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TM
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DeviceModelVenusSE_MF.xml

DeviceModelVenusSE_MF.xml 14 KB
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  1. <?xml version="1.0" encoding="utf-16"?>
    2. 

  2. <DeviceModelDefine type="SETM" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xsi:noNamespaceSchemaLocation="DeviceModel.xsd">
    3. 

  3. 	<IoValves>
    4. 

  4. 		<IoValve id="TMFastPumpValve" display="TM Fast Pump Valve" schematicId="FastPumpTM" unit="" isNc="true"
    5. 

  5. 	        isDefaultOpen="false" diOpen="" doOpen="DO_TM_Fast_Pumping" diCloseSensor="" diOpenSensor="" />
    6. 

  6. 		<IoValve id="TMSoftPumpValve" display="TM Soft Pump Valve" schematicId="SoftPumpTM" unit="" isNc="true"
    7. 

  7. 			isDefaultOpen="false" diOpen="" doOpen="DO_TM_Soft_Pumping" diCloseSensor="" diOpenSensor="" />
    8. 

  8. 		<IoValve id="VCESoftPumpValve" display="VCE Soft Pump Valve" schematicId="SoftPumpVCE" unit="" isNc="true"
    9. 

  9. 			isDefaultOpen="false" diOpen="" doOpen="DO_VCE_Soft_Pumping" diCloseSensor="" diOpenSensor="" />
    10. 

  10. 		<IoValve id="VCEFastPumpValve" display="VCE Fast Pump Valve" schematicId="FastPumpVCE" unit="" isNc="true"
    11. 

  11. 			isDefaultOpen="false" diOpen="" doOpen="DO_VCE_Fast_Pumping" diCloseSensor="" diOpenSensor="" />
    12. 

  12. 		<IoValve id="TMFastVentValve" display="TM Fast Vent Valve" schematicId="FastVentTM" unit="" isNc="true"
    13. 

  13. 			isDefaultOpen="false" diOpen="" doOpen="DO_TM_Fast_Vent" diCloseSensor="" diOpenSensor="" />
    14. 

  14. 		<IoValve id="TMSoftVentValve" display="TM Soft Vent Valve" schematicId="SoftVentTM" unit="" isNc="true"
    15. 

  15. 			isDefaultOpen="false" diOpen="" doOpen="DO_TM_Soft_Vent" diCloseSensor="" diOpenSensor="" />
    16. 

  16. 		<IoValve id="VCESoftVentValve" display="VCE Soft Vent Valve" schematicId="SoftVentVCE" unit="" isNc="true"
    17. 

  17. 			isDefaultOpen="false" diOpen="" doOpen="DO_VCE_Soft_Vent" diCloseSensor="" diOpenSensor="" />
    18. 

  18. 		<IoValve id="VCEFastVentValve" display="VCE Fast Vent Valve" schematicId="FastVentVCE" unit="" isNc="true"
    19. 

  19. 			isDefaultOpen="false" diOpen="" doOpen="DO_VCE_Fast_Vent" diCloseSensor="" diOpenSensor="" />
    20. 

  20. 	</IoValves>
    21. 

  21. 

  22. 	<IoSensors>
    23. 

  23. 		<IoSensor id="VCESlitDoorOpenEnable" display="VCE Slit Door Open Enable"  schematicId="" unit="" di="DI_VCE_SLIT_DOOR_OPEN_ENABLE" isLowAsNormal="" textOutTrigValue="false"
    24. 

  24. 				infoText="" warningText="" alarmText="" />
    25. 

  25. 		<IoSensor id="PMASlitDoorOpenEnable" display="PMA Slit Door Open Enable"  schematicId="" unit="" di="DI_PMA_SLIT_DOOR_OPEN_ENABLE" isLowAsNormal="" textOutTrigValue="false"
    26. 

  26. 						infoText="" warningText="" alarmText="" />
    27. 

  27. 		<IoSensor id="PMBSlitDoorOpenEnable" display="PMB Slit Door Open Enable"  schematicId="" unit="" di="DI_PMB_SLIT_DOOR_OPEN_ENABLE" isLowAsNormal="" textOutTrigValue="false"
    28. 

  28. 				infoText="" warningText="" alarmText="" />
    29. 

  29. 		<IoSensor id="PMCSlitDoorOpenEnable" display="PMC Slit Door Open Enable"  schematicId="" unit="" di="DI_PMC_SLIT_DOOR_OPEN_ENABLE" isLowAsNormal="" textOutTrigValue="false"
    30. 

  30. 				infoText="" warningText="" alarmText="" />
    31. 

  31. 		
    32. 

  32. 		<IoSensor id="VCESlitDoorCloseEnable" display="VCE Slit Door Close Enable"  schematicId="" unit="" di="DI_TM_ROBOT_NOT_EXTEND_VCE" isLowAsNormal="" textOutTrigValue="false"
    33. 

  33. 				infoText="" warningText="" alarmText="" />
    34. 

  34. 		<IoSensor id="PMASlitDoorCloseEnable" display="PMA Slit Door Close Enable"  schematicId="" unit="" di="DI_TM_ROBOT_NOT_EXTEND_PMA" isLowAsNormal="" textOutTrigValue="false"
    35. 

  35. 						infoText="" warningText="" alarmText="" />
    36. 

  36. 		<IoSensor id="PMBSlitDoorCloseEnable" display="PMB Slit Door Close Enable"  schematicId="" unit="" di="DI_TM_ROBOT_NOT_EXTEND_PMB" isLowAsNormal="" textOutTrigValue="false"
    37. 

  37. 				infoText="" warningText="" alarmText="" />
    38. 

  38. 		<IoSensor id="PMCSlitDoorCloseEnable" display="PMC Slit Door Close Enable"  schematicId="" unit="" di="DI_TM_ROBOT_NOT_EXTEND_PMC" isLowAsNormal="" textOutTrigValue="false"
    39. 

  39. 				infoText="" warningText="" alarmText="" />
    40. 

  40. 		
    41. 

  41. 		<IoSensor id="TMVACSensor" display="TM VAC Sensor"  schematicId="" unit="" di="DI_TM_VAC_SW" isLowAsNormal="" textOutTrigValue="false"
    42. 

  42. 				infoText="" warningText="" alarmText="" />
    43. 

  43. 		<IoSensor id="VCEVACSensor" display="VCE VAC Sensor"  schematicId="" unit="" di="DI_VCE_VAC_SW" isLowAsNormal="" textOutTrigValue="false"
    44. 

  44. 				infoText="" warningText="" alarmText="" />
    45. 

  45. 		<IoSensor id="TMATMSensor" display="TM ATM Sensor"  schematicId="" unit="" di="DI_TM_ATM_SW" isLowAsNormal="" textOutTrigValue="false"
    46. 

  46. 				infoText="" warningText="" alarmText="" />
    47. 

  47. 		<IoSensor id="VCEATMSensor" display="VCE ATM Sensor"  schematicId="" unit="" di="DI_VCE_ATM_SW" isLowAsNormal="" textOutTrigValue="false"
    48. 

  48. 				infoText="" warningText="" alarmText="" />
    49. 

  49. 	</IoSensors>
    50. 

  50. 	<IoCylinders assembly="Venus_RT" classType="Venus_RT.Devices.IoCylinder">
    51. 

  51. 		<IoCylinder id="VCESlitDoor" display="VCE Slit Door" schematicId="" unit="" doMotorRelay=""
    52. 

  52.                 doON="DO_VCE_Slit_Door_Open" doOFF="DO_VCE_Slit_Door_Close" diON="DI_VCE_TM_Slit_Door_Open_Pos" diOFF="DI_VCE_TM_Slit_Door_Close_Pos" />
    53. 

  53. 		<IoCylinder id="PMASlitDoor" display="PMA Slit Door" schematicId="" unit="" doMotorRelay=""
    54. 

  54.                 doON="DO_PMA_Slit_Door_Open" doOFF="DO_PMA_Slit_Door_Close" diON="DI_TM_PMA_Slit_Door_Open_Pos" diOFF="DI_TM_PMA_Slit_Door_Close_Pos" />
    55. 

  55. 		<IoCylinder id="PMBSlitDoor" display="PMB Slit Door" schematicId="" unit="" doMotorRelay=""
    56. 

  56. 				doON="DO_PMB_Slit_Door_Open" doOFF="DO_PMB_Slit_Door_Close" diON="DI_TM_PMB_Slit_Door_Open_Pos" diOFF="DI_TM_PMB_Slit_Door_Close_Pos" />
    57. 

  57. 		<IoCylinder id="PMCSlitDoor" display="PMC Slit Door" schematicId="" unit="" doMotorRelay=""
    58. 

  58.                 doON="DO_PMC_Slit_Door_Open" doOFF="DO_PMC_Slit_Door_Close" diON="DI_TM_PMC_Slit_Door_Open_Pos" diOFF="DI_TM_PMC_Slit_Door_Close_Pos" />
    59. 

  59. 	</IoCylinders>
    60. 

  60. 

  61. 	<IoPressureMeters assembly="Venus_RT" classType="Venus_RT.Devices.IODevices.IoPressureMeter">
    62. 

  62. 		<IoPressureMeter id="TMPressure" display="TM Pressure" schematicId="" unit="mTorr"
    63. 

  63. 						    aiValue="AI_TM_Pressure" diGaugeFail="" scPrecision="" scOffset=""/>
    64. 

  64. 		<IoPressureMeter id="TMPipelinePressure" display="TM Pipeline Pressure" schematicId="" unit="mTorr"
    65. 

  65. 						    aiValue="AI_Foreline_Pressure" diGaugeFail="" scPrecision="" scOffset=""/>
    66. 

  66. 		<IoPressureMeter id="VCEPressure" display="VCE Pressure" schematicId="" unit="mTorr"
    67. 

  67. 						    aiValue="AI_VCE_Pressure" diGaugeFail="" scPrecision="" scOffset=""/>
    68. 

  68. 	</IoPressureMeters>
    69. 

  69. 	
    70. 

  70. 	<IoMfcs assembly="Venus_RT" classType="Venus_RT.Devices.IODevices.IoMfc">
    71. 

  71. 		<IoMfc id="TM_MFC1" display="MFC1" schematicId="MFC1" unit="sccm"
    72. 

  72. 				aiFlow="AI_MFC_Flow" aoFlow="AO_MFC_Flow_Setpoint" diOffline="" aoRange=""
    73. 

  73. 				diPressureAlarm="DI_SYSTEM_N2_Pressure_SW"/>
    74. 

  74. 	</IoMfcs>
    75. 

  75.   
    76. 

  76.   <IoHongHuControls assembly="Venus_RT" classType="Venus_RT.Devices.IODevices.IoHongHuControl">
    77. 

  77.     <IoHongHuControl id="PressureControl" display="PressureControl" schematicId="PressureControl" unit="sccm" doMFCFlow="DO_Flow_Mode" doPressureMode="DO_Pressure_Mode" doVent="DO_TM_Soft_Vent" doPump="DO_TM_Soft_Pumping" aoMFCFlow="AO_MFC_Flow_Setpoint" aoPressure="AO_TM_Pressure_SetPoint"/>
    78. 

  78.   </IoHongHuControls>
    79. 

  79. 	
    80. 

  80. </DeviceModelDefine>
    81. 

  81. 

  82.