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EFEM
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99d939492e
1.加登出界面
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vor 1 Jahr |
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LLs
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a9d8e56970
1.扩展alarm list
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vor 1 Jahr |
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LPs
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9e9459c927
efem界面按钮功能优化
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vor 1 Jahr |
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PMs
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4666252058
补充recipe界面不显示heliumpump的问题
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vor 11 Monaten |
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SMIF
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49815fb19f
add VCE Module in UI && fix bug in SE Cycle
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vor 1 Jahr |
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Schedulers
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b6ab013e1b
fix some miss function in SE/DE Recipe && Improve VenusDispatcher
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vor 11 Monaten |
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TM
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b6309f712c
upload for Venus SE/DE
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vor 11 Monaten |
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VCE
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b6309f712c
upload for Venus SE/DE
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vor 11 Monaten |
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AutoCycle.cs
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2f30fa17c4
1、修复了Wafer_Left_Position上报数据；
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vor 1 Jahr |
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Autotransfer_LP_FA.cs
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8cf03142ec
Add the PreClean,PostClean in SequenceInfo && Add DESequenceFormat.xml for Sequence && Add Venus DETM IO && fix VCEA pump Open in UI
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vor 1 Jahr |
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DVIDName.cs
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44fc6989ef
1、Remove FabConnect dll file;
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vor 1 Jahr |
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EntityErrorRaiseTrigger.cs
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d35b997884
1.优化RevtechMatch状态机
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vor 1 Jahr |
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EntityTaskBase.cs
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5b037046f9
Add TM/LL modules.
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vor 2 Jahren |
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ManualTransfer.cs
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3b1932fced
Add Loadport loaded check while manual transfer wafer.
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vor 1 Jahr |
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ResourceMonitor.cs
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3838ce8c36
1. Change the logic of Reset RF/Pump/CustomItem count
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vor 1 Jahr |
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RouteManager.cs
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b6309f712c
upload for Venus SE/DE
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vor 11 Monaten |
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SEManualTransfer.cs
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afa8662437
Changed from VPA to Aligner1 && Removed PreClean, PostClean in SequenceInfo
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vor 1 Jahr |
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SETMCycle.cs
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b6309f712c
upload for Venus SE/DE
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vor 11 Monaten |
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SystemDispatcher.cs
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10c22069fe
1.添加EFEM光栅报警开关
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vor 1 Jahr |
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TMCycle.cs
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68b4ba9640
1.添加mtorr与Pa切换功能
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vor 1 Jahr |
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VenusDispatcher.cs
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b6ab013e1b
fix some miss function in SE/DE Recipe && Improve VenusDispatcher
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vor 11 Monaten |
zhouhr
b6ab013e1b
fix some miss function in SE/DE Recipe && Improve VenusDispatcher