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- using Aitex.Core.Common.DeviceData;
- using Aitex.Core.RT.DataCenter;
- using Aitex.Core.RT.Device;
- using Aitex.Core.RT.Log;
- using Aitex.Core.RT.OperationCenter;
- using Aitex.Core.RT.SCCore;
- using Aitex.Core.RT.Tolerance;
- using MECF.Framework.Common.Communications;
- using MECF.Framework.Common.DataCenter;
- using MECF.Framework.Common.Device.Bases;
- using MECF.Framework.Common.Equipment;
- using System;
- using System.Collections.Generic;
- using System.Linq;
- using System.Text;
- using System.Text.RegularExpressions;
- using System.Threading.Tasks;
- using Venus_Core;
- namespace Venus_RT.Devices
- {
- public class TruPlasmaRF : RfPowerBase
- {
- private readonly AsyncSerialPort _serial;
- public TruPlasmaRF(ModuleName mod, VenusDevice device) : base(mod.ToString(), device.ToString())
- {
- var portNum = SC.GetStringValue(device == VenusDevice.Rf ? $"{mod}.Rf.Port" : $"{mod}.BiasRf.Port");
- _serial = new AsyncSerialPort(portNum, 9600, 8, System.IO.Ports.Parity.None, System.IO.Ports.StopBits.One, "\r\r");
- }
- public override bool Initialize()
- {
- base.Initialize();
-
- if (_serial.Open())
- {
- _serial.OnDataChanged += SerialPortDataReceived;
- _serial.OnErrorHappened += SerialPortErrorOccurred;
- }
- else
- {
- LOG.Write(eEvent.ERR_RF, Module, "Tru 射频发生器串口无法打开");
- return false;
- }
-
- return true;
- }
- private void SerialPortDataReceived(string str)
- {
- }
- private void SerialPortErrorOccurred(string obj)
- {
- LOG.Write(eEvent.ERR_RF, Module, $"Tru 射频串口出错, [{obj}]");
- }
- public override void SetPower(float val)
- {
- var power = !_scEnableCalibration.BoolValue ? val : CalibrationData(val, true);
- List<byte> baseBytes = new List<byte>() { 0xAA, 0x02, 0x0B, 0x00, 0x02, 0x06, 0x00, 0x01, 0x00, 0x04 };
- byte[] valueBytes = BitConverter.GetBytes((int)val);
- baseBytes.AddRange(valueBytes);
- baseBytes = CRC16(baseBytes.ToArray());
- baseBytes.Add(0x55);
- _serial.Write(baseBytes.ToArray());
- }
- public override bool SetPowerOnOff(bool on, out string str)
- {
- str = "";
- var _chamber = DEVICE.GetDevice<JetPMBase>(Module);
- if (on && !_chamber.CheckGeneratorAndHVInterlock(VenusDevice.Rf))
- {
- return false;
- }
- List<byte> baseBytes = new List<byte>() { 0xAA, 0x02, 0x0B, 0x00, 0x02, 0x6F, 0x00, 0x01, 0x00, 0x07 };
- if (on == true)
- {
- baseBytes.AddRange(new List<byte> { 0x01, 0x00, 0x00, 0x00 });
- }
- else
- {
- baseBytes.AddRange(new List<byte> { 0x00, 0x00, 0x00, 0x00 });
- }
- baseBytes = CRC16(baseBytes.ToArray());
- baseBytes.Add(0x55);
- _serial.Write(baseBytes.ToArray());
- return true;
- }
- public override void SetPulseMode(bool on)
- {
- List<byte> baseBytes = new List<byte>() { 0xAA, 0x02, 0x0B, 0x00, 0x02, 0x6A, 0x01, 0x01, 0x00, 0x04 };
- if (on == true)
- {
- baseBytes.AddRange(new List<byte> { 0x01, 0x00, 0x00, 0x00 });
- }
- else
- {
- baseBytes.AddRange(new List<byte> { 0x00, 0x00, 0x00, 0x00 });
- }
- baseBytes = CRC16(baseBytes.ToArray());
- baseBytes.Add(0x55);
- _serial.Write(baseBytes.ToArray());
- }
- public override void SetPulseRateFreq(int nFreq)
- {
- if (nFreq > 0)
- {
- List<byte> baseBytes = new List<byte>() { 0xAA, 0x02, 0x0B, 0x00, 0x02, 0x6C, 0x01, 0x01, 0x00, 0x04 };
- byte[] valueBytes = BitConverter.GetBytes(nFreq);
- baseBytes.AddRange(valueBytes);
- baseBytes = CRC16(baseBytes.ToArray());
- baseBytes.Add(0x55);
- _serial.Write(baseBytes.ToArray());
- }
- else
- {
- LOG.Write(eEvent.ERR_RF, Module, $"{Name},SetPulseRateFreq() parameter error: {nFreq}");
- }
- }
- public override void SetPulseDutyCycle(int percentage)
- {
- if (percentage >= 10 && percentage <= 90)
- {
- List<byte> baseBytes = new List<byte>() { 0xAA, 0x02, 0x0B, 0x00, 0x02, 0x6D, 0x01, 0x01, 0x00, 0x04 };
- byte[] valueBytes = BitConverter.GetBytes(percentage);
- baseBytes.AddRange(valueBytes);
- baseBytes = CRC16(baseBytes.ToArray());
- baseBytes.Add(0x55);
- _serial.Write(baseBytes.ToArray());
- }
- else
- {
- LOG.Write(eEvent.ERR_RF, Module, $"{Name},SetPulseDutyCycle() parameter error: {percentage}");
- }
- }
- #region 霍廷格RF协议crc-16/CCITT-FALSE校验
- private bool CRC16(byte[] buffer, ref byte[] ResCRC16) // crc-16/CCITT-FALSE,判断校验
- {
- bool status = false;
- ushort crc = 0xFFFF;
- int size = buffer.Length; //计算待计算的数据长度
- int i = 0;
- if (size > 0)
- {
- while (size-- > 0)
- {
- crc = (ushort)((crc >> 8) | (crc << 8));
- crc ^= buffer[i++];
- crc ^= (ushort)(((byte)crc) >> 4);
- crc ^= (ushort)(crc << 12);
- crc ^= (ushort)((crc & 0xff) << 5);
- }
- }
- //判断输入的ResCRC16与计算出来的是否一致
- if (ResCRC16[0] == (byte)((crc >> 8) & 0xff) && ResCRC16[1] == (byte)(crc & 0xff))
- {
- status = true;
- }
- return status;
- }
- private List<byte> CRC16(byte[] buffer) // crc-16/CCITT-FALSE,补全两个字节
- {
- ushort crc = 0xFFFF;
- int size = buffer.Length; //计算待计算的数据长度
- int i = 0;
- if (size > 0)
- {
- while (size-- > 0)
- {
- crc = (ushort)((crc >> 8) | (crc << 8));
- crc ^= buffer[i++];
- crc ^= (ushort)(((byte)crc) >> 4);
- crc ^= (ushort)(crc << 12);
- crc ^= (ushort)((crc & 0xff) << 5);
- }
- }
- var byteList = buffer.ToList();
- byteList.Add((byte)(crc & 0xff));
- byteList.Add((byte)((crc >> 8) & 0xff));
- return byteList;
- }
- #endregion
- }
- }
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