JetEfem.cs 32 KB

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  1. using System;
  2. using System.Collections.Generic;
  3. using System.Linq;
  4. using System.Text;
  5. using System.Threading.Tasks;
  6. using System.Collections;
  7. using Venus_Core;
  8. using Venus_RT.Modules;
  9. using MECF.Framework.Common.CommonData;
  10. using MECF.Framework.Common.Equipment;
  11. using MECF.Framework.Common.SubstrateTrackings;
  12. using Aitex.Sorter.Common;
  13. using Aitex.Core.Common;
  14. using Aitex.Core.RT.SCCore;
  15. using Aitex.Core.RT.Log;
  16. using Aitex.Core.Util;
  17. using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robot;
  18. using Venus_RT.Devices.YASKAWA;
  19. namespace Venus_RT.Devices.EFEM
  20. {
  21. class JetEfem : EfemBase
  22. {
  23. private RState _status;
  24. private bool _IsHomed;
  25. private string _waferPresence;
  26. private bool _bIsUnloadClamp;
  27. private RobotMoveInfo _robotMoveInfo = new RobotMoveInfo();
  28. private readonly Loadport[] _LPMs = new Loadport[3];
  29. private readonly SignalTower _signalT = new SignalTower();
  30. private readonly AsyncSocket _socket;
  31. private EfemMessage _currentMsg;
  32. private EfemMessage _backroundMsg;
  33. private EfemMessage _revMsg;
  34. private bool _LiftIsUp = false;
  35. private bool _LiftIsDown = false;
  36. public override RState Status { get { return _status; } }
  37. public override bool IsHomed { get { return _IsHomed; } }
  38. public override RobotMoveInfo TMRobotMoveInfo { get { return _robotMoveInfo; } }
  39. public override ILoadport this[ModuleName mod]
  40. {
  41. get
  42. {
  43. if (!ModuleHelper.IsLoadPort(mod))
  44. throw new ApplicationException($"{mod} is NOT Loadport");
  45. return _LPMs[mod - ModuleName.LP1];
  46. }
  47. }
  48. public override bool LiftIsUp { get { return _LiftIsUp; } }
  49. public override bool LiftIsDown { get { return _LiftIsDown; } }
  50. public JetEfem()
  51. {
  52. _socket = new AsyncSocket("");
  53. _socket.Connect(SC.GetStringValue($"EFEM.IPAddress"));
  54. _socket.OnDataChanged += OnReceiveMessage;
  55. _socket.OnErrorHappened += OnErrorHappen;
  56. _status = RState.Init;
  57. _IsHomed = false;
  58. _LPMs[0] = new Loadport(ModuleName.LP1, this);
  59. _LPMs[1] = new Loadport(ModuleName.LP2, this);
  60. _LPMs[2] = new Loadport(ModuleName.LP3, this);
  61. CarrierManager.Instance.SubscribeLocation(ModuleName.LP1.ToString(), 1);
  62. CarrierManager.Instance.SubscribeLocation(ModuleName.LP2.ToString(), 1);
  63. CarrierManager.Instance.SubscribeLocation(ModuleName.LP3.ToString(), 1);
  64. Action<ModuleName, int> _subscribeLoc = (ModuleName module, int waferCount) => {
  65. if (ModuleHelper.IsInstalled(module))
  66. {
  67. WaferManager.Instance.SubscribeLocation(module, waferCount);
  68. }
  69. };
  70. WaferManager.Instance.SubscribeLocation(ModuleName.EfemRobot, 2);
  71. WaferManager.Instance.SubscribeLocation(ModuleName.Aligner1, 1);
  72. // _subscribeLoc(ModuleName.EfemRobot, 2);
  73. //_subscribeLoc(ModuleName.Aligner1, 1);
  74. _subscribeLoc(ModuleName.Aligner2, 1);
  75. _subscribeLoc(ModuleName.Cooling1, 1);
  76. _subscribeLoc(ModuleName.Cooling2, 1);
  77. _subscribeLoc(ModuleName.LP1, SC.GetValue<int>("EFEM.LoadPort.SlotNumber"));
  78. _subscribeLoc(ModuleName.LP2, SC.GetValue<int>("EFEM.LoadPort.SlotNumber"));
  79. _subscribeLoc(ModuleName.LP3, SC.GetValue<int>("EFEM.LoadPort.SlotNumber"));
  80. }
  81. public override void Monitor()
  82. {
  83. }
  84. public override void Terminate()
  85. {
  86. }
  87. public override void Reset()
  88. {
  89. _status = RState.End;
  90. }
  91. public override void SetOnline(bool online)
  92. {
  93. }
  94. public override void SetOnline(ModuleName mod, bool online)
  95. {
  96. }
  97. public override void SetBusy(ModuleName mod, bool online)
  98. {
  99. _status = RState.Running;
  100. }
  101. public override bool HomeAll()
  102. {
  103. _currentMsg = new EfemMessage
  104. {
  105. Port = ModuleName.EFEM,
  106. Operation = EfemOperation.Home,
  107. Head = EfemMessage.MsgHead.MOV,
  108. Parameters = new List<string> { Constant.ModuleString[ModuleName.EFEM] }
  109. };
  110. _status = RState.Running;
  111. string data = _currentMsg.ToString();
  112. return _socket.Write(data);
  113. }
  114. public override bool Home(ModuleName mod)
  115. {
  116. if(ModuleHelper.IsLoadPort(mod))
  117. {
  118. _backroundMsg = new EfemMessage
  119. {
  120. Port = mod,
  121. Operation = EfemOperation.Home,
  122. Head = EfemMessage.MsgHead.MOV,
  123. Parameters = new List<string> { Constant.ModuleString[mod] }
  124. };
  125. return _socket.Write(_backroundMsg.ToString());
  126. }
  127. else
  128. {
  129. _currentMsg = new EfemMessage
  130. {
  131. Operation = EfemOperation.Home,
  132. Head = EfemMessage.MsgHead.MOV,
  133. Parameters = new List<string> { Constant.ModuleString[mod] }
  134. };
  135. _status = RState.Running;
  136. return _socket.Write(_currentMsg.ToString());
  137. }
  138. }
  139. public override bool OriginalSearch(ModuleName mod)
  140. {
  141. if (!CheckEfemStatus())
  142. return false;
  143. _currentMsg = new EfemMessage
  144. {
  145. Operation = EfemOperation.Orgsh,
  146. Head = EfemMessage.MsgHead.MOV,
  147. Parameters = new List<string>
  148. {
  149. Constant.ModuleString[mod]
  150. }
  151. };
  152. _status = RState.Running;
  153. return _socket.Write(_currentMsg.ToString());
  154. }
  155. public override bool CheckWaferPresence()
  156. {
  157. if (!CheckEfemStatus())
  158. return false;
  159. _currentMsg = new EfemMessage
  160. {
  161. Operation = EfemOperation.StateTrack,
  162. Head = EfemMessage.MsgHead.GET,
  163. Parameters = new List<string> { "TRACK" }
  164. };
  165. _waferPresence = string.Empty;
  166. _status = RState.Running;
  167. return _socket.Write(_currentMsg.ToString());
  168. }
  169. public override string GetWaferPresence()
  170. {
  171. return _waferPresence;
  172. }
  173. public override bool Halt()
  174. {
  175. _currentMsg = new EfemMessage
  176. {
  177. Operation = EfemOperation.EmsStop,
  178. Head = EfemMessage.MsgHead.MOV,
  179. };
  180. _status = RState.Running;
  181. return _socket.Write(_currentMsg.ToString());
  182. }
  183. public override bool ClearError()
  184. {
  185. _backroundMsg = new EfemMessage
  186. {
  187. Operation = EfemOperation.ClearError,
  188. Head = EfemMessage.MsgHead.SET,
  189. Parameters = new List<string> { "CLEAR" }
  190. };
  191. _status = RState.Running;
  192. return _socket.Write(_backroundMsg.ToString());
  193. }
  194. public override bool PickExtend(ModuleName chamber, int slot, Hand hand)
  195. {
  196. if (!CheckEfemStatus())
  197. return false;
  198. _currentMsg = new EfemMessage
  199. {
  200. Operation = EfemOperation.Extend,
  201. Head = EfemMessage.MsgHead.MOV,
  202. Parameters = new List<string>
  203. {
  204. chamber.ToHWString(),
  205. ExtendPos.GB.ToString(),
  206. Constant.ArmString[hand],
  207. }
  208. };
  209. _status = RState.Running;
  210. return _socket.Write(_currentMsg.ToString());
  211. }
  212. public override bool PickRetract(ModuleName chamber, int slot, Hand hand)
  213. {
  214. if (!CheckEfemStatus())
  215. return false;
  216. _currentMsg = new EfemMessage
  217. {
  218. Operation = EfemOperation.Extend,
  219. Head = EfemMessage.MsgHead.MOV,
  220. Parameters = new List<string>
  221. {
  222. chamber.ToHWString(),
  223. ExtendPos.G4.ToString(),
  224. Constant.ArmString[hand],
  225. }
  226. };
  227. _status = RState.Running;
  228. return _socket.Write(_currentMsg.ToString());
  229. }
  230. public override bool PlaceExtend(ModuleName chamber, int slot, Hand hand)
  231. {
  232. if (!CheckEfemStatus())
  233. return false;
  234. _currentMsg = new EfemMessage
  235. {
  236. Operation = EfemOperation.Extend,
  237. Head = EfemMessage.MsgHead.MOV,
  238. Parameters = new List<string>
  239. {
  240. chamber.ToHWString(),
  241. ExtendPos.PB.ToString(),
  242. Constant.ArmString[hand],
  243. }
  244. };
  245. _status = RState.Running;
  246. return _socket.Write(_currentMsg.ToString());
  247. }
  248. public override bool PlaceRetract(ModuleName chamber, int slot, Hand hand)
  249. {
  250. if (!CheckEfemStatus())
  251. return false;
  252. _currentMsg = new EfemMessage
  253. {
  254. Operation = EfemOperation.Extend,
  255. Head = EfemMessage.MsgHead.MOV,
  256. Parameters = new List<string>
  257. {
  258. chamber.ToHWString(),
  259. ExtendPos.P4.ToString(),
  260. Constant.ArmString[hand],
  261. }
  262. };
  263. _status = RState.Running;
  264. return _socket.Write(_currentMsg.ToString());
  265. }
  266. public override bool Pick(ModuleName station, int slot, Hand hand)
  267. {
  268. if (!CheckEfemStatus())
  269. return false;
  270. Position SrcPos = new Position { Module= station,Slot= (byte)slot };
  271. _currentMsg = new EfemMessage
  272. {
  273. Operation = EfemOperation.Pick,
  274. Head = EfemMessage.MsgHead.MOV,
  275. Parameters = new List<string>
  276. {
  277. SrcPos.ToHWString(),
  278. Constant.ArmString[hand],
  279. //WaferSize.WS12.ToString()
  280. }
  281. };
  282. _status = RState.Running;
  283. return _socket.Write(_currentMsg.ToString());
  284. }
  285. public override bool Place(ModuleName station, int slot, Hand hand)
  286. {
  287. if (!CheckEfemStatus())
  288. return false;
  289. Position DestPos = new Position { Module = station, Slot = (byte)slot };
  290. _currentMsg = new EfemMessage
  291. {
  292. Operation = EfemOperation.Place,
  293. Head = EfemMessage.MsgHead.MOV,
  294. Parameters = new List<string>
  295. {
  296. DestPos.ToHWString(),
  297. Constant.ArmString[hand],
  298. //WaferSize.WS12.ToString()
  299. }
  300. };
  301. _status = RState.Running;
  302. return _socket.Write(_currentMsg.ToString());
  303. }
  304. public override bool Goto(ModuleName station, Hand hand)
  305. {
  306. if (!CheckEfemStatus())
  307. return false;
  308. Position DestPos = new Position { Module = station, Slot = (byte)0 };
  309. _currentMsg = new EfemMessage
  310. {
  311. Operation = EfemOperation.Goto,
  312. Head = EfemMessage.MsgHead.MOV,
  313. Parameters = new List<string>
  314. {
  315. DestPos.ToHWString(),
  316. Constant.ArmString[hand],
  317. WaferSize.WS12.ToString()
  318. }
  319. };
  320. _status = RState.Running;
  321. return _socket.Write(_currentMsg.ToString());
  322. }
  323. public override bool Grip(Hand blade, bool isGrip)
  324. {
  325. if (!CheckEfemStatus())
  326. return false;
  327. _currentMsg = new EfemMessage
  328. {
  329. Operation = EfemOperation.Grip,
  330. Head = EfemMessage.MsgHead.SET,
  331. Parameters = new List<string>
  332. {
  333. isGrip ? "ON":"OFF",
  334. Constant.ArmString[blade]
  335. }
  336. };
  337. _status = RState.Running;
  338. return _socket.Write(_currentMsg.ToString());
  339. }
  340. public override bool Map(ModuleName mod)
  341. {
  342. if (!CheckEfemStatus())
  343. return false;
  344. _currentMsg = new EfemMessage
  345. {
  346. Operation = EfemOperation.Map,
  347. Head = EfemMessage.MsgHead.MOV,
  348. Parameters = new List<string> { Constant.ModuleString[mod] }
  349. };
  350. _status = RState.Running;
  351. return _socket.Write(_currentMsg.ToString());
  352. }
  353. public override bool SetPinUp(ModuleName mod)
  354. {
  355. if (!CheckEfemStatus())
  356. return false;
  357. _currentMsg = new EfemMessage
  358. {
  359. Operation = EfemOperation.Lift,
  360. Head = EfemMessage.MsgHead.MOV,
  361. Parameters = new List<string> { Constant.ModuleString[mod], "UP" }
  362. };
  363. _status = RState.Running;
  364. return _socket.Write(_currentMsg.ToString());
  365. }
  366. public override bool SetPinDown(ModuleName mod)
  367. {
  368. if (!CheckEfemStatus())
  369. return false;
  370. _currentMsg = new EfemMessage
  371. {
  372. Operation = EfemOperation.Lift,
  373. Head = EfemMessage.MsgHead.MOV,
  374. Parameters = new List<string> { Constant.ModuleString[mod], "DOWN" }
  375. };
  376. _status = RState.Running;
  377. return _socket.Write(_currentMsg.ToString());
  378. }
  379. public override bool Align(ModuleName mod, double angle, float delayTime, WaferSize size)
  380. {
  381. if (!CheckEfemStatus())
  382. return false;
  383. _currentMsg = new EfemMessage
  384. {
  385. Operation = EfemOperation.Align,
  386. Head = EfemMessage.MsgHead.MOV,
  387. Parameters = new List<string> { $"A{angle.ToString("000.00")}" }
  388. };
  389. _status = RState.Running;
  390. return _socket.Write(_currentMsg.ToString());
  391. }
  392. public override bool SetLamp(LightType light, LightStatus status)
  393. {
  394. _backroundMsg = new EfemMessage
  395. {
  396. Operation = EfemOperation.Light,
  397. Head = EfemMessage.MsgHead.SET,
  398. Parameters = new List<string> { Constant.STOWER, light.ToString(), status.ToString() }
  399. };
  400. return _socket.Write(_backroundMsg.ToString());
  401. }
  402. public override bool Load(ModuleName mod)
  403. {
  404. _backroundMsg = new EfemMessage
  405. {
  406. Operation = EfemOperation.Load,
  407. Head = EfemMessage.MsgHead.MOV,
  408. Parameters = new List<string> { Constant.ModuleString[mod] }
  409. };
  410. return _socket.Write(_backroundMsg.ToString());
  411. }
  412. public override bool Unload(ModuleName mod)
  413. {
  414. _backroundMsg = new EfemMessage
  415. {
  416. Operation = EfemOperation.Unload,
  417. Head = EfemMessage.MsgHead.MOV,
  418. Parameters = new List<string> { Constant.ModuleString[mod] }
  419. };
  420. return _socket.Write(_backroundMsg.ToString());
  421. }
  422. public override bool ReadCarrierId(ModuleName mod)
  423. {
  424. _backroundMsg = new EfemMessage
  425. {
  426. Operation = EfemOperation.CarrierId,
  427. Head = EfemMessage.MsgHead.GET,
  428. Parameters = new List<string> { Constant.ModuleString[mod] }
  429. };
  430. return _socket.Write(_backroundMsg.ToString());
  431. }
  432. public override bool WriteCarrierId(ModuleName mod, string id)
  433. {
  434. _backroundMsg = new EfemMessage
  435. {
  436. Operation = EfemOperation.CarrierId,
  437. Head = EfemMessage.MsgHead.SET,
  438. Parameters = new List<string> { Constant.ModuleString[mod], id }
  439. };
  440. return _socket.Write(_backroundMsg.ToString());
  441. }
  442. public override bool ReadTagData(ModuleName mod)
  443. {
  444. _backroundMsg = new EfemMessage
  445. {
  446. Operation = EfemOperation.CarrierId,
  447. Head = EfemMessage.MsgHead.GET,
  448. Parameters = new List<string> { Constant.ModuleString[mod] }
  449. };
  450. return _socket.Write(_backroundMsg.ToString());
  451. }
  452. public override bool WriteTagData(ModuleName mod, string tagData)
  453. {
  454. _backroundMsg = new EfemMessage
  455. {
  456. Operation = EfemOperation.CarrierId,
  457. Head = EfemMessage.MsgHead.SET,
  458. Parameters = new List<string> { Constant.ModuleString[mod], tagData }
  459. };
  460. return _socket.Write(_backroundMsg.ToString());
  461. }
  462. public override bool Dock(ModuleName mod)
  463. {
  464. _backroundMsg = new EfemMessage
  465. {
  466. Operation = EfemOperation.Dock,
  467. Head = EfemMessage.MsgHead.MOV,
  468. Parameters = new List<string> { Constant.ModuleString[mod]}
  469. };
  470. return _socket.Write(_backroundMsg.ToString());
  471. }
  472. public override bool Undock(ModuleName mod)
  473. {
  474. _backroundMsg = new EfemMessage
  475. {
  476. Operation = EfemOperation.Undock,
  477. Head = EfemMessage.MsgHead.MOV,
  478. Parameters = new List<string> { Constant.ModuleString[mod]}
  479. };
  480. return _socket.Write(_backroundMsg.ToString());
  481. }
  482. public override bool Clamp(ModuleName mod, bool isUnloadClamp)
  483. {
  484. _backroundMsg = new EfemMessage
  485. {
  486. Operation = EfemOperation.Clamp,
  487. Head = EfemMessage.MsgHead.MOV,
  488. Parameters = new List<string> { Constant.ModuleString[mod] }
  489. };
  490. _bIsUnloadClamp = isUnloadClamp;
  491. return _socket.Write(_backroundMsg.ToString());
  492. }
  493. public override bool Unclamp(ModuleName mod)
  494. {
  495. _backroundMsg = new EfemMessage
  496. {
  497. Operation = EfemOperation.Unclamp,
  498. Head = EfemMessage.MsgHead.MOV,
  499. Parameters = new List<string> { Constant.ModuleString[mod] }
  500. };
  501. return _socket.Write(_backroundMsg.ToString());
  502. }
  503. public override bool SetThickness(ModuleName mod, string thickness)
  504. {
  505. _backroundMsg = new EfemMessage
  506. {
  507. Operation = EfemOperation.SetThickness,
  508. Head = EfemMessage.MsgHead.SET,
  509. Parameters = new List<string> { Constant.ModuleString[mod], thickness.ToUpper() }
  510. };
  511. return _socket.Write(_backroundMsg.ToString());
  512. }
  513. public override void SetRobotMovingInfo(RobotAction action, Hand hand, ModuleName target)
  514. {
  515. }
  516. private void OnReceiveMessage(string RevMsg)
  517. {
  518. string[] msgs = RevMsg.Split('\r');
  519. foreach (var msg in msgs)
  520. {
  521. if (string.IsNullOrWhiteSpace(msg)) continue;
  522. EfemMessage rec_msg = msg.ToMessage();
  523. switch (rec_msg.Head)
  524. {
  525. case EfemMessage.MsgHead.ACK:
  526. if (msg.Contains("ERROR"))
  527. {
  528. _status = RState.End;
  529. _revMsg = rec_msg;
  530. }
  531. break;
  532. case EfemMessage.MsgHead.INF:
  533. // 收到INF之后发送ACK确认
  534. string strACK = rec_msg.RawString.Replace("INF", "ACK");
  535. SendBack(strACK);
  536. EfemMessage ack_msg = strACK.ToMessage();
  537. ack_msg.Direct = MsgDirection.To;
  538. _revMsg = rec_msg;
  539. OnCommandUpdated(rec_msg);
  540. break;
  541. case EfemMessage.MsgHead.EVT:
  542. OnEventUpdated(new EfemEventArgs
  543. {
  544. EvtStr = rec_msg.ToParamString(),
  545. Module = rec_msg.Port,
  546. CommandType = rec_msg.Operation,
  547. DataList = rec_msg.Data
  548. });
  549. break;
  550. case EfemMessage.MsgHead.NAK:
  551. case EfemMessage.MsgHead.CAN:
  552. case EfemMessage.MsgHead.ABS:
  553. OnErrorOccurred(rec_msg);
  554. break;
  555. }
  556. }
  557. }
  558. private void OnErrorHappen(ErrorEventArgs args)
  559. {
  560. _status = RState.Failed;
  561. Singleton<RouteManager>.Instance.EFEM.PostMsg(EfemEntity.MSG.Error);
  562. }
  563. private void OnErrorOccurred(EfemMessage message)
  564. {
  565. string description = string.Empty;
  566. switch(message.Head)
  567. {
  568. case EfemMessage.MsgHead.NAK:
  569. description = Constant.FactorString[message.Factor];
  570. break;
  571. case EfemMessage.MsgHead.CAN:
  572. description = Constant.FactorString.ContainsKey(message.Factor) ? Constant.FactorString[message.Factor] : message.Factor;
  573. break;
  574. case EfemMessage.MsgHead.ABS:
  575. description = $"{message.Data[0]}, {message.Data[1]}";
  576. break;
  577. }
  578. _status = RState.Failed;
  579. LOG.Write(eEvent.ERR_EFEM_COMMON_FAILED, ModuleName.EFEM, $"{description}, [{message.Data[0]}], [{message.Factor}]");
  580. }
  581. private void OnEventUpdated(EfemEventArgs eArg)
  582. {
  583. switch (eArg.CommandType)
  584. {
  585. case EfemOperation.SigStatus:
  586. // EVT:SIGSTAT/Parameter/DATA1/DATA2;
  587. string sParam = eArg.DataList[0]; // "SYSTEM" or "Pn"
  588. // DATA1 & DATA2
  589. int nData1 = Convert.ToInt32(eArg.DataList[1], 16);
  590. int nData2 = Convert.ToInt32(eArg.DataList[2], 16);
  591. BitArray baData1 = new BitArray(new int[] { nData1 });
  592. BitArray baData2 = new BitArray(new int[] { nData2 });
  593. if (0 == string.Compare(sParam, Constant.SYS, true))
  594. {
  595. // EVT:SIGSTAT/System/00000000/00000004;
  596. // DATA1
  597. // Post warning and alarm
  598. if (!baData1[0]) // Bit[0] ON=Normal, OFF=Abnormal
  599. {
  600. //EV.Notify(EFEMVacuumPressureError);
  601. LOG.Write(eEvent.ERR_EFEM_COMMON_FAILED, ModuleName.EFEM, "EFEM System vacuum source pressure low");
  602. Singleton<RouteManager>.Instance.EFEM.PostMsg(EfemEntity.MSG.Error);
  603. }
  604. if (!baData1[1]) // Bit[1] ON=Normal, OFF=Abnormal
  605. {
  606. //EV.Notify(EFEMIonizerAlarm);
  607. LOG.Write(eEvent.ERR_EFEM_COMMON_FAILED, ModuleName.EFEM, "EFEM Ionizer compressed air error");
  608. Singleton<RouteManager>.Instance.EFEM.PostMsg(EfemEntity.MSG.Error);
  609. }
  610. if (!baData1[2]) // Bit[2] ON=Normal, OFF=Abnormal
  611. {
  612. //EV.Notify(EFEMCDAError);
  613. LOG.Write(eEvent.ERR_EFEM_COMMON_FAILED, ModuleName.EFEM, "EFEM System compressed air pressure low");
  614. Singleton<RouteManager>.Instance.EFEM.PostMsg(EfemEntity.MSG.Error);
  615. }
  616. if (!baData1[4]) // Bit[4] ON=Normal, OFF=Abnormal
  617. {
  618. //EV.Notify(EFEMFlowGaugeSensorError);
  619. LOG.Write(eEvent.ERR_EFEM_COMMON_FAILED, ModuleName.EFEM, "EFEM Flow gauge sensor error");
  620. Singleton<RouteManager>.Instance.EFEM.PostMsg(EfemEntity.MSG.Error);
  621. }
  622. if (!baData1[5]) // Bit[5] ON=Normal, OFF=Abnormal
  623. {
  624. //EV.Notify(EFEMLeakageAlarm);
  625. LOG.Write(eEvent.ERR_EFEM_COMMON_FAILED, ModuleName.EFEM, "EFEM Leakage alarm");
  626. Singleton<RouteManager>.Instance.EFEM.PostMsg(EfemEntity.MSG.Error);
  627. }
  628. if (!baData1[10]) // Bit[10] ON=Normal, OFF=Abnormal
  629. {
  630. //EV.Notify(EFEMIonizerAlarm);
  631. LOG.Write(eEvent.ERR_EFEM_COMMON_FAILED, ModuleName.EFEM, "EFEM Ionizer alarm");
  632. Singleton<RouteManager>.Instance.EFEM.PostMsg(EfemEntity.MSG.Error);
  633. }
  634. if (!baData1[11]) // Bit[11] ON=Normal, OFF=Abnormal
  635. {
  636. //EV.Notify(EFEMFFUAlarm);
  637. LOG.Write(eEvent.ERR_EFEM_COMMON_FAILED, ModuleName.EFEM, "FFU alarm");
  638. Singleton<RouteManager>.Instance.EFEM.PostMsg(EfemEntity.MSG.Error);
  639. }
  640. if (!baData1[13]) // Bit[13] ON=RUN, OFF=Maintain
  641. {
  642. //EV.Notify(EFEMOffline);
  643. LOG.Write(eEvent.ERR_EFEM_COMMON_FAILED, ModuleName.EFEM, "EFEM switch to Maintain mode, HomeAll to recover");
  644. }
  645. // DATA2
  646. _signalT.ChangeLightStatus(LightType.RED, baData2[0] ? LightStatus.ON : baData2[5] ? LightStatus.BLINK : LightStatus.OFF);
  647. _signalT.ChangeLightStatus(LightType.GREEN, baData2[1] ? LightStatus.ON : baData2[6] ? LightStatus.BLINK : LightStatus.OFF);
  648. _signalT.ChangeLightStatus(LightType.YELLOW, baData2[2] ? LightStatus.ON : baData2[7] ? LightStatus.BLINK : LightStatus.OFF);
  649. _signalT.ChangeLightStatus(LightType.BLUE, baData2[3] ? LightStatus.ON : baData2[8] ? LightStatus.BLINK : LightStatus.OFF);
  650. _signalT.ChangeLightStatus(LightType.WHITE, baData2[4] ? LightStatus.ON : baData2[9] ? LightStatus.BLINK : LightStatus.OFF);
  651. _signalT.ChangeLightStatus(LightType.BUZZER1, baData2[10] ? LightStatus.ON : LightStatus.OFF);
  652. /* EFEM 程序中目前没有实现
  653. _RobotErr.CLK = baData2[27]; // bit 27
  654. bool bArmNotExtendLLA = baData2[30]; // bit 30
  655. bool bArmNotExtendLLB = baData2[31]; // bit 31
  656. */
  657. } // system event
  658. else
  659. {
  660. _LPMs[eArg.Module - ModuleName.LP1].HandleEvent(eArg);
  661. } // FOUP EVENT
  662. break;
  663. case EfemOperation.GetWaferInfo:
  664. _LPMs[eArg.Module - ModuleName.LP1].HandleEvent(eArg);
  665. break;
  666. default:
  667. break;
  668. }
  669. }
  670. private void OnCommandUpdated(EfemMessage message)
  671. {
  672. if(message.Operation != EfemOperation.ClearError && message.Operation != EfemOperation.Ready && _currentMsg.Operation != message.Operation && _backroundMsg.Operation != message.Operation)
  673. {
  674. LOG.Write(eEvent.ERR_EFEM_COMMON_FAILED, ModuleName.EfemRobot, $"OnCommandUpdated() unexpected return: {message.Operation}, backround: {_backroundMsg.Operation}");
  675. return;
  676. }
  677. switch(message.Operation)
  678. {
  679. case EfemOperation.ClearError:
  680. case EfemOperation.Align:
  681. case EfemOperation.Map:
  682. case EfemOperation.Pick:
  683. case EfemOperation.Place:
  684. case EfemOperation.Extend:
  685. case EfemOperation.Goto:
  686. case EfemOperation.Orgsh:
  687. case EfemOperation.EmsStop:
  688. _status = RState.End;
  689. break;
  690. case EfemOperation.StateTrack:
  691. {
  692. _waferPresence = message.Data.Count >= 1 ? message.Data.First() : string.Empty;
  693. _IsHomed = true;
  694. _status = RState.End;
  695. }
  696. break;
  697. case EfemOperation.Home:
  698. {
  699. if(_currentMsg.Port == ModuleName.EFEM)
  700. {
  701. _LPMs[0].OnHomed();
  702. _LPMs[1].OnHomed();
  703. }
  704. else if(ModuleHelper.IsLoadPort(_currentMsg.Port))
  705. {
  706. _LPMs[_currentMsg.Port - ModuleName.LP1].OnHomed();
  707. }
  708. _status = RState.End;
  709. }
  710. break;
  711. case EfemOperation.Load:
  712. {
  713. _LPMs[message.Port - ModuleName.LP1].OnLoaded();
  714. }
  715. break;
  716. case EfemOperation.Unload:
  717. {
  718. _LPMs[message.Port - ModuleName.LP1].OnUnloaded();
  719. }
  720. break;
  721. case EfemOperation.CarrierId:
  722. {
  723. if(message.Head == EfemMessage.MsgHead.GET)
  724. {
  725. _LPMs[message.Port - ModuleName.LP1].OnCarrierIDRead(message.Data.First());
  726. }
  727. else
  728. {
  729. _LPMs[message.Port - ModuleName.LP1].OnCarrierIDWrite(message.Data.First());
  730. }
  731. }
  732. break;
  733. case EfemOperation.Clamp:
  734. {
  735. _LPMs[message.Port - ModuleName.LP1].OnClamped(_bIsUnloadClamp);
  736. }
  737. break;
  738. case EfemOperation.Unclamp:
  739. {
  740. _LPMs[message.Port - ModuleName.LP1].OnUnclamped();
  741. }
  742. break;
  743. case EfemOperation.Grip:
  744. {
  745. if (_currentMsg.Parameters[1] == "ARM2")
  746. {
  747. GripStateBlade1 = _currentMsg.Parameters[0];
  748. }
  749. else
  750. {
  751. GripStateBlade2 = _currentMsg.Parameters[0];
  752. }
  753. }
  754. break;
  755. case EfemOperation.Ready:
  756. {
  757. Singleton<RouteManager>.Instance.EFEM.PostMsg(EfemEntity.MSG.CommReady);
  758. }
  759. break;
  760. case EfemOperation.Lift:
  761. {
  762. if (_currentMsg.Parameters[1] == "UP")
  763. {
  764. _LiftIsUp = true;
  765. _LiftIsDown = false;
  766. _status = RState.End;
  767. }
  768. else if (_currentMsg.Parameters[1] == "DOWN")
  769. {
  770. _LiftIsUp = false;
  771. _LiftIsDown = true;
  772. _status = RState.End;
  773. }
  774. }
  775. break;
  776. }
  777. }
  778. async void SendBack(string data)
  779. {
  780. await Task.Run(()=> _socket.Write(data + '\r'));
  781. }
  782. }
  783. }