MFLeakCheckRoutine.cs 4.7 KB

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  1. using Aitex.Core.RT.Routine;
  2. using Aitex.Core.RT.SCCore;
  3. using Venus_RT.Devices;
  4. using MECF.Framework.Common.Routine;
  5. using MECF.Framework.Common.Equipment;
  6. using Venus_Core;
  7. namespace Venus_RT.Modules.TM
  8. {
  9. class MFLeakCheckRoutine : ModuleRoutineBase, IRoutine
  10. {
  11. private enum LeakCheckStep
  12. {
  13. kCloseValves,
  14. kPumpToCrossing,
  15. kPumpToBasePressure,
  16. kPumpingDelay,
  17. kLeakCheckDelay,
  18. kLeakCheckCalc,
  19. kPumpToCrossing_2,
  20. kPumpToBasePressure_2,
  21. kEnd,
  22. }
  23. public double LeakRate { get; private set; }
  24. private double _basePressure = 100;
  25. private double _CrossingPressure = 2000;
  26. private int _leakcheckPumpTime = 180;
  27. private int _leakcheckWaitTime = 300;
  28. private double _startPressure = 0;
  29. private double _endPressure = 0;
  30. private double _leakRate = 30.0;
  31. private readonly JetTM _JetTM;
  32. public string CurrentStep;
  33. public MFLeakCheckRoutine(JetTM tm, ModuleName mod) : base(mod)
  34. {
  35. Name = $"{Module} Leakcheck";
  36. _JetTM = tm;
  37. }
  38. public RState Start(params object[] objs)
  39. {
  40. if (_JetTM.CheckLidClosed(Module) &&
  41. _JetTM.CheckVentValveClosed(Module) &&
  42. _JetTM.CheckPurgeValveClosed(Module) &&
  43. _JetTM.CheckPumpValveClosed(Module))
  44. {
  45. Reset();
  46. _JetTM.CloseModuleAllValves(Module);
  47. _basePressure = SC.GetValue<double>($"{Module}.PumpBasePressure");
  48. _CrossingPressure = SC.GetValue<double>($"{Module}.PumpCrossingPressure");
  49. _leakcheckPumpTime = SC.GetValue<int>($"{Module}.LeakCheckPumpTime");
  50. _leakcheckWaitTime = SC.GetValue<int>($"{Module}.LeakCheckWaitTime");
  51. _leakRate = SC.GetValue<double>($"{Module}.LeakRate");
  52. return Runner.Start(Module, Name);
  53. }
  54. return RState.Failed;
  55. }
  56. public RState Monitor()
  57. {
  58. Runner.Delay((int)LeakCheckStep.kCloseValves, _delay_1s)
  59. .Run((int)LeakCheckStep.kPumpToCrossing, HOFs.WrapAction(_JetTM.TurnSoftPumpValve, Module, true), () => { return _JetTM.GetModulePressure(Module) <= _CrossingPressure; })
  60. .Run((int)LeakCheckStep.kPumpToBasePressure, SwitchFastPump, () => { return _JetTM.GetModulePressure(Module) <= _basePressure; })
  61. .Delay((int)LeakCheckStep.kPumpingDelay, _leakcheckPumpTime * 1000)
  62. .Run((int)LeakCheckStep.kLeakCheckDelay, StartLeakCheck, _leakcheckWaitTime * 1000)
  63. .Run((int)LeakCheckStep.kLeakCheckCalc, CalcLeakCheckResult, _delay_50ms)
  64. .Run((int)LeakCheckStep.kPumpToCrossing_2, HOFs.WrapAction(_JetTM.TurnSoftPumpValve, Module, true), () => { return _JetTM.GetModulePressure(Module) <= _CrossingPressure; })
  65. .Run((int)LeakCheckStep.kPumpToBasePressure_2, SwitchFastPump, () => { return _JetTM.GetModulePressure(Module) <= _basePressure; })
  66. .End((int)LeakCheckStep.kEnd, LeakCheckEnd, _delay_50ms);
  67. return Runner.Status;
  68. }
  69. public void Abort()
  70. {
  71. _JetTM.CloseModuleAllValves(Module);
  72. }
  73. bool StartLeakCheck()
  74. {
  75. _JetTM.TurnFastPumpValve(Module, false);
  76. _startPressure = _JetTM.GetModulePressure(Module);
  77. Notify($"{Module} 压力开始值 {_startPressure} mt");
  78. return true;
  79. }
  80. bool CalcLeakCheckResult()
  81. {
  82. _endPressure = _JetTM.GetModulePressure(Module);
  83. LeakRate = (_endPressure - _startPressure) * 60.0 / _leakcheckWaitTime;
  84. if (LeakRate < _leakRate)
  85. {
  86. Notify($"{Module} Leakcheck完成, 压力结束值: {_startPressure} mt, 漏率:{LeakRate} mt/min");
  87. }
  88. else
  89. {
  90. Stop($"{Module} Leakcheck失败, 腔体漏率 [{LeakRate}] mt/min, 高于 [{_leakRate}] mt/min");
  91. }
  92. return true;
  93. }
  94. bool LeakCheckEnd()
  95. {
  96. _JetTM.CloseModuleAllValves(Module);
  97. return true;
  98. }
  99. private bool SwitchFastPump()
  100. {
  101. _JetTM.TurnSoftPumpValve(Module, false);
  102. _JetTM.TurnFastPumpValve(Module, true);
  103. return true;
  104. }
  105. }
  106. }