SchedulerPM.cs 22 KB

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  1. using System;
  2. using System.Collections.Generic;
  3. using System.Diagnostics;
  4. using System.Linq;
  5. using System.Text;
  6. using System.Threading.Tasks;
  7. using Aitex.Core.Common;
  8. using Aitex.Core.RT.DataCenter;
  9. using Aitex.Core.RT.Device;
  10. using Aitex.Core.RT.Event;
  11. using Aitex.Core.RT.Fsm;
  12. using Aitex.Core.RT.Log;
  13. using Aitex.Core.RT.SCCore;
  14. using Aitex.Core.Util;
  15. using Aitex.Sorter.Common;
  16. using Venus_RT.Modules;
  17. using Venus_RT.Modules.PMs;
  18. using MECF.Framework.Common.Equipment;
  19. using MECF.Framework.Common.Schedulers;
  20. using MECF.Framework.Common.SubstrateTrackings;
  21. using Venus_RT.Devices;
  22. namespace Venus_RT.Scheduler
  23. {
  24. public class SchedulerPM : SchedulerModule
  25. {
  26. public override bool IsAvailable
  27. {
  28. get { return _entity.IsIdle /*&& _entity.IsOnline*/ && CheckTaskDone() && !_waitCompletejobClean; } // 测试TMCycle, 暂时注释掉 _entity.IsOnline
  29. }
  30. public override bool IsOnline
  31. {
  32. get { return _entity != null && _entity.IsOnline; }
  33. }
  34. public override bool IsError
  35. {
  36. get { return _entity.IsError; }
  37. }
  38. public bool IsIdle
  39. {
  40. get { return _entity.IsIdle && _entity.IsOnline && CheckTaskDone() ; }
  41. }
  42. public TaskType Task => _task;
  43. private PMEntity _entity = null;
  44. private ModuleName _taskRobot;
  45. private EnumTransferType _taskTransferType;
  46. private Hand _taskBlade;
  47. private int _taskSlot;
  48. private int _entityTaskToken = (int)FSM_MSG.NONE;
  49. private DeviceTimer _timerProcess = new DeviceTimer();
  50. private JetPM _pm;
  51. private float _paramTemp;
  52. public float Temperature
  53. {
  54. get
  55. {
  56. //if (SC.GetValue<bool>($"{Module}.Chiller.EnableChiller"))
  57. //{
  58. // return _pm.CoolantOutletTempFB;
  59. //}
  60. //return _pm.SubstrateTempFB;
  61. return _pm.CoolantOutletTempFB;
  62. }
  63. }
  64. public RD_TRIG IdlePurgeTrig { get; set; }
  65. public Stopwatch IdlePurgeTimer { get; set; }
  66. public int IdlePurgeTime { get; set; }
  67. public int IdlePurgeNextRunTime { get; set; }
  68. public RD_TRIG IdleCleanTrig { get; set; }
  69. public Stopwatch IdleCleanTimer { get; set; }
  70. public int IdleCleanTime { get; set; }
  71. public int IdleCleanNextRunTime { get; set; }
  72. private bool _waitPreJobClean;
  73. private bool _waitCompletejobClean;
  74. private R_TRIG _trigIdleCleanFailed = new R_TRIG();
  75. private R_TRIG _trigIdlePurgeFailed = new R_TRIG();
  76. public RD_TRIG PreJobCleanTrig { get; set; }
  77. public Stopwatch PreJobCleanTimer { get; set; }
  78. public int PreJobCleanTime { get; set; }
  79. public SchedulerPM(ModuleName chamber) : base(chamber.ToString())
  80. {
  81. _entity = Singleton<RouteManager>.Instance.GetPM(chamber);
  82. _pm = DEVICE.GetDevice<JetPM>(Module.ToString());
  83. IdlePurgeTrig = new RD_TRIG();
  84. IdlePurgeTimer = new Stopwatch();
  85. IdleCleanTrig = new RD_TRIG();
  86. IdleCleanTimer = new Stopwatch();
  87. PreJobCleanTrig = new RD_TRIG();
  88. PreJobCleanTimer = new Stopwatch();
  89. EventWaferArrived += WaferArrived;
  90. }
  91. public void InitClean()
  92. {
  93. DATA.Subscribe($"{Module}.IdlePurgeNextRunTime", () => IdlePurgeNextRunTime);
  94. DATA.Subscribe($"{Module}.IdleCleanNextRunTime", () => IdleCleanNextRunTime);
  95. }
  96. public override bool IsReadyForPick(ModuleName robot, int slot, Hand blade)
  97. {
  98. return _entity.IsPrepareTransferReady(robot, EnumTransferType.Pick, slot, blade)
  99. && WaferManager.Instance.CheckHasWafer(ModuleHelper.Converter(_module), slot);
  100. }
  101. public override bool IsReadyForPlace(ModuleName robot, int slot, Hand blade)
  102. {
  103. return _entity.IsPrepareTransferReady(robot, EnumTransferType.Place, slot, blade)
  104. && WaferManager.Instance.CheckNoWafer(ModuleHelper.Converter(_module), slot);
  105. }
  106. public bool IsTemperatureReady(float temp)
  107. {
  108. return Math.Abs(Temperature - temp) < SC.GetValue<double>("System.MaxTemperatureToleranceTransferWafer");
  109. }
  110. public bool IsPrepareTransfer(ModuleName robot, EnumTransferType type, int slot)
  111. {
  112. return _task == TaskType.PrepareTransfer && _taskRobot == robot && _taskSlot == slot &&
  113. _taskTransferType == type;
  114. }
  115. public override bool PrepareTransfer(ModuleName robot, EnumTransferType type, int slot)
  116. {
  117. _task = TaskType.PrepareTransfer;
  118. _taskRobot = robot;
  119. _taskSlot = slot;
  120. _taskTransferType = type;
  121. _entityTaskToken = _entity.InvokePrepareTransfer(robot, type, slot);
  122. LogTaskStart(_task, $"{robot} {type} slot {slot + 1}");
  123. return _entityTaskToken != (int)FSM_MSG.NONE;
  124. }
  125. public bool PrepareTransfer(ModuleName robot, EnumTransferType type, int slot, float temp, Hand blade)
  126. {
  127. _task = TaskType.PrepareTransfer;
  128. _taskRobot = robot;
  129. _taskSlot = slot;
  130. _taskBlade = blade;
  131. _taskTransferType = type;
  132. _entityTaskToken = _entity.InvokePrepareTransfer(robot, type, slot, temp);
  133. LogTaskStart(_task, $"{robot} {type} slot {slot + 1}");
  134. return _entityTaskToken != (int)FSM_MSG.NONE;
  135. }
  136. public bool PrepareTransfer(ModuleName robot, EnumTransferType type, int slot, float temp, Hand blade, WaferSize size)
  137. {
  138. _task = TaskType.PrepareTransfer;
  139. _taskRobot = robot;
  140. _taskSlot = slot;
  141. _taskBlade = blade;
  142. _taskTransferType = type;
  143. _entityTaskToken = _entity.InvokePrepareTransfer(robot, type, slot, temp, size);
  144. LogTaskStart(_task, $"{robot} {type} slot {slot + 1}, {size}");
  145. return _entityTaskToken != (int)FSM_MSG.NONE;
  146. }
  147. public override bool PostTransfer(ModuleName robot, EnumTransferType type, int slot)
  148. {
  149. StopWaitTransfer(robot);
  150. _task = TaskType.PostTransfer;
  151. _taskRobot = robot;
  152. _taskSlot = slot;
  153. _taskTransferType = type;
  154. _entityTaskToken = _entity.InvokePostTransfer(robot, type, slot);
  155. LogTaskStart(_task, $"{robot} {type} slot {slot + 1}");
  156. return _entityTaskToken != (int)FSM_MSG.NONE;
  157. }
  158. public override bool PostTransfer(ModuleName robot)
  159. {
  160. StopWaitTransfer(robot);
  161. _task = TaskType.PostTransfer;
  162. _taskRobot = robot;
  163. _taskSlot = _inTransferSlot;
  164. _taskTransferType = _inTransferType;
  165. _entityTaskToken = _entity.InvokePostTransfer(robot, _inTransferType, _inTransferSlot);
  166. LogTaskStart(_task, $"{robot} {_inTransferType} slot {_inTransferSlot + 1}");
  167. return _entityTaskToken != (int)FSM_MSG.NONE;
  168. }
  169. public override bool Process(string recipeName, bool isCleanRecipe, bool withWafer, WaferInfo wafer)
  170. {
  171. _task = TaskType.Process;
  172. LogTaskStart(_task, $"recipe: {recipeName}, clean: {isCleanRecipe}, with wafer: {withWafer}");
  173. if (SC.GetValue<bool>("System.IsATMMode"))
  174. {
  175. int time = SC.GetValue<int>("System.ATMCyclePMDelayTime");
  176. _timerProcess.Start(time * 1000);
  177. EV.PostInfoLog("Scheduler", $"System run in ATM mode, process skipped, delay {time} seconds");
  178. WaferManager.Instance.UpdateWaferProcessStatus(Module, 0, EnumWaferProcessStatus.InProcess);
  179. return true;
  180. }
  181. else
  182. {
  183. _entityTaskToken = _entity.InvokeProcess(recipeName, wafer.WaferOrigin, withWafer);
  184. return _entityTaskToken != (int)FSM_MSG.NONE;
  185. }
  186. }
  187. public override bool Preheating(float temperature)
  188. {
  189. _task = TaskType.Heating;
  190. _paramTemp = temperature;
  191. _entityTaskToken = _entity.InvokePreHeat(temperature);
  192. LogTaskStart(_task, $"preheat to {temperature}");
  193. return _entityTaskToken != (int)FSM_MSG.NONE;
  194. }
  195. public bool CheckTaskDone()
  196. {
  197. bool ret = false;
  198. switch (_task)
  199. {
  200. case TaskType.None:
  201. ret = true;
  202. break;
  203. case TaskType.PrepareTransfer:
  204. ret = _entity.CheckAcked(_entityTaskToken) && _entity.IsPrepareTransferReady(_taskRobot, _taskTransferType == EnumTransferType.Swap ? EnumTransferType.Pick : _taskTransferType, _taskSlot, _taskBlade);
  205. break;
  206. case TaskType.PostTransfer:
  207. ret = _entity.CheckAcked(_entityTaskToken);
  208. break;
  209. case TaskType.Heating:
  210. ret = _entity.CheckAcked(_entityTaskToken) && IsTemperatureReady(_paramTemp);
  211. break;
  212. case TaskType.Process:
  213. case TaskType.IdlePurgeProcess:
  214. case TaskType.IdleCleanProcess:
  215. case TaskType.PreJobProcess:
  216. case TaskType.CompleteJobProcess:
  217. if (SC.GetValue<bool>("System.IsATMMode"))
  218. {
  219. ret = _timerProcess.IsTimeout() && _entity.IsIdle;
  220. if (ret)
  221. WaferManager.Instance.UpdateWaferProcessStatus(Module, 0, EnumWaferProcessStatus.Completed);
  222. }
  223. else
  224. {
  225. ret = _entity.CheckAcked(_entityTaskToken) && _entity.IsIdle;
  226. }
  227. break;
  228. }
  229. if (ret && _task != TaskType.None)
  230. {
  231. LogTaskDone(_task, "");
  232. _task = TaskType.None;
  233. }
  234. return ret;
  235. }
  236. public bool Monitor()
  237. {
  238. return true;
  239. }
  240. public void SetPMAuto()
  241. {
  242. _entity.SetAuto();
  243. }
  244. public bool IdlePurgeProcess(string recipeName)
  245. {
  246. _task = TaskType.IdlePurgeProcess;
  247. _entityTaskToken = _entity.InvokeClean(recipeName, "", false);
  248. LogTaskStart(_task, $"recipe: {recipeName}, clean: {false}, with wafer: {false}");
  249. return _entityTaskToken != (int)FSM_MSG.NONE;
  250. }
  251. public bool IdleCleanProcess(string recipeName)
  252. {
  253. _task = TaskType.IdleCleanProcess;
  254. _entityTaskToken = _entity.InvokeClean(recipeName, "", false);
  255. LogTaskStart(_task, $"recipe: {recipeName}, clean: {true}, with wafer: {false}");
  256. return _entityTaskToken != (int)FSM_MSG.NONE;
  257. }
  258. public void PreJobClean()
  259. {
  260. var enableJobClean = SC.GetValue<bool>($"{Module}.JobClean.IsEnabled");
  261. var enablePreJobClean = SC.GetValue<bool>($"{Module}.JobClean.EnablePreJobClean");
  262. _waitPreJobClean = enableJobClean && enablePreJobClean;
  263. }
  264. public bool PreJobProcess(string recipeName)
  265. {
  266. _task = TaskType.PreJobProcess;
  267. _entityTaskToken = _entity.InvokeClean(recipeName, "", false);
  268. LogTaskStart(_task, $"recipe: {recipeName}, clean: {true}, with wafer: {false}");
  269. return _entityTaskToken != (int)FSM_MSG.NONE;
  270. }
  271. public void CompleteJobClean()
  272. {
  273. var enableJobClean = SC.GetValue<bool>($"{Module}.JobClean.IsEnabled");
  274. var enableCompleteJobClean = SC.GetValue<bool>($"{Module}.JobClean.EnableCompleteJobClean");
  275. _waitCompletejobClean = enableJobClean && enableCompleteJobClean;
  276. }
  277. public bool CompleteJobProcess(string recipeName)
  278. {
  279. _task = TaskType.CompleteJobProcess;
  280. _entityTaskToken = _entity.InvokeClean(recipeName, "", false);
  281. LogTaskStart(_task, $"recipe: {recipeName}, clean: {true}, with wafer: {false}");
  282. return _entityTaskToken != (int)FSM_MSG.NONE;
  283. }
  284. private void WaferArrived(object sender, EventArgs e)
  285. {
  286. WaferInfo wafer = WaferManager.Instance.GetWafer(Module, 0);
  287. var recipeName = Module == ModuleName.PMA
  288. ? wafer.ProcessJob.Sequence.Steps[wafer.NextSequenceStep].StepParameter["PMARecipe"]
  289. : wafer.ProcessJob.Sequence.Steps[wafer.NextSequenceStep].StepParameter["PMBRecipe"];
  290. Process((string)recipeName, false, true, wafer);
  291. }
  292. #region clean task
  293. internal void ResetIdlePurgeTime()
  294. {
  295. IdlePurgeTimer.Restart();
  296. }
  297. internal void ResetIdleCleanTime()
  298. {
  299. IdleCleanTimer.Restart();
  300. }
  301. public bool ResetClean(bool resetPurge, bool resetClean, bool jobClean)
  302. {
  303. if (resetPurge)
  304. {
  305. IdlePurgeTrig.RST = true;
  306. IdlePurgeTimer.Stop();
  307. IdlePurgeTime = 0;
  308. }
  309. if (resetClean)
  310. {
  311. IdleCleanTrig.RST = true;
  312. IdleCleanTimer.Stop();
  313. IdleCleanTime = 0;
  314. }
  315. if (jobClean)
  316. {
  317. _waitPreJobClean = false;
  318. _waitCompletejobClean = false;
  319. PreJobCleanTrig.RST = true;
  320. PreJobCleanTimer.Stop();
  321. }
  322. return true;
  323. }
  324. public void MonitorCleanTasks()
  325. {
  326. var hasWafer = WaferManager.Instance.CheckHasWafer(Module, 0);
  327. var enablePurge = false;//SC.GetValue<bool>($"{Module}.IdlePurge.IsEnabled");
  328. var enableClean = SC.GetValue<bool>($"{Module}.IdleClean.IsEnabled");
  329. #region Idle Purge
  330. IdlePurgeTrig.CLK = (IsIdle || _task != TaskType.IdlePurgeProcess) && enablePurge && !hasWafer;
  331. if (IdlePurgeTrig.R)
  332. {
  333. LOG.Write( eEvent.INFO_PM, Module, $"{Module} idle purge start calc elapse time");
  334. IdlePurgeTimer.Restart();
  335. }
  336. if (IdlePurgeTrig.T)
  337. {
  338. LOG.Write(eEvent.INFO_PM, Module, $"{Module} idle purge stopped calc elapse time");
  339. ResetClean(true, false, false);
  340. }
  341. if (IdlePurgeTimer.IsRunning)
  342. {
  343. IdlePurgeTime = (int)IdlePurgeTimer.ElapsedMilliseconds / 1000;
  344. int idlePurgeTimeSetPoint = SC.GetValue<int>($"{Module}.IdlePurge.IdlePurgeTime");
  345. var nextRunTime = idlePurgeTimeSetPoint - IdlePurgeTime;
  346. if (nextRunTime < 0)
  347. nextRunTime = 0;
  348. if (enablePurge)
  349. {
  350. if (nextRunTime <= 0 && IsAvailable)
  351. {
  352. var recipe = SC.GetStringValue($"{Module}.IdlePurge.IdlePurgeRecipe");
  353. if (string.IsNullOrEmpty(recipe))
  354. {
  355. _trigIdlePurgeFailed.CLK = true;
  356. LOG.Write(eEvent.INFO_PM, Module, $"{Module} Idle purge can not run, recipe is empty");
  357. ResetClean(true, false, false);
  358. }
  359. else if (hasWafer)
  360. {
  361. _trigIdlePurgeFailed.CLK = true;
  362. LOG.Write(eEvent.INFO_PM, Module, $"{Module} Idle purge can not run, has wafer");
  363. ResetClean(true, false, false);
  364. }
  365. else
  366. {
  367. _trigIdlePurgeFailed.CLK = false;
  368. LOG.Write(eEvent.INFO_PM, Module, $"{Module} Start run idle purge recipe {recipe}");
  369. IdlePurgeProcess("ALD\\Process\\" + recipe);
  370. }
  371. if (_trigIdlePurgeFailed.Q)
  372. {
  373. LOG.Write(eEvent.WARN_PM, Module, "Can not run idle purge recipe");
  374. }
  375. }
  376. }
  377. else
  378. {
  379. nextRunTime = 0;
  380. }
  381. IdlePurgeNextRunTime = nextRunTime;
  382. }
  383. else
  384. {
  385. IdlePurgeNextRunTime = 0;
  386. }
  387. #endregion
  388. #region Idle Clean
  389. IdleCleanTrig.CLK = (IsIdle || _task != TaskType.IdleCleanProcess) && enableClean && !hasWafer;
  390. if (IdleCleanTrig.R)
  391. {
  392. LOG.Write(eEvent.INFO_PM, Module, $"{Module} idle clean start calc elapse time");
  393. IdleCleanTimer.Restart();
  394. }
  395. if (IdleCleanTrig.T)
  396. {
  397. LOG.Write(eEvent.INFO_PM, Module, $"{Module} idle clean stopped calc elapse time");
  398. ResetClean(false, true, false);
  399. }
  400. if (IdleCleanTimer.IsRunning)
  401. {
  402. IdleCleanTime = (int)IdleCleanTimer.ElapsedMilliseconds / 1000;
  403. int idleCleanTimeSetPoint = SC.GetValue<int>($"{Module}.IdleClean.IdleCleanTime");
  404. var nextRunTime = idleCleanTimeSetPoint - IdleCleanTime;
  405. if (nextRunTime < 0)
  406. nextRunTime = 0;
  407. if (enableClean)
  408. {
  409. if (nextRunTime <= 0 && IsAvailable)
  410. {
  411. var recipe = SC.GetStringValue($"{Module}.IdleClean.IdleCleanRecipe");
  412. if (string.IsNullOrEmpty(recipe))
  413. {
  414. _trigIdleCleanFailed.CLK = true;
  415. LOG.Write(eEvent.INFO_PM, Module, $"{Module} Idle clean can not run, recipe is empty");
  416. ResetClean(false, true, false);
  417. }
  418. else if (hasWafer)
  419. {
  420. _trigIdleCleanFailed.CLK = true;
  421. LOG.Write(eEvent.INFO_PM, Module, $"{Module} Idle clean can not run, has wafer");
  422. ResetClean(false, true, false);
  423. }
  424. else
  425. {
  426. _trigIdleCleanFailed.CLK = false;
  427. LOG.Write(eEvent.INFO_PM, Module, $"{Module} Start run idle Clean recipe {recipe}");
  428. IdleCleanProcess($"{Module}\\" + recipe);
  429. }
  430. if (_trigIdleCleanFailed.Q)
  431. {
  432. EV.PostWarningLog(Module.ToString(), "Can not run idle clean recipe");
  433. }
  434. }
  435. }
  436. else
  437. {
  438. nextRunTime = 0;
  439. }
  440. IdleCleanNextRunTime = nextRunTime;
  441. }
  442. else
  443. {
  444. IdleCleanNextRunTime = 0;
  445. }
  446. #endregion
  447. #region PreJob Clean
  448. var enableJobClean = SC.GetValue<bool>($"{Module}.JobClean.IsEnabled");
  449. var enablePreJobClean = SC.GetValue<bool>($"{Module}.JobClean.EnablePreJobClean");
  450. var enableCompleteJobClean = SC.GetValue<bool>($"{Module}.JobClean.EnableCompleteJobClean");
  451. if (enableJobClean && enableCompleteJobClean && _waitCompletejobClean && IsIdle)
  452. {
  453. var recipe = SC.GetStringValue($"{Module}.JobClean.CompleteJobCleanRecipe");
  454. if (string.IsNullOrEmpty(recipe))
  455. {
  456. EV.PostWarningLog(Module.ToString(), "complete job clean can not run, recipe is empty");
  457. }
  458. else if (hasWafer)
  459. {
  460. EV.PostWarningLog(Module.ToString(), "complete job clean can not run, has wafer");
  461. }
  462. else
  463. {
  464. EV.PostInfoLog(Module.ToString(), $"Start run complete job clean recipe {recipe}");
  465. CompleteJobProcess($"{Module}\\" + recipe);
  466. }
  467. _waitCompletejobClean = false;
  468. }
  469. PreJobCleanTrig.CLK = enableJobClean && enablePreJobClean && IsIdle;
  470. if (PreJobCleanTrig.R)
  471. {
  472. PreJobCleanTimer.Restart();
  473. }
  474. if(PreJobCleanTrig.T)
  475. {
  476. ResetClean(false, false, true);
  477. }
  478. if (PreJobCleanTimer.IsRunning && _waitPreJobClean)
  479. {
  480. PreJobCleanTime = (int)PreJobCleanTimer.ElapsedMilliseconds / 1000;
  481. int PreJobCleanIdleTimeSP = SC.GetValue<int>($"{Module}.JobClean.IdleCleanTime");
  482. if(PreJobCleanTime >= PreJobCleanIdleTimeSP)
  483. {
  484. var recipe = SC.GetStringValue($"{Module}.JobClean.PreJobCleanRecipe");
  485. if (string.IsNullOrEmpty(recipe))
  486. {
  487. EV.PostWarningLog(Module.ToString(), "pre job clean can not run, recipe is empty");
  488. }
  489. else if (hasWafer)
  490. {
  491. EV.PostWarningLog(Module.ToString(), "pre job clean can not run, has wafer");
  492. }
  493. else
  494. {
  495. EV.PostInfoLog(Module.ToString(), $"Start run pre job clean recipe {recipe}");
  496. PreJobProcess($"{Module}\\" + recipe);
  497. }
  498. }
  499. }
  500. #endregion
  501. }
  502. #endregion
  503. }
  504. }