| 123456789101112131415161718192021222324252627282930313233343536373839404142434445464748495051525354555657585960616263646566676869707172737475767778798081828384858687888990919293949596979899100101102103104105106107108109110111112113114115116117118119120121122123124125126127128129130131132133134135136137138139140141142143144145146147148149150151152153154155156157158159160161162163164165166167168169170171172173174175176177178179180181182183184185186187188189190191192193194195196197198199200201202203204205206207208209210211212213214215216217218219220221222 | using System;using System.Collections.Generic;using System.Linq;using System.Text;using System.Threading.Tasks;namespace Venus_Core{    public enum RtState    {        Init,        Initializing,        Idle,        Manual,        Transfer,        AutoIdle,        AutoRunning,        AutoRunningPaused,        ReturningCassette,        Cycle,        PrepareCycle,        PostCycle,        SetSpeed,        Error,        Reset,        Processing,        PostProcess,        PauseProcess,        //Maintenance,        //WaferMapping,        //Cycling,        TMCycle,        SETMCycle,        SERunning,        ReturnWafer,        SETransfer,        SEReturnWafer    }    public enum PMState    {        Init,        Idle,        Homing,        GasFlowing,        RfPowering,        Heating,        LaunchingPump,        LaunchingTurboPump,        Pumping,        Venting,        Purging,        GasLinePurge,        PumpingLoadLock,        VentingLoadLock,        PurgingLoadLock,        LoadLockLeakCheck,        MoveLift,        Purge,        // transfer        LLPlacing,        LLPicking,        Transfer,        Error,        PrepareTransfer,        PostTransfer,        TransferHandoff,        //Process,        LeakCheck,        GasBoxLeakCheck,        LiftpinMoving,        LiftpinWaiting,        GuidePinMoving,        Clean,        LoadProcessRecipe,        PreProcess,        Processing,        PostProcess,        OpeningLid,        ClosingLid,        MFCVerification,        AllMFCVerification,        // exchange wafer with TM        PreparePick,        PreparePlace,        ReadyForPick,        ReadyForPlace,        DropDownWafer,        LiftUpWafer,        DropDownReady,        LiftUpReady,        FinishPick,        FinishPlace,        PartialPressureTesting,        VATPerformanceTesting    }    public enum TMState    {        Unknown,        Init,        Initializing,        InitializingRB,        Idle,        Error,        Pumping,        Venting,        Purging,        Leakchecking,        Picking,        Placing,        Swaping,        PMPicking,        PMPlacing,        PMSwaping,        Aligning,        Mapping,        Extending,        Retracting,        Swapping,        Gotoing,        ControllingPressure    }    public enum LLState    {        //Unknown,        //Init,        //Initializing,        //Idle,        //Error,        //Pumping,        //Venting,        //Purging,        //Leakchecking,        //Picking,        //Placing,        //Swaping,        //PMPicking,        //PMPlacing,        //PMSwaping,        //Aligning,        //Mapping,        //Extending,        //Retracting,        //Swapping,        //Gotoing,        Unknown,        Init,        Initializing,        Idle,        Error,        Pumping,        Venting,        Purging,        LeakCheck,        Prepare_For_TM,        Prepare_For_EFEM,        Ready_For_TM,        Ready_For_EFEM,    }    public enum EFEMSTATE    {        Unknown,            // 0        Initializing,       // 1        Idle,               // 2        Error,              // 3        Picking,            // 4        Placing,            // 5        Aligning,           // 6        Mapping,            // 7        Init,               // 8        Orgshing,           // 9        Lifting,            // 10        InitingAL,          // 11        InitingRB,          // 12        Extending,          // 13        Retracting,         // 14                            //SettingLamp,        // 15        Swapping,        Gotoing,        Gripping,        Ungripping,        Fliping,    }    public enum VceSTATE    {        Init,//初始化        Idle,//空闲        Error,//错误        ClearError,        Homing,//home操作 对应HM        DoorOpenning,//开门操作 对应DC        DoorClosing,//关门操作 对应DO        Loading,//取cassette操作 包括开门关门 对应LOAD,        UnLoading,        Mapping,//扫片        ReadingMap, //对应MP 包括三种格式 hex binary 智能(只有智能模式可以判断复杂情况)        Goting,//指定槽到达窗口 对应 GC        GotingLP,        Resetting,//重置        LoadingWithSMIF,//有SMIF的load        UnLoadingWithSMIF,//有SMIF的load        LoadPreparing,//准备        SafeLoading,        SafeUnloading,        Pumping,        Venting,        Unknown    }}
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