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EFEM
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e806a46292
Enhance the EFEMM design for thread safe and throughput issues.
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1 year ago |
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LLs
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608cf43d67
1.做工艺前pump down 根据底压确定是否执行
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1 year ago |
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LPs
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9e9459c927
efem界面按钮功能优化
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11 months ago |
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PMs
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c1ae6b6ea1
1.Fix Chamber DE recipe process bugs
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11 months ago |
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SMIF
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49815fb19f
add VCE Module in UI && fix bug in SE Cycle
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1 year ago |
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Schedulers
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7bf784cc5a
New routing algorithm for Venus SE/DE system.
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11 months ago |
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TM
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c1ae6b6ea1
1.Fix Chamber DE recipe process bugs
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11 months ago |
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VCE
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7bf784cc5a
New routing algorithm for Venus SE/DE system.
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11 months ago |
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AutoCycle.cs
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2f30fa17c4
1、修复了Wafer_Left_Position上报数据；
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1 year ago |
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Autotransfer_LP_FA.cs
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8cf03142ec
Add the PreClean,PostClean in SequenceInfo && Add DESequenceFormat.xml for Sequence && Add Venus DETM IO && fix VCEA pump Open in UI
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1 year ago |
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DVIDName.cs
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44fc6989ef
1、Remove FabConnect dll file;
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1 year ago |
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EntityErrorRaiseTrigger.cs
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d35b997884
1.优化RevtechMatch状态机
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1 year ago |
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EntityTaskBase.cs
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5b037046f9
Add TM/LL modules.
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2 years ago |
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ManualTransfer.cs
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1b2d4bb89d
fix the manual move wafer bug while single arm option bigger than 2.
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1 year ago |
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ResourceMonitor.cs
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8436daeb68
Eliminate SE generation warning.
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1 year ago |
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RouteManager.cs
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7bf784cc5a
New routing algorithm for Venus SE/DE system.
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11 months ago |
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SEManualTransfer.cs
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75b6c4548e
submit new venus routing algorithm.
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11 months ago |
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SETMCycle.cs
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c1ae6b6ea1
1.Fix Chamber DE recipe process bugs
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11 months ago |
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SystemDispatcher.cs
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1ff7394c30
Fix the ATM cycle blocking bug.
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1 year ago |
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TMCycle.cs
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68b4ba9640
1.添加mtorr与Pa切换功能
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1 year ago |
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VenusDispatcher.cs
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c8e945317e
develop Pre/Post Clean functionalities.
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11 months ago |
sangwq
c8e945317e
develop Pre/Post Clean functionalities.