Kepler-Release/Venus/Venus_RT/Modules/PMs/PMGaslinePurgeRoutine.cs

using Aitex.Core.RT.Routine;
using Aitex.Core.RT.SCCore;
using Venus_RT.Devices;
using MECF.Framework.Common.Routine;
using Venus_Core;
using System.Collections.Generic;
using System.Linq;
using System;

namespace Venus_RT.Modules.PMs
{
    class PMGaslinePurgeRoutine : PMRoutineBase, IRoutine
    {
        private enum GaslinePurgeStep
        {
            kPreTurnValves,
            kOpenPVN21_PV12_1,
            kFlowMFC1_2,
            kClosePV12_3,
            kOpenPV22_4,
            kFlowMFC2_5,
            kClosePV22_6,
            kOpenPV32_7,
            kFlowMFC3_8,
            kClosePV32_9,
            kOpenPV42_10,
            kFlowMFC4_11,
            kClosePV42_12,
            kClosePVN21_13,
            kOpenMFC1_14,
            kCloseMFC1_15,
            kOpenMFC2_16,
            kCloseMFC2_17,
            kOpenMFC3_18,
            kCloseMFC3_19,
            kOpenMFC4_20,
            kCloseMFC4_21,
            kEnd,
        }
        private enum NewGaslinePurgeStep
        {
            kWaitPendulumValveClose,
            kClosePumpingValve,
            kPreTurnValves,
            kStartPurge,
            kPumpGasLines,
            kStopPumpGasLines,
            kPurgeGasLines,
            kStopPurgeGasLines,
            kCloseAllValves,
            kPumpDown,
            kEnd,
        }
        public int PurgeCounter { get; private set; }

        private int _gasPurgeFlowTime = 5;
        private int _gasPurgePumpTime = 10;
        private int _gasPurgeCycleCount = 30;
        private readonly double _GasFlow = 1.0;

        bool Flow_MFC1() => _chamber.FlowGas(1, _GasFlow);
        bool Flow_MFC2() => _chamber.FlowGas(2, _GasFlow);
        bool Flow_MFC3() => _chamber.FlowGas(3, _GasFlow);
        bool Flow_MFC4() => _chamber.FlowGas(4, _GasFlow);
        private string[] _gasLineNums;

        private bool IsVenus = false;
        private int _currentIndex = 0;
        private int _gasPurgeAllCycleCount = 0;
        private PumpDownRoutine _pumpDownRoutine;

        public PMGaslinePurgeRoutine(JetPMBase chamber, PumpDownRoutine pdRoutine) : base(chamber)
        {
            Name = "GasLine Purge";
            _pumpDownRoutine = pdRoutine;
        }

        public RState Start(params object[] objs)
        {
            if (CheckLid() &&
                CheckSlitDoor() &&
                CheckDryPump())
            {
                _gasPurgeFlowTime = SC.GetValue<int>($"{Module}.Purge.GasPurgeFlowTime");
                _gasPurgePumpTime = SC.GetValue<int>($"{Module}.Purge.GasPurgePumpTime");
                _gasPurgeCycleCount = SC.GetValue<int>($"{Module}.Purge.GasPurgeCycleCount");

                Reset();


                PreTurnValves();
                _gasLineNums = objs[0].ToString().Split(',');

                switch (_chamber.ChamberType)
                {
                    case JetChamber.VenusSE:
                    case JetChamber.VenusDE:
                        _gasPurgeAllCycleCount = _gasPurgeCycleCount* _gasLineNums.Count();
                        _currentIndex = 0;
                        IsVenus = true;
                        break;
                    default:
                        IsVenus = false;
                        break;
                }
                PurgeCounter = 0;
                return Runner.Start(Module, Name);
            }
            return RState.Failed;
        }
        public RState Monitor()
        {
            //Runner.Delay(GaslinePurgeStep.kPreTurnValves,      _delay_1s)
            //    .LoopStart(GaslinePurgeStep.kOpenPVN21_PV12_1, "Gas Purge Cycle",    _gasPurgeCycleCount, OpenPVN21_PV12,     _delay_1s)
            //    .LoopRun(GaslinePurgeStep.kFlowMFC1_2,         Flow_MFC1,                                                      _gasPurgeFlowTime * 1000)
            //    .LoopRun(GaslinePurgeStep.kClosePV12_3,        HOFs.WrapAction(_chamber.OpenValve, ValveType.PV12, false),     _delay_1s)
            //    .LoopRun(GaslinePurgeStep.kOpenPV22_4,         HOFs.WrapAction(_chamber.OpenValve, ValveType.PV22, true),      _delay_1s)
            //    .LoopRun(GaslinePurgeStep.kFlowMFC2_5,         Flow_MFC2,                                                      _gasPurgeFlowTime * 1000)
            //    .LoopRun(GaslinePurgeStep.kClosePV22_6,        HOFs.WrapAction(_chamber.OpenValve, ValveType.PV22, false),     _delay_1s)
            //    .LoopRun(GaslinePurgeStep.kOpenPV32_7,         HOFs.WrapAction(_chamber.OpenValve, ValveType.PV32, true),      _delay_1s)
            //    .LoopRun(GaslinePurgeStep.kFlowMFC3_8,         Flow_MFC3,                                                      _gasPurgeFlowTime * 1000)
            //    .LoopRun(GaslinePurgeStep.kClosePV32_9,        HOFs.WrapAction(_chamber.OpenValve, ValveType.PV32, false),     _delay_1s)
            //    .LoopRun(GaslinePurgeStep.kOpenPV42_10,        HOFs.WrapAction(_chamber.OpenValve, ValveType.PV42, true),      _delay_1s)
            //    .LoopRun(GaslinePurgeStep.kFlowMFC4_11,        Flow_MFC4,                                                      _gasPurgeFlowTime * 1000)
            //    .LoopRun(GaslinePurgeStep.kClosePV42_12,       HOFs.WrapAction(_chamber.OpenValve, ValveType.PV42, false),     _delay_1s)
            //    .LoopRun(GaslinePurgeStep.kClosePVN21_13,      HOFs.WrapAction(_chamber.OpenValve, ValveType.PV21, false),     _delay_1s)
            //    .LoopRun(GaslinePurgeStep.kOpenMFC1_14,        HOFs.WrapAction(_chamber.OpenValve, ValveType.Mfc1, true),      _gasPurgePumpTime * 1000)
            //    .LoopRun(GaslinePurgeStep.kCloseMFC1_15,       HOFs.WrapAction(_chamber.OpenValve, ValveType.Mfc1, false),     _delay_1s)
            //    .LoopRun(GaslinePurgeStep.kOpenMFC2_16,        HOFs.WrapAction(_chamber.OpenValve, ValveType.Mfc2, true),      _gasPurgePumpTime * 1000)
            //    .LoopRun(GaslinePurgeStep.kCloseMFC2_17,       HOFs.WrapAction(_chamber.OpenValve, ValveType.Mfc2, false),     _delay_1s)
            //    .LoopRun(GaslinePurgeStep.kOpenMFC3_18,        HOFs.WrapAction(_chamber.OpenValve, ValveType.Mfc3, true),      _gasPurgePumpTime * 1000)
            //    .LoopRun(GaslinePurgeStep.kCloseMFC3_19,       HOFs.WrapAction(_chamber.OpenValve, ValveType.Mfc3, false),     _delay_1s)
            //    .LoopRun(GaslinePurgeStep.kOpenMFC4_20,        HOFs.WrapAction(_chamber.OpenValve, ValveType.Mfc4, true),      _gasPurgePumpTime * 1000)
            //    .LoopEnd(GaslinePurgeStep.kCloseMFC4_21,       StopAllGas,                                                     _delay_1s)
            //    .End(GaslinePurgeStep.kEnd,                    NullFun,                                                        _delay_50ms);

            if (!IsVenus)
            {
                Runner.Delay(NewGaslinePurgeStep.kPreTurnValves, _delay_1s)
                      .LoopStart(NewGaslinePurgeStep.kStartPurge, "Gas Purge Cycle", _gasPurgeCycleCount, PreparePurge, _delay_1s)
                      .LoopRun(NewGaslinePurgeStep.kPumpGasLines, StartPump, _gasPurgePumpTime * 1000)
                      .LoopRun(NewGaslinePurgeStep.kStopPumpGasLines, StopPump)
                      .LoopRun(NewGaslinePurgeStep.kPurgeGasLines, StartPurge, _gasPurgeFlowTime * 1000)
                      .LoopRun(NewGaslinePurgeStep.kStopPurgeGasLines, StopPurge)
                      .LoopEnd(NewGaslinePurgeStep.kCloseAllValves, StopAllGas, _delay_1s)
                      .End(GaslinePurgeStep.kEnd, NullFun, _delay_50ms);
            }
            else
            {
                Runner.Wait(NewGaslinePurgeStep.kWaitPendulumValveClose,()=>!_chamber.IsPenVOpen)
                      .Run(NewGaslinePurgeStep.kClosePumpingValve, ClosePumping, _delay_1s)
                      .Delay(NewGaslinePurgeStep.kPreTurnValves, _delay_1s)
                      .LoopStart(NewGaslinePurgeStep.kStartPurge, "Gas Purge Cycle", _gasPurgeAllCycleCount, PreparePurge, _delay_1s)
                      .LoopRun(NewGaslinePurgeStep.kPumpGasLines, StartPumpWithIndex, _gasPurgePumpTime * 1000)
                      .LoopRun(NewGaslinePurgeStep.kStopPumpGasLines, StopPumpWithIndex)
                      .LoopRun(NewGaslinePurgeStep.kPurgeGasLines, StartPurgeWithIndex, _gasPurgeFlowTime * 1000)
                      .LoopRun(NewGaslinePurgeStep.kStopPurgeGasLines, StopPurgeWithIndex)
                      .LoopEnd(NewGaslinePurgeStep.kCloseAllValves, StopAllGas, _delay_1s)
                      .Run(NewGaslinePurgeStep.kPumpDown,StartPumpDown,PumpDownOver)
                      .End(GaslinePurgeStep.kEnd, NullFun, _delay_50ms);

            }

            return Runner.Status;
        }
        private bool ClosePumping()
        {
            _chamber.OpenValve(ValveType.TurboPumpPumping,false);
            return true;
        }


        private bool StartPumpDown()
        {
            return _pumpDownRoutine.Start() == RState.Running;
        }
        private bool PumpDownOver()
        {
            return _pumpDownRoutine.Monitor() == RState.End;
        }

        private bool StopPurgeWithIndex()
        {
            int idx = Convert.ToInt32(_gasLineNums[_currentIndex / _gasPurgeCycleCount]);

            _chamber.OpenValve(ValveType.PVN22, false);
            _chamber.OpenValve(ValveType.PVN21, false);
            _chamber.StopGas(idx);
            switch (idx)
            {
                case 0:
                    _chamber.OpenValve(ValveType.PV12, false);
                    break;
                case 1:
                    _chamber.OpenValve(ValveType.PV22, false);
                    break;
                case 2:
                    _chamber.OpenValve(ValveType.PV32, false);
                    break;
                case 3:
                    _chamber.OpenValve(ValveType.PV42, false);
                    break;
                case 4:
                    _chamber.OpenValve(ValveType.PV52, false);
                    break;
                case 5:
                    _chamber.OpenValve(ValveType.PV62, false);
                    break;
                case 6:
                    _chamber.OpenValve(ValveType.PV72, false);
                    break;
                case 7:
                    _chamber.OpenValve(ValveType.PV82, false);
                    break;
                case 8:
                    _chamber.OpenValve(ValveType.PV92, false);
                    break;
                case 9:
                    _chamber.OpenValve(ValveType.PVA2, false);
                    break;
                case 10:
                    _chamber.OpenValve(ValveType.PVB2, false);
                    break;
                case 11:
                    _chamber.OpenValve(ValveType.PVC2, false);
                    break;
            }
            _currentIndex++;
            return true;
        }

        private bool StartPurgeWithIndex()
        {
            int idx = Convert.ToInt32(_gasLineNums[_currentIndex / _gasPurgeCycleCount]);
            _chamber.OpenValve(ValveType.PVN22, true);
            _chamber.OpenValve(ValveType.PVN21, true);
            _chamber.FullMFC(idx);
            switch (idx)
            {
                case 0:
                    _chamber.OpenValve(ValveType.PV12, true);
                    break;
                case 1:
                    _chamber.OpenValve(ValveType.PV22, true);
                    break;
                case 2:
                    _chamber.OpenValve(ValveType.PV32, true);
                    break;
                case 3:
                    _chamber.OpenValve(ValveType.PV42, true);
                    break;
                case 4:
                    _chamber.OpenValve(ValveType.PV52, true);
                    break;
                case 5:
                    _chamber.OpenValve(ValveType.PV62, true);
                    break;
                case 6:
                    _chamber.OpenValve(ValveType.PV72, true);
                    break;
                case 7:
                    _chamber.OpenValve(ValveType.PV82, true);
                    break;
                case 8:
                    _chamber.OpenValve(ValveType.PV92, true);
                    break;
                case 9:
                    _chamber.OpenValve(ValveType.PVA2, true);
                    break;
                case 10:
                    _chamber.OpenValve(ValveType.PVB2, true);
                    break;
                case 11:
                    _chamber.OpenValve(ValveType.PVC2, true);
                    break;
            }
            return true;
        }

        private bool StartPumpWithIndex()
        {
            int idx = Convert.ToInt32(_gasLineNums[_currentIndex / _gasPurgeCycleCount]);
            _chamber.PumpGas(idx);
            return true;

        }

        private bool StopPumpWithIndex()
        {
            int idx = Convert.ToInt32(_gasLineNums[_currentIndex / _gasPurgeCycleCount]);

            switch (idx)
            {
                case 0:
                    _chamber.OpenValve(ValveType.PV11, false);
                    _chamber.OpenValve(ValveType.Mfc1, false);
                    break;
                case 1:
                    _chamber.OpenValve(ValveType.PV21, false);
                    _chamber.OpenValve(ValveType.Mfc2, false);
                    break;
                case 2:
                    _chamber.OpenValve(ValveType.PV31, false);
                    _chamber.OpenValve(ValveType.Mfc3, false);
                    break;
                case 3:
                    _chamber.OpenValve(ValveType.PV41, false);
                    _chamber.OpenValve(ValveType.Mfc4, false);
                    break;
                case 4:
                    _chamber.OpenValve(ValveType.PV51, false);
                    _chamber.OpenValve(ValveType.Mfc5, false);
                    break;
                case 5:
                    _chamber.OpenValve(ValveType.PV61, false);
                    _chamber.OpenValve(ValveType.Mfc6, false);
                    break;
                case 6:
                    _chamber.OpenValve(ValveType.PV71, false);
                    _chamber.OpenValve(ValveType.Mfc7, false);
                    break;
                case 7:
                    _chamber.OpenValve(ValveType.PV81, false);
                    _chamber.OpenValve(ValveType.Mfc8, false);
                    break;
                case 8:
                    _chamber.OpenValve(ValveType.PV91, false);
                    _chamber.OpenValve(ValveType.Mfc9, false);
                    break;
                case 9:
                    _chamber.OpenValve(ValveType.PVA1, false);
                    _chamber.OpenValve(ValveType.Mfc10, false);
                    break;
                case 10:
                    _chamber.OpenValve(ValveType.PVB1, false);
                    _chamber.OpenValve(ValveType.Mfc11, false);
                    break;
                case 11:
                    _chamber.OpenValve(ValveType.PVC1, false);
                    _chamber.OpenValve(ValveType.Mfc12, false);
                    break;
            }
            _chamber.StopGas(idx);
            _chamber.OpenValve(ValveType.SecondPurge,false);
            return true;
        }

        public void Abort()
        {
            CloseAllValves();
        }
        public bool PreparePurge()
        { 
            return true; 
        }
        private void PreTurnValves()
        {
            _chamber.OpenValve(ValveType.Guage, false);
            _chamber.OpenValve(ValveType.SoftPump, false);
            _chamber.OpenValve(ValveType.FastPump, false);

            _chamber.TurnPendulumValve(false);

            _chamber.OpenValve(ValveType.GasFinal, false);
            _chamber.OpenValve(ValveType.N2, false);
            _chamber.OpenValve(ValveType.PVN22, false);

            //_chamber.OpenValve(ValveType.TurboPumpPumping, false);
            _chamber.OpenValve(ValveType.TurboPumpPurge, false);
        }

        private bool OpenPVN21_PV12()
        {
            _chamber.OpenValve(ValveType.PVN21, true);
            _chamber.OpenValve(ValveType.PV12, true);

            return true;
        }

        private bool StopAllGas()
        {
            _chamber.StopGas(1);
            _chamber.StopGas(2);
            _chamber.StopGas(3);
            _chamber.StopGas(4);

            PurgeCounter++;
            return true;
        }
        private bool StartPump()
        {
            _gasLineNums.ToList().ForEach(x => 
            {
                _chamber.PumpGas(Convert.ToInt32(x) - 1);         
            });
            return true;
        }
        private bool StopPump()
        {
            _chamber.OpenValve(ValveType.N2Purge2, false);
            return true;
        }
        private bool StartPurge()
        {
            _gasLineNums.ToList().ForEach(x =>
            {
                _chamber.PurgeGas(Convert.ToInt32(x) - 1);
            });
            return true;
        }
        private bool StopPurge()
        {
            _chamber.OpenValve(ValveType.PVN21, false);

            return true;
        }
    }
}