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PM
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d15749f5b1
1.fix VenusSE show chiler temp bugs
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1 year ago |
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TM
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d331213da1
1.SETM Pressure Control update
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1 year ago |
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ClusterGemModel.xml
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60e9a04892
Simulator LP3 Update
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2 years ago |
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DBModel.sql
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df4447c2d2
PMhomeRoutine add VenusDE chambertype
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1 year ago |
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DataGroup.xml
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b2406d6f78
1.添加signalTonwer ui界面
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1 year ago |
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DeviceModel.xsd
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d8e5f1dc2c
2022 last update
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2 years ago |
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EquipmentVariables.xml
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7dc2089ceb
1、add PortWaferStart/PortWaferEnd event sequence name parameter;
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1 year ago |
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EventDefine.xml
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3f9c41937a
update for event module enhancement
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3 years ago |
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IoProviderConfig.xml
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a5542b5c2c
add SETMCycle|SESequence|SE Swap| => UI+RT && Update the Config items' visible by PM.ChamberType, item keyword of "typeflag" and InstalledModule
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1 year ago |
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LogDefine.json
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b85b9aa79f
fix some routing bugs.
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1 year ago |
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RecipeFormat.xml
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9760d40cf7
port simulator
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3 years ago |
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SESequenceFormat.xml
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a5542b5c2c
add SETMCycle|SESequence|SE Swap| => UI+RT && Update the Config items' visible by PM.ChamberType, item keyword of "typeflag" and InstalledModule
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1 year ago |
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SVID.xls
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63d58afa42
1、SecsGem增加了UTF-8编码的支持；
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1 year ago |
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SequenceFormat.xml
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4259958c23
Remove the Align angle definition in sequence and implement the Loadlock delay function.
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1 year ago |
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SignalTower.xml
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b2406d6f78
1.添加signalTonwer ui界面
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1 year ago |
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System.sccfg
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0f0650b80f
1.PM 界面 run recipe 变为手动模式
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1 year ago |
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System_Kepler2200.sccfg
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0f0650b80f
1.PM 界面 run recipe 变为手动模式
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1 year ago |
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System_Kepler2300.sccfg
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0f0650b80f
1.PM 界面 run recipe 变为手动模式
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1 year ago |
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System_Venus.sccfg
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0f0650b80f
1.PM 界面 run recipe 变为手动模式
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1 year ago |
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System_VenusDE.sccfg
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0f0650b80f
1.PM 界面 run recipe 变为手动模式
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1 year ago |
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System_VenusSE.sccfg
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0f0650b80f
1.PM 界面 run recipe 变为手动模式
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1 year ago |
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VenusPreProcess.py
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64c7ef574e
log
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3 years ago |
sangwq
b85b9aa79f
fix some routing bugs.