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HongHuDETM.cs
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0bea20360b
add LeakCheckRoutine in DE,VCE && add online for TM,VCE && fix bug in PM-PartialPressure && add LP in VCE && add sensor in VCE from TM
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11 months ago |
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HongHuTM.cs
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c1ae6b6ea1
1.Fix Chamber DE recipe process bugs
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11 months ago |
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HongHuVR.cs
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2e70549fc8
fix bug in StationNumber(Aligner1)
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11 months ago |
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ITransferRobot.cs
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c332b95d39
venus se checkload, recipe save as function bugs fix, ui bugs fix, transfer auto open vce door ,abort job function
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1 year ago |
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JetTM.cs
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ecd991d2f4
1.修复kepler 气缸开关信号只读on或者off bug
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11 months ago |
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SIASUNRobot.cs
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e00ff4f30d
1.高温Heater position1-position5加上动画
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1 year ago |
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TMBase.cs
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0bea20360b
add LeakCheckRoutine in DE,VCE && add online for TM,VCE && fix bug in PM-PartialPressure && add LP in VCE && add sensor in VCE from TM
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11 months ago |
hecl
c1ae6b6ea1
1.Fix Chamber DE recipe process bugs