OverViewModel.cs 58 KB

12345678910111213141516171819202122232425262728293031323334353637383940414243444546474849505152535455565758596061626364656667686970717273747576777879808182838485868788899091929394959697989910010110210310410510610710810911011111211311411511611711811912012112212312412512612712812913013113213313413513613713813914014114214314414514614714814915015115215315415515615715815916016116216316416516616716816917017117217317417517617717817918018118218318418518618718818919019119219319419519619719819920020120220320420520620720820921021121221321421521621721821922022122222322422522622722822923023123223323423523623723823924024124224324424524624724824925025125225325425525625725825926026126226326426526626726826927027127227327427527627727827928028128228328428528628728828929029129229329429529629729829930030130230330430530630730830931031131231331431531631731831932032132232332432532632732832933033133233333433533633733833934034134234334434534634734834935035135235335435535635735835936036136236336436536636736836937037137237337437537637737837938038138238338438538638738838939039139239339439539639739839940040140240340440540640740840941041141241341441541641741841942042142242342442542642742842943043143243343443543643743843944044144244344444544644744844945045145245345445545645745845946046146246346446546646746846947047147247347447547647747847948048148248348448548648748848949049149249349449549649749849950050150250350450550650750850951051151251351451551651751851952052152252352452552652752852953053153253353453553653753853954054154254354454554654754854955055155255355455555655755855956056156256356456556656756856957057157257357457557657757857958058158258358458558658758858959059159259359459559659759859960060160260360460560660760860961061161261361461561661761861962062162262362462562662762862963063163263363463563663763863964064164264364464564664764864965065165265365465565665765865966066166266366466566666766866967067167267367467567667767867968068168268368468568668768868969069169269369469569669769869970070170270370470570670770870971071171271371471571671771871972072172272372472572672772872973073173273373473573673773873974074174274374474574674774874975075175275375475575675775875976076176276376476576676776876977077177277377477577677777877978078178278378478578678778878979079179279379479579679779879980080180280380480580680780880981081181281381481581681781881982082182282382482582682782882983083183283383483583683783883984084184284384484584684784884985085185285385485585685785885986086186286386486586686786886987087187287387487587687787887988088188288388488588688788888989089189289389489589689789889990090190290390490590690790890991091191291391491591691791891992092192292392492592692792892993093193293393493593693793893994094194294394494594694794894995095195295395495595695795895996096196296396496596696796896997097197297397497597697797897998098198298398498598698798898999099199299399499599699799899910001001100210031004100510061007100810091010101110121013101410151016101710181019102010211022102310241025102610271028102910301031103210331034103510361037103810391040104110421043104410451046104710481049105010511052105310541055105610571058105910601061106210631064106510661067106810691070107110721073107410751076107710781079108010811082108310841085108610871088108910901091109210931094109510961097109810991100110111021103110411051106110711081109111011111112111311141115111611171118111911201121112211231124112511261127112811291130113111321133113411351136113711381139114011411142114311441145114611471148114911501151115211531154115511561157115811591160116111621163116411651166116711681169117011711172117311741175117611771178117911801181118211831184118511861187118811891190119111921193119411951196119711981199120012011202120312041205120612071208120912101211121212131214121512161217121812191220122112221223122412251226122712281229123012311232123312341235123612371238123912401241124212431244124512461247124812491250125112521253125412551256125712581259126012611262126312641265126612671268126912701271127212731274127512761277127812791280128112821283128412851286128712881289129012911292129312941295129612971298129913001301130213031304130513061307130813091310131113121313131413151316131713181319132013211322132313241325132613271328132913301331133213331334133513361337133813391340134113421343134413451346134713481349135013511352135313541355135613571358135913601361136213631364136513661367136813691370137113721373137413751376137713781379138013811382138313841385138613871388138913901391139213931394139513961397139813991400140114021403140414051406140714081409141014111412141314141415141614171418141914201421142214231424142514261427142814291430143114321433143414351436143714381439144014411442144314441445144614471448144914501451145214531454145514561457145814591460146114621463146414651466146714681469147014711472147314741475147614771478147914801481148214831484148514861487148814891490149114921493149414951496149714981499150015011502150315041505150615071508150915101511151215131514151515161517151815191520152115221523152415251526152715281529153015311532153315341535153615371538153915401541154215431544154515461547154815491550155115521553155415551556155715581559156015611562156315641565156615671568156915701571157215731574157515761577157815791580158115821583158415851586158715881589159015911592159315941595159615971598
  1. using Aitex.Core.Common.DeviceData;
  2. using MECF.Framework.Common.DataCenter;
  3. using MECF.Framework.Common.OperationCenter;
  4. using Prism.Commands;
  5. using Prism.Mvvm;
  6. using System;
  7. using System.Collections.Generic;
  8. using System.Windows;
  9. using System.Windows.Threading;
  10. using Venus_Core;
  11. using Venus_MainPages.Views;
  12. using System.Linq;
  13. using System.Threading.Tasks;
  14. using Microsoft.Win32;
  15. using System.IO;
  16. using Venus_Themes.CustomControls;
  17. namespace Venus_MainPages.ViewModels
  18. {
  19. internal class OverViewModel : BindableBase
  20. {
  21. #region 私有字段
  22. private bool m_PVN21ValveIsOpen;
  23. private bool m_PVN22ValveIsOpen;
  24. private bool m_N2ValveIsOpen;
  25. private bool m_PV11ValveIsOpen;
  26. private bool m_PV12ValveIsOpen;
  27. private bool m_PV21ValveIsOpen;
  28. private bool m_PV22ValveIsOpen;
  29. private bool m_PV31ValveIsOpen;
  30. private bool m_PV32ValveIsOpen;
  31. private bool m_PV41ValveIsOpen;
  32. private bool m_PV42ValveIsOpen;
  33. private bool m_MFC1ValveIsOpen;
  34. private bool m_MFC2ValveIsOpen;
  35. private bool m_MFC3ValveIsOpen;
  36. private bool m_MFC4ValveIsOpen;
  37. private bool m_MFC5ValveIsOpen;
  38. private bool m_MFC6ValveIsOpen;
  39. private bool m_MFC7ValveIsOpen;
  40. private bool m_MFC8ValveIsOpen;
  41. private bool m_GasFinalValveIsOpen;
  42. private bool m_SoftPumpValveIsOpen;
  43. private bool m_FastPumpValveIsOpen;
  44. private bool m_PVHe1ValveIsOpen;
  45. private bool m_PVHe2ValveIsOpen;
  46. private bool m_TurboPumpPumpingValveIsOpen;
  47. private bool m_TurboPumpPurgeValveIsOpen;
  48. private bool m_GuageValveIsOpen;
  49. private bool m_PendulumValveIsOpen;
  50. private bool m_BRFIsOn;
  51. private bool m_SRFIsOn;
  52. private double m_HeGasSetpoint;
  53. private int m_HePressureSetpoint;
  54. private float m_SRFFwdPowerSetpoint;
  55. private float m_BRFFwdPowerSetpoint;
  56. private float m_SRFMatchC1;
  57. private float m_SRFMatchC2;
  58. private float m_BRFMatchC1;
  59. private float m_BRFMatchC2;
  60. private double m_MFC1SetPoint;
  61. private double m_MFC2SetPoint;
  62. private double m_MFC3SetPoint;
  63. private double m_MFC4SetPoint;
  64. private double m_MFC5SetPoint;
  65. private double m_MFC6SetPoint;
  66. private double m_MFC7SetPoint;
  67. private double m_MFC8SetPoint;
  68. private double m_N2SetPoint;
  69. private AITMfcData m_MFC1Data;
  70. private AITMfcData m_MFC2Data;
  71. private AITMfcData m_MFC3Data;
  72. private AITMfcData m_MFC4Data;
  73. private AITMfcData m_MFC5Data;
  74. private AITMfcData m_MFC6Data;
  75. private AITMfcData m_MFC7Data;
  76. private AITMfcData m_MFC8Data;
  77. private AITMfcData m_MFCHeData;
  78. private AITMfcData m_MFCN2Data;
  79. private AITHeaterData m_ValveHeaterData;
  80. private AITHeaterData m_ForelineHeaterData;
  81. private AITHeaterData m_WallHeaterData;
  82. private PMState m_PMCurrentState;
  83. private bool m_SourceRFFanInterlock;
  84. private bool m_IsWLK;
  85. private bool m_IsWaterFlowOk;
  86. private bool m_IsTurboPumpInterlock;
  87. private bool m_IsCDAOK;
  88. private bool m_SensorGasBoxDoor;
  89. private bool m_SensorGasBoxPressure;
  90. private bool m_PumpIsOpen;
  91. private bool m_TurboIsOpen;
  92. private bool m_IsATM;
  93. private bool m_IsVAC;
  94. private bool m_HVIsOn;
  95. private List<string> m_RtConfigKeys;
  96. private Dictionary<string, object> m_RtConfigValues;
  97. private List<string> m_RtDataKeys;
  98. private Dictionary<string, object> m_RtDataValues;
  99. private int m_PositionValue;
  100. private bool m_IsPositionMode;
  101. private int m_ESCVoltage;
  102. private bool m_GasIsFlowing;
  103. private bool m_IsAutoMode;
  104. private string m_SelectedRecipe;
  105. private float m_ChillerTempSetpoint;
  106. private float m_WallTempSetpoint;
  107. private bool m_HeIsPressureMode;
  108. private bool m_ChillerIsOn;
  109. private float m_ProcessHighPressure;
  110. private float m_ProcessLowPressure;
  111. private float m_ForelinePressurePressure;
  112. private float m_ESCHePressure;
  113. ButterflyValveView butterflyValveMessageBox;
  114. HeaterView heaterView;
  115. private int m_TurboPumpRotationalSpeed;
  116. private bool m_LiftPinIsUp;
  117. private bool m_IsSlitDoorClosed;
  118. private bool m_IsLidClosed;
  119. private float m_ChillerTemperature;
  120. private int m_ESCHVOutputVoltage;
  121. private float m_SRfReflectPower;
  122. private float m_SRfForwardPowerFeedBack;
  123. private float m_BRfReflectPower;
  124. private float m_BRfForwardPowerFeedBack;
  125. private int m_MatchWorkMode;
  126. private int m_BiasMatchWorkMode;
  127. private float m_MatchC1;
  128. private float m_MatchC2;
  129. private float m_BiasMatchC1;
  130. private float m_BiasMatchC2;
  131. private float m_PendulumValvePosition;
  132. #endregion
  133. #region 属性
  134. public float PendulumValvePosition
  135. {
  136. get { return m_PendulumValvePosition; }
  137. set{SetProperty(ref m_PendulumValvePosition, value);}
  138. }
  139. public float BiasMatchC1
  140. {
  141. get { return m_BiasMatchC1; }
  142. set
  143. {
  144. SetProperty(ref m_BiasMatchC1, value);
  145. }
  146. }
  147. public float BiasMatchC2
  148. {
  149. get { return m_BiasMatchC2; }
  150. set
  151. {
  152. SetProperty(ref m_BiasMatchC2, value);
  153. }
  154. }
  155. public float MatchC1
  156. {
  157. get { return m_MatchC1; }
  158. set
  159. {
  160. SetProperty(ref m_MatchC1, value);
  161. }
  162. }
  163. public float MatchC2
  164. {
  165. get { return m_MatchC2; }
  166. set
  167. {
  168. SetProperty(ref m_MatchC2, value);
  169. }
  170. }
  171. public int BiasMatchWorkMode
  172. {
  173. get { return m_BiasMatchWorkMode; }
  174. set
  175. {
  176. SetProperty(ref m_BiasMatchWorkMode, value);
  177. }
  178. }
  179. public int MatchWorkMode
  180. {
  181. get { return m_MatchWorkMode; }
  182. set
  183. {
  184. SetProperty(ref m_MatchWorkMode, value);
  185. }
  186. }
  187. public float BRfReflectPower
  188. {
  189. get { return m_BRfReflectPower; }
  190. set
  191. {
  192. SetProperty(ref m_BRfReflectPower, value);
  193. }
  194. }
  195. public float BRfForwardPowerFeedBack
  196. {
  197. get { return m_BRfForwardPowerFeedBack; }
  198. set
  199. {
  200. SetProperty(ref m_BRfForwardPowerFeedBack, value);
  201. }
  202. }
  203. public float SRfReflectPower
  204. {
  205. get { return m_SRfReflectPower; }
  206. set
  207. {
  208. SetProperty(ref m_SRfReflectPower, value);
  209. }
  210. }
  211. public float SRfForwardPowerFeedBack
  212. {
  213. get { return m_SRfForwardPowerFeedBack; }
  214. set
  215. {
  216. SetProperty(ref m_SRfForwardPowerFeedBack, value);
  217. }
  218. }
  219. public int ESCHVOutputVoltage
  220. {
  221. get { return m_ESCHVOutputVoltage; }
  222. set
  223. {
  224. SetProperty(ref m_ESCHVOutputVoltage, value);
  225. }
  226. }
  227. public float ChillerTemperature
  228. {
  229. get { return m_ChillerTemperature; }
  230. set
  231. {
  232. SetProperty(ref m_ChillerTemperature, value);
  233. }
  234. }
  235. public bool IsLidClosed
  236. {
  237. get { return m_IsLidClosed; }
  238. set
  239. {
  240. SetProperty(ref m_IsLidClosed, value);
  241. }
  242. }
  243. public bool IsSlitDoorClosed
  244. {
  245. get { return m_IsSlitDoorClosed; }
  246. set
  247. {
  248. SetProperty(ref m_IsSlitDoorClosed, value);
  249. }
  250. }
  251. public bool LiftPinIsUp
  252. {
  253. get { return m_LiftPinIsUp; }
  254. set
  255. {
  256. SetProperty(ref m_LiftPinIsUp, value);
  257. }
  258. }
  259. public int TurboPumpRotationalSpeed
  260. {
  261. get { return m_TurboPumpRotationalSpeed; }
  262. set
  263. {
  264. SetProperty(ref m_TurboPumpRotationalSpeed, value);
  265. }
  266. }
  267. public float ESCHePressure
  268. {
  269. get { return m_ESCHePressure; }
  270. set
  271. {
  272. SetProperty(ref m_ESCHePressure, value);
  273. }
  274. }
  275. public float ProcessHighPressure
  276. {
  277. get { return m_ProcessHighPressure; }
  278. set
  279. {
  280. SetProperty(ref m_ProcessHighPressure, value);
  281. }
  282. }
  283. public float ProcessLowPressure
  284. {
  285. get { return m_ProcessLowPressure; }
  286. set
  287. {
  288. SetProperty(ref m_ProcessLowPressure, value);
  289. }
  290. }
  291. public float ForelinePressure
  292. {
  293. get { return m_ForelinePressurePressure; }
  294. set
  295. {
  296. SetProperty(ref m_ForelinePressurePressure, value);
  297. }
  298. }
  299. public bool SourceRFFanInterlock
  300. {
  301. get { return m_SourceRFFanInterlock; }
  302. set
  303. {
  304. SetProperty(ref m_SourceRFFanInterlock, value);
  305. }
  306. }
  307. public bool IsWLK
  308. {
  309. get { return m_IsWLK; }
  310. set
  311. {
  312. SetProperty(ref m_IsWLK, value);
  313. }
  314. }
  315. public bool IsWaterFlowOk
  316. {
  317. get { return m_IsWaterFlowOk; }
  318. set
  319. {
  320. SetProperty(ref m_IsWaterFlowOk, value);
  321. }
  322. }
  323. public bool IsCDAOK
  324. {
  325. get { return m_IsCDAOK; }
  326. set
  327. {
  328. SetProperty(ref m_IsCDAOK, value);
  329. }
  330. }
  331. public bool SensorGasBoxDoor
  332. {
  333. get { return m_SensorGasBoxDoor; }
  334. set
  335. {
  336. SetProperty(ref m_SensorGasBoxDoor, value);
  337. }
  338. }
  339. public bool SensorGasBoxPressure
  340. {
  341. get { return m_SensorGasBoxPressure; }
  342. set
  343. {
  344. SetProperty(ref m_SensorGasBoxPressure, value);
  345. }
  346. }
  347. public bool IsTurboPumpInterlock
  348. {
  349. get { return m_IsTurboPumpInterlock; }
  350. set
  351. {
  352. SetProperty(ref m_IsTurboPumpInterlock, value);
  353. }
  354. }
  355. public string ModuleName { get; set; }
  356. public double MFC1SetPoint
  357. {
  358. get { return m_MFC1SetPoint; }
  359. set { SetProperty(ref m_MFC1SetPoint, value); }
  360. }
  361. public double MFC2SetPoint
  362. {
  363. get { return m_MFC2SetPoint; }
  364. set { SetProperty(ref m_MFC2SetPoint, value); }
  365. }
  366. public double MFC3SetPoint
  367. {
  368. get { return m_MFC3SetPoint; }
  369. set { SetProperty(ref m_MFC3SetPoint, value); }
  370. }
  371. public double MFC4SetPoint
  372. {
  373. get { return m_MFC4SetPoint; }
  374. set { SetProperty(ref m_MFC4SetPoint, value); }
  375. }
  376. public double MFC5SetPoint
  377. {
  378. get { return m_MFC5SetPoint; }
  379. set { SetProperty(ref m_MFC5SetPoint, value); }
  380. }
  381. public double MFC6SetPoint
  382. {
  383. get { return m_MFC6SetPoint; }
  384. set { SetProperty(ref m_MFC6SetPoint, value); }
  385. }
  386. public double MFC7SetPoint
  387. {
  388. get { return m_MFC7SetPoint; }
  389. set { SetProperty(ref m_MFC7SetPoint, value); }
  390. }
  391. public double MFC8SetPoint
  392. {
  393. get { return m_MFC8SetPoint; }
  394. set { SetProperty(ref m_MFC8SetPoint, value); }
  395. }
  396. public double N2SetPoint
  397. {
  398. get { return m_N2SetPoint; }
  399. set { SetProperty(ref m_N2SetPoint, value); }
  400. }
  401. public AITMfcData MFC1Data
  402. {
  403. get { return m_MFC1Data; }
  404. set { SetProperty(ref m_MFC1Data, value); }
  405. }
  406. public AITMfcData MFC2Data
  407. {
  408. get { return m_MFC2Data; }
  409. set { SetProperty(ref m_MFC2Data, value); }
  410. }
  411. public AITMfcData MFC3Data
  412. {
  413. get { return m_MFC3Data; }
  414. set { SetProperty(ref m_MFC3Data, value); }
  415. }
  416. public AITMfcData MFC4Data
  417. {
  418. get { return m_MFC4Data; }
  419. set { SetProperty(ref m_MFC4Data, value); }
  420. }
  421. public AITMfcData MFC5Data
  422. {
  423. get { return m_MFC5Data; }
  424. set { SetProperty(ref m_MFC5Data, value); }
  425. }
  426. public AITMfcData MFC6Data
  427. {
  428. get { return m_MFC6Data; }
  429. set { SetProperty(ref m_MFC6Data, value); }
  430. }
  431. public AITMfcData MFC7Data
  432. {
  433. get { return m_MFC7Data; }
  434. set { SetProperty(ref m_MFC7Data, value); }
  435. }
  436. public AITMfcData MFC8Data
  437. {
  438. get { return m_MFC8Data; }
  439. set { SetProperty(ref m_MFC8Data, value); }
  440. }
  441. public AITMfcData MFCHeData
  442. {
  443. get { return m_MFCHeData; }
  444. set { SetProperty(ref m_MFCHeData, value); }
  445. }
  446. public AITMfcData MFCN2Data
  447. {
  448. get { return m_MFCN2Data; }
  449. set { SetProperty(ref m_MFCN2Data, value); }
  450. }
  451. public AITHeaterData ValveHeaterData
  452. {
  453. get { return m_ValveHeaterData; }
  454. set { SetProperty(ref m_ValveHeaterData, value); }
  455. }
  456. public AITHeaterData ForelineHeaterData
  457. {
  458. get { return m_ForelineHeaterData; }
  459. set { SetProperty(ref m_ForelineHeaterData, value); }
  460. }
  461. public AITHeaterData WallHeaterData
  462. {
  463. get { return m_WallHeaterData; }
  464. set { SetProperty(ref m_WallHeaterData, value); }
  465. }
  466. public PMState PMCurrentState
  467. {
  468. get { return m_PMCurrentState; }
  469. set { SetProperty(ref m_PMCurrentState, value); }
  470. }
  471. public Dictionary<string, object> RtConfigValues
  472. {
  473. get { return m_RtConfigValues; }
  474. set { SetProperty(ref m_RtConfigValues, value); }
  475. }
  476. #region 阀
  477. public bool GasFinalValveIsOpen
  478. {
  479. get { return m_GasFinalValveIsOpen; }
  480. set { SetProperty(ref m_GasFinalValveIsOpen, value); }
  481. }
  482. public bool PVN21ValveIsOpen
  483. {
  484. get { return m_PVN21ValveIsOpen; }
  485. set { SetProperty(ref m_PVN21ValveIsOpen, value); }
  486. }
  487. public bool PVN22ValveIsOpen
  488. {
  489. get { return m_PVN22ValveIsOpen; }
  490. set { SetProperty(ref m_PVN22ValveIsOpen, value); }
  491. }
  492. public bool N2ValveIsOpen
  493. {
  494. get { return m_N2ValveIsOpen; }
  495. set { SetProperty(ref m_N2ValveIsOpen, value); }
  496. }
  497. public bool PV11ValveIsOpen
  498. {
  499. get { return m_PV11ValveIsOpen; }
  500. set { SetProperty(ref m_PV11ValveIsOpen, value); }
  501. }
  502. public bool PV12ValveIsOpen
  503. {
  504. get { return m_PV12ValveIsOpen; }
  505. set { SetProperty(ref m_PV12ValveIsOpen, value); }
  506. }
  507. public bool MFC1ValveIsOpen
  508. {
  509. get { return m_MFC1ValveIsOpen; }
  510. set { SetProperty(ref m_MFC1ValveIsOpen, value); }
  511. }
  512. public bool PV21ValveIsOpen
  513. {
  514. get { return m_PV21ValveIsOpen; }
  515. set { SetProperty(ref m_PV21ValveIsOpen, value); }
  516. }
  517. public bool PV22ValveIsOpen
  518. {
  519. get { return m_PV22ValveIsOpen; }
  520. set { SetProperty(ref m_PV22ValveIsOpen, value); }
  521. }
  522. public bool MFC2ValveIsOpen
  523. {
  524. get { return m_MFC2ValveIsOpen; }
  525. set { SetProperty(ref m_MFC2ValveIsOpen, value); }
  526. }
  527. public bool PV31ValveIsOpen
  528. {
  529. get { return m_PV31ValveIsOpen; }
  530. set { SetProperty(ref m_PV31ValveIsOpen, value); }
  531. }
  532. public bool PV32ValveIsOpen
  533. {
  534. get { return m_PV32ValveIsOpen; }
  535. set { SetProperty(ref m_PV32ValveIsOpen, value); }
  536. }
  537. public bool MFC3ValveIsOpen
  538. {
  539. get { return m_MFC3ValveIsOpen; }
  540. set { SetProperty(ref m_MFC3ValveIsOpen, value); }
  541. }
  542. public bool PV41ValveIsOpen
  543. {
  544. get { return m_PV41ValveIsOpen; }
  545. set { SetProperty(ref m_PV41ValveIsOpen, value); }
  546. }
  547. public bool PV42ValveIsOpen
  548. {
  549. get { return m_PV42ValveIsOpen; }
  550. set { SetProperty(ref m_PV42ValveIsOpen, value); }
  551. }
  552. public bool MFC4ValveIsOpen
  553. {
  554. get { return m_MFC4ValveIsOpen; }
  555. set { SetProperty(ref m_MFC4ValveIsOpen, value); }
  556. }
  557. public bool MFC5ValveIsOpen
  558. {
  559. get { return m_MFC5ValveIsOpen; }
  560. set { SetProperty(ref m_MFC5ValveIsOpen, value); }
  561. }
  562. public bool MFC6ValveIsOpen
  563. {
  564. get { return m_MFC6ValveIsOpen; }
  565. set { SetProperty(ref m_MFC6ValveIsOpen, value); }
  566. }
  567. public bool MFC7ValveIsOpen
  568. {
  569. get { return m_MFC7ValveIsOpen; }
  570. set { SetProperty(ref m_MFC7ValveIsOpen, value); }
  571. }
  572. public bool MFC8ValveIsOpen
  573. {
  574. get { return m_MFC8ValveIsOpen; }
  575. set { SetProperty(ref m_MFC8ValveIsOpen, value); }
  576. }
  577. public bool PVHe1ValveIsOpen
  578. {
  579. get { return m_PVHe1ValveIsOpen; }
  580. set { SetProperty(ref m_PVHe1ValveIsOpen, value); }
  581. }
  582. public bool PVHe2ValveIsOpen
  583. {
  584. get { return m_PVHe2ValveIsOpen; }
  585. set { SetProperty(ref m_PVHe2ValveIsOpen, value); }
  586. }
  587. public bool TurboPumpPumpingValveIsOpen
  588. {
  589. get { return m_TurboPumpPumpingValveIsOpen; }
  590. set { SetProperty(ref m_TurboPumpPumpingValveIsOpen, value); }
  591. }
  592. public bool TurboPumpPurgeValveIsOpen
  593. {
  594. get { return m_TurboPumpPurgeValveIsOpen; }
  595. set { SetProperty(ref m_TurboPumpPurgeValveIsOpen, value); }
  596. }
  597. public bool SoftPumpValveIsOpen
  598. {
  599. get { return m_SoftPumpValveIsOpen; }
  600. set { SetProperty(ref m_SoftPumpValveIsOpen, value); }
  601. }
  602. public bool FastPumpValveIsOpen
  603. {
  604. get { return m_FastPumpValveIsOpen; }
  605. set { SetProperty(ref m_FastPumpValveIsOpen, value); }
  606. }
  607. public bool GuageValveIsOpen
  608. {
  609. get { return m_GuageValveIsOpen; }
  610. set { SetProperty(ref m_GuageValveIsOpen, value); }
  611. }
  612. #endregion
  613. public Dictionary<string, object> RtDataValues
  614. {
  615. get { return m_RtDataValues; }
  616. set { SetProperty(ref m_RtDataValues, value); }
  617. }
  618. public bool PumpIsOpen
  619. {
  620. get { return m_PumpIsOpen; }
  621. set { SetProperty(ref m_PumpIsOpen, value); }
  622. }
  623. public bool PendulumValveIsOpen
  624. {
  625. get { return m_PendulumValveIsOpen; }
  626. set { SetProperty(ref m_PendulumValveIsOpen, value); }
  627. }
  628. public bool TurboIsOpen
  629. {
  630. get { return m_TurboIsOpen; }
  631. set { SetProperty(ref m_TurboIsOpen, value); }
  632. }
  633. public bool IsATM
  634. {
  635. get { return m_IsATM; }
  636. set { SetProperty(ref m_IsATM, value); }
  637. }
  638. public bool IsVAC
  639. {
  640. get { return m_IsVAC; }
  641. set { SetProperty(ref m_IsVAC, value); }
  642. }
  643. public string BasePressureSetPoint
  644. {
  645. get { return RtConfigValues[$"{ModuleName}.Pump.PumpBasePressure"].ToString(); }
  646. }
  647. public string PumpLimitSetPoint
  648. {
  649. get { return RtConfigValues[$"{ModuleName}.Pump.PumpTimeLimit"].ToString(); }
  650. }
  651. public bool BRFIsOn
  652. {
  653. get { return m_BRFIsOn; }
  654. set { SetProperty(ref m_BRFIsOn, value); }
  655. }
  656. public bool SRFIsOn
  657. {
  658. get { return m_SRFIsOn; }
  659. set { SetProperty(ref m_SRFIsOn, value); }
  660. }
  661. public int PositionValue
  662. {
  663. get { return m_PositionValue; }
  664. set { SetProperty(ref m_PositionValue, value); }
  665. }
  666. public bool IsPositionMode
  667. {
  668. get { return m_IsPositionMode; }
  669. set { SetProperty(ref m_IsPositionMode, value); }
  670. }
  671. public double HeGasSetpoint
  672. {
  673. get { return m_HeGasSetpoint; }
  674. set
  675. {
  676. SetProperty(ref m_HeGasSetpoint, value);
  677. }
  678. }
  679. public int HePressureSetpoint
  680. {
  681. get { return m_HePressureSetpoint; }
  682. set
  683. {
  684. SetProperty(ref m_HePressureSetpoint, value);
  685. }
  686. }
  687. public float SRFFwdPowerSetpoint
  688. {
  689. get { return m_SRFFwdPowerSetpoint; }
  690. set { SetProperty(ref m_SRFFwdPowerSetpoint, value); }
  691. }
  692. public float BRFFwdPowerSetpoint
  693. {
  694. get { return m_BRFFwdPowerSetpoint; }
  695. set { SetProperty(ref m_BRFFwdPowerSetpoint, value); }
  696. }
  697. public int ESCVoltage
  698. {
  699. get { return m_ESCVoltage; }
  700. set { SetProperty(ref m_ESCVoltage, value); }
  701. }
  702. public bool HVIsOn
  703. {
  704. get { return m_HVIsOn; }
  705. set { SetProperty(ref m_HVIsOn, value); }
  706. }
  707. public float SRFMatchC1
  708. {
  709. get { return m_SRFMatchC1; }
  710. set { SetProperty(ref m_SRFMatchC1, value); }
  711. }
  712. public float SRFMatchC2
  713. {
  714. get { return m_SRFMatchC2; }
  715. set { SetProperty(ref m_SRFMatchC2, value); }
  716. }
  717. public float BRFMatchC1
  718. {
  719. get { return m_BRFMatchC1; }
  720. set { SetProperty(ref m_BRFMatchC1, value); }
  721. }
  722. public float BRFMatchC2
  723. {
  724. get { return m_BRFMatchC2; }
  725. set { SetProperty(ref m_BRFMatchC2, value); }
  726. }
  727. public bool GasIsFlowing
  728. {
  729. get { return m_GasIsFlowing; }
  730. set { SetProperty(ref m_GasIsFlowing, value); }
  731. }
  732. public bool IsAutoMode
  733. {
  734. get { return m_IsAutoMode; }
  735. set { SetProperty(ref m_IsAutoMode, value); }
  736. }
  737. public string SelectedRecipe
  738. {
  739. get { return m_SelectedRecipe; }
  740. set { SetProperty(ref m_SelectedRecipe, value); }
  741. }
  742. public float ChillerTempSetpoint
  743. {
  744. get { return m_ChillerTempSetpoint; }
  745. set { SetProperty(ref m_ChillerTempSetpoint, value); }
  746. }
  747. public float WallTempSetpoint
  748. {
  749. get { return m_WallTempSetpoint; }
  750. set { SetProperty(ref m_WallTempSetpoint, value); }
  751. }
  752. public bool HeIsPressureMode
  753. {
  754. get { return m_HeIsPressureMode; }
  755. set { SetProperty(ref m_HeIsPressureMode, value); }
  756. }
  757. public bool ChillerIsOn
  758. {
  759. get { return m_ChillerIsOn; }
  760. set { SetProperty(ref m_ChillerIsOn, value); }
  761. }
  762. #endregion
  763. #region 命令
  764. private DelegateCommand _PMInitCommnad;
  765. public DelegateCommand PMInitCommnad =>
  766. _PMInitCommnad ?? (_PMInitCommnad = new DelegateCommand(OnPMInit));
  767. private DelegateCommand _PMAbortCommnad;
  768. public DelegateCommand PMAbortCommnad =>
  769. _PMAbortCommnad ?? (_PMAbortCommnad = new DelegateCommand(OnPMAbort));
  770. private DelegateCommand _GasCommand;
  771. public DelegateCommand GasCommand =>
  772. _GasCommand ?? (_GasCommand = new DelegateCommand(OnGas));
  773. private DelegateCommand _HeCommand;
  774. public DelegateCommand HeCommand =>
  775. _HeCommand ?? (_HeCommand = new DelegateCommand(OnHe));
  776. private DelegateCommand _RfCommand;
  777. public DelegateCommand RfCommand =>
  778. _RfCommand ?? (_RfCommand = new DelegateCommand(OnRf));
  779. private DelegateCommand _PurgeCommand;
  780. public DelegateCommand PurgeCommand =>
  781. _PurgeCommand ?? (_PurgeCommand = new DelegateCommand(OnPurge));
  782. private DelegateCommand _VentCommand;
  783. public DelegateCommand VentCommand =>
  784. _VentCommand ?? (_VentCommand = new DelegateCommand(OnVent));
  785. private DelegateCommand _PumpCommand;
  786. public DelegateCommand PumpCommand =>
  787. _PumpCommand ?? (_PumpCommand = new DelegateCommand(OnPump));
  788. private DelegateCommand _OpenPumpCommand;
  789. public DelegateCommand OpenPumpCommand =>
  790. _OpenPumpCommand ?? (_OpenPumpCommand = new DelegateCommand(OnOpenPump));
  791. private DelegateCommand _ClosePumpCommand;
  792. public DelegateCommand ClosePumpCommand =>
  793. _ClosePumpCommand ?? (_ClosePumpCommand = new DelegateCommand(OnClosePump));
  794. private DelegateCommand _OpenTurboPumpCommand;
  795. public DelegateCommand OpenTurboPumpCommand =>
  796. _OpenTurboPumpCommand ?? (_OpenTurboPumpCommand = new DelegateCommand(OnOpenTurboPump));
  797. private DelegateCommand _CloseTurboPumpCommand;
  798. public DelegateCommand CloseTurboPumpCommand =>
  799. _CloseTurboPumpCommand ?? (_CloseTurboPumpCommand = new DelegateCommand(OnCloseTurboPump));
  800. private DelegateCommand _OpenPendulumValveCommand;
  801. public DelegateCommand OpenPendulumValveCommand =>
  802. _OpenPendulumValveCommand ?? (_OpenPendulumValveCommand = new DelegateCommand(OnOpenPendulumValve));
  803. private DelegateCommand _ClosePendulumValveCommand;
  804. public DelegateCommand ClosePendulumValveCommand =>
  805. _ClosePendulumValveCommand ?? (_ClosePendulumValveCommand = new DelegateCommand(OnClosePendulumValve));
  806. private DelegateCommand<object> _PinUpDownCommand;
  807. public DelegateCommand<object> PinUpDownCommand =>
  808. _PinUpDownCommand ?? (_PinUpDownCommand = new DelegateCommand<object>(OnPinUpDown));
  809. private DelegateCommand _SetSRfCommand;
  810. public DelegateCommand SetSRfCommand =>
  811. _SetSRfCommand ?? (_SetSRfCommand = new DelegateCommand(OnSetSRf));
  812. private DelegateCommand _SetBRfCommand;
  813. public DelegateCommand SetBRfCommand =>
  814. _SetBRfCommand ?? (_SetBRfCommand = new DelegateCommand(OnSetBRf));
  815. private DelegateCommand _OpenButterflyValveViewCommand;
  816. public DelegateCommand OpenButterflyValveViewCommand =>
  817. _OpenButterflyValveViewCommand ?? (_OpenButterflyValveViewCommand = new DelegateCommand(OnOpenButterflyValveView));
  818. //private DelegateCommand _GasCommand;
  819. //public DelegateCommand GasCommand =>
  820. // _GasCommand ?? (_GasCommand = new DelegateCommand(OnGas));
  821. private DelegateCommand _HVCommand;
  822. public DelegateCommand HVCommand =>
  823. _HVCommand ?? (_HVCommand = new DelegateCommand(OnHV));
  824. private DelegateCommand _HVSetCommand;
  825. public DelegateCommand HVSetCommand =>
  826. _HVSetCommand ?? (_HVSetCommand = new DelegateCommand(OnHVSet));
  827. private DelegateCommand<object> _SetMatchModeCommand;
  828. public DelegateCommand<object> SetMatchModeCommand =>
  829. _SetMatchModeCommand ?? (_SetMatchModeCommand = new DelegateCommand<object>(OnSetMatchMode));
  830. private DelegateCommand _LoadRecipeCommand;
  831. public DelegateCommand LoadRecipeCommand =>
  832. _LoadRecipeCommand ?? (_LoadRecipeCommand = new DelegateCommand(OnLoadRecipe));
  833. private DelegateCommand<object> _ControlValveCommand;
  834. public DelegateCommand<object> ControlValveCommand =>
  835. _ControlValveCommand ?? (_ControlValveCommand = new DelegateCommand<object>(OnControlValve));
  836. private DelegateCommand<object> _RunRecipeCommand;
  837. public DelegateCommand<object> RunRecipeCommand =>
  838. _RunRecipeCommand ?? (_RunRecipeCommand = new DelegateCommand<object>(OnRunRecipe));
  839. private DelegateCommand _SetChillerTempCommand;
  840. public DelegateCommand SetChillerTempCommand =>
  841. _SetChillerTempCommand ?? (_SetChillerTempCommand = new DelegateCommand(OnSetChillerTemp));
  842. private DelegateCommand _OnOffChillerCommand;
  843. public DelegateCommand OnOffChillerCommand =>
  844. _OnOffChillerCommand ?? (_OnOffChillerCommand = new DelegateCommand(OnOffChiller));
  845. private DelegateCommand<object> _HeaterCommand;
  846. public DelegateCommand<object> HeaterCommand =>
  847. _HeaterCommand ?? (_HeaterCommand = new DelegateCommand<object>(OnHeater));
  848. #endregion
  849. #region 构造函数
  850. public OverViewModel()
  851. {
  852. //RTData.init();
  853. m_RtConfigKeys = new List<string>();
  854. m_RtDataKeys = new List<string>();
  855. m_IsATM = true;
  856. ModuleName = "PMA";
  857. addConfigKeys();
  858. addDataKeys();
  859. DispatcherTimer timer = new DispatcherTimer();
  860. timer.Interval = TimeSpan.FromSeconds(0.5);
  861. timer.Tick += timer_Tick;
  862. timer.Start();
  863. }
  864. #endregion
  865. #region 命令方法
  866. private void OnControlValve(object obj)
  867. {
  868. CommonValveControl commonValveControl = (CommonValveControl)obj;
  869. if (commonValveControl.IsCanEdit == true)
  870. {
  871. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ControlValve",Convert.ToInt32( commonValveControl.Tag.ToString()), !commonValveControl.Status);
  872. }
  873. }
  874. private void OnPMInit()
  875. {
  876. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Home");
  877. }
  878. private async void OnGas()
  879. {
  880. await Task.Run(async () =>
  881. {
  882. //if (GasIsFlowing==true)
  883. //{
  884. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  885. //}
  886. //else
  887. //{
  888. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas1.SetPoint", MFC1SetPoint);
  889. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas2.SetPoint", MFC2SetPoint);
  890. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas3.SetPoint", MFC3SetPoint);
  891. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas4.SetPoint", MFC4SetPoint);
  892. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas5.SetPoint", MFC5SetPoint);
  893. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas6.SetPoint", MFC6SetPoint);
  894. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas7.SetPoint", MFC7SetPoint);
  895. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas8.SetPoint", MFC8SetPoint);
  896. await Task.Delay(1000);
  897. object[] mfc = new object[8];
  898. string[] mfcSetPoint = new string[8];
  899. //for (int index = 0; index < mfc.Length; index++)
  900. //{
  901. // mfc[index] = RtDataValues[$"{ModuleName}.MfcGas{index + 1}.SetPoint"];
  902. //}
  903. mfc[0] = MFC1Data.SetPoint;
  904. mfc[1] = MFC2Data.SetPoint;
  905. mfc[2] = MFC3Data.SetPoint;
  906. mfc[3] = MFC4Data.SetPoint;
  907. mfc[4] = MFC5Data.SetPoint;
  908. mfc[5] = MFC6Data.SetPoint;
  909. mfc[6] = MFC7Data.SetPoint;
  910. mfc[7] = MFC8Data.SetPoint;
  911. //if (((Math.Abs((double)mfc[0] - (double)_oldmfc[0]) < 0.01) && (Math.Abs((double)mfc[1] - (double)_oldmfc[1]) < 0.01) && (Math.Abs((double)mfc[2] - (double)_oldmfc[2])) < 0.01)
  912. // || ((Math.Abs((double)mfc[0]) <= 0.01 && Math.Abs((double)mfc[1]) <= 0.01 && Math.Abs((double)mfc[2]) <= 0.01)))
  913. //{
  914. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  915. // return;
  916. //}
  917. //_oldmfc = mfc;
  918. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.GasFlow}", mfc);
  919. //}
  920. });
  921. }
  922. private void OnHe()
  923. {
  924. if (PVHe1ValveIsOpen == true)
  925. {
  926. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBacksideHeFlow", 0.0d);
  927. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBacksideHePressure", 0);
  928. }
  929. else
  930. {
  931. if (HeIsPressureMode)
  932. {
  933. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBacksideHePressure", HeGasSetpoint);
  934. }
  935. else
  936. {
  937. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBacksideHeFlow", HeGasSetpoint);
  938. }
  939. }
  940. }
  941. private void OnRf()
  942. {
  943. //if (RtDataValues[$"{ModuleName}.FsmState"].ToString() == PMState.RfPowering.ToString())
  944. if (PMCurrentState == PMState.RfPowering)
  945. {
  946. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  947. }
  948. else
  949. {
  950. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.RfPower}");
  951. }
  952. }
  953. private void OnPurge()
  954. {
  955. //if (RtDataValues[$"{ModuleName}.FsmState"].ToString() ==PMState.Purge.ToString())
  956. //if (PMCurrentState == PMState.Purging || N2SetPoint<=0)
  957. //{
  958. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", 0);
  959. // await Task.Delay(1000);
  960. // //InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StopPurge");
  961. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  962. //}
  963. //else
  964. //{
  965. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", N2SetPoint);
  966. // await Task.Delay(1000);
  967. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Purge");
  968. //}
  969. if (PMCurrentState == PMState.Purging)
  970. {
  971. //InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", 0);
  972. //await Task.Delay(1000);
  973. ////InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StopPurge");
  974. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  975. }
  976. else
  977. {
  978. //InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", N2SetPoint);
  979. //await Task.Delay(1000);
  980. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Purge");
  981. }
  982. }
  983. private void OnVent()
  984. {
  985. //if (RtDataValues[$"{ModuleName}.FsmState"].ToString()==PMState.Venting.ToString())
  986. if (PMCurrentState == PMState.Venting)
  987. {
  988. //InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StopVent");
  989. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  990. }
  991. else
  992. {
  993. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Vent");
  994. }
  995. }
  996. private void OnPump()
  997. {
  998. //if (RtDataValues[$"{ModuleName}.FsmState"].ToString() == PMState.Pumping.ToString())
  999. if (PMCurrentState==PMState.Pumping)
  1000. {
  1001. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1002. return;
  1003. }
  1004. if (RtDataValues[$"{ModuleName}.FsmState"].ToString() == "IsPumpingOkForProcess")
  1005. {
  1006. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StopPump");
  1007. return;
  1008. }
  1009. // 设置底压
  1010. double basePressure = string.IsNullOrEmpty(BasePressureSetPoint) ? 0 : Convert.ToDouble(BasePressureSetPoint);
  1011. if (basePressure <= 0.01 || basePressure >= 1000)
  1012. {
  1013. MessageBox.Show($"基准压力设定值 {basePressure} 无效,应该在0到1000毫托之间");
  1014. return;
  1015. }
  1016. double pumpLimit = string.IsNullOrEmpty(PumpLimitSetPoint) ? 0 : Convert.ToDouble(PumpLimitSetPoint);
  1017. if (pumpLimit <= 0.01 || pumpLimit >= 1200)
  1018. {
  1019. MessageBox.Show($"抽气时间应该在0到1200之间,当前设定值{pumpLimit}");
  1020. return;
  1021. }
  1022. InvokeClient.Instance.Service.DoOperation("System.SetConfig", $"{ModuleName}.Pump.PumpBasePressure", basePressure.ToString());
  1023. InvokeClient.Instance.Service.DoOperation("System.SetConfig", $"{ModuleName}.Pump.PumpTimeLimit", pumpLimit.ToString());
  1024. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Pump");
  1025. }
  1026. private void OnOpenPump()
  1027. {
  1028. //if (RtDataValues[$"{ModuleName}.FsmState"].ToString() == "LaunchingPump")
  1029. if (PMCurrentState==PMState.LaunchingPump)
  1030. {
  1031. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1032. return;
  1033. }
  1034. //if (PumpIsOpen == true)
  1035. //{
  1036. // return;
  1037. //}
  1038. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StartPump");
  1039. }
  1040. private void OnClosePump()
  1041. {
  1042. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ClosePump");
  1043. }
  1044. private void OnOpenTurboPump()
  1045. {
  1046. //TurboIsOpen = true;
  1047. //if (RtDataValues[$"{ModuleName}.FsmState"].ToString() == "LaunchingTurbo")
  1048. if (PMCurrentState == PMState.LaunchingTurboPump)
  1049. {
  1050. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1051. return;
  1052. }
  1053. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StartTurboPump");
  1054. }
  1055. private void OnCloseTurboPump()
  1056. {
  1057. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.CloseTurboPump");
  1058. }
  1059. private void OnOpenPendulumValve()
  1060. {
  1061. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.TurnPendulumValve",true);
  1062. }
  1063. private void OnClosePendulumValve()
  1064. {
  1065. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.TurnPendulumValve",false);
  1066. }
  1067. private void OnPinUpDown(object upDown)
  1068. {
  1069. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetLiftPin", Convert.ToBoolean(upDown));
  1070. }
  1071. private async void OnSetSRf()
  1072. {
  1073. if (SRFIsOn == true)
  1074. {
  1075. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetSRf", SRFFwdPowerSetpoint, false);
  1076. }
  1077. else
  1078. {
  1079. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.Match}.{AITRfOperation.SetMatchPosition}", SRFMatchC1, SRFMatchC2);
  1080. //InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.Match}.{AITRfOperation.SetMatchPositionC2}", SRFMatchC2);
  1081. var t = Task.Run(async delegate
  1082. {
  1083. await Task.Delay(100);
  1084. return 42;
  1085. });
  1086. await t;
  1087. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetSRf", SRFFwdPowerSetpoint, true);
  1088. }
  1089. }
  1090. private async void OnSetBRf()
  1091. {
  1092. if (BRFIsOn == true)
  1093. {
  1094. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBRf", BRFFwdPowerSetpoint, false);
  1095. }
  1096. else
  1097. {
  1098. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.BiasMatch}.{AITRfOperation.SetMatchPosition}", BRFMatchC1,BRFMatchC2);
  1099. //InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.BiasMatch}.{AITRfOperation.SetMatchPositionC2}", BRFMatchC2);
  1100. //Thread.Sleep(100);
  1101. var t = Task.Run(async delegate
  1102. {
  1103. await Task.Delay(100);
  1104. return 42;
  1105. });
  1106. await t;
  1107. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBRf", BRFFwdPowerSetpoint, true);
  1108. }
  1109. }
  1110. private void OnPMAbort()
  1111. {
  1112. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Abort");
  1113. }
  1114. private void OnOpenButterflyValveView()
  1115. {
  1116. //if (butterflyValveMessageBox == null)
  1117. //{
  1118. var _mainWindow = Application.Current.Windows.Cast<Window>().FirstOrDefault(window => window is Window) as Window;
  1119. butterflyValveMessageBox = new ButterflyValveView();
  1120. butterflyValveMessageBox.WindowStartupLocation = WindowStartupLocation.Manual;
  1121. butterflyValveMessageBox.Left = 700;
  1122. butterflyValveMessageBox.Top = 600;
  1123. butterflyValveMessageBox.Show();
  1124. butterflyValveMessageBox.Owner = _mainWindow;
  1125. //}
  1126. }
  1127. private void OnLoadRecipe()
  1128. {
  1129. OpenFileDialog dialog = new OpenFileDialog();
  1130. dialog.Filter = ".rcp|*.rcp";
  1131. dialog.InitialDirectory = Path.Combine(QueryDataClient.Instance.Service.GetData("GetRTPath").ToString(), "Recipes");
  1132. if (dialog.ShowDialog() == false) return;
  1133. SelectedRecipe = dialog.SafeFileName.Split('.')[0];
  1134. }
  1135. private async void OnHV()
  1136. {
  1137. if (HVIsOn == true)
  1138. {
  1139. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetESCHVIsOn", false);
  1140. }
  1141. else
  1142. {
  1143. await Task.Run(async () =>
  1144. {
  1145. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetESCHVIsOn", true);
  1146. await Task.Delay(1000);
  1147. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetESCHV", ESCVoltage);
  1148. });
  1149. }
  1150. }
  1151. private void OnHVSet()
  1152. {
  1153. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetESCHV", ESCVoltage);
  1154. }
  1155. private void OnSetMatchMode(object obj)
  1156. {
  1157. switch (obj.ToString())
  1158. {
  1159. case "SRFManual":
  1160. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.Match.ToString()}.{AITRfOperation.SetMatchProcessMode}", EnumRfMatchTuneMode.Manual.ToString());
  1161. break;
  1162. case "SRFAuto":
  1163. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.Match.ToString()}.{AITRfOperation.SetMatchProcessMode}", EnumRfMatchTuneMode.Auto.ToString());
  1164. break;
  1165. case "BRFManual":
  1166. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.BiasMatch.ToString()}.{AITRfOperation.SetMatchProcessMode}", EnumRfMatchTuneMode.Manual.ToString());
  1167. break;
  1168. case "BRFAuto":
  1169. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.BiasMatch.ToString()}.{AITRfOperation.SetMatchProcessMode}", EnumRfMatchTuneMode.Auto.ToString());
  1170. break;
  1171. }
  1172. }
  1173. private void OnRunRecipe(object obj)
  1174. {
  1175. string recipeName = SelectedRecipe;
  1176. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.RunRecipe}",recipeName);
  1177. }
  1178. private void OnSetChillerTemp()
  1179. {
  1180. var value = (QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.Chiller.ChillerTemperatureOffset").ToString());
  1181. float x;
  1182. float.TryParse(value, out x);
  1183. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.HeatChiller", ChillerTempSetpoint, x);
  1184. }
  1185. private void OnOffChiller()
  1186. {
  1187. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.OnOffChiller", !ChillerIsOn);
  1188. }
  1189. private void OnHeater(object obj)
  1190. {
  1191. AITHeaterData heaterData = obj as AITHeaterData;
  1192. var _mainWindow = Application.Current.Windows.Cast<Window>().FirstOrDefault(window => window is Window) as Window;
  1193. heaterView = new HeaterView(heaterData);
  1194. heaterView.WindowStartupLocation = WindowStartupLocation.CenterScreen;
  1195. heaterView.Owner = _mainWindow;
  1196. heaterView.Show();
  1197. }
  1198. #endregion
  1199. #region 私有方法
  1200. void timer_Tick(object sender, EventArgs e)
  1201. {
  1202. RtConfigValues = QueryDataClient.Instance.Service.PollConfig(m_RtConfigKeys);
  1203. RtDataValues = QueryDataClient.Instance.Service.PollData(m_RtDataKeys);
  1204. PVN21ValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValvePVN21.IsOpen"];
  1205. GasFinalValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValveGasFinal.IsOpen"];
  1206. PV11ValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValvePV11.IsOpen"];
  1207. PV12ValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValvePV12.IsOpen"];
  1208. PV21ValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValvePV21.IsOpen"];
  1209. PV22ValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValvePV22.IsOpen"];
  1210. PV31ValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValvePV31.IsOpen"];
  1211. PV32ValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValvePV32.IsOpen"];
  1212. PV41ValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValvePV41.IsOpen"];
  1213. PV42ValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValvePV42.IsOpen"];
  1214. MFC1ValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValveMfc1.IsOpen"];
  1215. MFC2ValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValveMfc2.IsOpen"];
  1216. MFC3ValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValveMfc3.IsOpen"];
  1217. MFC4ValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValveMfc4.IsOpen"];
  1218. MFC5ValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValveMfc5.IsOpen"];
  1219. MFC6ValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValveMfc6.IsOpen"];
  1220. MFC7ValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValveMfc7.IsOpen"];
  1221. MFC8ValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValveMfc8.IsOpen"];
  1222. N2ValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValveN2.IsOpen"];
  1223. SoftPumpValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValveSoftPump.IsOpen"];
  1224. FastPumpValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValveFastPump.IsOpen"];
  1225. GuageValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValveGuage.IsOpen"];
  1226. PVHe1ValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValvePVHe1.IsOpen"];
  1227. PVHe2ValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValvePVHe2.IsOpen"];
  1228. PVN21ValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValvePVN21.IsOpen"];
  1229. PVN22ValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValvePVN22.IsOpen"];
  1230. TurboPumpPumpingValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValveTurboPumpPumping.IsOpen"];
  1231. TurboPumpPurgeValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValveTurboPumpPurge.IsOpen"];
  1232. HVIsOn = (bool)RtDataValues[$"{ModuleName}.ESCHV.IsOn"];
  1233. PumpIsOpen = (bool)RtDataValues[$"{ModuleName}.PumpIsRunning"];
  1234. TurboIsOpen = (bool)RtDataValues[$"{ModuleName}.TurboPumpIsRunning"];
  1235. BRFIsOn = (bool)RtDataValues[$"{ModuleName}.BRfIsOn"];
  1236. SRFIsOn = (bool)RtDataValues[$"{ModuleName}.SRfIsOn"];
  1237. LiftPinIsUp= (bool)RtDataValues[$"{ModuleName}.LiftPinIsUp"];
  1238. IsSlitDoorClosed = (bool)RtDataValues[$"{ModuleName}.IsSlitDoorClosed"];
  1239. IsLidClosed = (bool)RtDataValues[$"{ModuleName}.IsLidClosed"];
  1240. PendulumValvePosition = float.Parse(RtDataValues[$"{ModuleName}.GetPVPosition"].ToString());
  1241. TurboPumpRotationalSpeed = Convert.ToInt32( RtDataValues[$"{ModuleName}.TurboPumpRotationalSpeed"].ToString());
  1242. PositionValue = -((int)((PendulumValvePosition) * 0.09));
  1243. PMState currentState = (PMState)Enum.Parse(typeof(PMState), RtDataValues[$"{ModuleName}.FsmState"].ToString());
  1244. if (PMCurrentState != currentState)
  1245. {
  1246. PMCurrentState = currentState;
  1247. }
  1248. GasIsFlowing = PMCurrentState == PMState.GasFlowing;
  1249. MFC1Data = (AITMfcData)RtDataValues[$"{ModuleName}.MfcGas1"];
  1250. MFC2Data = (AITMfcData)RtDataValues[$"{ModuleName}.MfcGas2"];
  1251. MFC3Data = (AITMfcData)RtDataValues[$"{ModuleName}.MfcGas3"];
  1252. MFC4Data = (AITMfcData)RtDataValues[$"{ModuleName}.MfcGas4"];
  1253. MFC5Data = (AITMfcData)RtDataValues[$"{ModuleName}.MfcGas5"];
  1254. MFC6Data = (AITMfcData)RtDataValues[$"{ModuleName}.MfcGas6"];
  1255. MFC7Data = (AITMfcData)RtDataValues[$"{ModuleName}.MfcGas7"];
  1256. MFC8Data = (AITMfcData)RtDataValues[$"{ModuleName}.MfcGas8"];
  1257. MFCHeData= (AITMfcData)RtDataValues[$"{ModuleName}.MfcHe"];
  1258. MFCN2Data = (AITMfcData)RtDataValues[$"{ModuleName}.MfcN2"];
  1259. ValveHeaterData= (AITHeaterData)RtDataValues[$"{ModuleName}.ValveHeater.DeviceData"];
  1260. ForelineHeaterData = (AITHeaterData)RtDataValues[$"{ModuleName}.ForelineHeater.DeviceData"];
  1261. WallHeaterData = (AITHeaterData)RtDataValues[$"{ModuleName}.WallHeater.DeviceData"];
  1262. ProcessHighPressure= float.Parse(RtDataValues[$"{ModuleName}.ProcessHighPressure"].ToString());
  1263. ProcessLowPressure = float.Parse(RtDataValues[$"{ModuleName}.ProcessLowPressure"].ToString());
  1264. ForelinePressure = float.Parse(RtDataValues[$"{ModuleName}.ForelinePressure"].ToString());
  1265. ESCHePressure = float.Parse(RtDataValues[$"{ModuleName}.ESCHePressure"].ToString());
  1266. ChillerTemperature = float.Parse(RtDataValues[$"{ModuleName}.Chiller.Temp"].ToString());
  1267. PendulumValveIsOpen = (bool)RtDataValues[$"{ModuleName}.PendulumValve.IsOpen"];
  1268. ChillerIsOn= (bool)RtDataValues[$"{ModuleName}.Chiller.IsOn"];
  1269. SourceRFFanInterlock= (bool)RtDataValues[$"{ModuleName}.SourceRFFanInterlock"];
  1270. IsWLK= (bool)RtDataValues[$"{ModuleName}.IsWLK"];
  1271. IsWaterFlowOk= (bool)RtDataValues[$"{ModuleName}.IsWaterFlowOk"];
  1272. IsTurboPumpInterlock= (bool)RtDataValues[$"{ModuleName}.IsTurboPumpInterlock"];
  1273. IsCDAOK= (bool)RtDataValues[$"{ModuleName}.IsCDA_OK"];
  1274. SensorGasBoxDoor= (bool)RtDataValues[$"{ModuleName}.SensorGasBoxDoor"];
  1275. SensorGasBoxPressure= (bool)RtDataValues[$"{ModuleName}.SensorGasBoxPressure"];
  1276. IsATM= (bool)RtDataValues[$"{ModuleName}.IsATM"];
  1277. IsVAC = (bool)RtDataValues[$"{ModuleName}.IsVAC"];
  1278. ESCHVOutputVoltage= (int)RtDataValues[$"{ModuleName}.ESCHV.OutputVoltage"];
  1279. SRfReflectPower= float.Parse(RtDataValues[$"{ModuleName}.SRfReflectPower"].ToString());
  1280. SRfForwardPowerFeedBack = float.Parse(RtDataValues[$"{ModuleName}.SRfForwardPowerFeedBack"].ToString());
  1281. BRfReflectPower = float.Parse(RtDataValues[$"{ModuleName}.BRfReflectPower"].ToString());
  1282. BRfForwardPowerFeedBack = float.Parse(RtDataValues[$"{ModuleName}.BRfForwardPowerFeedBack"].ToString());
  1283. MatchWorkMode=RtDataValues.Keys.Contains($"{ModuleName}.{VenusDevice.Match}.WorkMode") ? (int)RtDataValues[$"{ModuleName}.{VenusDevice.Match}.WorkMode"] : 0;
  1284. BiasMatchWorkMode = RtDataValues.Keys.Contains($"{ModuleName}.{VenusDevice.BiasMatch}.WorkMode") ? (int)RtDataValues[$"{ ModuleName}.{VenusDevice.BiasMatch}.WorkMode"]:0;
  1285. MatchC1= RtDataValues.Keys.Contains($"{ModuleName}.{VenusDevice.Match}.C1") ? float.Parse(RtDataValues[$"{ModuleName}.{VenusDevice.Match}.C1"].ToString()):0;
  1286. MatchC2 = RtDataValues.Keys.Contains($"{ModuleName}.{VenusDevice.Match}.C2") ? float.Parse(RtDataValues[$"{ModuleName}.{VenusDevice.Match}.C12"].ToString()) : 0;
  1287. BiasMatchC1 = RtDataValues.Keys.Contains($"{ModuleName}.{VenusDevice.BiasMatch}.C1") ? float.Parse(RtDataValues[$"{ModuleName}.{VenusDevice.BiasMatch}.C1"].ToString()):0;
  1288. BiasMatchC2 = RtDataValues.Keys.Contains($"{ModuleName}.{VenusDevice.BiasMatch}.C2") ? float.Parse(RtDataValues[$"{ModuleName}.{VenusDevice.BiasMatch}.C2"].ToString()) : 0;
  1289. }
  1290. private void addConfigKeys()
  1291. {
  1292. m_RtConfigKeys.Add($"{ModuleName}.Pump.PumpBasePressure");
  1293. m_RtConfigKeys.Add($"{ModuleName}.Pump.PumpTimeLimit");
  1294. }
  1295. private void addDataKeys()
  1296. {
  1297. m_RtDataKeys.Add($"{ModuleName}.MfcGas1");
  1298. m_RtDataKeys.Add($"{ModuleName}.MfcGas2");
  1299. m_RtDataKeys.Add($"{ModuleName}.MfcGas3");
  1300. m_RtDataKeys.Add($"{ModuleName}.MfcGas4");
  1301. m_RtDataKeys.Add($"{ModuleName}.MfcGas5");
  1302. m_RtDataKeys.Add($"{ModuleName}.MfcGas6");
  1303. m_RtDataKeys.Add($"{ModuleName}.MfcGas7");
  1304. m_RtDataKeys.Add($"{ModuleName}.MfcGas8");
  1305. m_RtDataKeys.Add($"{ModuleName}.MfcHe");
  1306. m_RtDataKeys.Add($"{ModuleName}.MfcN2");
  1307. m_RtDataKeys.Add($"{ModuleName}.ForelinePressure");
  1308. m_RtDataKeys.Add($"{ModuleName}.ProcessHighPressure");
  1309. m_RtDataKeys.Add($"{ModuleName}.ProcessLowPressure");
  1310. m_RtDataKeys.Add($"{ModuleName}.ChamberPressure");
  1311. m_RtDataKeys.Add($"{ModuleName}.ESCHePressure");
  1312. m_RtDataKeys.Add($"{ModuleName}.IsATM");
  1313. m_RtDataKeys.Add($"{ModuleName}.IsVAC");
  1314. m_RtDataKeys.Add($"{ModuleName}.LiftPinIsUp");
  1315. m_RtDataKeys.Add($"{ModuleName}.LiftPinIsDown");
  1316. m_RtDataKeys.Add($"{ModuleName}.ValvePVN21.IsOpen");
  1317. m_RtDataKeys.Add($"{ModuleName}.ValvePVN22.IsOpen");
  1318. m_RtDataKeys.Add($"{ModuleName}.ValvePV11.IsOpen");
  1319. m_RtDataKeys.Add($"{ModuleName}.ValvePV12.IsOpen");
  1320. m_RtDataKeys.Add($"{ModuleName}.ValvePV21.IsOpen");
  1321. m_RtDataKeys.Add($"{ModuleName}.ValvePV22.IsOpen");
  1322. m_RtDataKeys.Add($"{ModuleName}.ValvePV31.IsOpen");
  1323. m_RtDataKeys.Add($"{ModuleName}.ValvePV32.IsOpen");
  1324. m_RtDataKeys.Add($"{ModuleName}.ValvePV41.IsOpen");
  1325. m_RtDataKeys.Add($"{ModuleName}.ValvePV42.IsOpen");
  1326. m_RtDataKeys.Add($"{ModuleName}.ValveMfc1.IsOpen");
  1327. m_RtDataKeys.Add($"{ModuleName}.ValveMfc2.IsOpen");
  1328. m_RtDataKeys.Add($"{ModuleName}.ValveMfc3.IsOpen");
  1329. m_RtDataKeys.Add($"{ModuleName}.ValveMfc4.IsOpen");
  1330. m_RtDataKeys.Add($"{ModuleName}.ValveMfc5.IsOpen");
  1331. m_RtDataKeys.Add($"{ModuleName}.ValveMfc6.IsOpen");
  1332. m_RtDataKeys.Add($"{ModuleName}.ValveMfc7.IsOpen");
  1333. m_RtDataKeys.Add($"{ModuleName}.ValveMfc8.IsOpen");
  1334. m_RtDataKeys.Add($"{ModuleName}.ValveGasFinal.IsOpen");
  1335. m_RtDataKeys.Add($"{ModuleName}.ValveSoftPump.IsOpen");
  1336. m_RtDataKeys.Add($"{ModuleName}.ValveFastPump.IsOpen");
  1337. m_RtDataKeys.Add($"{ModuleName}.ValveN2.IsOpen");
  1338. m_RtDataKeys.Add($"{ModuleName}.ValvePVHe1.IsOpen");
  1339. m_RtDataKeys.Add($"{ModuleName}.ValvePVHe2.IsOpen");
  1340. m_RtDataKeys.Add($"{ModuleName}.ValveTurboPumpPumping.IsOpen");
  1341. m_RtDataKeys.Add($"{ModuleName}.ValveTurboPumpPurge.IsOpen");
  1342. m_RtDataKeys.Add($"{ModuleName}.ValvePVN21.IsOpen");
  1343. m_RtDataKeys.Add($"{ModuleName}.ValvePVN22.IsOpen");
  1344. m_RtDataKeys.Add($"{ModuleName}.ValveGuage.IsOpen");
  1345. m_RtDataKeys.Add($"{ModuleName}.TurboPumpIsRunning");
  1346. m_RtDataKeys.Add($"{ModuleName}.PumpIsRunning");
  1347. m_RtDataKeys.Add($"{ModuleName}.IsSlitDoorClosed");
  1348. m_RtDataKeys.Add($"{ModuleName}.IsLidClosed");
  1349. m_RtDataKeys.Add($"{ModuleName}.SRfIsOn");
  1350. m_RtDataKeys.Add($"{ModuleName}.SRfForwardPowerFeedBack");
  1351. m_RtDataKeys.Add($"{ModuleName}.SRfReflectPower");
  1352. m_RtDataKeys.Add($"{ModuleName}.BRfIsOn");
  1353. m_RtDataKeys.Add($"{ModuleName}.BRfForwardPowerFeedBack");
  1354. m_RtDataKeys.Add($"{ModuleName}.BRfReflectPower");
  1355. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Match}.C1");
  1356. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Match}.C2");
  1357. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Match}.WorkMode");
  1358. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.BiasMatch}.C1");
  1359. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.BiasMatch}.C2");
  1360. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.BiasMatch}.WorkMode");
  1361. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.PendulumValve}.IsOpen");
  1362. m_RtDataKeys.Add($"{ModuleName}.TurboPumpRotationalSpeed");
  1363. m_RtDataKeys.Add($"{ModuleName}.GetPVPosition");
  1364. m_RtDataKeys.Add($"{ModuleName}.Chiller.Temp");
  1365. m_RtDataKeys.Add($"{ModuleName}.ESCHV.OutputVoltage");
  1366. m_RtDataKeys.Add($"{ModuleName}.ESCHV.IsOn");
  1367. m_RtDataKeys.Add($"{ModuleName}.IsWaterFlowOk");
  1368. m_RtDataKeys.Add($"{ModuleName}.IsWLK");
  1369. m_RtDataKeys.Add($"{ModuleName}.IsCDA_OK");
  1370. m_RtDataKeys.Add($"{ModuleName}.SourceRFFanInterlock");
  1371. m_RtDataKeys.Add($"{ModuleName}.IsTurboPumpInterlock");
  1372. m_RtDataKeys.Add($"{ModuleName}.SensorGasBoxDoor");
  1373. m_RtDataKeys.Add($"{ModuleName}.SensorGasBoxPressure");
  1374. m_RtDataKeys.Add($"{ModuleName}.WallTempFeedBack");
  1375. m_RtDataKeys.Add($"{ModuleName}.Chiller.IsOn");
  1376. m_RtDataKeys.Add($"{ModuleName}.ValveHeater.DeviceData");
  1377. m_RtDataKeys.Add($"{ModuleName}.ForelineHeater.DeviceData");
  1378. m_RtDataKeys.Add($"{ModuleName}.WallHeater.DeviceData");
  1379. m_RtDataKeys.Add($"{ModuleName}.FsmState");
  1380. }
  1381. #endregion
  1382. }
  1383. }