-19" />
		<Limit di="DI_LLB_Lid_Door_Closed"				value="true" tip="LLB Lid Closed"					tip.zh-CN="" tip.en-US="DI-31" />
	</Action>

	<Action do="DO_Water_Valve_Relay"				value="true" tip="Water Valve Relay"	tip.zh-CN="" tip.en-US="DO-26" >
		<Limit di="DI_Water_Leak_Sensor"				value="true" tip="Water Leak Sensor"		tip.zh-CN="" tip.en-US="DI-3" />
	</Action>

</Interlock>