PMEntity.cs 27 KB

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  1. using System;
  2. using System.Collections.Generic;
  3. using System.Threading;
  4. using System.Diagnostics;
  5. using System.Linq;
  6. using Aitex.Core.Common;
  7. using Aitex.Core.RT.DataCenter;
  8. using Aitex.Core.RT.Device;
  9. using Aitex.Core.RT.Event;
  10. using Aitex.Core.RT.Fsm;
  11. using Aitex.Core.RT.OperationCenter;
  12. using Aitex.Core.RT.Routine;
  13. using Aitex.Core.RT.SCCore;
  14. using Aitex.Core.Util;
  15. using Aitex.Sorter.Common;
  16. using MECF.Framework.Common.DataCenter;
  17. using MECF.Framework.Common.Equipment;
  18. using MECF.Framework.Common.Schedulers;
  19. using MECF.Framework.Common.SubstrateTrackings;
  20. using Venus_Core;
  21. using Venus_RT.Devices;
  22. using Venus_RT.Modules;
  23. using Venus_RT.Modules.PMs;
  24. using MECF.Framework.Common.Routine;
  25. namespace Venus_RT.Modules.PMs
  26. {
  27. public class RecipeRunningInfo
  28. {
  29. public Guid InnerId { get; set; }
  30. public RecipeHead Head { get; set; }
  31. public List<RecipeStep> RecipeStepList { get; set; }
  32. public string RecipeName { get; set; }
  33. public DateTime BeginTime { get; set; }
  34. public DateTime EndTime { get; set; }
  35. public int StepNumber { get; set; }
  36. public string StepName { get; set; }
  37. public double StepTime { get; set; }
  38. public double StepElapseTime { get; set; }
  39. public double TotalTime { get; set; }
  40. public double TotalElapseTime { get; set; }
  41. }
  42. public class PMEntity : Entity, IModuleEntity
  43. {
  44. public enum MSG
  45. {
  46. Home,
  47. Transfer,
  48. PrepareTransfer,
  49. PostTransfer,
  50. Reset,
  51. Abort,
  52. Error,
  53. LaunchPump,
  54. LaunchTurboPump,
  55. Pump,
  56. Vent,
  57. PumpLoadLock,
  58. VentLoadLock,
  59. PurgeLoadLock,
  60. LoadLockLeakCheck,
  61. CyclePurge,
  62. GasLinePurge,
  63. Heat,
  64. TransferHandoff,
  65. StartTransfer,
  66. LeakCheck,
  67. GasLeakCheck,
  68. MoveLiftPin,
  69. MoveGuidePin,
  70. LLPlace,
  71. LLPick,
  72. Process,
  73. RunRecipe,
  74. PostProcess,
  75. RecipeSkipStep,
  76. RecipeUpdate,
  77. RecipeResume,
  78. RecipePause,
  79. RecipeAbort,
  80. PreProcess,
  81. AutoMode,
  82. ManualMode,
  83. LockLid,
  84. Online,
  85. Offline,
  86. GasFlow,
  87. StopGasFlow,
  88. RfPower,
  89. MaxMsg
  90. }
  91. private readonly JetPM _chamber;
  92. public ModuleName Module { get; }
  93. public Action<bool, bool> TransferPrepared;
  94. private readonly PMHomeRoutine _home;
  95. private readonly StartDryPumpRoutine _startDryPumpRoutine;
  96. private readonly StartTurboPumpRoutine _startTurboPumpRoutine;
  97. private readonly VentRoutine _ventRoutine;
  98. private readonly PumpDownRoutine _pumpRoutine;
  99. private readonly LoadLockVentRoutine _ventLoadLockRoutine;
  100. private readonly LoadLockPumpRoutine _pumpLoadLockRoutine;
  101. private readonly LoadLockPurgeRoutine _purgeLoadLockRoutine;
  102. private readonly LoadLockLeakCheckRoutine _loadLockLeakCheckRoutine;
  103. private readonly PMPurgeRoutine _purgeRoutine;
  104. private readonly PMGaslinePurgeRoutine _gaslinePurgeRoutine;
  105. private readonly PMLeakCheckRoutine _leakCheckRoutine;
  106. private readonly GasBoxLeakCheckRoutine _gasBoxLeakCheckRoutine;
  107. private readonly LLPlaceRoutine _llPlaceRoutine;
  108. private readonly LLPickRoutine _llPickRoutine;
  109. private readonly PMProcessRoutine _processRoutine;
  110. public bool IsIdle
  111. {
  112. get { return fsm.State == (int)PMState.Idle; }
  113. }
  114. public bool IsError
  115. {
  116. get { return fsm.State == (int)PMState.Error; }
  117. }
  118. public bool IsInit
  119. {
  120. get { return fsm.State == (int)PMState.Init; }
  121. }
  122. public bool IsBusy
  123. {
  124. get { return !IsInit && !IsError && !IsIdle; }
  125. }
  126. public bool IsProcessing
  127. {
  128. get { return fsm.State == (int)PMState.PreProcess || fsm.State == (int)PMState.Processing || fsm.State == (int)PMState.PostProcess; }
  129. }
  130. public bool Check(int msg, out string reason, object[] objs)
  131. {
  132. reason = "";
  133. return true;
  134. }
  135. //
  136. private bool CheckToPostMessage(int msg, params object[] args)
  137. {
  138. if (!fsm.FindTransition(fsm.State, msg))
  139. {
  140. EV.PostWarningLog(Module.ToString(), $"{Module} is in { (PMState)fsm.State} state,can not do {(MSG)msg}");
  141. return false;
  142. }
  143. fsm.PostMsg(msg, args);
  144. return true;
  145. }
  146. public int Invoke(string function, params object[] args)
  147. {
  148. switch (function)
  149. {
  150. case "Home":
  151. CheckToPostMessage((int)MSG.Home);
  152. return (int)MSG.Home;
  153. }
  154. return (int)FSM_MSG.NONE;
  155. }
  156. public bool CheckAcked(int msg)
  157. {
  158. return fsm.CheckExecuted(msg);
  159. }
  160. public PMEntity(ModuleName module)
  161. {
  162. Module = module;
  163. _chamber = DEVICE.GetDevice<JetPM>(Module.ToString());
  164. _home = new PMHomeRoutine(_chamber);
  165. _startDryPumpRoutine = new StartDryPumpRoutine(_chamber);
  166. _startTurboPumpRoutine = new StartTurboPumpRoutine(_chamber);
  167. _ventRoutine = new VentRoutine(_chamber);
  168. _pumpRoutine = new PumpDownRoutine(_chamber);
  169. _ventLoadLockRoutine = new LoadLockVentRoutine(_chamber);
  170. _pumpLoadLockRoutine = new LoadLockPumpRoutine(_chamber);
  171. _purgeLoadLockRoutine = new LoadLockPurgeRoutine(_chamber);
  172. _loadLockLeakCheckRoutine = new LoadLockLeakCheckRoutine(_chamber);
  173. _purgeRoutine = new PMPurgeRoutine(_chamber);
  174. _gaslinePurgeRoutine = new PMGaslinePurgeRoutine(_chamber);
  175. _leakCheckRoutine = new PMLeakCheckRoutine(_chamber);
  176. _gasBoxLeakCheckRoutine = new GasBoxLeakCheckRoutine(_chamber);
  177. _llPlaceRoutine = new LLPlaceRoutine(_chamber);
  178. _llPickRoutine = new LLPickRoutine(_chamber, _ventLoadLockRoutine);
  179. _processRoutine = new PMProcessRoutine(_chamber, _pumpRoutine);
  180. fsm = new StateMachine<PMEntity>(Module.ToString(), (int)PMState.Init, 50);
  181. //Idle
  182. EnterExitTransition((int)PMState.Idle, FnIdle, (int)FSM_MSG.NONE, null);
  183. EnterExitTransition<PMState, FSM_MSG>(PMState.Error, fEnterError, FSM_MSG.NONE, null);
  184. //Home
  185. //EnterExitTransition((int)PMState.Homing, FnEnterHome, (int)FSM_MSG.NONE, FnExitHome);
  186. AnyStateTransition(MSG.Error, FnError, PMState.Error);
  187. Transition(PMState.Init, FSM_MSG.TIMER, FnTimeout, PMState.Init);
  188. Transition(PMState.Init, MSG.Home, FnStartHome, PMState.Homing);
  189. Transition(PMState.Error, MSG.Home, FnStartHome, PMState.Homing);
  190. Transition(PMState.Idle, MSG.Home, FnStartHome, PMState.Homing);
  191. Transition(PMState.Homing, FSM_MSG.TIMER, FnMonitorHome, PMState.Idle);
  192. Transition(PMState.Idle, FSM_MSG.TIMER, FnIdleTimeout, PMState.Idle);
  193. Transition(PMState.Error, FSM_MSG.TIMER, FnErrorTimeout, PMState.Error);
  194. //Launch DryPump sequence
  195. Transition(PMState.Idle, MSG.LaunchPump, FnLaunchPump, PMState.LaunchingPump);
  196. Transition(PMState.LaunchingPump, FSM_MSG.TIMER, FnLaunchPumpTimeout, PMState.Idle);
  197. Transition(PMState.LaunchingPump, MSG.Abort, FnAbortStartPumping, PMState.Idle);
  198. //Launch TurboPump sequence
  199. Transition(PMState.Idle, MSG.LaunchTurboPump, FnLaunchTurboPump, PMState.LaunchingTurboPump);
  200. Transition(PMState.LaunchingTurboPump, FSM_MSG.TIMER, FnLaunchTurboPumpTimeout, PMState.Idle);
  201. Transition(PMState.LaunchingTurboPump, MSG.Abort, FnAbortStartTurboPumping, PMState.Idle);
  202. //vent sequence
  203. Transition(PMState.Idle, MSG.Vent, FnStartVent, PMState.Venting);
  204. Transition(PMState.Pumping, MSG.Vent, FnVentToPumping, PMState.Venting);
  205. Transition(PMState.Venting, FSM_MSG.TIMER, FnVentTimeout, PMState.Idle);
  206. Transition(PMState.Venting, MSG.Abort, FnAbortVent, PMState.Idle);
  207. //Pump sequence
  208. Transition(PMState.Idle, MSG.Pump, FnStartPumpDown, PMState.Pumping);
  209. Transition(PMState.Venting, MSG.Pump, FnVentToPumping, PMState.Pumping);
  210. Transition(PMState.Pumping, FSM_MSG.TIMER, FnPumpDownTimeout, PMState.Idle);
  211. Transition(PMState.Pumping, MSG.Abort, FnAbortPumping, PMState.Idle);
  212. //Pump Loadlock sequence
  213. Transition(PMState.Idle, MSG.PumpLoadLock, FnStartPumpDownLoadLock, PMState.PumpingLoadLock);
  214. Transition(PMState.VentingLoadLock, MSG.PumpLoadLock, FnVentLoadLockToPumpingLoadLock, PMState.PumpingLoadLock);
  215. Transition(PMState.PumpingLoadLock, FSM_MSG.TIMER, FnPumpDownLoadLockTimeout, PMState.Idle);
  216. Transition(PMState.PumpingLoadLock, MSG.Abort, FnAbortPumpingLoadLock, PMState.Idle);
  217. //Vent Loadlock sequence
  218. Transition(PMState.Idle, MSG.VentLoadLock, FnStartVentLoadlock, PMState.VentingLoadLock);
  219. Transition(PMState.PumpingLoadLock, MSG.VentLoadLock, FnPumpingLoadLockToVentLoadLock, PMState.VentingLoadLock);
  220. Transition(PMState.VentingLoadLock, FSM_MSG.TIMER, FnVentLoadLockTimeout, PMState.Idle);
  221. Transition(PMState.VentingLoadLock, MSG.Abort, FnAbortVentLoadLock, PMState.Idle);
  222. // Purge LoadLock sequence
  223. Transition(PMState.Idle, MSG.PurgeLoadLock, FnStartPurgeLoadlock, PMState.PurgingLoadLock);
  224. Transition(PMState.PurgingLoadLock, FSM_MSG.TIMER, FnPurgeLoadLockTimeout, PMState.Idle);
  225. Transition(PMState.PurgingLoadLock, MSG.Abort, FnAbortPurgeLoadLock, PMState.Idle);
  226. //LoadLock Leak check sequence
  227. Transition(PMState.Idle, MSG.LoadLockLeakCheck, FnStartLoadLockLeakCheck, PMState.LoadLockLeakCheck);
  228. Transition(PMState.LoadLockLeakCheck, FSM_MSG.TIMER, FnLoadLockLeakCheckTimeout, PMState.Idle);
  229. Transition(PMState.LoadLockLeakCheck, MSG.Abort, FnAbortLoadLockLeakCheck, PMState.Idle);
  230. // PM Purge sequence
  231. Transition(PMState.Idle, MSG.CyclePurge, FnStartPurge, PMState.Purging);
  232. Transition(PMState.Purging, FSM_MSG.TIMER, FnPurgeTimeout, PMState.Idle);
  233. Transition(PMState.Purging, MSG.Abort, FnAbortPurge, PMState.Idle);
  234. // PM GasLine Purge sequence
  235. Transition(PMState.Idle, MSG.GasLinePurge, FnStartGasLinePurge, PMState.GasLinePurge);
  236. Transition(PMState.GasLinePurge, FSM_MSG.TIMER, FnGasLinePurgeTimeout, PMState.Idle);
  237. Transition(PMState.GasLinePurge, MSG.Abort, FnAbortGasLinePurge, PMState.Idle);
  238. //PM Leak check sequence
  239. Transition(PMState.Idle, MSG.LeakCheck, FnStartPMLeakCheck, PMState.LeakCheck);
  240. Transition(PMState.LeakCheck, FSM_MSG.TIMER, FnPMLeakCheckTimeout, PMState.Idle);
  241. Transition(PMState.LeakCheck, MSG.Abort, FnAbortPMLeakCheck, PMState.Idle);
  242. //PM Leak check sequence
  243. Transition(PMState.Idle, MSG.GasLeakCheck, FnStartGasBoxLeakCheck, PMState.GasBoxLeakCheck);
  244. Transition(PMState.GasBoxLeakCheck, FSM_MSG.TIMER, FnGasBoxLeakCheckTimeout, PMState.Idle);
  245. Transition(PMState.GasBoxLeakCheck, MSG.Abort, FnAbortGasBoxLeakCheck, PMState.Idle);
  246. // PlaceWafer from LoadLock Arm sequence
  247. Transition(PMState.Idle, MSG.LLPlace, FnStartLLPlace, PMState.LLPlacing);
  248. Transition(PMState.LLPlacing, FSM_MSG.TIMER, FnLLPlaceTimeout, PMState.Idle);
  249. Transition(PMState.LLPlacing, MSG.Abort, FnAbortLLPlace, PMState.Idle);
  250. // PickWafer to LoadLock Arm sequence
  251. Transition(PMState.Idle, MSG.LLPick, FnStartLLPick, PMState.LLPicking);
  252. Transition(PMState.LLPicking, FSM_MSG.TIMER, FnLLPickTimeout, PMState.Idle);
  253. Transition(PMState.LLPicking, MSG.Abort, FnAbortLLPick, PMState.Idle);
  254. // Process
  255. Transition(PMState.Idle, MSG.RunRecipe, FnRunRecipe, PMState.Processing);
  256. Transition(PMState.Processing, FSM_MSG.TIMER, FnProcessTimeout, PMState.Idle);
  257. Transition(PMState.Processing, MSG.Abort, FnAbortProcess, PMState.Idle);
  258. Running = true;
  259. WaferManager.Instance.SubscribeLocation(ModuleName.PMA, 1);
  260. WaferManager.Instance.SubscribeLocation(ModuleName.LLA, 1);
  261. }
  262. private bool FnIdle(object[] objs)
  263. {
  264. Running = false;
  265. return true;
  266. }
  267. private bool fEnterError(object[] objs)
  268. {
  269. return true;
  270. }
  271. private bool FnError(object[] objs)
  272. {
  273. Running = false;
  274. if (((PMState)fsm.State == PMState.Processing) || ((PMState)fsm.State == PMState.PreProcess)
  275. || ((PMState)fsm.State == PMState.Homing) || ((PMState)fsm.State == PMState.LoadProcessRecipe))
  276. return false;
  277. if (IsProcessing)
  278. {
  279. WaferManager.Instance.UpdateWaferProcessStatus(Module, 0, EnumWaferProcessStatus.Failed);
  280. }
  281. return true;
  282. }
  283. private bool FnTimeout(object[] objs)
  284. {
  285. _debugRoutine();
  286. return true;
  287. }
  288. private bool FnIdleTimeout(object[] objs)
  289. {
  290. _debugRoutine();
  291. return true;
  292. }
  293. private bool FnErrorTimeout(object[] objs)
  294. {
  295. _debugRoutine();
  296. return true;
  297. }
  298. private bool FnStartHome(object[] objs)
  299. {
  300. return _home.Start() == RState.Running;
  301. }
  302. private bool FnMonitorHome(object[] objs)
  303. {
  304. RState ret = _home.Monitor();
  305. if (ret == RState.Failed || ret == RState.Timeout)
  306. {
  307. PostMsg(MSG.Error);
  308. return false;
  309. }
  310. return ret == RState.End;
  311. }
  312. private bool FnLaunchPump(object[] param)
  313. {
  314. return _startDryPumpRoutine.Start() == RState.Running;
  315. }
  316. private bool FnLaunchPumpTimeout(object[] param)
  317. {
  318. RState ret = _startDryPumpRoutine.Monitor();
  319. if (ret == RState.Failed || ret == RState.Timeout)
  320. {
  321. PostMsg(MSG.Error);
  322. return false;
  323. }
  324. return ret == RState.End;
  325. }
  326. private bool FnAbortStartPumping(object[] param)
  327. {
  328. _startDryPumpRoutine.Abort();
  329. return true;
  330. }
  331. private bool FnLaunchTurboPump(object[] param)
  332. {
  333. return _startTurboPumpRoutine.Start() == RState.Running;
  334. }
  335. private bool FnLaunchTurboPumpTimeout(object[] param)
  336. {
  337. RState ret = _startTurboPumpRoutine.Monitor();
  338. if (ret == RState.Failed || ret == RState.Timeout)
  339. {
  340. PostMsg(MSG.Error);
  341. return false;
  342. }
  343. return ret == RState.End;
  344. }
  345. private bool FnAbortStartTurboPumping(object[] param)
  346. {
  347. _startTurboPumpRoutine.Abort();
  348. return true;
  349. }
  350. private bool FnStartVent(object[] param)
  351. {
  352. return _ventRoutine.Start() == RState.Running;
  353. }
  354. private bool FnVentTimeout(object[] param)
  355. {
  356. RState ret = _ventRoutine.Monitor();
  357. if (ret == RState.Failed || ret == RState.Timeout)
  358. {
  359. PostMsg(MSG.Error);
  360. return false;
  361. }
  362. return ret == RState.End;
  363. }
  364. private bool FnVentToPumping(object[] param)
  365. {
  366. _ventRoutine.Abort();
  367. return true; // FnStartPumpDown(param);
  368. }
  369. private bool FnAbortVent(object[] param)
  370. {
  371. _ventRoutine.Abort();
  372. return true;
  373. }
  374. private bool FnStartPumpDown(object[] param)
  375. {
  376. return _pumpRoutine.Start() == RState.Running;
  377. }
  378. private bool FnPumpDownTimeout(object[] param)
  379. {
  380. RState ret = _pumpRoutine.Monitor();
  381. if (ret == RState.Failed || ret == RState.Timeout)
  382. {
  383. PostMsg(MSG.Error);
  384. return false;
  385. }
  386. return ret == RState.End;
  387. }
  388. private bool FnAbortPumping(object[] param)
  389. {
  390. _pumpRoutine.Abort();
  391. return true;
  392. }
  393. private bool FnStartVentLoadlock(object[] param)
  394. {
  395. return _ventLoadLockRoutine.Start() == RState.Running;
  396. }
  397. private bool FnVentLoadLockTimeout(object[] param)
  398. {
  399. RState ret = _ventLoadLockRoutine.Monitor();
  400. if (ret == RState.Failed || ret == RState.Timeout)
  401. {
  402. PostMsg(MSG.Error);
  403. return false;
  404. }
  405. return ret == RState.End;
  406. }
  407. private bool FnVentLoadLockToPumpingLoadLock(object[] param)
  408. {
  409. _ventLoadLockRoutine.Abort();
  410. return FnStartPumpDownLoadLock(param);
  411. }
  412. private bool FnAbortVentLoadLock(object[] param)
  413. {
  414. _ventLoadLockRoutine.Abort();
  415. return true;
  416. }
  417. private bool FnStartPumpDownLoadLock(object[] param)
  418. {
  419. return _pumpLoadLockRoutine.Start() == RState.Running;
  420. }
  421. private bool FnPumpDownLoadLockTimeout(object[] param)
  422. {
  423. RState ret = _pumpLoadLockRoutine.Monitor();
  424. if (ret == RState.Failed || ret == RState.Timeout)
  425. {
  426. PostMsg(MSG.Error);
  427. return false;
  428. }
  429. return ret == RState.End;
  430. }
  431. private bool FnPumpingToVent(object[] param)
  432. {
  433. _pumpRoutine.Abort();
  434. return FnStartVent(param);
  435. }
  436. private bool FnPumpingLoadLockToVentLoadLock(object[] param)
  437. {
  438. _pumpLoadLockRoutine.Abort();
  439. return FnStartVentLoadlock(param);
  440. }
  441. private bool FnAbortPumpingLoadLock(object[] param)
  442. {
  443. _pumpLoadLockRoutine.Abort();
  444. return true;
  445. }
  446. private bool FnStartPurgeLoadlock(object[] param)
  447. {
  448. return _purgeLoadLockRoutine.Start() == RState.Running;
  449. }
  450. private bool FnPurgeLoadLockTimeout(object[] param)
  451. {
  452. RState ret = _purgeLoadLockRoutine.Monitor();
  453. if (ret == RState.Failed || ret == RState.Timeout)
  454. {
  455. PostMsg(MSG.Error);
  456. return false;
  457. }
  458. return ret == RState.End;
  459. }
  460. private bool FnAbortPurgeLoadLock(object[] param)
  461. {
  462. _purgeLoadLockRoutine.Abort();
  463. return true;
  464. }
  465. private bool FnStartLoadLockLeakCheck(object[] param)
  466. {
  467. return _loadLockLeakCheckRoutine.Start() == RState.Running;
  468. }
  469. private bool FnLoadLockLeakCheckTimeout(object[] param)
  470. {
  471. RState ret = _loadLockLeakCheckRoutine.Monitor();
  472. if (ret == RState.Failed || ret == RState.Timeout)
  473. {
  474. PostMsg(MSG.Error);
  475. return false;
  476. }
  477. return ret == RState.End;
  478. }
  479. private bool FnAbortLoadLockLeakCheck(object[] param)
  480. {
  481. _loadLockLeakCheckRoutine.Abort();
  482. return true;
  483. }
  484. private bool FnStartPurge(object[] param)
  485. {
  486. return _purgeRoutine.Start() == RState.Running;
  487. }
  488. private bool FnPurgeTimeout(object[] param)
  489. {
  490. RState ret = _purgeRoutine.Monitor();
  491. if (ret == RState.Failed || ret == RState.Timeout)
  492. {
  493. PostMsg(MSG.Error);
  494. return false;
  495. }
  496. return ret == RState.End;
  497. }
  498. private bool FnAbortPurge(object[] param)
  499. {
  500. _purgeRoutine.Abort();
  501. return true;
  502. }
  503. private bool FnStartGasLinePurge(object[] param)
  504. {
  505. return _gaslinePurgeRoutine.Start() == RState.Running;
  506. }
  507. private bool FnGasLinePurgeTimeout(object[] param)
  508. {
  509. RState ret = _gaslinePurgeRoutine.Monitor();
  510. if (ret == RState.Failed || ret == RState.Timeout)
  511. {
  512. PostMsg(MSG.Error);
  513. return false;
  514. }
  515. return ret == RState.End;
  516. }
  517. private bool FnAbortGasLinePurge(object[] param)
  518. {
  519. _gaslinePurgeRoutine.Abort();
  520. return true;
  521. }
  522. private bool FnStartPMLeakCheck(object[] param)
  523. {
  524. return _leakCheckRoutine.Start() == RState.Running;
  525. }
  526. private bool FnPMLeakCheckTimeout(object[] param)
  527. {
  528. RState ret = _leakCheckRoutine.Monitor();
  529. if (ret == RState.Failed || ret == RState.Timeout)
  530. {
  531. PostMsg(MSG.Error);
  532. return false;
  533. }
  534. return ret == RState.End;
  535. }
  536. private bool FnAbortPMLeakCheck(object[] param)
  537. {
  538. _leakCheckRoutine.Abort();
  539. return true;
  540. }
  541. private bool FnStartGasBoxLeakCheck(object[] param)
  542. {
  543. return _gasBoxLeakCheckRoutine.Start() == RState.Running;
  544. }
  545. private bool FnGasBoxLeakCheckTimeout(object[] param)
  546. {
  547. RState ret = _gasBoxLeakCheckRoutine.Monitor();
  548. if (ret == RState.Failed || ret == RState.Timeout)
  549. {
  550. PostMsg(MSG.Error);
  551. return false;
  552. }
  553. return ret == RState.End;
  554. }
  555. private bool FnAbortGasBoxLeakCheck(object[] param)
  556. {
  557. _gasBoxLeakCheckRoutine.Abort();
  558. return true;
  559. }
  560. private bool FnStartLLPlace(object[] param)
  561. {
  562. return _llPlaceRoutine.Start() == RState.Running;
  563. }
  564. private bool FnLLPlaceTimeout(object[] param)
  565. {
  566. RState ret = _llPlaceRoutine.Monitor();
  567. if (ret == RState.Failed || ret == RState.Timeout)
  568. {
  569. PostMsg(MSG.Error);
  570. return false;
  571. }
  572. return ret == RState.End;
  573. }
  574. private bool FnAbortLLPlace(object[] param)
  575. {
  576. _llPlaceRoutine.Abort();
  577. return true;
  578. }
  579. private bool FnStartLLPick(object[] param)
  580. {
  581. return _llPickRoutine.Start() == RState.Running;
  582. }
  583. private bool FnLLPickTimeout(object[] param)
  584. {
  585. RState ret = _llPickRoutine.Monitor();
  586. if (ret == RState.Failed || ret == RState.Timeout)
  587. {
  588. PostMsg(MSG.Error);
  589. return false;
  590. }
  591. return ret == RState.End;
  592. }
  593. private bool FnAbortLLPick(object[] param)
  594. {
  595. _llPickRoutine.Abort();
  596. return true;
  597. }
  598. private bool FnRunRecipe(object[] param)
  599. {
  600. return _processRoutine.Start(param) == RState.Running;
  601. }
  602. private bool FnProcessTimeout(object[] param)
  603. {
  604. RState ret = _processRoutine.Monitor();
  605. if (ret == RState.Failed || ret == RState.Timeout)
  606. {
  607. PostMsg(MSG.Error);
  608. return false;
  609. }
  610. return ret == RState.End;
  611. }
  612. private bool FnAbortProcess(object[] param)
  613. {
  614. _processRoutine.Abort();
  615. return true;
  616. }
  617. private void _debugRoutine()
  618. {
  619. int flag = 0;
  620. // Test Home routine
  621. if (flag == 1)
  622. {
  623. PostMsg(MSG.Home);
  624. }
  625. else if (flag == 2)
  626. {
  627. PostMsg(MSG.Vent);
  628. }
  629. else if (flag == 3)
  630. {
  631. PostMsg(MSG.Pump);
  632. }
  633. else if(flag == 4)
  634. {
  635. PostMsg(MSG.PumpLoadLock);
  636. }
  637. else if(flag == 5)
  638. {
  639. PostMsg(MSG.VentLoadLock);
  640. }
  641. else if(flag == 6)
  642. {
  643. PostMsg(MSG.PurgeLoadLock);
  644. }
  645. else if(flag == 7)
  646. {
  647. PostMsg(MSG.LaunchPump);
  648. }
  649. else if(flag == 8)
  650. {
  651. PostMsg(MSG.LaunchTurboPump);
  652. }
  653. else if(flag == 9)
  654. {
  655. PostMsg(MSG.LoadLockLeakCheck);
  656. }
  657. else if(flag == 10)
  658. {
  659. PostMsg(MSG.CyclePurge);
  660. }
  661. else if(flag == 11)
  662. {
  663. PostMsg(MSG.GasLinePurge);
  664. }
  665. else if(flag == 12)
  666. {
  667. PostMsg(MSG.LeakCheck);
  668. }
  669. else if(flag == 13)
  670. {
  671. PostMsg(MSG.GasLeakCheck);
  672. }
  673. else if(flag == 14)
  674. {
  675. PostMsg(MSG.LLPlace);
  676. }
  677. else if(flag == 15)
  678. {
  679. PostMsg(MSG.LLPick);
  680. }
  681. else if(flag == 16)
  682. {
  683. PostMsg(MSG.RunRecipe, "7777");
  684. }
  685. }
  686. }
  687. }