PMEntity.cs 31 KB

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  1. using System;
  2. using System.Collections.Generic;
  3. using System.Threading;
  4. using System.Diagnostics;
  5. using System.Linq;
  6. using Aitex.Core.Common;
  7. using Aitex.Core.RT.DataCenter;
  8. using Aitex.Core.RT.Device;
  9. using Aitex.Core.RT.Event;
  10. using Aitex.Core.RT.Fsm;
  11. using Aitex.Core.RT.OperationCenter;
  12. using Aitex.Core.RT.Routine;
  13. using Aitex.Core.RT.SCCore;
  14. using Aitex.Core.Util;
  15. using Aitex.Sorter.Common;
  16. using MECF.Framework.Common.DataCenter;
  17. using MECF.Framework.Common.Equipment;
  18. using MECF.Framework.Common.Schedulers;
  19. using MECF.Framework.Common.SubstrateTrackings;
  20. using Venus_Core;
  21. using Venus_RT.Devices;
  22. using Venus_RT.Modules;
  23. using Venus_RT.Modules.PMs;
  24. using MECF.Framework.Common.Routine;
  25. namespace Venus_RT.Modules.PMs
  26. {
  27. public class RecipeRunningInfo
  28. {
  29. public Guid InnerId { get; set; }
  30. public RecipeHead Head { get; set; }
  31. public List<RecipeStep> RecipeStepList { get; set; }
  32. public string RecipeName { get; set; }
  33. public DateTime BeginTime { get; set; }
  34. public DateTime EndTime { get; set; }
  35. public int StepNumber { get; set; }
  36. public string StepName { get; set; }
  37. public double StepTime { get; set; }
  38. public double StepElapseTime { get; set; }
  39. public double TotalTime { get; set; }
  40. public double TotalElapseTime { get; set; }
  41. }
  42. public class PMEntity : Entity, IModuleEntity
  43. {
  44. public enum MSG
  45. {
  46. Home,
  47. Transfer,
  48. PrepareTransfer,
  49. PostTransfer,
  50. Reset,
  51. Abort,
  52. Error,
  53. LaunchPump,
  54. LaunchTurboPump,
  55. Pump,
  56. Vent,
  57. PumpLoadLock,
  58. VentLoadLock,
  59. PurgeLoadLock,
  60. LoadLockLeakCheck,
  61. CyclePurge,
  62. GasLinePurge,
  63. Heat,
  64. TransferHandoff,
  65. StartTransfer,
  66. LeakCheck,
  67. GasLeakCheck,
  68. MoveLiftPin,
  69. MoveGuidePin,
  70. LLPlace,
  71. LLPick,
  72. Process,
  73. RunRecipe,
  74. PostProcess,
  75. RecipeSkipStep,
  76. RecipeUpdate,
  77. RecipeResume,
  78. RecipePause,
  79. RecipeAbort,
  80. PreProcess,
  81. AutoMode,
  82. ManualMode,
  83. LockLid,
  84. Online,
  85. Offline,
  86. GasFlow,
  87. StopGasFlow,
  88. RfPower,
  89. MaxMsg
  90. }
  91. private readonly JetPM _chamber;
  92. public ModuleName Module { get; }
  93. public Action<bool, bool> TransferPrepared;
  94. private readonly PMHomeRoutine _home;
  95. private readonly StartDryPumpRoutine _startDryPumpRoutine;
  96. private readonly StartTurboPumpRoutine _startTurboPumpRoutine;
  97. private readonly VentRoutine _ventRoutine;
  98. private readonly PumpDownRoutine _pumpRoutine;
  99. private readonly LoadLockVentRoutine _ventLoadLockRoutine;
  100. private readonly LoadLockPumpRoutine _pumpLoadLockRoutine;
  101. private readonly LoadLockPurgeRoutine _purgeLoadLockRoutine;
  102. private readonly LoadLockLeakCheckRoutine _loadLockLeakCheckRoutine;
  103. private readonly PMPurgeRoutine _purgeRoutine;
  104. private readonly PMGaslinePurgeRoutine _gaslinePurgeRoutine;
  105. private readonly PMLeakCheckRoutine _leakCheckRoutine;
  106. private readonly GasBoxLeakCheckRoutine _gasBoxLeakCheckRoutine;
  107. private readonly LLPlaceRoutine _llPlaceRoutine;
  108. private readonly LLPickRoutine _llPickRoutine;
  109. private readonly PMProcessRoutine _processRoutine;
  110. private readonly GasFlowRoutine _gasFlowRoutine;
  111. private readonly RFPowerSwitchRoutine _rfPowerRoutine;
  112. public bool IsIdle
  113. {
  114. get { return fsm.State == (int)PMState.Idle; }
  115. }
  116. public bool IsError
  117. {
  118. get { return fsm.State == (int)PMState.Error; }
  119. }
  120. public bool IsInit
  121. {
  122. get { return fsm.State == (int)PMState.Init; }
  123. }
  124. public bool IsBusy
  125. {
  126. get { return !IsInit && !IsError && !IsIdle; }
  127. }
  128. public bool IsProcessing
  129. {
  130. get { return fsm.State == (int)PMState.PreProcess || fsm.State == (int)PMState.Processing || fsm.State == (int)PMState.PostProcess; }
  131. }
  132. public bool Check(int msg, out string reason, object[] objs)
  133. {
  134. reason = "";
  135. return true;
  136. }
  137. //
  138. private bool CheckToPostMessage(int msg, params object[] args)
  139. {
  140. if (!fsm.FindTransition(fsm.State, msg))
  141. {
  142. EV.PostWarningLog(Module.ToString(), $"{Module} is in { (PMState)fsm.State} state,can not do {(MSG)msg}");
  143. return false;
  144. }
  145. fsm.PostMsg(msg, args);
  146. return true;
  147. }
  148. public int Invoke(string function, params object[] args)
  149. {
  150. switch (function)
  151. {
  152. case "Home":
  153. CheckToPostMessage((int)MSG.Home);
  154. return (int)MSG.Home;
  155. }
  156. return (int)FSM_MSG.NONE;
  157. }
  158. public bool CheckAcked(int msg)
  159. {
  160. return fsm.CheckExecuted(msg);
  161. }
  162. public PMEntity(ModuleName module)
  163. {
  164. Module = module;
  165. _chamber = DEVICE.GetDevice<JetPM>(Module.ToString());
  166. _home = new PMHomeRoutine(_chamber);
  167. _startDryPumpRoutine = new StartDryPumpRoutine(_chamber);
  168. _startTurboPumpRoutine = new StartTurboPumpRoutine(_chamber);
  169. _ventRoutine = new VentRoutine(_chamber);
  170. _pumpRoutine = new PumpDownRoutine(_chamber);
  171. _ventLoadLockRoutine = new LoadLockVentRoutine(_chamber);
  172. _pumpLoadLockRoutine = new LoadLockPumpRoutine(_chamber);
  173. _purgeLoadLockRoutine = new LoadLockPurgeRoutine(_chamber);
  174. _loadLockLeakCheckRoutine = new LoadLockLeakCheckRoutine(_chamber);
  175. _purgeRoutine = new PMPurgeRoutine(_chamber);
  176. _gaslinePurgeRoutine = new PMGaslinePurgeRoutine(_chamber);
  177. _leakCheckRoutine = new PMLeakCheckRoutine(_chamber);
  178. _gasBoxLeakCheckRoutine = new GasBoxLeakCheckRoutine(_chamber);
  179. _llPlaceRoutine = new LLPlaceRoutine(_chamber);
  180. _llPickRoutine = new LLPickRoutine(_chamber, _ventLoadLockRoutine);
  181. _processRoutine = new PMProcessRoutine(_chamber, _pumpRoutine);
  182. _gasFlowRoutine = new GasFlowRoutine(_chamber);
  183. _rfPowerRoutine = new RFPowerSwitchRoutine(_chamber, true);
  184. fsm = new StateMachine<PMEntity>(Module.ToString(), (int)PMState.Init, 50);
  185. //Idle
  186. EnterExitTransition((int)PMState.Idle, FnIdle, (int)FSM_MSG.NONE, null);
  187. EnterExitTransition<PMState, FSM_MSG>(PMState.Error, fEnterError, FSM_MSG.NONE, null);
  188. //Home
  189. //EnterExitTransition((int)PMState.Homing, FnEnterHome, (int)FSM_MSG.NONE, FnExitHome);
  190. AnyStateTransition(MSG.Error, FnError, PMState.Error);
  191. Transition(PMState.Init, FSM_MSG.TIMER, FnTimeout, PMState.Init);
  192. Transition(PMState.Init, MSG.Home, FnStartHome, PMState.Homing);
  193. Transition(PMState.Error, MSG.Home, FnStartHome, PMState.Homing);
  194. Transition(PMState.Idle, MSG.Home, FnStartHome, PMState.Homing);
  195. Transition(PMState.Homing, FSM_MSG.TIMER, FnMonitorHome, PMState.Idle);
  196. Transition(PMState.Idle, FSM_MSG.TIMER, FnIdleTimeout, PMState.Idle);
  197. Transition(PMState.Error, FSM_MSG.TIMER, FnErrorTimeout, PMState.Error);
  198. //Launch DryPump sequence
  199. Transition(PMState.Idle, MSG.LaunchPump, FnLaunchPump, PMState.LaunchingPump);
  200. Transition(PMState.LaunchingPump, FSM_MSG.TIMER, FnLaunchPumpTimeout, PMState.Idle);
  201. Transition(PMState.LaunchingPump, MSG.Abort, FnAbortStartPumping, PMState.Idle);
  202. //Launch TurboPump sequence
  203. Transition(PMState.Idle, MSG.LaunchTurboPump, FnLaunchTurboPump, PMState.LaunchingTurboPump);
  204. Transition(PMState.LaunchingTurboPump, FSM_MSG.TIMER, FnLaunchTurboPumpTimeout, PMState.Idle);
  205. Transition(PMState.LaunchingTurboPump, MSG.Abort, FnAbortStartTurboPumping, PMState.Idle);
  206. //vent sequence
  207. Transition(PMState.Idle, MSG.Vent, FnStartVent, PMState.Venting);
  208. Transition(PMState.Pumping, MSG.Vent, FnVentToPumping, PMState.Venting);
  209. Transition(PMState.Venting, FSM_MSG.TIMER, FnVentTimeout, PMState.Idle);
  210. Transition(PMState.Venting, MSG.Abort, FnAbortVent, PMState.Idle);
  211. //Pump sequence
  212. Transition(PMState.Idle, MSG.Pump, FnStartPumpDown, PMState.Pumping);
  213. Transition(PMState.Venting, MSG.Pump, FnVentToPumping, PMState.Pumping);
  214. Transition(PMState.Pumping, FSM_MSG.TIMER, FnPumpDownTimeout, PMState.Idle);
  215. Transition(PMState.Pumping, MSG.Abort, FnAbortPumping, PMState.Idle);
  216. //Pump Loadlock sequence
  217. Transition(PMState.Idle, MSG.PumpLoadLock, FnStartPumpDownLoadLock, PMState.PumpingLoadLock);
  218. Transition(PMState.VentingLoadLock, MSG.PumpLoadLock, FnVentLoadLockToPumpingLoadLock, PMState.PumpingLoadLock);
  219. Transition(PMState.PumpingLoadLock, FSM_MSG.TIMER, FnPumpDownLoadLockTimeout, PMState.Idle);
  220. Transition(PMState.PumpingLoadLock, MSG.Abort, FnAbortPumpingLoadLock, PMState.Idle);
  221. //Vent Loadlock sequence
  222. Transition(PMState.Idle, MSG.VentLoadLock, FnStartVentLoadlock, PMState.VentingLoadLock);
  223. Transition(PMState.PumpingLoadLock, MSG.VentLoadLock, FnPumpingLoadLockToVentLoadLock, PMState.VentingLoadLock);
  224. Transition(PMState.VentingLoadLock, FSM_MSG.TIMER, FnVentLoadLockTimeout, PMState.Idle);
  225. Transition(PMState.VentingLoadLock, MSG.Abort, FnAbortVentLoadLock, PMState.Idle);
  226. // Purge LoadLock sequence
  227. Transition(PMState.Idle, MSG.PurgeLoadLock, FnStartPurgeLoadlock, PMState.PurgingLoadLock);
  228. Transition(PMState.PurgingLoadLock, FSM_MSG.TIMER, FnPurgeLoadLockTimeout, PMState.Idle);
  229. Transition(PMState.PurgingLoadLock, MSG.Abort, FnAbortPurgeLoadLock, PMState.Idle);
  230. //LoadLock Leak check sequence
  231. Transition(PMState.Idle, MSG.LoadLockLeakCheck, FnStartLoadLockLeakCheck, PMState.LoadLockLeakCheck);
  232. Transition(PMState.LoadLockLeakCheck, FSM_MSG.TIMER, FnLoadLockLeakCheckTimeout, PMState.Idle);
  233. Transition(PMState.LoadLockLeakCheck, MSG.Abort, FnAbortLoadLockLeakCheck, PMState.Idle);
  234. // PM Purge sequence
  235. Transition(PMState.Idle, MSG.CyclePurge, FnStartPurge, PMState.Purging);
  236. Transition(PMState.Purging, FSM_MSG.TIMER, FnPurgeTimeout, PMState.Idle);
  237. Transition(PMState.Purging, MSG.Abort, FnAbortPurge, PMState.Idle);
  238. // PM GasLine Purge sequence
  239. Transition(PMState.Idle, MSG.GasLinePurge, FnStartGasLinePurge, PMState.GasLinePurge);
  240. Transition(PMState.GasLinePurge, FSM_MSG.TIMER, FnGasLinePurgeTimeout, PMState.Idle);
  241. Transition(PMState.GasLinePurge, MSG.Abort, FnAbortGasLinePurge, PMState.Idle);
  242. //PM Leak check sequence
  243. Transition(PMState.Idle, MSG.LeakCheck, FnStartPMLeakCheck, PMState.LeakCheck);
  244. Transition(PMState.LeakCheck, FSM_MSG.TIMER, FnPMLeakCheckTimeout, PMState.Idle);
  245. Transition(PMState.LeakCheck, MSG.Abort, FnAbortPMLeakCheck, PMState.Idle);
  246. //PM Leak check sequence
  247. Transition(PMState.Idle, MSG.GasLeakCheck, FnStartGasBoxLeakCheck, PMState.GasBoxLeakCheck);
  248. Transition(PMState.GasBoxLeakCheck, FSM_MSG.TIMER, FnGasBoxLeakCheckTimeout, PMState.Idle);
  249. Transition(PMState.GasBoxLeakCheck, MSG.Abort, FnAbortGasBoxLeakCheck, PMState.Idle);
  250. // PlaceWafer from LoadLock Arm sequence
  251. Transition(PMState.Idle, MSG.LLPlace, FnStartLLPlace, PMState.LLPlacing);
  252. Transition(PMState.LLPlacing, FSM_MSG.TIMER, FnLLPlaceTimeout, PMState.Idle);
  253. Transition(PMState.LLPlacing, MSG.Abort, FnAbortLLPlace, PMState.Idle);
  254. // PickWafer to LoadLock Arm sequence
  255. Transition(PMState.Idle, MSG.LLPick, FnStartLLPick, PMState.LLPicking);
  256. Transition(PMState.LLPicking, FSM_MSG.TIMER, FnLLPickTimeout, PMState.Idle);
  257. Transition(PMState.LLPicking, MSG.Abort, FnAbortLLPick, PMState.Idle);
  258. // Process
  259. Transition(PMState.Idle, MSG.RunRecipe, FnRunRecipe, PMState.Processing);
  260. Transition(PMState.Processing, FSM_MSG.TIMER, FnProcessTimeout, PMState.Idle);
  261. Transition(PMState.Processing, MSG.Abort, FnAbortProcess, PMState.Idle);
  262. // Gas Flow sequence
  263. Transition(PMState.Idle, MSG.GasFlow, FnStartGasFlow, PMState.GasFlowing);
  264. Transition(PMState.GasFlowing, MSG.GasFlow, FnStartGasFlow, PMState.GasFlowing);
  265. Transition(PMState.GasFlowing, FSM_MSG.TIMER, FnGasFlowTimeout, PMState.Idle);
  266. Transition(PMState.GasFlowing, MSG.StopGasFlow, FnStopGasFlow, PMState.Idle);
  267. Transition(PMState.GasFlowing, MSG.Abort, FnAbortGasFlow, PMState.Idle);
  268. //RF Power sequence
  269. Transition(PMState.Idle, MSG.RfPower, FnStartRfPower, PMState.RfPowering);
  270. Transition(PMState.GasFlowing, MSG.RfPower, FnStartRfPower, PMState.RfPowering);
  271. Transition(PMState.RfPowering, FSM_MSG.TIMER, FnRfPowerTimeout, PMState.Idle);
  272. Transition(PMState.RfPowering, MSG.Abort, FnAbortRfPower, PMState.Idle);
  273. Running = true;
  274. WaferManager.Instance.SubscribeLocation(ModuleName.PMA, 1);
  275. WaferManager.Instance.SubscribeLocation(ModuleName.LLA, 1);
  276. }
  277. protected override bool Init()
  278. {
  279. DATA.Subscribe($"{Module}.FsmState", () => ((PMState)fsm.State).ToString());
  280. OP.Subscribe($"{Module}.{RtOperation.LeakCheck}", (cmd, args) => CheckToPostMessage((int)MSG.LeakCheck, args));
  281. OP.Subscribe($"{Module}.Home", (cmd, args) => CheckToPostMessage((int)MSG.Home));
  282. OP.Subscribe($"{Module}.{RtOperation.StartPump}", (cmd, args) => CheckToPostMessage((int)MSG.LaunchPump));
  283. OP.Subscribe($"{Module}.{RtOperation.StartTurboPump}", (cmd, args) => CheckToPostMessage((int)MSG.LaunchTurboPump));
  284. OP.Subscribe($"{Module}.{RtOperation.Pump}", (cmd, args) => CheckToPostMessage((int)MSG.Pump));
  285. OP.Subscribe($"{Module}.{RtOperation.Purge}", (cmd, args) => CheckToPostMessage((int)MSG.CyclePurge));
  286. OP.Subscribe($"{Module}.{RtOperation.RfPower}", (cmd, args) => CheckToPostMessage((int)MSG.RfPower));
  287. OP.Subscribe($"{Module}.{RtOperation.Vent}", (cmd, args) => CheckToPostMessage((int)MSG.Vent));
  288. OP.Subscribe($"{Module}.{RtOperation.VentLoadLock}", (cmd, args) => CheckToPostMessage((int)MSG.VentLoadLock));
  289. //OP.Subscribe($"{Module}.{RtOperation.VentLoadLock}", (cmd, args) => CheckToPostMessage((int)MSG.VentLoadLock));
  290. return true;
  291. }
  292. private bool FnIdle(object[] objs)
  293. {
  294. Running = false;
  295. return true;
  296. }
  297. private bool fEnterError(object[] objs)
  298. {
  299. return true;
  300. }
  301. private bool FnError(object[] objs)
  302. {
  303. Running = false;
  304. if (((PMState)fsm.State == PMState.Processing) || ((PMState)fsm.State == PMState.PreProcess)
  305. || ((PMState)fsm.State == PMState.Homing) || ((PMState)fsm.State == PMState.LoadProcessRecipe))
  306. return false;
  307. if (IsProcessing)
  308. {
  309. WaferManager.Instance.UpdateWaferProcessStatus(Module, 0, EnumWaferProcessStatus.Failed);
  310. }
  311. return true;
  312. }
  313. private bool FnTimeout(object[] objs)
  314. {
  315. _debugRoutine();
  316. return true;
  317. }
  318. private bool FnIdleTimeout(object[] objs)
  319. {
  320. _debugRoutine();
  321. return true;
  322. }
  323. private bool FnErrorTimeout(object[] objs)
  324. {
  325. _debugRoutine();
  326. return true;
  327. }
  328. private bool FnStartHome(object[] objs)
  329. {
  330. return _home.Start() == RState.Running;
  331. }
  332. private bool FnMonitorHome(object[] objs)
  333. {
  334. RState ret = _home.Monitor();
  335. if (ret == RState.Failed || ret == RState.Timeout)
  336. {
  337. PostMsg(MSG.Error);
  338. return false;
  339. }
  340. return ret == RState.End;
  341. }
  342. private bool FnLaunchPump(object[] param)
  343. {
  344. return _startDryPumpRoutine.Start() == RState.Running;
  345. }
  346. private bool FnLaunchPumpTimeout(object[] param)
  347. {
  348. RState ret = _startDryPumpRoutine.Monitor();
  349. if (ret == RState.Failed || ret == RState.Timeout)
  350. {
  351. PostMsg(MSG.Error);
  352. return false;
  353. }
  354. return ret == RState.End;
  355. }
  356. private bool FnAbortStartPumping(object[] param)
  357. {
  358. _startDryPumpRoutine.Abort();
  359. return true;
  360. }
  361. private bool FnLaunchTurboPump(object[] param)
  362. {
  363. return _startTurboPumpRoutine.Start() == RState.Running;
  364. }
  365. private bool FnLaunchTurboPumpTimeout(object[] param)
  366. {
  367. RState ret = _startTurboPumpRoutine.Monitor();
  368. if (ret == RState.Failed || ret == RState.Timeout)
  369. {
  370. PostMsg(MSG.Error);
  371. return false;
  372. }
  373. return ret == RState.End;
  374. }
  375. private bool FnAbortStartTurboPumping(object[] param)
  376. {
  377. _startTurboPumpRoutine.Abort();
  378. return true;
  379. }
  380. private bool FnStartVent(object[] param)
  381. {
  382. return _ventRoutine.Start() == RState.Running;
  383. }
  384. private bool FnVentTimeout(object[] param)
  385. {
  386. RState ret = _ventRoutine.Monitor();
  387. if (ret == RState.Failed || ret == RState.Timeout)
  388. {
  389. PostMsg(MSG.Error);
  390. return false;
  391. }
  392. return ret == RState.End;
  393. }
  394. private bool FnVentToPumping(object[] param)
  395. {
  396. _ventRoutine.Abort();
  397. return true; // FnStartPumpDown(param);
  398. }
  399. private bool FnAbortVent(object[] param)
  400. {
  401. _ventRoutine.Abort();
  402. return true;
  403. }
  404. private bool FnStartPumpDown(object[] param)
  405. {
  406. return _pumpRoutine.Start() == RState.Running;
  407. }
  408. private bool FnPumpDownTimeout(object[] param)
  409. {
  410. RState ret = _pumpRoutine.Monitor();
  411. if (ret == RState.Failed || ret == RState.Timeout)
  412. {
  413. PostMsg(MSG.Error);
  414. return false;
  415. }
  416. return ret == RState.End;
  417. }
  418. private bool FnAbortPumping(object[] param)
  419. {
  420. _pumpRoutine.Abort();
  421. return true;
  422. }
  423. private bool FnStartVentLoadlock(object[] param)
  424. {
  425. return _ventLoadLockRoutine.Start() == RState.Running;
  426. }
  427. private bool FnVentLoadLockTimeout(object[] param)
  428. {
  429. RState ret = _ventLoadLockRoutine.Monitor();
  430. if (ret == RState.Failed || ret == RState.Timeout)
  431. {
  432. PostMsg(MSG.Error);
  433. return false;
  434. }
  435. return ret == RState.End;
  436. }
  437. private bool FnVentLoadLockToPumpingLoadLock(object[] param)
  438. {
  439. _ventLoadLockRoutine.Abort();
  440. return FnStartPumpDownLoadLock(param);
  441. }
  442. private bool FnAbortVentLoadLock(object[] param)
  443. {
  444. _ventLoadLockRoutine.Abort();
  445. return true;
  446. }
  447. private bool FnStartPumpDownLoadLock(object[] param)
  448. {
  449. return _pumpLoadLockRoutine.Start() == RState.Running;
  450. }
  451. private bool FnPumpDownLoadLockTimeout(object[] param)
  452. {
  453. RState ret = _pumpLoadLockRoutine.Monitor();
  454. if (ret == RState.Failed || ret == RState.Timeout)
  455. {
  456. PostMsg(MSG.Error);
  457. return false;
  458. }
  459. return ret == RState.End;
  460. }
  461. private bool FnPumpingToVent(object[] param)
  462. {
  463. _pumpRoutine.Abort();
  464. return FnStartVent(param);
  465. }
  466. private bool FnPumpingLoadLockToVentLoadLock(object[] param)
  467. {
  468. _pumpLoadLockRoutine.Abort();
  469. return FnStartVentLoadlock(param);
  470. }
  471. private bool FnAbortPumpingLoadLock(object[] param)
  472. {
  473. _pumpLoadLockRoutine.Abort();
  474. return true;
  475. }
  476. private bool FnStartPurgeLoadlock(object[] param)
  477. {
  478. return _purgeLoadLockRoutine.Start() == RState.Running;
  479. }
  480. private bool FnPurgeLoadLockTimeout(object[] param)
  481. {
  482. RState ret = _purgeLoadLockRoutine.Monitor();
  483. if (ret == RState.Failed || ret == RState.Timeout)
  484. {
  485. PostMsg(MSG.Error);
  486. return false;
  487. }
  488. return ret == RState.End;
  489. }
  490. private bool FnAbortPurgeLoadLock(object[] param)
  491. {
  492. _purgeLoadLockRoutine.Abort();
  493. return true;
  494. }
  495. private bool FnStartLoadLockLeakCheck(object[] param)
  496. {
  497. return _loadLockLeakCheckRoutine.Start() == RState.Running;
  498. }
  499. private bool FnLoadLockLeakCheckTimeout(object[] param)
  500. {
  501. RState ret = _loadLockLeakCheckRoutine.Monitor();
  502. if (ret == RState.Failed || ret == RState.Timeout)
  503. {
  504. PostMsg(MSG.Error);
  505. return false;
  506. }
  507. return ret == RState.End;
  508. }
  509. private bool FnAbortLoadLockLeakCheck(object[] param)
  510. {
  511. _loadLockLeakCheckRoutine.Abort();
  512. return true;
  513. }
  514. private bool FnStartPurge(object[] param)
  515. {
  516. return _purgeRoutine.Start() == RState.Running;
  517. }
  518. private bool FnPurgeTimeout(object[] param)
  519. {
  520. RState ret = _purgeRoutine.Monitor();
  521. if (ret == RState.Failed || ret == RState.Timeout)
  522. {
  523. PostMsg(MSG.Error);
  524. return false;
  525. }
  526. return ret == RState.End;
  527. }
  528. private bool FnAbortPurge(object[] param)
  529. {
  530. _purgeRoutine.Abort();
  531. return true;
  532. }
  533. private bool FnStartGasLinePurge(object[] param)
  534. {
  535. return _gaslinePurgeRoutine.Start() == RState.Running;
  536. }
  537. private bool FnGasLinePurgeTimeout(object[] param)
  538. {
  539. RState ret = _gaslinePurgeRoutine.Monitor();
  540. if (ret == RState.Failed || ret == RState.Timeout)
  541. {
  542. PostMsg(MSG.Error);
  543. return false;
  544. }
  545. return ret == RState.End;
  546. }
  547. private bool FnAbortGasLinePurge(object[] param)
  548. {
  549. _gaslinePurgeRoutine.Abort();
  550. return true;
  551. }
  552. private bool FnStartPMLeakCheck(object[] param)
  553. {
  554. return _leakCheckRoutine.Start() == RState.Running;
  555. }
  556. private bool FnPMLeakCheckTimeout(object[] param)
  557. {
  558. RState ret = _leakCheckRoutine.Monitor();
  559. if (ret == RState.Failed || ret == RState.Timeout)
  560. {
  561. PostMsg(MSG.Error);
  562. return false;
  563. }
  564. return ret == RState.End;
  565. }
  566. private bool FnAbortPMLeakCheck(object[] param)
  567. {
  568. _leakCheckRoutine.Abort();
  569. return true;
  570. }
  571. private bool FnStartGasBoxLeakCheck(object[] param)
  572. {
  573. return _gasBoxLeakCheckRoutine.Start() == RState.Running;
  574. }
  575. private bool FnGasBoxLeakCheckTimeout(object[] param)
  576. {
  577. RState ret = _gasBoxLeakCheckRoutine.Monitor();
  578. if (ret == RState.Failed || ret == RState.Timeout)
  579. {
  580. PostMsg(MSG.Error);
  581. return false;
  582. }
  583. return ret == RState.End;
  584. }
  585. private bool FnAbortGasBoxLeakCheck(object[] param)
  586. {
  587. _gasBoxLeakCheckRoutine.Abort();
  588. return true;
  589. }
  590. private bool FnStartLLPlace(object[] param)
  591. {
  592. return _llPlaceRoutine.Start() == RState.Running;
  593. }
  594. private bool FnLLPlaceTimeout(object[] param)
  595. {
  596. RState ret = _llPlaceRoutine.Monitor();
  597. if (ret == RState.Failed || ret == RState.Timeout)
  598. {
  599. PostMsg(MSG.Error);
  600. return false;
  601. }
  602. return ret == RState.End;
  603. }
  604. private bool FnAbortLLPlace(object[] param)
  605. {
  606. _llPlaceRoutine.Abort();
  607. return true;
  608. }
  609. private bool FnStartLLPick(object[] param)
  610. {
  611. return _llPickRoutine.Start() == RState.Running;
  612. }
  613. private bool FnLLPickTimeout(object[] param)
  614. {
  615. RState ret = _llPickRoutine.Monitor();
  616. if (ret == RState.Failed || ret == RState.Timeout)
  617. {
  618. PostMsg(MSG.Error);
  619. return false;
  620. }
  621. return ret == RState.End;
  622. }
  623. private bool FnAbortLLPick(object[] param)
  624. {
  625. _llPickRoutine.Abort();
  626. return true;
  627. }
  628. private bool FnRunRecipe(object[] param)
  629. {
  630. return _processRoutine.Start(param) == RState.Running;
  631. }
  632. private bool FnProcessTimeout(object[] param)
  633. {
  634. RState ret = _processRoutine.Monitor();
  635. if (ret == RState.Failed || ret == RState.Timeout)
  636. {
  637. PostMsg(MSG.Error);
  638. return false;
  639. }
  640. return ret == RState.End;
  641. }
  642. private bool FnAbortProcess(object[] param)
  643. {
  644. _processRoutine.Abort();
  645. return true;
  646. }
  647. private bool FnStartGasFlow(object[] param)
  648. {
  649. return _gasFlowRoutine.Start(param) == RState.Running;
  650. }
  651. private bool FnGasFlowTimeout(object[] param)
  652. {
  653. RState ret = _gasFlowRoutine.Monitor();
  654. if (ret == RState.Failed || ret == RState.Timeout)
  655. {
  656. PostMsg(MSG.Error);
  657. return false;
  658. }
  659. return ret == RState.End;
  660. }
  661. private bool FnStopGasFlow(object[] param)
  662. {
  663. _gasFlowRoutine.Abort();
  664. return true;
  665. }
  666. private bool FnAbortGasFlow(object[] param)
  667. {
  668. _gasFlowRoutine.Abort();
  669. return true;
  670. }
  671. private bool FnStartRfPower(object[] param)
  672. {
  673. return _rfPowerRoutine.Start(param) == RState.Running;
  674. }
  675. private bool FnRfPowerTimeout(object[] param)
  676. {
  677. RState ret = _rfPowerRoutine.Monitor();
  678. if (ret == RState.Failed || ret == RState.Timeout)
  679. {
  680. PostMsg(MSG.Error);
  681. return false;
  682. }
  683. return ret == RState.End;
  684. }
  685. private bool FnAbortRfPower(object[] param)
  686. {
  687. _rfPowerRoutine.Abort();
  688. if(_gasFlowRoutine._gasStatus)
  689. {
  690. _gasFlowRoutine.StopFlow();
  691. }
  692. return true;
  693. }
  694. private void _debugRoutine()
  695. {
  696. int flag = 0;
  697. // Test Home routine
  698. if (flag == 1)
  699. {
  700. PostMsg(MSG.Home);
  701. }
  702. else if (flag == 2)
  703. {
  704. PostMsg(MSG.Vent);
  705. }
  706. else if (flag == 3)
  707. {
  708. PostMsg(MSG.Pump);
  709. }
  710. else if(flag == 4)
  711. {
  712. PostMsg(MSG.PumpLoadLock);
  713. }
  714. else if(flag == 5)
  715. {
  716. PostMsg(MSG.VentLoadLock);
  717. }
  718. else if(flag == 6)
  719. {
  720. PostMsg(MSG.PurgeLoadLock);
  721. }
  722. else if(flag == 7)
  723. {
  724. PostMsg(MSG.LaunchPump);
  725. }
  726. else if(flag == 8)
  727. {
  728. PostMsg(MSG.LaunchTurboPump);
  729. }
  730. else if(flag == 9)
  731. {
  732. PostMsg(MSG.LoadLockLeakCheck);
  733. }
  734. else if(flag == 10)
  735. {
  736. PostMsg(MSG.CyclePurge);
  737. }
  738. else if(flag == 11)
  739. {
  740. PostMsg(MSG.GasLinePurge);
  741. }
  742. else if(flag == 12)
  743. {
  744. PostMsg(MSG.LeakCheck);
  745. }
  746. else if(flag == 13)
  747. {
  748. PostMsg(MSG.GasLeakCheck);
  749. }
  750. else if(flag == 14)
  751. {
  752. PostMsg(MSG.LLPlace);
  753. }
  754. else if(flag == 15)
  755. {
  756. PostMsg(MSG.LLPick);
  757. }
  758. else if(flag == 16)
  759. {
  760. PostMsg(MSG.RunRecipe, "7777");
  761. }
  762. }
  763. }
  764. }