| .. |
|
Attributes
|
3f6c65223f
1.删除部分不需要插入数据库数据
|
1 gadu atpakaļ |
|
Properties
|
8582fd7e94
Venus初始版本提交
|
2 gadi atpakaļ |
|
Chamber.cs
|
a5542b5c2c
add SETMCycle|SESequence|SE Swap| => UI+RT && Update the Config items' visible by PM.ChamberType, item keyword of "typeflag" and InstalledModule
|
1 gadu atpakaļ |
|
DataName.cs
|
3cad102221
更新 RT
|
2 gadi atpakaļ |
|
DeviceName.cs
|
124b11b9f3
1.kepler2300 添加三个chiller功能（模拟器功能暂无）
|
1 gadu atpakaļ |
|
EventDefine.cs
|
e511d1f387
1.添加PM控压功能
|
1 gadu atpakaļ |
|
FADefine.cs
|
3cad102221
更新 RT
|
2 gadi atpakaļ |
|
GlobalEvents.cs
|
ba61077913
增加拖片功能
|
1 gadu atpakaļ |
|
HighTemperatureHeaterPosition.cs
|
6d7ee9b8a3
1.根据新版kepler2200A IO跟新kepler2200A PM功能
|
1 gadu atpakaļ |
|
InvokeName.cs
|
3cad102221
更新 RT
|
2 gadi atpakaļ |
|
Kepler2300Device.cs
|
a5813eb09d
1.修改chamber wafer样式
|
1 gadu atpakaļ |
|
MFCCalibrationData.cs
|
3a078d515d
1.修复ui灯闪烁错误bug
|
1 gadu atpakaļ |
|
ModuleName.cs
|
3cad102221
更新 RT
|
2 gadi atpakaļ |
|
PMLeakCheckResult.cs
|
a5813eb09d
1.修改chamber wafer样式
|
1 gadu atpakaļ |
|
PMVATPerformance.cs
|
280432bb82
1.TM传片动画制作，UI界面优化
|
2 gadi atpakaļ |
|
PartialPressureResult.cs
|
796541e5a6
现场测试修改MFC Calibration/LeakCheck/VATPerformance功能
|
2 gadi atpakaļ |
|
ProcessUnitDefine.cs
|
e511d1f387
1.添加PM控压功能
|
1 gadu atpakaļ |
|
Recipe.cs
|
e511d1f387
1.添加PM控压功能
|
1 gadu atpakaļ |
|
RecipeResult.cs
|
bcc9d2faf8
1、Chamber add the waferID
|
1 gadu atpakaļ |
|
RobotArmPan.cs
|
b2e38c8ff3
Add unuploaded files
|
1 gadu atpakaļ |
|
RtState.cs
|
724b0ca304
add ReturnWafer for Venus SE.
|
1 gadu atpakaļ |
|
SCValue.cs
|
3cad102221
更新 RT
|
2 gadi atpakaļ |
|
SerializeHelper.cs
|
8d21b41b42
AutoCycle enhancement.
|
1 gadu atpakaļ |
|
StepItem.cs
|
edb5ad6960
1.添加数据分析 Recipe step功能
|
1 gadu atpakaļ |
|
SubItem.cs
|
bb33e89998
1，优化UI界面
|
2 gadi atpakaļ |
|
TM.cs
|
dfc9174ac8
VenusSE TM PM Simulator Update
|
1 gadu atpakaļ |
|
VATPerformanceResult.cs
|
796541e5a6
现场测试修改MFC Calibration/LeakCheck/VATPerformance功能
|
2 gadi atpakaļ |
|
ValveType.cs
|
56f7c900fe
add VenusSEPM class and IODefine && Set the pressure value in the simulation to always be no less than 0
|
1 gadu atpakaļ |
|
VenusDevice.cs
|
6d7ee9b8a3
1.根据新版kepler2200A IO跟新kepler2200A PM功能
|
1 gadu atpakaļ |
|
VenusMenu.cs
|
5f00a42d13
kepler2200A 添加 IOHighTemperatureHeater驱动，并添加模拟器与UI界面功能
|
1 gadu atpakaļ |
|
Venus_Core.csproj
|
dfc9174ac8
VenusSE TM PM Simulator Update
|
1 gadu atpakaļ |
|
VirgoDevice.cs
|
9760d40cf7
port simulator
|
2 gadi atpakaļ |
zhouhr
724b0ca304
add ReturnWafer for Venus SE.