EventDefine.cs 6.9 KB

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  1. namespace Aitex.Core.RT.Log{
  2. public enum eEvent{
  3. EV_LOGOFF_INFO = 1,
  4. EV_LOGOUT_INFO = 2,
  5. ERR_LOGOFF_ERROR = 3,
  6. ERR_UPDATE_PW_ERROR = 4,
  7. ERR_DELETE_USER_ERROR = 5,
  8. ERR_UPDATE_USER_ERROR = 6,
  9. ERR_WCF_OPEN_ERROR = 9,
  10. EV_ROUTINE_NOTIFY = 10,
  11. WARN_DEFAULT_WARN = 11,
  12. ERR_ROUTINE_FAILED = 12,
  13. ERR_SIGNAL_TOWER_UNDEFINE = 13,
  14. ERR_SIGNAL_TOWER_INVALID_CFG = 14,
  15. ERR_PLC_HEARTBEAT_FAIL = 15,
  16. EV_DEVICE_INFO = 16,
  17. ERR_DEVICE_INFO = 17,
  18. ERR_EXCEPTION = 18,
  19. WARN_DEVICE_INFO = 19,
  20. EV_WAFER_MANAGER_NOTIFY = 20,
  21. WARN_WAFER_MANAGER_WARN = 21,
  22. ERR_WAFER_MANAGER_FAILED = 22,
  23. EV_FSM_NOTIFY = 23,
  24. WARN_FSM_WARN = 24,
  25. ERR_FSM_FAILED = 25,
  26. EV_ROUTER = 26,
  27. WARN_ROUTER = 27,
  28. ERR_ROUTER = 28,
  29. EV_WAFER_MOVED = 29,
  30. EV_WAFER_CREATE = 30,
  31. EV_WAFER_DELETE = 31,
  32. EV_SEQUENCE = 32,
  33. WARN_SEQUENCE = 33,
  34. ERR_SEQUENCE = 34,
  35. ERR_INTERLOCK_FAIL = 35,
  36. EV_SYSTEM_CONFIG = 36,
  37. WARN_SYSTEM_CONFIG = 37,
  38. EV_SCHEDULER = 38,
  39. WARN_SCHEDULER = 39,
  40. EXCEP_FSM = 40,
  41. EV_WAFER_DUPLICATED = 41,
  42. INFO_DEVICE_ENTITY = 42,
  43. WARN_DEVICE_ENTITY = 43,
  44. ERR_DEVICE_ENTITY = 44,
  45. INFO_WINRESOURCE = 45,
  46. WARN_WINRESOURCE = 46,
  47. ERR_WINRESOURCE = 47,
  48. ERR_PM_SCRUBBER_NOOK_STOPTRANSFER = 48,
  49. WARN_DATABASE = 49,
  50. ERR_TWINCAT = 50,
  51. EV_TWINCAT = 51,
  52. INFO_DEVICE_IO_HEATER = 1000,
  53. WARN_DEVICE_IO_HEATER = 1001,
  54. ERR_DEVICE_IO_HEATER = 1002,
  55. ERR_DRY_PUMP = 1003,
  56. ERR_PENDULUM_VALVE = 1004,
  57. ERR_ESC_HV = 1005,
  58. ERR_TURBO_PUMP = 1006,
  59. ERR_RF = 1007,
  60. INFO_DEVICE_CHILLER = 1008,
  61. WARN_DEVICE_CHILLER = 1009,
  62. ERR_DEVICE_CHILLER = 1010,
  63. WARN_RF = 1011,
  64. ERR_ENDPOINT = 1012,
  65. INFO_ENDPOINT = 1013,
  66. WARN_ENDPOINT = 1014,
  67. ERR_BACKSIDE_HE = 1015,
  68. INFO_BACKSIDE_HE = 1016,
  69. WARN_BACKSIDE_HE = 1017,
  70. ERR_PROCESS = 1018,
  71. INFO_PROCESS = 1019,
  72. WARN_PROCESS = 1020,
  73. ERR_IoGasValve = 1021,
  74. WARN_State = 1022,
  75. ERR_PM = 1023,
  76. INFO_PM = 1024,
  77. WARN_PM = 1025,
  78. INFO_Sensor = 1026,
  79. WARN_Sensor = 1027,
  80. ERR_Sensor = 1028,
  81. INFO_FA = 1029,
  82. INFO_IOCYLINDER = 1030,
  83. INFO_IO_VALVE = 1031,
  84. WARN_IO_VALVE = 1032,
  85. ERR_IO_VALVE = 1033,
  86. ERR_MATCH = 1034,
  87. WARN_MATCH = 1035,
  88. INFO_MATCH = 1036,
  89. INFO_RF = 1037,
  90. INFO_RFBox = 1038,
  91. WARN_RFBox = 1039,
  92. ERR_RFBox = 1040,
  93. INFO_HighTemperatureHeater = 1041,
  94. WARN_HighTemperatureHeater = 1042,
  95. ERR_HighTemperatureHeater = 1043,
  96. WARN_PM_TOLERANCE = 1044,
  97. ERR_PM_TOLERANCE = 1045,
  98. ERR_PM_PLC_HEARTBEAT_FAIL = 1046,
  99. ERR_PM_PROCESSNOWAFER = 1050,
  100. ERR_PM_CLEANWITHWAFER = 1051,
  101. ERR_PM_SCRUBBER_NOOK_STOPPROCESS = 1052,
  102. ERR_PM_SCRUBBER_NOOK_CONTINUEPROCESS = 1053,
  103. WARN_PM_SCRUBBER_NOOK = 1054,
  104. INFO_RF_Connect = 1100,
  105. ERR_RF_Connect = 1101,
  106. ERR_RF_WaterFlow = 1102,
  107. ERR_RF_RFGInterlock = 1103,
  108. ERR_RF_GASOFF = 1104,
  109. ERR_PV_INTERLOCK_FORELINRPRESSURE = 1180,
  110. ERR_PV_INTERLOCK_TURBOPUMPNOTATSPEED = 1182,
  111. ERR_PV_PARITY = 1183,
  112. ERR_MFC_MFC1FLOWOVERRANGE = 1220,
  113. ERR_MFC_MFC2FLOWOVERRANGE = 1221,
  114. ERR_MFC_MFC3FLOWOVERRANGE = 1222,
  115. ERR_MFC_MFC4FLOWOVERRANGE = 1223,
  116. ERR_MFC_MFC5FLOWOVERRANGE = 1224,
  117. ERR_MFC_MFC6FLOWOVERRANGE = 1225,
  118. ERR_MFC_MFC7FLOWOVERRANGE = 1226,
  119. ERR_MFC_MFC8FLOWOVERRANGE = 1227,
  120. ERR_MFC_N2FLOWOVERRANGE = 1228,
  121. ERR_MFC1_PRESSURE = 1229,
  122. ERR_MFC2_PRESSURE = 1230,
  123. ERR_MFC3_PRESSURE = 1231,
  124. ERR_MFC4_PRESSURE = 1232,
  125. ERR_MFC5_PRESSURE = 1233,
  126. ERR_MFC6_PRESSURE = 1234,
  127. ERR_MFC7_PRESSURE = 1235,
  128. ERR_MFC8_PRESSURE = 1238,
  129. ERR_N2_PRESSURE = 1239,
  130. ERR_HighTemperatureHeater_SetRatio_OverRange = 1240,
  131. ERR_HighTemperatureHeater_SetTemperature_OverRange = 1241,
  132. WARN_HighTemperatureHeater_N2 = 1242,
  133. ERR_HighTemperatureHeater_GoPosition1TimeOut = 1246,
  134. ERR_HighTemperatureHeater_GoPosition2TimeOut = 1247,
  135. ERR_HighTemperatureHeater_GoPosition3TimeOut = 1248,
  136. ERR_HighTemperatureHeater_GoPosition4TimeOut = 1249,
  137. ERR_HighTemperatureHeater_GoPosition5TimeOut = 1250,
  138. ERR_HighTemperatureHeater_TransferPosition = 1251,
  139. ERR_HighTemperatureHeater_LiftDriverAlarm = 1252,
  140. ERR_HighTemperatureHeater_LiftPosiModuleAlarm = 1253,
  141. ERR_HighTemperatureHeater_LiftORGAlarm = 1254,
  142. ERR_HighTemperatureHeater_GoOriginTimeOut = 1255,
  143. INFO_DEVICE_IO_MAGNET = 1260,
  144. WARNING_SENSOR_WATERLEAK = 1280,
  145. WARNING_SENSOR_WATERFLOW = 1281,
  146. WARNING_SENSOR_CDAPRESSURE = 1282,
  147. WARNING_SENSOR_N2PRESSURE = 1283,
  148. WARNING_SENSOR_GASBOXDOOR = 1284,
  149. WARNING_SENSOR_GASBOXPRESSURE = 1285,
  150. WARNING_SENSOR_CHBWALLOTSWALARM = 1286,
  151. WARNING_SENSOR_GASBOXN2FLOW = 1287,
  152. WARNING_SENSOR_PVPURGEPRESSUREALARM = 1288,
  153. WARNING_SENSOR_N2PURGEPRESSURE = 1289,
  154. ERR_SENSOR_WATERFLOW_STOP_CURRENTPROCESS = 1290,
  155. ERR_SENSOR_WATERFLOW_STOP_NEXTPROCESS = 1291,
  156. WARN_MFC1_PRESSURE = 1292,
  157. WARN_MFC2_PRESSURE = 1293,
  158. WARN_MFC3_PRESSURE = 1294,
  159. WARN_MFC4_PRESSURE = 1295,
  160. WARN_MFC5_PRESSURE = 1296,
  161. WARN_MFC6_PRESSURE = 1297,
  162. WARN_MFC7_PRESSURE = 1298,
  163. WARN_MFC8_PRESSURE = 1299,
  164. WARN_N2_PRESSURE = 1300,
  165. WARN_GASBOX_N2_FLOW = 1301,
  166. WARNING_SENSOR_TMP_WATERFLOW = 1302,
  167. WARNING_SENSOR_LID_WATERFLOW = 1303,
  168. ERR_TM = 2000,
  169. INFO_TM = 2001,
  170. WARN_TM = 2002,
  171. ERR_TM_MFC1FLOWOVERRANGE = 2003,
  172. ERR_TM_MFCPRESSURE = 2004,
  173. ERR_TM_PLC_HEARTBEAT_FAIL = 2005,
  174. ERR_TM_ROBOT = 2100,
  175. INFO_TM_ROBOT = 2101,
  176. ERR_TM_ROBOT_PICKSLOTOVERRANGE = 2102,
  177. ERR_TM_ROBOT_PLACESLOTOVERRange = 2103,
  178. ERR_TM_ROBOT_SETINTLOCKWAF_SEN = 2104,
  179. ERR_TM_ROBOT_SETINTLOCKRZ = 2105,
  180. ERR_TM_ROBOT_SETINTLOCK = 2106,
  181. ERR_TM_ROBOT_SETIOECHO = 2107,
  182. ERR_TM_ROBOT_SETIOSTATE = 2108,
  183. ERR_TM_ROBOT_LLA_PICK_AWCOVERRANGE = 2109,
  184. ERR_TM_ROBOT_LLB_PICK_AWCOVERRANGE = 2110,
  185. ERR_TM_ROBOT_PMA_PICK_AWCOVERRANGE = 2111,
  186. ERR_TM_ROBOT_PMB_PICK_AWCOVERRANGE = 2112,
  187. ERR_TM_ROBOT_PMC_PICK_AWCOVERRANGE = 2113,
  188. ERR_TM_ROBOT_PMD_PICK_AWCOVERRANGE = 2114,
  189. ERR_TM_ROBOT_LLA_PLACE_AWCOVERRANGE = 2115,
  190. ERR_TM_ROBOT_LLB_PLACE_AWCOVERRANGE = 2116,
  191. ERR_TM_ROBOT_PMA_PLACE_AWCOVERRANGE = 2117,
  192. ERR_TM_ROBOT_PMB_PLACE_AWCOVERRANGE = 2118,
  193. ERR_TM_ROBOT_PMC_PLACE_AWCOVERRANGE = 2119,
  194. ERR_TM_ROBOT_PMD_PLACE_AWCOVERRANGE = 2120,
  195. ERR_TM_LLA_PressureDifference = 2121,
  196. ERR_TM_LLB_PressureDifference = 2122,
  197. ERR_TM_PMA_PressureDifference = 2123,
  198. ERR_TM_PMB_PressureDifference = 2124,
  199. ERR_TM_PMC_PressureDifference = 2125,
  200. ERR_TM_PMD_PressureDifference = 2126,
  201. EV_EFEM_COMMON_INFO = 4000,
  202. WARN_EFEM_COMMON_WARN = 4001,
  203. ERR_EFEM_COMMON_FAILED = 4002,
  204. ERR_EFEM_VAC_SOURCE_PRESSURE_LOW = 4003,
  205. ERR_EFEM_IONIZER_COMPRESSED_AIR = 4004,
  206. ERR_EFEM_COMPRESSED_AIR_PRESSURE_LOW = 4005,
  207. ERR_EFEM_FLOW_GUAGE_SENSOR = 4006,
  208. ERR_EFEM_LEAKAGE = 4007,
  209. ERR_EFEM_IONIZER = 4008,
  210. ERR_EFEM_FFU = 4009,
  211. ERR_EFEM_SWITCH_TO_MAINTAIN_MODE = 4010,
  212. EV_EFEM_ROBOT = 4100,
  213. WARN_EFEM_ROBOT = 4101,
  214. ERR_EFEM_ROBOT = 4102,
  215. EV_VCE_COMMON_INFO = 4200,
  216. WARN_VCE_COMMON_WARN = 4201,
  217. ERR_VCE_COMMON_Failed = 4202,
  218. ERR_FA = 5003,
  219. WARN_FA = 5004,
  220. ERR_LL = 6000,
  221. INFO_LL = 6001,
  222. WARN_LL = 6002,
  223. ERR_LLA_MFC1FLOWOVERRANGE = 6003,
  224. ERR_LLB_MFC1FLOWOVERRANGE = 6004,
  225. ERR_LLA_MFCPRESSURE = 6005,
  226. ERR_LLB_MFCPRESSURE = 6006,
  227. INFO_TROUGHPUT_ENHANCE_TRACE = 8888,
  228. }
  229. }