OverKepler2200AViewModel.cs 67 KB

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  1. using Aitex.Core.Common.DeviceData;
  2. using MECF.Framework.Common.DataCenter;
  3. using MECF.Framework.Common.OperationCenter;
  4. using Prism.Commands;
  5. using Prism.Mvvm;
  6. using System;
  7. using System.Collections.Generic;
  8. using System.Windows;
  9. using System.Windows.Threading;
  10. using Venus_Core;
  11. using Venus_MainPages.Views;
  12. using System.Linq;
  13. using System.Threading.Tasks;
  14. using Microsoft.Win32;
  15. using System.IO;
  16. using Venus_Themes.CustomControls;
  17. using Venus_MainPages.Unity;
  18. using Venus_Unity;
  19. using MECF.Framework.Common.CommonData.DeviceData;
  20. using System.Windows.Shapes;
  21. using Path = System.IO.Path;
  22. using MECF.Framework.Common.Equipment;
  23. using System.Windows.Controls;
  24. namespace Venus_MainPages.ViewModels
  25. {
  26. internal class OverKepler2200AViewModel : BindableBase
  27. {
  28. #region 私有字段
  29. private List<string> m_CurrentModuleRecipes=new List<string>();
  30. private bool m_PVN21ValveIsOpen;
  31. private bool m_PVN22ValveIsOpen;
  32. private bool m_N2ValveIsOpen;
  33. private bool m_PV11ValveIsOpen;
  34. private bool m_PV12ValveIsOpen;
  35. private bool m_PV21ValveIsOpen;
  36. private bool m_PV22ValveIsOpen;
  37. private bool m_PV31ValveIsOpen;
  38. private bool m_PV32ValveIsOpen;
  39. private bool m_PV41ValveIsOpen;
  40. private bool m_PV42ValveIsOpen;
  41. private bool m_MFC1ValveIsOpen;
  42. private bool m_MFC2ValveIsOpen;
  43. private bool m_MFC3ValveIsOpen;
  44. private bool m_MFC4ValveIsOpen;
  45. private bool m_MFC5ValveIsOpen;
  46. private bool m_MFC6ValveIsOpen;
  47. private bool m_MFC7ValveIsOpen;
  48. private bool m_MFC8ValveIsOpen;
  49. private bool m_GasFinalValveIsOpen;
  50. private bool m_SoftPumpValveIsOpen;
  51. private bool m_FastPumpValveIsOpen;
  52. private bool m_PVHe1ValveIsOpen;
  53. private bool m_PVHe2ValveIsOpen;
  54. private bool m_TurboPumpPumpingValveIsOpen;
  55. private bool m_TurboPumpPurgeValveIsOpen;
  56. private bool m_GuageValveIsOpen;
  57. private bool m_PendulumValveIsOpen;
  58. //private bool m_BRFIsOn;
  59. //private bool m_SRFIsOn;
  60. private double m_HeGasSetpoint;
  61. private int m_HePressureSetpoint;
  62. private float m_SRFFwdPowerSetpoint;
  63. private float m_BRFFwdPowerSetpoint;
  64. private float m_SRFMatchC1;
  65. private float m_SRFMatchC2;
  66. private float m_BRFMatchC1;
  67. private float m_BRFMatchC2;
  68. private double m_MFC1SetPoint;
  69. private double m_MFC2SetPoint;
  70. private double m_MFC3SetPoint;
  71. private double m_MFC4SetPoint;
  72. private double m_MFC5SetPoint;
  73. private double m_MFC6SetPoint;
  74. private double m_MFC7SetPoint;
  75. private double m_MFC8SetPoint;
  76. private double m_N2SetPoint;
  77. private AITMfcData m_MFC1Data;
  78. private AITMfcData m_MFC2Data;
  79. private AITMfcData m_MFC3Data;
  80. private AITMfcData m_MFC4Data;
  81. private AITMfcData m_MFC5Data;
  82. private AITMfcData m_MFC6Data;
  83. private AITMfcData m_MFC7Data;
  84. private AITMfcData m_MFC8Data;
  85. private AITMfcData m_MFCHeData;
  86. private AITMfcData m_MFCN2Data;
  87. //private AITHeaterData m_ValveHeaterData;
  88. //private AITHeaterData m_ForelineHeaterData;
  89. //private AITHeaterData m_WallHeaterData;
  90. private AITHeaterData m_PendulumHeaterData;
  91. private AITRfData m_SRFData;
  92. private AITRfData m_BRFData;
  93. private AITPendulumValveData m_PendulumValveData;
  94. //private AITHVData m_ESCHVData;
  95. private PMState m_PMCurrentState;
  96. private bool m_SourceRFFanInterlock;
  97. private bool m_IsWLK;
  98. private bool m_IsWaterFlowOk;
  99. private bool m_IsTurboPumpInterlock;
  100. private bool m_IsCDAOK;
  101. private bool m_SensorGasBoxDoor;
  102. private bool m_SensorGasBoxPressure;
  103. private bool m_PumpIsOpen;
  104. private bool m_TurboIsOpen;
  105. private bool m_IsATM;
  106. private bool m_IsVAC;
  107. private List<string> m_RtDataKeys;
  108. private Dictionary<string, object> m_RtDataValues;
  109. private int m_PositionValue;
  110. private bool m_IsPositionMode;
  111. private int m_ESCVoltage;
  112. private bool m_GasIsFlowing;
  113. private bool m_IsProcessing;
  114. private bool m_IsAutoMode;
  115. private string m_SelectedRecipe;
  116. private float m_ChillerTempSetpoint;
  117. private float m_WallTempSetpoint;
  118. private bool m_HeIsPressureMode=true;
  119. private bool m_ChillerIsOn;
  120. private float m_ProcessHighPressure;
  121. private float m_ProcessLowPressure;
  122. private float m_ForelinePressurePressure;
  123. private float m_ESCHePressure;
  124. ButterflyValveView butterflyValveMessageBox;
  125. HeaterView heaterView;
  126. private int m_TurboPumpRotationalSpeed;
  127. private bool m_LiftPinIsUp;
  128. private bool m_IsSlitDoorClosed;
  129. private bool m_IsLidClosed;
  130. private float m_ChillerTemperature;
  131. //private float m_HVTemperature;
  132. private int m_ESCHVOutputVoltage;
  133. //private float m_SRfReflectPower;
  134. //private float m_SRfForwardPowerFeedBack;
  135. //private float m_BRfReflectPower;
  136. //private float m_BRfForwardPowerFeedBack;
  137. //private int m_MatchWorkMode;
  138. //private int m_BiasMatchWorkMode;
  139. private float m_MatchC1;
  140. private float m_MatchC2;
  141. private float m_BiasMatchC1;
  142. private float m_BiasMatchC2;
  143. private float m_PendulumValvePosition;
  144. private bool m_IsTurboPumpAtSpeed;
  145. private bool m_TurboPumpWaterFlowSwitch;
  146. private bool m_IsHasWafer;
  147. private Recipe m_CurrentRecipe=new Recipe ();
  148. private RecipeResult m_CurrentRecipeResult=new RecipeResult ();
  149. private RecipeStep m_CurrentRecipeStep = new RecipeStep();
  150. private double m_ChamberPressureFeedBack;
  151. private string m_WaferID;
  152. private string m_ModuleName;
  153. private int? currentRecipeNumber;
  154. private AITHighTemperatureHeaterData m_HighTemperatureHeaterData;
  155. private ComboBoxItem m_SelectedPosition;
  156. private int m_HighTemperatureHeaterTemperatureSetpoint;
  157. #endregion
  158. #region 属性
  159. public List<string> CurrentModuleRecipes
  160. {
  161. get { return m_CurrentModuleRecipes; }
  162. set { SetProperty(ref m_CurrentModuleRecipes, value); }
  163. }
  164. public Recipe CurrentRecipe
  165. {
  166. get { return m_CurrentRecipe; }
  167. set { SetProperty(ref m_CurrentRecipe, value); }
  168. }
  169. public RecipeResult CurrentRecipeResult
  170. {
  171. get { return m_CurrentRecipeResult; }
  172. set { SetProperty(ref m_CurrentRecipeResult, value); }
  173. }
  174. public RecipeStep CurrentRecipeStep
  175. {
  176. get { return m_CurrentRecipeStep; }
  177. set { SetProperty(ref m_CurrentRecipeStep, value); }
  178. }
  179. public bool IsHasWafer
  180. {
  181. get { return m_IsHasWafer; }
  182. set { SetProperty(ref m_IsHasWafer, value); }
  183. }
  184. public bool IsTurboPumpAtSpeed
  185. {
  186. get { return m_IsTurboPumpAtSpeed; }
  187. set { SetProperty(ref m_IsTurboPumpAtSpeed, value); }
  188. }
  189. public bool TurboPumpWaterFlowSwitch
  190. {
  191. get { return m_TurboPumpWaterFlowSwitch; }
  192. set { SetProperty(ref m_TurboPumpWaterFlowSwitch, value); }
  193. }
  194. public float PendulumValvePosition
  195. {
  196. get { return m_PendulumValvePosition; }
  197. set{SetProperty(ref m_PendulumValvePosition, value);}
  198. }
  199. public float BiasMatchC1
  200. {
  201. get { return m_BiasMatchC1; }
  202. set
  203. {
  204. SetProperty(ref m_BiasMatchC1, value);
  205. }
  206. }
  207. public float BiasMatchC2
  208. {
  209. get { return m_BiasMatchC2; }
  210. set
  211. {
  212. SetProperty(ref m_BiasMatchC2, value);
  213. }
  214. }
  215. public float MatchC1
  216. {
  217. get { return m_MatchC1; }
  218. set
  219. {
  220. SetProperty(ref m_MatchC1, value);
  221. }
  222. }
  223. public float MatchC2
  224. {
  225. get { return m_MatchC2; }
  226. set
  227. {
  228. SetProperty(ref m_MatchC2, value);
  229. }
  230. }
  231. public AITPendulumValveData PendulumValveData
  232. {
  233. get { return m_PendulumValveData; }
  234. set
  235. {
  236. SetProperty(ref m_PendulumValveData, value);
  237. }
  238. }
  239. //public AITHVData ESCHVData
  240. //{
  241. // get { return m_ESCHVData; }
  242. // set
  243. // {
  244. // SetProperty(ref m_ESCHVData, value);
  245. // }
  246. //}
  247. public int ESCHVOutputVoltage
  248. {
  249. get { return m_ESCHVOutputVoltage; }
  250. set
  251. {
  252. SetProperty(ref m_ESCHVOutputVoltage, value);
  253. }
  254. }
  255. public float ChillerTemperature
  256. {
  257. get { return m_ChillerTemperature; }
  258. set
  259. {
  260. SetProperty(ref m_ChillerTemperature, value);
  261. }
  262. }
  263. //public float HVTemperature
  264. //{
  265. // get { return m_HVTemperature; }
  266. // set
  267. // {
  268. // SetProperty(ref m_HVTemperature, value);
  269. // }
  270. //}
  271. public bool IsLidClosed
  272. {
  273. get { return m_IsLidClosed; }
  274. set
  275. {
  276. SetProperty(ref m_IsLidClosed, value);
  277. }
  278. }
  279. public bool IsSlitDoorClosed
  280. {
  281. get { return m_IsSlitDoorClosed; }
  282. set
  283. {
  284. SetProperty(ref m_IsSlitDoorClosed, value);
  285. }
  286. }
  287. public bool LiftPinIsUp
  288. {
  289. get { return m_LiftPinIsUp; }
  290. set
  291. {
  292. SetProperty(ref m_LiftPinIsUp, value);
  293. }
  294. }
  295. public int TurboPumpRotationalSpeed
  296. {
  297. get { return m_TurboPumpRotationalSpeed; }
  298. set
  299. {
  300. SetProperty(ref m_TurboPumpRotationalSpeed, value);
  301. }
  302. }
  303. public float ESCHePressure
  304. {
  305. get { return m_ESCHePressure; }
  306. set
  307. {
  308. SetProperty(ref m_ESCHePressure, value);
  309. }
  310. }
  311. public float ProcessHighPressure
  312. {
  313. get { return m_ProcessHighPressure; }
  314. set
  315. {
  316. SetProperty(ref m_ProcessHighPressure, value);
  317. }
  318. }
  319. public float ProcessLowPressure
  320. {
  321. get { return m_ProcessLowPressure; }
  322. set
  323. {
  324. SetProperty(ref m_ProcessLowPressure, value);
  325. }
  326. }
  327. public float ForelinePressure
  328. {
  329. get { return m_ForelinePressurePressure; }
  330. set
  331. {
  332. SetProperty(ref m_ForelinePressurePressure, value);
  333. }
  334. }
  335. public bool SourceRFFanInterlock
  336. {
  337. get { return m_SourceRFFanInterlock; }
  338. set
  339. {
  340. SetProperty(ref m_SourceRFFanInterlock, value);
  341. }
  342. }
  343. public bool IsWLK
  344. {
  345. get { return m_IsWLK; }
  346. set
  347. {
  348. SetProperty(ref m_IsWLK, value);
  349. }
  350. }
  351. public bool IsWaterFlowOk
  352. {
  353. get { return m_IsWaterFlowOk; }
  354. set
  355. {
  356. SetProperty(ref m_IsWaterFlowOk, value);
  357. }
  358. }
  359. public bool IsCDAOK
  360. {
  361. get { return m_IsCDAOK; }
  362. set
  363. {
  364. SetProperty(ref m_IsCDAOK, value);
  365. }
  366. }
  367. public bool SensorGasBoxDoor
  368. {
  369. get { return m_SensorGasBoxDoor; }
  370. set
  371. {
  372. SetProperty(ref m_SensorGasBoxDoor, value);
  373. }
  374. }
  375. public bool SensorGasBoxPressure
  376. {
  377. get { return m_SensorGasBoxPressure; }
  378. set
  379. {
  380. SetProperty(ref m_SensorGasBoxPressure, value);
  381. }
  382. }
  383. public bool IsTurboPumpInterlock
  384. {
  385. get { return m_IsTurboPumpInterlock; }
  386. set
  387. {
  388. SetProperty(ref m_IsTurboPumpInterlock, value);
  389. }
  390. }
  391. public string ModuleName
  392. {
  393. get { return m_ModuleName; }
  394. set
  395. {
  396. SetProperty(ref m_ModuleName, value);
  397. }
  398. }
  399. public double MFC1SetPoint
  400. {
  401. get { return m_MFC1SetPoint; }
  402. set { SetProperty(ref m_MFC1SetPoint, value); }
  403. }
  404. public double MFC2SetPoint
  405. {
  406. get { return m_MFC2SetPoint; }
  407. set { SetProperty(ref m_MFC2SetPoint, value); }
  408. }
  409. public double MFC3SetPoint
  410. {
  411. get { return m_MFC3SetPoint; }
  412. set { SetProperty(ref m_MFC3SetPoint, value); }
  413. }
  414. public double MFC4SetPoint
  415. {
  416. get { return m_MFC4SetPoint; }
  417. set { SetProperty(ref m_MFC4SetPoint, value); }
  418. }
  419. public double MFC5SetPoint
  420. {
  421. get { return m_MFC5SetPoint; }
  422. set { SetProperty(ref m_MFC5SetPoint, value); }
  423. }
  424. public double MFC6SetPoint
  425. {
  426. get { return m_MFC6SetPoint; }
  427. set { SetProperty(ref m_MFC6SetPoint, value); }
  428. }
  429. public double MFC7SetPoint
  430. {
  431. get { return m_MFC7SetPoint; }
  432. set { SetProperty(ref m_MFC7SetPoint, value); }
  433. }
  434. public double MFC8SetPoint
  435. {
  436. get { return m_MFC8SetPoint; }
  437. set { SetProperty(ref m_MFC8SetPoint, value); }
  438. }
  439. public double N2SetPoint
  440. {
  441. get { return m_N2SetPoint; }
  442. set { SetProperty(ref m_N2SetPoint, value); }
  443. }
  444. public AITMfcData MFC1Data
  445. {
  446. get { return m_MFC1Data; }
  447. set { SetProperty(ref m_MFC1Data, value); }
  448. }
  449. public AITMfcData MFC2Data
  450. {
  451. get { return m_MFC2Data; }
  452. set { SetProperty(ref m_MFC2Data, value); }
  453. }
  454. public AITMfcData MFC3Data
  455. {
  456. get { return m_MFC3Data; }
  457. set { SetProperty(ref m_MFC3Data, value); }
  458. }
  459. public AITMfcData MFC4Data
  460. {
  461. get { return m_MFC4Data; }
  462. set { SetProperty(ref m_MFC4Data, value); }
  463. }
  464. public AITMfcData MFC5Data
  465. {
  466. get { return m_MFC5Data; }
  467. set { SetProperty(ref m_MFC5Data, value); }
  468. }
  469. public AITMfcData MFC6Data
  470. {
  471. get { return m_MFC6Data; }
  472. set { SetProperty(ref m_MFC6Data, value); }
  473. }
  474. public AITMfcData MFC7Data
  475. {
  476. get { return m_MFC7Data; }
  477. set { SetProperty(ref m_MFC7Data, value); }
  478. }
  479. public AITMfcData MFC8Data
  480. {
  481. get { return m_MFC8Data; }
  482. set { SetProperty(ref m_MFC8Data, value); }
  483. }
  484. public AITMfcData MFCHeData
  485. {
  486. get { return m_MFCHeData; }
  487. set { SetProperty(ref m_MFCHeData, value); }
  488. }
  489. public AITMfcData MFCN2Data
  490. {
  491. get { return m_MFCN2Data; }
  492. set { SetProperty(ref m_MFCN2Data, value); }
  493. }
  494. //public AITHeaterData ValveHeaterData
  495. //{
  496. // get { return m_ValveHeaterData; }
  497. // set { SetProperty(ref m_ValveHeaterData, value); }
  498. //}
  499. //public AITHeaterData ForelineHeaterData
  500. //{
  501. // get { return m_ForelineHeaterData; }
  502. // set { SetProperty(ref m_ForelineHeaterData, value); }
  503. //}
  504. //public AITHeaterData WallHeaterData
  505. //{
  506. // get { return m_WallHeaterData; }
  507. // set { SetProperty(ref m_WallHeaterData, value); }
  508. //}
  509. public AITRfData SRFData
  510. {
  511. get { return m_SRFData; }
  512. set { SetProperty(ref m_SRFData, value); }
  513. }
  514. public AITRfData BRFData
  515. {
  516. get { return m_BRFData; }
  517. set { SetProperty(ref m_BRFData, value); }
  518. }
  519. public PMState PMCurrentState
  520. {
  521. get { return m_PMCurrentState; }
  522. set { SetProperty(ref m_PMCurrentState, value); }
  523. }
  524. #region 阀
  525. public bool GasFinalValveIsOpen
  526. {
  527. get { return m_GasFinalValveIsOpen; }
  528. set { SetProperty(ref m_GasFinalValveIsOpen, value); }
  529. }
  530. public bool PVN21ValveIsOpen
  531. {
  532. get { return m_PVN21ValveIsOpen; }
  533. set { SetProperty(ref m_PVN21ValveIsOpen, value); }
  534. }
  535. public bool PVN22ValveIsOpen
  536. {
  537. get { return m_PVN22ValveIsOpen; }
  538. set { SetProperty(ref m_PVN22ValveIsOpen, value); }
  539. }
  540. public bool N2ValveIsOpen
  541. {
  542. get { return m_N2ValveIsOpen; }
  543. set { SetProperty(ref m_N2ValveIsOpen, value); }
  544. }
  545. public bool PV11ValveIsOpen
  546. {
  547. get { return m_PV11ValveIsOpen; }
  548. set { SetProperty(ref m_PV11ValveIsOpen, value); }
  549. }
  550. public bool PV12ValveIsOpen
  551. {
  552. get { return m_PV12ValveIsOpen; }
  553. set { SetProperty(ref m_PV12ValveIsOpen, value); }
  554. }
  555. public bool MFC1ValveIsOpen
  556. {
  557. get { return m_MFC1ValveIsOpen; }
  558. set { SetProperty(ref m_MFC1ValveIsOpen, value); }
  559. }
  560. public bool PV21ValveIsOpen
  561. {
  562. get { return m_PV21ValveIsOpen; }
  563. set { SetProperty(ref m_PV21ValveIsOpen, value); }
  564. }
  565. public bool PV22ValveIsOpen
  566. {
  567. get { return m_PV22ValveIsOpen; }
  568. set { SetProperty(ref m_PV22ValveIsOpen, value); }
  569. }
  570. public bool MFC2ValveIsOpen
  571. {
  572. get { return m_MFC2ValveIsOpen; }
  573. set { SetProperty(ref m_MFC2ValveIsOpen, value); }
  574. }
  575. public bool PV31ValveIsOpen
  576. {
  577. get { return m_PV31ValveIsOpen; }
  578. set { SetProperty(ref m_PV31ValveIsOpen, value); }
  579. }
  580. public bool PV32ValveIsOpen
  581. {
  582. get { return m_PV32ValveIsOpen; }
  583. set { SetProperty(ref m_PV32ValveIsOpen, value); }
  584. }
  585. public bool MFC3ValveIsOpen
  586. {
  587. get { return m_MFC3ValveIsOpen; }
  588. set { SetProperty(ref m_MFC3ValveIsOpen, value); }
  589. }
  590. public bool PV41ValveIsOpen
  591. {
  592. get { return m_PV41ValveIsOpen; }
  593. set { SetProperty(ref m_PV41ValveIsOpen, value); }
  594. }
  595. public bool PV42ValveIsOpen
  596. {
  597. get { return m_PV42ValveIsOpen; }
  598. set { SetProperty(ref m_PV42ValveIsOpen, value); }
  599. }
  600. public bool MFC4ValveIsOpen
  601. {
  602. get { return m_MFC4ValveIsOpen; }
  603. set { SetProperty(ref m_MFC4ValveIsOpen, value); }
  604. }
  605. public bool MFC5ValveIsOpen
  606. {
  607. get { return m_MFC5ValveIsOpen; }
  608. set { SetProperty(ref m_MFC5ValveIsOpen, value); }
  609. }
  610. public bool MFC6ValveIsOpen
  611. {
  612. get { return m_MFC6ValveIsOpen; }
  613. set { SetProperty(ref m_MFC6ValveIsOpen, value); }
  614. }
  615. public bool MFC7ValveIsOpen
  616. {
  617. get { return m_MFC7ValveIsOpen; }
  618. set { SetProperty(ref m_MFC7ValveIsOpen, value); }
  619. }
  620. public bool MFC8ValveIsOpen
  621. {
  622. get { return m_MFC8ValveIsOpen; }
  623. set { SetProperty(ref m_MFC8ValveIsOpen, value); }
  624. }
  625. public bool PVHe1ValveIsOpen
  626. {
  627. get { return m_PVHe1ValveIsOpen; }
  628. set { SetProperty(ref m_PVHe1ValveIsOpen, value); }
  629. }
  630. public bool PVHe2ValveIsOpen
  631. {
  632. get { return m_PVHe2ValveIsOpen; }
  633. set { SetProperty(ref m_PVHe2ValveIsOpen, value); }
  634. }
  635. public bool TurboPumpPumpingValveIsOpen
  636. {
  637. get { return m_TurboPumpPumpingValveIsOpen; }
  638. set { SetProperty(ref m_TurboPumpPumpingValveIsOpen, value); }
  639. }
  640. public bool TurboPumpPurgeValveIsOpen
  641. {
  642. get { return m_TurboPumpPurgeValveIsOpen; }
  643. set { SetProperty(ref m_TurboPumpPurgeValveIsOpen, value); }
  644. }
  645. public bool SoftPumpValveIsOpen
  646. {
  647. get { return m_SoftPumpValveIsOpen; }
  648. set { SetProperty(ref m_SoftPumpValveIsOpen, value); }
  649. }
  650. public bool FastPumpValveIsOpen
  651. {
  652. get { return m_FastPumpValveIsOpen; }
  653. set { SetProperty(ref m_FastPumpValveIsOpen, value); }
  654. }
  655. public bool GuageValveIsOpen
  656. {
  657. get { return m_GuageValveIsOpen; }
  658. set { SetProperty(ref m_GuageValveIsOpen, value); }
  659. }
  660. #endregion
  661. public Dictionary<string, object> RtDataValues
  662. {
  663. get { return m_RtDataValues; }
  664. set { SetProperty(ref m_RtDataValues, value); }
  665. }
  666. public bool PumpIsOpen
  667. {
  668. get { return m_PumpIsOpen; }
  669. set { SetProperty(ref m_PumpIsOpen, value); }
  670. }
  671. public bool PendulumValveIsOpen
  672. {
  673. get { return m_PendulumValveIsOpen; }
  674. set { SetProperty(ref m_PendulumValveIsOpen, value); }
  675. }
  676. public bool TurboIsOpen
  677. {
  678. get { return m_TurboIsOpen; }
  679. set { SetProperty(ref m_TurboIsOpen, value); }
  680. }
  681. public bool IsATM
  682. {
  683. get { return m_IsATM; }
  684. set { SetProperty(ref m_IsATM, value); }
  685. }
  686. public bool IsVAC
  687. {
  688. get { return m_IsVAC; }
  689. set { SetProperty(ref m_IsVAC, value); }
  690. }
  691. //public bool BRFIsOn
  692. //{
  693. // get { return m_BRFIsOn; }
  694. // set { SetProperty(ref m_BRFIsOn, value); }
  695. //}
  696. //public bool SRFIsOn
  697. //{
  698. // get { return m_SRFIsOn; }
  699. // set { SetProperty(ref m_SRFIsOn, value); }
  700. //}
  701. public int PositionValue
  702. {
  703. get { return m_PositionValue; }
  704. set { SetProperty(ref m_PositionValue, value); }
  705. }
  706. public bool IsPositionMode
  707. {
  708. get { return m_IsPositionMode; }
  709. set { SetProperty(ref m_IsPositionMode, value); }
  710. }
  711. public double HeGasSetpoint
  712. {
  713. get { return m_HeGasSetpoint; }
  714. set
  715. {
  716. SetProperty(ref m_HeGasSetpoint, value);
  717. }
  718. }
  719. public int HePressureSetpoint
  720. {
  721. get { return m_HePressureSetpoint; }
  722. set
  723. {
  724. SetProperty(ref m_HePressureSetpoint, value);
  725. }
  726. }
  727. public float SRFFwdPowerSetpoint
  728. {
  729. get { return m_SRFFwdPowerSetpoint; }
  730. set { SetProperty(ref m_SRFFwdPowerSetpoint, value); }
  731. }
  732. public float BRFFwdPowerSetpoint
  733. {
  734. get { return m_BRFFwdPowerSetpoint; }
  735. set { SetProperty(ref m_BRFFwdPowerSetpoint, value); }
  736. }
  737. public int ESCVoltage
  738. {
  739. get { return m_ESCVoltage; }
  740. set { SetProperty(ref m_ESCVoltage, value); }
  741. }
  742. public float SRFMatchC1
  743. {
  744. get { return m_SRFMatchC1; }
  745. set { SetProperty(ref m_SRFMatchC1, value); }
  746. }
  747. public float SRFMatchC2
  748. {
  749. get { return m_SRFMatchC2; }
  750. set { SetProperty(ref m_SRFMatchC2, value); }
  751. }
  752. public float BRFMatchC1
  753. {
  754. get { return m_BRFMatchC1; }
  755. set { SetProperty(ref m_BRFMatchC1, value); }
  756. }
  757. public float BRFMatchC2
  758. {
  759. get { return m_BRFMatchC2; }
  760. set { SetProperty(ref m_BRFMatchC2, value); }
  761. }
  762. public bool GasIsFlowing
  763. {
  764. get { return m_GasIsFlowing; }
  765. set { SetProperty(ref m_GasIsFlowing, value); }
  766. }
  767. public bool IsProcessing
  768. {
  769. get { return m_IsProcessing; }
  770. set { SetProperty(ref m_IsProcessing, value); }
  771. }
  772. public bool IsAutoMode
  773. {
  774. get { return m_IsAutoMode; }
  775. set { SetProperty(ref m_IsAutoMode, value); }
  776. }
  777. public string SelectedRecipe
  778. {
  779. get { return m_SelectedRecipe; }
  780. set { SetProperty(ref m_SelectedRecipe, value); }
  781. }
  782. public float ChillerTempSetpoint
  783. {
  784. get { return m_ChillerTempSetpoint; }
  785. set { SetProperty(ref m_ChillerTempSetpoint, value); }
  786. }
  787. public float WallTempSetpoint
  788. {
  789. get { return m_WallTempSetpoint; }
  790. set { SetProperty(ref m_WallTempSetpoint, value); }
  791. }
  792. public bool HeIsPressureMode
  793. {
  794. get { return m_HeIsPressureMode; }
  795. set { SetProperty(ref m_HeIsPressureMode, value); }
  796. }
  797. public bool ChillerIsOn
  798. {
  799. get { return m_ChillerIsOn; }
  800. set { SetProperty(ref m_ChillerIsOn, value); }
  801. }
  802. public double ChamberPressureFeedBack
  803. {
  804. get { return m_ChamberPressureFeedBack; }
  805. set { SetProperty(ref m_ChamberPressureFeedBack, value); }
  806. }
  807. public string WaferID
  808. {
  809. get { return m_WaferID; }
  810. set { SetProperty(ref m_WaferID, value); }
  811. }
  812. public AITHighTemperatureHeaterData HighTemperatureHeaterData
  813. {
  814. get { return m_HighTemperatureHeaterData; }
  815. set { SetProperty(ref m_HighTemperatureHeaterData, value); }
  816. }
  817. public ComboBoxItem SelectedPosition
  818. {
  819. get { return m_SelectedPosition; }
  820. set { SetProperty(ref m_SelectedPosition, value); }
  821. }
  822. public int HighTemperatureHeaterTemperatureSetpoint
  823. {
  824. get { return m_HighTemperatureHeaterTemperatureSetpoint; }
  825. set { SetProperty(ref m_HighTemperatureHeaterTemperatureSetpoint, value); }
  826. }
  827. public AITHeaterData PendulumHeaterData
  828. {
  829. get { return m_PendulumHeaterData; }
  830. set { SetProperty(ref m_PendulumHeaterData, value); }
  831. }
  832. #endregion
  833. #region 命令
  834. private DelegateCommand _PMInitCommnad;
  835. public DelegateCommand PMInitCommnad =>
  836. _PMInitCommnad ?? (_PMInitCommnad = new DelegateCommand(OnPMInit));
  837. private DelegateCommand _PMAbortCommnad;
  838. public DelegateCommand PMAbortCommnad =>
  839. _PMAbortCommnad ?? (_PMAbortCommnad = new DelegateCommand(OnPMAbort));
  840. private DelegateCommand _GasCommand;
  841. public DelegateCommand GasCommand =>
  842. _GasCommand ?? (_GasCommand = new DelegateCommand(OnGas));
  843. private DelegateCommand _HeCommand;
  844. public DelegateCommand HeCommand =>
  845. _HeCommand ?? (_HeCommand = new DelegateCommand(OnHe));
  846. private DelegateCommand _RfCommand;
  847. public DelegateCommand RfCommand =>
  848. _RfCommand ?? (_RfCommand = new DelegateCommand(OnRf));
  849. private DelegateCommand _PurgeCommand;
  850. public DelegateCommand PurgeCommand =>
  851. _PurgeCommand ?? (_PurgeCommand = new DelegateCommand(OnPurge));
  852. private DelegateCommand _VentCommand;
  853. public DelegateCommand VentCommand =>
  854. _VentCommand ?? (_VentCommand = new DelegateCommand(OnVent));
  855. private DelegateCommand _PumpCommand;
  856. public DelegateCommand PumpCommand =>
  857. _PumpCommand ?? (_PumpCommand = new DelegateCommand(OnPump));
  858. private DelegateCommand _OpenPumpCommand;
  859. public DelegateCommand OpenPumpCommand =>
  860. _OpenPumpCommand ?? (_OpenPumpCommand = new DelegateCommand(OnOpenPump));
  861. private DelegateCommand _ClosePumpCommand;
  862. public DelegateCommand ClosePumpCommand =>
  863. _ClosePumpCommand ?? (_ClosePumpCommand = new DelegateCommand(OnClosePump));
  864. private DelegateCommand _OpenTurboPumpCommand;
  865. public DelegateCommand OpenTurboPumpCommand =>
  866. _OpenTurboPumpCommand ?? (_OpenTurboPumpCommand = new DelegateCommand(OnOpenTurboPump));
  867. private DelegateCommand _CloseTurboPumpCommand;
  868. public DelegateCommand CloseTurboPumpCommand =>
  869. _CloseTurboPumpCommand ?? (_CloseTurboPumpCommand = new DelegateCommand(OnCloseTurboPump));
  870. private DelegateCommand _OpenPendulumValveCommand;
  871. public DelegateCommand OpenPendulumValveCommand =>
  872. _OpenPendulumValveCommand ?? (_OpenPendulumValveCommand = new DelegateCommand(OnOpenPendulumValve));
  873. private DelegateCommand _ClosePendulumValveCommand;
  874. public DelegateCommand ClosePendulumValveCommand =>
  875. _ClosePendulumValveCommand ?? (_ClosePendulumValveCommand = new DelegateCommand(OnClosePendulumValve));
  876. private DelegateCommand<object> _PinUpDownCommand;
  877. public DelegateCommand<object> PinUpDownCommand =>
  878. _PinUpDownCommand ?? (_PinUpDownCommand = new DelegateCommand<object>(OnPinUpDown));
  879. private DelegateCommand<object> _LidUpDownCommand;
  880. public DelegateCommand<object> LidUpDownCommand =>
  881. _LidUpDownCommand ?? (_LidUpDownCommand = new DelegateCommand<object>(OnLidUpDown));
  882. private DelegateCommand _SetSRfCommand;
  883. public DelegateCommand SetSRfCommand =>
  884. _SetSRfCommand ?? (_SetSRfCommand = new DelegateCommand(OnSetSRf));
  885. private DelegateCommand _SetBRfCommand;
  886. public DelegateCommand SetBRfCommand =>
  887. _SetBRfCommand ?? (_SetBRfCommand = new DelegateCommand(OnSetBRf));
  888. private DelegateCommand _OpenButterflyValveViewCommand;
  889. public DelegateCommand OpenButterflyValveViewCommand =>
  890. _OpenButterflyValveViewCommand ?? (_OpenButterflyValveViewCommand = new DelegateCommand(OnOpenButterflyValveView));
  891. //private DelegateCommand _HVCommand;
  892. //public DelegateCommand HVCommand =>
  893. // _HVCommand ?? (_HVCommand = new DelegateCommand(OnHV));
  894. private DelegateCommand _HVSetCommand;
  895. public DelegateCommand HVSetCommand =>
  896. _HVSetCommand ?? (_HVSetCommand = new DelegateCommand(OnHVSet));
  897. private DelegateCommand _LoadRecipeCommand;
  898. public DelegateCommand LoadRecipeCommand =>
  899. _LoadRecipeCommand ?? (_LoadRecipeCommand = new DelegateCommand(OnLoadRecipe));
  900. private DelegateCommand<object> _ControlValveCommand;
  901. public DelegateCommand<object> ControlValveCommand =>
  902. _ControlValveCommand ?? (_ControlValveCommand = new DelegateCommand<object>(OnControlValve));
  903. private DelegateCommand<object> _RunRecipeCommand;
  904. public DelegateCommand<object> RunRecipeCommand =>
  905. _RunRecipeCommand ?? (_RunRecipeCommand = new DelegateCommand<object>(OnRunRecipe));
  906. private DelegateCommand _SetChillerTempCommand;
  907. public DelegateCommand SetChillerTempCommand =>
  908. _SetChillerTempCommand ?? (_SetChillerTempCommand = new DelegateCommand(OnSetChillerTemp));
  909. private DelegateCommand _OnOffChillerCommand;
  910. public DelegateCommand OnOffChillerCommand =>
  911. _OnOffChillerCommand ?? (_OnOffChillerCommand = new DelegateCommand(OnOffChiller));
  912. private DelegateCommand<object> _HeaterCommand;
  913. public DelegateCommand<object> HeaterCommand =>
  914. _HeaterCommand ?? (_HeaterCommand = new DelegateCommand<object>(OnHeater));
  915. private DelegateCommand _EndStepCommand;
  916. public DelegateCommand EndStepCommand =>
  917. _EndStepCommand ?? (_EndStepCommand = new DelegateCommand(OnEndStep));
  918. private DelegateCommand _GotoPositionCommand;
  919. public DelegateCommand GotoPositionCommand =>
  920. _GotoPositionCommand ?? (_GotoPositionCommand = new DelegateCommand(OnGotoPosition));
  921. private DelegateCommand _SwitchHighTemperatureHeaterCommand;
  922. public DelegateCommand SwitchHighTemperatureHeaterCommand =>
  923. _SwitchHighTemperatureHeaterCommand ?? (_SwitchHighTemperatureHeaterCommand = new DelegateCommand(OnSwitchHighTemperatureHeater));
  924. private DelegateCommand<object> _AbortRecipeCommnad;
  925. public DelegateCommand<object> AbortRecipeCommnad =>
  926. _AbortRecipeCommnad ?? (_AbortRecipeCommnad = new DelegateCommand<object>(OnAbortRecipe));
  927. #endregion
  928. #region 构造函数
  929. public OverKepler2200AViewModel()
  930. {
  931. m_RtDataKeys = new List<string>();
  932. m_IsATM = true;
  933. ModuleName = "PMA";
  934. //CurrentModuleRecipes = GetFilesNames(Path.Combine(QueryDataClient.Instance.Service.GetData("GetRTPath").ToString(), "Recipes", ModuleName)).ToList();
  935. DispatcherTimer timer = new DispatcherTimer();
  936. timer.Interval = TimeSpan.FromSeconds(0.5);
  937. timer.Tick += timer_Tick;
  938. timer.Start();
  939. }
  940. #endregion
  941. #region 命令方法
  942. private void OnControlValve(object obj)
  943. {
  944. CommonValveControl commonValveControl = (CommonValveControl)obj;
  945. if (commonValveControl.IsCanEdit == true)
  946. {
  947. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ControlValve",Convert.ToInt32( commonValveControl.Tag.ToString()), !commonValveControl.Status);
  948. }
  949. }
  950. private void OnPMInit()
  951. {
  952. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Home");
  953. }
  954. private async void OnGas()
  955. {
  956. await Task.Run(async () =>
  957. {
  958. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas1.SetPoint", MFC1SetPoint);
  959. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas2.SetPoint", MFC2SetPoint);
  960. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas3.SetPoint", MFC3SetPoint);
  961. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas4.SetPoint", MFC4SetPoint);
  962. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas5.SetPoint", MFC5SetPoint);
  963. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas6.SetPoint", MFC6SetPoint);
  964. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas7.SetPoint", MFC7SetPoint);
  965. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas8.SetPoint", MFC8SetPoint);
  966. await Task.Delay(1000);
  967. object[] mfc = new object[8];
  968. string[] mfcSetPoint = new string[8];
  969. mfc[0] = MFC1Data.SetPoint;
  970. mfc[1] = MFC2Data.SetPoint;
  971. mfc[2] = MFC3Data.SetPoint;
  972. mfc[3] = MFC4Data.SetPoint;
  973. mfc[4] = MFC5Data.SetPoint;
  974. mfc[5] = MFC6Data.SetPoint;
  975. mfc[6] = MFC7Data.SetPoint;
  976. mfc[7] = MFC8Data.SetPoint;
  977. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.GasFlow}", mfc);
  978. });
  979. }
  980. private void OnHe()
  981. {
  982. if (PVHe1ValveIsOpen == true)
  983. {
  984. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBacksideHeFlow", 0.0d);
  985. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBacksideHePressure", 0);
  986. }
  987. else
  988. {
  989. if (HeIsPressureMode)
  990. {
  991. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBacksideHePressure", HeGasSetpoint);
  992. }
  993. else
  994. {
  995. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBacksideHeFlow", HeGasSetpoint);
  996. }
  997. }
  998. }
  999. private void OnRf()
  1000. {
  1001. if (PMCurrentState == PMState.RfPowering)
  1002. {
  1003. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1004. }
  1005. else
  1006. {
  1007. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.RfPower}");
  1008. }
  1009. }
  1010. private void OnPurge()
  1011. {
  1012. //if (RtDataValues[$"{ModuleName}.FsmState"].ToString() ==PMState.Purge.ToString())
  1013. //if (PMCurrentState == PMState.Purging || N2SetPoint<=0)
  1014. //{
  1015. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", 0);
  1016. // await Task.Delay(1000);
  1017. // //InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StopPurge");
  1018. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1019. //}
  1020. //else
  1021. //{
  1022. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", N2SetPoint);
  1023. // await Task.Delay(1000);
  1024. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Purge");
  1025. //}
  1026. if (PMCurrentState == PMState.Purging)
  1027. {
  1028. //InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", 0);
  1029. //await Task.Delay(1000);
  1030. ////InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StopPurge");
  1031. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1032. }
  1033. else
  1034. {
  1035. //InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", N2SetPoint);
  1036. //await Task.Delay(1000);
  1037. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Purge");
  1038. }
  1039. }
  1040. private void OnVent()
  1041. {
  1042. //if (RtDataValues[$"{ModuleName}.FsmState"].ToString()==PMState.Venting.ToString())
  1043. if (PMCurrentState == PMState.Venting)
  1044. {
  1045. //InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StopVent");
  1046. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1047. }
  1048. else
  1049. {
  1050. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Vent");
  1051. }
  1052. }
  1053. private void OnPump()
  1054. {
  1055. //if (RtDataValues[$"{ModuleName}.FsmState"].ToString() == PMState.Pumping.ToString())
  1056. if (PMCurrentState==PMState.Pumping)
  1057. {
  1058. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1059. return;
  1060. }
  1061. //if (PMCurrentState == PMState.pum)
  1062. //{
  1063. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StopPump");
  1064. // return;
  1065. //}
  1066. //string BasePressureSetPoint= RtConfigValues[$"{ModuleName}.Pump.PumpBasePressure"].ToString(); ;
  1067. //{
  1068. // get { return RtConfigValues[$"{ModuleName}.Pump.PumpBasePressure"].ToString(); }
  1069. //}
  1070. //string PumpLimitSetPoint= RtConfigValues[$"{ModuleName}.Pump.PumpTimeLimit"].ToString();
  1071. //{
  1072. // get { return RtConfigValues[$"{ModuleName}.Pump.PumpTimeLimit"].ToString(); }
  1073. //}
  1074. string BasePressureSetPoint = QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.Pump.PumpBasePressure").ToString();
  1075. string PumpLimitSetPoint= QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.Pump.PumpTimeLimit").ToString();
  1076. // 设置底压
  1077. double basePressure = string.IsNullOrEmpty(BasePressureSetPoint) ? 0 : Convert.ToDouble(BasePressureSetPoint);
  1078. if (basePressure <= 0.01 || basePressure >= 1000)
  1079. {
  1080. MessageBox.Show($"基准压力设定值 {basePressure} 无效,应该在0到1000毫托之间");
  1081. return;
  1082. }
  1083. double pumpLimit = string.IsNullOrEmpty(PumpLimitSetPoint) ? 0 : Convert.ToDouble(PumpLimitSetPoint);
  1084. if (pumpLimit <= 0.01 || pumpLimit >= 1200)
  1085. {
  1086. MessageBox.Show($"抽气时间应该在0到1200之间,当前设定值{pumpLimit}");
  1087. return;
  1088. }
  1089. InvokeClient.Instance.Service.DoOperation("System.SetConfig", $"{ModuleName}.Pump.PumpBasePressure", basePressure.ToString());
  1090. InvokeClient.Instance.Service.DoOperation("System.SetConfig", $"{ModuleName}.Pump.PumpTimeLimit", pumpLimit.ToString());
  1091. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Pump");
  1092. }
  1093. private void OnOpenPump()
  1094. {
  1095. //if (RtDataValues[$"{ModuleName}.FsmState"].ToString() == "LaunchingPump")
  1096. if (PMCurrentState==PMState.LaunchingPump)
  1097. {
  1098. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1099. return;
  1100. }
  1101. //if (PumpIsOpen == true)
  1102. //{
  1103. // return;
  1104. //}
  1105. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StartPump");
  1106. }
  1107. private void OnClosePump()
  1108. {
  1109. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ClosePump");
  1110. }
  1111. private void OnOpenTurboPump()
  1112. {
  1113. //TurboIsOpen = true;
  1114. //if (RtDataValues[$"{ModuleName}.FsmState"].ToString() == "LaunchingTurbo")
  1115. if (PMCurrentState == PMState.LaunchingTurboPump)
  1116. {
  1117. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1118. return;
  1119. }
  1120. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StartTurboPump");
  1121. }
  1122. private void OnCloseTurboPump()
  1123. {
  1124. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.CloseTurboPump");
  1125. }
  1126. private void OnOpenPendulumValve()
  1127. {
  1128. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.TurnPendulumValve",true);
  1129. }
  1130. private void OnClosePendulumValve()
  1131. {
  1132. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.TurnPendulumValve",false);
  1133. }
  1134. private void OnPinUpDown(object upDown)
  1135. {
  1136. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetLiftPin", Convert.ToBoolean(upDown));
  1137. }
  1138. private void OnLidUpDown(object upDown)
  1139. {
  1140. //var value = (bool)upDown;
  1141. if (upDown.ToString()== "Up")
  1142. {
  1143. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.Lid}.{AITCylinderOperation.Open}");
  1144. }
  1145. else
  1146. {
  1147. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.Lid}.{AITCylinderOperation.Close}");
  1148. }
  1149. }
  1150. private async void OnSetSRf()
  1151. {
  1152. if (SRFData.IsRfOn == true)
  1153. {
  1154. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetSRf", SRFFwdPowerSetpoint, false);
  1155. }
  1156. else
  1157. {
  1158. if (GasIsFlowing == true)
  1159. {
  1160. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.Match}.{AITRfOperation.SetMatchPosition}", SRFMatchC1, SRFMatchC2);
  1161. await Task.Delay(100);
  1162. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetSRf", SRFFwdPowerSetpoint, true);
  1163. }
  1164. }
  1165. }
  1166. private async void OnSetBRf()
  1167. {
  1168. if (BRFData.IsRfOn == true)
  1169. {
  1170. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBRf", BRFFwdPowerSetpoint, false);
  1171. }
  1172. else
  1173. {
  1174. if (GasIsFlowing == true)
  1175. {
  1176. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.BiasMatch}.{AITRfOperation.SetMatchPosition}", BRFMatchC1, BRFMatchC2);
  1177. await Task.Delay(100);
  1178. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBRf", BRFFwdPowerSetpoint, true);
  1179. }
  1180. }
  1181. }
  1182. private void OnPMAbort()
  1183. {
  1184. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Abort");
  1185. }
  1186. private void OnOpenButterflyValveView()
  1187. {
  1188. //if (butterflyValveMessageBox == null)
  1189. //{
  1190. var _mainWindow = Application.Current.Windows.Cast<Window>().FirstOrDefault(window => window is Window) as Window;
  1191. butterflyValveMessageBox = new ButterflyValveView(ModuleName.ToString());
  1192. butterflyValveMessageBox.WindowStartupLocation = WindowStartupLocation.Manual;
  1193. butterflyValveMessageBox.Left = 700;
  1194. butterflyValveMessageBox.Top = 600;
  1195. butterflyValveMessageBox.Show();
  1196. butterflyValveMessageBox.Owner = _mainWindow;
  1197. //}
  1198. }
  1199. private void OnLoadRecipe()
  1200. {
  1201. CurrentModuleRecipes = GetFilesNames(Path.Combine(QueryDataClient.Instance.Service.GetData("GetRTPath").ToString(), "Recipes", ModuleName, "Process")).ToList();
  1202. }
  1203. //private async void OnHV()
  1204. //{
  1205. // if (ESCHVData.IsOn == true)
  1206. // {
  1207. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetESCHVIsOn", false);
  1208. // }
  1209. // else
  1210. // {
  1211. // await Task.Run(async () =>
  1212. // {
  1213. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetESCHVIsOn", true);
  1214. // await Task.Delay(1000);
  1215. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetESCHV", ESCVoltage);
  1216. // });
  1217. // }
  1218. //}
  1219. private void OnHVSet()
  1220. {
  1221. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetESCHV", ESCVoltage);
  1222. }
  1223. private void OnRunRecipe(object obj)
  1224. {
  1225. string recipeName = SelectedRecipe;
  1226. if (recipeName == null)
  1227. {
  1228. return;
  1229. }
  1230. ClearData();
  1231. var recipePath = Path.Combine(QueryDataClient.Instance.Service.GetData("GetRTPath").ToString(), "Recipes", ModuleName, "Process", recipeName + ".rcp");
  1232. CurrentRecipe = Recipe.Load(File.ReadAllText(recipePath));
  1233. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.RunRecipe}",recipeName, ModuleManager.ModuleInfos[ModuleName].WaferManager.Wafers[0].WaferID, "Process");
  1234. }
  1235. private void OnOffChiller()
  1236. {
  1237. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.OnOffChiller", ChillerType.Chiller.ToString(),!ChillerIsOn);
  1238. }
  1239. private void OnHeater(object obj)
  1240. {
  1241. if (IsAutoMode == true)
  1242. {
  1243. return;
  1244. }
  1245. AITHeaterData heaterData = obj as AITHeaterData;
  1246. var _mainWindow = Application.Current.Windows.Cast<Window>().FirstOrDefault(window => window is Window) as Window;
  1247. heaterView = new HeaterView(heaterData, ModuleName);
  1248. heaterView.WindowStartupLocation = WindowStartupLocation.CenterScreen;
  1249. heaterView.Owner = _mainWindow;
  1250. heaterView.Show();
  1251. }
  1252. private void OnOnline()
  1253. {
  1254. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.PmOnline}");
  1255. }
  1256. private void OnOffline()
  1257. {
  1258. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.PmOffline}");
  1259. }
  1260. private void OnEndStep()
  1261. {
  1262. if (CurrentRecipeResult?.RecipeStepNumber != null && CurrentRecipeResult?.RecipeStepNumber != CurrentRecipeResult?.RecipeStepCount)
  1263. {
  1264. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ManualEndStep");
  1265. }
  1266. else if (CurrentRecipeResult?.RecipeStepNumber != null && CurrentRecipeResult?.RecipeStepNumber == CurrentRecipeResult?.RecipeStepCount)
  1267. {
  1268. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Abort");
  1269. }
  1270. }
  1271. private void OnGotoPosition()
  1272. {
  1273. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.HighTemperatureHeater.GotoPosition", SelectedPosition.Content);
  1274. }
  1275. private void OnSwitchHighTemperatureHeater()
  1276. {
  1277. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.HighTemperatureHeater.SwitchHighTemperatureHeater", !HighTemperatureHeaterData.HighTemperatureHeaterIson);
  1278. }
  1279. private void OnSetChillerTemp()
  1280. {
  1281. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.HighTemperatureHeater.SetHighTemperatureHeaterTemperature", HighTemperatureHeaterTemperatureSetpoint);
  1282. }
  1283. private DelegateCommand _OnlineCommand;
  1284. public DelegateCommand OnlineCommand =>
  1285. _OnlineCommand ?? (_OnlineCommand = new DelegateCommand(OnOnline));
  1286. private DelegateCommand _OfflineCommand;
  1287. public DelegateCommand OfflineCommand =>
  1288. _OfflineCommand ?? (_OfflineCommand = new DelegateCommand(OnOffline));
  1289. private async void OnAbortRecipe(object obj)
  1290. {
  1291. if (PMCurrentState != PMState.Processing)
  1292. {
  1293. return;
  1294. }
  1295. switch (obj.ToString())
  1296. {
  1297. case "0":
  1298. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Abort");
  1299. break;
  1300. case "1":
  1301. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Abort");
  1302. //if (ESCHVData.IsOn == true)
  1303. //{
  1304. // await Task.Delay(3000);
  1305. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetESCHVIsOn", false);
  1306. //}
  1307. break;
  1308. case "2":
  1309. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Abort");
  1310. await Task.Delay(3000);
  1311. InvokeClient.Instance.Service.DoOperation("ReturnWafer", ModuleName, 0);
  1312. break;
  1313. }
  1314. }
  1315. #endregion
  1316. #region 私有方法
  1317. private void ClearData()
  1318. {
  1319. ESCVoltage = 0;
  1320. SRFFwdPowerSetpoint = 0;
  1321. SRFMatchC1 = 0;
  1322. SRFMatchC2 = 0;
  1323. BRFFwdPowerSetpoint = 0;
  1324. BRFMatchC1 = 0;
  1325. BRFMatchC2 = 0;
  1326. HeGasSetpoint = 0;
  1327. MFC1SetPoint = 0;
  1328. MFC2SetPoint = 0;
  1329. MFC3SetPoint = 0;
  1330. MFC4SetPoint = 0;
  1331. MFC5SetPoint = 0;
  1332. MFC6SetPoint = 0;
  1333. MFC7SetPoint = 0;
  1334. MFC8SetPoint = 0;
  1335. }
  1336. private IEnumerable<string> GetFilesNames(string path)
  1337. {
  1338. return Directory.GetFiles(path, "*.rcp")
  1339. .Select(Path.GetFileNameWithoutExtension);
  1340. }
  1341. void timer_Tick(object sender, EventArgs e)
  1342. {
  1343. RtDataValues = QueryDataClient.Instance.Service.PollData(m_RtDataKeys);
  1344. if (RtDataValues==null)
  1345. {
  1346. return;
  1347. }
  1348. var N2SetPoint =Convert.ToInt32( QueryDataClient.Instance.Service.GetConfig("System.TurboN2FlowSetPoint"));
  1349. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", N2SetPoint);
  1350. PVN21ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVN21.IsOpen");
  1351. GasFinalValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveGasFinal.IsOpen");
  1352. PV11ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV11.IsOpen");
  1353. PV12ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV12.IsOpen");
  1354. PV21ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV21.IsOpen");
  1355. PV22ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV22.IsOpen");
  1356. PV31ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV31.IsOpen");
  1357. PV32ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV32.IsOpen");
  1358. PV41ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV41.IsOpen");
  1359. PV42ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV42.IsOpen");
  1360. MFC1ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc1.IsOpen");
  1361. MFC2ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc2.IsOpen");
  1362. MFC3ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc3.IsOpen");
  1363. MFC4ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc4.IsOpen");
  1364. MFC5ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc5.IsOpen");
  1365. MFC6ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc6.IsOpen");
  1366. MFC7ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc7.IsOpen");
  1367. MFC8ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc8.IsOpen");
  1368. N2ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveN2.IsOpen");
  1369. SoftPumpValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveSoftPump.IsOpen");
  1370. FastPumpValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveFastPump.IsOpen");
  1371. GuageValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveGuage.IsOpen");
  1372. PVHe1ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVHe1.IsOpen");
  1373. PVHe2ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVHe2.IsOpen");
  1374. PVN21ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVN21.IsOpen");
  1375. PVN22ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVN22.IsOpen");
  1376. TurboPumpPumpingValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveTurboPumpPumping.IsOpen");
  1377. TurboPumpPurgeValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveTurboPumpPurge.IsOpen");
  1378. PumpIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.PumpIsRunning");
  1379. TurboIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.TurboPumpIsRunning");
  1380. LiftPinIsUp= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.LiftPinIsUp");
  1381. IsSlitDoorClosed = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsSlitDoorClosed");
  1382. IsLidClosed = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsLidClosed");
  1383. PendulumValvePosition = CommonFunction.GetValue<float>(RtDataValues,$"{ModuleName}.GetPVPosition");
  1384. TurboPumpRotationalSpeed = Convert.ToInt32( RtDataValues[$"{ModuleName}.TurboPumpRotationalSpeed"].ToString());
  1385. PositionValue = -((int)((PendulumValvePosition) * 0.09));
  1386. PMCurrentState = (PMState)Enum.Parse(typeof(PMState), RtDataValues[$"{ModuleName}.FsmState"].ToString());
  1387. GasIsFlowing = PMCurrentState == PMState.GasFlowing;
  1388. IsProcessing=PMCurrentState == PMState.Processing;
  1389. MFC1Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas1");
  1390. MFC2Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas2");
  1391. MFC3Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas3");
  1392. MFC4Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas4");
  1393. MFC5Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas5");
  1394. MFC6Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas6");
  1395. MFC7Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas7");
  1396. MFC8Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas8");
  1397. MFCHeData = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcHe");
  1398. MFCN2Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcN2");
  1399. SRFData = CommonFunction.GetValue<AITRfData>(RtDataValues, $"{ModuleName}.{VenusDevice.Rf}.DeviceData");
  1400. BRFData = CommonFunction.GetValue<AITRfData>(RtDataValues, $"{ModuleName}.{VenusDevice.BiasRf}.DeviceData");
  1401. PendulumValveData = CommonFunction.GetValue<AITPendulumValveData>(RtDataValues, $"{ModuleName}.{VenusDevice.PendulumValve}.DeviceData");
  1402. //ESCHVData= CommonFunction.GetValue<AITHVData>(RtDataValues, $"{ModuleName}.{VenusDevice.ESCHV}.DeviceData");
  1403. //ValveHeaterData = (AITHeaterData)RtDataValues[$"{ModuleName}.ValveHeater.DeviceData"];
  1404. //ForelineHeaterData = (AITHeaterData)RtDataValues[$"{ModuleName}.ForelineHeater.DeviceData"];
  1405. //WallHeaterData = (AITHeaterData)RtDataValues[$"{ModuleName}.WallHeater.DeviceData"];
  1406. PendulumHeaterData = (AITHeaterData)RtDataValues[$"{ModuleName}.PendulumHeater.DeviceData"];
  1407. ProcessHighPressure = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.ProcessHighPressure");
  1408. ProcessLowPressure = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.ProcessLowPressure");
  1409. ForelinePressure = float.Parse(RtDataValues[$"{ModuleName}.ForelinePressure"].ToString());
  1410. ESCHePressure = float.Parse(RtDataValues[$"{ModuleName}.ESCHePressure"].ToString());
  1411. ChillerTemperature = float.Parse(RtDataValues[$"{ModuleName}.Chiller.Temp"].ToString());
  1412. //HVTemperature = float.Parse(RtDataValues[$"{ModuleName}.{VenusDevice.ESCHV}.Temp"].ToString());
  1413. ChillerIsOn = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.Chiller.IsOn");
  1414. SourceRFFanInterlock= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.SourceRFFanInterlock");
  1415. IsWLK= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsWLK");
  1416. IsWaterFlowOk= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsWaterFlowOk");
  1417. IsTurboPumpInterlock= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsTurboPumpInterlock");
  1418. IsCDAOK= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsCDA_OK");
  1419. SensorGasBoxDoor= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.GasBoxDoorSW.Value");
  1420. SensorGasBoxPressure= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.GasBoxPressureSW.Value");
  1421. IsATM= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsATM");
  1422. IsVAC = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsVAC");
  1423. ESCHVOutputVoltage= CommonFunction.GetValue<int>(RtDataValues, $"{ModuleName}.ESCHV.OutputVoltage");
  1424. MatchC1 = CommonFunction.GetValue<float>(RtDataValues,$"{ModuleName}.{VenusDevice.Match}.C1");
  1425. MatchC2 = CommonFunction.GetValue<float>(RtDataValues,$"{ModuleName}.{VenusDevice.Match}.C2");
  1426. BiasMatchC1 = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.{VenusDevice.BiasMatch}.C1");
  1427. BiasMatchC2 = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.{VenusDevice.BiasMatch}.C2");
  1428. TurboPumpWaterFlowSwitch = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.TurboPumpWaterFlowSwitch.Value");
  1429. IsTurboPumpAtSpeed = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsTurboPumpAtSpeed");
  1430. IsHasWafer= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.HasWafer");
  1431. WaferID = IsHasWafer ? ModuleManager.ModuleInfos[ModuleName].WaferManager.Wafers[0].SourceName : "";
  1432. if (PMCurrentState == PMState.Processing || PMCurrentState == PMState.Clean)
  1433. {
  1434. CurrentRecipeResult = CommonFunction.GetValue<RecipeResult>(RtDataValues, $"{ModuleName}.CurrentRecipeResult");
  1435. if (CurrentRecipeResult.RecipeStepNumber != null && CurrentRecipeResult.RecipeStepNumber != currentRecipeNumber)
  1436. {
  1437. var recipePath = Path.Combine(QueryDataClient.Instance.Service.GetData("GetRTPath").ToString(), "Recipes", ModuleName,"Process", CurrentRecipeResult.RecipeName + ".rcp");
  1438. CurrentRecipe = Recipe.Load(File.ReadAllText(recipePath));
  1439. CurrentRecipeStep = CurrentRecipe.Steps[Convert.ToInt32(CurrentRecipeResult.RecipeStepNumber) - 1];
  1440. }
  1441. currentRecipeNumber = CurrentRecipeResult.RecipeStepNumber;
  1442. }
  1443. else
  1444. {
  1445. CurrentRecipeResult = null;
  1446. CurrentRecipeStep = null;
  1447. }
  1448. if (Math.Abs(100 - ProcessLowPressure) > 1 && ProcessLowPressure<100)
  1449. {
  1450. ChamberPressureFeedBack = ProcessLowPressure;
  1451. }
  1452. else
  1453. {
  1454. ChamberPressureFeedBack = ProcessHighPressure;
  1455. }
  1456. HighTemperatureHeaterData = CommonFunction.GetValue<AITHighTemperatureHeaterData>(RtDataValues, $"{ModuleName}.HighTemperatureHeater.DeviceData");
  1457. }
  1458. public void addDataKeys()
  1459. {
  1460. m_RtDataKeys.Clear();
  1461. m_RtDataKeys.Add($"{ModuleName}.MfcGas1");
  1462. m_RtDataKeys.Add($"{ModuleName}.MfcGas2");
  1463. m_RtDataKeys.Add($"{ModuleName}.MfcGas3");
  1464. m_RtDataKeys.Add($"{ModuleName}.MfcGas4");
  1465. m_RtDataKeys.Add($"{ModuleName}.MfcGas5");
  1466. m_RtDataKeys.Add($"{ModuleName}.MfcGas6");
  1467. m_RtDataKeys.Add($"{ModuleName}.MfcGas7");
  1468. m_RtDataKeys.Add($"{ModuleName}.MfcGas8");
  1469. m_RtDataKeys.Add($"{ModuleName}.MfcHe");
  1470. m_RtDataKeys.Add($"{ModuleName}.MfcN2");
  1471. m_RtDataKeys.Add($"{ModuleName}.ForelinePressure");
  1472. m_RtDataKeys.Add($"{ModuleName}.ProcessHighPressure");
  1473. m_RtDataKeys.Add($"{ModuleName}.ProcessLowPressure");
  1474. m_RtDataKeys.Add($"{ModuleName}.ChamberPressure");
  1475. m_RtDataKeys.Add($"{ModuleName}.ESCHePressure");
  1476. m_RtDataKeys.Add($"{ModuleName}.IsATM");
  1477. m_RtDataKeys.Add($"{ModuleName}.IsVAC");
  1478. m_RtDataKeys.Add($"{ModuleName}.LiftPinIsUp");
  1479. m_RtDataKeys.Add($"{ModuleName}.LiftPinIsDown");
  1480. m_RtDataKeys.Add($"{ModuleName}.ValvePVN21.IsOpen");
  1481. m_RtDataKeys.Add($"{ModuleName}.ValvePVN22.IsOpen");
  1482. m_RtDataKeys.Add($"{ModuleName}.ValvePV11.IsOpen");
  1483. m_RtDataKeys.Add($"{ModuleName}.ValvePV12.IsOpen");
  1484. m_RtDataKeys.Add($"{ModuleName}.ValvePV21.IsOpen");
  1485. m_RtDataKeys.Add($"{ModuleName}.ValvePV22.IsOpen");
  1486. m_RtDataKeys.Add($"{ModuleName}.ValvePV31.IsOpen");
  1487. m_RtDataKeys.Add($"{ModuleName}.ValvePV32.IsOpen");
  1488. m_RtDataKeys.Add($"{ModuleName}.ValvePV41.IsOpen");
  1489. m_RtDataKeys.Add($"{ModuleName}.ValvePV42.IsOpen");
  1490. m_RtDataKeys.Add($"{ModuleName}.ValveMfc1.IsOpen");
  1491. m_RtDataKeys.Add($"{ModuleName}.ValveMfc2.IsOpen");
  1492. m_RtDataKeys.Add($"{ModuleName}.ValveMfc3.IsOpen");
  1493. m_RtDataKeys.Add($"{ModuleName}.ValveMfc4.IsOpen");
  1494. m_RtDataKeys.Add($"{ModuleName}.ValveMfc5.IsOpen");
  1495. m_RtDataKeys.Add($"{ModuleName}.ValveMfc6.IsOpen");
  1496. m_RtDataKeys.Add($"{ModuleName}.ValveMfc7.IsOpen");
  1497. m_RtDataKeys.Add($"{ModuleName}.ValveMfc8.IsOpen");
  1498. m_RtDataKeys.Add($"{ModuleName}.ValveGasFinal.IsOpen");
  1499. m_RtDataKeys.Add($"{ModuleName}.ValveSoftPump.IsOpen");
  1500. m_RtDataKeys.Add($"{ModuleName}.ValveFastPump.IsOpen");
  1501. m_RtDataKeys.Add($"{ModuleName}.ValveN2.IsOpen");
  1502. m_RtDataKeys.Add($"{ModuleName}.ValvePVHe1.IsOpen");
  1503. m_RtDataKeys.Add($"{ModuleName}.ValvePVHe2.IsOpen");
  1504. m_RtDataKeys.Add($"{ModuleName}.ValveTurboPumpPumping.IsOpen");
  1505. m_RtDataKeys.Add($"{ModuleName}.ValveTurboPumpPurge.IsOpen");
  1506. m_RtDataKeys.Add($"{ModuleName}.ValvePVN21.IsOpen");
  1507. m_RtDataKeys.Add($"{ModuleName}.ValvePVN22.IsOpen");
  1508. m_RtDataKeys.Add($"{ModuleName}.ValveGuage.IsOpen");
  1509. m_RtDataKeys.Add($"{ModuleName}.TurboPumpIsRunning");
  1510. m_RtDataKeys.Add($"{ModuleName}.PumpIsRunning");
  1511. m_RtDataKeys.Add($"{ModuleName}.IsSlitDoorClosed");
  1512. m_RtDataKeys.Add($"{ModuleName}.IsLidClosed");
  1513. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Rf}.DeviceData");
  1514. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.BiasRf}.DeviceData");
  1515. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Match}.C1");
  1516. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Match}.C2");
  1517. // m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Match}.WorkMode");
  1518. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.BiasMatch}.C1");
  1519. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.BiasMatch}.C2");
  1520. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.PendulumValve}.DeviceData");
  1521. //m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.ESCHV}.DeviceData");
  1522. m_RtDataKeys.Add($"{ModuleName}.TurboPumpRotationalSpeed");
  1523. m_RtDataKeys.Add($"{ModuleName}.GetPVPosition");
  1524. m_RtDataKeys.Add($"{ModuleName}.Chiller.Temp");
  1525. //m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.ESCHV}.Temp");
  1526. //m_RtDataKeys.Add($"{ModuleName}.ESCHV.OutputVoltage");
  1527. //m_RtDataKeys.Add($"{ModuleName}.ESCHV.IsOn");
  1528. m_RtDataKeys.Add($"{ModuleName}.IsWaterFlowOk");
  1529. m_RtDataKeys.Add($"{ModuleName}.IsWLK");
  1530. m_RtDataKeys.Add($"{ModuleName}.IsCDA_OK");
  1531. m_RtDataKeys.Add($"{ModuleName}.SourceRFFanInterlock");
  1532. m_RtDataKeys.Add($"{ModuleName}.IsTurboPumpInterlock");
  1533. m_RtDataKeys.Add($"{ModuleName}.GasBoxDoorSW.Value");
  1534. m_RtDataKeys.Add($"{ModuleName}.GasBoxPressureSW.Value");
  1535. //m_RtDataKeys.Add($"{ModuleName}.WallTempFeedBack");
  1536. m_RtDataKeys.Add($"{ModuleName}.Chiller.IsOn");
  1537. //m_RtDataKeys.Add($"{ModuleName}.ValveHeater.DeviceData");
  1538. //m_RtDataKeys.Add($"{ModuleName}.ForelineHeater.DeviceData");
  1539. //m_RtDataKeys.Add($"{ModuleName}.WallHeater.DeviceData");
  1540. m_RtDataKeys.Add($"{ModuleName}.PendulumHeater.DeviceData");
  1541. m_RtDataKeys.Add($"{ModuleName}.FsmState");
  1542. m_RtDataKeys.Add($"{ModuleName}.IsTurboPumpAtSpeed");
  1543. m_RtDataKeys.Add($"{ModuleName}.TurboPumpWaterFlowSwitch.Value");
  1544. m_RtDataKeys.Add($"{ModuleName}.HasWafer");
  1545. m_RtDataKeys.Add($"{ModuleName}.CurrentRecipeResult");
  1546. m_RtDataKeys.Add($"{ModuleName}.HighTemperatureHeater.DeviceData");
  1547. }
  1548. #endregion
  1549. }
  1550. }