Kepler-Release/Venus/Venus_RT/Modules/AutoCycle.cs

using System;
using System.Collections.Generic;
using System.Linq;

using Aitex.Core.RT.Routine;
using Aitex.Core.RT.SCCore;
using Aitex.Sorter.Common;
using Aitex.Core.RT.Log;
using Aitex.Core.Util;
using Aitex.Core.RT.DataCenter;
using Aitex.Core.RT.Fsm;

using MECF.Framework.Common.Jobs;
using MECF.Framework.Common.Routine;
using MECF.Framework.Common.Equipment;
using MECF.Framework.Common.SubstrateTrackings;
using MECF.Framework.Common.Schedulers;

using Venus_Core;

using Venus_RT.Modules.Schedulers;
using Venus_RT.Scheduler;

namespace Venus_RT.Modules
{
    enum ModulePriority
    {
        High,
        Middle,
        Low,
        Stop,
    }

    enum MovingStatus
    {
        Staying,
        Waiting,
        Moving,
    }
    class ModuleFlag
    {
        public ModulePriority Priority { get; set; }
        public MovingStatus MovingStatus { get; set; }

        public ModuleFlag(ModulePriority _priority)
        {
            Priority = _priority;
            MovingStatus = MovingStatus.Staying;
        }
    }

    class AutoCycle : IRoutine
    {
        private List<ControlJobInfo> _lstControlJobs = new List<ControlJobInfo>();
        private List<ProcessJobInfo> _lstProcessJobs = new List<ProcessJobInfo>();

        private RState _cycleState = RState.Init;

        Dictionary<ModuleName, SchedulerModule> _atmSchedulers  = new Dictionary<ModuleName, SchedulerModule>();
        Dictionary<ModuleName, ModuleFlag> _atmModules          = new Dictionary<ModuleName, ModuleFlag>();

        Dictionary<ModuleName, SchedulerModule> _vacSchedulers  = new Dictionary<ModuleName, SchedulerModule>();
        Dictionary<ModuleName, ModuleFlag> _vacModules          = new Dictionary<ModuleName, ModuleFlag>();


        SchedulerTMRobot _tmRobot = new SchedulerTMRobot();
        SchedulerEfemRobot _efemRobot = new SchedulerEfemRobot();

        List<SlotItem>  _vacReadyOutSlots   = new List<SlotItem>();
        List<SlotItem>  _vacReadyInSlots    = new List<SlotItem>();
        List<SlotItem>  _atmReadyOutSlots   = new List<SlotItem>();
        List<SlotItem>  _atmReadyInSlots    = new List<SlotItem>();

        List<int> _LLAInSlot = new List<int> { 0, 1, 2, 3 };
        List<int> _LLAOutSlot = new List<int> { 0, 1, 2, 3 };
        List<int> _LLBInSlot = new List<int> { 0, 1, 2, 3 };
        List<int> _LLBOutSlot = new List<int> { 0, 1, 2, 3 };

        List<MoveItem> _movingItems = new List<MoveItem>();
        List<MoveItem> _efemMovingItems = new List<MoveItem>();

        Dictionary<SlotItem, Guid> _vacWaferTargets = new Dictionary<SlotItem, Guid>();
        Dictionary<SlotItem, Guid> _atmWaferTargets = new Dictionary<SlotItem, Guid>();

        private bool _isCycleMode;
        private int _cycleSetPoint = 0;
        private int _cycledCount = 0;
        private int _cycledWafer = 0;

        #region public interface
        public AutoCycle() 
        {
            InitModules();

            DATA.Subscribe("Scheduler.CycledCount", () => _cycledCount);
            DATA.Subscribe("Scheduler.CycledWafer", () => _cycledWafer);
            DATA.Subscribe("Scheduler.CycleSetPoint", () => _cycleSetPoint);


            DATA.Subscribe("Scheduler.PjIdList", () => Array.ConvertAll(_lstProcessJobs.ToArray(), x => x.InnerId.ToString()).ToList());
        }

        public RState Start(params object[] objs)
        {
            _isCycleMode = SC.GetValue<bool>("System.IsCycleMode");
            _cycleSetPoint = _isCycleMode ? SC.GetValue<int>("System.CycleCount") : 0;
            _cycledWafer = 0;
            _cycledCount = 0;

            return RState.Running;
        }

        public RState Monitor()
        {
            prelude();
            driveAtmSystem();
            driveVacSystem();
            epilogue();
            return _cycleState;
        }

        public void Abort()
        {
        }

        public bool CheckAllJobDone()
        {
            foreach (var cj in _lstControlJobs)
            {
                if (cj.State == EnumControlJobState.Executing || cj.State == EnumControlJobState.Paused)
                    return false;
            }

            return true;
        }

        public bool CheckJobJustDone(out string sJobName)
        {
            foreach (var cj in _lstControlJobs)
            {
                if (cj.State == EnumControlJobState.Completed && !cj.BeenPosted)
                {
                    //LP;WaferSize;Lot;Number;Start;End;
                    sJobName = $"{cj.Module};{cj.JobWaferSize};{cj.LotName};{cj.LotWafers.Count};{cj.StartTime:T};{cj.EndTime:T}";
                    cj.BeenPosted = true;
                    return true;
                }
            }

            sJobName = "NULL";
            return false;
        }

        #endregion

        private void InitModules()
        {
            foreach(var module in new ModuleName[]{ ModuleName.LP1, ModuleName.LP2, ModuleName.LP3, 
                ModuleName.Aligner1, ModuleName.Aligner2, ModuleName.Cooling1, ModuleName.Cooling2})
            {
                if(ModuleHelper.IsInstalled(module))
                {
                    if(ModuleHelper.IsLoadPort(module))
                    {
                        _atmSchedulers[module] = new SchedulerLoadPort(module);
                        _atmModules[module] = new ModuleFlag(ModulePriority.Middle);
                    }
                    else if(ModuleHelper.IsAligner(module) || ModuleHelper.IsCooling(module))
                    {
                        _atmSchedulers[module] = new SchedulerAligner(module);
                        _atmModules[module] = new ModuleFlag(ModulePriority.Middle);
                    }
                }
            }

            foreach (var module in new ModuleName[] { ModuleName.PMA, ModuleName.PMB, ModuleName.PMC, 
                ModuleName.PMD, ModuleName.PME, ModuleName.PMF})
            {
                if (ModuleHelper.IsInstalled(module))
                {
                    _vacSchedulers[module] = new SchedulerPM(module);
                    _vacModules[module] = new ModuleFlag(ModulePriority.Middle);
                }
            }

            foreach (var module in new ModuleName[] { ModuleName.LLA, ModuleName.LLB })
            {
                if (ModuleHelper.IsInstalled(module))
                {
                    var llScheduler = new SchedulerLoadLock(module);
                    _vacSchedulers[module] = llScheduler;
                    _vacModules[module] = new ModuleFlag(ModulePriority.Middle);

                    _atmSchedulers[module] = llScheduler;
                    _atmModules[module] = new ModuleFlag(ModulePriority.Middle);
                }
            }
        }

        private void prelude()
        {
        }

        private void epilogue()
        {
            foreach(var mod in _vacSchedulers)
            {
                if(mod.Value.IsAvailable)
                {
                    var tars = _vacWaferTargets.Where(item => item.Key.Module == mod.Key).ToArray();
                    foreach(var tar in tars)
                    {
                        var wafer = WaferManager.Instance.GetWafer(tar.Key.Module, tar.Key.Slot);
                        if (wafer.IsEmpty)
                            continue;

                        if(wafer.InnerId == tar.Value)
                        {
                            // wafer arrive
                            _vacWaferTargets.Remove(tar.Key);
                            wafer.NextSequenceStep++;
                        }
                    }
                }
            }

            foreach(var mod in _atmSchedulers)
            {
                if (mod.Value.IsAvailable)
                {
                    var tars = _atmWaferTargets.Where(item => item.Key.Module == mod.Key).ToArray();
                    foreach (var tar in tars)
                    {
                        var wafer = WaferManager.Instance.GetWafer(tar.Key.Module, tar.Key.Slot);
                        if (wafer.IsEmpty)
                            continue;

                        if (wafer.InnerId == tar.Value)
                        {
                            // wafer arrive
                            _atmWaferTargets.Remove(tar.Key);

                            if (!ModuleHelper.IsLoadPort(tar.Key.Module))
                                wafer.NextSequenceStep++;
                        }
                    }
                }
            }
        }

        private void driveVacSystem()
        {
            PumpingTMRobotTask();
            ProcessTMRobotTask();
            RuningTMRobotTask();
        }

        #region Vacuum System
        private void PumpingTMRobotTask()
        {
            foreach(var mod in _vacSchedulers)
            {
                if (mod.Value.IsAvailable && _vacModules[mod.Key].MovingStatus == MovingStatus.Staying)
                {

                    if(ModuleHelper.IsLoadLock(mod.Key))
                    {
                        var inSlots = mod.Key == ModuleName.LLA ? _LLAInSlot : _LLBInSlot;
                        foreach(var slot in inSlots)
                        {
                            if(WaferManager.Instance.CheckHasWafer(mod.Key, slot) && IsVacWaferReadyOut(mod.Key, slot))
                            {
                                _vacReadyOutSlots.Add(new SlotItem(mod.Key, slot));
                                _vacModules[mod.Key].MovingStatus = MovingStatus.Waiting;
                            }
                        }

                        var outSlots = mod.Key == ModuleName.LLA ? _LLAOutSlot : _LLBOutSlot;
                        foreach(var slot in outSlots)
                        {
                            if(WaferManager.Instance.CheckNoWafer(mod.Key, slot))
                            {
                                _vacReadyInSlots.Add(new SlotItem(mod.Key, slot));
                                _vacModules[mod.Key].MovingStatus = MovingStatus.Waiting;
                            }
                        }
                    }
                    else
                    {
                        if(WaferManager.Instance.CheckHasWafer(mod.Key, 0) && IsVacWaferReadyOut(mod.Key, 0))  // processed?
                        {
                            _vacReadyOutSlots.Add(new SlotItem(mod.Key, 0));
                            _vacModules[mod.Key].MovingStatus = MovingStatus.Waiting;
                        }
                        else
                        {
                            _vacReadyInSlots.Add(new SlotItem(mod.Key, 0));
                            _vacModules[mod.Key].MovingStatus = MovingStatus.Waiting;
                        }
                    }
                }
            }
        }

        bool SearchWaferDestination(SlotItem outSlot, out SlotItem destSlot)
        {
            destSlot = new SlotItem(ModuleName.System, -1);
            var wafer = WaferManager.Instance.GetWafer(outSlot.Module, outSlot.Slot);
            foreach (var next_module in wafer.ProcessJob.Sequence.Steps[wafer.NextSequenceStep].StepModules)
            {
                var validSlots = GetModuleValidSlots(next_module);
                foreach (var nSlot in validSlots)
                {
                    if (_movingItems.Exists(mItem => mItem.DestinationModule == next_module && mItem.DestinationSlot == nSlot))
                        continue;

                    var ready_in = _vacReadyInSlots.Find(item => item.Module == next_module && item.Slot == nSlot);
                    if (ready_in != null)
                    {
                        destSlot.Module = ready_in.Module;
                        destSlot.Slot = nSlot;
                        return true;
                    }
                }
            }

            return false;
        }

        List<int> GetModuleValidSlots(ModuleName mod)
        {
            var validSlot = new List<int>();
            if(ModuleHelper.IsLoadLock(mod))
            {
                var inSlots = mod == ModuleName.LLA ? _LLAInSlot : _LLBInSlot;
                foreach (var slot in inSlots)
                {
                    if (WaferManager.Instance.CheckNoWafer(mod, slot) && !_movingItems.Exists(item => item.DestinationModule == mod && item.DestinationSlot == slot))
                        validSlot.Add(slot);

                    if (WaferManager.Instance.CheckHasWafer(mod, slot) && _movingItems.Exists(item => item.SourceModule == mod && item.SourceSlot == slot))
                        validSlot.Add(slot);
                }
            }
            else if(ModuleHelper.IsPm(mod))
            {
                if (WaferManager.Instance.CheckNoWafer(mod, 0) && !_movingItems.Exists(item => item.DestinationModule == mod))
                    validSlot.Add(0);

                if (WaferManager.Instance.CheckHasWafer(mod, 0) && _movingItems.Exists(item => item.SourceModule == mod))
                    validSlot.Add(0);
            }
            

            return validSlot.Distinct().ToList();
        }

        List<MoveItem> SearchWaitInSlots(ModuleName inModule)
        {
            List<MoveItem> inSlots = new List<MoveItem>();
            var validSlots = GetModuleValidSlots(inModule);
            foreach(var slot in _vacReadyOutSlots)
            {
                if (slot.Module == inModule)
                    continue;

                var wafer = WaferManager.Instance.GetWafer(slot.Module, slot.Slot);
                foreach (var next_module in wafer.ProcessJob.Sequence.Steps[wafer.NextSequenceStep].StepModules)
                {
                    if(next_module == inModule && validSlots.Count > 0)
                    {
                        inSlots.Add(new MoveItem(slot.Module, slot.Slot, inModule, validSlots.First(), Hand.None) );
                        validSlots.RemoveAt(0);
                    }
                }

            }

            return inSlots;
        }

        private void ProcessTMRobotTask()
        {
            if(_tmRobot.IsAvailable)
            {
                if(WaferManager.Instance.CheckHasWafer(ModuleName.TMRobot, 0) || WaferManager.Instance.CheckHasWafer(ModuleName.TMRobot, 1))
                {
                    return;
                }

                foreach(var slot in _vacReadyOutSlots)
                {
                    if(ModuleHelper.IsLoadLock(slot.Module))
                    {
                        if(SearchWaferDestination(slot, out SlotItem destSlot))
                        {
                            _movingItems.Add(new MoveItem(slot.Module, slot.Slot, destSlot.Module, destSlot.Slot, Hand.None));

                            // check whether match double pick pattern
                            var out_slot_2 = _vacReadyOutSlots.Find(item => item.Module == slot.Module && item.Slot != slot.Slot);
                            if (out_slot_2 != null)
                            {
                                if(SearchWaferDestination(out_slot_2, out SlotItem destSlot_2))
                                {
                                    _movingItems.Add(new MoveItem(out_slot_2.Module, out_slot_2.Slot, destSlot_2.Module, destSlot_2.Slot, Hand.None));
                                }
                            }

                            // check whether match swap pattern
                            var in_slots = SearchWaitInSlots(slot.Module);
                            foreach(var in_slot in in_slots)
                            {
                                _movingItems.Add(in_slot);
                            }

                            return;
                        }
                    }
                    else // PM
                    {
                        if(SearchWaferDestination(slot, out SlotItem destSlot))
                        {
                            _movingItems.Add(new MoveItem(slot.Module, slot.Slot, destSlot.Module, destSlot.Slot, Hand.None));

                            // check whether match swap pattern
                            var in_slots = SearchWaitInSlots(slot.Module);
                            if(in_slots.Count >= 1)
                            {
                                _movingItems.Add(in_slots.First());
                            }
                            else
                            {
                                // check whether match double move pattern
                                var same_dest = SearchWaitInSlots(destSlot.Module);
                                foreach (var item in same_dest)
                                {
                                    _movingItems.Add(item);
                                }
                            }

                            return;
                        }
                    }
                }
            }
        }

        private void RuningTMRobotTask()
        {
            if(_tmRobot.IsAvailable)
            {
                if(_tmRobot.PostMoveItems(_movingItems.ToArray()))
                {
                    
                    foreach(var item in _movingItems)
                    {
                        var wafer = WaferManager.Instance.GetWafer(item.SourceModule, item.SourceSlot);
                        if (wafer.IsEmpty)
                        {
                            // post alarm
                            LOG.Write(eEvent.ERR_ROUTER, ModuleName.System, $"Cannot run TM moving task as Get {item.SourceModule}{item.SourceModule} Wafer Info failed");
                            return;
                        }

                        var slot = new SlotItem(item.DestinationModule, item.DestinationSlot);
                        _vacWaferTargets[slot] = wafer.InnerId;
                    }
                    _movingItems.Clear();
                }
            }
        }

        private Hand GetTMRobotFreeHand()
        {
            var blade1HasWafer = WaferManager.Instance.CheckHasWafer(ModuleName.TMRobot, 0);
            var blade2HasWafer = WaferManager.Instance.CheckHasWafer(ModuleName.TMRobot, 1);
            if (blade1HasWafer && blade2HasWafer)
                return Hand.None;
            else if (!blade1HasWafer && !blade2HasWafer)
                return Hand.Both;
            else if (blade1HasWafer)
                return Hand.Blade2;
            else
                return Hand.Blade1;
        }

        private bool IsVacWaferReadyOut(ModuleName mod, int slot)
        {
            var wafer = WaferManager.Instance.GetWafer(mod, slot);

            if (wafer.IsEmpty)
                return false;

            if (wafer.ProcessJob == null || wafer.ProcessJob.Sequence == null)
                return false;

            if (wafer.NextSequenceStep >= wafer.ProcessJob.Sequence.Steps.Count)
            {
                // should not go here
                LOG.Write(eEvent.ERR_ROUTER, ModuleName.System, $"Wafer:{wafer.WaferOrigin} NextSequenceStep {wafer.NextSequenceStep} exceeds {wafer.ProcessJob.Sequence.Name} max steps number");
                return false;
            }

            if (wafer.ProcessJob.Sequence.Steps[wafer.NextSequenceStep].StepModules.Contains(mod))
                return false;

            foreach(var module in wafer.ProcessJob.Sequence.Steps[wafer.NextSequenceStep].StepModules)
            {
                if (ModuleHelper.IsLoadLock(module) || ModuleHelper.IsPm(module))
                    return true;
            }

            return false;
        }

        #endregion Vacuum System

        #region Atm System
        private void driveAtmSystem()
        {
            PumpingEFEMRobotTask();
            RuningEFEMRobotTask();
        }

        private void PumpingEFEMRobotTask()
        {
            if (!_efemRobot.IsAvailable)
                return;

            foreach(var scheduler in _atmSchedulers)
            {
                if (!scheduler.Value.IsAvailable)
                    continue;

                if(ModuleHelper.IsLoadLock(scheduler.Key))
                {
                    if (ProcessLLEFEMRobotTask(scheduler.Key))
                        return;
                }
                else if(ModuleHelper.IsLoadPort(scheduler.Key))
                {
                    if (ProcessLPEFEMRobotTask(scheduler.Key))
                        return;
                }
                else if(ModuleHelper.IsAligner(scheduler.Key))
                {
                    if (ProcessAlignerEFEMRobotTask(scheduler.Key))
                        return;
                }
                else if(ModuleHelper.IsCooling(scheduler.Key))
                {
                    if (ProcessCoolingEFEMRobotTask(scheduler.Key))
                        return;
                }
                else
                {
                    // should not go here
                    LOG.Write(eEvent.ERR_ROUTER, $"Wrong Module: {scheduler.Key} in ATM System");
                }
            }
        }

        List<int> GetEfemRobotWaferReadyInHands(ModuleName mod)
        {
            var slots = new List<int>();
            for(int i = 0; i < 2; i++)
            {
                var wafer = WaferManager.Instance.GetWafer(ModuleName.EfemRobot, i);
                if (wafer.IsEmpty)
                    continue;

                if (wafer.ProcessJob == null || wafer.ProcessJob.Sequence == null)
                    continue;

                if (wafer.NextSequenceStep >= wafer.ProcessJob.Sequence.Steps.Count)
                {
                    // should not go here
                    LOG.Write(eEvent.ERR_ROUTER, ModuleName.System, $"Wafer:{wafer.WaferOrigin} NextSequenceStep {wafer.NextSequenceStep} exceeds {wafer.ProcessJob.Sequence.Name} max steps number");
                    continue;
                }

                if (wafer.ProcessJob.Sequence.Steps[wafer.NextSequenceStep].StepModules.Contains(mod))
                {
                    slots.Add(i);
                }
            }

            return slots;
        }

        bool IsAtmWaferReadyOut(ModuleName mod, int slot)
        {
            var wafer = WaferManager.Instance.GetWafer(mod, slot);

            if (wafer.IsEmpty)
                return false;

            if (wafer.ProcessJob == null || wafer.ProcessJob.Sequence == null)
                return false;

            if (wafer.NextSequenceStep >= wafer.ProcessJob.Sequence.Steps.Count)
            {
                // should not go here
                LOG.Write(eEvent.ERR_ROUTER, ModuleName.System, $"Wafer:{wafer.WaferOrigin} NextSequenceStep {wafer.NextSequenceStep} exceeds {wafer.ProcessJob.Sequence.Name} max steps number");
                return false;
            }

            if (wafer.ProcessJob.Sequence.Steps[wafer.NextSequenceStep].StepModules.Contains(mod))
                return false;

            if(ModuleHelper.IsLoadLock(mod))
            {
                foreach (var module in wafer.ProcessJob.Sequence.Steps[wafer.NextSequenceStep].StepModules)
                {
                    if (ModuleHelper.IsPm(module))
                        return false;
                }
            }

            return true;
        }
        private bool ProcessLLEFEMRobotTask(ModuleName ll)
        {
            var robotSlots = GetEfemRobotWaferReadyInHands(ll);
            var inSlots = ll == ModuleName.LLA ? _LLAInSlot : _LLBInSlot;
            foreach(var slot in inSlots)
            {
                if(robotSlots.Count >= 1)
                {
                    if(WaferManager.Instance.CheckNoWafer(ll, slot))
                    {
                        _efemMovingItems.Add(new MoveItem(ModuleName.EfemRobot, robotSlots.First(), ll, slot, (Hand)robotSlots.First()));
                        robotSlots.RemoveAt(0);
                    }
                }
            }

            var outSlots = ll == ModuleName.LLA ? _LLAOutSlot : _LLBOutSlot;

            foreach(var slot in outSlots)
            {
                if(IsAtmWaferReadyOut(ll, slot))
                {
                    var robotHand = GetEFEMRobotFreeHand();
                    if(robotHand !=  Hand.None)
                    {
                        _efemMovingItems.Add(new MoveItem(ll, slot, ModuleName.EfemRobot, (int)robotHand, robotHand));
                    }
                }
            }

            return _efemMovingItems.Count > 0;
        }

        private bool ProcessLPEFEMRobotTask(ModuleName lp)
        {
            // check return
            for(int i = 0; i < 2; i++)
            {
                if(WaferManager.Instance.CheckHasWafer(ModuleName.EfemRobot, i))
                {
                    var returnWafer = WaferManager.Instance.GetWafer(ModuleName.EfemRobot, i);
                    if (returnWafer.IsEmpty)
                        continue;

                    if (returnWafer.ProcessJob == null || returnWafer.ProcessJob.Sequence == null)
                        continue;

                    if (returnWafer.NextSequenceStep >= returnWafer.ProcessJob.Sequence.Steps.Count && lp == (ModuleName)returnWafer.OriginStation)  // need return
                    {
                        _efemMovingItems.Add(new MoveItem(ModuleName.EfemRobot, i, lp, returnWafer.OriginSlot, (Hand)i));
                    }
                }
            }

            if (_efemMovingItems.Count > 0)
                return true;

            var outSlots = GetNextWaferInJobQueue(lp);
            foreach(var slot in outSlots)
            {
                var hand = GetEFEMRobotFreeHand();
                if(hand != Hand.None)
                {
                    _efemMovingItems.Add(new MoveItem(lp, slot, ModuleName.EfemRobot, (int)hand, hand));
                }
            }

            return _efemMovingItems.Count > 0;
        }

        private List<int> GetNextWaferInJobQueue(ModuleName lp)
        {
            var inSlots = new List<int>();

            return inSlots;


            //if (GetSystemInnerWaferCount() >= SystemInternalWaferCount || GetBufferWaferCount() > _maxBufferWaferCount)
            //    return new SlotItem(ModuleName.System, -1);

            //foreach (var cj in _lstControlJobs)
            //{
            //    if (lpModule != ModuleName.System && (cj.Module != lpModule.ToString()))
            //        continue;

            //    if (cj.State == EnumControlJobState.Executing)
            //    {
            //        foreach (var pj in _lstProcessJobs)
            //        {
            //            if (pj.ControlJobName == cj.Name && pj.State == EnumProcessJobState.Processing)
            //            {
            //                foreach (var pjSlotWafer in pj.SlotWafers)
            //                {
            //                    if (CheckWaferNeedProcessAndPMAvailable(pjSlotWafer.Item1, pjSlotWafer.Item2))
            //                    {
            //                        return new SlotItem(pjSlotWafer.Item1, pjSlotWafer.Item2);
            //                    }

            //                }
            //            }
            //        }
            //    }
            //}

            //return new SlotItem(ModuleName.System, -1);
        }

        private bool ProcessAlignerEFEMRobotTask(ModuleName aligner)
        {
            if(WaferManager.Instance.CheckHasWafer(aligner, 0) && IsAtmWaferReadyOut(aligner, 0))
            {
                var hand = GetEFEMRobotFreeHand();
                if(hand != Hand.None)
                {
                    _efemMovingItems.Add(new MoveItem(aligner, 0, ModuleName.EfemRobot, (int)hand, hand));
                }
            }
            else
            {
                var robotSlots = GetEfemRobotWaferReadyInHands(aligner);
                if(robotSlots.Count > 0)
                {
                    _efemMovingItems.Add(new MoveItem(aligner, 0, ModuleName.EfemRobot, robotSlots.First(), (Hand)robotSlots.First()));
                }
            }

            return _efemMovingItems.Count > 0;
        }

        private bool ProcessCoolingEFEMRobotTask(ModuleName cooling)
        {
            if (WaferManager.Instance.CheckHasWafer(cooling, 0) && IsAtmWaferReadyOut(cooling, 0))
            {
                var hand = GetEFEMRobotFreeHand();
                if (hand != Hand.None)
                {
                    _efemMovingItems.Add(new MoveItem(cooling, 0, ModuleName.EfemRobot, (int)hand, hand));
                }
            }
            else
            {
                var robotSlots = GetEfemRobotWaferReadyInHands(cooling);
                if (robotSlots.Count > 0)
                {
                    _efemMovingItems.Add(new MoveItem(cooling, 0, ModuleName.EfemRobot, robotSlots.First(), (Hand)robotSlots.First()));
                }
            }

            return _efemMovingItems.Count > 0;
        }

        private void RuningEFEMRobotTask()
        {
            if (_efemRobot.IsAvailable)
            {
                if (_efemRobot.PostMoveItems(_efemMovingItems.ToArray()))
                {

                    foreach (var item in _efemMovingItems)
                    {
                        var wafer = WaferManager.Instance.GetWafer(item.SourceModule, item.SourceSlot);
                        if (wafer.IsEmpty)
                        {
                            // post alarm
                            LOG.Write(eEvent.ERR_ROUTER, ModuleName.System, $"Cannot run EFEM moving task as Get {item.SourceModule}{item.SourceModule} Wafer Info failed");
                            return;
                        }

                        var slot = new SlotItem(item.DestinationModule, item.DestinationSlot);
                        _atmWaferTargets[slot] = wafer.InnerId;
                    }
                    _efemMovingItems.Clear();
                }
            }
        }

        private Hand GetEFEMRobotFreeHand()
        {
            for(int i = 0; i < 2; i++)
            {
                if ((WaferManager.Instance.CheckNoWafer(ModuleName.EfemRobot, i) && !_efemMovingItems.Exists(item => item.DestinationModule == ModuleName.EfemRobot && item.DestinationSlot == i)) ||
                (WaferManager.Instance.CheckHasWafer(ModuleName.EfemRobot, i) && _efemMovingItems.Exists(item => item.SourceModule == ModuleName.EfemRobot && item.SourceSlot == i)))
                return (Hand)i;
            }

            return Hand.None;
        }

        #endregion Atm System
    }
}