OverVenusDEViewModel.cs 79 KB

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  1. using MECF.Framework.Common.CommonData;
  2. using Prism.Mvvm;
  3. using System;
  4. using System.Collections.Generic;
  5. using System.Linq;
  6. using System.Text;
  7. using System.Windows;
  8. using System.Threading.Tasks;
  9. using static Venus_Themes.UserControls.EFEM;
  10. using Venus_Core;
  11. using OpenSEMI.ClientBase;
  12. using Venus_MainPages.Unity;
  13. using Venus_Themes.CustomControls;
  14. using Aitex.Core.Common.DeviceData;
  15. using MECF.Framework.Common.CommonData.DeviceData;
  16. using MECF.Framework.Common.OperationCenter;
  17. using Venus_MainPages.Views;
  18. using System.Windows.Threading;
  19. using RecipeStep = Venus_Core.RecipeStep;
  20. using Aitex.Core.RT.Log;
  21. using Venus_Themes.UserControls;
  22. using Prism.Commands;
  23. using MECF.Framework.Common.DataCenter;
  24. using System.IO;
  25. namespace Venus_MainPages.ViewModels
  26. {
  27. public class OverVenusDEViewModel : BindableBase
  28. {
  29. #region 私有字段
  30. private List<string> m_CurrentModuleRecipes = new List<string>();
  31. private bool m_PVN21ValveIsOpen;
  32. private bool m_PVN22ValveIsOpen;
  33. private bool m_N2ValveIsOpen;
  34. private bool m_PV11ValveIsOpen;
  35. private bool m_PV12ValveIsOpen;
  36. private bool m_PV21ValveIsOpen;
  37. private bool m_PV22ValveIsOpen;
  38. private bool m_PV31ValveIsOpen;
  39. private bool m_PV32ValveIsOpen;
  40. private bool m_PV41ValveIsOpen;
  41. private bool m_PV42ValveIsOpen;
  42. private bool m_PV51ValveIsOpen;
  43. private bool m_PV52ValveIsOpen;
  44. private bool m_PV61ValveIsOpen;
  45. private bool m_PV62ValveIsOpen;
  46. private bool m_PV71ValveIsOpen;
  47. private bool m_PV72ValveIsOpen;
  48. private bool m_PV81ValveIsOpen;
  49. private bool m_PV82ValveIsOpen;
  50. private bool m_PV91ValveIsOpen;
  51. private bool m_PV92ValveIsOpen;
  52. private bool m_PVA1ValveIsOpen;
  53. private bool m_PVA2ValveIsOpen;
  54. private bool m_PVB1ValveIsOpen;
  55. private bool m_PVB2ValveIsOpen;
  56. private bool m_PVC1ValveIsOpen;
  57. private bool m_PVC2ValveIsOpen;
  58. private bool m_MFC1ValveIsOpen;
  59. private bool m_MFC2ValveIsOpen;
  60. private bool m_MFC3ValveIsOpen;
  61. private bool m_MFC4ValveIsOpen;
  62. private bool m_MFC5ValveIsOpen;
  63. private bool m_MFC6ValveIsOpen;
  64. private bool m_MFC7ValveIsOpen;
  65. private bool m_MFC8ValveIsOpen;
  66. private bool m_MFC9ValveIsOpen;
  67. private bool m_MFC10ValveIsOpen;
  68. private bool m_MFC11ValveIsOpen;
  69. private bool m_MFC12ValveIsOpen;
  70. private bool m_GasFinalValveIsOpen;
  71. //private bool m_SoftPumpValveIsOpen;
  72. private bool m_FastPumpValveIsOpen;
  73. private bool m_PVHe1ValveIsOpen;
  74. private bool m_PVHe2ValveIsOpen;
  75. private bool m_PVHe3ValveIsOpen;
  76. private bool m_HeISOValveIsOpen;
  77. private bool m_PurgeValveIsOpen;
  78. private bool m_TurboPumpPumpingValveIsOpen;
  79. private bool m_TurboPumpPurgeValveIsOpen;
  80. private bool m_GuageValveIsOpen;
  81. private bool m_PendulumValveIsOpen;
  82. //private bool m_BRFIsOn;
  83. //private bool m_SRFIsOn;
  84. private double m_HeGasSetpoint;
  85. private int m_HePressureSetpoint;
  86. private bool m_Valve12Visible;
  87. private bool m_Valve11Visible;
  88. private float m_SRFFwdPowerSetpoint;
  89. private float m_BRFFwdPowerSetpoint;
  90. private float m_SRFMatchC1;
  91. private float m_SRFMatchC2;
  92. private float m_BRFMatchC1;
  93. private float m_BRFMatchC2;
  94. private double m_MFC1SetPoint;
  95. private double m_MFC2SetPoint;
  96. private double m_MFC3SetPoint;
  97. private double m_MFC4SetPoint;
  98. private double m_MFC5SetPoint;
  99. private double m_MFC6SetPoint;
  100. private double m_MFC7SetPoint;
  101. private double m_MFC8SetPoint;
  102. private double m_MFC9SetPoint;
  103. private double m_MFC10SetPoint;
  104. private double m_MFC11SetPoint;
  105. private double m_MFC12SetPoint;
  106. private double m_N2SetPoint;
  107. private double m_TurboN2FlowSetPoint;
  108. private AITMfcData m_MFC1Data;
  109. private AITMfcData m_MFC2Data;
  110. private AITMfcData m_MFC3Data;
  111. private AITMfcData m_MFC4Data;
  112. private AITMfcData m_MFC5Data;
  113. private AITMfcData m_MFC6Data;
  114. private AITMfcData m_MFC7Data;
  115. private AITMfcData m_MFC8Data;
  116. private AITMfcData m_MFC9Data;
  117. private AITMfcData m_MFC10Data;
  118. private AITMfcData m_MFC11Data;
  119. private AITMfcData m_MFC12Data;
  120. private AITMfcData m_MFCHeData;
  121. private AITMfcData m_MFCN2Data;
  122. private AITHeaterData m_ValveHeaterData;
  123. private AITHeaterData m_ForelineHeaterData;
  124. private AITHeaterData m_WallHeaterData;
  125. private AITRfData m_SRFData;
  126. private AITRfData m_BRFData;
  127. private AITPendulumValveData m_PendulumValveData;
  128. private AITHVData m_ESCHVData;
  129. private PMState m_PMCurrentState;
  130. private bool m_BiasRFFanInterlock;
  131. private bool m_IsWLK;
  132. private bool m_IsWaterFlowOk;
  133. private bool m_IsTurboPumpInterlock;
  134. private bool m_IsCDAOK;
  135. private bool m_SensorGasBoxDoor;
  136. private bool m_SensorGasBoxPressure;
  137. private bool m_PumpIsOpen;
  138. private bool m_TurboIsOpen;
  139. private bool m_IsATM;
  140. private bool m_IsVAC;
  141. private List<string> m_RtDataKeys;
  142. private Dictionary<string, object> m_RtDataValues;
  143. private int m_PositionValue;
  144. private bool m_IsPositionMode;
  145. private int m_ESCVoltage;
  146. private bool m_GasIsFlowing;
  147. private bool m_IsProcessing;
  148. private bool m_IsAutoMode;
  149. private string m_SelectedRecipe;
  150. private float m_ChillerTempSetpoint;
  151. private float m_WallTempSetpoint;
  152. private bool m_HeIsPressureMode = true;
  153. private bool m_ChillerIsOn;
  154. private float m_ChamberPressure;
  155. private float m_ProcessPressure;
  156. private float m_ForelinePressurePressure;
  157. private float m_ESCHePressure;
  158. ButterflyValveView butterflyValveMessageBox;
  159. HeaterView heaterView;
  160. private int m_TurboPumpRotationalSpeed;
  161. private bool m_LiftPinIsUp;
  162. private bool m_IsSlitDoorClosed;
  163. private bool m_IsLinerDoorClosed;
  164. private bool m_IsLidClosed;
  165. private float m_ChillerTemperature;
  166. private float m_HVTemperature;
  167. private int m_ESCHVOutputVoltage;
  168. //private float m_SRfReflectPower;
  169. //private float m_SRfForwardPowerFeedBack;
  170. //private float m_BRfReflectPower;
  171. //private float m_BRfForwardPowerFeedBack;
  172. //private int m_MatchWorkMode;
  173. //private int m_BiasMatchWorkMode;
  174. private float m_MatchC1;
  175. private float m_MatchC2;
  176. private float m_BiasMatchC1;
  177. private float m_BiasMatchC2;
  178. private float m_PendulumValvePosition;
  179. private bool m_IsTurboPumpAtSpeed;
  180. private bool m_TurboPumpWaterFlowSwitch;
  181. private bool m_IsHasWafer;
  182. private Recipe m_CurrentRecipe = new Recipe();
  183. private RecipeResult m_CurrentRecipeResult = new RecipeResult();
  184. private RecipeStep m_CurrentRecipeStep = new RecipeStep();
  185. private double m_ChamberPressureFeedBack;
  186. private string m_WaferID;
  187. private string m_ModuleName;
  188. private int? currentRecipeNumber;
  189. #endregion
  190. #region 属性
  191. public List<string> CurrentModuleRecipes
  192. {
  193. get { return m_CurrentModuleRecipes; }
  194. set { SetProperty(ref m_CurrentModuleRecipes, value); }
  195. }
  196. public Recipe CurrentRecipe
  197. {
  198. get { return m_CurrentRecipe; }
  199. set { SetProperty(ref m_CurrentRecipe, value); }
  200. }
  201. public RecipeResult CurrentRecipeResult
  202. {
  203. get { return m_CurrentRecipeResult; }
  204. set { SetProperty(ref m_CurrentRecipeResult, value); }
  205. }
  206. public RecipeStep CurrentRecipeStep
  207. {
  208. get { return m_CurrentRecipeStep; }
  209. set { SetProperty(ref m_CurrentRecipeStep, value); }
  210. }
  211. public bool IsHasWafer
  212. {
  213. get { return m_IsHasWafer; }
  214. set { SetProperty(ref m_IsHasWafer, value); }
  215. }
  216. public bool IsTurboPumpAtSpeed
  217. {
  218. get { return m_IsTurboPumpAtSpeed; }
  219. set { SetProperty(ref m_IsTurboPumpAtSpeed, value); }
  220. }
  221. public bool Valve12Visible
  222. {
  223. get { return m_Valve12Visible; }
  224. set { SetProperty(ref m_Valve12Visible, value); }
  225. }
  226. public bool Valve11Visible
  227. {
  228. get { return m_Valve11Visible; }
  229. set { SetProperty(ref m_Valve11Visible, value); }
  230. }
  231. public bool TurboPumpWaterFlowSwitch
  232. {
  233. get { return m_TurboPumpWaterFlowSwitch; }
  234. set { SetProperty(ref m_TurboPumpWaterFlowSwitch, value); }
  235. }
  236. public float PendulumValvePosition
  237. {
  238. get { return m_PendulumValvePosition; }
  239. set { SetProperty(ref m_PendulumValvePosition, value); }
  240. }
  241. public float BiasMatchC1
  242. {
  243. get { return m_BiasMatchC1; }
  244. set
  245. {
  246. SetProperty(ref m_BiasMatchC1, value);
  247. }
  248. }
  249. public float BiasMatchC2
  250. {
  251. get { return m_BiasMatchC2; }
  252. set
  253. {
  254. SetProperty(ref m_BiasMatchC2, value);
  255. }
  256. }
  257. public float MatchC1
  258. {
  259. get { return m_MatchC1; }
  260. set
  261. {
  262. SetProperty(ref m_MatchC1, value);
  263. }
  264. }
  265. public float MatchC2
  266. {
  267. get { return m_MatchC2; }
  268. set
  269. {
  270. SetProperty(ref m_MatchC2, value);
  271. }
  272. }
  273. public AITPendulumValveData PendulumValveData
  274. {
  275. get { return m_PendulumValveData; }
  276. set
  277. {
  278. SetProperty(ref m_PendulumValveData, value);
  279. }
  280. }
  281. public AITHVData ESCHVData
  282. {
  283. get { return m_ESCHVData; }
  284. set
  285. {
  286. SetProperty(ref m_ESCHVData, value);
  287. }
  288. }
  289. public int ESCHVOutputVoltage
  290. {
  291. get { return m_ESCHVOutputVoltage; }
  292. set
  293. {
  294. SetProperty(ref m_ESCHVOutputVoltage, value);
  295. }
  296. }
  297. public float ChillerTemperature
  298. {
  299. get { return m_ChillerTemperature; }
  300. set
  301. {
  302. SetProperty(ref m_ChillerTemperature, value);
  303. }
  304. }
  305. public float HVTemperature
  306. {
  307. get { return m_HVTemperature; }
  308. set
  309. {
  310. SetProperty(ref m_HVTemperature, value);
  311. }
  312. }
  313. public bool IsLidClosed
  314. {
  315. get { return m_IsLidClosed; }
  316. set
  317. {
  318. SetProperty(ref m_IsLidClosed, value);
  319. }
  320. }
  321. public bool IsSlitDoorClosed
  322. {
  323. get { return m_IsSlitDoorClosed; }
  324. set
  325. {
  326. SetProperty(ref m_IsSlitDoorClosed, value);
  327. }
  328. }
  329. public bool IsLinerDoorClosed
  330. {
  331. get { return m_IsLinerDoorClosed; }
  332. set
  333. {
  334. SetProperty(ref m_IsLinerDoorClosed, value);
  335. }
  336. }
  337. public bool LiftPinIsUp
  338. {
  339. get { return m_LiftPinIsUp; }
  340. set
  341. {
  342. SetProperty(ref m_LiftPinIsUp, value);
  343. }
  344. }
  345. public int TurboPumpRotationalSpeed
  346. {
  347. get { return m_TurboPumpRotationalSpeed; }
  348. set
  349. {
  350. SetProperty(ref m_TurboPumpRotationalSpeed, value);
  351. }
  352. }
  353. public float ESCHePressure
  354. {
  355. get { return m_ESCHePressure; }
  356. set
  357. {
  358. SetProperty(ref m_ESCHePressure, value);
  359. }
  360. }
  361. public float ChamberPressure
  362. {
  363. get { return m_ChamberPressure; }
  364. set
  365. {
  366. SetProperty(ref m_ChamberPressure, value);
  367. }
  368. }
  369. public float ProcessPressure
  370. {
  371. get { return m_ProcessPressure; }
  372. set
  373. {
  374. SetProperty(ref m_ProcessPressure, value);
  375. }
  376. }
  377. public float ForelinePressure
  378. {
  379. get { return m_ForelinePressurePressure; }
  380. set
  381. {
  382. SetProperty(ref m_ForelinePressurePressure, value);
  383. }
  384. }
  385. public bool BiasRFFanInterlock
  386. {
  387. get { return m_BiasRFFanInterlock; }
  388. set
  389. {
  390. SetProperty(ref m_BiasRFFanInterlock, value);
  391. }
  392. }
  393. public bool IsWLK
  394. {
  395. get { return m_IsWLK; }
  396. set
  397. {
  398. SetProperty(ref m_IsWLK, value);
  399. }
  400. }
  401. public bool IsWaterFlowOk
  402. {
  403. get { return m_IsWaterFlowOk; }
  404. set
  405. {
  406. SetProperty(ref m_IsWaterFlowOk, value);
  407. }
  408. }
  409. private bool m_MainPurgeValveIsOpen;
  410. public bool MainPurgeValveIsOpen
  411. {
  412. get { return m_MainPurgeValveIsOpen; }
  413. set { SetProperty(ref m_MainPurgeValveIsOpen, value); }
  414. }
  415. private bool m_SecondPurgeValveIsOpen;
  416. public bool SecondPurgeValveIsOpen
  417. {
  418. get { return m_SecondPurgeValveIsOpen; }
  419. set { SetProperty(ref m_SecondPurgeValveIsOpen, value); }
  420. }
  421. public bool IsCDAOK
  422. {
  423. get { return m_IsCDAOK; }
  424. set
  425. {
  426. SetProperty(ref m_IsCDAOK, value);
  427. }
  428. }
  429. public bool SensorGasBoxDoor
  430. {
  431. get { return m_SensorGasBoxDoor; }
  432. set
  433. {
  434. SetProperty(ref m_SensorGasBoxDoor, value);
  435. }
  436. }
  437. public bool SensorGasBoxPressure
  438. {
  439. get { return m_SensorGasBoxPressure; }
  440. set
  441. {
  442. SetProperty(ref m_SensorGasBoxPressure, value);
  443. }
  444. }
  445. public bool IsTurboPumpInterlock
  446. {
  447. get { return m_IsTurboPumpInterlock; }
  448. set
  449. {
  450. SetProperty(ref m_IsTurboPumpInterlock, value);
  451. }
  452. }
  453. public string ModuleName
  454. {
  455. get { return m_ModuleName; }
  456. set
  457. {
  458. SetProperty(ref m_ModuleName, value);
  459. }
  460. }
  461. public double MFC1SetPoint
  462. {
  463. get { return m_MFC1SetPoint; }
  464. set { SetProperty(ref m_MFC1SetPoint, value); }
  465. }
  466. public double MFC2SetPoint
  467. {
  468. get { return m_MFC2SetPoint; }
  469. set { SetProperty(ref m_MFC2SetPoint, value); }
  470. }
  471. public double MFC3SetPoint
  472. {
  473. get { return m_MFC3SetPoint; }
  474. set { SetProperty(ref m_MFC3SetPoint, value); }
  475. }
  476. public double MFC4SetPoint
  477. {
  478. get { return m_MFC4SetPoint; }
  479. set { SetProperty(ref m_MFC4SetPoint, value); }
  480. }
  481. public double MFC5SetPoint
  482. {
  483. get { return m_MFC5SetPoint; }
  484. set { SetProperty(ref m_MFC5SetPoint, value); }
  485. }
  486. public double MFC6SetPoint
  487. {
  488. get { return m_MFC6SetPoint; }
  489. set { SetProperty(ref m_MFC6SetPoint, value); }
  490. }
  491. public double MFC7SetPoint
  492. {
  493. get { return m_MFC7SetPoint; }
  494. set { SetProperty(ref m_MFC7SetPoint, value); }
  495. }
  496. public double MFC8SetPoint
  497. {
  498. get { return m_MFC8SetPoint; }
  499. set { SetProperty(ref m_MFC8SetPoint, value); }
  500. }
  501. public double MFC9SetPoint
  502. {
  503. get { return m_MFC9SetPoint; }
  504. set { SetProperty(ref m_MFC9SetPoint, value); }
  505. }
  506. public double MFC10SetPoint
  507. {
  508. get { return m_MFC10SetPoint; }
  509. set { SetProperty(ref m_MFC10SetPoint, value); }
  510. }
  511. public double MFC11SetPoint
  512. {
  513. get { return m_MFC11SetPoint; }
  514. set { SetProperty(ref m_MFC11SetPoint, value); }
  515. }
  516. public double MFC12SetPoint
  517. {
  518. get { return m_MFC12SetPoint; }
  519. set { SetProperty(ref m_MFC12SetPoint, value); }
  520. }
  521. public double N2SetPoint
  522. {
  523. get { return m_N2SetPoint; }
  524. set { SetProperty(ref m_N2SetPoint, value); }
  525. }
  526. public double TurboN2FlowSetPoint
  527. {
  528. get { return m_TurboN2FlowSetPoint; }
  529. set
  530. {
  531. if (value != m_TurboN2FlowSetPoint)
  532. {
  533. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", value);
  534. }
  535. SetProperty(ref m_TurboN2FlowSetPoint, value);
  536. }
  537. }
  538. public AITMfcData MFC1Data
  539. {
  540. get { return m_MFC1Data; }
  541. set { SetProperty(ref m_MFC1Data, value); }
  542. }
  543. public AITMfcData MFC2Data
  544. {
  545. get { return m_MFC2Data; }
  546. set { SetProperty(ref m_MFC2Data, value); }
  547. }
  548. public AITMfcData MFC3Data
  549. {
  550. get { return m_MFC3Data; }
  551. set { SetProperty(ref m_MFC3Data, value); }
  552. }
  553. public AITMfcData MFC4Data
  554. {
  555. get { return m_MFC4Data; }
  556. set { SetProperty(ref m_MFC4Data, value); }
  557. }
  558. public AITMfcData MFC5Data
  559. {
  560. get { return m_MFC5Data; }
  561. set { SetProperty(ref m_MFC5Data, value); }
  562. }
  563. public AITMfcData MFC6Data
  564. {
  565. get { return m_MFC6Data; }
  566. set { SetProperty(ref m_MFC6Data, value); }
  567. }
  568. public AITMfcData MFC7Data
  569. {
  570. get { return m_MFC7Data; }
  571. set { SetProperty(ref m_MFC7Data, value); }
  572. }
  573. public AITMfcData MFC8Data
  574. {
  575. get { return m_MFC8Data; }
  576. set { SetProperty(ref m_MFC8Data, value); }
  577. }
  578. public AITMfcData MFC9Data
  579. {
  580. get { return m_MFC9Data; }
  581. set { SetProperty(ref m_MFC9Data, value); }
  582. }
  583. public AITMfcData MFC10Data
  584. {
  585. get { return m_MFC10Data; }
  586. set { SetProperty(ref m_MFC10Data, value); }
  587. }
  588. public AITMfcData MFC11Data
  589. {
  590. get { return m_MFC11Data; }
  591. set { SetProperty(ref m_MFC11Data, value); }
  592. }
  593. public AITMfcData MFC12Data
  594. {
  595. get { return m_MFC12Data; }
  596. set { SetProperty(ref m_MFC12Data, value); }
  597. }
  598. public AITMfcData MFCHeData
  599. {
  600. get { return m_MFCHeData; }
  601. set { SetProperty(ref m_MFCHeData, value); }
  602. }
  603. public AITMfcData MFCN2Data
  604. {
  605. get { return m_MFCN2Data; }
  606. set { SetProperty(ref m_MFCN2Data, value); }
  607. }
  608. public AITHeaterData ValveHeaterData
  609. {
  610. get { return m_ValveHeaterData; }
  611. set { SetProperty(ref m_ValveHeaterData, value); }
  612. }
  613. public AITHeaterData ForelineHeaterData
  614. {
  615. get { return m_ForelineHeaterData; }
  616. set { SetProperty(ref m_ForelineHeaterData, value); }
  617. }
  618. public AITHeaterData WallHeaterData
  619. {
  620. get { return m_WallHeaterData; }
  621. set { SetProperty(ref m_WallHeaterData, value); }
  622. }
  623. public AITRfData SRFData
  624. {
  625. get { return m_SRFData; }
  626. set { SetProperty(ref m_SRFData, value); }
  627. }
  628. public AITRfData BRFData
  629. {
  630. get { return m_BRFData; }
  631. set { SetProperty(ref m_BRFData, value); }
  632. }
  633. public PMState PMCurrentState
  634. {
  635. get { return m_PMCurrentState; }
  636. set { SetProperty(ref m_PMCurrentState, value); }
  637. }
  638. #region 阀
  639. public bool GasFinalValveIsOpen
  640. {
  641. get { return m_GasFinalValveIsOpen; }
  642. set { SetProperty(ref m_GasFinalValveIsOpen, value); }
  643. }
  644. public bool PVN21ValveIsOpen
  645. {
  646. get { return m_PVN21ValveIsOpen; }
  647. set { SetProperty(ref m_PVN21ValveIsOpen, value); }
  648. }
  649. public bool PVN22ValveIsOpen
  650. {
  651. get { return m_PVN22ValveIsOpen; }
  652. set { SetProperty(ref m_PVN22ValveIsOpen, value); }
  653. }
  654. public bool N2ValveIsOpen
  655. {
  656. get { return m_N2ValveIsOpen; }
  657. set { SetProperty(ref m_N2ValveIsOpen, value); }
  658. }
  659. public bool PV11ValveIsOpen
  660. {
  661. get { return m_PV11ValveIsOpen; }
  662. set { SetProperty(ref m_PV11ValveIsOpen, value); }
  663. }
  664. public bool PV12ValveIsOpen
  665. {
  666. get { return m_PV12ValveIsOpen; }
  667. set { SetProperty(ref m_PV12ValveIsOpen, value); }
  668. }
  669. public bool MFC1ValveIsOpen
  670. {
  671. get { return m_MFC1ValveIsOpen; }
  672. set { SetProperty(ref m_MFC1ValveIsOpen, value); }
  673. }
  674. public bool PV21ValveIsOpen
  675. {
  676. get { return m_PV21ValveIsOpen; }
  677. set { SetProperty(ref m_PV21ValveIsOpen, value); }
  678. }
  679. public bool PV22ValveIsOpen
  680. {
  681. get { return m_PV22ValveIsOpen; }
  682. set { SetProperty(ref m_PV22ValveIsOpen, value); }
  683. }
  684. public bool PurgeValveIsOpen
  685. {
  686. get { return m_PurgeValveIsOpen; }
  687. set { SetProperty(ref m_PurgeValveIsOpen, value); }
  688. }
  689. public bool PV51ValveIsOpen{ get{return m_PV51ValveIsOpen;} set{SetProperty(ref m_PV51ValveIsOpen,value);}}
  690. public bool PV52ValveIsOpen{ get{return m_PV52ValveIsOpen;} set{SetProperty(ref m_PV52ValveIsOpen,value);}}
  691. public bool PV61ValveIsOpen{ get{return m_PV61ValveIsOpen;} set{SetProperty(ref m_PV61ValveIsOpen,value);}}
  692. public bool PV62ValveIsOpen{ get{return m_PV62ValveIsOpen;} set{SetProperty(ref m_PV62ValveIsOpen,value);}}
  693. public bool PV71ValveIsOpen{ get{return m_PV71ValveIsOpen;} set{SetProperty(ref m_PV71ValveIsOpen,value);}}
  694. public bool PV72ValveIsOpen{ get{return m_PV72ValveIsOpen;} set{SetProperty(ref m_PV72ValveIsOpen,value);}}
  695. public bool PV81ValveIsOpen{ get{return m_PV81ValveIsOpen;} set{SetProperty(ref m_PV81ValveIsOpen,value);}}
  696. public bool PV82ValveIsOpen{ get{return m_PV82ValveIsOpen;} set{SetProperty(ref m_PV82ValveIsOpen,value);}}
  697. public bool PV91ValveIsOpen{ get{return m_PV91ValveIsOpen;} set{SetProperty(ref m_PV91ValveIsOpen,value);}}
  698. public bool PV92ValveIsOpen{ get{return m_PV92ValveIsOpen;} set{SetProperty(ref m_PV92ValveIsOpen,value);}}
  699. public bool PVA1ValveIsOpen{ get{return m_PVA1ValveIsOpen;} set{SetProperty(ref m_PVA1ValveIsOpen,value);}}
  700. public bool PVA2ValveIsOpen{ get{return m_PVA2ValveIsOpen;} set{SetProperty(ref m_PVA2ValveIsOpen,value);}}
  701. public bool PVB1ValveIsOpen{ get{return m_PVB1ValveIsOpen;} set{SetProperty(ref m_PVB1ValveIsOpen,value);}}
  702. public bool PVB2ValveIsOpen{ get{return m_PVB2ValveIsOpen;} set{SetProperty(ref m_PVB2ValveIsOpen,value);}}
  703. public bool PVC1ValveIsOpen{ get{return m_PVC1ValveIsOpen;} set{SetProperty(ref m_PVC1ValveIsOpen,value);}}
  704. public bool PVC2ValveIsOpen{ get{return m_PVC2ValveIsOpen;} set{ SetProperty(ref m_PVC2ValveIsOpen, value); } }
  705. public bool MFC2ValveIsOpen
  706. {
  707. get { return m_MFC2ValveIsOpen; }
  708. set { SetProperty(ref m_MFC2ValveIsOpen, value); }
  709. }
  710. public bool PV31ValveIsOpen
  711. {
  712. get { return m_PV31ValveIsOpen; }
  713. set { SetProperty(ref m_PV31ValveIsOpen, value); }
  714. }
  715. public bool PV32ValveIsOpen
  716. {
  717. get { return m_PV32ValveIsOpen; }
  718. set { SetProperty(ref m_PV32ValveIsOpen, value); }
  719. }
  720. public bool MFC3ValveIsOpen
  721. {
  722. get { return m_MFC3ValveIsOpen; }
  723. set { SetProperty(ref m_MFC3ValveIsOpen, value); }
  724. }
  725. public bool PV41ValveIsOpen
  726. {
  727. get { return m_PV41ValveIsOpen; }
  728. set { SetProperty(ref m_PV41ValveIsOpen, value); }
  729. }
  730. public bool PV42ValveIsOpen
  731. {
  732. get { return m_PV42ValveIsOpen; }
  733. set { SetProperty(ref m_PV42ValveIsOpen, value); }
  734. }
  735. public bool MFC4ValveIsOpen
  736. {
  737. get { return m_MFC4ValveIsOpen; }
  738. set { SetProperty(ref m_MFC4ValveIsOpen, value); }
  739. }
  740. public bool MFC5ValveIsOpen
  741. {
  742. get { return m_MFC5ValveIsOpen; }
  743. set { SetProperty(ref m_MFC5ValveIsOpen, value); }
  744. }
  745. public bool MFC6ValveIsOpen
  746. {
  747. get { return m_MFC6ValveIsOpen; }
  748. set { SetProperty(ref m_MFC6ValveIsOpen, value); }
  749. }
  750. public bool MFC7ValveIsOpen
  751. {
  752. get { return m_MFC7ValveIsOpen; }
  753. set { SetProperty(ref m_MFC7ValveIsOpen, value); }
  754. }
  755. public bool MFC8ValveIsOpen
  756. {
  757. get { return m_MFC8ValveIsOpen; }
  758. set { SetProperty(ref m_MFC8ValveIsOpen, value); }
  759. }
  760. public bool MFC9ValveIsOpen
  761. {
  762. get { return m_MFC9ValveIsOpen; }
  763. set { SetProperty(ref m_MFC9ValveIsOpen, value); }
  764. }
  765. public bool MFC10ValveIsOpen
  766. {
  767. get { return m_MFC10ValveIsOpen; }
  768. set { SetProperty(ref m_MFC10ValveIsOpen, value); }
  769. }
  770. public bool MFC11ValveIsOpen
  771. {
  772. get { return m_MFC11ValveIsOpen; }
  773. set { SetProperty(ref m_MFC11ValveIsOpen, value); }
  774. }
  775. public bool MFC12ValveIsOpen
  776. {
  777. get { return m_MFC12ValveIsOpen; }
  778. set { SetProperty(ref m_MFC12ValveIsOpen, value); }
  779. }
  780. public bool PVHe1ValveIsOpen
  781. {
  782. get { return m_PVHe1ValveIsOpen; }
  783. set { SetProperty(ref m_PVHe1ValveIsOpen, value); }
  784. }
  785. public bool PVHe2ValveIsOpen
  786. {
  787. get { return m_PVHe2ValveIsOpen; }
  788. set { SetProperty(ref m_PVHe2ValveIsOpen, value); }
  789. }
  790. public bool PVHe3ValveIsOpen
  791. {
  792. get { return m_PVHe3ValveIsOpen; }
  793. set { SetProperty(ref m_PVHe3ValveIsOpen, value); }
  794. }
  795. public bool HeISOValveIsOpen
  796. {
  797. get { return m_HeISOValveIsOpen; }
  798. set { SetProperty(ref m_HeISOValveIsOpen, value); }
  799. }
  800. public bool TurboPumpPumpingValveIsOpen
  801. {
  802. get { return m_TurboPumpPumpingValveIsOpen; }
  803. set { SetProperty(ref m_TurboPumpPumpingValveIsOpen, value); }
  804. }
  805. public bool TurboPumpPurgeValveIsOpen
  806. {
  807. get { return m_TurboPumpPurgeValveIsOpen; }
  808. set { SetProperty(ref m_TurboPumpPurgeValveIsOpen, value); }
  809. }
  810. //public bool SoftPumpValveIsOpen
  811. //{
  812. // get { return m_SoftPumpValveIsOpen; }
  813. // set { SetProperty(ref m_SoftPumpValveIsOpen, value); }
  814. //}
  815. public bool FastPumpValveIsOpen
  816. {
  817. get { return m_FastPumpValveIsOpen; }
  818. set { SetProperty(ref m_FastPumpValveIsOpen, value); }
  819. }
  820. public bool GuageValveIsOpen
  821. {
  822. get { return m_GuageValveIsOpen; }
  823. set { SetProperty(ref m_GuageValveIsOpen, value); }
  824. }
  825. #endregion
  826. public Dictionary<string, object> RtDataValues
  827. {
  828. get { return m_RtDataValues; }
  829. set { SetProperty(ref m_RtDataValues, value); }
  830. }
  831. public bool PumpIsOpen
  832. {
  833. get { return m_PumpIsOpen; }
  834. set { SetProperty(ref m_PumpIsOpen, value); }
  835. }
  836. public bool PendulumValveIsOpen
  837. {
  838. get { return m_PendulumValveIsOpen; }
  839. set { SetProperty(ref m_PendulumValveIsOpen, value); }
  840. }
  841. public bool TurboIsOpen
  842. {
  843. get { return m_TurboIsOpen; }
  844. set { SetProperty(ref m_TurboIsOpen, value); }
  845. }
  846. public bool IsATM
  847. {
  848. get { return m_IsATM; }
  849. set { SetProperty(ref m_IsATM, value); }
  850. }
  851. public bool IsVAC
  852. {
  853. get { return m_IsVAC; }
  854. set { SetProperty(ref m_IsVAC, value); }
  855. }
  856. //public bool BRFIsOn
  857. //{
  858. // get { return m_BRFIsOn; }
  859. // set { SetProperty(ref m_BRFIsOn, value); }
  860. //}
  861. //public bool SRFIsOn
  862. //{
  863. // get { return m_SRFIsOn; }
  864. // set { SetProperty(ref m_SRFIsOn, value); }
  865. //}
  866. public int PositionValue
  867. {
  868. get { return m_PositionValue; }
  869. set { SetProperty(ref m_PositionValue, value); }
  870. }
  871. public bool IsPositionMode
  872. {
  873. get { return m_IsPositionMode; }
  874. set { SetProperty(ref m_IsPositionMode, value); }
  875. }
  876. public double HeGasSetpoint
  877. {
  878. get { return m_HeGasSetpoint; }
  879. set
  880. {
  881. SetProperty(ref m_HeGasSetpoint, value);
  882. }
  883. }
  884. public int HePressureSetpoint
  885. {
  886. get { return m_HePressureSetpoint; }
  887. set
  888. {
  889. SetProperty(ref m_HePressureSetpoint, value);
  890. }
  891. }
  892. public float SRFFwdPowerSetpoint
  893. {
  894. get { return m_SRFFwdPowerSetpoint; }
  895. set { SetProperty(ref m_SRFFwdPowerSetpoint, value); }
  896. }
  897. public float BRFFwdPowerSetpoint
  898. {
  899. get { return m_BRFFwdPowerSetpoint; }
  900. set { SetProperty(ref m_BRFFwdPowerSetpoint, value); }
  901. }
  902. public int ESCVoltage
  903. {
  904. get { return m_ESCVoltage; }
  905. set { SetProperty(ref m_ESCVoltage, value); }
  906. }
  907. public float SRFMatchC1
  908. {
  909. get { return m_SRFMatchC1; }
  910. set { SetProperty(ref m_SRFMatchC1, value); }
  911. }
  912. public float SRFMatchC2
  913. {
  914. get { return m_SRFMatchC2; }
  915. set { SetProperty(ref m_SRFMatchC2, value); }
  916. }
  917. public float BRFMatchC1
  918. {
  919. get { return m_BRFMatchC1; }
  920. set { SetProperty(ref m_BRFMatchC1, value); }
  921. }
  922. public float BRFMatchC2
  923. {
  924. get { return m_BRFMatchC2; }
  925. set { SetProperty(ref m_BRFMatchC2, value); }
  926. }
  927. public bool GasIsFlowing
  928. {
  929. get { return m_GasIsFlowing; }
  930. set { SetProperty(ref m_GasIsFlowing, value); }
  931. }
  932. public bool IsProcessing
  933. {
  934. get { return m_IsProcessing; }
  935. set { SetProperty(ref m_IsProcessing, value); }
  936. }
  937. public bool IsAutoMode
  938. {
  939. get { return m_IsAutoMode; }
  940. set { SetProperty(ref m_IsAutoMode, value); }
  941. }
  942. public string SelectedRecipe
  943. {
  944. get { return m_SelectedRecipe; }
  945. set { SetProperty(ref m_SelectedRecipe, value); }
  946. }
  947. public float ChillerTempSetpoint
  948. {
  949. get { return m_ChillerTempSetpoint; }
  950. set { SetProperty(ref m_ChillerTempSetpoint, value); }
  951. }
  952. public float WallTempSetpoint
  953. {
  954. get { return m_WallTempSetpoint; }
  955. set { SetProperty(ref m_WallTempSetpoint, value); }
  956. }
  957. public bool HeIsPressureMode
  958. {
  959. get { return m_HeIsPressureMode; }
  960. set { SetProperty(ref m_HeIsPressureMode, value); }
  961. }
  962. public bool ChillerIsOn
  963. {
  964. get { return m_ChillerIsOn; }
  965. set { SetProperty(ref m_ChillerIsOn, value); }
  966. }
  967. public double ChamberPressureFeedBack
  968. {
  969. get { return m_ChamberPressureFeedBack; }
  970. set { SetProperty(ref m_ChamberPressureFeedBack, value); }
  971. }
  972. public string WaferID
  973. {
  974. get { return m_WaferID; }
  975. set { SetProperty(ref m_WaferID, value); }
  976. }
  977. #endregion
  978. #region 命令
  979. private DelegateCommand _PMInitCommnad;
  980. public DelegateCommand PMInitCommnad =>
  981. _PMInitCommnad ?? (_PMInitCommnad = new DelegateCommand(OnPMInit));
  982. private DelegateCommand _PMAbortCommnad;
  983. public DelegateCommand PMAbortCommnad =>
  984. _PMAbortCommnad ?? (_PMAbortCommnad = new DelegateCommand(OnPMAbort));
  985. private DelegateCommand _GasCommand;
  986. public DelegateCommand GasCommand =>
  987. _GasCommand ?? (_GasCommand = new DelegateCommand(OnGas));
  988. private DelegateCommand _HeCommand;
  989. public DelegateCommand HeCommand =>
  990. _HeCommand ?? (_HeCommand = new DelegateCommand(OnHe));
  991. private DelegateCommand _RfCommand;
  992. public DelegateCommand RfCommand =>
  993. _RfCommand ?? (_RfCommand = new DelegateCommand(OnRf));
  994. private DelegateCommand _PurgeCommand;
  995. public DelegateCommand PurgeCommand =>
  996. _PurgeCommand ?? (_PurgeCommand = new DelegateCommand(OnPurge));
  997. private DelegateCommand _VentCommand;
  998. public DelegateCommand VentCommand =>
  999. _VentCommand ?? (_VentCommand = new DelegateCommand(OnVent));
  1000. private DelegateCommand _PumpCommand;
  1001. public DelegateCommand PumpCommand =>
  1002. _PumpCommand ?? (_PumpCommand = new DelegateCommand(OnPump));
  1003. private DelegateCommand _OpenPumpCommand;
  1004. public DelegateCommand OpenPumpCommand =>
  1005. _OpenPumpCommand ?? (_OpenPumpCommand = new DelegateCommand(OnOpenPump));
  1006. private DelegateCommand _ClosePumpCommand;
  1007. public DelegateCommand ClosePumpCommand =>
  1008. _ClosePumpCommand ?? (_ClosePumpCommand = new DelegateCommand(OnClosePump));
  1009. private DelegateCommand _OpenTurboPumpCommand;
  1010. public DelegateCommand OpenTurboPumpCommand =>
  1011. _OpenTurboPumpCommand ?? (_OpenTurboPumpCommand = new DelegateCommand(OnOpenTurboPump));
  1012. private DelegateCommand _CloseTurboPumpCommand;
  1013. public DelegateCommand CloseTurboPumpCommand =>
  1014. _CloseTurboPumpCommand ?? (_CloseTurboPumpCommand = new DelegateCommand(OnCloseTurboPump));
  1015. private DelegateCommand _OpenPendulumValveCommand;
  1016. public DelegateCommand OpenPendulumValveCommand =>
  1017. _OpenPendulumValveCommand ?? (_OpenPendulumValveCommand = new DelegateCommand(OnOpenPendulumValve));
  1018. private DelegateCommand _ClosePendulumValveCommand;
  1019. public DelegateCommand ClosePendulumValveCommand =>
  1020. _ClosePendulumValveCommand ?? (_ClosePendulumValveCommand = new DelegateCommand(OnClosePendulumValve));
  1021. private DelegateCommand<object> _PinUpDownCommand;
  1022. public DelegateCommand<object> PinUpDownCommand =>
  1023. _PinUpDownCommand ?? (_PinUpDownCommand = new DelegateCommand<object>(OnPinUpDown));
  1024. //private DelegateCommand _SetSRfCommand;
  1025. //public DelegateCommand SetSRfCommand =>
  1026. // _SetSRfCommand ?? (_SetSRfCommand = new DelegateCommand(OnSetSRf));
  1027. private DelegateCommand _SetBRfCommand;
  1028. public DelegateCommand SetBRfCommand =>
  1029. _SetBRfCommand ?? (_SetBRfCommand = new DelegateCommand(OnSetBRf));
  1030. private DelegateCommand _OpenButterflyValveViewCommand;
  1031. public DelegateCommand OpenButterflyValveViewCommand =>
  1032. _OpenButterflyValveViewCommand ?? (_OpenButterflyValveViewCommand = new DelegateCommand(OnOpenButterflyValveView));
  1033. private DelegateCommand _HVCommand;
  1034. public DelegateCommand HVCommand =>
  1035. _HVCommand ?? (_HVCommand = new DelegateCommand(OnHV));
  1036. private DelegateCommand _HVSetCommand;
  1037. public DelegateCommand HVSetCommand =>
  1038. _HVSetCommand ?? (_HVSetCommand = new DelegateCommand(OnHVSet));
  1039. private DelegateCommand _LoadRecipeCommand;
  1040. public DelegateCommand LoadRecipeCommand =>
  1041. _LoadRecipeCommand ?? (_LoadRecipeCommand = new DelegateCommand(OnLoadRecipe));
  1042. private DelegateCommand<object> _ControlValveCommand;
  1043. public DelegateCommand<object> ControlValveCommand =>
  1044. _ControlValveCommand ?? (_ControlValveCommand = new DelegateCommand<object>(OnControlValve));
  1045. private DelegateCommand<object> _RunRecipeCommand;
  1046. public DelegateCommand<object> RunRecipeCommand =>
  1047. _RunRecipeCommand ?? (_RunRecipeCommand = new DelegateCommand<object>(OnRunRecipe));
  1048. private DelegateCommand _SetChillerTempCommand;
  1049. public DelegateCommand SetChillerTempCommand =>
  1050. _SetChillerTempCommand ?? (_SetChillerTempCommand = new DelegateCommand(OnSetChillerTemp));
  1051. private DelegateCommand _OnOffChillerCommand;
  1052. public DelegateCommand OnOffChillerCommand =>
  1053. _OnOffChillerCommand ?? (_OnOffChillerCommand = new DelegateCommand(OnOffChiller));
  1054. private DelegateCommand<object> _HeaterCommand;
  1055. public DelegateCommand<object> HeaterCommand =>
  1056. _HeaterCommand ?? (_HeaterCommand = new DelegateCommand<object>(OnHeater));
  1057. private DelegateCommand _EndStepCommand;
  1058. public DelegateCommand EndStepCommand =>
  1059. _EndStepCommand ?? (_EndStepCommand = new DelegateCommand(OnEndStep));
  1060. private DelegateCommand _OnlineCommand;
  1061. public DelegateCommand OnlineCommand =>
  1062. _OnlineCommand ?? (_OnlineCommand = new DelegateCommand(OnOnline));
  1063. private DelegateCommand _OfflineCommand;
  1064. public DelegateCommand OfflineCommand =>
  1065. _OfflineCommand ?? (_OfflineCommand = new DelegateCommand(OnOffline));
  1066. private DelegateCommand<object> _AbortRecipeCommnad;
  1067. public DelegateCommand<object> AbortRecipeCommnad =>
  1068. _AbortRecipeCommnad ?? (_AbortRecipeCommnad = new DelegateCommand<object>(OnAbortRecipe));
  1069. #endregion
  1070. #region 构造函数
  1071. public OverVenusDEViewModel()
  1072. {
  1073. m_RtDataKeys = new List<string>();
  1074. m_IsATM = true;
  1075. ModuleName = "PMA";
  1076. CurrentModuleRecipes = GetFilesNames(Path.Combine(QueryDataClient.Instance.Service.GetData("GetRTPath").ToString(), "Recipes", ModuleName, "Process")).ToList();
  1077. DispatcherTimer timer = new DispatcherTimer();
  1078. timer.Interval = TimeSpan.FromSeconds(0.1);
  1079. timer.Tick += timer_Tick;
  1080. timer.Start();
  1081. }
  1082. #endregion
  1083. #region 命令方法
  1084. private void OnControlValve(object obj)
  1085. {
  1086. CommonValveControl commonValveControl = (CommonValveControl)obj;
  1087. if (commonValveControl.IsCanEdit == true)
  1088. {
  1089. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ControlValve", commonValveControl.Tag.ToString(), !commonValveControl.Status);
  1090. }
  1091. }
  1092. private void OnPMInit()
  1093. {
  1094. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Home");
  1095. }
  1096. private async void OnGas()
  1097. {
  1098. await Task.Run(async () =>
  1099. {
  1100. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas1.SetPoint", MFC1SetPoint);
  1101. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas2.SetPoint", MFC2SetPoint);
  1102. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas3.SetPoint", MFC3SetPoint);
  1103. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas4.SetPoint", MFC4SetPoint);
  1104. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas5.SetPoint", MFC5SetPoint);
  1105. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas6.SetPoint", MFC6SetPoint);
  1106. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas7.SetPoint", MFC7SetPoint);
  1107. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas8.SetPoint", MFC8SetPoint);
  1108. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas9.SetPoint", MFC9SetPoint);
  1109. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas10.SetPoint", MFC10SetPoint);
  1110. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas11.SetPoint", MFC11SetPoint);
  1111. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas12.SetPoint", MFC12SetPoint);
  1112. await Task.Delay(1000);
  1113. object[] mfc = new object[12];
  1114. string[] mfcSetPoint = new string[8];
  1115. mfc[0] = MFC1Data.SetPoint;
  1116. mfc[1] = MFC2Data.SetPoint;
  1117. mfc[2] = MFC3Data.SetPoint;
  1118. mfc[3] = MFC4Data.SetPoint;
  1119. mfc[4] = MFC5Data.SetPoint;
  1120. mfc[5] = MFC6Data.SetPoint;
  1121. mfc[6] = MFC7Data.SetPoint;
  1122. mfc[7] = MFC8Data.SetPoint;
  1123. mfc[8] = MFC9Data.SetPoint;
  1124. mfc[9] = MFC10Data.SetPoint;
  1125. mfc[10] = MFC11Data.SetPoint;
  1126. mfc[11] = MFC12Data.SetPoint;
  1127. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.GasFlow}", mfc);
  1128. });
  1129. }
  1130. private void OnHe()
  1131. {
  1132. if (PVHe1ValveIsOpen == true)
  1133. {
  1134. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBacksideHeFlow", 0.0d);
  1135. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBacksideHePressure", 0);
  1136. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ControlValve", (int)ValveType.PVHe3, false);
  1137. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ControlValve", (int)ValveType.HeISO, false);
  1138. }
  1139. else
  1140. {
  1141. if (HeIsPressureMode)
  1142. {
  1143. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBacksideHePressure", HeGasSetpoint);
  1144. }
  1145. else
  1146. {
  1147. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBacksideHeFlow", HeGasSetpoint);
  1148. }
  1149. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ControlValve", (int)ValveType.PVHe3, true);
  1150. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ControlValve", (int)ValveType.HeISO, true);
  1151. }
  1152. }
  1153. private void OnRf()
  1154. {
  1155. if (PMCurrentState == PMState.RfPowering)
  1156. {
  1157. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1158. }
  1159. else
  1160. {
  1161. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.RfPower}");
  1162. }
  1163. }
  1164. private void OnPurge()
  1165. {
  1166. //if (RtDataValues[$"{ModuleName}.FsmState"].ToString() ==PMState.Purge.ToString())
  1167. //if (PMCurrentState == PMState.Purging || N2SetPoint<=0)
  1168. //{
  1169. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", 0);
  1170. // await Task.Delay(1000);
  1171. // //InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StopPurge");
  1172. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1173. //}
  1174. //else
  1175. //{
  1176. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", N2SetPoint);
  1177. // await Task.Delay(1000);
  1178. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Purge");
  1179. //}
  1180. if (PMCurrentState == PMState.Purging)
  1181. {
  1182. //InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", 0);
  1183. //await Task.Delay(1000);
  1184. ////InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StopPurge");
  1185. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1186. }
  1187. else
  1188. {
  1189. //InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", N2SetPoint);
  1190. //await Task.Delay(1000);
  1191. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Purge");
  1192. }
  1193. }
  1194. private void OnVent()
  1195. {
  1196. //if (RtDataValues[$"{ModuleName}.FsmState"].ToString()==PMState.Venting.ToString())
  1197. if (PMCurrentState == PMState.Venting)
  1198. {
  1199. //InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StopVent");
  1200. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1201. }
  1202. else
  1203. {
  1204. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Vent");
  1205. }
  1206. }
  1207. private void OnPump()
  1208. {
  1209. //if (RtDataValues[$"{ModuleName}.FsmState"].ToString() == PMState.Pumping.ToString())
  1210. if (PMCurrentState == PMState.Pumping)
  1211. {
  1212. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1213. return;
  1214. }
  1215. //if (PMCurrentState == PMState.pum)
  1216. //{
  1217. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StopPump");
  1218. // return;
  1219. //}
  1220. //string BasePressureSetPoint= RtConfigValues[$"{ModuleName}.Pump.PumpBasePressure"].ToString(); ;
  1221. //{
  1222. // get { return RtConfigValues[$"{ModuleName}.Pump.PumpBasePressure"].ToString(); }
  1223. //}
  1224. //string PumpLimitSetPoint= RtConfigValues[$"{ModuleName}.Pump.PumpTimeLimit"].ToString();
  1225. //{
  1226. // get { return RtConfigValues[$"{ModuleName}.Pump.PumpTimeLimit"].ToString(); }
  1227. //}
  1228. string BasePressureSetPoint = QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.Pump.PumpBasePressure").ToString();
  1229. string PumpLimitSetPoint = QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.Pump.PumpTimeLimit").ToString();
  1230. // 设置底压
  1231. double basePressure = string.IsNullOrEmpty(BasePressureSetPoint) ? 0 : Convert.ToDouble(BasePressureSetPoint);
  1232. if (basePressure <= 0.01 || basePressure >= 1000)
  1233. {
  1234. MessageBox.Show($"基准压力设定值 {basePressure} 无效,应该在0到1000毫托之间");
  1235. return;
  1236. }
  1237. double pumpLimit = string.IsNullOrEmpty(PumpLimitSetPoint) ? 0 : Convert.ToDouble(PumpLimitSetPoint);
  1238. if (pumpLimit <= 0.01 || pumpLimit >= 1200)
  1239. {
  1240. MessageBox.Show($"抽气时间应该在0到1200之间,当前设定值{pumpLimit}");
  1241. return;
  1242. }
  1243. InvokeClient.Instance.Service.DoOperation("System.SetConfig", $"{ModuleName}.Pump.PumpBasePressure", basePressure.ToString());
  1244. InvokeClient.Instance.Service.DoOperation("System.SetConfig", $"{ModuleName}.Pump.PumpTimeLimit", pumpLimit.ToString());
  1245. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Pump");
  1246. }
  1247. private void OnOpenPump()
  1248. {
  1249. //if (RtDataValues[$"{ModuleName}.FsmState"].ToString() == "LaunchingPump")
  1250. if (PMCurrentState == PMState.LaunchingPump)
  1251. {
  1252. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1253. return;
  1254. }
  1255. //if (PumpIsOpen == true)
  1256. //{
  1257. // return;
  1258. //}
  1259. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StartPump");
  1260. }
  1261. private void OnClosePump()
  1262. {
  1263. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ClosePump");
  1264. }
  1265. private void OnOpenTurboPump()
  1266. {
  1267. //TurboIsOpen = true;
  1268. //if (RtDataValues[$"{ModuleName}.FsmState"].ToString() == "LaunchingTurbo")
  1269. if (PMCurrentState == PMState.LaunchingTurboPump)
  1270. {
  1271. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1272. return;
  1273. }
  1274. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StartTurboPump");
  1275. }
  1276. private void OnCloseTurboPump()
  1277. {
  1278. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.CloseTurboPump");
  1279. }
  1280. private void OnOpenPendulumValve()
  1281. {
  1282. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.TurnPendulumValve", true);
  1283. }
  1284. private void OnClosePendulumValve()
  1285. {
  1286. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.TurnPendulumValve", false);
  1287. }
  1288. private void OnPinUpDown(object upDown)
  1289. {
  1290. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetLiftPin", Convert.ToBoolean(upDown));
  1291. }
  1292. //private async void OnSetSRf()
  1293. //{
  1294. // if (SRFData.IsRfOn == true)
  1295. // {
  1296. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetSRf", SRFFwdPowerSetpoint, false);
  1297. // }
  1298. // else
  1299. // {
  1300. // if (GasIsFlowing == true)
  1301. // {
  1302. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.Match}.{AITRfOperation.SetMatchPosition}", SRFMatchC1, SRFMatchC2);
  1303. // await Task.Delay(100);
  1304. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetSRf", SRFFwdPowerSetpoint, true);
  1305. // }
  1306. // }
  1307. //}
  1308. private async void OnSetBRf()
  1309. {
  1310. if (BRFData.IsRfOn == true)
  1311. {
  1312. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBRf", BRFFwdPowerSetpoint, false);
  1313. }
  1314. else
  1315. {
  1316. if (GasIsFlowing == true)
  1317. {
  1318. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.BiasMatch}.{AITRfOperation.SetMatchPosition}", BRFMatchC1, BRFMatchC2);
  1319. await Task.Delay(100);
  1320. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBRf", BRFFwdPowerSetpoint, true);
  1321. }
  1322. }
  1323. }
  1324. private void OnPMAbort()
  1325. {
  1326. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Abort");
  1327. }
  1328. private void OnOpenButterflyValveView()
  1329. {
  1330. var _mainWindow = Application.Current.Windows.Cast<Window>().FirstOrDefault(window => window is Window) as Window;
  1331. butterflyValveMessageBox = new ButterflyValveView(ModuleName.ToString());
  1332. butterflyValveMessageBox.WindowStartupLocation = WindowStartupLocation.Manual;
  1333. butterflyValveMessageBox.Left = 700;
  1334. butterflyValveMessageBox.Top = 600;
  1335. butterflyValveMessageBox.Show();
  1336. butterflyValveMessageBox.Owner = _mainWindow;
  1337. }
  1338. private void OnLoadRecipe()
  1339. {
  1340. CurrentModuleRecipes = GetFilesNames(Path.Combine(QueryDataClient.Instance.Service.GetData("GetRTPath").ToString(), "Recipes", ModuleName, "Process")).ToList();
  1341. }
  1342. private void OnHV()
  1343. {
  1344. if (ESCHVData.IsOn == true)
  1345. {
  1346. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetESCHVIsOn", false);
  1347. }
  1348. else
  1349. {
  1350. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetESCHV", ESCVoltage);
  1351. //await Task.Run(async () =>
  1352. //{
  1353. // //InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetESCHVIsOn", true);
  1354. // //await Task.Delay(1000);
  1355. //});
  1356. }
  1357. }
  1358. private void OnHVSet()
  1359. {
  1360. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetESCHV", ESCVoltage);
  1361. }
  1362. private void OnRunRecipe(object obj)
  1363. {
  1364. string recipeName = SelectedRecipe;
  1365. if (recipeName == null)
  1366. {
  1367. return;
  1368. }
  1369. ClearData();
  1370. var recipePath = Path.Combine(QueryDataClient.Instance.Service.GetData("GetRTPath").ToString(), "Recipes", ModuleName, "Process", recipeName + ".rcp");
  1371. CurrentRecipe = Recipe.Load(File.ReadAllText(recipePath));
  1372. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.RunRecipe}", recipeName, ModuleManager.ModuleInfos[ModuleName].WaferManager.Wafers[0].WaferID, "Process");
  1373. }
  1374. private void OnSetChillerTemp()
  1375. {
  1376. var value = (QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.Chiller.ChillerTemperatureOffset").ToString());
  1377. float x;
  1378. float.TryParse(value, out x);
  1379. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.HeatChiller", ChillerType.Chiller.ToString(), ChillerTempSetpoint, x);
  1380. }
  1381. private void OnOffChiller()
  1382. {
  1383. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.OnOffChiller", ChillerType.Chiller.ToString(), !ChillerIsOn);
  1384. }
  1385. private void OnHeater(object obj)
  1386. {
  1387. if (IsAutoMode == true)
  1388. {
  1389. return;
  1390. }
  1391. AITHeaterData heaterData = obj as AITHeaterData;
  1392. var _mainWindow = Application.Current.Windows.Cast<Window>().FirstOrDefault(window => window is Window) as Window;
  1393. heaterView = new HeaterView(heaterData, ModuleName);
  1394. heaterView.WindowStartupLocation = WindowStartupLocation.CenterScreen;
  1395. heaterView.Owner = _mainWindow;
  1396. heaterView.Show();
  1397. }
  1398. private void OnEndStep()
  1399. {
  1400. if (CurrentRecipeResult?.RecipeStepNumber != null && CurrentRecipeResult?.RecipeStepNumber != CurrentRecipeResult?.RecipeStepCount)
  1401. {
  1402. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ManualEndStep");
  1403. }
  1404. else if (CurrentRecipeResult?.RecipeStepNumber != null && CurrentRecipeResult?.RecipeStepNumber == CurrentRecipeResult?.RecipeStepCount)
  1405. {
  1406. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Abort");
  1407. }
  1408. }
  1409. private void OnOnline()
  1410. {
  1411. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Online}");
  1412. }
  1413. private void OnOffline()
  1414. {
  1415. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Offline}");
  1416. }
  1417. private async void OnAbortRecipe(object obj)
  1418. {
  1419. if (PMCurrentState != PMState.Processing)
  1420. {
  1421. return;
  1422. }
  1423. switch (obj.ToString())
  1424. {
  1425. case "0":
  1426. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Abort");
  1427. break;
  1428. case "1":
  1429. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Abort");
  1430. await Task.Delay(1000);
  1431. if (CurrentRecipe.Header.DechuckRecipe != "")
  1432. {
  1433. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.RunRecipe}", CurrentRecipe.Header.DechuckRecipe, ModuleManager.ModuleInfos[ModuleName].WaferManager.Wafers[0].WaferID, RecipeType.DeChuck.ToString());
  1434. }
  1435. break;
  1436. case "2":
  1437. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Abort");
  1438. await Task.Delay(1000);
  1439. if (CurrentRecipe.Header.DechuckRecipe != "")
  1440. {
  1441. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.RunRecipe}", CurrentRecipe.Header.DechuckRecipe, ModuleManager.ModuleInfos[ModuleName].WaferManager.Wafers[0].WaferID, RecipeType.DeChuck.ToString());
  1442. }
  1443. await Task.Delay(3000);
  1444. while (PMCurrentState == PMState.Processing)
  1445. {
  1446. await Task.Delay(500);
  1447. }
  1448. InvokeClient.Instance.Service.DoOperation("ReturnWafer", ModuleName, 0);
  1449. break;
  1450. }
  1451. }
  1452. #endregion
  1453. #region 私有方法
  1454. private void ClearData()
  1455. {
  1456. ESCVoltage = 0;
  1457. SRFFwdPowerSetpoint = 0;
  1458. SRFMatchC1 = 0;
  1459. SRFMatchC2 = 0;
  1460. BRFFwdPowerSetpoint = 0;
  1461. BRFMatchC1 = 0;
  1462. BRFMatchC2 = 0;
  1463. HeGasSetpoint = 0;
  1464. MFC1SetPoint = 0;
  1465. MFC2SetPoint = 0;
  1466. MFC3SetPoint = 0;
  1467. MFC4SetPoint = 0;
  1468. MFC5SetPoint = 0;
  1469. MFC6SetPoint = 0;
  1470. MFC7SetPoint = 0;
  1471. MFC8SetPoint = 0;
  1472. MFC9SetPoint = 0;
  1473. MFC10SetPoint = 0;
  1474. MFC11SetPoint = 0;
  1475. MFC12SetPoint = 0;
  1476. }
  1477. private IEnumerable<string> GetFilesNames(string path)
  1478. {
  1479. if (Directory.Exists(path))
  1480. {
  1481. return Directory.GetFiles(path, "*.rcp")?
  1482. .Select(Path.GetFileNameWithoutExtension);
  1483. }
  1484. else
  1485. {
  1486. return new List<string>();
  1487. }
  1488. }
  1489. void timer_Tick(object sender, EventArgs e)
  1490. {
  1491. try
  1492. {
  1493. RtDataValues = QueryDataClient.Instance.Service.PollData(m_RtDataKeys);
  1494. if (RtDataValues == null)
  1495. {
  1496. return;
  1497. }
  1498. Valve12Visible = (bool)QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.MfcGas12.Enable");
  1499. Valve11Visible = (bool)QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.MfcGas11.Enable");
  1500. TurboN2FlowSetPoint = Convert.ToInt32(QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.TurboN2FlowSetPoint"));
  1501. PVN21ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVN21.IsOpen");
  1502. GasFinalValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveGasFinal.IsOpen");
  1503. PV11ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV11.IsOpen");
  1504. PV12ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV12.IsOpen");
  1505. PV21ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV21.IsOpen");
  1506. PV22ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV22.IsOpen");
  1507. PV31ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV31.IsOpen");
  1508. PV32ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV32.IsOpen");
  1509. PV41ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV41.IsOpen");
  1510. PV42ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV42.IsOpen");
  1511. PV51ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV51.IsOpen");
  1512. PV52ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV52.IsOpen");
  1513. PV61ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV61.IsOpen");
  1514. PV62ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV62.IsOpen");
  1515. PV71ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV71.IsOpen");
  1516. PV72ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV72.IsOpen");
  1517. PV81ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV81.IsOpen");
  1518. PV82ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV82.IsOpen");
  1519. PV91ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV91.IsOpen");
  1520. PV92ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV92.IsOpen");
  1521. PVA1ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVA1.IsOpen");
  1522. PVA2ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVA2.IsOpen");
  1523. PVB1ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVB1.IsOpen");
  1524. PVB2ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVB2.IsOpen");
  1525. PVC1ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVC1.IsOpen");
  1526. PVC2ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVC2.IsOpen");
  1527. MFC1ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc1.IsOpen");
  1528. MFC2ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc2.IsOpen");
  1529. MFC3ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc3.IsOpen");
  1530. MFC4ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc4.IsOpen");
  1531. MFC5ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc5.IsOpen");
  1532. MFC6ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc6.IsOpen");
  1533. MFC7ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc7.IsOpen");
  1534. MFC8ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc8.IsOpen");
  1535. MFC9ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc9.IsOpen");
  1536. MFC10ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc10.IsOpen");
  1537. MFC11ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc11.IsOpen");
  1538. MFC12ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc12.IsOpen");
  1539. N2ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveN2.IsOpen");
  1540. //SoftPumpValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveSoftPump.IsOpen");
  1541. FastPumpValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveFastPump.IsOpen");
  1542. GuageValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveGuage.IsOpen");
  1543. PVHe1ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVHe1.IsOpen");
  1544. PVHe2ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVHe2.IsOpen");
  1545. PVN21ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVN21.IsOpen");
  1546. PVN22ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVN22.IsOpen");
  1547. TurboPumpPumpingValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveTurboPumpPumping.IsOpen");
  1548. TurboPumpPurgeValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveTurboPumpPurge.IsOpen");
  1549. PVHe3ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVHe3.IsOpen");
  1550. HeISOValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveHeISO.IsOpen");
  1551. PumpIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.PumpIsRunning");
  1552. TurboIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.TurboPumpIsRunning");
  1553. LiftPinIsUp = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.LiftPinIsUp");
  1554. IsSlitDoorClosed = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsSlitDoorClosed");
  1555. IsLinerDoorClosed = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsLinerDoorClosed");
  1556. IsLidClosed = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsLidClosed");
  1557. PendulumValvePosition = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.GetPVPosition");
  1558. TurboPumpRotationalSpeed = Convert.ToInt32(RtDataValues[$"{ModuleName}.TurboPumpRotationalSpeed"].ToString());
  1559. PositionValue = -((int)((PendulumValvePosition) * 0.09));
  1560. PMCurrentState = (PMState)Enum.Parse(typeof(PMState), RtDataValues[$"{ModuleName}.FsmState"].ToString());
  1561. GasIsFlowing = PMCurrentState == PMState.GasFlowing;
  1562. IsProcessing = PMCurrentState == PMState.Processing;
  1563. MFC1Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas1");
  1564. MFC2Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas2");
  1565. MFC3Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas3");
  1566. MFC4Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas4");
  1567. MFC5Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas5");
  1568. MFC6Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas6");
  1569. MFC7Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas7");
  1570. MFC8Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas8");
  1571. MFC9Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas9");
  1572. MFC10Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas10");
  1573. MFC11Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas11");
  1574. MFC12Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas12");
  1575. MFCHeData = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcHe");
  1576. MFCN2Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcN2");
  1577. SRFData = CommonFunction.GetValue<AITRfData>(RtDataValues, $"{ModuleName}.{VenusDevice.Rf}.DeviceData");
  1578. BRFData = CommonFunction.GetValue<AITRfData>(RtDataValues, $"{ModuleName}.{VenusDevice.BiasRf}.DeviceData");
  1579. PendulumValveData = CommonFunction.GetValue<AITPendulumValveData>(RtDataValues, $"{ModuleName}.{VenusDevice.PendulumValve}.DeviceData");
  1580. ESCHVData = CommonFunction.GetValue<AITHVData>(RtDataValues, $"{ModuleName}.{VenusDevice.ESCHV}.DeviceData");
  1581. SecondPurgeValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveSecondPurge.IsOpen");
  1582. ValveHeaterData = (AITHeaterData)RtDataValues[$"{ModuleName}.ValveHeater.DeviceData"];
  1583. ForelineHeaterData = (AITHeaterData)RtDataValues[$"{ModuleName}.ForelineHeater.DeviceData"];
  1584. //WallHeaterData = (AITHeaterData)RtDataValues[$"{ModuleName}.WallHeater.DeviceData"];
  1585. MainPurgeValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMainPurge.IsOpen");
  1586. ChamberPressure = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.ChamberPressure");
  1587. ProcessPressure = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.ProcessPressure");
  1588. ForelinePressure = float.Parse(RtDataValues[$"{ModuleName}.ForelinePressure"].ToString());
  1589. ESCHePressure = float.Parse(RtDataValues[$"{ModuleName}.ESCHePressure"].ToString());
  1590. ChillerTemperature = float.Parse(RtDataValues[$"{ModuleName}.Chiller.Temp"].ToString());
  1591. HVTemperature = float.Parse(RtDataValues[$"{ModuleName}.{VenusDevice.ESCHV}.Temp"].ToString());
  1592. ChillerIsOn = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.Chiller.IsOn");
  1593. BiasRFFanInterlock = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.SourceRFFanInterlock");
  1594. IsWLK = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsWLK");
  1595. IsWaterFlowOk = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsWaterFlowOk");
  1596. IsTurboPumpInterlock = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsTurboPumpInterlock");
  1597. IsCDAOK = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsCDA_OK");
  1598. SensorGasBoxDoor = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.GasBoxDoorSW.Value");
  1599. SensorGasBoxPressure = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.GasBoxPressureSW.Value");
  1600. IsATM = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsATM");
  1601. IsVAC = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsVAC");
  1602. ESCHVOutputVoltage = CommonFunction.GetValue<int>(RtDataValues, $"{ModuleName}.ESCHV.OutputVoltage");
  1603. PurgeValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePurge.IsOpen");
  1604. MatchC1 = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.{VenusDevice.Match}.C1");
  1605. MatchC2 = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.{VenusDevice.Match}.C2");
  1606. BiasMatchC1 = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.{VenusDevice.BiasMatch}.C1");
  1607. BiasMatchC2 = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.{VenusDevice.BiasMatch}.C2");
  1608. TurboPumpWaterFlowSwitch = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.TurboPumpWaterFlowSwitch.Value");
  1609. IsTurboPumpAtSpeed = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsTurboPumpAtSpeed");
  1610. IsHasWafer = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.HasWafer");
  1611. WaferID = IsHasWafer ? ModuleManager.ModuleInfos[ModuleName].WaferManager.Wafers[0].SourceName : "";
  1612. if (PMCurrentState == PMState.Processing || PMCurrentState == PMState.Clean)
  1613. {
  1614. CurrentRecipeResult = CommonFunction.GetValue<RecipeResult>(RtDataValues, $"{ModuleName}.CurrentRecipeResult");
  1615. if (CurrentRecipeResult.RecipeStepNumber != null && CurrentRecipeResult.RecipeStepNumber != currentRecipeNumber)
  1616. {
  1617. var recipePath = Path.Combine(QueryDataClient.Instance.Service.GetData("GetRTPath").ToString(), "Recipes", ModuleName, CurrentRecipe.Header.Type.ToString(), CurrentRecipeResult.RecipeName + ".rcp");
  1618. CurrentRecipe = Recipe.Load(File.ReadAllText(recipePath));
  1619. CurrentRecipeStep = CurrentRecipe.Steps[Convert.ToInt32(CurrentRecipeResult.RecipeStepNumber) - 1];
  1620. }
  1621. currentRecipeNumber = CurrentRecipeResult.RecipeStepNumber;
  1622. }
  1623. else
  1624. {
  1625. CurrentRecipeResult = null;
  1626. CurrentRecipeStep = null;
  1627. }
  1628. if (Math.Abs(100 - ProcessPressure) > 1 && ProcessPressure < 100)
  1629. {
  1630. ChamberPressureFeedBack = ProcessPressure;
  1631. }
  1632. else
  1633. {
  1634. ChamberPressureFeedBack = ChamberPressure;
  1635. }
  1636. }
  1637. catch (Exception ex)
  1638. {
  1639. LOG.WriteExeption(ex.Message, ex);
  1640. }
  1641. }
  1642. public void addDataKeys()
  1643. {
  1644. m_RtDataKeys.Clear();
  1645. m_RtDataKeys.Add($"{ModuleName}.MfcGas1");
  1646. m_RtDataKeys.Add($"{ModuleName}.MfcGas2");
  1647. m_RtDataKeys.Add($"{ModuleName}.MfcGas3");
  1648. m_RtDataKeys.Add($"{ModuleName}.MfcGas4");
  1649. m_RtDataKeys.Add($"{ModuleName}.MfcGas5");
  1650. m_RtDataKeys.Add($"{ModuleName}.MfcGas6");
  1651. m_RtDataKeys.Add($"{ModuleName}.MfcGas7");
  1652. m_RtDataKeys.Add($"{ModuleName}.MfcGas8");
  1653. m_RtDataKeys.Add($"{ModuleName}.MfcGas9");
  1654. m_RtDataKeys.Add($"{ModuleName}.MfcGas10");
  1655. m_RtDataKeys.Add($"{ModuleName}.MfcGas11");
  1656. m_RtDataKeys.Add($"{ModuleName}.MfcGas12");
  1657. m_RtDataKeys.Add($"{ModuleName}.MfcHe");
  1658. m_RtDataKeys.Add($"{ModuleName}.MfcN2");
  1659. m_RtDataKeys.Add($"{ModuleName}.ForelinePressure");
  1660. m_RtDataKeys.Add($"{ModuleName}.ChamberPressure");
  1661. m_RtDataKeys.Add($"{ModuleName}.ProcessPressure");
  1662. m_RtDataKeys.Add($"{ModuleName}.ChamberPressure");
  1663. m_RtDataKeys.Add($"{ModuleName}.ESCHePressure");
  1664. m_RtDataKeys.Add($"{ModuleName}.IsATM");
  1665. m_RtDataKeys.Add($"{ModuleName}.IsVAC");
  1666. m_RtDataKeys.Add($"{ModuleName}.LiftPinIsUp");
  1667. m_RtDataKeys.Add($"{ModuleName}.LiftPinIsDown");
  1668. m_RtDataKeys.Add($"{ModuleName}.ValvePVN21.IsOpen");
  1669. m_RtDataKeys.Add($"{ModuleName}.ValvePVN22.IsOpen");
  1670. m_RtDataKeys.Add($"{ModuleName}.ValvePV11.IsOpen");
  1671. m_RtDataKeys.Add($"{ModuleName}.ValvePV12.IsOpen");
  1672. m_RtDataKeys.Add($"{ModuleName}.ValvePV21.IsOpen");
  1673. m_RtDataKeys.Add($"{ModuleName}.ValvePV22.IsOpen");
  1674. m_RtDataKeys.Add($"{ModuleName}.ValvePV31.IsOpen");
  1675. m_RtDataKeys.Add($"{ModuleName}.ValvePV32.IsOpen");
  1676. m_RtDataKeys.Add($"{ModuleName}.ValvePV41.IsOpen");
  1677. m_RtDataKeys.Add($"{ModuleName}.ValvePV42.IsOpen");
  1678. m_RtDataKeys.Add($"{ModuleName}.ValvePV51.IsOpen");
  1679. m_RtDataKeys.Add($"{ModuleName}.ValvePV52.IsOpen");
  1680. m_RtDataKeys.Add($"{ModuleName}.ValvePV61.IsOpen");
  1681. m_RtDataKeys.Add($"{ModuleName}.ValvePV62.IsOpen");
  1682. m_RtDataKeys.Add($"{ModuleName}.ValvePV71.IsOpen");
  1683. m_RtDataKeys.Add($"{ModuleName}.ValvePV72.IsOpen");
  1684. m_RtDataKeys.Add($"{ModuleName}.ValvePV81.IsOpen");
  1685. m_RtDataKeys.Add($"{ModuleName}.ValvePV82.IsOpen");
  1686. m_RtDataKeys.Add($"{ModuleName}.ValvePV91.IsOpen");
  1687. m_RtDataKeys.Add($"{ModuleName}.ValvePV92.IsOpen");
  1688. m_RtDataKeys.Add($"{ModuleName}.ValvePVA1.IsOpen");
  1689. m_RtDataKeys.Add($"{ModuleName}.ValvePVA2.IsOpen");
  1690. m_RtDataKeys.Add($"{ModuleName}.ValvePVB1.IsOpen");
  1691. m_RtDataKeys.Add($"{ModuleName}.ValvePVB2.IsOpen");
  1692. m_RtDataKeys.Add($"{ModuleName}.ValvePVC1.IsOpen");
  1693. m_RtDataKeys.Add($"{ModuleName}.ValvePVC2.IsOpen");
  1694. m_RtDataKeys.Add($"{ModuleName}.ValveMfc1.IsOpen");
  1695. m_RtDataKeys.Add($"{ModuleName}.ValveMfc2.IsOpen");
  1696. m_RtDataKeys.Add($"{ModuleName}.ValveMfc3.IsOpen");
  1697. m_RtDataKeys.Add($"{ModuleName}.ValveMfc4.IsOpen");
  1698. m_RtDataKeys.Add($"{ModuleName}.ValveMfc5.IsOpen");
  1699. m_RtDataKeys.Add($"{ModuleName}.ValveMfc6.IsOpen");
  1700. m_RtDataKeys.Add($"{ModuleName}.ValveMfc7.IsOpen");
  1701. m_RtDataKeys.Add($"{ModuleName}.ValveMfc8.IsOpen");
  1702. m_RtDataKeys.Add($"{ModuleName}.ValveMfc9.IsOpen");
  1703. m_RtDataKeys.Add($"{ModuleName}.ValveMfc10.IsOpen");
  1704. m_RtDataKeys.Add($"{ModuleName}.ValveMfc11.IsOpen");
  1705. // m_RtDataKeys.Add($"{ModuleName}.ValveMfc12.IsOpen");
  1706. m_RtDataKeys.Add($"{ModuleName}.ValveGasFinal.IsOpen");
  1707. //m_RtDataKeys.Add($"{ModuleName}.ValveSoftPump.IsOpen");
  1708. m_RtDataKeys.Add($"{ModuleName}.ValveFastPump.IsOpen");
  1709. m_RtDataKeys.Add($"{ModuleName}.ValveN2.IsOpen");
  1710. m_RtDataKeys.Add($"{ModuleName}.ValvePVHe1.IsOpen");
  1711. m_RtDataKeys.Add($"{ModuleName}.ValvePVHe2.IsOpen");
  1712. m_RtDataKeys.Add($"{ModuleName}.ValveTurboPumpPumping.IsOpen");
  1713. m_RtDataKeys.Add($"{ModuleName}.ValveTurboPumpPurge.IsOpen");
  1714. m_RtDataKeys.Add($"{ModuleName}.ValvePVN21.IsOpen");
  1715. m_RtDataKeys.Add($"{ModuleName}.ValvePVN22.IsOpen");
  1716. m_RtDataKeys.Add($"{ModuleName}.ValveGuage.IsOpen");
  1717. m_RtDataKeys.Add($"{ModuleName}.ValvePVHe3.IsOpen");
  1718. m_RtDataKeys.Add($"{ModuleName}.ValveHeISO.IsOpen");
  1719. m_RtDataKeys.Add($"{ModuleName}.ValvePurge.IsOpen");
  1720. m_RtDataKeys.Add($"{ModuleName}.TurboPumpIsRunning");
  1721. m_RtDataKeys.Add($"{ModuleName}.PumpIsRunning");
  1722. m_RtDataKeys.Add($"{ModuleName}.IsSlitDoorClosed");
  1723. m_RtDataKeys.Add($"{ModuleName}.IsLinerDoorClosed");
  1724. m_RtDataKeys.Add($"{ModuleName}.IsLidClosed");
  1725. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Rf}.DeviceData");
  1726. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.BiasRf}.DeviceData");
  1727. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Match}.C1");
  1728. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Match}.C2");
  1729. // m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Match}.WorkMode");
  1730. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.BiasMatch}.C1");
  1731. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.BiasMatch}.C2");
  1732. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.PendulumValve}.DeviceData");
  1733. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.ESCHV}.DeviceData");
  1734. m_RtDataKeys.Add($"{ModuleName}.TurboPumpRotationalSpeed");
  1735. m_RtDataKeys.Add($"{ModuleName}.GetPVPosition");
  1736. m_RtDataKeys.Add($"{ModuleName}.Chiller.Temp");
  1737. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.ESCHV}.Temp");
  1738. //m_RtDataKeys.Add($"{ModuleName}.ESCHV.OutputVoltage");
  1739. //m_RtDataKeys.Add($"{ModuleName}.ESCHV.IsOn");
  1740. m_RtDataKeys.Add($"{ModuleName}.IsWaterFlowOk");
  1741. m_RtDataKeys.Add($"{ModuleName}.IsWLK");
  1742. m_RtDataKeys.Add($"{ModuleName}.IsCDA_OK");
  1743. m_RtDataKeys.Add($"{ModuleName}.SourceRFFanInterlock");
  1744. m_RtDataKeys.Add($"{ModuleName}.IsTurboPumpInterlock");
  1745. m_RtDataKeys.Add($"{ModuleName}.GasBoxDoorSW.Value");
  1746. m_RtDataKeys.Add($"{ModuleName}.GasBoxPressureSW.Value");
  1747. //m_RtDataKeys.Add($"{ModuleName}.WallTempFeedBack");
  1748. m_RtDataKeys.Add($"{ModuleName}.Chiller.IsOn");
  1749. m_RtDataKeys.Add($"{ModuleName}.ValveHeater.DeviceData");
  1750. m_RtDataKeys.Add($"{ModuleName}.ValveMainPurge.IsOpen");
  1751. m_RtDataKeys.Add($"{ModuleName}.ValveSecondPurge.IsOpen");
  1752. m_RtDataKeys.Add($"{ModuleName}.ForelineHeater.DeviceData");
  1753. m_RtDataKeys.Add($"{ModuleName}.WallHeater.DeviceData");
  1754. m_RtDataKeys.Add($"{ModuleName}.FsmState");
  1755. m_RtDataKeys.Add($"{ModuleName}.IsTurboPumpAtSpeed");
  1756. m_RtDataKeys.Add($"{ModuleName}.TurboPumpWaterFlowSwitch.Value");
  1757. m_RtDataKeys.Add($"{ModuleName}.HasWafer");
  1758. m_RtDataKeys.Add($"{ModuleName}.CurrentRecipeResult");
  1759. }
  1760. #endregion
  1761. }
  1762. }