Kepler2200ADeviceModel.xml 42 KB

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  1. <?xml version="1.0" encoding="utf-16"?>
  2. <DeviceModelDefine type="Kepler2200A" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance">
  3. <IoValves>
  4. <IoValve id="ValvePVN21" display="PVN21 Valve" schematicId="PVN21" unit="" isNc="true"
  5. isDefaultOpen="false" diOpen="" doOpen="DO_PVN21" diCloseSensor="" diOpenSensor="" />
  6. <IoValve id="ValvePVN22" display="PVN22 Valve" schematicId="PVN22" unit="" isNc="true"
  7. isDefaultOpen="false" diOpen="" doOpen="DO_PVN22" diCloseSensor="" diOpenSensor="" />
  8. <IoValve id="ValvePV11" display="PV11 Valve" schematicId="PV11" unit="" isNc="true"
  9. isDefaultOpen="false" diOpen="" doOpen="DO_PV11" diCloseSensor="" diOpenSensor="" />
  10. <IoValve id="ValvePV12" display="PV12 Valve" schematicId="PV12" unit="" isNc="true"
  11. isDefaultOpen="false" diOpen="" doOpen="DO_PV12" diCloseSensor="" diOpenSensor="" />
  12. <IoValve id="ValvePV21" display="PV21 Valve" schematicId="PV21" unit="" isNc="true"
  13. isDefaultOpen="false" diOpen="" doOpen="DO_PV21" diCloseSensor="" diOpenSensor="" />
  14. <IoValve id="ValvePV22" display="PV22 Valve" schematicId="PV22" unit="" isNc="true"
  15. isDefaultOpen="false" diOpen="" doOpen="DO_PV22" diCloseSensor="" diOpenSensor="" />
  16. <IoValve id="ValvePV31" display="PV31 Valve" schematicId="PV31" unit="" isNc="true"
  17. isDefaultOpen="false" diOpen="" doOpen="DO_PV31" diCloseSensor="" diOpenSensor="" />
  18. <IoValve id="ValvePV32" display="PV32 Valve" schematicId="PV32" unit="" isNc="true"
  19. isDefaultOpen="false" diOpen="" doOpen="DO_PV32" diCloseSensor="" diOpenSensor="" />
  20. <IoValve id="ValvePV41" display="PV41 Valve" schematicId="PV41" unit="" isNc="true"
  21. isDefaultOpen="false" diOpen="" doOpen="DO_PV41" diCloseSensor="" diOpenSensor="" />
  22. <IoValve id="ValvePV42" display="PV42 Valve" schematicId="PV42" unit="" isNc="true"
  23. isDefaultOpen="false" diOpen="" doOpen="DO_PV42" diCloseSensor="" diOpenSensor="" />
  24. <IoValve id="ValveN2" display="N2 valve" schematicId=""
  25. unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_N2_Valve" diCloseSensor="" diOpenSensor="" />
  26. <IoValve id="ValvePVHe1" display="PVHe1 valve" schematicId=""
  27. unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_N2_Purge1_Valve"
  28. diCloseSensor="" diOpenSensor="" />
  29. <IoValve id="ValvePVHe2" display="PVHe2 valve" schematicId=""
  30. unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_N2_Purge2_Valve"
  31. diCloseSensor="" diOpenSensor="" />
  32. <IoValve id="ValveGasFinal" display="Gas Final valve" schematicId=""
  33. unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_Gas_Final_Valve"
  34. diCloseSensor="" diOpenSensor="" />
  35. <IoValve id="ValveSoftPump" display="Soft Pump valve" schematicId=""
  36. unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_Soft_Pumping_Valve"
  37. diCloseSensor="" diOpenSensor="" />
  38. <IoValve id="ValveFastPump" display="FastPump valve" schematicId=""
  39. unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_Fast_Pumping_Valve" diCloseSensor="" diOpenSensor="" />
  40. <IoValve id="ValveTurboPumpPumping" display="Turbo Pump Pumping valve" schematicId=""
  41. unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_Turbo_Pump_Pumping_Valve"
  42. diCloseSensor="" diOpenSensor="" />
  43. <IoValve id="ValveTurboPumpPurge" display="Turbo Pump Purge valve" schematicId=""
  44. unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_Turbo_Pump_Purge_Valve"
  45. diCloseSensor="" diOpenSensor="" />
  46. <IoValve id="ValveGuage" display="Guage valve" schematicId=""
  47. unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_Gauge_Valve"
  48. diCloseSensor="" diOpenSensor="" />
  49. <IoValve id="ValveMfc1" display="MFC1 Valve" schematicId="PV1" unit="" isNc="true"
  50. isDefaultOpen="false" diOpen="" doOpen="DO_MFC1_Valve" diCloseSensor="" diOpenSensor="" />
  51. <IoValve id="ValveMfc2" display="MFC2 Valve" schematicId="PV2" unit="" isNc="true"
  52. isDefaultOpen="false" diOpen="" doOpen="DO_MFC2_Valve" diCloseSensor="" diOpenSensor="" />
  53. <IoValve id="ValveMfc3" display="MFC3 Valve" schematicId="PV3" unit="" isNc="true"
  54. isDefaultOpen="false" diOpen="" doOpen="DO_MFC3_Valve" diCloseSensor="" diOpenSensor="" />
  55. <IoValve id="ValveMfc4" display="MFC4 Valve" schematicId="PV4" unit="" isNc="true"
  56. isDefaultOpen="false" diOpen="" doOpen="DO_MFC4_Valve" diCloseSensor="" diOpenSensor="" />
  57. <IoValve id="ValveMfc5" display="MFC5 Valve" schematicId="PV5" unit="" isNc="true"
  58. isDefaultOpen="false" diOpen="" doOpen="DO_MFC5_Valve" diCloseSensor="" diOpenSensor="" />
  59. <IoValve id="ValveMfc6" display="MFC6 Valve" schematicId="PV6" unit="" isNc="true"
  60. isDefaultOpen="false" diOpen="" doOpen="DO_MFC6_Valve" diCloseSensor="" diOpenSensor="" />
  61. <IoValve id="ValveMfc7" display="MFC7 Valve" schematicId="PV7" unit="" isNc="true"
  62. isDefaultOpen="false" diOpen="" doOpen="DO_MFC7_Valve" diCloseSensor="" diOpenSensor="" />
  63. <IoValve id="ValveMfc8" display="MFC8 Valve" schematicId="PV8" unit="" isNc="true"
  64. isDefaultOpen="false" diOpen="" doOpen="DO_MFC8_Valve" diCloseSensor="" diOpenSensor="" />
  65. </IoValves>
  66. <IoMfcs assembly="Venus_RT" classType="Venus_RT.Devices.IODevices.IoMfc">
  67. <IoMfc id="MfcGas1" display="Gas1" schematicId="MFC1" unit="sccm"
  68. aiFlow="AI_MFC1_Flow" aoFlow="AO_MFC1_Flow_Setpoint" diOffline="" aoRange=""
  69. diPressureAlarm="DI_MFC1_Pressure_SW"/>
  70. <IoMfc id="MfcGas2" display="Gas2" schematicId="MFC2" unit="sccm"
  71. aiFlow="AI_MFC2_Flow" aoFlow="AO_MFC2_Flow_Setpoint" diOffline="" aoRange=""
  72. diPressureAlarm="DI_MFC2_Pressure_SW"/>
  73. <IoMfc id="MfcGas3" display="Gas3" schematicId="MFC3" unit="sccm"
  74. aiFlow="AI_MFC3_Flow" aoFlow="AO_MFC3_Flow_Setpoint" diOffline="" aoRange=""
  75. diPressureAlarm="DI_MFC3_Pressure_SW"/>
  76. <IoMfc id="MfcGas4" display="Gas4" schematicId="MFC4" unit="sccm"
  77. aiFlow="AI_MFC4_Flow" aoFlow="AO_MFC4_Flow_Setpoint" diOffline="" aoRange=""
  78. diPressureAlarm="DI_MFC4_Pressure_SW"/>
  79. <IoMfc id="MfcGas5" display="Gas5" schematicId="MFC5" unit="sccm"
  80. aiFlow="AI_MFC5_Flow" aoFlow="AO_MFC5_Flow_Setpoint" diOffline="" aoRange=""
  81. diPressureAlarm="DI_MFC5_Pressure_SW"/>
  82. <IoMfc id="MfcGas6" display="Gas6" schematicId="MFC6" unit="sccm"
  83. aiFlow="AI_MFC6_Flow" aoFlow="AO_MFC6_Flow_Setpoint" diOffline="" aoRange=""
  84. diPressureAlarm="DI_MFC6_Pressure_SW"/>
  85. <IoMfc id="MfcGas7" display="Gas7" schematicId="MFC7" unit="sccm"
  86. aiFlow="AI_MFC7_Flow" aoFlow="AO_MFC7_Flow_Setpoint" diOffline="" aoRange=""
  87. diPressureAlarm="DI_MFC7_Pressure_SW"/>
  88. <IoMfc id="MfcGas8" display="Gas8" schematicId="MFC8" unit="sccm"
  89. aiFlow="AI_MFC8_Flow" aoFlow="AO_MFC8_Flow_Setpoint" diOffline="" aoRange=""
  90. diPressureAlarm="DI_MFC8_Pressure_SW"/>
  91. <IoMfc id="MfcN2" display="N2" schematicId="N2" unit="sccm"
  92. aiFlow="AI_Turbo_Pump_N2_Flow" aoFlow="AO_Turbo_Pump_N2_Flow_Setpoint" diOffline="" aoRange=""
  93. diPressureAlarm="DI_PN2_Pressure_SW"/>
  94. </IoMfcs>
  95. <IoGasSticks assembly="Venus_RT" classType="Venus_RT.Devices.IoGasStick">
  96. <IoGasStick id="GasStick1" display="" mfc ="MfcGas1" downvalve="ValveMfc1" />
  97. <IoGasStick id="GasStick2" display="" mfc ="MfcGas2" downvalve="ValveMfc2" />
  98. <IoGasStick id="GasStick3" display="" mfc ="MfcGas3" downvalve="ValveMfc3" />
  99. <IoGasStick id="GasStick4" display="" mfc ="MfcGas4" downvalve="ValveMfc4" />
  100. <IoGasStick id="GasStick5" display="" mfc ="MfcGas5" downvalve="ValveMfc5" />
  101. <IoGasStick id="GasStick6" display="" mfc ="MfcGas6" downvalve="ValveMfc6" />
  102. <IoGasStick id="GasStick7" display="" mfc ="MfcGas7" downvalve="ValveMfc7" />
  103. <IoGasStick id="GasStick8" display="" mfc ="MfcGas8" downvalve="ValveMfc8" />
  104. <IoGasStick id="GasStickN2" display="" mfc ="MfcN2" downvalve="ValveTurboPumpPurge" />
  105. </IoGasSticks>
  106. <IoBacksideHes assembly="Venus_RT" classType="Venus_RT.Devices.IoBacksideHe">
  107. <IoBacksideHe id="BacksideHelium" display="" mfc="MfcHe" downvalve="ValvePVHe1" aoControlMode="AO_ESC_He_Control_Mode" aoPressureSP="AO_ESC_He_Pressure_Setpoint" />
  108. </IoBacksideHes>
  109. <IoSensors>
  110. <IoSensor id="SensorATMSwitch" display="ATM Switch" schematicId="" unit="" di="DI_ATM_Switch" isLowAsNormal="" textOutTrigValue="true" infoText="" warningText="" alarmText="" />
  111. <IoSensor id="SensorPMLidClosed" display="PM Lid Closed" schematicId="" unit="" di="DI_Lid_Closed" isLowAsNormal="" textOutTrigValue="false"
  112. infoText="" warningText="" alarmText="" />
  113. <IoSensor id="SensorLoadlockATMSwitch" display="Loadlock ATM Switch" schematicId="" unit="" di="DI_Loadlock_ATM_SW" isLowAsNormal="" textOutTrigValue="true"
  114. infoText="" warningText="" alarmText="" />
  115. <IoSensor id="SensorVacSwitch" display="VAC Switch" schematicId="" unit="" di="DI_VAC_Switch" isLowAsNormal="" textOutTrigValue="true"
  116. infoText="" warningText="" alarmText="" />
  117. <IoSensor id="SensorWaterLeakOk" display="Water Leak Ok" schematicId="" unit="" di="DI_Water_Leak_Sensor" isLowAsNormal="" textOutTrigValue="false"
  118. infoText="" warningText="Sensor water leak" alarmText="" />
  119. <IoSensor id="SensorCDAPressureOk" display="CDA pressure OK" schematicId="" unit="" di="DI_CDA_Pressure_Switch" isLowAsNormal="" textOutTrigValue="false"
  120. infoText="" warningText="Sensor CDA pressure abnormal" alarmText="" />
  121. <IoSensor id="N2PressureOk" display="N2 Pressure OK" schematicId="" unit="" di="DI_PN2_Pressure_Switch" isLowAsNormal="" textOutTrigValue="false"
  122. infoText="" warningText="N2 Pressure Alarm" alarmText="" />
  123. <IoSensor id="GeneratorInterlock" display="RFG hardware interlock" schematicId="" unit="" di="DI_Source_RF_Generator_Interlock" isLowAsNormal="" textOutTrigValue="false" infoText="Generator interlock" warningText="" alarmText="" />
  124. <IoSensor id="SensorSourceRFFan" display="Source RF Fan" schematicId="" unit="" di="DI_Source_RF_Fan" isLowAsNormal="" textOutTrigValue="true" infoText="Source RF Fan" warningText="" alarmText="Source RF Fan Alarm" />
  125. <IoSensor id="SensorSlitDoorClosed" display="Slit Door Closed" schematicId="" unit="" di="DI_Slit_Door_Close_POS" isLowAsNormal="" textOutTrigValue="false" infoText="" warningText="" alarmText="" />
  126. <IoSensor id="TurboPumpInterlock" display="Turbo Pump Interlock" schematicId="" unit="" di="DI_Turbo_Pump_Interlock" isLowAsNormal="" textOutTrigValue="false" infoText="" warningText="" alarmText="" />
  127. <IoSensor id="GasBoxDoorSW" display="Gas Box Door SW" schematicId="" unit="" di="DI_Gas_Box_Door_Switch" isLowAsNormal="" textOutTrigValue="false" infoText="" warningText="" alarmText="Gas Box Door SW Alarm" />
  128. <IoSensor id="GasBoxPressureSW" display="Gas Box Pressure SW" schematicId="" unit="" di="DI_Gas_Box_Pressure_Switch" isLowAsNormal="" textOutTrigValue="false" infoText="" warningText="" alarmText="Gas Box Pressure Alarm" />
  129. <IoSensor id="CHBWallOTSWAlarm" display="CHB Wall OT SW Alarm" schematicId="" unit="" di="DI_CHB_Wall_OT_SW_Alarm" isLowAsNormal="" textOutTrigValue="true" infoText="" warningText="" alarmText="CHB Wall OT SW Alarm" />
  130. <IoSensor id="SensorSmallWaferInPos" display="Small Wafer in Pos" schematicId="" unit="" di="DI_Small_Wafer_In_POS" isLowAsNormal="" textOutTrigValue="true"
  131. infoText="" warningText="" alarmText="" />
  132. </IoSensors>
  133. <IoPressureMeters assembly="Venus_RT" classType="Venus_RT.Devices.IODevices.IoPressureMeter">
  134. <IoPressureMeter id="ProcessGauge" display="Process Pressure" schematicId="" unit="mTorr"
  135. aiValue="AI_Process_Pressure_100mt" diGaugeFail="" scPrecision="" scOffset=""/>
  136. <IoPressureMeter id="PressureGauge" display="Chamber Pressure" schematicId="" unit="mTorr"
  137. aiValue="AI_Chamber_Pressure_10t"
  138. diGaugeFail=""
  139. scPrecision="ChamberPressureGaugePrecision"
  140. scOffset=""/>
  141. <IoPressureMeter id="ForelineGauge" display="Foreline Pressure" schematicId="" unit="mTorr"
  142. aiValue="AI_Foreline_Pressure_10t" diGaugeFail="DI_Chamber_Pressure_760t_Gauge_Alarm" scPrecision="" scOffset=""/>
  143. <IoPressureMeter id="ProcessPressureHigh" display="ProcessPressureHigh" schematicId="" unit="mTorr"
  144. aiValue="AI_Chamber_Pressure_10t" diGaugeFail="" scPrecision="" scOffset=""/>
  145. <IoPressureMeter id="ProcessPressureLow" display="ProcessPressureLow" schematicId="" unit="mTorr"
  146. aiValue="AI_Process_Pressure_100mt" diGaugeFail="" scPrecision="" scOffset=""/>
  147. </IoPressureMeters>
  148. <IoPumps assembly="Venus_RT" classType="Venus_RT.Devices.IoPump" IsEnabled = "False">
  149. <IoPump id="MainPump" display="Main Pump" schematicId="MainPump" unit="mTorr"
  150. diBreakerState=""
  151. diRunning="DI_Pump_Running"
  152. diStart=""
  153. diStop=""
  154. diAlarm="DI_Pump_Alarm"
  155. diWarning="DI_Pump_Warning"
  156. diPumpTempAlarm=""
  157. diN2Alarm="DI_Pump_N2_Purge_Alarm"
  158. diWaterFlowAlarm="DI_Pump_Cool_Water_Flow_Alarm"
  159. diExhaustPressureAlarm="DI_Pump_Exhaust_Pressure_Alarm"
  160. doStart="DO_Pump_Start"
  161. doStop="DO_Pump_Stop"
  162. doWaterFlowAlarm=""
  163. doN2PressureAlarm=""
  164. aiWaterFlow=""
  165. aiN2Pressure=""
  166. aoN2PressureAlarmMaxValue=""
  167. aoN2PressureAlarmMinValue=""
  168. aoWaterFlowAlarmMaxValue=""
  169. aoWaterFlowAlarmMinValue=""
  170. scEnableDryPump="EnableDryPump"
  171. scEnableWaterFlow="PumpEnableWaterFlow"
  172. scWaterFlowMinValue="PumpWaterFlowMinValue"
  173. scWaterFlowMaxValue="PumpWaterFlowMaxValue"
  174. scWaterFlowOutOfToleranceWarningTime="PumpWaterFlowOutOfToleranceWarningTime"
  175. scWaterFlowOutOfToleranceAlarmTime="PumpWaterFlowOutOfToleranceAlarmTime"
  176. scEnableN2Pressure="PumpEnableN2Pressure"
  177. scN2PressureMinValue="PumpN2PressureMinValue"
  178. scN2PressureMaxValue="PumpN2PressureMaxValue"
  179. scN2PressureOutOfToleranceWarningTime="PumpN2PressureOutOfToleranceWarningTime"
  180. scN2PressureOutOfToleranceAlarmTime="PumpN2PressureOutOfToleranceAlarmTime" />
  181. </IoPumps>
  182. <IoPressureControls assembly="Venus_RT" classType="Venus_RT.Devices.IoPressureControl">
  183. <IoPressureControl id="PressureControl" display="PressureControl" schematicId="PressureControl" unit="mTorr"
  184. diLogicProcessGasFlowing=""
  185. scGasFlowPressureAlarmRange="GasFlowPressureAlarmRange"
  186. scGasFlowPressureAlarmTime="GasFlowPressureAlarmTime"
  187. scIsIndependentControl="IsIndependentControl"
  188. scIsBoostPumpInstalled="EnableBoosterPump"
  189. scTvInstalled="EnableThrottleValve"
  190. boost="" tv="ThrottleValve" drypump="MainPump"
  191. pressureMeter ="PressureGauge" processMeter="ProcessGauge" forelineMeter="ForelineGauge" loadlockMeter="LoadlockGauge" processPressureHigh="ProcessPressureHigh" processPressureLow="ProcessPressureLow"/>
  192. </IoPressureControls>
  193. <IoHeaters assembly="Venus_RT" classType="Venus_RT.Devices.IoHeater">
  194. <IoHeater id="ValveHeater" display="Valve Heater" schematicId="" unit="℃"
  195. doPowerOn="DO_Valve_Heater_On"
  196. diDeviation="DI_Valve_TC_Deviation_out_of_range"
  197. diPowerOnFeedback="DI_Valve_Heater_On_FB"
  198. diControlTcBroken="DI_Valve_Control_TC_Broken_Alarm"
  199. diMonitorTcBroken="DI_Valve_Monitor_TC_Broken_Alarm"
  200. aoSetPoint="AO_Valve_Temperature_Setpoint"
  201. aoSetPointLimit="AO_Valve_Temp_Limit_Setpoint"
  202. aiFeedback="AI_Valve_Control_TC_Temp"
  203. aiMonitor=""
  204. scSetPointLimit="ValveHeaterSetPointLimit" />
  205. <IoHeater id="ForelineHeater" display="Foreline Heater" schematicId="" unit="℃"
  206. doPowerOn="DO_Foreline_Heater_On"
  207. diDeviation="DI_Foreline_TC_Deviation_out_of_range"
  208. diPowerOnFeedback="DI_Valve_Heater_On_FB"
  209. diControlTcBroken="DI_Foreline_Control_TC_Broken_Alarm"
  210. diMonitorTcBroken="DI_Foreline_Monitor_TC_Broken_Alarm"
  211. aoSetPoint="AO_Foreline_Temperature_Setpoint"
  212. aoSetPointLimit="AO_Foreline_Temp_Limit_Setpoint"
  213. aiFeedback="AI_Fline_Control_TC_Temp"
  214. aiMonitor=""
  215. scSetPointLimit="ForeLineHeaterSetPointLimit" />
  216. <IoHeater id="WallHeater" display="Wall Heater" schematicId="" unit="℃"
  217. doPowerOn="DO_CHB_Wall_Heater_On"
  218. diDeviation="DI_CHB_Wall_TC_Deviation_out_of_range"
  219. diPowerOnFeedback="DI_CHB_Wall_Heater_On_FB"
  220. diControlTcBroken="DI_CHB_Wall_Control_TC_Broken_Alarm"
  221. diMonitorTcBroken="DI_CHB_Wall_Monitor_TC_Broken_Alarm"
  222. aoSetPoint="AO_CHB_Wall_Temperature_Setpoint"
  223. aoSetPointLimit="AO_CHB_Wall_Temp_Limit_Setpoint"
  224. aiFeedback="AI_CHB_Wall_Control_TC_Temp"
  225. aiMonitor=""
  226. scSetPointLimit="WallHeaterSetPointLimit" />
  227. </IoHeaters>
  228. <IoHeartbeats assembly="Venus_RT" classType=" Venus_RT.Devices.IODevices.IoHeartbeat">
  229. <IoHeartbeat id="Heartbeat" display="" schematicId="" unit="" ao="AO_Heartbeat" ai="AI_Heartbeat_FB" />
  230. </IoHeartbeats>
  231. <IoResets>
  232. <IoReset id="ResetPlcSignal" display="" schematicId="" unit="" doReset="DO_Reset_Signal" />
  233. </IoResets>
  234. <IoSetConfigs>
  235. <IoSetConfig id="SetProcessPressureOffset" display="" schematicId="" unit="" aoPressureOffset="AO_Process_Pressure_Offset_Value" />
  236. </IoSetConfigs>
  237. <IoStatisticss>
  238. <IoStatistics id="StatisticsRfOnTime" display="RF On Statistics" schematicId="" unit=""
  239. diMonitorSignal="DI_Generator_Power_Status"
  240. scLastPMTime="RfOnTimeLastPMTime"
  241. scTimeFromLastPM="RfOnTimeFromLastPM"
  242. scTimeTotal="RfOnTimeTotal"
  243. scEnableAlarm="RfOnTimeEnableAlarm"
  244. scPMInterval="RfOnTimePMInterval" />
  245. <IoStatistics id="StatisticsPumpOnTime" display="Pump On Statistics" schematicId="" unit=""
  246. diMonitorSignal="DI_Pump_Running"
  247. scLastPMTime="PumpOnTimeLastPMTime"
  248. scTimeFromLastPM="PumpOnTimeFromLastPM"
  249. scTimeTotal="PumpOnTimeTotal"
  250. scEnableAlarm="PumpOnTimeEnableAlarm"
  251. scPMInterval="PumpOnTimePMInterval" />
  252. </IoStatisticss>
  253. <IoPlcDateTimes>
  254. <IoPlcDateTime id="PlcDateTime" display="PlcDateTime" schematicId="" unit=""
  255. aiYear="AI_Year" aiMonth="AI_Month" aiDay="AI_Day" aiHour="AI_Time" aiMinute="AI_Minute" aiSecond="AI_Second" />
  256. </IoPlcDateTimes>
  257. <IoCylinders assembly="Venus_RT" classType="Venus_RT.Devices.IoCylinder">
  258. <IoCylinder id="SlitDoor" display="Slit door" schematicId="" unit="" doMotorRelay=""
  259. doON="DO_Slit_Door_Open" doOFF="DO_Slit_Door_Close" diON="DI_Slit_Door_Open_POS" diOFF="DI_Slit_Door_Close_POS" />
  260. </IoCylinders>
  261. <IoLids assembly="Venus_RT" classType=" Venus_RT.Devices.IODevices.IoLid">
  262. <IoLid id="Lid" display="Lid" schematicId="" unit="" doMotorRelay="" doON="DO_Lid_Up" doOFF="DO_Lid_Down" diON="" diOFF="DI_Lid_Closed" />
  263. </IoLids>
  264. <IoMessages assembly="Venus_RT" classType=" Venus_RT.Devices.IODevices.IoMessage">
  265. <IoMessage id="Messager" display="Messager" schematicId="" unit="" doMotorRelay="" ai="" ao="AO_BaisRF_Enable" />
  266. </IoMessages>
  267. <IoPumpCtrls assembly="Venus_RT" classType="Venus_RT.Devices.IODevices.IoPumpCtrl">
  268. <IoPumpCtrl id="PumpCtrl" display="Lid" schematicId="" unit="" aoPumpIOCTRLEnable="AO_Pump_IO_CTRL_Enable" doPumpRun="DO_Pump_Run" doPumpStop="DO_Pump_Stop" diDryPumpRunning="DI_Dry_Pump_Running" diBoosterPumpRunning="" diPumpRemoteStatus="DI_Pump_Remote_Status" diPumpAlarm="DI_Pump_Alarm"/>
  269. </IoPumpCtrls>
  270. <IoHighTemperatureHeaters assembly="Venus_RT" classType="Venus_RT.Devices.IODevices.IoHighTemperatureHeater">
  271. <IoHighTemperatureHeater id="HighTemperatureHeater" display="High Temperature Heater" schematicId="" unit="℃"
  272. doPowerOn ="DO_CHB_H-HT_Heater_On"
  273. diPowerOnFeedback ="DI_CHB_H-HT_Heater_On_FB"
  274. aiTemperatureFeedback ="AI_CHB_H-HT_Control_TC_Temp"
  275. aoTemperatureSetPoint ="AO_CHB_H-HT_Temperature_Setpoint"
  276. diGoPosition1Feedback ="DI_Lift_Servo_Go_Position1_Complete"
  277. doGoPosition1On ="DO_Lift_Servo_Go_Position1"
  278. diGoPosition2Feedback ="DI_Lift_Servo_Go_Position2_Complete"
  279. doGoPosition2On ="DO_Lift_Servo_Go_Position2"
  280. diGoPosition3Feedback ="DI_Lift_Servo_Go_Position3_Complete"
  281. doGoPosition3On ="DO_Lift_Servo_Go_Position3"
  282. diGoOriginFeedback ="DI_Lift_Servo_with_origin"
  283. doGoOriginOn ="DO_Lift_Servo_Origin"
  284. />
  285. </IoHighTemperatureHeaters>
  286. </DeviceModelDefine>