TMCycle.cs 11 KB

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  1. using Aitex.Core.RT.Routine;
  2. using Aitex.Core.RT.SCCore;
  3. using Aitex.Sorter.Common;
  4. using Venus_RT.Devices;
  5. using MECF.Framework.Common.Routine;
  6. using MECF.Framework.Common.Equipment;
  7. using MECF.Framework.Common.SubstrateTrackings;
  8. using Venus_Core;
  9. using Aitex.Core.RT.Log;
  10. using Aitex.Core.Util;
  11. using System.Collections.Generic;
  12. using System.Linq;
  13. using Venus_RT.Modules.Schedulers;
  14. using Venus_RT.Scheduler;
  15. using System;
  16. using MECF.Framework.Common.Schedulers;
  17. namespace Venus_RT.Modules
  18. {
  19. class TMCycle : ModuleRoutineBase, IRoutine
  20. {
  21. enum TMCycleStep
  22. {
  23. Start,
  24. ReturnBack,
  25. Cycling,
  26. End,
  27. }
  28. private bool IsModuleAvailable(ModuleName module) => dictSchedulers.Keys.Contains(module) && dictSchedulers[module].IsAvailable;
  29. List<ModuleName> tmCycleRoutine = new List<ModuleName>() { ModuleName.LLA, ModuleName.PMA, ModuleName.PMB, ModuleName.LLB };
  30. int cycleCount = 10;
  31. ModuleName _sourceModule = ModuleName.LLA;
  32. ModuleName _destinationModule = ModuleName.LLB;
  33. int _sourceSlotNumber = 4;
  34. int _destinationSlotNumber = 4;
  35. SchedulerTMRobot _TMRobot = new SchedulerTMRobot();
  36. private readonly int INVALID_SLOT = -1;
  37. Dictionary<ModuleName, SchedulerModule> dictSchedulers = new Dictionary<ModuleName, SchedulerModule>();
  38. Queue<MoveItem> _ReturnWafers = new Queue<MoveItem>();
  39. Queue<MoveItem> _runningItems = new Queue<MoveItem>();
  40. Queue<MoveItem> _CycleWafers = new Queue<MoveItem>();
  41. public TMCycle() : base(ModuleName.System)
  42. {
  43. Name = "TM Cycle";
  44. void _initMoudle(ModuleName name, SchedulerModule sche)
  45. {
  46. if (ModuleHelper.IsInstalled(name))
  47. {
  48. dictSchedulers[name] = sche;
  49. }
  50. }
  51. _initMoudle(ModuleName.LLA, new SchedulerLoadLock(ModuleName.LLA));
  52. _initMoudle(ModuleName.LLB, new SchedulerLoadLock(ModuleName.LLB));
  53. _initMoudle(ModuleName.PMA, new SchedulerPM(ModuleName.PMA));
  54. _initMoudle(ModuleName.PMB, new SchedulerPM(ModuleName.PMB));
  55. _initMoudle(ModuleName.PMC, new SchedulerPM(ModuleName.PMC));
  56. _initMoudle(ModuleName.PMD, new SchedulerPM(ModuleName.PMD));
  57. }
  58. public RState Start(params object[] objs)
  59. {
  60. if (objs.Length == 2)
  61. {
  62. var modules = ((string[])objs[0]).ToList();
  63. if (modules.Count >= 2)
  64. tmCycleRoutine.Clear();
  65. foreach(var mod in modules)
  66. {
  67. try
  68. {
  69. ModuleName module = ModuleHelper.Converter(mod);
  70. tmCycleRoutine.Add(module);
  71. }
  72. catch(Exception _)
  73. {
  74. LOG.Write(eEvent.ERR_ROUTER, "TMCycle", $"Invalid module string: {mod}");
  75. return RState.Failed;
  76. }
  77. }
  78. cycleCount = (int)objs[1];
  79. }
  80. // temp debug
  81. {
  82. for(int i = 0; i < _sourceSlotNumber; i ++)
  83. {
  84. WaferManager.Instance.CreateWafer(_sourceModule, i, Aitex.Core.Common.WaferStatus.Normal);
  85. WaferManager.Instance.DeleteWafer(_destinationModule, i);
  86. }
  87. WaferManager.Instance.DeleteWafer(ModuleName.TM, 0);
  88. WaferManager.Instance.DeleteWafer(ModuleName.TM, 1);
  89. WaferManager.Instance.DeleteWafer(ModuleName.PMA, 0);
  90. WaferManager.Instance.DeleteWafer(ModuleName.PMB, 0);
  91. }
  92. // temp debug
  93. return Runner.Start(Module, Name);
  94. }
  95. public RState Monitor()
  96. {
  97. Runner.Run((int)TMCycleStep.Start, NullFun)
  98. .LoopStart((int)TMCycleStep.ReturnBack, "Cycle", cycleCount, StartReturn, ReturnBack)
  99. .LoopEnd((int)TMCycleStep.Cycling, StartCycle, Cycling)
  100. .End((int)TMCycleStep.End, NullFun, _delay_50ms);
  101. return Runner.Status;
  102. }
  103. private bool StartReturn()
  104. {
  105. _destinationModule = tmCycleRoutine.Last();
  106. _destinationSlotNumber = SC.GetValue<int>($"{_destinationModule}.SlotNumber");
  107. _sourceModule = tmCycleRoutine.First();
  108. _sourceSlotNumber = SC.GetValue<int>($"{_sourceModule}.SlotNumber");
  109. _ReturnWafers.Clear();
  110. for(int i = 0; i < _destinationSlotNumber; i++)
  111. {
  112. if(WaferManager.Instance.CheckHasWafer(_destinationModule, i))
  113. {
  114. _ReturnWafers.Enqueue(new MoveItem(_destinationModule, i, _sourceModule, INVALID_SLOT, Hand.None));
  115. }
  116. }
  117. return true;
  118. }
  119. List<int> GetReadyInSlot(ModuleName module, int slotCount)
  120. {
  121. List<int> slots = new List<int>();
  122. for (int i = 0; i < slotCount; i++)
  123. {
  124. if (WaferManager.Instance.CheckNoWafer(module, i))
  125. slots.Add(i);
  126. if (slots.Count >= 2)
  127. return slots;
  128. }
  129. return slots;
  130. }
  131. List<int> GetReadyOutSlot(ModuleName module, int slotCount)
  132. {
  133. List<int> slots = new List<int>();
  134. for (int i = 0; i < slotCount; i++)
  135. {
  136. if (WaferManager.Instance.CheckHasWafer(module, i))
  137. slots.Add(i);
  138. if (slots.Count >= 2)
  139. return slots;
  140. }
  141. return slots;
  142. }
  143. List<ModuleName> GetReadyOutPMs()
  144. {
  145. List<ModuleName> outpm = new List<ModuleName>();
  146. foreach(var module in tmCycleRoutine)
  147. {
  148. if(ModuleHelper.IsPm(module))
  149. {
  150. if(IsModuleAvailable(module) && WaferManager.Instance.CheckHasWafer(module, 0))
  151. {
  152. outpm.Add(module);
  153. if (outpm.Count >= 2)
  154. break;
  155. }
  156. }
  157. }
  158. return outpm;
  159. }
  160. List<ModuleName> GetReadyInPMs()
  161. {
  162. List<ModuleName> inpm = new List<ModuleName>();
  163. foreach (var module in tmCycleRoutine)
  164. {
  165. if (ModuleHelper.IsPm(module))
  166. {
  167. if (IsModuleAvailable(module) && WaferManager.Instance.CheckNoWafer(module, 0))
  168. {
  169. inpm.Add(module);
  170. if (inpm.Count >= 2)
  171. break;
  172. }
  173. }
  174. }
  175. return inpm;
  176. }
  177. private bool ReturnBack()
  178. {
  179. if (IsModuleAvailable(_sourceModule) && IsModuleAvailable(_destinationModule) && _TMRobot.IsAvailable)
  180. {
  181. var InSlots = GetReadyInSlot(_sourceModule, _sourceSlotNumber);
  182. var OutSlots = GetReadyOutSlot(_destinationModule, _destinationSlotNumber);
  183. if (InSlots.Count == 0 || OutSlots.Count == 0)
  184. return true;
  185. Queue<MoveItem> items = new Queue<MoveItem>();
  186. for(int i = 0; i < Math.Min(InSlots.Count, OutSlots.Count); i++)
  187. {
  188. items.Enqueue(new MoveItem(_destinationModule, OutSlots[i], _sourceModule, InSlots[i], (Hand)i));
  189. }
  190. if(items.Count > 0)
  191. {
  192. _TMRobot.PostMoveItems(items.ToArray());
  193. }
  194. }
  195. return false;
  196. }
  197. private bool ModuleHasWafer(ModuleName mod, int nSlots)
  198. {
  199. for(int i= 0; i< nSlots; i++)
  200. {
  201. if (WaferManager.Instance.CheckHasWafer(mod, i))
  202. return true;
  203. }
  204. return false;
  205. }
  206. private bool PMsHasWafers()
  207. {
  208. foreach (var module in tmCycleRoutine)
  209. {
  210. if (ModuleHelper.IsPm(module) && ModuleHelper.IsInstalled(module))
  211. {
  212. if (WaferManager.Instance.CheckHasWafer(module, 0))
  213. return true;
  214. }
  215. }
  216. return false;
  217. }
  218. private bool IsPMsAvailabe()
  219. {
  220. foreach (var module in tmCycleRoutine)
  221. {
  222. if (ModuleHelper.IsPm(module)&&ModuleHelper.IsInstalled(module))
  223. {
  224. if (!IsModuleAvailable(module))
  225. return false;
  226. }
  227. }
  228. return true;
  229. }
  230. private bool Cycling()
  231. {
  232. if(IsPMsAvailabe() && IsModuleAvailable(_destinationModule) && IsModuleAvailable(_sourceModule) && _TMRobot.IsAvailable)
  233. {
  234. if (!PMsHasWafers() && _TMRobot.IsAvailable && _CycleWafers.Count == 0)
  235. return true;
  236. if(PMsHasWafers())
  237. {
  238. var pmSlots = GetReadyOutPMs();
  239. var inSlots = GetReadyInSlot(_destinationModule, _destinationSlotNumber);
  240. for(int i = 0; i < Math.Min(pmSlots.Count, inSlots.Count); i++)
  241. {
  242. _runningItems.Enqueue(new MoveItem(pmSlots[i], 0, _destinationModule, inSlots[i], Hand.Both));
  243. }
  244. }
  245. else
  246. {
  247. var InPMs = GetReadyInPMs();
  248. if(_CycleWafers.Count > 0 && InPMs.Count >= 1)
  249. {
  250. var item = _CycleWafers.Dequeue();
  251. _runningItems.Enqueue(new MoveItem(item.SourceModule, item.SourceSlot, InPMs[0], 0, Hand.Both));
  252. }
  253. if(_CycleWafers.Count > 0 && InPMs.Count >= 2)
  254. {
  255. var item = _CycleWafers.Dequeue();
  256. _runningItems.Enqueue(new MoveItem(item.SourceModule, item.SourceSlot, InPMs[1], 0, Hand.Both));
  257. }
  258. }
  259. if (_runningItems.Count > 0)
  260. {
  261. if (_TMRobot.PostMoveItems(_runningItems.ToArray()))
  262. _runningItems.Clear();
  263. }
  264. }
  265. return false;
  266. }
  267. private bool StartCycle()
  268. {
  269. _CycleWafers.Clear();
  270. for(int i = 0; i< _sourceSlotNumber; i++)
  271. {
  272. if (WaferManager.Instance.CheckHasWafer(_sourceModule, i))
  273. _CycleWafers.Enqueue(new MoveItem(_sourceModule, i, _destinationModule, INVALID_SLOT, Hand.None));
  274. }
  275. return true;
  276. }
  277. public void Abort()
  278. {
  279. }
  280. }
  281. }