EfemHomeRoutine.cs 8.2 KB

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  1. using Aitex.Core.RT.Routine;
  2. using Aitex.Core.RT.SCCore;
  3. using Aitex.Sorter.Common;
  4. using Venus_RT.Devices;
  5. using MECF.Framework.Common.Routine;
  6. using MECF.Framework.Common.Equipment;
  7. using MECF.Framework.Common.SubstrateTrackings;
  8. using Venus_Core;
  9. using Aitex.Core.RT.Log;
  10. using Aitex.Core.Common;
  11. using Aitex.Core.Util;
  12. using MECF.Framework.Common.Schedulers;
  13. using System.Collections.Generic;
  14. using Venus_RT.Devices.EFEM;
  15. namespace Venus_RT.Modules.EFEM
  16. {
  17. class EfemHomeRoutine : ModuleRoutineBase, IRoutine
  18. {
  19. private enum HomeStep
  20. {
  21. ClearError,
  22. InitRobot,
  23. HomeAllAxes,
  24. CheckWaferPresence,
  25. End,
  26. }
  27. private enum HomeModuleStep
  28. {
  29. Home,
  30. End,
  31. }
  32. private int _homeTimeout = 30 * 1000;
  33. ModuleName _targetModule;
  34. EfemBase _efem;
  35. public EfemHomeRoutine(EfemBase efem) : base(ModuleName.EfemRobot)
  36. {
  37. _efem = efem;
  38. }
  39. public RState Start(params object[] objs)
  40. {
  41. _targetModule = (ModuleName)objs[0];
  42. _homeTimeout = SC.GetValue<int>($"EFEM.HomeTimeout") * 1000;
  43. return Runner.Start(Module, $"Home {_targetModule}");
  44. }
  45. public RState Monitor()
  46. {
  47. if(_targetModule == ModuleName.EFEM)
  48. {
  49. Runner.Run((int)HomeStep.ClearError, ClearError, IsStepComplete, _homeTimeout)
  50. .Run((int)HomeStep.InitRobot, HomeAll, IsStepComplete, _homeTimeout)
  51. .Run((int)HomeStep.HomeAllAxes, HomeAllAxes, IsStepComplete, _homeTimeout)
  52. .Run((int)HomeStep.CheckWaferPresence, CheckWaferPresence, VerifyWaferPresence, _homeTimeout)
  53. .End((int)HomeStep.End, NullFun, _delay_50ms);
  54. }
  55. else
  56. {
  57. Runner.Run((int)HomeModuleStep.Home, HomeModule, IsStepComplete, _homeTimeout)
  58. .End((int)HomeModuleStep.End, NullFun, _delay_50ms);
  59. }
  60. return Runner.Status;
  61. }
  62. public void Abort()
  63. {
  64. }
  65. private bool IsStepComplete()
  66. {
  67. if (_efem.Status == RState.End)
  68. {
  69. return true;
  70. }
  71. else if (_efem.Status == RState.Failed || _efem.Status == RState.Timeout)
  72. {
  73. LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $"Efem home failed: {_efem.Status}");
  74. return true;
  75. }
  76. else
  77. return false;
  78. }
  79. private bool ClearError()
  80. {
  81. return _efem.ClearError();
  82. }
  83. private bool HomeAll()
  84. {
  85. return _efem.HomeAll();
  86. }
  87. private bool HomeModule()
  88. {
  89. return _efem.Home(_targetModule);
  90. }
  91. private bool HomeAllAxes()
  92. {
  93. return _efem.OriginalSearch();
  94. }
  95. private bool CheckWaferPresence()
  96. {
  97. return _efem.CheckWaferPresence();
  98. }
  99. private bool VerifyWaferPresence()
  100. {
  101. if (_efem.Status == RState.End)
  102. {
  103. var waferPresence = _efem.GetWaferPresence();
  104. //000/111 upperArmWafer, lowerArmWafer, alignerWafer1, alignerWafer2, coolingwafer1,coolingwafer2
  105. if (waferPresence.Length != 6)
  106. {
  107. LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $"EFEM Track wafer present return invalid value, {waferPresence}, should be 6 characters");
  108. return true;
  109. }
  110. //upper arm
  111. if (waferPresence[0] == '1')
  112. {
  113. if (WaferManager.Instance.CheckNoWafer(ModuleName.EfemRobot, 1))
  114. {
  115. WaferManager.Instance.CreateWafer(ModuleName.EfemRobot, 1, WaferStatus.Normal);
  116. }
  117. }
  118. else
  119. {
  120. if (WaferManager.Instance.CheckHasWafer(ModuleName.EfemRobot, 1))
  121. {
  122. LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $" {ModuleName.EfemRobot} upper arm has wafer information, while EFEM return empty, manually delete if really no wafer");
  123. }
  124. }
  125. //lower arm
  126. if (waferPresence[1] == '1')
  127. {
  128. if (WaferManager.Instance.CheckNoWafer(ModuleName.EfemRobot, 0))
  129. {
  130. WaferManager.Instance.CreateWafer(ModuleName.EfemRobot, 0, WaferStatus.Normal);
  131. }
  132. }
  133. else
  134. {
  135. if (WaferManager.Instance.CheckHasWafer(ModuleName.EfemRobot, 0))
  136. {
  137. LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $" {ModuleName.EfemRobot} lower arm has wafer information, while EFEM return empty, manually delete if really no wafer");
  138. }
  139. }
  140. //aligner1
  141. if (waferPresence[2] == '1')
  142. {
  143. if (WaferManager.Instance.CheckNoWafer(ModuleName.Aligner1, 0))
  144. {
  145. WaferManager.Instance.CreateWafer(ModuleName.Aligner1, 0, WaferStatus.Normal);
  146. }
  147. }
  148. else
  149. {
  150. if (WaferManager.Instance.CheckHasWafer(ModuleName.Aligner1, 0))
  151. {
  152. LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $" {ModuleName.Aligner1} has wafer information, while EFEM return empty, manually delete if really no wafer");
  153. }
  154. }
  155. //aligner2
  156. if (waferPresence[3] == '1')
  157. {
  158. if (WaferManager.Instance.CheckNoWafer(ModuleName.Aligner2, 0))
  159. {
  160. WaferManager.Instance.CreateWafer(ModuleName.Aligner2, 0, WaferStatus.Normal);
  161. }
  162. }
  163. else
  164. {
  165. if (WaferManager.Instance.CheckHasWafer(ModuleName.Aligner2, 0))
  166. {
  167. LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $" {ModuleName.Aligner2} has wafer information, while EFEM return empty, manually delete if really no wafer");
  168. }
  169. }
  170. //cooling1
  171. if (waferPresence[4] == '1')
  172. {
  173. if (WaferManager.Instance.CheckNoWafer(ModuleName.Cooling1, 0))
  174. {
  175. WaferManager.Instance.CreateWafer(ModuleName.Cooling1, 0, WaferStatus.Normal);
  176. }
  177. }
  178. else
  179. {
  180. if (WaferManager.Instance.CheckHasWafer(ModuleName.Cooling1, 0))
  181. {
  182. LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $" {ModuleName.Cooling1} has wafer information, while EFEM return empty, manually delete if really no wafer");
  183. }
  184. }
  185. //cooling2
  186. if (waferPresence[5] == '1')
  187. {
  188. if (WaferManager.Instance.CheckNoWafer(ModuleName.Cooling2, 0))
  189. {
  190. WaferManager.Instance.CreateWafer(ModuleName.Cooling2, 0, WaferStatus.Normal);
  191. }
  192. }
  193. else
  194. {
  195. if (WaferManager.Instance.CheckHasWafer(ModuleName.Cooling2, 0))
  196. {
  197. LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $" {ModuleName.Cooling2} has wafer information, while EFEM return empty, manually delete if really no wafer");
  198. }
  199. }
  200. return true;
  201. }
  202. else if (_efem.Status != RState.Running)
  203. {
  204. LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $"Efem StateTrack failed: {_efem.Status}");
  205. return true;
  206. }
  207. else
  208. return false;
  209. }
  210. }
  211. }