SimulatorSystem.cs 142 KB

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  1. using Aitex.Core.RT.DataCenter;
  2. using Aitex.Core.RT.IOCore;
  3. using Aitex.Core.RT.Log;
  4. using Aitex.Core.Util;
  5. using MECF.Framework.Common.Equipment;
  6. using MECF.Framework.Simulator.Core.Driver;
  7. using System;
  8. using System.Collections.Generic;
  9. using Venus_Simulator.Devices;
  10. using System.Threading;
  11. using Venus_Core;
  12. using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.PMs;
  13. using System.Diagnostics.Eventing.Reader;
  14. using MECF.Framework.Common.CommonData;
  15. using MECF.Framework.Common.DataCenter;
  16. namespace Venus_Simulator.Instances
  17. {
  18. public class SimulatorSystem : Singleton<SimulatorSystem>
  19. {
  20. private PeriodicJob _thread;
  21. private Random _rd = new Random();
  22. ConfigType type;
  23. private RD_TRIG _trigATM = new RD_TRIG();
  24. private RD_TRIG _trigVAC = new RD_TRIG();
  25. private R_TRIG _trigLLExtend = new R_TRIG();
  26. private R_TRIG _trigLLRetract = new R_TRIG();
  27. private static int count = 0;
  28. private readonly float ATM_THRESHOLD = 750000;
  29. private readonly float ATM_PRESSURE = 760000;
  30. private readonly float ATM_LoadLock_PRESSURE = 760000;
  31. private readonly uint VAC_SW_PRESSURE = 9500;
  32. private readonly uint PROCESS_GAUGE = 10000;
  33. private Dictionary<ModuleName, DeviceSimulator> _MockDevices = new Dictionary<ModuleName, DeviceSimulator>();
  34. private Dictionary<ModuleName, JetChamber> jetChambers = new Dictionary<ModuleName, JetChamber>();
  35. public SimulatorSystem()
  36. {
  37. //_MockDevices.Add(ModuleName.PMB, new SkyPumpMock());
  38. //_MockDevices.Add(ModuleName.PMB, new AdTecGeneratorMock());
  39. //_MockDevices.Add(ModuleName.PMB, new AdTecMatchMock());
  40. // TODO
  41. type = (ConfigType)QueryDataClient.Instance.Service.GetData("System.ConfigType");
  42. jetChambers.Add(ModuleName.PMA, SimulatorJetChamber.CurrentPMAChamber);
  43. jetChambers.Add(ModuleName.PMB, SimulatorJetChamber.CurrentPMBChamber);
  44. jetChambers.Add(ModuleName.PMC, SimulatorJetChamber.CurrentPMCChamber);
  45. jetChambers.Add(ModuleName.PMD, SimulatorJetChamber.CurrentPMDChamber);
  46. }
  47. ~SimulatorSystem()
  48. {
  49. _thread?.Stop();
  50. }
  51. public void Initialize()
  52. {
  53. SetDefaultValue(ModuleName.PMA, SimulatorJetChamber.CurrentPMAChamber);
  54. SetDefaultValue(ModuleName.PMB, SimulatorJetChamber.CurrentPMBChamber);
  55. SetDefaultValue(ModuleName.PMC, SimulatorJetChamber.CurrentPMCChamber);
  56. SetDefaultValue(ModuleName.PMD, SimulatorJetChamber.CurrentPMDChamber);
  57. if (type == ConfigType.Kepler2200)
  58. {
  59. SetKepler2200TMDefaultValue();
  60. }
  61. else if (type == ConfigType.Kepler2300)
  62. {
  63. SetKepler2300TMDefaultValue();
  64. }
  65. else if (type == ConfigType.VenusSE)
  66. {
  67. SetSETMDefaultValue();
  68. SetDETMDefaultValue();
  69. }
  70. else if (type == ConfigType.VenusDE)
  71. {
  72. SetDETMDefaultValue();
  73. }
  74. Singleton<DataManager>.Instance.Initialize(false);
  75. _thread = new PeriodicJob(500, OnMonitor, nameof(SimulatorSystem), true);
  76. }
  77. private void SetDefaultValue(ModuleName mod, JetChamber jetChamber)
  78. {
  79. switch (jetChamber)
  80. {
  81. case JetChamber.VenusSE:
  82. IO.DI[$"{mod}.DI_Lid_Closed"].Value = true;
  83. IO.DI[$"{mod}.DI_ATM_Switch"].Value = true;
  84. IO.DI[$"{mod}.DI_PM_VAC_Switch"].Value = false;
  85. IO.DI[$"{mod}.DI_ESC_Coolant_Flow_SW"].Value = true;
  86. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  87. IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
  88. IO.DI[$"{mod}.DI_Lift_Pin_Up_POS"].Value = false;
  89. IO.DI[$"{mod}.DI_Lift_Pin_Down_POS"].Value = true;
  90. //IO.DI[$"{mod}.DI_RF_Generator_Interlock"].Value = true;
  91. //IO.DI[$"{mod}.DI_Source_RF_Fan"].Value = true;
  92. IO.DI[$"{mod}.DI_RF_HV_Interlock_OK"].Value = true;
  93. IO.DI[$"{mod}.DI_Turbo_Pump_Interlock"].Value = true;
  94. IO.DI[$"{mod}.DI_Coolant_Inlet_TC_Broken_Alarm"].Value = false;
  95. IO.DI[$"{mod}.DI_Coolant_Outlet_TC_Broken_Alarm"].Value = false;
  96. IO.DI[$"{mod}.DI_Chamber_Pressure_10t_Gauge_Alarm"].Value = false;
  97. IO.DI[$"{mod}.DI_Process_Pressure_100mt_Gauge_Alarm"].Value = false;
  98. IO.DI[$"{mod}.DI_Foreline_Pressure_10t_Gauge_Alarm"].Value = false;
  99. IO.DI[$"{mod}.DI_Valve_Control_TC_Broken_Alarm"].Value = false;
  100. IO.DI[$"{mod}.DI_Foreline_Control_TC_Broken_Alarm"].Value = false;
  101. IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = false;
  102. IO.DI[$"{mod}.DI_CHB_Wall_TC_Deviation_out_of_range"].Value = true;
  103. IO.DI[$"{mod}.DI_CHB_Wall_Control_TC_Broken_Alarm"].Value = true;
  104. IO.DI[$"{mod}.DI_CHB_Wall_Monitor_TC_Broken_Alarm"].Value = true;
  105. IO.DI[$"{mod}.DI_CHB_Wall_Heater_On_FB"].Value = true;
  106. IO.DI[$"{mod}.DI_CHB_Wall_OT_Switch_Alarm"].Value = true;
  107. IO.DI[$"{mod}.DI_PN2_Pressure_Switch"].Value = true;
  108. IO.DI[$"{mod}.DI_MFC1_Pressure_Switch"].Value = true;
  109. IO.DI[$"{mod}.DI_MFC2_Pressure_Switch"].Value = true;
  110. IO.DI[$"{mod}.DI_MFC3_Pressure_Switch"].Value = true;
  111. IO.DI[$"{mod}.DI_MFC4_Pressure_Switch"].Value = true;
  112. IO.DI[$"{mod}.DI_MFC5_Pressure_Switch"].Value = true;
  113. IO.DI[$"{mod}.DI_MFC6_Pressure_Switch"].Value = true;
  114. IO.DI[$"{mod}.DI_MFC7_Pressure_Switch"].Value = true;
  115. IO.DI[$"{mod}.DI_MFC8_Pressure_Switch"].Value = true;
  116. IO.DI[$"{mod}.DI_MFC9_Pressure_Switch"].Value = true;
  117. IO.DI[$"{mod}.DI_MFC10_Pressure_Switch"].Value = true;
  118. IO.DI[$"{mod}.DI_MFC11_Pressure_Switch"].Value = true;
  119. IO.DI[$"{mod}.DI_MFC12_Pressure_Switch"].Value = true;
  120. IO.DI[$"{mod}.DI_He_Pressure_Switch"].Value = true;
  121. IO.DI[$"{mod}.DI_ESC_He_Pressure_100t_Gauge_Alarm"].Value = true;
  122. IO.DI[$"{mod}.DI_Gas_Box_Door_Switch"].Value = true;
  123. IO.DI[$"{mod}.DI_Gas_Box_Pressure_Switch"].Value = true;
  124. IO.DI[$"{mod}.DI_Turbo_Pump_Water_Flow_Switch"].Value = true;
  125. IO.DI[$"{mod}.DI_SOURCE_RF_Water_Flow_Switch"].Value = true;
  126. IO.DI[$"{mod}.DI_TM_ROB_NOT_EXTEND_TO_PM"].Value = true;
  127. IO.DI[$"{mod}.DI_TM_Slit_Door_Closed"].Value = true;
  128. IO.DI[$"{mod}.DI_Source_Match_interlock_ok"].Value = true;
  129. IO.DI[$"{mod}.DI_Bias_Match_interlock_ok"].Value = true;
  130. IO.DI[$"{mod}.DI_GASLINE_TC_Deviation_out_of_range"].Value = true;
  131. IO.DI[$"{mod}.DI_GASLINE_Control_TC_Broken_Alarm"].Value = true;
  132. IO.DI[$"{mod}.DI_GASLINE_Monitor_TC_Broken_Alarm"].Value = true;
  133. IO.DI[$"{mod}.DI_GASLINE_Heater_On_FB"].Value = true;
  134. IO.DI[$"{mod}.DI_CTRL_BOX_1#FAN_OK"].Value = true;
  135. IO.DI[$"{mod}.DI_CTRL_BOX_2#FAN_OK"].Value = true;
  136. IO.DI[$"{mod}.DI_POWER_BOX_FAN_OK"].Value = true;
  137. //// pressure
  138. SetAiValue($"{mod}.AI_Process_Pressure_100mt", 100);
  139. //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  140. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  141. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 5001);
  142. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5000);
  143. //// Temperature
  144. SetAiValue($"{mod}.AI_Valve_Control_TC_Temp", 28);
  145. //SetAiValue($"{mod}.AI_Valve_Monitor_TC_Temp", 27);
  146. SetAiValue($"{mod}.AI_Fline_Control_TC_Temp", 28);
  147. //SetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp", 27);
  148. SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", 28);
  149. SetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp", 27);
  150. SetAiValue($"{mod}.AI_Coolant_Inlet_Temp", 28);
  151. // Datetime
  152. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  153. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  154. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  155. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  156. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  157. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  158. break;
  159. case JetChamber.VenusDE:
  160. IO.DI[$"{mod}.DI_Lid_Closed"].Value = true;
  161. IO.DI[$"{mod}.DI_ATM_Switch"].Value = true;
  162. IO.DI[$"{mod}.DI_PM_VAC_Switch"].Value = false;
  163. IO.DI[$"{mod}.DI_ESC_Coolant_Flow_SW"].Value = true;
  164. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  165. IO.DI[$"{mod}.DI_Lift_Pin_Up_POS"].Value = false;
  166. IO.DI[$"{mod}.DI_Lift_Pin_Down_POS"].Value = true;
  167. IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
  168. //IO.DI[$"{mod}.DI_RF_Generator_Interlock"].Value = true;
  169. //IO.DI[$"{mod}.DI_Source_RF_Fan"].Value = true;
  170. IO.DI[$"{mod}.DI_RF_HV_Interlock_OK"].Value = true;
  171. IO.DI[$"{mod}.DI_Turbo_Pump_Interlock"].Value = true;
  172. IO.DI[$"{mod}.DI_Liner_Door_Open_Position"].Value = true;
  173. IO.DI[$"{mod}.DI_Liner_Door_Close_Position"].Value = false;
  174. IO.DI[$"{mod}.DI_ESC_Coolant_Inlet_TC_Broken_Alarm"].Value = false;
  175. IO.DI[$"{mod}.DI_Magnets_Coils_ON_FB"].Value = false;
  176. IO.DI[$"{mod}.DI_ESC_Coolant_Outlet_TC_Broken_Alarm"].Value = false;
  177. IO.DI[$"{mod}.DI_Chamber_Pressure_10t_Gauge_Alarm"].Value = false;
  178. IO.DI[$"{mod}.DI_Process_Pressure_1t_Gauge_Alarm"].Value = false;
  179. IO.DI[$"{mod}.DI_Foreline_Pressure_10t_Gauge_Alarm"].Value = false;
  180. IO.DI[$"{mod}.DI_Valve_Control_TC_Broken_Alarm"].Value = false;
  181. IO.DI[$"{mod}.DI_Valve_Heater_On_FB"].Value = false;
  182. IO.DI[$"{mod}.DI_Foreline_TC_Deviation_out_of_range"].Value = false;
  183. IO.DI[$"{mod}.DI_Foreline_Control_TC_Broken_Alarm"].Value = false;
  184. IO.DI[$"{mod}.DI_Foreline_Monitor_TC_Broken_Alarm"].Value = false;
  185. IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = false;
  186. //IO.DI[$"{mod}.DI_CHB_Wall_TC_Deviation_out_of_range"].Value = true;
  187. //IO.DI[$"{mod}.DI_CHB_Wall_Control_TC_Broken_Alarm"].Value = true;
  188. //IO.DI[$"{mod}.DI_CHB_Wall_Monitor_TC_Broken_Alarm"].Value = true;
  189. //IO.DI[$"{mod}.DI_CHB_Wall_Heater_On_FB"].Value = true;
  190. //IO.DI[$"{mod}.DI_CHB_Wall_OT_Switch_Alarm"].Value = true;
  191. IO.DI[$"{mod}.DI_PN2_Pressure_Switch"].Value = true;
  192. IO.DI[$"{mod}.DI_MFC1_Pressure_Switch"].Value = true;
  193. IO.DI[$"{mod}.DI_MFC2_Pressure_Switch"].Value = true;
  194. IO.DI[$"{mod}.DI_MFC3_Pressure_Switch"].Value = true;
  195. IO.DI[$"{mod}.DI_MFC4_Pressure_Switch"].Value = true;
  196. IO.DI[$"{mod}.DI_MFC5_Pressure_Switch"].Value = true;
  197. IO.DI[$"{mod}.DI_MFC6_Pressure_Switch"].Value = true;
  198. IO.DI[$"{mod}.DI_MFC7_Pressure_Switch"].Value = true;
  199. IO.DI[$"{mod}.DI_MFC8_Pressure_Switch"].Value = true;
  200. IO.DI[$"{mod}.DI_MFC9_Pressure_Switch"].Value = true;
  201. IO.DI[$"{mod}.DI_MFC10_Pressure_Switch"].Value = true;
  202. IO.DI[$"{mod}.DI_MFC11_Pressure_Switch"].Value = true;
  203. IO.DI[$"{mod}.DI_MFC12_Pressure_Switch"].Value = true;
  204. IO.DI[$"{mod}.DI_He_Pressure_Switch"].Value = true;
  205. //IO.DI[$"{mod}.DI_ESC_He_Pressure_100t_Gauge_Alarm"].Value = true;
  206. IO.DI[$"{mod}.DI_Gas_Box_Door_Switch"].Value = true;
  207. IO.DI[$"{mod}.DI_Gas_Box_Pressure_Switch"].Value = true;
  208. IO.DI[$"{mod}.DI_Turbo_Pump_Water_Flow_Switch"].Value = true;
  209. IO.DI[$"{mod}.DI_BIAS_RF_Water_Flow_Switch"].Value = true;
  210. IO.DI[$"{mod}.DI_CHB_Coolant_Flow_SW"].Value = true;
  211. //IO.DI[$"{mod}.DI_SOURCE_RF_Water_Flow_Switch"].Value = true;
  212. IO.DI[$"{mod}.DI_TM_ROB_NOT_EXTEND_TO_PM"].Value = true;
  213. IO.DI[$"{mod}.DI_TM_Slit_Door_Closed"].Value = true;
  214. //IO.DI[$"{mod}.DI_Source_Match_interlock_ok"].Value = true;
  215. IO.DI[$"{mod}.DI_Bias_Match_interlock_ok"].Value = true;
  216. //IO.DI[$"{mod}.DI_GASLINE_TC_Deviation_out_of_range"].Value = true;
  217. //IO.DI[$"{mod}.DI_GASLINE_Control_TC_Broken_Alarm"].Value = true;
  218. //IO.DI[$"{mod}.DI_GASLINE_Monitor_TC_Broken_Alarm"].Value = true;
  219. //IO.DI[$"{mod}.DI_GASLINE_Heater_On_FB"].Value = true;
  220. IO.DI[$"{mod}.DI_CTRL_BOX_1#FAN_OK"].Value = true;
  221. IO.DI[$"{mod}.DI_CTRL_BOX_2#FAN_OK"].Value = true;
  222. IO.DI[$"{mod}.DI_POWER_BOX_FAN_OK"].Value = true;
  223. IO.DI[$"{mod}.DI_MAGNET_BOX_FAN_OK"].Value = true;
  224. //// pressure
  225. SetAiValue($"{mod}.AI_Process_Pressure_1t", 100);
  226. //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  227. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  228. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 5001);
  229. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5000);
  230. //// Temperature
  231. SetAiValue($"{mod}.AI_Valve_Control_TC_Temp", 28);
  232. //SetAiValue($"{mod}.AI_Gasline_Control_TC_Temp", 27);
  233. SetAiValue($"{mod}.AI_Fline_Control_TC_Temp", 28);
  234. SetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp", 28);
  235. //SetAiValue($"{mod}.AI_Gasline_Monitor_TC_Temp", 27);
  236. SetAiValue($"{mod}.AI_CHB_Coolant_Inlet_Temp", 28);
  237. SetAiValue($"{mod}.AI_CHB_Coolant_Outlet_Temp", 27);
  238. SetAiValue($"{mod}.AI_ESC_Coolant_Inlet_Temp", 28);
  239. SetAiValue($"{mod}.AI_ESC_Coolant_Outlet_Temp", 28);
  240. // Datetime
  241. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  242. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  243. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  244. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  245. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  246. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  247. break;
  248. case JetChamber.Kepler2300:
  249. // chamber
  250. IO.DI[$"{mod}.DI_Lid_Closed"].Value = true;
  251. IO.DI[$"{mod}.DI_ATM_Switch"].Value = true;
  252. IO.DI[$"{mod}.DI_VAC_Switch"].Value = false;
  253. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  254. IO.DI[$"{mod}.DI_Lift_Pin_Up_POS"].Value = false;
  255. IO.DI[$"{mod}.DI_Lift_Pin_Down_POS"].Value = true;
  256. IO.DI[$"{mod}.DI_Source_RF_Generator_Interlock"].Value = true;
  257. IO.DI[$"{mod}.DI_Source_RF_Fan"].Value = true;
  258. IO.DI[$"{mod}.DI_Turbo_Pump_Interlock"].Value = true;
  259. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = false;
  260. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = true;
  261. IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
  262. IO.DI[$"{mod}.DI_S_Valve_TC_Deviation_out_of_range"].Value = false;
  263. IO.DI[$"{mod}.DI_S_Valve_Control_TC_Broken_Alarm"].Value = false;
  264. IO.DI[$"{mod}.DI_S_Valve_Monitor_TC_Broken_Alarm"].Value = false;
  265. IO.DI[$"{mod}.DI_S_Valve_Heater_On_FB"].Value = false;
  266. IO.DI[$"{mod}.DI_Foreline_TC_Deviation_out_of_range"].Value = false;
  267. IO.DI[$"{mod}.DI_Foreline_Control_TC_Broken_Alarm"].Value = false;
  268. IO.DI[$"{mod}.DI_Foreline_Monitor_TC_Broken_Alarm"].Value = false;
  269. IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = false;
  270. IO.DI[$"{mod}.DI_CHB_Wall_TC_Deviation_out_of_range"].Value = false;
  271. IO.DI[$"{mod}.DI_CHB_Wall_Control_TC_Broken_Alarm"].Value = false;
  272. IO.DI[$"{mod}.DI_CHB_Wall_Monitor_TC_Broken_Alarm"].Value = false;
  273. IO.DI[$"{mod}.DI_CHB_Wall_Heater_On_FB"].Value = false;
  274. IO.DI[$"{mod}.DI_CHB_Wall_OT_Switch_Alarm"].Value = false;
  275. IO.DI[$"{mod}.DI_PN2_Pressure_Switch"].Value = true;
  276. IO.DI[$"{mod}.DI_MFC1_Pressure_Switch"].Value = true;
  277. IO.DI[$"{mod}.DI_MFC2_Pressure_Switch"].Value = true;
  278. IO.DI[$"{mod}.DI_MFC3_Pressure_Switch"].Value = true;
  279. IO.DI[$"{mod}.DI_MFC4_Pressure_Switch"].Value = true;
  280. IO.DI[$"{mod}.DI_MFC5_Pressure_Switch"].Value = true;
  281. IO.DI[$"{mod}.DI_MFC6_Pressure_Switch"].Value = true;
  282. IO.DI[$"{mod}.DI_MFC7_Pressure_Switch"].Value = true;
  283. IO.DI[$"{mod}.DI_MFC8_Pressure_Switch"].Value = true;
  284. IO.DI[$"{mod}.DI_ESC_He_Pressure_Switch"].Value = true;
  285. IO.DI[$"{mod}.DI_ESC_He_Pressure_100t_Guage_Alarm"].Value = false;
  286. IO.DI[$"{mod}.DI_Gas_Box_Door_Switch"].Value = true;
  287. IO.DI[$"{mod}.DI_Gas_Box_Pressure_Switch"].Value = true;
  288. IO.DI[$"{mod}.DI_Source_RF_Water_Flow_Switch"].Value = true;
  289. IO.DI[$"{mod}.DI_S_Valve_OT_Switch_Alarm"].Value = false;
  290. IO.DI[$"{mod}.DI_Foreline_OT_Switch_Alarm"].Value = false;
  291. IO.DI[$"{mod}.DI_Arm_Not_Extend_to_PM"].Value = true;
  292. IO.DI[$"{mod}.DI_EFEM_Door_Colse"].Value = true;
  293. IO.DI[$"{mod}.DI_ESC_Inner_Coolant_Flow_SW"].Value = true;
  294. IO.DI[$"{mod}.DI_ESC_Outer_Coolant_Flow_SW"].Value = true;
  295. //// pressure
  296. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 5001);
  297. //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5000);
  298. SetAiValue($"{mod}.AI_Process_Pressure_100mt", 100);
  299. //SetAiValue($"{mod}.AI_Chamber_Pressure_760t", ATM_PRESSURE);
  300. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  301. //// Temperature
  302. SetAiValue($"{mod}.AI_S_Valve_Control_TC_Temp", 28);
  303. SetAiValue($"{mod}.AI_Foreline_Control_TC_Temp", 28);
  304. SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", 28);
  305. SetAiValue($"{mod}.AI_ESC_inner_coolant_outlet_TC_Temp", 20);
  306. SetAiValue($"{mod}.AI_ESC_outer_coolant_outlet_TC_Temp", 30);
  307. SetAiValue($"{mod}.AI_Top_Plate_coolant_outlet_TC_Temp", 40);
  308. // Datetime
  309. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  310. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  311. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  312. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  313. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  314. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  315. break;
  316. case JetChamber.Kepler2200A:
  317. case JetChamber.Kepler2200B:
  318. IO.DI[$"{mod}.DI_Lid_Closed"].Value = true;
  319. IO.DI[$"{mod}.DI_ATM_Switch"].Value = true;
  320. IO.DI[$"{mod}.DI_VAC_Switch"].Value = false;
  321. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  322. IO.DI[$"{mod}.DI_Source_RF_Generator_Interlock"].Value = true;
  323. IO.DI[$"{mod}.DI_Source_RF_Match_Interlock"].Value = true;
  324. IO.DI[$"{mod}.DI_Turbo_Pump_Interlock"].Value = true;
  325. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = false;
  326. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = true;
  327. IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
  328. IO.DI[$"{mod}.DI_CHB_M-HT_Control_TC_Broken_Alarm"].Value = false;
  329. IO.DI[$"{mod}.DI_CHB_M-HT_Heater_On_FB"].Value = false;
  330. IO.DI[$"{mod}.DI_CHB_M-HT_OT_Switch_Alarm"].Value = false;
  331. IO.DI[$"{mod}.DI_PN2_Pressure_Switch"].Value = true;
  332. IO.DI[$"{mod}.DI_MFC1_Pressure_Switch"].Value = true;
  333. IO.DI[$"{mod}.DI_MFC2_Pressure_Switch"].Value = true;
  334. IO.DI[$"{mod}.DI_MFC3_Pressure_Switch"].Value = true;
  335. IO.DI[$"{mod}.DI_MFC4_Pressure_Switch"].Value = true;
  336. IO.DI[$"{mod}.DI_MFC5_Pressure_Switch"].Value = true;
  337. IO.DI[$"{mod}.DI_MFC6_Pressure_Switch"].Value = true;
  338. IO.DI[$"{mod}.DI_MFC7_Pressure_Switch"].Value = true;
  339. IO.DI[$"{mod}.DI_MFC8_Pressure_Switch"].Value = true;
  340. IO.DI[$"{mod}.DI_N2_Purge_Pressure_Switch"].Value = true;
  341. IO.DI[$"{mod}.DI_GasBox_N2_Flow_Switch"].Value = true;
  342. IO.DI[$"{mod}.DI_Gas_Box_Door_Switch"].Value = true;
  343. IO.DI[$"{mod}.DI_Lid_Up_Limit_Pos_SW"].Value = true;
  344. //IO.DI[$"{mod}.DI_S_Valve_OT_Switch_Alarm"].Value = false;
  345. IO.DI[$"{mod}.DI_Lid_Down_Limit_Pos_SW"].Value = true;
  346. IO.DI[$"{mod}.DI_Gas_Box_Pressure_Switch"].Value = true;
  347. //IO.DI[$"{mod}.DI_TM_Safety_Door_Colse"].Value = true;
  348. IO.DI[$"{mod}.DI_Arm_Not_Extend_to_PM"].Value = true;
  349. //IO.DI[$"{mod}.DI_Source_RF_Water_Flow_Switch"].Value = true;
  350. //// pressure
  351. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 100);
  352. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 100);
  353. SetAiValue($"{mod}.AI_Process_Pressure_2t", 0);
  354. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  355. //// Temperature
  356. // SetAiValue($"{mod}.AI_S_Valve_Control_TC_Temp", 28);
  357. SetAiValue($"{mod}.AI_CHB_M-HT_Control_TC_Temp", 28);
  358. // Datetime
  359. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  360. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  361. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  362. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  363. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  364. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  365. break;
  366. }
  367. }
  368. private void SetKepler2200TMDefaultValue()
  369. {
  370. ModuleName mod = ModuleName.TM;
  371. IO.DI[$"{mod}.DI_TM_Power_On"].Value = true;
  372. IO.DI[$"{mod}.DI_TM_In_Safety"].Value = true;
  373. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  374. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMA"].Value = true;
  375. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMB"].Value = true;
  376. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMC"].Value = true;
  377. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMD"].Value = true;
  378. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_LLA"].Value = true;
  379. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_LLB"].Value = true;
  380. IO.DI[$"{mod}.DI_EFEM_RB_Not_Extend_LLA"].Value = true;
  381. IO.DI[$"{mod}.DI_EFEM_RB_Not_Extend_LLB"].Value = true;
  382. IO.DI[$"{mod}.DI_EFEM_Side_Door_Closed"].Value = true;
  383. IO.DI[$"{mod}.DI_TM_CHB_PCW_Flow_Switch"].Value = true;
  384. IO.DI[$"{mod}.DI_LLA_PCW_Flow_Switch"].Value = true;
  385. IO.DI[$"{mod}.DI_LLB_PCW_Flow_Switch"].Value = true;
  386. IO.DI[$"{mod}.DI_TM_CHB_Door_Closed"].Value = true;
  387. IO.DI[$"{mod}.DI_LLA_Lid_Door_Closed"].Value = true;
  388. IO.DI[$"{mod}.DI_LLB_Lid_Door_Closed"].Value = true;
  389. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_open_Position"].Value = false;
  390. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_close_Position"].Value = true;
  391. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_open_Position"].Value = false;
  392. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_close_Position"].Value = true;
  393. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_open_Position"].Value = false;
  394. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_close_Position"].Value = true;
  395. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_open_Position"].Value = false;
  396. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_close_Position"].Value = true;
  397. IO.DI[$"{mod}.DI_PMA_SlitDoor_Open_Position"].Value = false;
  398. IO.DI[$"{mod}.DI_PMA_SlitDoor_Close_Position"].Value = true;
  399. IO.DI[$"{mod}.DI_PMB_SlitDoor_Open_Position"].Value = false;
  400. IO.DI[$"{mod}.DI_PMB_SlitDoor_Close_Position"].Value = true;
  401. IO.DI[$"{mod}.DI_PMC_SlitDoor_Open_Position"].Value = false;
  402. IO.DI[$"{mod}.DI_PMC_SlitDoor_Close_Position"].Value = true;
  403. IO.DI[$"{mod}.DI_PMD_SlitDoor_Open_Position"].Value = false;
  404. IO.DI[$"{mod}.DI_PMD_SlitDoor_Close_Position"].Value = true;
  405. IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
  406. IO.DI[$"{mod}.DI_Vaccum_Pressure_Switch"].Value = true;
  407. IO.DI[$"{mod}.DI_N2_Pressure_Switch"].Value = true;
  408. IO.DI[$"{mod}.DI_TM_Chamber_VAC_Gauge_Alarm"].Value = false;
  409. IO.DI[$"{mod}.DI_TM_Foreline_VAC_Gauge_Alarm"].Value = false;
  410. IO.DI[$"{mod}.DI_LLA_Chamber_VAC_Gauge_Alarm"].Value = false;
  411. IO.DI[$"{mod}.DI_LLA_Foreline_VAC_Gauge_Alarm"].Value = false;
  412. IO.DI[$"{mod}.DI_LLB_Chamber_VAC_Gauge_Alarm"].Value = false;
  413. IO.DI[$"{mod}.DI_LLB_Foreline_VAC_Gauge_Alarm"].Value = false;
  414. IO.DI[$"{mod}.DI_TM_ATM_Switch"].Value = true;
  415. IO.DI[$"{mod}.DI_LLA_ATM_Switch"].Value = true;
  416. IO.DI[$"{mod}.DI_LLB_ATM_Switch"].Value = true;
  417. IO.DI[$"{mod}.DI_PMA_Lid_Closed"].Value = true;
  418. IO.DI[$"{mod}.DI_PMB_Lid_Closed"].Value = true;
  419. IO.DI[$"{mod}.DI_PMC_Lid_Closed"].Value = true;
  420. IO.DI[$"{mod}.DI_PMD_Lid_Closed"].Value = true;
  421. // Datetime
  422. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  423. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  424. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  425. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  426. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  427. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  428. SetAiValue($"{mod}.AI_TM_Foreline_Pressure", 100);
  429. SetAiValue($"{mod}.AI_LLA_Foreline_Pressure", 150);
  430. SetAiValue($"{mod}.AI_LLB_Foreline_Pressure", 200);
  431. if (SystemConfig.Instance.GetValue<bool>("System.IsATMMode"))
  432. {
  433. SetAiValue($"{mod}.AI_TM_CHB_Pressure", ConvertPressureUnit.ConvertmTorrToPa(760000));
  434. SetAiValue($"{mod}.AI_LLA_CHB_Pressure", ConvertPressureUnit.ConvertmTorrToPa(760000));
  435. SetAiValue($"{mod}.AI_LLB_CHB_Pressure", ConvertPressureUnit.ConvertmTorrToPa(760000));
  436. }
  437. else
  438. {
  439. SetAiValue($"{mod}.AI_TM_CHB_Pressure", 666);
  440. SetAiValue($"{mod}.AI_LLA_CHB_Pressure", 666);
  441. SetAiValue($"{mod}.AI_LLB_CHB_Pressure", 666);
  442. }
  443. }
  444. private void SetKepler2300TMDefaultValue()
  445. {
  446. ModuleName mod = ModuleName.TM;
  447. IO.DI[$"{mod}.DI_TM_Power_On"].Value = true;
  448. IO.DI[$"{mod}.DI_TM_In_Safety"].Value = true;
  449. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  450. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMA"].Value = true;
  451. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMB"].Value = true;
  452. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMC"].Value = true;
  453. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMD"].Value = true;
  454. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_LLA"].Value = true;
  455. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_LLB"].Value = true;
  456. IO.DI[$"{mod}.DI_EFEM_RB_Not_Extend_LLA"].Value = true;
  457. IO.DI[$"{mod}.DI_EFEM_RB_Not_Extend_LLB"].Value = true;
  458. IO.DI[$"{mod}.DI_EFEM_Side_Door_Closed"].Value = true;
  459. IO.DI[$"{mod}.DI_TM_CHB_PCW_Flow_Switch"].Value = true;
  460. IO.DI[$"{mod}.DI_LLA_PCW_Flow_Switch"].Value = true;
  461. IO.DI[$"{mod}.DI_LLB_PCW_Flow_Switch"].Value = true;
  462. IO.DI[$"{mod}.DI_TM_CHB_Door_Closed"].Value = true;
  463. IO.DI[$"{mod}.DI_LLA_Lid_Door_Closed"].Value = true;
  464. IO.DI[$"{mod}.DI_LLB_Lid_Door_Closed"].Value = true;
  465. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_open_Position"].Value = false;
  466. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_close_Position"].Value = true;
  467. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_open_Position"].Value = false;
  468. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_close_Position"].Value = true;
  469. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_open_Position"].Value = false;
  470. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_close_Position"].Value = true;
  471. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_open_Position"].Value = false;
  472. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_close_Position"].Value = true;
  473. IO.DI[$"{mod}.DI_PMA_SlitDoor_Open_Position"].Value = false;
  474. IO.DI[$"{mod}.DI_PMA_SlitDoor_Close_Position"].Value = true;
  475. IO.DI[$"{mod}.DI_PMB_SlitDoor_Open_Position"].Value = false;
  476. IO.DI[$"{mod}.DI_PMB_SlitDoor_Close_Position"].Value = true;
  477. IO.DI[$"{mod}.DI_PMC_SlitDoor_Open_Position"].Value = false;
  478. IO.DI[$"{mod}.DI_PMC_SlitDoor_Close_Position"].Value = true;
  479. IO.DI[$"{mod}.DI_PMD_SlitDoor_Open_Position"].Value = false;
  480. IO.DI[$"{mod}.DI_PMD_SlitDoor_Close_Position"].Value = true;
  481. IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
  482. IO.DI[$"{mod}.DI_Vaccum_Pressure_Switch"].Value = true;
  483. IO.DI[$"{mod}.DI_N2_Pressure_Switch"].Value = true;
  484. IO.DI[$"{mod}.DI_TM_Chamber_VAC_Gauge_Alarm"].Value = false;
  485. IO.DI[$"{mod}.DI_TM_Foreline_VAC_Gauge_Alarm"].Value = false;
  486. IO.DI[$"{mod}.DI_LLA_Chamber_VAC_Gauge_Alarm"].Value = false;
  487. IO.DI[$"{mod}.DI_LLA_Foreline_VAC_Gauge_Alarm"].Value = false;
  488. IO.DI[$"{mod}.DI_LLB_Chamber_VAC_Gauge_Alarm"].Value = false;
  489. IO.DI[$"{mod}.DI_LLB_Foreline_VAC_Gauge_Alarm"].Value = false;
  490. IO.DI[$"{mod}.DI_TM_ATM_Switch"].Value = true;
  491. IO.DI[$"{mod}.DI_LLA_ATM_Switch"].Value = true;
  492. IO.DI[$"{mod}.DI_LLB_ATM_Switch"].Value = true;
  493. IO.DI[$"{mod}.DI_PMA_Lid_Closed"].Value = true;
  494. IO.DI[$"{mod}.DI_PMB_Lid_Closed"].Value = true;
  495. IO.DI[$"{mod}.DI_PMC_Lid_Closed"].Value = true;
  496. IO.DI[$"{mod}.DI_PMD_Lid_Closed"].Value = true;
  497. // Datetime
  498. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  499. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  500. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  501. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  502. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  503. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  504. SetAiValue($"{mod}.AI_TM_Foreline_Pressure", 100);
  505. SetAiValue($"{mod}.AI_LLA_Foreline_Pressure", 150);
  506. SetAiValue($"{mod}.AI_LLB_Foreline_Pressure", 200);
  507. if (SystemConfig.Instance.GetValue<bool>("System.IsATMMode"))
  508. {
  509. SetAiValue($"{mod}.AI_TM_CHB_Pressure", 760000);
  510. SetAiValue($"{mod}.AI_LLA_CHB_Pressure", 760000);
  511. SetAiValue($"{mod}.AI_LLB_CHB_Pressure", 760000);
  512. }
  513. else
  514. {
  515. SetAiValue($"{mod}.AI_TM_CHB_Pressure", 5000);
  516. SetAiValue($"{mod}.AI_LLA_CHB_Pressure", 5002);
  517. SetAiValue($"{mod}.AI_LLB_CHB_Pressure", 5004);
  518. }
  519. }
  520. private void SetSETMDefaultValue()
  521. {
  522. ModuleName mod = ModuleName.SETM;
  523. IO.DI[$"{mod}.DI_System_CDA_Pressure_OK"].Value = true;
  524. IO.DI[$"{mod}.DI_LID_DOOR_CLOSED"].Value = true;
  525. IO.DI[$"{mod}.DI_VCE_SLIT_DOOR_OPEN_ENABLE"].Value = true;
  526. IO.DI[$"{mod}.DI_PMA_SLIT_DOOR_OPEN_ENABLE"].Value = true;
  527. IO.DI[$"{mod}.DI_PMB_SLIT_DOOR_OPEN_ENABLE"].Value = true;
  528. IO.DI[$"{mod}.DI_VCE_ATM_SW"].Value = true;
  529. IO.DI[$"{mod}.DI_TM_ATM_SW"].Value = true;
  530. IO.DI[$"{mod}.DI_VCE_Wafer_Senser"].Value = true;
  531. IO.DI[$"{mod}.DI_PMA_Wafer_Senser"].Value = true;
  532. IO.DI[$"{mod}.DI_PMB_Wafer_Senser"].Value = true;
  533. IO.DI[$"{mod}.DI_PMC_Wafer_Senser"].Value = true;
  534. IO.DI[$"{mod}.DI_AC_RACK_FAN_OK"].Value = true;
  535. IO.DI[$"{mod}.DI_AC_RACK_Smoke_SW1"].Value = false;
  536. IO.DI[$"{mod}.DI_AC_RACK_Smoke_SW2"].Value = false;
  537. IO.DI[$"{mod}.DI_FA_Smoke_SW"].Value = false;
  538. IO.DI[$"{mod}.DI_Gas_Treatment_Alarm"].Value = false;
  539. IO.DI[$"{mod}.DI_SYSTEM_N2_Pressure_SW"].Value = true;
  540. IO.DI[$"{mod}.DI_VCE_TM_Slit_Door_Open_Pos"].Value = false;
  541. IO.DI[$"{mod}.DI_VCE_TM_Slit_Door_Close_Pos"].Value = true;
  542. IO.DI[$"{mod}.DI_TM_PMA_Slit_Door_Open_Pos"].Value = false;
  543. IO.DI[$"{mod}.DI_TM_PMA_Slit_Door_Close_Pos"].Value = true;
  544. IO.DI[$"{mod}.DI_TM_PMB_Slit_Door_Open_Pos"].Value = false;
  545. IO.DI[$"{mod}.DI_TM_PMB_Slit_Door_Close_Pos"].Value = true;
  546. IO.DI[$"{mod}.DI_TM_PMC_Slit_Door_Open_Pos"].Value = false;
  547. IO.DI[$"{mod}.DI_TM_PMC_Slit_Door_Close_Pos"].Value = true;
  548. IO.DI[$"{mod}.DI_TM_HE_Pressure_SW"].Value = true;
  549. IO.DI[$"{mod}.DI_TM_N2_Pressure_SW"].Value = true;
  550. IO.DI[$"{mod}.DI_PMC_SLIT_DOOR_OPEN_ENABLE"].Value = true;
  551. IO.DI[$"{mod}.DI_PCW_Leak_SW"].Value = true;
  552. IO.DI[$"{mod}.DI_TM_CDA_Pressure_SW"].Value = true;
  553. IO.DI[$"{mod}.DI_VCE_VAC_SW"].Value = false;
  554. IO.DI[$"{mod}.DI_TM_VAC_SW"].Value = false;
  555. IO.DI[$"{mod}.DI_TM_ROBOT_NOT_EXTEND_VCE"].Value = true;
  556. IO.DI[$"{mod}.DI_TM_ROBOT_NOT_EXTEND_PMA"].Value = true;
  557. IO.DI[$"{mod}.DI_TM_ROBOT_NOT_EXTEND_PMB"].Value = true;
  558. IO.DI[$"{mod}.DI_TM_ROBOT_NOT_EXTEND_PMC"].Value = true;
  559. SetAiValue($"{mod}.AI_MFC_Flow", 3000);
  560. SetAiValue($"{mod}.AI_VCE_Pressure", 3000);
  561. SetAiValue($"{mod}.AI_Foreline_Pressure", 3000);
  562. SetAiValue($"{mod}.AI_TM_Pressure", 20);
  563. }
  564. private void SetDETMDefaultValue()
  565. {
  566. ModuleName mod = ModuleName.DETM;
  567. IO.DI[$"{mod}.DI_Smif1_Ready_to_load"].Value = true;
  568. IO.DI[$"{mod}.DI_Smif1_Ready_to_unload"].Value = true;
  569. IO.DI[$"{mod}.DI_Smif2_Ready_to_load"].Value = true;
  570. IO.DI[$"{mod}.DI_Smif2_Ready_to_unload"].Value = true;
  571. IO.DI[$"{mod}.DI_PMA_SLIT_DOOR_OPEN_ENABLE"].Value = true;
  572. IO.DI[$"{mod}.DI_PMB_SLIT_DOOR_OPEN_ENABLE"].Value = true;
  573. IO.DI[$"{mod}.DI_PMC_SLIT_DOOR_OPEN_ENABLE"].Value = true;
  574. IO.DI[$"{mod}.DI_ROBOT_TO_VCEA_RETRACT"].Value = true;
  575. IO.DI[$"{mod}.DI_ROBOT_TO_VCEB_RETRACT"].Value = true;
  576. IO.DI[$"{mod}.DI_ROBOT_TO_PMA_RETRACT"].Value = true;
  577. IO.DI[$"{mod}.DI_ROBOT_TO_PMB_RETRACT"].Value = true;
  578. IO.DI[$"{mod}.DI_ROBOT_TO_PMC_RETRACT"].Value = true;
  579. IO.DI[$"{mod}.DI_ROBOT_TO_PMD_RETRACT"].Value = true;
  580. IO.DI[$"{mod}.DI_VCEA_Wafer_Sensor"].Value = true;
  581. IO.DI[$"{mod}.DI_VCEB_Wafer_Sensor"].Value = true;
  582. IO.DI[$"{mod}.DI_PMA_Wafer_Sensor"].Value = true;
  583. IO.DI[$"{mod}.DI_PMB_Wafer_Sensor"].Value = true;
  584. IO.DI[$"{mod}.DI_PMC_Wafer_Sensor"].Value = true;
  585. IO.DI[$"{mod}.DI_PMD_Wafer_Sensor"].Value = true;
  586. IO.DI[$"{mod}.DI_VCEA_SlitDoor_Open_POS"].Value = false;
  587. IO.DI[$"{mod}.DI_VCEA_SlitDoor_Close_POS"].Value = true;
  588. IO.DI[$"{mod}.DI_VCEB_SlitDoor_Open_POS"].Value = false;
  589. IO.DI[$"{mod}.DI_VCEB_SlitDoor_Close_POS"].Value = true;
  590. IO.DI[$"{mod}.DI_TM_N2_1_SW"].Value = true;
  591. IO.DI[$"{mod}.DI_TM_N2_2_SW"].Value = true;
  592. IO.DI[$"{mod}.DI_TM_CDA_SW"].Value = true;
  593. IO.DI[$"{mod}.DI_TM_He_SW"].Value = true;
  594. IO.DI[$"{mod}.DI_LEAK"].Value = true;
  595. IO.DI[$"{mod}.DI_VCEA_ATM_SW"].Value = true;
  596. IO.DI[$"{mod}.DI_VCEB_ATM_SW"].Value = true;
  597. IO.DI[$"{mod}.DI_TM_ATM_SW"].Value = true;
  598. IO.DI[$"{mod}.DI_AC_RACK_FAN_OK"].Value = true;
  599. IO.DI[$"{mod}.DI_AC_RACK_SMOKE_Out1"].Value = false;
  600. IO.DI[$"{mod}.DI_AC_RACK_SMOKE_Out2"].Value = false;
  601. IO.DI[$"{mod}.DI_FACTORY_SMOKE_Out"].Value = false;
  602. IO.DI[$"{mod}.DI_Abnormal_Exhaust_Gas"].Value = true;
  603. IO.DI[$"{mod}.DI_VCEA_Cassette_Present"].Value = true;
  604. IO.DI[$"{mod}.DI_VCEB_Cassette_Present"].Value = true;
  605. IO.DI[$"{mod}.DI_VCEA_ADR_LOCKED"].Value = true;
  606. IO.DI[$"{mod}.DI_VCEB_ADR_LOCKED"].Value = true;
  607. IO.DI[$"{mod}.DI_TM_LID_Close"].Value = true;
  608. IO.DI[$"{mod}.DI_LEFT_SMIF_READY"].Value = true;
  609. IO.DI[$"{mod}.DI_LEFT_SMIF_POD_INPLACE"].Value = true;
  610. IO.DI[$"{mod}.DI_RIGHT_SMIF_POD_INPLACE"].Value = true;
  611. IO.DI[$"{mod}.DI_LEFT_SMIF_ERROR"].Value = true;
  612. IO.DI[$"{mod}.DI_RIGHT_SMIF_ERROR"].Value = true;
  613. IO.DI[$"{mod}.DI_VCEA_EXTEND_ENABLE"].Value = true;
  614. IO.DI[$"{mod}.DI_VCEB_EXTEND_ENABLE"].Value = true;
  615. IO.DI[$"{mod}.DI_PMA_EXTEND_ENABLE"].Value = true;
  616. IO.DI[$"{mod}.DI_PMB_EXTEND_ENABLE"].Value = true;
  617. IO.DI[$"{mod}.DI_PMC_EXTEND_ENABLE"].Value = true;
  618. IO.DI[$"{mod}.DI_Safty_Alarm"].Value = false;
  619. IO.DI[$"{mod}.DI_TM_Soft_Pump"].Value = true;
  620. IO.DI[$"{mod}.DI_TM_Soft_Vent"].Value = true;
  621. SetAiValue($"{mod}.AI_MFC_Flow", 3000);
  622. SetAiValue($"{mod}.AI_Left_VCE_Pressure", 3000);
  623. SetAiValue($"{mod}.AI_Right_VCE_Pressure", 3000);
  624. SetAiValue($"{mod}.AI_VCE_Foreline_Pressure", 20);
  625. SetAiValue($"{mod}.AI_TM_Foreline_Pressure", 20);
  626. SetAiValue($"{mod}.AI_TM_Pressure", 20);
  627. }
  628. private bool OnMonitor()
  629. {
  630. try
  631. {
  632. foreach (var item in jetChambers)
  633. {
  634. switch (item.Value)
  635. {
  636. case JetChamber.Kepler2300:
  637. MonitorSlitDoorInTM(item.Key);
  638. MonitorPin(item.Key);
  639. MonitorPressure_Kepler(item.Key);
  640. //MonitorTemperature(item.Key);
  641. MonitorGas(item.Key);
  642. this.SimulateHe(item.Key);
  643. //MonitorRF(item.Key);
  644. ChangeTime(item.Key);
  645. //MonitorIOPumpCtrl(item.Key);
  646. MonitorLid(item.Key);
  647. break;
  648. case JetChamber.Kepler2200A:
  649. case JetChamber.Kepler2200B:
  650. MonitorSlitDoorInTM(item.Key);
  651. MonitorPressure_Kepler2200(item.Key);
  652. //MonitorTemperature(item.Key);
  653. MonitorGas(item.Key);
  654. // MonitorRF(item.Key);
  655. ChangeTime(item.Key);
  656. //MonitorIOPumpCtrl(item.Key);
  657. MonitorLid(item.Key);
  658. MonitorIOHighTemperatureHeater(item.Key);
  659. MonitorKepler2200Heater(item.Key);
  660. break;
  661. case JetChamber.VenusSE:
  662. MonitorPin(item.Key);
  663. //MonitorVenuSESlitDoor(item.Key);
  664. MonitorSEPressure(item.Key);
  665. MonitorSEGas(item.Key);
  666. ChangeTime(item.Key);
  667. this.SimulateSEHe(item.Key);
  668. break;
  669. case JetChamber.VenusDE:
  670. MonitorPin(item.Key);
  671. MonitorDEGas(item.Key);
  672. //MonitorVenuDESlitDoor(item.Key);
  673. MonitorDEPressure(item.Key);
  674. ChangeTime(item.Key);
  675. MonitorLinerDoor(item.Key);
  676. this.SimulateDEHe(item.Key);
  677. break;
  678. }
  679. }
  680. ChangeTime(ModuleName.TM);
  681. if (type == ConfigType.Kepler2200)
  682. {
  683. MonitorMFSlitDoor();
  684. MonitorMFKepler2200Pressure();
  685. }
  686. else if (type == ConfigType.Kepler2300)
  687. {
  688. MonitorMFSlitDoor();
  689. MonitorMFKepler2300Pressure();
  690. }
  691. else if (type == ConfigType.VenusSE)
  692. {
  693. MonitorSEMFSlitDoor();
  694. MonitorSEMFPressure();
  695. MonitorDEMFSlitDoor();
  696. MonitorDEMFPressure();
  697. }
  698. else if (type == ConfigType.VenusDE)
  699. {
  700. MonitorDEMFSlitDoor();
  701. MonitorDEMFPressure();
  702. }
  703. }
  704. catch (Exception e)
  705. {
  706. LOG.WriteExeption(e);
  707. }
  708. return true;
  709. }
  710. private void ChangeTime(ModuleName mod)
  711. {
  712. // Heartbeat with PLC
  713. SetAiValue($"{mod}.AI_Heartbeat_FB", GetAoValue($"{mod}.AO_Heartbeat"));
  714. SetAiValue($"{mod}.AI_Year", DateTime.Now.Year);
  715. SetAiValue($"{mod}.AI_Month", DateTime.Now.Month);
  716. SetAiValue($"{mod}.AI_Day", DateTime.Now.Day);
  717. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  718. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  719. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  720. }
  721. //void MonitorVenuSESlitDoor(ModuleName mod)
  722. //{
  723. //}
  724. void MonitorSlitDoorInPM(ModuleName mod)
  725. {
  726. // slit door open
  727. if (IO.DO[$"{mod}.DO_Slit_Door_Open"].Value)
  728. {
  729. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = true;
  730. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = false;
  731. }
  732. // slit door close
  733. if (IO.DO[$"{mod}.DO_Slit_Door_Close"].Value)
  734. {
  735. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = false;
  736. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = true;
  737. }
  738. }
  739. void MonitorLinerDoor(ModuleName mod)
  740. {
  741. // slit door open
  742. if (IO.DO[$"{mod}.DO_PM_Liner_Door_Open"].Value)
  743. {
  744. IO.DI[$"{mod}.DI_Liner_Door_Open_Position"].Value = true;
  745. IO.DI[$"{mod}.DI_Liner_Door_Close_Position"].Value = false;
  746. }
  747. // slit door close
  748. if (IO.DO[$"{mod}.DO_PM_Liner_Door_Close"].Value)
  749. {
  750. IO.DI[$"{mod}.DI_Liner_Door_Open_Position"].Value = false;
  751. IO.DI[$"{mod}.DI_Liner_Door_Close_Position"].Value = true;
  752. }
  753. }
  754. void MonitorSlitDoorInTM(ModuleName mod)
  755. {
  756. // slit door open
  757. if (IO.DO[$"TM.DO_{mod}_SlitDoor_Open"].Value)
  758. {
  759. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = true;
  760. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = false;
  761. }
  762. // slit door close
  763. if (IO.DO[$"TM.DO_{mod}_SlitDoor_Close"].Value)
  764. {
  765. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = false;
  766. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = true;
  767. }
  768. }
  769. void MonitorMFSlitDoor()
  770. {
  771. ModuleName mod = ModuleName.TM;
  772. // LLA T door open
  773. if (IO.DO[$"{mod}.DO_LLA_Slit_Door_T_Open"].Value)
  774. {
  775. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_open_Position"].Value = true;
  776. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_close_Position"].Value = false;
  777. }
  778. // LLB T door open
  779. if (IO.DO[$"{mod}.DO_LLB_Slit_Door_T_Open"].Value)
  780. {
  781. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_open_Position"].Value = true;
  782. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_close_Position"].Value = false;
  783. }
  784. // LLA E door open
  785. if (IO.DO[$"{mod}.DO_LLA_Slit_Door_E_Open"].Value)
  786. {
  787. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_open_Position"].Value = true;
  788. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_close_Position"].Value = false;
  789. }
  790. // LLB E door open
  791. if (IO.DO[$"{mod}.DO_LLB_Slit_Door_E_Open"].Value)
  792. {
  793. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_open_Position"].Value = true;
  794. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_close_Position"].Value = false;
  795. }
  796. // LLA T door close
  797. if (IO.DO[$"{mod}.DO_LLA_Slit_Door_T_Close"].Value)
  798. {
  799. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_open_Position"].Value = false;
  800. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_close_Position"].Value = true;
  801. }
  802. // LLB T door close
  803. if (IO.DO[$"{mod}.DO_LLB_Slit_Door_T_Close"].Value)
  804. {
  805. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_open_Position"].Value = false;
  806. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_close_Position"].Value = true;
  807. }
  808. // LLA E door close
  809. if (IO.DO[$"{mod}.DO_LLA_Slit_Door_E_Close"].Value)
  810. {
  811. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_open_Position"].Value = false;
  812. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_close_Position"].Value = true;
  813. }
  814. // LLB E door close
  815. if (IO.DO[$"{mod}.DO_LLB_Slit_Door_E_Close"].Value)
  816. {
  817. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_open_Position"].Value = false;
  818. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_close_Position"].Value = true;
  819. }
  820. // PMA slitdoor door close/open
  821. if (IO.DO[$"{mod}.DO_PMA_SlitDoor_Close"].Value)
  822. {
  823. IO.DI[$"{mod}.DI_PMA_SlitDoor_Open_Position"].Value = false;
  824. IO.DI[$"{mod}.DI_PMA_SlitDoor_Close_Position"].Value = true;
  825. }
  826. if (IO.DO[$"{mod}.DO_PMA_SlitDoor_Open"].Value)
  827. {
  828. IO.DI[$"{mod}.DI_PMA_SlitDoor_Open_Position"].Value = true;
  829. IO.DI[$"{mod}.DI_PMA_SlitDoor_Close_Position"].Value = false;
  830. }
  831. // PMB slitdoor door close/open
  832. if (IO.DO[$"{mod}.DO_PMB_SlitDoor_Close"].Value)
  833. {
  834. IO.DI[$"{mod}.DI_PMB_SlitDoor_Open_Position"].Value = false;
  835. IO.DI[$"{mod}.DI_PMB_SlitDoor_Close_Position"].Value = true;
  836. }
  837. if (IO.DO[$"{mod}.DO_PMB_SlitDoor_Open"].Value)
  838. {
  839. IO.DI[$"{mod}.DI_PMB_SlitDoor_Open_Position"].Value = true;
  840. IO.DI[$"{mod}.DI_PMB_SlitDoor_Close_Position"].Value = false;
  841. }
  842. // PMC slitdoor door close/open
  843. if (IO.DO[$"{mod}.DO_PMC_SlitDoor_Close"].Value)
  844. {
  845. IO.DI[$"{mod}.DI_PMC_SlitDoor_Open_Position"].Value = false;
  846. IO.DI[$"{mod}.DI_PMC_SlitDoor_Close_Position"].Value = true;
  847. }
  848. if (IO.DO[$"{mod}.DO_PMC_SlitDoor_Open"].Value)
  849. {
  850. IO.DI[$"{mod}.DI_PMC_SlitDoor_Open_Position"].Value = true;
  851. IO.DI[$"{mod}.DI_PMC_SlitDoor_Close_Position"].Value = false;
  852. }
  853. // PMD slitdoor door close/open
  854. if (IO.DO[$"{mod}.DO_PMD_SlitDoor_Close"].Value)
  855. {
  856. IO.DI[$"{mod}.DI_PMD_SlitDoor_Open_Position"].Value = false;
  857. IO.DI[$"{mod}.DI_PMD_SlitDoor_Close_Position"].Value = true;
  858. }
  859. if (IO.DO[$"{mod}.DO_PMD_SlitDoor_Open"].Value)
  860. {
  861. IO.DI[$"{mod}.DI_PMD_SlitDoor_Open_Position"].Value = true;
  862. IO.DI[$"{mod}.DI_PMD_SlitDoor_Close_Position"].Value = false;
  863. }
  864. }
  865. void MonitorSEMFSlitDoor()
  866. {
  867. ModuleName mod = ModuleName.SETM;
  868. // VCE T door open
  869. if (IO.DO[$"{mod}.DO_VCE_Slit_Door_Open"].Value)
  870. {
  871. IO.DI[$"{mod}.DI_VCE_TM_Slit_Door_Open_Pos"].Value = true;
  872. IO.DI[$"{mod}.DI_VCE_TM_Slit_Door_Close_Pos"].Value = false;
  873. }
  874. // VCE T door Close
  875. if (IO.DO[$"{mod}.DO_VCE_Slit_Door_Close"].Value)
  876. {
  877. IO.DI[$"{mod}.DI_VCE_TM_Slit_Door_Open_Pos"].Value = false;
  878. IO.DI[$"{mod}.DI_VCE_TM_Slit_Door_Close_Pos"].Value = true;
  879. }
  880. //pma
  881. if (IO.DO[$"{mod}.DO_PMA_Slit_Door_Open"].Value)
  882. {
  883. IO.DI[$"{mod}.DI_TM_PMA_Slit_Door_Open_Pos"].Value = true;
  884. IO.DI[$"{mod}.DI_TM_PMA_Slit_Door_Close_Pos"].Value = false;
  885. }
  886. if (IO.DO[$"{mod}.DO_PMA_Slit_Door_Close"].Value)
  887. {
  888. IO.DI[$"{mod}.DI_TM_PMA_Slit_Door_Open_Pos"].Value = false;
  889. IO.DI[$"{mod}.DI_TM_PMA_Slit_Door_Close_Pos"].Value = true;
  890. }
  891. //pmb
  892. if (IO.DO[$"{mod}.DO_PMB_Slit_Door_Open"].Value)
  893. {
  894. IO.DI[$"{mod}.DI_TM_PMB_Slit_Door_Open_Pos"].Value = true;
  895. IO.DI[$"{mod}.DI_TM_PMB_Slit_Door_Close_Pos"].Value = false;
  896. }
  897. if (IO.DO[$"{mod}.DO_PMB_Slit_Door_Close"].Value)
  898. {
  899. IO.DI[$"{mod}.DI_TM_PMB_Slit_Door_Open_Pos"].Value = false;
  900. IO.DI[$"{mod}.DI_TM_PMB_Slit_Door_Close_Pos"].Value = true;
  901. }
  902. //pmc
  903. if (IO.DO[$"{mod}.DO_PMC_Slit_Door_Open"].Value)
  904. {
  905. IO.DI[$"{mod}.DI_TM_PMC_Slit_Door_Open_Pos"].Value = true;
  906. IO.DI[$"{mod}.DI_TM_PMC_Slit_Door_Close_Pos"].Value = false;
  907. }
  908. if (IO.DO[$"{mod}.DO_PMC_Slit_Door_Close"].Value)
  909. {
  910. IO.DI[$"{mod}.DI_TM_PMC_Slit_Door_Open_Pos"].Value = false;
  911. IO.DI[$"{mod}.DI_TM_PMC_Slit_Door_Close_Pos"].Value = true;
  912. }
  913. }
  914. void MonitorDEMFSlitDoor()
  915. {
  916. ModuleName mod = ModuleName.DETM;
  917. // VCE L door open
  918. if (IO.DO[$"{mod}.DO_VCEA_SlitDoor_Open"].Value)
  919. {
  920. IO.DI[$"{mod}.DI_VCEA_SlitDoor_Open_POS"].Value = true;
  921. IO.DI[$"{mod}.DI_VCEA_SlitDoor_Close_POS"].Value = false;
  922. }
  923. // VCE R door open
  924. if (IO.DO[$"{mod}.DO_VCEB_SlitDoor_Open"].Value)
  925. {
  926. IO.DI[$"{mod}.DI_VCEB_SlitDoor_Open_POS"].Value = true;
  927. IO.DI[$"{mod}.DI_VCEB_SlitDoor_Close_POS"].Value = false;
  928. }
  929. // VCE L door Close
  930. if (IO.DO[$"{mod}.DO_VCEA_SlitDoor_Close"].Value)
  931. {
  932. IO.DI[$"{mod}.DI_VCEA_SlitDoor_Open_POS"].Value = false;
  933. IO.DI[$"{mod}.DI_VCEA_SlitDoor_Close_POS"].Value = true;
  934. }
  935. // VCE R door Close
  936. if (IO.DO[$"{mod}.DO_VCEB_SlitDoor_Close"].Value)
  937. {
  938. IO.DI[$"{mod}.DI_VCEB_SlitDoor_Open_POS"].Value = false;
  939. IO.DI[$"{mod}.DI_VCEB_SlitDoor_Close_POS"].Value = true;
  940. }
  941. //pma
  942. if (IO.DO[$"{mod}.DO_PMA_SlitDoor_Open"].Value)
  943. {
  944. IO.DI[$"{mod}.DI_PMA_SlitDoor_Open_POS"].Value = true;
  945. IO.DI[$"{mod}.DI_PMA_SlitDoor_Close_POS"].Value = false;
  946. }
  947. if (IO.DO[$"{mod}.DO_PMA_SlitDoor_Close"].Value)
  948. {
  949. IO.DI[$"{mod}.DI_PMA_SlitDoor_Open_POS"].Value = false;
  950. IO.DI[$"{mod}.DI_PMA_SlitDoor_Close_POS"].Value = true;
  951. }
  952. //pmb
  953. if (IO.DO[$"{mod}.DO_PMB_SlitDoor_Open"].Value)
  954. {
  955. IO.DI[$"{mod}.DI_PMB_SlitDoor_Open_POS"].Value = true;
  956. IO.DI[$"{mod}.DI_PMB_SlitDoor_Close_POS"].Value = false;
  957. }
  958. if (IO.DO[$"{mod}.DO_PMB_SlitDoor_Close"].Value)
  959. {
  960. IO.DI[$"{mod}.DI_PMB_SlitDoor_Open_POS"].Value = false;
  961. IO.DI[$"{mod}.DI_PMB_SlitDoor_Close_POS"].Value = true;
  962. }
  963. //pmc
  964. if (IO.DO[$"{mod}.DO_PMC_SlitDoor_Open"].Value)
  965. {
  966. IO.DI[$"{mod}.DI_PMC_SlitDoor_Open_POS"].Value = true;
  967. IO.DI[$"{mod}.DI_PMC_SlitDoor_Close_POS"].Value = false;
  968. }
  969. if (IO.DO[$"{mod}.DO_PMC_SlitDoor_Close"].Value)
  970. {
  971. IO.DI[$"{mod}.DI_PMC_SlitDoor_Open_POS"].Value = false;
  972. IO.DI[$"{mod}.DI_PMC_SlitDoor_Close_POS"].Value = true;
  973. }
  974. }
  975. void MonitorPin(ModuleName mod)
  976. {
  977. // lift pin up
  978. if (IO.DO[$"{mod}.DO_Lift_Pin_Up"].Value != IO.DO[$"{mod}.DO_Lift_Pin_Down"].Value)
  979. {
  980. IO.DI[$"{mod}.DI_Lift_Pin_Up_POS"].Value = IO.DO[$"{mod}.DO_Lift_Pin_Up"].Value;
  981. IO.DI[$"{mod}.DI_Lift_Pin_Down_POS"].Value = IO.DO[$"{mod}.DO_Lift_Pin_Down"].Value;
  982. }
  983. }
  984. void MonitorLid(ModuleName mod)
  985. {
  986. // lift pin up
  987. if (IO.DO[$"{mod}.DO_Lid_Up"].Value != IO.DO[$"{mod}.DO_Lid_Down"].Value)
  988. {
  989. IO.DI[$"{mod}.DI_Lid_Closed"].Value = IO.DO[$"{mod}.DO_Lid_Down"].Value;
  990. }
  991. }
  992. void MonitorExtendAndRetract(ModuleName mod)
  993. {
  994. // Extend
  995. _trigLLExtend.CLK = IO.DO[$"{mod}.DO_Loadlock_Arm_Extend"].Value;
  996. if (_trigLLExtend.Q)
  997. {
  998. _trigLLRetract.RST = true;
  999. Thread.Sleep(500);
  1000. IO.DI[$"{mod}.DI_Loadlock_Arm_Extend_POS"].Value = true;
  1001. IO.DI[$"{mod}.DI_Loadlock_Arm_Retract_POS"].Value = false;
  1002. IO.DI[$"{mod}.DI_Small_Wafer_In_POS"].Value = false;
  1003. IO.DI[$"{mod}.DI_Big_Wafer_In_POS"].Value = false;
  1004. }
  1005. // Retract
  1006. _trigLLRetract.CLK = IO.DO[$"{mod}.DO_Loadlock_Arm_Retract"].Value;
  1007. if (_trigLLRetract.Q)
  1008. {
  1009. count++;
  1010. _trigLLExtend.RST = true;
  1011. Thread.Sleep(500);
  1012. IO.DI[$"{mod}.DI_Loadlock_Arm_Extend_POS"].Value = false;
  1013. IO.DI[$"{mod}.DI_Loadlock_Arm_Retract_POS"].Value = true;
  1014. if (count == 1)
  1015. {
  1016. IO.DI[$"{mod}.DI_Small_Wafer_In_POS"].Value = false;
  1017. IO.DI[$"{mod}.DI_Big_Wafer_In_POS"].Value = false;
  1018. }
  1019. else if (count == 2)
  1020. {
  1021. count = 0;
  1022. IO.DI[$"{mod}.DI_Small_Wafer_In_POS"].Value = true;
  1023. IO.DI[$"{mod}.DI_Big_Wafer_In_POS"].Value = false;
  1024. }
  1025. }
  1026. }
  1027. void MonitorPressure(ModuleName mod)
  1028. {
  1029. string sAI_Foreline = "AI_Foreline_Pressure_760t";
  1030. // Loadlock pressure
  1031. string sAI_LoadLockPressure = "AI_LL_Pressure_760t";
  1032. // Foreline
  1033. if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open)
  1034. {
  1035. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(500, 600));
  1036. }
  1037. else
  1038. {
  1039. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(500, 600));
  1040. }
  1041. // PLC 模拟量范围[0,4000], 电压[0, 10V], 压力[0, 760Torr]
  1042. string sAI_ChamberPressure = "AI_Chamber_Pressure_10t";
  1043. string sAI_ProcessPressure = "AI_Chamber_Pressure_Virtual";
  1044. //float chamber_pressure = GetMockChamberPressure(mod);
  1045. //float process_pressure = GetAiValue($"{mod}.AI_Chamber_Pressure_Virtual");
  1046. // soft pump & fast pump
  1047. DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"];
  1048. DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"];
  1049. DOAccessor turbo_pump_vlv = IO.DO[$"{mod}.DO_Turbo_Pump_Pumping_Valve"];
  1050. if (fast_pump_vlv.Value || soft_pump_vlv.Value || turbo_pump_vlv.Value)
  1051. {
  1052. //任意泵打开
  1053. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1054. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1055. if (fast_pump_vlv.Value && soft_pump_vlv.Value)
  1056. {//开双泵
  1057. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1058. {
  1059. float targetChamberPressure = getAiValue_ChamberPressure - 30000 > 0 ? getAiValue_ChamberPressure - 30000 : 0;
  1060. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1061. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1062. }
  1063. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1064. {
  1065. float targetChamberPressure = getAiValue_ProcessPressure - 1500 > 0 ? getAiValue_ProcessPressure - 1500 : 0;
  1066. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1067. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1068. }
  1069. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(15000, 16000));
  1070. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(150, 160));
  1071. }
  1072. else if (fast_pump_vlv.Value)//开
  1073. {
  1074. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1075. {
  1076. float targetChamberPressure = getAiValue_ChamberPressure - 25000 > 0 ? getAiValue_ChamberPressure - 25000 : 0;
  1077. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1078. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1079. }
  1080. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1081. {
  1082. float targetChamberPressure = getAiValue_ProcessPressure - 1300 > 0 ? getAiValue_ProcessPressure - 1300 : 0;
  1083. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1084. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1085. }
  1086. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(12000, 13000));
  1087. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(120, 130));
  1088. }
  1089. else if (soft_pump_vlv.Value)
  1090. {
  1091. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1092. {
  1093. float targetChamberPressure = getAiValue_ChamberPressure - 10000 > 0 ? getAiValue_ChamberPressure - 10000 : 0;
  1094. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1095. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1096. }
  1097. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1098. {
  1099. float targetChamberPressure = getAiValue_ProcessPressure - 1100 > 0 ? getAiValue_ProcessPressure - 1100 : 0;
  1100. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1101. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1102. }
  1103. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(13000, 14000));
  1104. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(100, 110));
  1105. }
  1106. else if (turbo_pump_vlv.Value)
  1107. {
  1108. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1109. if ((getAiValue_ChamberPressure - 500) >= 0)
  1110. SetAiValue($"{mod}.{sAI_ChamberPressure}", getAiValue_ChamberPressure - 500);
  1111. else
  1112. SetAiValue($"{mod}.{sAI_ChamberPressure}", 0);
  1113. if ((getAiValue_ProcessPressure - 500) >= 0)
  1114. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1115. else
  1116. SetAiValue($"{mod}.{sAI_ProcessPressure}", 0);
  1117. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1118. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1119. }
  1120. }
  1121. // fast vent & purge
  1122. DOAccessor vent_vlv = IO.DO[$"{mod}.DO_N2_Valve"];
  1123. //DOAccessor purge_vlv = IO.DO[$"{mod}.DO_Chamber_purge_valve"];
  1124. //if (vent_vlv.Value || purge_vlv.Value)
  1125. //{
  1126. // if (vent_vlv.Value && purge_vlv.Value)
  1127. // {
  1128. // float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1129. // float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1130. // if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1131. // {
  1132. // SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 30000);
  1133. // //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1134. // }
  1135. // else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1136. // {
  1137. // getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1138. // SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1500);
  1139. // SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1500);
  1140. // }
  1141. // //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(45000, 50000));
  1142. // //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(150, 160));
  1143. // }
  1144. // else
  1145. //
  1146. if (vent_vlv.Value)
  1147. {
  1148. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1149. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1150. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1151. {
  1152. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1153. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1154. }
  1155. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1156. {
  1157. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1158. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1159. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1160. }
  1161. else
  1162. {
  1163. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1164. }
  1165. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(25000, 30000));
  1166. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(130, 150));
  1167. }
  1168. // Loadlock Pumping Valve
  1169. DOAccessor Loadlock_pump_vlv = IO.DO[$"{mod}.DO_Loadlock_Pumping_Valve"];
  1170. if (Loadlock_pump_vlv.Value)
  1171. {
  1172. SetAiValue($"{mod}.{sAI_LoadLockPressure}", GetAiValue($"{mod}.{sAI_LoadLockPressure}") - 30000);
  1173. }
  1174. // Loadlock vent
  1175. DOAccessor Loadlock_vent_vlv = IO.DO[$"{mod}.DO_Loadlock_Vent_Valve"];
  1176. if (Loadlock_vent_vlv.Value)
  1177. {
  1178. SetAiValue($"{mod}.{sAI_LoadLockPressure}", GetAiValue($"{mod}.{sAI_LoadLockPressure}") + 30000);
  1179. }
  1180. // 压力值越界,复位
  1181. float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1182. if (chamber_pressure1 > ATM_PRESSURE)
  1183. {
  1184. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  1185. }
  1186. else if (chamber_pressure1 < 20)
  1187. {
  1188. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 20);
  1189. }
  1190. float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1191. if (process_pressure1 > PROCESS_GAUGE)
  1192. {
  1193. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  1194. }
  1195. else if (process_pressure1 < 20)
  1196. {
  1197. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", 20);
  1198. }
  1199. float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}");
  1200. if (foreline_pressure > 10000)
  1201. {
  1202. SetAiValue($"{mod}.AI_Foreline_Pressure_760t", 10000);
  1203. }
  1204. else if (foreline_pressure < 150)
  1205. {
  1206. SetAiValue($"{mod}.AI_Foreline_Pressure_760t", 150);
  1207. }
  1208. // 模拟压力计漂移
  1209. //int p1 = (int)GetMockChamberPressure(mod);
  1210. //int new_p1 = _rd.Next(p1 - 2, p1 + 2);
  1211. //SetAiValue($"{mod}.AI_Chamber_Pressure_760t", new_p1);
  1212. //int p2 = (int)GetAiValue($"{mod}.AI_Foreline_Pressure_10t");
  1213. //int new_p2 = _rd.Next(p2 - 1, p2 + 1);
  1214. //SetAiValue($"{mod}.AI_Foreline_Pressure_10t", new_p2);
  1215. //int p3 = (int)GetAiValue($"{mod}.AI_Chamber_Pressure_Virtual");
  1216. //int new_p3 = _rd.Next(p3 - 1, p3 + 1);
  1217. //SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", new_p3);
  1218. // 根据当前压力值设定信号
  1219. //float chamber_pressure2 = GetMockChamberPressure(mod);
  1220. // ATM switch
  1221. IO.DI[$"{mod}.DI_PM_ATM_SW"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ATM_THRESHOLD;
  1222. // VAC switch
  1223. IO.DI[$"{mod}.DI_PM_VAC_SW"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < VAC_SW_PRESSURE;
  1224. // Throttle valve
  1225. //var pos_sp = IO.AO[$"{mod}.AO_Throttle_Valve_Pressure_Setpoint"].Value;
  1226. //var mock_pos_fb = _rd.Next(pos_sp - 2, pos_sp + 2);
  1227. ////IO.AI[$"{mod}.AI_Throttle_Valve_Real_Pressure"].Value = (short)mock_pos_fb;
  1228. //SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", mock_pos_fb);
  1229. // 压力值
  1230. //if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") < GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"))
  1231. //{
  1232. // short increase = (short)_rd.Next(20, 30);
  1233. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") + increase);
  1234. // if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") > GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"))
  1235. // {
  1236. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"));
  1237. // }
  1238. //}
  1239. //else
  1240. //{
  1241. // short increase = (short)_rd.Next(20, 30);
  1242. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") - increase);
  1243. // if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") < GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"))
  1244. // {
  1245. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"));
  1246. // }
  1247. //}
  1248. //// 位置值
  1249. //if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") < GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"))
  1250. //{
  1251. // short increase = (short)_rd.Next(20, 30);
  1252. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") + increase);
  1253. // if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") > GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"))
  1254. // {
  1255. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"));
  1256. // }
  1257. //}
  1258. //else
  1259. //{
  1260. // short increase = (short)_rd.Next(20, 30);
  1261. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") - increase);
  1262. // if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") < GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"))
  1263. // {
  1264. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"));
  1265. // }
  1266. //}
  1267. }
  1268. void MonitorSEPressure(ModuleName mod)
  1269. {
  1270. string sAI_Foreline = "AI_Foreline_Pressure_10t";
  1271. string sAI_ChamberPressure = "AI_Chamber_Pressure_10t";
  1272. string sAI_ProcessPressure = "AI_Chamber_Pressure_Virtual";
  1273. // Foreline
  1274. if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open)
  1275. {
  1276. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(500, 600));
  1277. }
  1278. else
  1279. {
  1280. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(500, 600));
  1281. }
  1282. // PLC 模拟量范围[0,4000], 电压[0, 10V], 压力[0, 760Torr]
  1283. // soft pump & fast pump
  1284. DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"];
  1285. DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"];
  1286. DOAccessor turbo_pump_vlv = IO.DO[$"{mod}.DO_Turbo_Pump_Pumping_Valve"];
  1287. if (fast_pump_vlv.Value || soft_pump_vlv.Value || turbo_pump_vlv.Value)
  1288. {
  1289. //任意泵打开
  1290. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1291. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1292. if (fast_pump_vlv.Value && soft_pump_vlv.Value)
  1293. {//开双泵
  1294. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1295. {
  1296. float targetChamberPressure = getAiValue_ChamberPressure - 30000 > 0 ? getAiValue_ChamberPressure - 30000 : 0;
  1297. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1298. }
  1299. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1300. {
  1301. float targetChamberPressure = getAiValue_ProcessPressure - 1500 > 0 ? getAiValue_ProcessPressure - 1500 : 0;
  1302. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1303. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1304. }
  1305. }
  1306. else if (fast_pump_vlv.Value)//开
  1307. {
  1308. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1309. {
  1310. float targetChamberPressure = getAiValue_ChamberPressure - 25000 > 0 ? getAiValue_ChamberPressure - 25000 : 0;
  1311. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1312. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1313. }
  1314. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1315. {
  1316. float targetChamberPressure = getAiValue_ProcessPressure - 1300 > 0 ? getAiValue_ProcessPressure - 1300 : 0;
  1317. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1318. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1319. }
  1320. }
  1321. else if (soft_pump_vlv.Value)
  1322. {
  1323. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1324. {
  1325. float targetChamberPressure = getAiValue_ChamberPressure - 10000 > 0 ? getAiValue_ChamberPressure - 10000 : 0;
  1326. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1327. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1328. }
  1329. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1330. {
  1331. float targetChamberPressure = getAiValue_ProcessPressure - 1100 > 0 ? getAiValue_ProcessPressure - 1100 : 0;
  1332. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1333. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1334. }
  1335. }
  1336. else if (turbo_pump_vlv.Value)
  1337. {
  1338. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1339. if ((getAiValue_ChamberPressure - 500) >= 0)
  1340. SetAiValue($"{mod}.{sAI_ChamberPressure}", getAiValue_ChamberPressure - 500);
  1341. else
  1342. SetAiValue($"{mod}.{sAI_ChamberPressure}", 0);
  1343. if ((getAiValue_ProcessPressure - 500) >= 0)
  1344. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1345. else
  1346. SetAiValue($"{mod}.{sAI_ProcessPressure}", 0);
  1347. }
  1348. }
  1349. // fast vent & purge
  1350. DOAccessor vent_vlv = IO.DO[$"{mod}.DO_N2_Valve"];
  1351. if (vent_vlv.Value)
  1352. {
  1353. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1354. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1355. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1356. {
  1357. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1358. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1359. }
  1360. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1361. {
  1362. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1363. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1364. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1365. }
  1366. else
  1367. {
  1368. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1369. }
  1370. }
  1371. // Loadlock Pumping Valve
  1372. // 压力值越界,复位
  1373. float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1374. if (chamber_pressure1 > ATM_PRESSURE)
  1375. {
  1376. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  1377. }
  1378. else if (chamber_pressure1 < 20)
  1379. {
  1380. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5);
  1381. }
  1382. float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1383. if (process_pressure1 > PROCESS_GAUGE)
  1384. {
  1385. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  1386. }
  1387. else if (process_pressure1 < 20)
  1388. {
  1389. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", 5);
  1390. }
  1391. float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}");
  1392. if (foreline_pressure > 1999)
  1393. {
  1394. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 1999);
  1395. }
  1396. else if (foreline_pressure < 150)
  1397. {
  1398. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 150);
  1399. }
  1400. // ATM switch
  1401. IO.DI[$"{mod}.DI_ATM_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ATM_THRESHOLD;
  1402. // VAC switch
  1403. IO.DI[$"{mod}.DI_PM_VAC_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < VAC_SW_PRESSURE;
  1404. }
  1405. void MonitorDEPressure(ModuleName mod)
  1406. {
  1407. string sAI_Foreline = "AI_Foreline_Pressure_10t";
  1408. string sAI_ChamberPressure = "AI_Chamber_Pressure_10t";
  1409. string sAI_ProcessPressure = "AI_Chamber_Pressure_Virtual";
  1410. // Foreline
  1411. if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open)
  1412. {
  1413. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(500, 600));
  1414. }
  1415. else
  1416. {
  1417. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(500, 600));
  1418. }
  1419. // PLC 模拟量范围[0,4000], 电压[0, 10V], 压力[0, 760Torr]
  1420. // soft pump & fast pump
  1421. DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"];
  1422. //DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"];
  1423. DOAccessor turbo_pump_vlv = IO.DO[$"{mod}.DO_Turbo_Pump_Pumping_Valve"];
  1424. if (fast_pump_vlv.Value || turbo_pump_vlv.Value)
  1425. {
  1426. //任意泵打开
  1427. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1428. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1429. if (fast_pump_vlv.Value)
  1430. {//开双泵
  1431. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1432. {
  1433. float targetChamberPressure = getAiValue_ChamberPressure - 25000 > 0 ? getAiValue_ChamberPressure - 25000 : 0;
  1434. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1435. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1436. }
  1437. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1438. {
  1439. float targetChamberPressure = getAiValue_ProcessPressure - 1300 > 0 ? getAiValue_ProcessPressure - 1300 : 0;
  1440. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1441. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1442. }
  1443. }
  1444. else if (turbo_pump_vlv.Value)
  1445. {
  1446. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1447. if ((getAiValue_ChamberPressure - 500) >= 0)
  1448. SetAiValue($"{mod}.{sAI_ChamberPressure}", getAiValue_ChamberPressure - 500);
  1449. else
  1450. SetAiValue($"{mod}.{sAI_ChamberPressure}", 0);
  1451. if ((getAiValue_ProcessPressure - 500) >= 0)
  1452. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1453. else
  1454. SetAiValue($"{mod}.{sAI_ProcessPressure}", 0);
  1455. }
  1456. }
  1457. // fast vent & purge
  1458. DOAccessor vent_vlv = IO.DO[$"{mod}.DO_N2_Valve"];
  1459. if (vent_vlv.Value)
  1460. {
  1461. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1462. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1463. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1464. {
  1465. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1466. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1467. }
  1468. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1469. {
  1470. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1471. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1472. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1473. }
  1474. else
  1475. {
  1476. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1477. }
  1478. }
  1479. // Loadlock Pumping Valve
  1480. // 压力值越界,复位
  1481. float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1482. if (chamber_pressure1 > ATM_PRESSURE)
  1483. {
  1484. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  1485. }
  1486. else if (chamber_pressure1 < 20)
  1487. {
  1488. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5);
  1489. }
  1490. float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1491. if (process_pressure1 > PROCESS_GAUGE)
  1492. {
  1493. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  1494. }
  1495. else if (process_pressure1 < 20)
  1496. {
  1497. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", 5);
  1498. }
  1499. float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}");
  1500. if (foreline_pressure > 10000)
  1501. {
  1502. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 10000);
  1503. }
  1504. else if (foreline_pressure < 150)
  1505. {
  1506. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 150);
  1507. }
  1508. // ATM switch
  1509. IO.DI[$"{mod}.DI_ATM_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ATM_THRESHOLD;
  1510. // VAC switch
  1511. IO.DI[$"{mod}.DI_PM_VAC_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < VAC_SW_PRESSURE;
  1512. }
  1513. void MonitorPressure_Kepler(ModuleName mod)
  1514. {
  1515. string sAI_Foreline = "AI_Foreline_Pressure_10t";
  1516. if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open)
  1517. {
  1518. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(500, 600));
  1519. }
  1520. else
  1521. {
  1522. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(500, 600));
  1523. }
  1524. // PLC 模拟量范围[0,4000], 电压[0, 10V], 压力[0, 760Torr]
  1525. string sAI_ChamberPressure = "AI_Chamber_Pressure_10t";
  1526. string sAI_ProcessPressure = "AI_Chamber_Pressure_Virtual";
  1527. //float chamber_pressure = GetMockChamberPressure(mod);
  1528. //float process_pressure = GetAiValue($"{mod}.AI_Chamber_Pressure_Virtual");
  1529. // soft pump & fast pump
  1530. DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"];
  1531. DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"];
  1532. DOAccessor turbo_pump_vlv = IO.DO[$"{mod}.DO_Turbo_Pump_Pumping_Valve"];
  1533. if (fast_pump_vlv.Value || soft_pump_vlv.Value || turbo_pump_vlv.Value)
  1534. {
  1535. //任意泵打开
  1536. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1537. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1538. if (fast_pump_vlv.Value && soft_pump_vlv.Value)
  1539. {//开双泵
  1540. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1541. {
  1542. float targetChamberPressure = getAiValue_ChamberPressure - 30000 > 0 ? getAiValue_ChamberPressure - 30000 : 0;
  1543. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1544. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1545. }
  1546. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1547. {
  1548. float targetChamberPressure = getAiValue_ProcessPressure - 1500 > 0 ? getAiValue_ProcessPressure - 1500 : 0;
  1549. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1550. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1551. }
  1552. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(15000, 16000));
  1553. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(150, 160));
  1554. }
  1555. else if (fast_pump_vlv.Value)//开
  1556. {
  1557. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1558. {
  1559. float targetChamberPressure = getAiValue_ChamberPressure - 25000 > 0 ? getAiValue_ChamberPressure - 25000 : 0;
  1560. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1561. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1562. }
  1563. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1564. {
  1565. float targetChamberPressure = getAiValue_ProcessPressure - 1300 > 0 ? getAiValue_ProcessPressure - 1300 : 0;
  1566. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1567. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1568. }
  1569. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(12000, 13000));
  1570. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(120, 130));
  1571. }
  1572. else if (soft_pump_vlv.Value)
  1573. {
  1574. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1575. {
  1576. float targetChamberPressure = getAiValue_ChamberPressure - 10000 > 0 ? getAiValue_ChamberPressure - 10000 : 0;
  1577. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1578. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1579. }
  1580. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1581. {
  1582. float targetChamberPressure = getAiValue_ProcessPressure - 1100 > 0 ? getAiValue_ProcessPressure - 1100 : 0;
  1583. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1584. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1585. }
  1586. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(13000, 14000));
  1587. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(100, 110));
  1588. }
  1589. else if (turbo_pump_vlv.Value)
  1590. {
  1591. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1592. if ((getAiValue_ChamberPressure - 500) >= 0)
  1593. SetAiValue($"{mod}.{sAI_ChamberPressure}", getAiValue_ChamberPressure - 500);
  1594. else
  1595. SetAiValue($"{mod}.{sAI_ChamberPressure}", 0);
  1596. if ((getAiValue_ProcessPressure - 500) >= 0)
  1597. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1598. else
  1599. SetAiValue($"{mod}.{sAI_ProcessPressure}", 0);
  1600. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1601. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1602. }
  1603. }
  1604. // fast vent & purge
  1605. DOAccessor vent_vlv = IO.DO[$"{mod}.DO_N2_Valve"];
  1606. if (vent_vlv.Value)
  1607. {
  1608. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1609. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1610. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1611. {
  1612. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1613. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1614. }
  1615. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1616. {
  1617. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1618. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1619. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1620. }
  1621. else
  1622. {
  1623. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1624. }
  1625. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(25000, 30000));
  1626. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(130, 150));
  1627. }
  1628. // Loadlock Pumping Valve
  1629. // 压力值越界,复位
  1630. float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1631. if (chamber_pressure1 > ATM_PRESSURE)
  1632. {
  1633. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  1634. }
  1635. else if (chamber_pressure1 < 20)
  1636. {
  1637. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 20);
  1638. }
  1639. float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1640. if (process_pressure1 > PROCESS_GAUGE)
  1641. {
  1642. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  1643. }
  1644. else if (process_pressure1 < 20)
  1645. {
  1646. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", 20);
  1647. }
  1648. float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}");
  1649. if (foreline_pressure > 10000)
  1650. {
  1651. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 10000);
  1652. }
  1653. else if (foreline_pressure < 150)
  1654. {
  1655. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 150);
  1656. }
  1657. // ATM switch
  1658. IO.DI[$"{mod}.DI_ATM_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ATM_THRESHOLD;
  1659. // VAC switch
  1660. IO.DI[$"{mod}.DI_VAC_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < VAC_SW_PRESSURE;
  1661. }
  1662. void MonitorPressure_Kepler2200(ModuleName mod)
  1663. {
  1664. string sAI_Foreline = "AI_Foreline_Pressure_10t";
  1665. if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open)
  1666. {
  1667. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(50, 60));
  1668. }
  1669. else
  1670. {
  1671. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(50, 60));
  1672. }
  1673. //SetAiValue($"{mod}.{sAI_Foreline}", 3000);
  1674. // PLC 模拟量范围[0,4000], 电压[0, 10V], 压力[0, 760Torr]
  1675. string sAI_ChamberPressure = "AI_Chamber_Pressure_10t";
  1676. string sAI_ProcessPressure = "AI_Chamber_Pressure_Virtual";
  1677. //float chamber_pressure = GetMockChamberPressure(mod);
  1678. //float process_pressure = GetAiValue($"{mod}.AI_Chamber_Pressure_Virtual");
  1679. // soft pump & fast pump
  1680. DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"];
  1681. DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"];
  1682. DOAccessor turbo_pump_vlv = IO.DO[$"{mod}.DO_Turbo_Pump_Pumping_Valve"];
  1683. if (fast_pump_vlv.Value || soft_pump_vlv.Value || turbo_pump_vlv.Value)
  1684. {
  1685. //任意泵打开
  1686. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1687. //float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1688. if (fast_pump_vlv.Value && soft_pump_vlv.Value)
  1689. {
  1690. //开双泵
  1691. if ((getAiValue_ChamberPressure - 12000) >= 0)
  1692. {
  1693. SetAiValue($"{mod}.{sAI_ChamberPressure}", getAiValue_ChamberPressure - 12000);
  1694. }
  1695. else
  1696. {
  1697. SetAiValue($"{mod}.{sAI_ChamberPressure}", 0);
  1698. }
  1699. //if (getAiValue_ChamberPressure > 1000)
  1700. //{
  1701. // float targetChamberPressure = ConvertPressureUnit.ConvertmTorrToPa( getAiValue_ChamberPressure - 3000 > 0 ? getAiValue_ChamberPressure - 3000 : 0);
  1702. // SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1703. // //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1704. //}
  1705. //else if ( getAiValue_ChamberPressure <= 1000)
  1706. //{
  1707. // float targetChamberPressure = ConvertPressureUnit.ConvertmTorrToPa(getAiValue_ProcessPressure - 150 > 0 ? getAiValue_ProcessPressure - 150 : 0);
  1708. // SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1709. // SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1710. //}
  1711. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(15000, 16000));
  1712. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(150, 160));
  1713. }
  1714. else if (fast_pump_vlv.Value)//开
  1715. {
  1716. if ((getAiValue_ChamberPressure - 8000) >= 0)
  1717. SetAiValue($"{mod}.{sAI_ChamberPressure}", getAiValue_ChamberPressure - 8000);
  1718. else
  1719. SetAiValue($"{mod}.{sAI_ChamberPressure}", 0);
  1720. }
  1721. else if (soft_pump_vlv.Value)
  1722. {
  1723. if ((getAiValue_ChamberPressure - 4000) >= 0)
  1724. {
  1725. SetAiValue($"{mod}.{sAI_ChamberPressure}", getAiValue_ChamberPressure - 4000);
  1726. }
  1727. else
  1728. {
  1729. SetAiValue($"{mod}.{sAI_ChamberPressure}", 0);
  1730. }
  1731. //if (getAiValue_ChamberPressure > 5000)
  1732. //{
  1733. // float targetChamberPressure = ConvertPressureUnit.ConvertmTorrToPa(getAiValue_ChamberPressure - 1000 > 0 ? getAiValue_ChamberPressure - 1000 : 0);
  1734. // SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1735. // //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1736. //}
  1737. //else if (getAiValue_ChamberPressure <= 1000)
  1738. //{
  1739. // float targetChamberPressure = ConvertPressureUnit.ConvertmTorrToPa(getAiValue_ProcessPressure - 110 > 0 ? getAiValue_ProcessPressure - 110 : 0);
  1740. // SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1741. // SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1742. //}
  1743. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(13000, 14000));
  1744. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(100, 110));
  1745. }
  1746. else if (turbo_pump_vlv.Value)
  1747. {
  1748. if ((getAiValue_ChamberPressure - 50) >= 0)
  1749. SetAiValue($"{mod}.{sAI_ChamberPressure}", getAiValue_ChamberPressure - 50);
  1750. else
  1751. SetAiValue($"{mod}.{sAI_ChamberPressure}", 0);
  1752. }
  1753. }
  1754. // fast vent & purge
  1755. DOAccessor vent_vlv = IO.DO[$"{mod}.DO_N2_Valve"];
  1756. DOAccessor gas_final_vlv = IO.DO[$"{mod}.DO_Gas_Final_Valve"];
  1757. if (vent_vlv.Value && gas_final_vlv.Value)
  1758. {
  1759. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1760. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1761. if (getAiValue_ChamberPressure > 1000)
  1762. {
  1763. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1764. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1765. }
  1766. else if (getAiValue_ChamberPressure <= 1000)
  1767. {
  1768. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1769. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 130);
  1770. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 130);
  1771. }
  1772. else
  1773. {
  1774. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 2500);
  1775. }
  1776. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(25000, 30000));
  1777. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(130, 150));
  1778. }
  1779. // Loadlock Pumping Valve
  1780. // 压力值越界,复位
  1781. float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1782. if (chamber_pressure1 > ConvertPressureUnit.ConvertmTorrToPa(ATM_PRESSURE))
  1783. {
  1784. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ConvertPressureUnit.ConvertmTorrToPa(ATM_PRESSURE));
  1785. }
  1786. else if (chamber_pressure1 < 20)
  1787. {
  1788. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 20);
  1789. }
  1790. //float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1791. //if (process_pressure1 > ConvertPressureUnit.ConvertmTorrToPa(PROCESS_GAUGE))
  1792. //{
  1793. // SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  1794. //}
  1795. //else if (process_pressure1 < 20)
  1796. //{
  1797. // SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", 20);
  1798. //}
  1799. float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}");
  1800. if (foreline_pressure > 1000)
  1801. {
  1802. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 1000);
  1803. }
  1804. else if (foreline_pressure < 15)
  1805. {
  1806. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 15);
  1807. }
  1808. // ATM switch
  1809. IO.DI[$"{mod}.DI_ATM_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ConvertPressureUnit.ConvertmTorrToPa(ATM_THRESHOLD);
  1810. // VAC switch
  1811. IO.DI[$"{mod}.DI_VAC_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < ConvertPressureUnit.ConvertmTorrToPa(VAC_SW_PRESSURE);
  1812. SetAiValue($"{mod}.AI_Process_Pressure_2t", 0);
  1813. //var chamberPressure = GetAiValue($"{mod}.AI_Chamber_Pressure_10t");
  1814. //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ConvertPressureUnit.ConvertmTorrToPa( GetAiValue($"{mod}.AI_Chamber_Pressure_10t")));
  1815. //SetAiValue($"{mod}.AI_Foreline_Pressure_10t", ConvertPressureUnit.ConvertmTorrToPa(GetAiValue($"{mod}.AI_Foreline_Pressure_10t")));
  1816. }
  1817. void MonitorSEMFPressure()
  1818. {
  1819. ModuleName mod = ModuleName.SETM;
  1820. string VCE_ChamberPressure = "AI_VCE_Pressure";
  1821. string TM_AI_ChamberPressure = "AI_TM_Pressure";
  1822. DOAccessor TM_fast_pump_vlv = IO.DO[$"{mod}.DO_TM_Fast_Pumping"];
  1823. DOAccessor TM_soft_pump_vlv = IO.DO[$"{mod}.DO_TM_Soft_Pumping"];
  1824. DOAccessor TM_fast_Vent_vlv = IO.DO[$"{mod}.DO_TM_Fast_Vent"];
  1825. DOAccessor TM_soft_Vent_vlv = IO.DO[$"{mod}.DO_TM_Soft_Vent"];
  1826. DOAccessor VCE_fast_pump_vlv = IO.DO[$"{mod}.DO_VCE_Fast_Pumping"];
  1827. DOAccessor VCE_soft_pump_vlv = IO.DO[$"{mod}.DO_VCE_Soft_Pumping"];
  1828. DOAccessor VCE_fast_Vent_vlv = IO.DO[$"{mod}.DO_VCE_Fast_Vent"];
  1829. DOAccessor VCE_soft_Vent_vlv = IO.DO[$"{mod}.DO_VCE_Soft_Vent"];
  1830. float getAiValue_VCE_ChamberPressure = GetAiValue($"{mod}.{VCE_ChamberPressure}");
  1831. float getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  1832. if (TM_fast_pump_vlv.Value || TM_soft_pump_vlv.Value)
  1833. {
  1834. if (getAiValue_TM_ChamberPressure > 10000)
  1835. {
  1836. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 30000);
  1837. }
  1838. else if (getAiValue_TM_ChamberPressure <= 10000)
  1839. {
  1840. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 1500);
  1841. }
  1842. }
  1843. if (TM_fast_Vent_vlv.Value || TM_soft_Vent_vlv.Value)
  1844. {
  1845. if (getAiValue_TM_ChamberPressure > 10000)
  1846. {
  1847. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 30000);
  1848. }
  1849. else if (getAiValue_TM_ChamberPressure <= 10000)
  1850. {
  1851. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 1500);
  1852. }
  1853. }
  1854. if (VCE_fast_pump_vlv.Value || VCE_soft_pump_vlv.Value)
  1855. {
  1856. if (getAiValue_VCE_ChamberPressure > 10000)
  1857. {
  1858. SetAiValue($"{mod}.{VCE_ChamberPressure}", GetAiValue($"{mod}.{VCE_ChamberPressure}") - 30000);
  1859. }
  1860. else if (getAiValue_VCE_ChamberPressure <= 10000)
  1861. {
  1862. SetAiValue($"{mod}.{VCE_ChamberPressure}", GetAiValue($"{mod}.{VCE_ChamberPressure}") - 1500);
  1863. }
  1864. }
  1865. if (VCE_fast_Vent_vlv.Value || VCE_soft_Vent_vlv.Value)
  1866. {
  1867. if (getAiValue_VCE_ChamberPressure > 10000)
  1868. {
  1869. SetAiValue($"{mod}.{VCE_ChamberPressure}", GetAiValue($"{mod}.{VCE_ChamberPressure}") + 30000);
  1870. }
  1871. else if (getAiValue_VCE_ChamberPressure <= 10000)
  1872. {
  1873. SetAiValue($"{mod}.{VCE_ChamberPressure}", GetAiValue($"{mod}.{VCE_ChamberPressure}") + 1500);
  1874. }
  1875. }
  1876. getAiValue_VCE_ChamberPressure = GetAiValue($"{mod}.{VCE_ChamberPressure}");
  1877. if (getAiValue_VCE_ChamberPressure > ATM_PRESSURE)
  1878. {
  1879. SetAiValue($"{mod}.{VCE_ChamberPressure}", ATM_PRESSURE);
  1880. }
  1881. else if (getAiValue_VCE_ChamberPressure < 20)
  1882. {
  1883. SetAiValue($"{mod}.{VCE_ChamberPressure}", 20);
  1884. }
  1885. getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  1886. if (getAiValue_TM_ChamberPressure > ATM_PRESSURE)
  1887. {
  1888. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", ATM_PRESSURE);
  1889. }
  1890. else if (getAiValue_TM_ChamberPressure < 20)
  1891. {
  1892. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", 20);
  1893. }
  1894. IO.DI[$"{mod}.DI_VCE_VAC_SW"].Value = GetAiValue($"{mod}.{VCE_ChamberPressure}") < VAC_SW_PRESSURE;
  1895. // VAC switch
  1896. IO.DI[$"{mod}.DI_TM_VAC_SW"].Value = GetAiValue($"{mod}.{TM_AI_ChamberPressure}") < VAC_SW_PRESSURE;
  1897. }
  1898. void MonitorDEMFPressure()
  1899. {
  1900. ModuleName mod = ModuleName.DETM;
  1901. string AI_Left_VCE_Pressure = "AI_Left_VCE_Pressure";
  1902. string AI_Right_VCE_Pressure = "AI_Right_VCE_Pressure";
  1903. string TM_AI_ChamberPressure = "AI_TM_Pressure";
  1904. DOAccessor TM_fast_pump_vlv = IO.DO[$"{mod}.DO_TM_Fast_Pump"];
  1905. DOAccessor TM_soft_pump_vlv = IO.DO[$"{mod}.DO_TM_Soft_Pump"];
  1906. DOAccessor TM_fast_Vent_vlv = IO.DO[$"{mod}.DO_TM_Fast_Vent"];
  1907. DOAccessor TM_soft_Vent_vlv = IO.DO[$"{mod}.DO_TM_Soft_Vent"];
  1908. DOAccessor DO_VCEA_Fast_Pump = IO.DO[$"{mod}.DO_VCEA_Fast_Pump"];
  1909. DOAccessor DO_VCEA_Soft_Pump = IO.DO[$"{mod}.DO_VCEA_Soft_Pump"];
  1910. DOAccessor DO_VCEB_Fast_Pump = IO.DO[$"{mod}.DO_VCEB_Fast_Pump"];
  1911. DOAccessor DO_VCEB_Soft_Pump = IO.DO[$"{mod}.DO_VCEB_Soft_Pump"];
  1912. DOAccessor DO_VCEA_Fast_Vent = IO.DO[$"{mod}.DO_VCEA_Fast_Vent"];
  1913. DOAccessor DO_VCEA_Soft_Vent = IO.DO[$"{mod}.DO_VCEA_Soft_Vent"];
  1914. DOAccessor DO_VCEB_Fast_Vent = IO.DO[$"{mod}.DO_VCEB_Fast_Vent"];
  1915. DOAccessor DO_VCEB_Soft_Vent = IO.DO[$"{mod}.DO_VCEB_Soft_Vent"];
  1916. float getAiValue_AI_Left_VCE_Pressure = GetAiValue($"{mod}.{AI_Left_VCE_Pressure}");
  1917. float getAiValue_AI_Right_VCE_Pressure = GetAiValue($"{mod}.{AI_Right_VCE_Pressure}");
  1918. float getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  1919. if (DO_VCEA_Fast_Pump.Value || DO_VCEA_Soft_Pump.Value)
  1920. {
  1921. if (getAiValue_AI_Left_VCE_Pressure > 10000)
  1922. {
  1923. SetAiValue($"{mod}.{AI_Left_VCE_Pressure}", GetAiValue($"{mod}.{AI_Left_VCE_Pressure}") - 30000);
  1924. }
  1925. else if (getAiValue_AI_Left_VCE_Pressure <= 10000)
  1926. {
  1927. SetAiValue($"{mod}.{AI_Left_VCE_Pressure}", GetAiValue($"{mod}.{AI_Left_VCE_Pressure}") - 1500);
  1928. }
  1929. }
  1930. if (DO_VCEB_Fast_Pump.Value || DO_VCEB_Soft_Pump.Value)
  1931. {
  1932. if (getAiValue_AI_Right_VCE_Pressure > 10000)
  1933. {
  1934. SetAiValue($"{mod}.{AI_Right_VCE_Pressure}", GetAiValue($"{mod}.{AI_Right_VCE_Pressure}") - 30000);
  1935. }
  1936. else if (getAiValue_AI_Right_VCE_Pressure <= 10000)
  1937. {
  1938. SetAiValue($"{mod}.{AI_Right_VCE_Pressure}", GetAiValue($"{mod}.{AI_Right_VCE_Pressure}") - 1500);
  1939. }
  1940. }
  1941. if (TM_fast_pump_vlv.Value || TM_soft_pump_vlv.Value)
  1942. {
  1943. if (getAiValue_TM_ChamberPressure > 10000)
  1944. {
  1945. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 30000);
  1946. }
  1947. else if (getAiValue_TM_ChamberPressure <= 10000)
  1948. {
  1949. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 1500);
  1950. }
  1951. }
  1952. if (DO_VCEA_Fast_Vent.Value || DO_VCEA_Soft_Vent.Value)
  1953. {
  1954. if (getAiValue_AI_Left_VCE_Pressure > 10000)
  1955. {
  1956. SetAiValue($"{mod}.{AI_Left_VCE_Pressure}", GetAiValue($"{mod}.{AI_Left_VCE_Pressure}") + 30000);
  1957. }
  1958. else if (getAiValue_AI_Left_VCE_Pressure <= 10000)
  1959. {
  1960. SetAiValue($"{mod}.{AI_Left_VCE_Pressure}", GetAiValue($"{mod}.{AI_Left_VCE_Pressure}") + 1500);
  1961. }
  1962. }
  1963. if (DO_VCEB_Fast_Vent.Value || DO_VCEB_Soft_Vent.Value)
  1964. {
  1965. if (getAiValue_AI_Right_VCE_Pressure > 10000)
  1966. {
  1967. SetAiValue($"{mod}.{AI_Right_VCE_Pressure}", GetAiValue($"{mod}.{AI_Right_VCE_Pressure}") + 30000);
  1968. }
  1969. else if (getAiValue_AI_Right_VCE_Pressure <= 10000)
  1970. {
  1971. SetAiValue($"{mod}.{AI_Right_VCE_Pressure}", GetAiValue($"{mod}.{AI_Right_VCE_Pressure}") + 1500);
  1972. }
  1973. }
  1974. if (TM_fast_Vent_vlv.Value || TM_soft_Vent_vlv.Value)
  1975. {
  1976. if (getAiValue_TM_ChamberPressure > 10000)
  1977. {
  1978. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 30000);
  1979. }
  1980. else if (getAiValue_TM_ChamberPressure <= 10000)
  1981. {
  1982. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 1500);
  1983. }
  1984. }
  1985. getAiValue_AI_Left_VCE_Pressure = GetAiValue($"{mod}.{AI_Left_VCE_Pressure}");
  1986. if (getAiValue_AI_Left_VCE_Pressure > ATM_PRESSURE)
  1987. {
  1988. SetAiValue($"{mod}.{AI_Left_VCE_Pressure}", ATM_PRESSURE);
  1989. }
  1990. else if (getAiValue_AI_Left_VCE_Pressure < 20)
  1991. {
  1992. SetAiValue($"{mod}.{AI_Left_VCE_Pressure}", 20);
  1993. }
  1994. getAiValue_AI_Right_VCE_Pressure = GetAiValue($"{mod}.{AI_Right_VCE_Pressure}");
  1995. if (getAiValue_AI_Right_VCE_Pressure > ATM_PRESSURE)
  1996. {
  1997. SetAiValue($"{mod}.{AI_Right_VCE_Pressure}", ATM_PRESSURE);
  1998. }
  1999. else if (getAiValue_AI_Right_VCE_Pressure < 20)
  2000. {
  2001. SetAiValue($"{mod}.{AI_Right_VCE_Pressure}", 20);
  2002. }
  2003. getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  2004. if (getAiValue_TM_ChamberPressure > ATM_PRESSURE)
  2005. {
  2006. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", ATM_PRESSURE);
  2007. }
  2008. else if (getAiValue_TM_ChamberPressure < 20)
  2009. {
  2010. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", 20);
  2011. }
  2012. // ATM switch
  2013. IO.DI[$"{mod}.DI_TM_ATM_SW"].Value = GetAiValue($"{mod}.{TM_AI_ChamberPressure}") > ATM_THRESHOLD;
  2014. // VAC switch
  2015. // ATM switch
  2016. IO.DI[$"{mod}.DI_VCEA_ATM_SW"].Value = GetAiValue($"{mod}.{AI_Left_VCE_Pressure}") > ATM_THRESHOLD;
  2017. // ATM switch
  2018. IO.DI[$"{mod}.DI_VCEB_ATM_SW"].Value = GetAiValue($"{mod}.{AI_Right_VCE_Pressure}") > ATM_THRESHOLD;
  2019. }
  2020. void MonitorMFKepler2200Pressure()
  2021. {
  2022. //if (SimulatorJetTM.CurrentTM == JetTMType.Venus)
  2023. //{
  2024. string LLA_AI_ChamberPressure = "AI_LLA_CHB_Pressure";
  2025. string LLB_AI_ChamberPressure = "AI_LLB_CHB_Pressure";
  2026. string TM_AI_ChamberPressure = "AI_TM_CHB_Pressure";
  2027. ModuleName mod = ModuleName.TM;
  2028. DOAccessor LLA_fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve_LLA"];
  2029. DOAccessor LLA_soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve_LLA"];
  2030. DOAccessor LLB_fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve_LLB"];
  2031. DOAccessor LLB_soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve_LLB"];
  2032. DOAccessor TM_fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve_TM"];
  2033. DOAccessor TM_soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve_TM"];
  2034. DOAccessor LLA_fast_Vent_vlv = IO.DO[$"{mod}.DO_Vent_Valve_LLA"];
  2035. DOAccessor LLA_soft_Vent_vlv = IO.DO[$"{mod}.DO_Purge_Valve_LLA"];
  2036. DOAccessor LLB_fast_Vent_vlv = IO.DO[$"{mod}.DO_Vent_Valve_LLB"];
  2037. DOAccessor LLB_soft_Vent_vlv = IO.DO[$"{mod}.DO_Purge_Valve_LLB"];
  2038. DOAccessor TM_fast_Vent_vlv = IO.DO[$"{mod}.DO_Vent_Valve_TM"];
  2039. DOAccessor TM_soft_Vent_vlv = IO.DO[$"{mod}.DO_Purge_Valve_TM"];
  2040. float getAiValue_LLA_ChamberPressure = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}");
  2041. float getAiValue_LLB_ChamberPressure = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}");
  2042. float getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  2043. if (LLA_fast_pump_vlv.Value || LLA_soft_pump_vlv.Value)
  2044. {
  2045. if (getAiValue_LLA_ChamberPressure > 10000)
  2046. {
  2047. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") - 30000);
  2048. }
  2049. else if (getAiValue_LLA_ChamberPressure <= 10000)
  2050. {
  2051. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") - 1500);
  2052. }
  2053. }
  2054. if (LLB_fast_pump_vlv.Value || LLB_soft_pump_vlv.Value)
  2055. {
  2056. if (getAiValue_LLB_ChamberPressure > 10000)
  2057. {
  2058. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") - 30000);
  2059. }
  2060. else if (getAiValue_LLB_ChamberPressure <= 10000)
  2061. {
  2062. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") - 1500);
  2063. }
  2064. }
  2065. if (TM_fast_pump_vlv.Value || TM_soft_pump_vlv.Value)
  2066. {
  2067. if (getAiValue_TM_ChamberPressure > 10000)
  2068. {
  2069. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 30000);
  2070. }
  2071. else if (getAiValue_TM_ChamberPressure <= 10000)
  2072. {
  2073. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 1500);
  2074. }
  2075. }
  2076. if (LLA_fast_Vent_vlv.Value || LLA_soft_Vent_vlv.Value)
  2077. {
  2078. if (getAiValue_LLA_ChamberPressure > 10000)
  2079. {
  2080. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") + 30000);
  2081. }
  2082. else if (getAiValue_LLA_ChamberPressure <= 10000)
  2083. {
  2084. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") + 1500);
  2085. }
  2086. }
  2087. if (LLB_fast_Vent_vlv.Value || LLB_soft_Vent_vlv.Value)
  2088. {
  2089. if (getAiValue_LLB_ChamberPressure > 10000)
  2090. {
  2091. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") + 30000);
  2092. }
  2093. else if (getAiValue_LLB_ChamberPressure <= 10000)
  2094. {
  2095. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") + 1500);
  2096. }
  2097. }
  2098. if (TM_fast_Vent_vlv.Value || TM_soft_Vent_vlv.Value)
  2099. {
  2100. if (getAiValue_TM_ChamberPressure > 10000)
  2101. {
  2102. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 30000);
  2103. }
  2104. else if (getAiValue_TM_ChamberPressure <= 10000)
  2105. {
  2106. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 1500);
  2107. }
  2108. }
  2109. getAiValue_LLA_ChamberPressure = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}");
  2110. if (getAiValue_LLA_ChamberPressure > ConvertPressureUnit.ConvertmTorrToPa(ATM_PRESSURE))
  2111. {
  2112. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", ConvertPressureUnit.ConvertmTorrToPa(ATM_PRESSURE));
  2113. }
  2114. else if (getAiValue_LLA_ChamberPressure < 3)
  2115. {
  2116. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", 3);
  2117. }
  2118. getAiValue_LLB_ChamberPressure = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}");
  2119. if (getAiValue_LLB_ChamberPressure > ConvertPressureUnit.ConvertmTorrToPa(ATM_PRESSURE))
  2120. {
  2121. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", ConvertPressureUnit.ConvertmTorrToPa(ATM_PRESSURE));
  2122. }
  2123. else if (getAiValue_LLB_ChamberPressure < 3)
  2124. {
  2125. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", 3);
  2126. }
  2127. getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  2128. if (getAiValue_TM_ChamberPressure > ConvertPressureUnit.ConvertmTorrToPa(ATM_PRESSURE))
  2129. {
  2130. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", ConvertPressureUnit.ConvertmTorrToPa(ATM_PRESSURE));
  2131. }
  2132. else if (getAiValue_TM_ChamberPressure < 3)
  2133. {
  2134. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", 3);
  2135. }
  2136. // ATM switch
  2137. IO.DI[$"{mod}.DI_TM_ATM_Switch"].Value = GetAiValue($"{mod}.{TM_AI_ChamberPressure}") > ConvertPressureUnit.ConvertmTorrToPa(ATM_THRESHOLD);
  2138. // VAC switch
  2139. IO.DI[$"{mod}.DI_TM_VAC_Switch"].Value = GetAiValue($"{mod}.{TM_AI_ChamberPressure}") < ConvertPressureUnit.ConvertmTorrToPa(VAC_SW_PRESSURE);
  2140. // ATM switch
  2141. IO.DI[$"{mod}.DI_LLA_ATM_Switch"].Value = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") > ConvertPressureUnit.ConvertmTorrToPa(ATM_THRESHOLD);
  2142. // VAC switch
  2143. IO.DI[$"{mod}.DI_LLA_VAC_Switch"].Value = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") < ConvertPressureUnit.ConvertmTorrToPa(VAC_SW_PRESSURE);
  2144. // ATM switch
  2145. IO.DI[$"{mod}.DI_LLB_ATM_Switch"].Value = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") > ConvertPressureUnit.ConvertmTorrToPa(ATM_THRESHOLD);
  2146. // VAC switch
  2147. IO.DI[$"{mod}.DI_LLB_VAC_Switch"].Value = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") < ConvertPressureUnit.ConvertmTorrToPa( VAC_SW_PRESSURE);
  2148. }
  2149. void MonitorMFKepler2300Pressure()
  2150. {
  2151. //if (SimulatorJetTM.CurrentTM == JetTMType.Venus)
  2152. //{
  2153. string LLA_AI_ChamberPressure = "AI_LLA_CHB_Pressure";
  2154. string LLB_AI_ChamberPressure = "AI_LLB_CHB_Pressure";
  2155. string TM_AI_ChamberPressure = "AI_TM_CHB_Pressure";
  2156. ModuleName mod = ModuleName.TM;
  2157. DOAccessor LLA_fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve_LLA"];
  2158. DOAccessor LLA_soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve_LLA"];
  2159. DOAccessor LLB_fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve_LLB"];
  2160. DOAccessor LLB_soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve_LLB"];
  2161. DOAccessor TM_fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve_TM"];
  2162. DOAccessor TM_soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve_TM"];
  2163. DOAccessor LLA_fast_Vent_vlv = IO.DO[$"{mod}.DO_Vent_Valve_LLA"];
  2164. DOAccessor LLA_soft_Vent_vlv = IO.DO[$"{mod}.DO_Purge_Valve_LLA"];
  2165. DOAccessor LLB_fast_Vent_vlv = IO.DO[$"{mod}.DO_Vent_Valve_LLB"];
  2166. DOAccessor LLB_soft_Vent_vlv = IO.DO[$"{mod}.DO_Purge_Valve_LLB"];
  2167. DOAccessor TM_fast_Vent_vlv = IO.DO[$"{mod}.DO_Vent_Valve_TM"];
  2168. DOAccessor TM_soft_Vent_vlv = IO.DO[$"{mod}.DO_Purge_Valve_TM"];
  2169. float getAiValue_LLA_ChamberPressure = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}");
  2170. float getAiValue_LLB_ChamberPressure = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}");
  2171. float getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  2172. if (LLA_fast_pump_vlv.Value || LLA_soft_pump_vlv.Value)
  2173. {
  2174. if (getAiValue_LLA_ChamberPressure > 10000)
  2175. {
  2176. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") - 30000);
  2177. }
  2178. else if (getAiValue_LLA_ChamberPressure <= 10000)
  2179. {
  2180. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") - 1500);
  2181. }
  2182. }
  2183. if (LLB_fast_pump_vlv.Value || LLB_soft_pump_vlv.Value)
  2184. {
  2185. if (getAiValue_LLB_ChamberPressure > 10000)
  2186. {
  2187. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") - 30000);
  2188. }
  2189. else if (getAiValue_LLB_ChamberPressure <= 10000)
  2190. {
  2191. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") - 1500);
  2192. }
  2193. }
  2194. if (TM_fast_pump_vlv.Value || TM_soft_pump_vlv.Value)
  2195. {
  2196. if (getAiValue_TM_ChamberPressure > 10000)
  2197. {
  2198. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 30000);
  2199. }
  2200. else if (getAiValue_TM_ChamberPressure <= 10000)
  2201. {
  2202. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 1500);
  2203. }
  2204. }
  2205. if (LLA_fast_Vent_vlv.Value || LLA_soft_Vent_vlv.Value)
  2206. {
  2207. if (getAiValue_LLA_ChamberPressure > 10000)
  2208. {
  2209. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") + 30000);
  2210. }
  2211. else if (getAiValue_LLA_ChamberPressure <= 10000)
  2212. {
  2213. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") + 1500);
  2214. }
  2215. }
  2216. if (LLB_fast_Vent_vlv.Value || LLB_soft_Vent_vlv.Value)
  2217. {
  2218. if (getAiValue_LLB_ChamberPressure > 10000)
  2219. {
  2220. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") + 30000);
  2221. }
  2222. else if (getAiValue_LLB_ChamberPressure <= 10000)
  2223. {
  2224. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") + 1500);
  2225. }
  2226. }
  2227. if (TM_fast_Vent_vlv.Value || TM_soft_Vent_vlv.Value)
  2228. {
  2229. if (getAiValue_TM_ChamberPressure > 10000)
  2230. {
  2231. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 30000);
  2232. }
  2233. else if (getAiValue_TM_ChamberPressure <= 10000)
  2234. {
  2235. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 1500);
  2236. }
  2237. }
  2238. getAiValue_LLA_ChamberPressure = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}");
  2239. if (getAiValue_LLA_ChamberPressure > ATM_PRESSURE)
  2240. {
  2241. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", ATM_PRESSURE);
  2242. }
  2243. else if (getAiValue_LLA_ChamberPressure < 20)
  2244. {
  2245. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", 20);
  2246. }
  2247. getAiValue_LLB_ChamberPressure = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}");
  2248. if (getAiValue_LLB_ChamberPressure > ATM_PRESSURE)
  2249. {
  2250. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", ATM_PRESSURE);
  2251. }
  2252. else if (getAiValue_LLB_ChamberPressure < 20)
  2253. {
  2254. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", 20);
  2255. }
  2256. getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  2257. if (getAiValue_TM_ChamberPressure > ATM_PRESSURE)
  2258. {
  2259. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", ATM_PRESSURE);
  2260. }
  2261. else if (getAiValue_TM_ChamberPressure < 20)
  2262. {
  2263. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", 20);
  2264. }
  2265. // ATM switch
  2266. IO.DI[$"{mod}.DI_TM_ATM_Switch"].Value = GetAiValue($"{mod}.{TM_AI_ChamberPressure}") > ATM_THRESHOLD;
  2267. // VAC switch
  2268. IO.DI[$"{mod}.DI_TM_VAC_Switch"].Value = GetAiValue($"{mod}.{TM_AI_ChamberPressure}") < VAC_SW_PRESSURE;
  2269. // ATM switch
  2270. IO.DI[$"{mod}.DI_LLA_ATM_Switch"].Value = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") > ATM_THRESHOLD;
  2271. // VAC switch
  2272. IO.DI[$"{mod}.DI_LLA_VAC_Switch"].Value = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") < VAC_SW_PRESSURE;
  2273. // ATM switch
  2274. IO.DI[$"{mod}.DI_LLB_ATM_Switch"].Value = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") > ATM_THRESHOLD;
  2275. // VAC switch
  2276. IO.DI[$"{mod}.DI_LLB_VAC_Switch"].Value = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") < VAC_SW_PRESSURE;
  2277. // }
  2278. //else if (SimulatorJetTM.CurrentTM == JetTMType.VenusSE)
  2279. //{
  2280. // ModuleName mod = ModuleName.TM;
  2281. // //float getAiValue_LLA_ChamberPressure = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}");
  2282. // //float getAiValue_LLB_ChamberPressure = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}");
  2283. // //float getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  2284. //}
  2285. }
  2286. void SetAiValue(string name, float value)
  2287. {
  2288. byte[] flow = BitConverter.GetBytes(value);
  2289. short high1 = BitConverter.ToInt16(flow, 0);
  2290. short low1 = BitConverter.ToInt16(flow, 2);
  2291. IO.AI[name].Buffer[IO.AI[name].Index] = BitConverter.ToInt16(flow, 0);
  2292. IO.AI[name].Buffer[IO.AI[name].Index + 1] = BitConverter.ToInt16(flow, 2);
  2293. byte[] high = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index]);
  2294. byte[] low = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index + 1]);
  2295. float readback = BitConverter.ToSingle(new[] { high[0], high[1], low[0], low[1] }, 0);
  2296. }
  2297. float GetAiValue(string name)
  2298. {
  2299. byte[] high = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index]);
  2300. byte[] low = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index + 1]);
  2301. float flow = BitConverter.ToSingle(new[] { high[0], high[1], low[0], low[1] }, 0);
  2302. return flow;
  2303. }
  2304. float GetAoValue(string name)
  2305. {
  2306. byte[] high = BitConverter.GetBytes(IO.AO[name].Buffer[IO.AO[name].Index]);
  2307. byte[] low = BitConverter.GetBytes(IO.AO[name].Buffer[IO.AO[name].Index + 1]);
  2308. float flow = BitConverter.ToSingle(new[] { high[0], high[1], low[0], low[1] }, 0);
  2309. return flow;
  2310. }
  2311. void MonitorTemperature(ModuleName mod)
  2312. {
  2313. //IO.DI[$"{mod}.DI_Substrate_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_Substrate_Heater_On"].Value;
  2314. IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_Forline_Heater_On"].Value;
  2315. IO.DI[$"{mod}.DI_CHB_Wall_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_CHB_Wall_Heater_On"].Value;
  2316. IO.DI[$"{mod}.DI_Foreline_TC_Deviation_out_of_range"].Value = false;
  2317. IO.DI[$"{mod}.DI_Substrate_TC_Deviation_out_of_range"].Value = false;
  2318. // 底座
  2319. //if (IO.DO[$"{mod}.DO_Substrate_Heater_On"].Value &&
  2320. // GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") < GetAoValue($"{mod}.AO_Substrate_Temperature_Setpoint"))
  2321. //{
  2322. // SetAiValue($"{mod}.AI_Substrate_Control_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") + _rd.Next(1, 2));
  2323. // SetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp") + _rd.Next(1, 2));
  2324. //}
  2325. //else if (IO.DO[$"{mod}.DO_Substrate_Heater_On"].Value &&
  2326. // GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") > GetAoValue($"{mod}.AO_Substrate_Temperature_Setpoint"))
  2327. //{
  2328. // SetAiValue($"{mod}.AI_Substrate_Control_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") - _rd.Next(1, 2));
  2329. // SetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp") - _rd.Next(1, 2));
  2330. //}
  2331. // Foreline
  2332. if (IO.DO[$"{mod}.DO_Forline_Heater_On"].Value &&
  2333. GetAiValue($"{mod}.AI_Fline_Control_TC_Temp") < GetAoValue($"{mod}.AO_Foreline_Temperature_Setpoint"))
  2334. {
  2335. SetAiValue($"{mod}.AI_Fline_Control_TC_Temp", GetAiValue($"{mod}.AI_Fline_Control_TC_Temp") + _rd.Next(1, 2));
  2336. SetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp") + _rd.Next(1, 2));
  2337. }
  2338. else if (IO.DO[$"{mod}.DO_Forline_Heater_On"].Value &&
  2339. GetAiValue($"{mod}.AI_Fline_Control_TC_Temp") > GetAoValue($"{mod}.AO_Foreline_Temperature_Setpoint"))
  2340. {
  2341. SetAiValue($"{mod}.AI_Fline_Control_TC_Temp", GetAiValue($"{mod}.AI_Fline_Control_TC_Temp") - _rd.Next(1, 2));
  2342. SetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp") - _rd.Next(1, 2));
  2343. }
  2344. // Wall
  2345. if (IO.DO[$"{mod}.DO_CHB_Wall_Heater_On"].Value &&
  2346. GetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp") < GetAoValue($"{mod}.AO_CHB_Wall_Temperature_Setpoint"))
  2347. {
  2348. SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp") + _rd.Next(1, 2));
  2349. SetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp") + _rd.Next(1, 2));
  2350. }
  2351. else if (IO.DO[$"{mod}.DO_CHB_Wall_Heater_On"].Value &&
  2352. GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") > GetAoValue($"{mod}.AO_CHB_Wall_Temperature_Setpoint"))
  2353. {
  2354. SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp") - _rd.Next(1, 2));
  2355. SetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp") - _rd.Next(1, 2));
  2356. }
  2357. }
  2358. void MonitorGas(ModuleName mod)
  2359. {
  2360. // gas
  2361. this.SimulateMFC(mod, 1);
  2362. this.SimulateMFC(mod, 2);
  2363. this.SimulateMFC(mod, 3);
  2364. this.SimulateMFC(mod, 4);
  2365. this.SimulateMFC(mod, 5);
  2366. this.SimulateMFC(mod, 6);
  2367. this.SimulateMFC(mod, 7);
  2368. this.SimulateMFC(mod, 8);
  2369. this.SimulateN2(mod);
  2370. }
  2371. void MonitorSEGas(ModuleName mod)
  2372. {
  2373. SimulateMFC(mod, 1);
  2374. SimulateMFC(mod, 2);
  2375. SimulateMFC(mod, 3);
  2376. SimulateMFC(mod, 4);
  2377. SimulateMFC(mod, 5);
  2378. SimulateMFC(mod, 6);
  2379. SimulateMFC(mod, 7);
  2380. SimulateMFC(mod, 8);
  2381. SimulateMFC(mod, 9);
  2382. SimulateMFC(mod, 10);
  2383. SimulateMFC(mod, 11);
  2384. SimulateMFC(mod, 12);
  2385. }
  2386. void MonitorDEGas(ModuleName mod)
  2387. {
  2388. SimulateMFC(mod, 1);
  2389. SimulateMFC(mod, 2);
  2390. SimulateMFC(mod, 3);
  2391. SimulateMFC(mod, 4);
  2392. SimulateMFC(mod, 5);
  2393. SimulateMFC(mod, 6);
  2394. SimulateMFC(mod, 7);
  2395. SimulateMFC(mod, 8);
  2396. SimulateMFC(mod, 9);
  2397. SimulateMFC(mod, 10);
  2398. SimulateMFC(mod, 11);
  2399. SimulateMFC(mod, 12);
  2400. }
  2401. private void SimulateMFC(ModuleName mod, byte gasNum)
  2402. {
  2403. var sp = GetAoValue($"{mod}.AO_MFC{gasNum}_Flow_Setpoint");
  2404. //var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  2405. SetAiValue($"{mod}.AI_MFC{gasNum}_Flow", (float)sp);
  2406. }
  2407. private void SimulateN2(ModuleName mod)
  2408. {
  2409. var sp = GetAoValue($"{mod}.AO_Turbo_Pump_N2_Flow_Setpoint");
  2410. //var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  2411. SetAiValue($"{mod}.AI_Turbo_Pump_N2_Flow", (float)sp);
  2412. }
  2413. private void SimulateSEHe(ModuleName mod)
  2414. {
  2415. var sp = GetAoValue($"{mod}.AO_ESC_He_Pressure_Setpoint");
  2416. var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  2417. SetAiValue($"{mod}.AI_He_Flow", (float)mock_fb);
  2418. }
  2419. private void SimulateDEHe(ModuleName mod)
  2420. {
  2421. var sp = GetAoValue($"{mod}.AO_ESC_He_Pressure_Setpoint1");
  2422. var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  2423. SetAiValue($"{mod}.AI_MFC_He1_Flow", (float)mock_fb);
  2424. }
  2425. private void SimulateHe(ModuleName mod)
  2426. {
  2427. var sp = GetAoValue($"{mod}.AO_He_Flow_Setpoint");
  2428. var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  2429. SetAiValue($"{mod}.AI_ESC_He_Flow", (float)mock_fb);
  2430. }
  2431. void MonitorRF(ModuleName mod)
  2432. {
  2433. // RF generator
  2434. var sp = GetAoValue($"{mod}.AO_Generator_Power_Setpoint");
  2435. var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  2436. //var mock_sp = _rd.Next(sp - 3, sp + 3);
  2437. SetAiValue($"{mod}.AI_Generator_Forward_Power", (float)mock_fb);
  2438. //IO.DI[$"{mod}.DI_Generator_Power_Status"].Value = IO.DO[$"{mod}.DO_Generator_Power_ON"].Value;
  2439. }
  2440. void MonitorIOPumpCtrl(ModuleName mod)
  2441. {
  2442. if (IO.DO[$"{mod}.DO_Pump_Run"].Value) IO.DI[$"{mod}.DI_Dry_Pump_Running"].Value = true;
  2443. if (IO.DO[$"{mod}.DO_Pump_Stop"].Value) IO.DI[$"{mod}.DI_Dry_Pump_Running"].Value = false;
  2444. }
  2445. void MonitorIOHighTemperatureHeater(ModuleName mod)
  2446. {
  2447. if (IO.DO[$"{mod}.DO_Lift_Servo_Go_Position1"].Value)
  2448. {
  2449. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = true;
  2450. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = false;
  2451. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = false;
  2452. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position4_Complete"].Value = false;
  2453. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position5_Complete"].Value = false;
  2454. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = false;
  2455. }
  2456. if (IO.DO[$"{mod}.DO_Lift_Servo_Go_Position2"].Value)
  2457. {
  2458. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = false;
  2459. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = true;
  2460. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = false;
  2461. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position4_Complete"].Value = false;
  2462. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position5_Complete"].Value = false;
  2463. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = false;
  2464. }
  2465. if (IO.DO[$"{mod}.DO_Lift_Servo_Go_Position3"].Value)
  2466. {
  2467. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = false;
  2468. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = false;
  2469. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = true;
  2470. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position4_Complete"].Value = false;
  2471. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position5_Complete"].Value = false;
  2472. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = false;
  2473. }
  2474. if (IO.DO[$"{mod}.DO_Lift_Servo_Go_Position4"].Value)
  2475. {
  2476. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = false;
  2477. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = false;
  2478. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = false;
  2479. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position4_Complete"].Value = true;
  2480. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position5_Complete"].Value = false;
  2481. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = false;
  2482. }
  2483. if (IO.DO[$"{mod}.DO_Lift_Servo_Go_Position5"].Value)
  2484. {
  2485. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = false;
  2486. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = false;
  2487. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = false;
  2488. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position4_Complete"].Value = false;
  2489. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position5_Complete"].Value = true;
  2490. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = false;
  2491. }
  2492. if (IO.DO[$"{mod}.DO_Lift_Servo_Origin"].Value)
  2493. {
  2494. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = false;
  2495. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = false;
  2496. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = false;
  2497. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position4_Complete"].Value = false;
  2498. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position5_Complete"].Value = false;
  2499. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = true;
  2500. }
  2501. IO.DI[$"{mod}.DI_CHB_M-HT_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_CHB_M-HT_Heater_On"].Value;
  2502. var sp = GetAoValue($"{mod}.AO_CHB_M-HT_Temperature_Setpoint");
  2503. var mock_fb = _rd.Next((int)sp - 1, (int)sp + 1) + _rd.NextDouble();
  2504. //var mock_sp = _rd.Next(sp - 3, sp + 3);
  2505. SetAiValue($"{mod}.AI_CHB_M-HT_Control_TC_Temp", (float)mock_fb);
  2506. }
  2507. void MonitorKepler2200Heater(ModuleName mod)
  2508. {
  2509. var pendulumHeaterSetpoint = GetAoValue($"{mod}.AO_P_Valve_Temperature_Setpoint");
  2510. SetAiValue($"{mod}.AI_P_Valve_Control_TC_Temp", (float)pendulumHeaterSetpoint);
  2511. }
  2512. public void Terminate()
  2513. {
  2514. _thread.Stop();
  2515. }
  2516. public void SetCoolantOutletTemp(string module, int Temp)
  2517. {
  2518. //if (SimulatorJetChamber.CurrentChamber == JetChamber.Venus)
  2519. //{
  2520. //SetAiValue($"{module}.AI_Coolant_Outlet_Temp", Temp);
  2521. //}
  2522. }
  2523. }
  2524. }