| 123456789101112131415161718192021222324252627282930313233343536373839404142434445464748495051525354555657585960616263646566676869707172737475767778798081828384858687888990919293949596979899100101102103104105106107108109110111112113114115116117118119120121122123124125126127128129130131132133134135136137138139140141142143144145146147 | using Aitex.Core.RT.Routine;using Aitex.Core.RT.SCCore;using Venus_RT.Devices;using MECF.Framework.Common.Routine;using Venus_Core;namespace Venus_RT.Modules.PMs{    class PMPurgeRoutine : PMRoutineBase, IRoutine    {        private enum PurgeStep        {            kStart,            kCloseValvesExceptN2Purge,            kPurgeVent,            kStopVent,            kCloseISOValve,            kSoftPump,            kFastPump,            kCloseFastPump,            kOpenISOValve,            kOpenVATValve,            kOpenV8N2Purge,            kCloseVATValve,            kEnd,        }        public int PurgeCounter { get; private set; }        private readonly int _pumpingTargetPressure = 200;        private int _purgeVentPressure = 1000;        private int _roughPumpDownPressure = 75;        private int _purgePumpTime = 60;        private int _purgeCycleCount = 30;        public PMPurgeRoutine(JetPMBase chamber) : base(chamber)        {            Name = "PM Purge";        }        public RState Start(params object[] objs)        {            if (CheckLid() &&                CheckSlitDoor() &&                CheckDryPump() &&                CheckTurboPump())            {                _purgeVentPressure = SC.GetValue<int>($"{Module}.Purge.PurgeVentPressure");                _roughPumpDownPressure = SC.GetValue<int>($"{Module}.Purge.PurgePumpPressure") * 1000;                _purgePumpTime = SC.GetValue<int>($"{Module}.Purge.PurgePumpTime");                _purgeCycleCount = SC.GetValue<int>($"{Module}.Purge.PurgeCycleCount");                Reset();                //CloseValvesExceptN2Purge();                PurgeCounter = 0;                return Runner.Start(Module, Name);            }            return RState.Failed;        }        public RState Monitor()        {            Runner.Delay((int)PurgeStep.kStart,              _delay_1s)                .LoopStart((int)PurgeStep.kCloseValvesExceptN2Purge,       "Purge Cycle",      _purgeCycleCount,                        CloseValvesExceptN2Purge,           _delay_5s)                .LoopRun((int)PurgeStep.kPurgeVent,         OpenVentValves,                                                             () => { return _chamber.ChamberPressure >= _purgeVentPressure; })                .LoopRun((int)PurgeStep.kStopVent,          CloseVentValves,                                                            _delay_2s)                .LoopRun((int)PurgeStep.kCloseISOValve,     HOFs.WrapAction(_chamber.OpenValve, ValveType.TurboPumpPumping, false),     _delay_2s)                .LoopRun((int)PurgeStep.kSoftPump,          HOFs.WrapAction(_chamber.OpenValve, ValveType.SoftPump, true),              () => { return _chamber.ChamberPressure <= _roughPumpDownPressure; })                .LoopRun((int)PurgeStep.kFastPump,          StartFastPump,                                                              () => { return _chamber.ChamberPressure <= _pumpingTargetPressure; })                .LoopRun((int)PurgeStep.kCloseFastPump,     HOFs.WrapAction(_chamber.OpenValve, ValveType.FastPump, false),             _delay_2s)                .LoopRun((int)PurgeStep.kOpenISOValve,      HOFs.WrapAction(_chamber.OpenValve, ValveType.TurboPumpPumping, true),      _delay_2s)                .LoopRun((int)PurgeStep.kOpenVATValve,      HOFs.Apply(_chamber.TurnPendulumValve, true),                               _delay_5s)                .LoopRun((int)PurgeStep.kOpenV8N2Purge,     OpenV8N2Purge,                                                              (_purgePumpTime - 5) * 1000)                .LoopEnd((int)PurgeStep.kCloseVATValve,     CloseVATValve,                                                              _delay_1s)                .End((int)PurgeStep.kEnd,                   NullFun,                                                                    _delay_1s);            return Runner.Status;        }        public void Abort()        {            CloseAllValves();        }        private bool CloseValvesExceptN2Purge()        {            _chamber.OpenValve(ValveType.Guage, false);            _chamber.OpenValve(ValveType.SoftPump, false);            _chamber.OpenValve(ValveType.FastPump, false);            _chamber.TurnPendulumValve(false);            _chamber.OpenValve(ValveType.GasFinal, false);            _chamber.OpenValve(ValveType.N2, false);            _chamber.OpenValve(ValveType.PVN22, true);            _chamber.OpenValve(ValveType.TurboPumpPumping, true);            _chamber.OpenValve(ValveType.TurboPumpPurge, true);            return true;        }        private bool OpenVentValves()        {            _chamber.OpenValve(ValveType.GasFinal, true);            _chamber.OpenValve(ValveType.N2, true);            return true;        }        private bool CloseVentValves()        {            _chamber.OpenValve(ValveType.GasFinal, false);            _chamber.OpenValve(ValveType.N2, false);            _chamber.OpenValve(ValveType.PVN22, false);            //_chamber.OpenValve(ValveType.TurboPumpPurge, false);            return true;        }        private bool StartFastPump()        {            _chamber.OpenValve(ValveType.SoftPump, false);            _chamber.OpenValve(ValveType.FastPump, true);            return true;        }        private bool OpenV8N2Purge()        {            _chamber.OpenValve(ValveType.Guage, true);            _chamber.OpenValve(ValveType.TurboPumpPurge, true);            return true;        }        private bool CloseVATValve()        {            _chamber.TurnPendulumValve(false);            PurgeCounter++;            return true;        }    }}
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