Kepler-Release/Venus/Venus_RT/Devices/TM/JetTM.cs

using Aitex.Core.Common.DeviceData;
using Aitex.Core.RT.Device;
using Aitex.Core.RT.Device.Unit;
using Aitex.Core.Util;
using Aitex.Core.RT.SCCore;
using Aitex.Core.RT.Log;
using Aitex.Sorter.Common;
using MECF.Framework.Common.Device.Bases;
using MECF.Framework.Common.Equipment;

using System;
using System.Collections.Generic;
using Venus_Core;
using Venus_RT.Modules;
using Venus_RT.Modules.PMs;
using Venus_RT.Devices.IODevices;
using Venus_RT.Devices.EPD;
using Aitex.Core.RT.DataCenter;
using Aitex.Core.RT.OperationCenter;

using MECF.Framework.Common.SubstrateTrackings;

using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.TMs;

namespace Venus_RT.Devices
{
    class JetTM : TM
    {
        private readonly IoLid _TMLid;
        private readonly IoLid _LLALid;
        private readonly IoLid _LLBLid;

        private readonly IoCylinder _LLATSlitDoor;
        private readonly IoCylinder _LLBTSlitDoor;

        private readonly IoCylinder _LLAESlitDoor;
        private readonly IoCylinder _LLBESlitDoor;

        private readonly IoValve _TMN2Valve;
        private readonly IoValve _TMSoftPumpValve;
        private readonly IoValve _TMFastPumpValve;
        private readonly IoValve _TMPurgeValve;
        //private readonly IoValve _TMVentValve;
        private readonly IoValve _TMSoftVentValve;
        private readonly IoValve _TMFastVentValve;

        private readonly IoValve _LLASoftPumpValve;
        private readonly IoValve _LLAFastPumpValve;
        private readonly IoValve _LLAPurgeValve;
        private readonly IoValve _LLAVentValve;
        private readonly IoValve _LLBSoftPumpValve;
        private readonly IoValve _LLBFastPumpValve;
        private readonly IoValve _LLBPurgeValve;
        private readonly IoValve _LLBVentValve;
        private readonly IoValve _WaferRelayValve;

        private readonly IoSensor _TMPowerOn;
        private readonly IoSensor _TMInSafty;
        private readonly IoSensor _WaferLeakSensor;
        private readonly IoSensor _EFEMSideDoorClosed;
        private readonly IoSensor _TMPCWFlowSwitch;
        private readonly IoSensor _LLAPCWFlowSwitch;
        private readonly IoSensor _LLBPCWFlowSwitch;
        private readonly IoSensor _TMLidClosed;

        private readonly IoSensor _CDAPressureSwitch;
        private readonly IoSensor _VaccumPressureSwitch;
        private readonly IoSensor _N2PressureSwitch;

        private readonly IoSensor _TMRobotNotExtendPMA;
        private readonly IoSensor _TMRobotNotExtendPMB;
        private readonly IoSensor _TMRobotNotExtendPMC;
        private readonly IoSensor _TMRobotNotExtendPMD;
        private readonly IoSensor _TMRobotNotExtendLLA;
        private readonly IoSensor _TMRobotNotExtendLLB;
        private readonly IoSensor _EfemRobotNotExtendLLA;
        private readonly IoSensor _EfemRobotNotExtendLLB;
        private readonly IoSensor _TMVacSwitch;
        private readonly IoSensor _LLAVacSwitch;
        private readonly IoSensor _LLBVacSwitch;
        private readonly IoSensor _TMATMSwitch;
        private readonly IoSensor _LLAATMSwitch;
        private readonly IoSensor _LLBATMSwitch;

        private readonly IoSwitch _LLAWaferSizeCheck;
        private readonly IoSwitch _LLBWaferSizeCheck;
        private readonly IoSwitch _PMAWaferSizeCheck;
        private readonly IoSwitch _PMBWaferSizeCheck;
        private readonly IoSwitch _PMCWaferSizeCheck;
        private readonly IoSwitch _PMDWaferSizeCheck;


        private readonly IoTMPressureCtrl _presureCtrl;

        public bool TMLidClosed => _TMLid.OFFFeedback;
        public bool LLALidClosed => _LLALid.OFFFeedback;
        public bool LLBLidClosed => _LLBLid.OFFFeedback;
        public bool IsLLASlitDoorClosed => _LLATSlitDoor.State == CylinderState.Close;
        public bool IsLLASlitDoorOpen => _LLATSlitDoor.State == CylinderState.Open;
        public bool IsLLAESlitDoorClosed => _LLAESlitDoor.State == CylinderState.Close;
        public bool IsLLAESlitDoorOpen => _LLAESlitDoor.State == CylinderState.Open;
        public bool IsLLBSlitDoorClosed => _LLBTSlitDoor.State == CylinderState.Close;
        public bool IsLLBSlitDoorOpen => _LLBTSlitDoor.State == CylinderState.Open;
        public bool IsLLBESlitDoorClosed => _LLBESlitDoor.State == CylinderState.Close;
        public bool IsLLBESlitDoorOpen => _LLBESlitDoor.State == CylinderState.Open;
        public bool IsTMVac => _TMVacSwitch.Value;
        public bool IsLLAVac => _LLAVacSwitch.Value;
        public bool IsLLBVac => _LLBVacSwitch.Value;
        public bool IsTMATM => _TMATMSwitch.Value;
        public bool IsLLAATM => _LLAATMSwitch.Value;
        public bool IsLLBATM => _LLBATMSwitch.Value;
        public bool IsTMPowerOn => _TMPowerOn.Value;
        public bool IsTMInSafty => _TMInSafty.Value;
        public bool IsLLAFastPumpOpen => _LLAFastPumpValve.Status;
        public bool IsLLASoftPumpOpen => _LLASoftPumpValve.Status;
        public bool IsLLBFastPumpOpen => _LLBFastPumpValve.Status;
        public bool IsLLBSoftPumpOpen => _LLBSoftPumpValve.Status;
        public bool IsLLAVentValveOpen => _LLAVentValve.Status;
        public bool IsLLAPurgeValveOpen => _LLAPurgeValve.Status;
        public bool IsLLBVentValveOpen => _LLBVentValve.Status;
        public bool IsLLBPurgeValveOpen => _LLBPurgeValve.Status;

        public bool IsTMSoftVentValveOpen => _TMSoftVentValve.Status;

        public bool IsTMFastVentValveOpen => _TMFastVentValve.Status;

        public bool IsTMPurgeValveOpen => _TMPurgeValve.Status;
        public bool IsTMFastPumpOpen => _TMFastPumpValve.Status;
        public bool IsTMSoftPumpOpen => _TMSoftPumpValve.Status;
        public bool TMRobotNotExtendToPMA => _TMRobotNotExtendPMA.Value;
        public bool TMRobotNotExtendToPMB => _TMRobotNotExtendPMB.Value;
        public bool TMRobotNotExtendToPMC => _TMRobotNotExtendPMC.Value;
        public bool TMRobotNotExtendToPMD => _TMRobotNotExtendPMD.Value;
        public bool TMRobotNotExtendToLLA => _TMRobotNotExtendLLA.Value;
        public bool TMRobotNotExtendToLLB => _TMRobotNotExtendLLB.Value;
        public bool EfemRobotNotExtendToLLA => _EfemRobotNotExtendLLA.Value;
        public bool EfemRobotNotExtendToLLB => _EfemRobotNotExtendLLB.Value;

        public double TMPressure => _presureCtrl.TMPressureGauge.Value;
        public double LLAPressure => _presureCtrl.LLAPressureGauge.Value;
        public double LLBPressure => _presureCtrl.LLBPressureGauge.Value;
        public double TMForelinePressure => _presureCtrl.MFForelineGauge.Value;
        public double LoadlockForelinePressure => _presureCtrl.LLForelineGauge.Value;

        public JetTM() : base("TM")
        {
            _TMLid  = DEVICE.GetDevice<IoLid>($"TM.{VenusDevice.TMLid}");
            _LLALid = DEVICE.GetDevice<IoLid>($"TM.{VenusDevice.LLALid}");
            _LLBLid = DEVICE.GetDevice<IoLid>($"TM.{VenusDevice.LLBLid}");

            _LLATSlitDoor = DEVICE.GetDevice<IoCylinder>($"TM.{VenusDevice.LLATSlitDoor}");
            _LLBTSlitDoor = DEVICE.GetDevice<IoCylinder>($"TM.{VenusDevice.LLBTSlitDoor}");
            _LLAESlitDoor = DEVICE.GetDevice<IoCylinder>($"TM.{VenusDevice.LLAESlitDoor}");
            _LLBESlitDoor = DEVICE.GetDevice<IoCylinder>($"TM.{VenusDevice.LLBESlitDoor}");

            _TMN2Valve          = DEVICE.GetDevice<IoValve>($"TM.{VenusDevice.TMValveN2}");
            _TMSoftPumpValve    = DEVICE.GetDevice<IoValve>($"TM.{VenusDevice.TMSoftPumpValve}");
            _TMFastPumpValve    = DEVICE.GetDevice<IoValve>($"TM.{VenusDevice.TMFastPumpValve}");
            _TMPurgeValve       = DEVICE.GetDevice<IoValve>($"TM.{VenusDevice.TMPurgeValve}");
            //_TMVentValve        = DEVICE.GetDevice<IoValve>($"TM.{VenusDevice.TMVentValve}");
            _TMSoftVentValve = DEVICE.GetDevice<IoValve>($"TM.{VenusDevice.TMSoftVentValve}");
            _TMFastVentValve = DEVICE.GetDevice<IoValve>($"TM.{VenusDevice.TMFastVentValve}");

            _LLASoftPumpValve = DEVICE.GetDevice<IoValve>($"TM.{VenusDevice.LLASoftPumpValve}");
            _LLAFastPumpValve   = DEVICE.GetDevice<IoValve>($"TM.{VenusDevice.LLAFastPumpValve}");
            _LLAPurgeValve      = DEVICE.GetDevice<IoValve>($"TM.{VenusDevice.LLAPurgeValve}");
            _LLAVentValve       = DEVICE.GetDevice<IoValve>($"TM.{VenusDevice.LLAVentValve}");
            _LLBSoftPumpValve   = DEVICE.GetDevice<IoValve>($"TM.{VenusDevice.LLBSoftPumpValve}");
            _LLBFastPumpValve   = DEVICE.GetDevice<IoValve>($"TM.{VenusDevice.LLBFastPumpValve}");
            _LLBPurgeValve      = DEVICE.GetDevice<IoValve>($"TM.{VenusDevice.LLBPurgeValve}");
            _LLBVentValve       = DEVICE.GetDevice<IoValve>($"TM.{VenusDevice.LLBVentValve}");
            _WaferRelayValve    = DEVICE.GetDevice<IoValve>($"TM.{VenusDevice.ValveWaterRelay}");

            _TMPowerOn          = DEVICE.GetDevice<IoSensor>($"TM.{VenusDevice.TMPowerOn}");
            _TMInSafty          = DEVICE.GetDevice<IoSensor>($"TM.{VenusDevice.TMInSafty}");
            _WaferLeakSensor    = DEVICE.GetDevice<IoSensor>($"TM.{VenusDevice.WaferLeakSensor}");
            _EFEMSideDoorClosed = DEVICE.GetDevice<IoSensor>($"TM.{VenusDevice.EFEMSideDoorClosed}");
            _TMPCWFlowSwitch    = DEVICE.GetDevice<IoSensor>($"TM.{VenusDevice.TMPCWFlowSwitch}");
            _LLAPCWFlowSwitch   = DEVICE.GetDevice<IoSensor>($"TM.{VenusDevice.LLAPCWFlowSwitch}");
            _LLBPCWFlowSwitch   = DEVICE.GetDevice<IoSensor>($"TM.{VenusDevice.LLBPCWFlowSwitch}");
            _TMLidClosed        = DEVICE.GetDevice<IoSensor>($"TM.{VenusDevice.TMLidClosed}");

            _CDAPressureSwitch      = DEVICE.GetDevice<IoSensor>($"TM.{VenusDevice.CDAPressureSwitch}");
            _VaccumPressureSwitch   = DEVICE.GetDevice<IoSensor>($"TM.{VenusDevice.VaccumPressureSwitch}");
            _N2PressureSwitch       = DEVICE.GetDevice<IoSensor>($"TM.{VenusDevice.N2PressureSwitch}");

            _TMRobotNotExtendPMA    = DEVICE.GetDevice<IoSensor>($"TM.{VenusDevice.TMRobotNotExtendPMA}");
            _TMRobotNotExtendPMB    = DEVICE.GetDevice<IoSensor>($"TM.{VenusDevice.TMRobotNotExtendPMB}");
            _TMRobotNotExtendPMC    = DEVICE.GetDevice<IoSensor>($"TM.{VenusDevice.TMRobotNotExtendPMC}");
            _TMRobotNotExtendPMD    = DEVICE.GetDevice<IoSensor>($"TM.{VenusDevice.TMRobotNotExtendPMD}");
            _TMRobotNotExtendLLA    = DEVICE.GetDevice<IoSensor>($"TM.{VenusDevice.TMRobotNotExtendLLA}");
            _TMRobotNotExtendLLB    = DEVICE.GetDevice<IoSensor>($"TM.{VenusDevice.TMRobotNotExtendLLB}");
            _EfemRobotNotExtendLLA  = DEVICE.GetDevice<IoSensor>($"TM.{VenusDevice.EfemRobotNotExtendLLA}");
            _EfemRobotNotExtendLLB  = DEVICE.GetDevice<IoSensor>($"TM.{VenusDevice.EfemRobotNotExtendLLB}");

            _TMVacSwitch    = DEVICE.GetDevice<IoSensor>($"TM.{VenusDevice.TMVacSwitch}");
            _LLAVacSwitch   = DEVICE.GetDevice<IoSensor>($"TM.{VenusDevice.LLAVacSwitch}");
            _LLBVacSwitch   = DEVICE.GetDevice<IoSensor>($"TM.{VenusDevice.LLBVacSwitch}");
            _TMATMSwitch    = DEVICE.GetDevice<IoSensor>($"TM.{VenusDevice.TMATMSwitch}");
            _LLAATMSwitch   = DEVICE.GetDevice<IoSensor>($"TM.{VenusDevice.LLAATMSwitch}");
            _LLBATMSwitch   = DEVICE.GetDevice<IoSensor>($"TM.{VenusDevice.LLBATMSwitch}");

            _LLAWaferSizeCheck = DEVICE.GetDevice<IoSwitch>($"TM.{VenusDevice.LLAWaferSizeCheckSwitch}");
            _LLBWaferSizeCheck = DEVICE.GetDevice<IoSwitch>($"TM.{VenusDevice.LLBWaferSizeCheckSwitch}");
            _PMAWaferSizeCheck = DEVICE.GetDevice<IoSwitch>($"TM.{VenusDevice.PMAWaferSizeCheckSwitch}");
            _PMBWaferSizeCheck = DEVICE.GetDevice<IoSwitch>($"TM.{VenusDevice.PMBWaferSizeCheckSwitch}");
            _PMCWaferSizeCheck = DEVICE.GetDevice<IoSwitch>($"TM.{VenusDevice.PMCWaferSizeCheckSwitch}");
            _PMDWaferSizeCheck = DEVICE.GetDevice<IoSwitch>($"TM.{VenusDevice.PMDWaferSizeCheckSwitch}");


            _presureCtrl = DEVICE.GetDevice<IoTMPressureCtrl>($"TM.{VenusDevice.TMPressureCtrl}");

        }

        public override void Monitor()
        {
            _WaferRelayValve.TurnValve(_WaferLeakSensor.Value, out string _);
        }

        public void TurnSoftPumpValve(ModuleName mod, bool bOn)
        {
            switch(mod)
            {
                case ModuleName.TM:
                    _TMSoftPumpValve.TurnValve(bOn, out string _);
                    break;
                case ModuleName.LLA:
                    _LLASoftPumpValve.TurnValve(bOn, out string _);
                    break;
                case ModuleName.LLB:
                    _LLBSoftPumpValve.TurnValve(bOn, out string _);
                    break;

            }
        }

        public void TurnFastPumpValve(ModuleName mod, bool bOn)
        {
            switch(mod)
            {
                case ModuleName.TM:
                    _TMFastPumpValve.TurnValve(bOn, out string _);
                    break;
                case ModuleName.LLA:
                    _LLAFastPumpValve.TurnValve(bOn, out string _);
                    break;
                case ModuleName.LLB:
                    _LLBFastPumpValve.TurnValve(bOn, out string _);
                    break;
            }
        }

        public void TurnVentValve(ModuleName mod, bool bOn)
        {
            switch(mod)
            {
                case ModuleName.TM:
                    _TMSoftVentValve.TurnValve(bOn, out string _);
                    break;
                case ModuleName.LLA:
                    _LLAVentValve.TurnValve(bOn, out string _);
                    break;
                case ModuleName.LLB:
                    _LLBVentValve.TurnValve(bOn, out string _);
                    break;
            }
        }

        public void TurnPurgeValve(ModuleName mod, bool bOn)
        {
            switch(mod)
            {
                case ModuleName.TM:
                    _TMPurgeValve.TurnValve(bOn, out string _);
                    break;
                case ModuleName.LLA:
                    _LLAPurgeValve.TurnValve(bOn, out string _);
                    break;
                case ModuleName.LLB:
                    _LLBPurgeValve.TurnValve(bOn, out string _);
                    break;
            }
        }

        public void TurnN2Valve(bool bOn)
        {
            _TMN2Valve.TurnValve(bOn, out string _);
        }

        public void CloseModuleAllValves(ModuleName mod)
        {
            TurnFastPumpValve(mod, false);
            TurnSoftPumpValve(mod, false);
            TurnVentValve(mod, false);
            TurnPurgeValve(mod, false);

            if (mod == ModuleName.TM)
                TurnN2Valve(false);
        }


        public double GetModulePressure(ModuleName mod)
        {
            switch (mod)
            {
                case ModuleName.TM:
                    return TMPressure;
                case ModuleName.LLA:
                    return LLAPressure;
                case ModuleName.LLB:
                    return LLBPressure;
            }

            return 0;
        }

        public bool IsModuleATM(ModuleName mod)
        {
            switch (mod)
            {
                case ModuleName.TM:
                    return IsTMATM;
                case ModuleName.LLA:
                    return IsLLAATM;
                case ModuleName.LLB:
                    return IsLLBATM;
            }

            return false;
        }

        public bool IsModuleVaccum(ModuleName mod)
        {
            switch (mod)
            {
                case ModuleName.TM:
                    return IsTMVac;
                case ModuleName.LLA:
                    return IsLLAVac;
                case ModuleName.LLB:
                    return IsLLBVac;
            }

            return false;
        }

        public bool CheckLidClosed(ModuleName mod)
        {
            switch (mod)
            {
                case ModuleName.TM:
                    if(!TMLidClosed)
                    {
                        LOG.Write(eEvent.ERR_TM, ModuleName.TM, "TM Lid not closed");
                        return false;
                    }
                    break;
                case ModuleName.LLA:
                    if(!LLALidClosed)
                    {
                        LOG.Write(eEvent.ERR_TM, ModuleName.LLA, "LLA Lid not closed");
                        return false;
                    }
                    break;
                case ModuleName.LLB:
                    if (!LLBLidClosed)
                    {
                        LOG.Write(eEvent.ERR_TM, ModuleName.LLB, "LLB Lid not closed");
                        return false;
                    }
                    break;
            }

            return true;
        }

        public bool CheckVentValveClosed(ModuleName mod)
        {
            switch (mod)
            {
                case ModuleName.TM:
                    if (IsTMSoftVentValveOpen)
                    {
                        LOG.Write(eEvent.ERR_TM, ModuleName.TM, "TM Vent Valve not closed");
                        return false;
                    }
                    break;
                case ModuleName.LLA:
                    if (IsLLAVentValveOpen)
                    {
                        LOG.Write(eEvent.ERR_TM, ModuleName.LLA, "LLA Vent Valve not closed");
                        return false;
                    }
                    break;
                case ModuleName.LLB:
                    if (IsLLBVentValveOpen)
                    {
                        LOG.Write(eEvent.ERR_TM, ModuleName.LLB, "LLB Vent Valve not closed");
                        return false;
                    }
                    break;
            }

            return true;
        }

        public bool CheckPurgeValveClosed(ModuleName mod)
        {
            switch (mod)
            {
                case ModuleName.TM:
                    if (IsTMPurgeValveOpen)
                    {
                        LOG.Write(eEvent.ERR_TM, ModuleName.TM, "TM Purge Valve not closed");
                        return false;
                    }
                    break;
                case ModuleName.LLA:
                    if (IsLLAPurgeValveOpen)
                    {
                        LOG.Write(eEvent.ERR_TM, ModuleName.LLA, "LLA Purge Valve not closed");
                        return false;
                    }
                    break;
                case ModuleName.LLB:
                    if (IsLLBPurgeValveOpen)
                    {
                        LOG.Write(eEvent.ERR_TM, ModuleName.LLB, "LLB Purge Valve not closed");
                        return false;
                    }
                    break;
            }

            return true;
        }

        public bool CheckPumpValveClosed(ModuleName mod)
        {
            switch (mod)
            {
                case ModuleName.TM:
                    if (IsTMFastPumpOpen)
                    {
                        LOG.Write(eEvent.ERR_TM, ModuleName.TM, "TM Fast Pump Valve not closed");
                        return false;
                    }
                    else if(IsTMSoftPumpOpen)
                    {
                        LOG.Write(eEvent.ERR_TM, ModuleName.TM, "TM Soft Pump Valve not closed");
                        return false;
                    }
                    break;
                case ModuleName.LLA:
                    if (IsLLAFastPumpOpen)
                    {
                        LOG.Write(eEvent.ERR_TM, ModuleName.LLA, "LLA Fast Pump Valve not closed");
                        return false;
                    }
                    else if(IsLLASoftPumpOpen)
                    {
                        LOG.Write(eEvent.ERR_TM, ModuleName.LLA, "LLA Soft Pump Valve not closed");
                        return false;
                    }
                    break;
                case ModuleName.LLB:
                    if (IsLLBFastPumpOpen)
                    {
                        LOG.Write(eEvent.ERR_TM, ModuleName.LLB, "LLB Fast Pump Valve not closed");
                        return false;
                    }
                    else if(IsLLBSoftPumpOpen)
                    {
                        LOG.Write(eEvent.ERR_TM, ModuleName.LLB, "LLB Soft Pump Valve not closed");
                        return false;
                    }
                    break;
            }

            return true;
        }

        public bool TurnMFSlitDoor(ModuleName loadlock, bool open, out string reason)
        {
            if (open)
            {
                bool _isATMMode = SC.GetValue<bool>("System.IsATMMode");
                if (_isATMMode)
                {
                    if (!IsTMATM)
                    {
                        reason = $"TM is not ATM, can not open slit door";
                        LOG.Write(eEvent.ERR_DEVICE_INFO, Module, reason);
                        return false;
                    }

                    if (!IsModuleATM(loadlock))
                    {
                        reason = $"{loadlock} is not ATM, can not open slit door";
                        LOG.Write(eEvent.ERR_DEVICE_INFO, Module, reason);
                        return false;
                    }
                }
                else
                {
                    double maxPressureDifference = SC.GetValue<double>("System.TMLLMaxPressureDifference");
                    if (Math.Abs(GetModulePressure(loadlock) - GetModulePressure(ModuleName.TM)) > maxPressureDifference)
                    {
                        reason = $"{loadlock} and TM pressure difference exceeds the max limit {maxPressureDifference}";
                        LOG.Write(eEvent.ERR_DEVICE_INFO, Module, reason);
                        return false;
                    }
                }

            }

            switch(loadlock)
            {
                case ModuleName.LLA:
                    return _LLATSlitDoor.SetCylinder(open, out reason);
                case ModuleName.LLB:
                    return _LLBTSlitDoor.SetCylinder(open, out reason);

            }

            reason = $"Invalid module {loadlock}";
            LOG.Write(eEvent.ERR_DEVICE_INFO, Module, reason);
            return false;
        }

        public bool TurnEFEMSlitDoor(ModuleName loadlock, bool open, out string reason)
        {
            if(open && !IsModuleATM(loadlock))
            {
                reason = $"{loadlock} is not ATM, can not open EFEM side slit door";
                LOG.Write(eEvent.ERR_DEVICE_INFO, Module, reason);
                return false;
            }

            switch (loadlock)
            {
                case ModuleName.LLA:
                    return _LLAESlitDoor.SetCylinder(open, out reason);
                case ModuleName.LLB:
                    return _LLBESlitDoor.SetCylinder(open, out reason);

            }

            reason = $"Invalid module {loadlock}";
            LOG.Write(eEvent.ERR_DEVICE_INFO, Module, reason);
            return false;
        }
    }
}