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VenusEntity
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c1ae6b6ea1
1.Fix Chamber DE recipe process bugs
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vor 11 Monaten |
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MFHomeRoutine.cs
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ed38ed5c95
1.check load function bugs fix
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vor 1 Jahr |
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MFLeakCheckRoutine.cs
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136a0d3727
Add VCE OpenDoor while Dash Wafer Error && fix bug in SE Cycle && Add PickOffset while Pick From PA && Add Check ATM by Pressure && Add PM ChamberPressure from PendulumValve.
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vor 1 Jahr |
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MFPMExtendRoutine.cs
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03063bae6a
Enhance the routine framework.
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vor 1 Jahr |
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MFPMPickRoutine.cs
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464c53cd94
1.Datalog添加高温Haeter开关显示
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vor 11 Monaten |
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MFPMPlaceRoutine.cs
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8f537a79cb
Pause/Resume function and enhance duplicated function while transfer wafer timeout.
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vor 1 Jahr |
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MFPMRetractRoutine.cs
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03063bae6a
Enhance the routine framework.
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vor 1 Jahr |
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MFPMSwapRoutine.cs
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464c53cd94
1.Datalog添加高温Haeter开关显示
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vor 11 Monaten |
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MFPickRoutine.cs
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464c53cd94
1.Datalog添加高温Haeter开关显示
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vor 11 Monaten |
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MFPlaceRoutine.cs
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8f537a79cb
Pause/Resume function and enhance duplicated function while transfer wafer timeout.
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vor 1 Jahr |
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MFPumpRoutine.cs
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608cf43d67
1.做工艺前pump down 根据底压确定是否执行
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vor 11 Monaten |
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MFPurgeRoutine.cs
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03063bae6a
Enhance the routine framework.
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vor 1 Jahr |
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MFSwapRoutine.cs
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8f537a79cb
Pause/Resume function and enhance duplicated function while transfer wafer timeout.
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vor 1 Jahr |
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MFVentRoutine.cs
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ecd991d2f4
1.修复kepler 气缸开关信号只读on或者off bug
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vor 11 Monaten |
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TMEntity.cs
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d33079596b
1.优化新版跑片动画
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vor 11 Monaten |
hecl
c1ae6b6ea1
1.Fix Chamber DE recipe process bugs