SimulatorSystem.cs 85 KB

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  1. using Aitex.Core.RT.DataCenter;
  2. using Aitex.Core.RT.IOCore;
  3. using Aitex.Core.RT.Log;
  4. using Aitex.Core.Util;
  5. using MECF.Framework.Common.Equipment;
  6. using MECF.Framework.Simulator.Core.Driver;
  7. using System;
  8. using System.Collections.Generic;
  9. using Venus_Simulator.Devices;
  10. using System.Threading;
  11. using Venus_Core;
  12. using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.PMs;
  13. namespace Venus_Simulator.Instances
  14. {
  15. public class SimulatorSystem : Singleton<SimulatorSystem>
  16. {
  17. private PeriodicJob _thread;
  18. private Random _rd = new Random();
  19. private RD_TRIG _trigATM = new RD_TRIG();
  20. private RD_TRIG _trigVAC = new RD_TRIG();
  21. private R_TRIG _trigLLExtend = new R_TRIG();
  22. private R_TRIG _trigLLRetract = new R_TRIG();
  23. private static int count = 0;
  24. private readonly float ATM_THRESHOLD = 750000;
  25. private readonly float ATM_PRESSURE = 760000;
  26. private readonly float ATM_LoadLock_PRESSURE = 760000;
  27. private readonly uint VAC_SW_PRESSURE = 9500;
  28. private readonly uint PROCESS_GAUGE = 10000;
  29. private Dictionary<ModuleName, DeviceSimulator> _MockDevices = new Dictionary<ModuleName, DeviceSimulator>();
  30. private Dictionary<ModuleName,JetChamber> jetChambers = new Dictionary<ModuleName,JetChamber>();
  31. public SimulatorSystem()
  32. {
  33. //_MockDevices.Add(ModuleName.PMB, new SkyPumpMock());
  34. //_MockDevices.Add(ModuleName.PMB, new AdTecGeneratorMock());
  35. //_MockDevices.Add(ModuleName.PMB, new AdTecMatchMock());
  36. // TODO
  37. jetChambers.Add(ModuleName.PMA, SimulatorJetChamber.CurrentPMAChamber);
  38. jetChambers.Add(ModuleName.PMB, SimulatorJetChamber.CurrentPMBChamber);
  39. jetChambers.Add(ModuleName.PMC, SimulatorJetChamber.CurrentPMCChamber);
  40. jetChambers.Add(ModuleName.PMD, SimulatorJetChamber.CurrentPMDChamber);
  41. }
  42. ~SimulatorSystem()
  43. {
  44. _thread?.Stop();
  45. }
  46. public void Initialize()
  47. {
  48. SetDefaultValue(ModuleName.PMA, SimulatorJetChamber.CurrentPMAChamber);
  49. SetDefaultValue(ModuleName.PMB, SimulatorJetChamber.CurrentPMBChamber);
  50. SetDefaultValue(ModuleName.PMC, SimulatorJetChamber.CurrentPMCChamber);
  51. SetDefaultValue(ModuleName.PMD, SimulatorJetChamber.CurrentPMDChamber);
  52. SetTMDefaultValue();
  53. Singleton<DataManager>.Instance.Initialize(false);
  54. _thread = new PeriodicJob(500, OnMonitor, nameof(SimulatorSystem), true);
  55. }
  56. private void SetDefaultValue(ModuleName mod,JetChamber jetChamber)
  57. {
  58. switch (jetChamber)
  59. {
  60. case JetChamber.Venus:
  61. IO.DI[$"{mod}.DI_PM_Lid_Closed"].Value = true;
  62. IO.DI[$"{mod}.DI_PM_ATM_SW"].Value = true;
  63. IO.DI[$"{mod}.DI_PM_VAC_SW"].Value = false;
  64. IO.DI[$"{mod}.DI_PCW_Flow_SW"].Value = true;
  65. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  66. IO.DI[$"{mod}.DI_Lift_Pin_Up_POS"].Value = false;
  67. IO.DI[$"{mod}.DI_Lift_Pin_Down_POS"].Value = true;
  68. IO.DI[$"{mod}.DI_RF_Generator_Interlock"].Value = true;
  69. IO.DI[$"{mod}.DI_Source_RF_Fan"].Value = true;
  70. IO.DI[$"{mod}.DI_Turbo_Pump_Interlock"].Value = true;
  71. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = false;
  72. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = true;
  73. IO.DI[$"{mod}.DI_CDA_Pressure"].Value = true;
  74. IO.DI[$"{mod}.DI_Coolant_Inlet_TC_Broken_Alarm"].Value = false;
  75. IO.DI[$"{mod}.DI_Coolant_Outlet_TC_Broken_Alarm"].Value = true;
  76. IO.DI[$"{mod}.DI_Chamber_Pressure_10t_Gauge_Alarm"].Value = false;
  77. IO.DI[$"{mod}.DI_Process_Pressure_100mt_Gauge_Alarm"].Value = false;
  78. IO.DI[$"{mod}.DI_Chamber_Pressure_760t_Gauge_Alarm"].Value = false;
  79. IO.DI[$"{mod}.DI_Foreline_Pressure_760t_Gauge_Alarm"].Value = false;
  80. IO.DI[$"{mod}.DI_LL_Pressure_760t_Gauge_Alarm"].Value = false;
  81. IO.DI[$"{mod}.DI_ESC_He_Pressure_100t_Gauge_Alarm"].Value = false;
  82. IO.DI[$"{mod}.DI_Valve_TC_Deviation_out_of_range"].Value = false;
  83. IO.DI[$"{mod}.DI_Valve_Control_TC_Broken_Alarm"].Value = false;
  84. IO.DI[$"{mod}.DI_Valve_Monitor_TC_Broken_Alarm"].Value = false;
  85. IO.DI[$"{mod}.DI_Valve_Heater_On_FB"].Value = false;
  86. IO.DI[$"{mod}.DI_Foreline_TC_Deviation_out_of_range"].Value = false;
  87. IO.DI[$"{mod}.DI_Foreline_Control_TC_Broken_Alarm"].Value = false;
  88. IO.DI[$"{mod}.DI_Foreline_Monitor_TC_Broken_Alarm"].Value = false;
  89. IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = false;
  90. IO.DI[$"{mod}.DI_CHB_Wall_TC_Deviation_out_of_range"].Value = false;
  91. IO.DI[$"{mod}.DI_CHB_Wall_Control_TC_Broken_Alarm"].Value = false;
  92. IO.DI[$"{mod}.DI_CHB_Wall_Monitor_TC_Broken_Alarm"].Value = false;
  93. IO.DI[$"{mod}.DI_CHB_Wall_Heater_On_FB"].Value = false;
  94. IO.DI[$"{mod}.DI_CHB_Wall_OT_SW_Alarm"].Value = false;
  95. IO.DI[$"{mod}.DI_PN2_Pressure_SW"].Value = true;
  96. IO.DI[$"{mod}.DI_MFC1_Pressure_SW"].Value = true;
  97. IO.DI[$"{mod}.DI_MFC2_Pressure_SW"].Value = true;
  98. IO.DI[$"{mod}.DI_MFC3_Pressure_SW"].Value = true;
  99. IO.DI[$"{mod}.DI_MFC4_Pressure_SW"].Value = true;
  100. IO.DI[$"{mod}.DI_MFC5_Pressure_SW"].Value = true;
  101. IO.DI[$"{mod}.DI_MFC6_Pressure_SW"].Value = true;
  102. IO.DI[$"{mod}.DI_MFC7_Pressure_SW"].Value = true;
  103. IO.DI[$"{mod}.DI_MFC8_Pressure_SW"].Value = true;
  104. IO.DI[$"{mod}.DI_He_Pressure_SW"].Value = true;
  105. IO.DI[$"{mod}.DI_ESC_He_Pressure_100t_Gauge_Alarm"].Value = false;
  106. IO.DI[$"{mod}.DI_Loadlock_Lid_Closed"].Value = true;
  107. IO.DI[$"{mod}.DI_Loadlock_Arm_Extend_POS"].Value = false;
  108. IO.DI[$"{mod}.DI_Loadlock_Arm_Retract_POS"].Value = true;
  109. IO.DI[$"{mod}.DI_Small_Wafer_In_POS"].Value = false;
  110. IO.DI[$"{mod}.DI_Big_Wafer_In_POS"].Value = false;
  111. IO.DI[$"{mod}.DI_Loadlock_ATM_SW"].Value = false;
  112. IO.DI[$"{mod}.DI_Gas_Box_Door_SW"].Value = true;
  113. IO.DI[$"{mod}.DI_Gas_Box_Pressure_SW"].Value = true;
  114. //// pressure
  115. SetAiValue($"{mod}.AI_Foreline_Pressure_760t", 5001);
  116. //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5000);
  117. SetAiValue($"{mod}.AI_Process_Pressure_100mt", 100);
  118. //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  119. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  120. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5000);
  121. SetAiValue($"{mod}.AI_LL_Pressure_760t", ATM_LoadLock_PRESSURE);
  122. //// Temperature
  123. SetAiValue($"{mod}.AI_Valve_Control_TC_Temp", 28);
  124. SetAiValue($"{mod}.AI_Valve_Monitor_TC_Temp", 27);
  125. SetAiValue($"{mod}.AI_Fline_Control_TC_Temp", 28);
  126. SetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp", 27);
  127. SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", 28);
  128. SetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp", 27);
  129. SetAiValue($"{mod}.AI_Coolant_Inlet_Temp", 28);
  130. //if (mod == ModuleName.PMA)
  131. //{
  132. // SetAiValue($"{mod}.AI_Coolant_Outlet_Temp", 29);
  133. //}
  134. //else if (mod == ModuleName.PMB)
  135. //{
  136. // SetAiValue($"{mod}.AI_Coolant_Outlet_Temp", 30);
  137. //}
  138. // Datetime
  139. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  140. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  141. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  142. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  143. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  144. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  145. break;
  146. case JetChamber.VenusSE:
  147. IO.DI[$"{mod}.DI_Lid_Closed"].Value = true;
  148. IO.DI[$"{mod}.DI_ATM_Switch"].Value = true;
  149. IO.DI[$"{mod}.DI_PM_VAC_Switch"].Value = false;
  150. IO.DI[$"{mod}.DI_Plate_Water_Flow_Switch"].Value = true;
  151. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  152. IO.DI[$"{mod}.DI_Lift_Pin_Up_Position"].Value = false;
  153. IO.DI[$"{mod}.DI_Lift_Pin_Down_POS"].Value = true;
  154. //IO.DI[$"{mod}.DI_RF_Generator_Interlock"].Value = true;
  155. //IO.DI[$"{mod}.DI_Source_RF_Fan"].Value = true;
  156. IO.DI[$"{mod}.DI_Lift_Pin_Down_Position"].Value = true;
  157. IO.DI[$"{mod}.DI_RF_HV_Interlock_OK"].Value = true;
  158. IO.DI[$"{mod}.DI_Turbo_Pump_Interlock"].Value = false;
  159. IO.DI[$"{mod}.DI_Slit_Door_Open_Position"].Value = true;
  160. IO.DI[$"{mod}.DI_Slit_Door_Close_Position"].Value = false;
  161. IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = false;
  162. IO.DI[$"{mod}.DI_Coolant_Inlet_TC_Broken_Alarm"].Value = false;
  163. IO.DI[$"{mod}.DI_Coolant_Outlet_TC_Broken_Alarm"].Value = false;
  164. IO.DI[$"{mod}.DI_Chamber_Pressure_10t_Gauge_Alarm"].Value = false;
  165. IO.DI[$"{mod}.DI_GASLINE_TC_Deviation_out_of_range"].Value = false;
  166. IO.DI[$"{mod}.DI_GASLINE_Control_TC_Broken_Alarm"].Value = false;
  167. IO.DI[$"{mod}.DI_GASLINE_Monitor_TC_Broken_Alarm"].Value = false;
  168. IO.DI[$"{mod}.DI_GASLINE_Heater_On_FB"].Value = false;
  169. IO.DI[$"{mod}.DI_Valve_Control_TC_Broken_Alarm"].Value = false;
  170. IO.DI[$"{mod}.DI_Valve_Heater_On_FB"].Value = false;
  171. IO.DI[$"{mod}.DI_Foreline_Control_TC_Broken_Alarm"].Value = false;
  172. IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = true;
  173. IO.DI[$"{mod}.DI_CHB_Wall_TC_Deviation_out_of_range"].Value = true;
  174. IO.DI[$"{mod}.DI_CHB_Wall_Control_TC_Broken_Alarm"].Value = true;
  175. IO.DI[$"{mod}.DI_CHB_Wall_Monitor_TC_Broken_Alarm"].Value = true;
  176. IO.DI[$"{mod}.DI_CHB_Wall_Heater_On_FB"].Value = true;
  177. IO.DI[$"{mod}.DI_CHB_Wall_OT_Switch_Alarm"].Value = true;
  178. IO.DI[$"{mod}.DI_PN2_Pressure_Switch"].Value = true;
  179. IO.DI[$"{mod}.DI_MFC1_Pressure_Switch"].Value = true;
  180. IO.DI[$"{mod}.DI_MFC2_Pressure_Switch"].Value = true;
  181. IO.DI[$"{mod}.DI_MFC3_Pressure_Switch"].Value = true;
  182. IO.DI[$"{mod}.DI_MFC4_Pressure_Switch"].Value = true;
  183. IO.DI[$"{mod}.DI_MFC5_Pressure_Switch"].Value = true;
  184. IO.DI[$"{mod}.DI_MFC6_Pressure_Switch"].Value = true;
  185. IO.DI[$"{mod}.DI_MFC7_Pressure_Switch"].Value = true;
  186. IO.DI[$"{mod}.DI_MFC8_Pressure_Switch"].Value = true;
  187. IO.DI[$"{mod}.DI_MFC9_Pressure_Switch"].Value = true;
  188. IO.DI[$"{mod}.DI_MFC10_Pressure_Switch"].Value = true;
  189. IO.DI[$"{mod}.DI_MFC11_Pressure_Switch"].Value = true;
  190. IO.DI[$"{mod}.DI_MFC12_Pressure_Switch"].Value = true;
  191. IO.DI[$"{mod}.DI_He_Pressure_SW"].Value = true;
  192. IO.DI[$"{mod}.DI_ESC_He_Pressure_100t_Gauge_Alarm"].Value = false;
  193. IO.DI[$"{mod}.DI_Gas_Box_Door_Switch"].Value = true;
  194. IO.DI[$"{mod}.DI_Gas_Box_Pressure_Switch"].Value = true;
  195. IO.DI[$"{mod}.DI_Turbo_Pump_Water_Flow_Switch"].Value = true;
  196. IO.DI[$"{mod}.DI_SOURCE_RF_Water_Flow_Switch"].Value = true;
  197. IO.DI[$"{mod}.DI_TM_Slit_Door_Closed"].Value = true;
  198. IO.DI[$"{mod}.DI_Source_Match_interlock_ok"].Value = true;
  199. IO.DI[$"{mod}.DI_Bias_Match_interlock_ok"].Value = true;
  200. //// pressure
  201. //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5000);
  202. SetAiValue($"{mod}.AI_Process_Pressure_100mt", 100);
  203. //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  204. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  205. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5000);
  206. //// Temperature
  207. SetAiValue($"{mod}.AI_Valve_Control_TC_Temp", 28);
  208. SetAiValue($"{mod}.AI_Valve_Monitor_TC_Temp", 27);
  209. SetAiValue($"{mod}.AI_Fline_Control_TC_Temp", 28);
  210. SetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp", 27);
  211. SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", 28);
  212. SetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp", 27);
  213. SetAiValue($"{mod}.AI_Coolant_Inlet_Temp", 28);
  214. // Datetime
  215. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  216. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  217. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  218. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  219. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  220. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  221. break;
  222. case JetChamber.Kepler2300:
  223. // chamber
  224. IO.DI[$"{mod}.DI_Lid_Closed"].Value = true;
  225. IO.DI[$"{mod}.DI_ATM_Switch"].Value = true;
  226. IO.DI[$"{mod}.DI_VAC_Switch"].Value = false;
  227. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  228. IO.DI[$"{mod}.DI_Lift_Pin_Up_POS"].Value = false;
  229. IO.DI[$"{mod}.DI_Lift_Pin_Down_POS"].Value = true;
  230. IO.DI[$"{mod}.DI_Source_RF_Generator_Interlock"].Value = true;
  231. IO.DI[$"{mod}.DI_Source_RF_Fan"].Value = true;
  232. IO.DI[$"{mod}.DI_Turbo_Pump_Interlock"].Value = true;
  233. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = false;
  234. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = true;
  235. IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
  236. IO.DI[$"{mod}.DI_S_Valve_TC_Deviation_out_of_range"].Value = false;
  237. IO.DI[$"{mod}.DI_S_Valve_Control_TC_Broken_Alarm"].Value = false;
  238. IO.DI[$"{mod}.DI_S_Valve_Monitor_TC_Broken_Alarm"].Value = false;
  239. IO.DI[$"{mod}.DI_S_Valve_Heater_On_FB"].Value = false;
  240. IO.DI[$"{mod}.DI_Foreline_TC_Deviation_out_of_range"].Value = false;
  241. IO.DI[$"{mod}.DI_Foreline_Control_TC_Broken_Alarm"].Value = false;
  242. IO.DI[$"{mod}.DI_Foreline_Monitor_TC_Broken_Alarm"].Value = false;
  243. IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = false;
  244. IO.DI[$"{mod}.DI_CHB_Wall_TC_Deviation_out_of_range"].Value = false;
  245. IO.DI[$"{mod}.DI_CHB_Wall_Control_TC_Broken_Alarm"].Value = false;
  246. IO.DI[$"{mod}.DI_CHB_Wall_Monitor_TC_Broken_Alarm"].Value = false;
  247. IO.DI[$"{mod}.DI_CHB_Wall_Heater_On_FB"].Value = false;
  248. IO.DI[$"{mod}.DI_CHB_Wall_OT_Switch_Alarm"].Value = false;
  249. IO.DI[$"{mod}.DI_PN2_Pressure_Switch"].Value = true;
  250. IO.DI[$"{mod}.DI_MFC1_Pressure_Switch"].Value = true;
  251. IO.DI[$"{mod}.DI_MFC2_Pressure_Switch"].Value = true;
  252. IO.DI[$"{mod}.DI_MFC3_Pressure_Switch"].Value = true;
  253. IO.DI[$"{mod}.DI_MFC4_Pressure_Switch"].Value = true;
  254. IO.DI[$"{mod}.DI_MFC5_Pressure_Switch"].Value = true;
  255. IO.DI[$"{mod}.DI_MFC6_Pressure_Switch"].Value = true;
  256. IO.DI[$"{mod}.DI_MFC7_Pressure_Switch"].Value = true;
  257. IO.DI[$"{mod}.DI_MFC8_Pressure_Switch"].Value = true;
  258. IO.DI[$"{mod}.DI_ESC_He_Pressure_Switch"].Value = true;
  259. IO.DI[$"{mod}.DI_ESC_He_Pressure_100t_Guage_Alarm"].Value = false;
  260. IO.DI[$"{mod}.DI_Gas_Box_Door_Switch"].Value = true;
  261. IO.DI[$"{mod}.DI_Gas_Box_Pressure_Switch"].Value = true;
  262. IO.DI[$"{mod}.DI_Source_RF_Water_Flow_Switch"].Value = true;
  263. IO.DI[$"{mod}.DI_S_Valve_OT_Switch_Alarm"].Value = false;
  264. IO.DI[$"{mod}.DI_Foreline_OT_Switch_Alarm"].Value = false;
  265. IO.DI[$"{mod}.DI_Arm_Not_Extend_to_PM"].Value = true;
  266. IO.DI[$"{mod}.DI_EFEM_Door_Colse"].Value = true;
  267. IO.DI[$"{mod}.DI_ESC_Inner_Coolant_Flow_SW"].Value = true;
  268. IO.DI[$"{mod}.DI_ESC_Outer_Coolant_Flow_SW"].Value = true;
  269. //// pressure
  270. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 5001);
  271. //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5000);
  272. SetAiValue($"{mod}.AI_Process_Pressure_100mt", 100);
  273. //SetAiValue($"{mod}.AI_Chamber_Pressure_760t", ATM_PRESSURE);
  274. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  275. //// Temperature
  276. SetAiValue($"{mod}.AI_S_Valve_Control_TC_Temp", 28);
  277. SetAiValue($"{mod}.AI_Foreline_Control_TC_Temp", 28);
  278. SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", 28);
  279. SetAiValue($"{mod}.AI_ESC_inner_coolant_outlet_TC_Temp", 20);
  280. SetAiValue($"{mod}.AI_ESC_outer_coolant_outlet_TC_Temp", 30);
  281. SetAiValue($"{mod}.AI_Top_Plate_coolant_outlet_TC_Temp", 40);
  282. // Datetime
  283. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  284. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  285. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  286. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  287. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  288. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  289. break;
  290. case JetChamber.Kepler2200A:
  291. IO.DI[$"{mod}.DI_Lid_Closed"].Value = true;
  292. IO.DI[$"{mod}.DI_ATM_Switch"].Value = true;
  293. IO.DI[$"{mod}.DI_VAC_Switch"].Value = false;
  294. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  295. IO.DI[$"{mod}.DI_Source_RF_Generator_Interlock"].Value = true;
  296. IO.DI[$"{mod}.DI_Source_RF_Fan"].Value = true;
  297. IO.DI[$"{mod}.DI_Turbo_Pump_Interlock"].Value = true;
  298. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = false;
  299. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = true;
  300. IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
  301. IO.DI[$"{mod}.DI_CHB_H-HT_Control_TC_Broken_Alarm"].Value = false;
  302. IO.DI[$"{mod}.DI_CHB_H-HT_Heater_On_FB"].Value = false;
  303. IO.DI[$"{mod}.DI_CHB_H-HT_OT_Switch_Alarm"].Value = false;
  304. IO.DI[$"{mod}.DI_PN2_Pressure_Switch"].Value = true;
  305. IO.DI[$"{mod}.DI_MFC1_Pressure_Switch"].Value = true;
  306. IO.DI[$"{mod}.DI_MFC2_Pressure_Switch"].Value = true;
  307. IO.DI[$"{mod}.DI_MFC3_Pressure_Switch"].Value = true;
  308. IO.DI[$"{mod}.DI_MFC4_Pressure_Switch"].Value = true;
  309. IO.DI[$"{mod}.DI_MFC5_Pressure_Switch"].Value = true;
  310. IO.DI[$"{mod}.DI_MFC6_Pressure_Switch"].Value = true;
  311. IO.DI[$"{mod}.DI_MFC7_Pressure_Switch"].Value = true;
  312. IO.DI[$"{mod}.DI_MFC8_Pressure_Switch"].Value = true;
  313. IO.DI[$"{mod}.DI_N2_Purge_Pressure_Switch"].Value = true;
  314. IO.DI[$"{mod}.DI_Gas_Box_Door_Switch"].Value = true;
  315. IO.DI[$"{mod}.DI_Lid_Up_Limit_Pos_SW"].Value = true;
  316. IO.DI[$"{mod}.DI_S_Valve_OT_Switch_Alarm"].Value = false;
  317. IO.DI[$"{mod}.DI_Lid_Down_Limit_Pos_SW"].Value = true;
  318. IO.DI[$"{mod}.DI_Gas_Box_Pressure_Switch"].Value = true;
  319. IO.DI[$"{mod}.DI_TM_Safety_Door_Colse"].Value = true;
  320. IO.DI[$"{mod}.DI_Arm_Not_Extend_to_PM"].Value = true;
  321. IO.DI[$"{mod}.DI_Source_RF_Water_Flow_Switch"].Value = true;
  322. //// pressure
  323. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 5001);
  324. //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5000);
  325. SetAiValue($"{mod}.AI_Process_Pressure_100mt", 100);
  326. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  327. //// Temperature
  328. SetAiValue($"{mod}.AI_S_Valve_Control_TC_Temp", 28);
  329. SetAiValue($"{mod}.AI_CHB_H-HT_Control_TC_Temp", 28);
  330. // Datetime
  331. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  332. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  333. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  334. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  335. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  336. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  337. break;
  338. }
  339. }
  340. private void SetTMDefaultValue()
  341. {
  342. ModuleName mod = ModuleName.TM;
  343. if (SimulatorJetTM.CurrentTM == JetTMType.Venus)
  344. {
  345. IO.DI[$"{mod}.DI_TM_Power_On"].Value = true;
  346. IO.DI[$"{mod}.DI_TM_In_Safety"].Value = true;
  347. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  348. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMA"].Value = true;
  349. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMB"].Value = true;
  350. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMC"].Value = true;
  351. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMD"].Value = true;
  352. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_LLA"].Value = true;
  353. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_LLB"].Value = true;
  354. IO.DI[$"{mod}.DI_EFEM_RB_Not_Extend_LLA"].Value = true;
  355. IO.DI[$"{mod}.DI_EFEM_RB_Not_Extend_LLB"].Value = true;
  356. IO.DI[$"{mod}.DI_EFEM_Side_Door_Closed"].Value = true;
  357. IO.DI[$"{mod}.DI_TM_CHB_PCW_Flow_Switch"].Value = true;
  358. IO.DI[$"{mod}.DI_LLA_PCW_Flow_Switch"].Value = true;
  359. IO.DI[$"{mod}.DI_LLB_PCW_Flow_Switch"].Value = true;
  360. IO.DI[$"{mod}.DI_TM_CHB_Door_Closed"].Value = true;
  361. IO.DI[$"{mod}.DI_LLA_Lid_Door_Closed"].Value = true;
  362. IO.DI[$"{mod}.DI_LLB_Lid_Door_Closed"].Value = true;
  363. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_open_Position"].Value = false;
  364. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_close_Position"].Value = true;
  365. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_open_Position"].Value = false;
  366. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_close_Position"].Value = true;
  367. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_open_Position"].Value = false;
  368. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_close_Position"].Value = true;
  369. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_open_Position"].Value = false;
  370. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_close_Position"].Value = true;
  371. IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
  372. IO.DI[$"{mod}.DI_Vaccum_Pressure_Switch"].Value = true;
  373. IO.DI[$"{mod}.DI_N2_Pressure_Switch"].Value = true;
  374. IO.DI[$"{mod}.DI_TM_Chamber_VAC_Gauge_Alarm"].Value = true;
  375. IO.DI[$"{mod}.DI_TM_Foreline_VAC_Gauge_Alarm"].Value = true;
  376. IO.DI[$"{mod}.DI_LLA_Chamber_VAC_Gauge_Alarm"].Value = true;
  377. IO.DI[$"{mod}.DI_LLA_Foreline_VAC_Gauge_Alarm"].Value = true;
  378. IO.DI[$"{mod}.DI_LLB_Chamber_VAC_Gauge_Alarm"].Value = true;
  379. IO.DI[$"{mod}.DI_LLB_Foreline_VAC_Gauge_Alarm"].Value = true;
  380. IO.DI[$"{mod}.DI_TM_ATM_Switch"].Value = true;
  381. IO.DI[$"{mod}.DI_LLA_ATM_Switch"].Value = true;
  382. IO.DI[$"{mod}.DI_LLB_ATM_Switch"].Value = true;
  383. // Datetime
  384. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  385. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  386. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  387. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  388. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  389. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  390. SetAiValue($"{mod}.AI_TM_CHB_Pressure", 760000);
  391. SetAiValue($"{mod}.AI_TM_Foreline_Pressure", 5001);
  392. SetAiValue($"{mod}.AI_LLA_CHB_Pressure", 5002);
  393. SetAiValue($"{mod}.AI_LLA_LLB_Foreline_Pressure", 5003);
  394. SetAiValue($"{mod}.AI_LLB_CHB_Pressure", 5004);
  395. }
  396. else
  397. {
  398. IO.DI[$"{mod}.DI_TM_DI1"].Value = true;
  399. IO.DI[$"{mod}.DI_TM_DI2"].Value = true;
  400. IO.DI[$"{mod}.DI_TM_DI3"].Value = true;
  401. IO.DI[$"{mod}.DI_TM_DI5"].Value = true;
  402. IO.DI[$"{mod}.DI_TM_DI7"].Value = true;
  403. IO.DI[$"{mod}.DI_TM_DI8"].Value = true;
  404. IO.DI[$"{mod}.DI_TM_DI9"].Value = true;
  405. IO.DI[$"{mod}.DI_TM_DI10"].Value = true;
  406. IO.DI[$"{mod}.DI_SYS_C1"].Value = true;
  407. IO.DI[$"{mod}.DI_SYS_C2"].Value = true;
  408. IO.DI[$"{mod}.DI_SYS_C3"].Value = true;
  409. IO.DI[$"{mod}.DI_SYS_C4"].Value = true;
  410. IO.DI[$"{mod}.DI_TSYS_C5"].Value = true;
  411. IO.DI[$"{mod}.DI_TM_N2_1"].Value = true;
  412. IO.DI[$"{mod}.DI_VCE_TM_OPS"].Value = true;
  413. IO.DI[$"{mod}.DI_VCE_TM_CLS"].Value = true;
  414. IO.DI[$"{mod}.DI_TM_PMA_OPS"].Value = true;
  415. IO.DI[$"{mod}.DI_TM_PMA_CLS"].Value = true;
  416. IO.DI[$"{mod}.DI_TM_PMB_OPS"].Value = true;
  417. IO.DI[$"{mod}.DI_TM_PMB_CLS"].Value = true;
  418. IO.DI[$"{mod}.DI_TM_PMC_OPS"].Value = true;
  419. IO.DI[$"{mod}.DI_TM_PMC_CLS"].Value = true;
  420. IO.DI[$"{mod}.DI_TM_HE"].Value = true;
  421. IO.DI[$"{mod}.DI_VCE_RB_RET"].Value = true;
  422. IO.DI[$"{mod}.DI_PMA_RB_RET"].Value = true;
  423. IO.DI[$"{mod}.DI_PMB_RB_RET"].Value = true;
  424. IO.DI[$"{mod}.DI_PMC_RB_RET"].Value = true;
  425. SetAiValue($"{mod}.AI_MFC_Flow_Setpoint", 4000);
  426. SetAiValue($"{mod}.VCE_Vacuum_Gauge", 4000);
  427. SetAiValue($"{mod}.VCE_Pipeline_Vacuum_Gauge", 4000);
  428. SetAiValue($"{mod}.TM_Pipeline_Vacuum_Gauge", 4000);
  429. SetAiValue($"{mod}.TM_Vacuum_Gauge", 4000);
  430. }
  431. }
  432. private bool OnMonitor()
  433. {
  434. try
  435. {
  436. foreach (var item in jetChambers)
  437. {
  438. switch (item.Value)
  439. {
  440. case JetChamber.Venus:
  441. MonitorSlitDoor(item.Key);
  442. MonitorPin(item.Key);
  443. MonitorPressure(item.Key);
  444. MonitorExtendAndRetract(item.Key);
  445. MonitorGas(item.Key);
  446. this.SimulateHe(item.Key);
  447. //MonitorRF(item.Key);
  448. ChangeTime(item.Key);
  449. //MonitorIOPumpCtrl(item.Key);
  450. break;
  451. case JetChamber.Kepler2300:
  452. MonitorSlitDoor(item.Key);
  453. MonitorPin(item.Key);
  454. MonitorPressure_Kepler(item.Key);
  455. //MonitorTemperature(item.Key);
  456. MonitorGas(item.Key);
  457. this.SimulateHe(item.Key);
  458. //MonitorRF(item.Key);
  459. ChangeTime(item.Key);
  460. //MonitorIOPumpCtrl(item.Key);
  461. MonitorLid(item.Key);
  462. break;
  463. case JetChamber.Kepler2200A:
  464. MonitorSlitDoor(item.Key);
  465. MonitorPressure_Kepler2200A(item.Key);
  466. //MonitorTemperature(item.Key);
  467. MonitorGas(item.Key);
  468. // MonitorRF(item.Key);
  469. ChangeTime(item.Key);
  470. //MonitorIOPumpCtrl(item.Key);
  471. MonitorLid(item.Key);
  472. MonitorIOHighTemperatureHeater(item.Key);
  473. break;
  474. case JetChamber.Kepler2200B:
  475. break;
  476. }
  477. }
  478. ChangeTime(ModuleName.TM);
  479. MonitorMFSlitDoor();
  480. MonitorMFPressure();
  481. }
  482. catch (Exception e)
  483. {
  484. LOG.WriteExeption(e);
  485. }
  486. return true;
  487. }
  488. private void ChangeTime(ModuleName mod)
  489. {
  490. // Heartbeat with PLC
  491. SetAiValue($"{mod}.AI_Heartbeat_FB", GetAoValue($"{mod}.AO_Heartbeat"));
  492. SetAiValue($"{mod}.AI_Year", DateTime.Now.Year);
  493. SetAiValue($"{mod}.AI_Month", DateTime.Now.Month);
  494. SetAiValue($"{mod}.AI_Day", DateTime.Now.Day);
  495. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  496. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  497. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  498. }
  499. void MonitorSlitDoor(ModuleName mod)
  500. {
  501. // slit door open
  502. if (IO.DO[$"{mod}.DO_Slit_Door_Open"].Value)
  503. {
  504. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = true;
  505. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = false;
  506. }
  507. // slit door close
  508. if (IO.DO[$"{mod}.DO_Slit_Door_Close"].Value)
  509. {
  510. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = false;
  511. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = true;
  512. }
  513. }
  514. void MonitorMFSlitDoor()
  515. {
  516. ModuleName mod = ModuleName.TM;
  517. // LLA T door open
  518. if (IO.DO[$"{mod}.DO_LLA_Slit_Door_T_Open"].Value)
  519. {
  520. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_open_Position"].Value = true;
  521. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_close_Position"].Value = false;
  522. }
  523. // LLB T door open
  524. if (IO.DO[$"{mod}.DO_LLB_Slit_Door_T_Open"].Value)
  525. {
  526. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_open_Position"].Value = true;
  527. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_close_Position"].Value = false;
  528. }
  529. // LLA E door open
  530. if (IO.DO[$"{mod}.DO_LLA_Slit_Door_E_Open"].Value)
  531. {
  532. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_open_Position"].Value = true;
  533. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_close_Position"].Value = false;
  534. }
  535. // LLB E door open
  536. if (IO.DO[$"{mod}.DO_LLB_Slit_Door_E_Open"].Value)
  537. {
  538. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_open_Position"].Value = true;
  539. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_close_Position"].Value = false;
  540. }
  541. // LLA T door close
  542. if (IO.DO[$"{mod}.DO_LLA_Slit_Door_T_Close"].Value)
  543. {
  544. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_open_Position"].Value = false;
  545. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_close_Position"].Value = true;
  546. }
  547. // LLB T door close
  548. if (IO.DO[$"{mod}.DO_LLB_Slit_Door_T_Close"].Value)
  549. {
  550. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_open_Position"].Value = false;
  551. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_close_Position"].Value = true;
  552. }
  553. // LLA E door close
  554. if (IO.DO[$"{mod}.DO_LLA_Slit_Door_E_Close"].Value)
  555. {
  556. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_open_Position"].Value = false;
  557. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_close_Position"].Value = true;
  558. }
  559. // LLB E door close
  560. if (IO.DO[$"{mod}.DO_LLB_Slit_Door_E_Close"].Value)
  561. {
  562. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_open_Position"].Value = false;
  563. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_close_Position"].Value = true;
  564. }
  565. }
  566. void MonitorPin(ModuleName mod)
  567. {
  568. // lift pin up
  569. if (IO.DO[$"{mod}.DO_Lift_Pin_Up"].Value != IO.DO[$"{mod}.DO_Lift_Pin_Down"].Value)
  570. {
  571. IO.DI[$"{mod}.DI_Lift_Pin_Up_POS"].Value = IO.DO[$"{mod}.DO_Lift_Pin_Up"].Value;
  572. IO.DI[$"{mod}.DI_Lift_Pin_Down_POS"].Value = IO.DO[$"{mod}.DO_Lift_Pin_Down"].Value;
  573. }
  574. }
  575. void MonitorLid(ModuleName mod)
  576. {
  577. // lift pin up
  578. if (IO.DO[$"{mod}.DO_Lid_Up"].Value != IO.DO[$"{mod}.DO_Lid_Down"].Value)
  579. {
  580. IO.DI[$"{mod}.DI_Lid_Closed"].Value = IO.DO[$"{mod}.DO_Lid_Down"].Value;
  581. }
  582. }
  583. void MonitorExtendAndRetract(ModuleName mod)
  584. {
  585. // Extend
  586. _trigLLExtend.CLK = IO.DO[$"{mod}.DO_Loadlock_Arm_Extend"].Value;
  587. if (_trigLLExtend.Q)
  588. {
  589. _trigLLRetract.RST = true;
  590. Thread.Sleep(500);
  591. IO.DI[$"{mod}.DI_Loadlock_Arm_Extend_POS"].Value = true;
  592. IO.DI[$"{mod}.DI_Loadlock_Arm_Retract_POS"].Value = false;
  593. IO.DI[$"{mod}.DI_Small_Wafer_In_POS"].Value = false;
  594. IO.DI[$"{mod}.DI_Big_Wafer_In_POS"].Value = false;
  595. }
  596. // Retract
  597. _trigLLRetract.CLK = IO.DO[$"{mod}.DO_Loadlock_Arm_Retract"].Value;
  598. if (_trigLLRetract.Q)
  599. {
  600. count++;
  601. _trigLLExtend.RST = true;
  602. Thread.Sleep(500);
  603. IO.DI[$"{mod}.DI_Loadlock_Arm_Extend_POS"].Value = false;
  604. IO.DI[$"{mod}.DI_Loadlock_Arm_Retract_POS"].Value = true;
  605. if (count == 1)
  606. {
  607. IO.DI[$"{mod}.DI_Small_Wafer_In_POS"].Value = false;
  608. IO.DI[$"{mod}.DI_Big_Wafer_In_POS"].Value = false;
  609. }
  610. else if (count == 2)
  611. {
  612. count = 0;
  613. IO.DI[$"{mod}.DI_Small_Wafer_In_POS"].Value = true;
  614. IO.DI[$"{mod}.DI_Big_Wafer_In_POS"].Value = false;
  615. }
  616. }
  617. }
  618. void MonitorPressure(ModuleName mod)
  619. {
  620. string sAI_Foreline = "AI_Foreline_Pressure_760t";
  621. // Loadlock pressure
  622. string sAI_LoadLockPressure = "AI_LL_Pressure_760t";
  623. // Foreline
  624. if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open)
  625. {
  626. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(500, 600));
  627. }
  628. else
  629. {
  630. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(500, 600));
  631. }
  632. // PLC 模拟量范围[0,4000], 电压[0, 10V], 压力[0, 760Torr]
  633. string sAI_ChamberPressure = "AI_Chamber_Pressure_10t";
  634. string sAI_ProcessPressure = "AI_Chamber_Pressure_Virtual";
  635. //float chamber_pressure = GetMockChamberPressure(mod);
  636. //float process_pressure = GetAiValue($"{mod}.AI_Chamber_Pressure_Virtual");
  637. // soft pump & fast pump
  638. DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"];
  639. DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"];
  640. DOAccessor turbo_pump_vlv = IO.DO[$"{mod}.DO_Turbo_Pump_Pumping_Valve"];
  641. if (fast_pump_vlv.Value || soft_pump_vlv.Value || turbo_pump_vlv.Value)
  642. {
  643. //任意泵打开
  644. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  645. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  646. if (fast_pump_vlv.Value && soft_pump_vlv.Value)
  647. {//开双泵
  648. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  649. {
  650. float targetChamberPressure = getAiValue_ChamberPressure - 30000 > 0 ? getAiValue_ChamberPressure - 30000 : 0;
  651. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  652. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  653. }
  654. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  655. {
  656. float targetChamberPressure = getAiValue_ProcessPressure - 1500 > 0 ? getAiValue_ProcessPressure - 1500 : 0;
  657. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  658. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  659. }
  660. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(15000, 16000));
  661. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(150, 160));
  662. }
  663. else if (fast_pump_vlv.Value)//开
  664. {
  665. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  666. {
  667. float targetChamberPressure = getAiValue_ChamberPressure - 25000 > 0 ? getAiValue_ChamberPressure - 25000 : 0;
  668. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  669. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  670. }
  671. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  672. {
  673. float targetChamberPressure = getAiValue_ProcessPressure - 1300 > 0 ? getAiValue_ProcessPressure - 1300 : 0;
  674. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  675. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  676. }
  677. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(12000, 13000));
  678. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(120, 130));
  679. }
  680. else if (soft_pump_vlv.Value)
  681. {
  682. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  683. {
  684. float targetChamberPressure = getAiValue_ChamberPressure - 10000 > 0 ? getAiValue_ChamberPressure - 10000 : 0;
  685. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  686. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  687. }
  688. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  689. {
  690. float targetChamberPressure = getAiValue_ProcessPressure - 1100 > 0 ? getAiValue_ProcessPressure - 1100 : 0;
  691. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  692. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  693. }
  694. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(13000, 14000));
  695. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(100, 110));
  696. }
  697. else if (turbo_pump_vlv.Value)
  698. {
  699. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  700. if ((getAiValue_ChamberPressure - 500) >= 0)
  701. SetAiValue($"{mod}.{sAI_ChamberPressure}", getAiValue_ChamberPressure - 500);
  702. else
  703. SetAiValue($"{mod}.{sAI_ChamberPressure}", 0);
  704. if ((getAiValue_ProcessPressure - 500) >= 0)
  705. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  706. else
  707. SetAiValue($"{mod}.{sAI_ProcessPressure}", 0);
  708. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  709. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  710. }
  711. }
  712. // fast vent & purge
  713. DOAccessor vent_vlv = IO.DO[$"{mod}.DO_N2_Valve"];
  714. //DOAccessor purge_vlv = IO.DO[$"{mod}.DO_Chamber_purge_valve"];
  715. //if (vent_vlv.Value || purge_vlv.Value)
  716. //{
  717. // if (vent_vlv.Value && purge_vlv.Value)
  718. // {
  719. // float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  720. // float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  721. // if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  722. // {
  723. // SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 30000);
  724. // //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  725. // }
  726. // else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  727. // {
  728. // getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  729. // SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1500);
  730. // SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1500);
  731. // }
  732. // //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(45000, 50000));
  733. // //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(150, 160));
  734. // }
  735. // else
  736. //
  737. if (vent_vlv.Value)
  738. {
  739. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  740. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  741. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  742. {
  743. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  744. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  745. }
  746. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  747. {
  748. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  749. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  750. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  751. }
  752. else
  753. {
  754. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  755. }
  756. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(25000, 30000));
  757. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(130, 150));
  758. }
  759. // Loadlock Pumping Valve
  760. DOAccessor Loadlock_pump_vlv = IO.DO[$"{mod}.DO_Loadlock_Pumping_Valve"];
  761. if (Loadlock_pump_vlv.Value)
  762. {
  763. SetAiValue($"{mod}.{sAI_LoadLockPressure}", GetAiValue($"{mod}.{sAI_LoadLockPressure}") - 30000);
  764. }
  765. // Loadlock vent
  766. DOAccessor Loadlock_vent_vlv = IO.DO[$"{mod}.DO_Loadlock_Vent_Valve"];
  767. if (Loadlock_vent_vlv.Value)
  768. {
  769. SetAiValue($"{mod}.{sAI_LoadLockPressure}", GetAiValue($"{mod}.{sAI_LoadLockPressure}") + 30000);
  770. }
  771. // 压力值越界,复位
  772. float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  773. if (chamber_pressure1 > ATM_PRESSURE)
  774. {
  775. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  776. }
  777. else if (chamber_pressure1 < 20)
  778. {
  779. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 20);
  780. }
  781. float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  782. if (process_pressure1 > PROCESS_GAUGE)
  783. {
  784. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  785. }
  786. else if (process_pressure1 < 20)
  787. {
  788. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", 20);
  789. }
  790. float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}");
  791. if (foreline_pressure > 10000)
  792. {
  793. SetAiValue($"{mod}.AI_Foreline_Pressure_760t", 10000);
  794. }
  795. else if (foreline_pressure < 150)
  796. {
  797. SetAiValue($"{mod}.AI_Foreline_Pressure_760t", 150);
  798. }
  799. // 模拟压力计漂移
  800. //int p1 = (int)GetMockChamberPressure(mod);
  801. //int new_p1 = _rd.Next(p1 - 2, p1 + 2);
  802. //SetAiValue($"{mod}.AI_Chamber_Pressure_760t", new_p1);
  803. //int p2 = (int)GetAiValue($"{mod}.AI_Foreline_Pressure_10t");
  804. //int new_p2 = _rd.Next(p2 - 1, p2 + 1);
  805. //SetAiValue($"{mod}.AI_Foreline_Pressure_10t", new_p2);
  806. //int p3 = (int)GetAiValue($"{mod}.AI_Chamber_Pressure_Virtual");
  807. //int new_p3 = _rd.Next(p3 - 1, p3 + 1);
  808. //SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", new_p3);
  809. // 根据当前压力值设定信号
  810. //float chamber_pressure2 = GetMockChamberPressure(mod);
  811. // ATM switch
  812. IO.DI[$"{mod}.DI_PM_ATM_SW"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ATM_THRESHOLD;
  813. // VAC switch
  814. IO.DI[$"{mod}.DI_PM_VAC_SW"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < VAC_SW_PRESSURE;
  815. // Throttle valve
  816. //var pos_sp = IO.AO[$"{mod}.AO_Throttle_Valve_Pressure_Setpoint"].Value;
  817. //var mock_pos_fb = _rd.Next(pos_sp - 2, pos_sp + 2);
  818. ////IO.AI[$"{mod}.AI_Throttle_Valve_Real_Pressure"].Value = (short)mock_pos_fb;
  819. //SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", mock_pos_fb);
  820. // 压力值
  821. //if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") < GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"))
  822. //{
  823. // short increase = (short)_rd.Next(20, 30);
  824. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") + increase);
  825. // if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") > GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"))
  826. // {
  827. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"));
  828. // }
  829. //}
  830. //else
  831. //{
  832. // short increase = (short)_rd.Next(20, 30);
  833. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") - increase);
  834. // if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") < GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"))
  835. // {
  836. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"));
  837. // }
  838. //}
  839. //// 位置值
  840. //if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") < GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"))
  841. //{
  842. // short increase = (short)_rd.Next(20, 30);
  843. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") + increase);
  844. // if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") > GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"))
  845. // {
  846. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"));
  847. // }
  848. //}
  849. //else
  850. //{
  851. // short increase = (short)_rd.Next(20, 30);
  852. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") - increase);
  853. // if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") < GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"))
  854. // {
  855. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"));
  856. // }
  857. //}
  858. }
  859. void MonitorPressure_Kepler(ModuleName mod)
  860. {
  861. string sAI_Foreline = "AI_Foreline_Pressure_10t";
  862. if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open)
  863. {
  864. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(500, 600));
  865. }
  866. else
  867. {
  868. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(500, 600));
  869. }
  870. // PLC 模拟量范围[0,4000], 电压[0, 10V], 压力[0, 760Torr]
  871. string sAI_ChamberPressure = "AI_Chamber_Pressure_10t";
  872. string sAI_ProcessPressure = "AI_Chamber_Pressure_Virtual";
  873. //float chamber_pressure = GetMockChamberPressure(mod);
  874. //float process_pressure = GetAiValue($"{mod}.AI_Chamber_Pressure_Virtual");
  875. // soft pump & fast pump
  876. DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"];
  877. DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"];
  878. DOAccessor turbo_pump_vlv = IO.DO[$"{mod}.DO_Turbo_Pump_Pumping_Valve"];
  879. if (fast_pump_vlv.Value || soft_pump_vlv.Value || turbo_pump_vlv.Value)
  880. {
  881. if (fast_pump_vlv.Value && soft_pump_vlv.Value)
  882. {
  883. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  884. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  885. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  886. {
  887. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - 30000);
  888. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  889. }
  890. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  891. {
  892. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  893. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1500);
  894. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1500);
  895. }
  896. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(15000, 16000));
  897. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(150, 160));
  898. }
  899. else if (fast_pump_vlv.Value)
  900. {
  901. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  902. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  903. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  904. {
  905. float targetPressure = getAiValue_ChamberPressure > 26000 ? GetAiValue($"{mod}.{sAI_ChamberPressure}") - 25000 : 20;
  906. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetPressure);
  907. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  908. }
  909. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  910. {
  911. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  912. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1300);
  913. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1300);
  914. }
  915. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(12000, 13000));
  916. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(120, 130));
  917. }
  918. else if (soft_pump_vlv.Value)
  919. {
  920. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  921. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  922. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  923. {
  924. float targetPressure = getAiValue_ChamberPressure > 23000 ? GetAiValue($"{mod}.{sAI_ChamberPressure}") - 22000 : 20;
  925. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetPressure);
  926. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  927. }
  928. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  929. {
  930. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  931. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1100);
  932. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1100);
  933. }
  934. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(13000, 14000));
  935. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(100, 110));
  936. }
  937. else if (turbo_pump_vlv.Value)
  938. {
  939. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  940. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  941. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  942. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  943. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  944. }
  945. }
  946. // fast vent & purge
  947. DOAccessor vent_vlv = IO.DO[$"{mod}.DO_N2_Valve"];
  948. if (vent_vlv.Value)
  949. {
  950. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  951. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  952. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  953. {
  954. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  955. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  956. }
  957. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  958. {
  959. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  960. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  961. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  962. }
  963. else
  964. {
  965. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  966. }
  967. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(25000, 30000));
  968. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(130, 150));
  969. }
  970. // Loadlock Pumping Valve
  971. // 压力值越界,复位
  972. float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  973. if (chamber_pressure1 > ATM_PRESSURE)
  974. {
  975. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  976. }
  977. else if (chamber_pressure1 < 20)
  978. {
  979. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 20);
  980. }
  981. float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  982. if (process_pressure1 > PROCESS_GAUGE)
  983. {
  984. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  985. }
  986. else if (process_pressure1 < 20)
  987. {
  988. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", 20);
  989. }
  990. float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}");
  991. if (foreline_pressure > 10000)
  992. {
  993. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 10000);
  994. }
  995. else if (foreline_pressure < 150)
  996. {
  997. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 150);
  998. }
  999. // ATM switch
  1000. IO.DI[$"{mod}.DI_ATM_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ATM_THRESHOLD;
  1001. // VAC switch
  1002. IO.DI[$"{mod}.DI_VAC_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < VAC_SW_PRESSURE;
  1003. }
  1004. void MonitorPressure_Kepler2200A(ModuleName mod)
  1005. {
  1006. string sAI_Foreline = "AI_Foreline_Pressure_10t";
  1007. if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open)
  1008. {
  1009. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(500, 600));
  1010. }
  1011. else
  1012. {
  1013. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(500, 600));
  1014. }
  1015. // PLC 模拟量范围[0,4000], 电压[0, 10V], 压力[0, 760Torr]
  1016. string sAI_ChamberPressure = "AI_Chamber_Pressure_10t";
  1017. string sAI_ProcessPressure = "AI_Chamber_Pressure_Virtual";
  1018. //float chamber_pressure = GetMockChamberPressure(mod);
  1019. //float process_pressure = GetAiValue($"{mod}.AI_Chamber_Pressure_Virtual");
  1020. // soft pump & fast pump
  1021. DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"];
  1022. DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"];
  1023. DOAccessor turbo_pump_vlv = IO.DO[$"{mod}.DO_Turbo_Pump_Pumping_Valve"];
  1024. if (fast_pump_vlv.Value || soft_pump_vlv.Value || turbo_pump_vlv.Value)
  1025. {
  1026. if (fast_pump_vlv.Value && soft_pump_vlv.Value)
  1027. {
  1028. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1029. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1030. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1031. {
  1032. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - 30000);
  1033. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1034. }
  1035. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1036. {
  1037. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1038. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1500);
  1039. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1500);
  1040. }
  1041. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(15000, 16000));
  1042. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(150, 160));
  1043. }
  1044. else if (fast_pump_vlv.Value)
  1045. {
  1046. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1047. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1048. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1049. {
  1050. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - 25000);
  1051. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1052. }
  1053. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1054. {
  1055. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1056. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1300);
  1057. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1300);
  1058. }
  1059. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(12000, 13000));
  1060. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(120, 130));
  1061. }
  1062. else if (soft_pump_vlv.Value)
  1063. {
  1064. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1065. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1066. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1067. {
  1068. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - 22000);
  1069. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1070. }
  1071. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1072. {
  1073. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1074. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1100);
  1075. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1100);
  1076. }
  1077. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(13000, 14000));
  1078. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(100, 110));
  1079. }
  1080. else if (turbo_pump_vlv.Value)
  1081. {
  1082. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1083. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1084. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1085. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1086. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1087. }
  1088. }
  1089. // fast vent & purge
  1090. DOAccessor vent_vlv = IO.DO[$"{mod}.DO_N2_Valve"];
  1091. if (vent_vlv.Value)
  1092. {
  1093. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1094. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1095. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1096. {
  1097. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1098. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1099. }
  1100. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1101. {
  1102. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1103. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1104. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1105. }
  1106. else
  1107. {
  1108. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1109. }
  1110. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(25000, 30000));
  1111. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(130, 150));
  1112. }
  1113. // Loadlock Pumping Valve
  1114. // 压力值越界,复位
  1115. float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1116. if (chamber_pressure1 > ATM_PRESSURE)
  1117. {
  1118. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  1119. }
  1120. else if (chamber_pressure1 < 20)
  1121. {
  1122. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 20);
  1123. }
  1124. float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1125. if (process_pressure1 > PROCESS_GAUGE)
  1126. {
  1127. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  1128. }
  1129. else if (process_pressure1 < 20)
  1130. {
  1131. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", 20);
  1132. }
  1133. float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}");
  1134. if (foreline_pressure > 10000)
  1135. {
  1136. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 10000);
  1137. }
  1138. else if (foreline_pressure < 150)
  1139. {
  1140. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 150);
  1141. }
  1142. // ATM switch
  1143. IO.DI[$"{mod}.DI_ATM_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ATM_THRESHOLD;
  1144. // VAC switch
  1145. IO.DI[$"{mod}.DI_VAC_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < VAC_SW_PRESSURE;
  1146. }
  1147. void MonitorMFPressure()
  1148. {
  1149. string LLA_AI_ChamberPressure = "AI_LLA_CHB_Pressure";
  1150. string LLB_AI_ChamberPressure = "AI_LLB_CHB_Pressure";
  1151. string TM_AI_ChamberPressure = "AI_TM_CHB_Pressure";
  1152. ModuleName mod = ModuleName.TM;
  1153. DOAccessor LLA_fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve_LLA"];
  1154. DOAccessor LLA_soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve_LLA"];
  1155. DOAccessor LLB_fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve_LLB"];
  1156. DOAccessor LLB_soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve_LLB"];
  1157. DOAccessor TM_fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve_TM"];
  1158. DOAccessor TM_soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve_TM"];
  1159. DOAccessor LLA_fast_Vent_vlv = IO.DO[$"{mod}.DO_Vent_Valve_LLA"];
  1160. DOAccessor LLA_soft_Vent_vlv = IO.DO[$"{mod}.DO_Purge_Valve_LLA"];
  1161. DOAccessor LLB_fast_Vent_vlv = IO.DO[$"{mod}.DO_Vent_Valve_LLB"];
  1162. DOAccessor LLB_soft_Vent_vlv = IO.DO[$"{mod}.DO_Purge_Valve_LLB"];
  1163. DOAccessor TM_fast_Vent_vlv = IO.DO[$"{mod}.DO_Vent_Valve_TM"];
  1164. DOAccessor TM_soft_Vent_vlv = IO.DO[$"{mod}.DO_Purge_Valve_TM"];
  1165. float getAiValue_LLA_ChamberPressure = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}");
  1166. float getAiValue_LLB_ChamberPressure = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}");
  1167. float getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  1168. if (LLA_fast_pump_vlv.Value || LLA_soft_pump_vlv.Value)
  1169. {
  1170. if ( getAiValue_LLA_ChamberPressure > 10000)
  1171. {
  1172. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") - 30000);
  1173. }
  1174. else if (getAiValue_LLA_ChamberPressure <= 10000)
  1175. {
  1176. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") - 1500);
  1177. }
  1178. }
  1179. if (LLB_fast_pump_vlv.Value || LLB_soft_pump_vlv.Value)
  1180. {
  1181. if (getAiValue_LLB_ChamberPressure > 10000)
  1182. {
  1183. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") - 30000);
  1184. }
  1185. else if (getAiValue_LLB_ChamberPressure <= 10000)
  1186. {
  1187. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") - 1500);
  1188. }
  1189. }
  1190. if (TM_fast_pump_vlv.Value || TM_soft_pump_vlv.Value)
  1191. {
  1192. if (getAiValue_TM_ChamberPressure > 10000)
  1193. {
  1194. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 30000);
  1195. }
  1196. else if (getAiValue_TM_ChamberPressure <= 10000)
  1197. {
  1198. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 1500);
  1199. }
  1200. }
  1201. if (LLA_fast_Vent_vlv.Value || LLA_soft_Vent_vlv.Value)
  1202. {
  1203. if (getAiValue_LLA_ChamberPressure > 10000)
  1204. {
  1205. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") + 30000);
  1206. }
  1207. else if (getAiValue_LLA_ChamberPressure <= 10000)
  1208. {
  1209. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") + 1500);
  1210. }
  1211. }
  1212. if (LLB_fast_Vent_vlv.Value || LLB_soft_Vent_vlv.Value)
  1213. {
  1214. if (getAiValue_LLB_ChamberPressure > 10000)
  1215. {
  1216. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") + 30000);
  1217. }
  1218. else if (getAiValue_LLB_ChamberPressure <= 10000)
  1219. {
  1220. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") + 1500);
  1221. }
  1222. }
  1223. if (TM_fast_Vent_vlv.Value || TM_soft_Vent_vlv.Value)
  1224. {
  1225. if (getAiValue_TM_ChamberPressure > 10000)
  1226. {
  1227. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 30000);
  1228. }
  1229. else if (getAiValue_TM_ChamberPressure <= 10000)
  1230. {
  1231. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 1500);
  1232. }
  1233. }
  1234. getAiValue_LLA_ChamberPressure = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}");
  1235. if (getAiValue_LLA_ChamberPressure > ATM_PRESSURE)
  1236. {
  1237. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", ATM_PRESSURE);
  1238. }
  1239. else if (getAiValue_LLA_ChamberPressure < 20)
  1240. {
  1241. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", 20);
  1242. }
  1243. getAiValue_LLB_ChamberPressure = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}");
  1244. if (getAiValue_LLB_ChamberPressure > ATM_PRESSURE)
  1245. {
  1246. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", ATM_PRESSURE);
  1247. }
  1248. else if (getAiValue_LLB_ChamberPressure < 20)
  1249. {
  1250. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", 20);
  1251. }
  1252. getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  1253. if (getAiValue_TM_ChamberPressure > ATM_PRESSURE)
  1254. {
  1255. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", ATM_PRESSURE);
  1256. }
  1257. else if (getAiValue_TM_ChamberPressure < 20)
  1258. {
  1259. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", 20);
  1260. }
  1261. // ATM switch
  1262. IO.DI[$"{mod}.DI_TM_ATM_Switch"].Value = GetAiValue($"{mod}.{TM_AI_ChamberPressure}") > ATM_THRESHOLD;
  1263. // VAC switch
  1264. IO.DI[$"{mod}.DI_TM_VAC_Switch"].Value = GetAiValue($"{mod}.{TM_AI_ChamberPressure}") < VAC_SW_PRESSURE;
  1265. // ATM switch
  1266. IO.DI[$"{mod}.DI_LLA_ATM_Switch"].Value = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") > ATM_THRESHOLD;
  1267. // VAC switch
  1268. IO.DI[$"{mod}.DI_LLA_VAC_Switch"].Value = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") < VAC_SW_PRESSURE;
  1269. // ATM switch
  1270. IO.DI[$"{mod}.DI_LLB_ATM_Switch"].Value = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") > ATM_THRESHOLD;
  1271. // VAC switch
  1272. IO.DI[$"{mod}.DI_LLB_VAC_Switch"].Value = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") < VAC_SW_PRESSURE;
  1273. }
  1274. void SetAiValue(string name, float value)
  1275. {
  1276. byte[] flow = BitConverter.GetBytes(value);
  1277. short high1 = BitConverter.ToInt16(flow, 0);
  1278. short low1 = BitConverter.ToInt16(flow, 2);
  1279. IO.AI[name].Buffer[IO.AI[name].Index] = BitConverter.ToInt16(flow, 0);
  1280. IO.AI[name].Buffer[IO.AI[name].Index + 1] = BitConverter.ToInt16(flow, 2);
  1281. byte[] high = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index]);
  1282. byte[] low = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index + 1]);
  1283. float readback = BitConverter.ToSingle(new[] { high[0], high[1], low[0], low[1] }, 0);
  1284. }
  1285. float GetAiValue(string name)
  1286. {
  1287. byte[] high = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index]);
  1288. byte[] low = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index + 1]);
  1289. float flow = BitConverter.ToSingle(new[] { high[0], high[1], low[0], low[1] }, 0);
  1290. return flow;
  1291. }
  1292. float GetAoValue(string name)
  1293. {
  1294. byte[] high = BitConverter.GetBytes(IO.AO[name].Buffer[IO.AO[name].Index]);
  1295. byte[] low = BitConverter.GetBytes(IO.AO[name].Buffer[IO.AO[name].Index + 1]);
  1296. float flow = BitConverter.ToSingle(new[] { high[0], high[1], low[0], low[1] }, 0);
  1297. return flow;
  1298. }
  1299. void MonitorTemperature(ModuleName mod)
  1300. {
  1301. //IO.DI[$"{mod}.DI_Substrate_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_Substrate_Heater_On"].Value;
  1302. IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_Forline_Heater_On"].Value;
  1303. IO.DI[$"{mod}.DI_CHB_Wall_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_CHB_Wall_Heater_On"].Value;
  1304. IO.DI[$"{mod}.DI_Foreline_TC_Deviation_out_of_range"].Value = false;
  1305. IO.DI[$"{mod}.DI_Substrate_TC_Deviation_out_of_range"].Value = false;
  1306. // 底座
  1307. //if (IO.DO[$"{mod}.DO_Substrate_Heater_On"].Value &&
  1308. // GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") < GetAoValue($"{mod}.AO_Substrate_Temperature_Setpoint"))
  1309. //{
  1310. // SetAiValue($"{mod}.AI_Substrate_Control_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") + _rd.Next(1, 2));
  1311. // SetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp") + _rd.Next(1, 2));
  1312. //}
  1313. //else if (IO.DO[$"{mod}.DO_Substrate_Heater_On"].Value &&
  1314. // GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") > GetAoValue($"{mod}.AO_Substrate_Temperature_Setpoint"))
  1315. //{
  1316. // SetAiValue($"{mod}.AI_Substrate_Control_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") - _rd.Next(1, 2));
  1317. // SetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp") - _rd.Next(1, 2));
  1318. //}
  1319. // Foreline
  1320. if (IO.DO[$"{mod}.DO_Forline_Heater_On"].Value &&
  1321. GetAiValue($"{mod}.AI_Fline_Control_TC_Temp") < GetAoValue($"{mod}.AO_Foreline_Temperature_Setpoint"))
  1322. {
  1323. SetAiValue($"{mod}.AI_Fline_Control_TC_Temp", GetAiValue($"{mod}.AI_Fline_Control_TC_Temp") + _rd.Next(1, 2));
  1324. SetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp") + _rd.Next(1, 2));
  1325. }
  1326. else if (IO.DO[$"{mod}.DO_Forline_Heater_On"].Value &&
  1327. GetAiValue($"{mod}.AI_Fline_Control_TC_Temp") > GetAoValue($"{mod}.AO_Foreline_Temperature_Setpoint"))
  1328. {
  1329. SetAiValue($"{mod}.AI_Fline_Control_TC_Temp", GetAiValue($"{mod}.AI_Fline_Control_TC_Temp") - _rd.Next(1, 2));
  1330. SetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp") - _rd.Next(1, 2));
  1331. }
  1332. // Wall
  1333. if (IO.DO[$"{mod}.DO_CHB_Wall_Heater_On"].Value &&
  1334. GetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp") < GetAoValue($"{mod}.AO_CHB_Wall_Temperature_Setpoint"))
  1335. {
  1336. SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp") + _rd.Next(1, 2));
  1337. SetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp") + _rd.Next(1, 2));
  1338. }
  1339. else if (IO.DO[$"{mod}.DO_CHB_Wall_Heater_On"].Value &&
  1340. GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") > GetAoValue($"{mod}.AO_CHB_Wall_Temperature_Setpoint"))
  1341. {
  1342. SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp") - _rd.Next(1, 2));
  1343. SetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp") - _rd.Next(1, 2));
  1344. }
  1345. }
  1346. void MonitorGas(ModuleName mod)
  1347. {
  1348. // gas
  1349. this.SimulateMFC(mod, 1);
  1350. this.SimulateMFC(mod, 2);
  1351. this.SimulateMFC(mod, 3);
  1352. this.SimulateMFC(mod, 4);
  1353. this.SimulateMFC(mod, 5);
  1354. this.SimulateMFC(mod, 6);
  1355. this.SimulateMFC(mod, 7);
  1356. this.SimulateMFC(mod, 8);
  1357. this.SimulateN2(mod);
  1358. }
  1359. private void SimulateMFC(ModuleName mod, byte gasNum)
  1360. {
  1361. var sp = GetAoValue($"{mod}.AO_MFC{gasNum}_Flow_Setpoint");
  1362. var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  1363. SetAiValue($"{mod}.AI_MFC{gasNum}_Flow", (float)mock_fb);
  1364. }
  1365. private void SimulateN2(ModuleName mod)
  1366. {
  1367. var sp = GetAoValue($"{mod}.AO_Turbo_Pump_N2_Flow_Setpoint");
  1368. var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  1369. SetAiValue($"{mod}.AI_Turbo_Pump_N2_Flow", (float)mock_fb);
  1370. }
  1371. private void SimulateHe(ModuleName mod)
  1372. {
  1373. var sp = GetAoValue($"{mod}.AO_He_Flow_Setpoint");
  1374. var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  1375. SetAiValue($"{mod}.AI_ESC_He_Flow", (float)mock_fb);
  1376. }
  1377. void MonitorRF(ModuleName mod)
  1378. {
  1379. // RF generator
  1380. var sp = GetAoValue($"{mod}.AO_Generator_Power_Setpoint");
  1381. var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  1382. //var mock_sp = _rd.Next(sp - 3, sp + 3);
  1383. SetAiValue($"{mod}.AI_Generator_Forward_Power", (float)mock_fb);
  1384. //IO.DI[$"{mod}.DI_Generator_Power_Status"].Value = IO.DO[$"{mod}.DO_Generator_Power_ON"].Value;
  1385. }
  1386. void MonitorIOPumpCtrl(ModuleName mod)
  1387. {
  1388. if (IO.DO[$"{mod}.DO_Pump_Run"].Value) IO.DI[$"{mod}.DI_Dry_Pump_Running"].Value = true;
  1389. if (IO.DO[$"{mod}.DO_Pump_Stop"].Value) IO.DI[$"{mod}.DI_Dry_Pump_Running"].Value = false;
  1390. }
  1391. void MonitorIOHighTemperatureHeater(ModuleName mod)
  1392. {
  1393. if (IO.DO[$"{mod}.DO_Lift_Servo_Go_Position1"].Value)
  1394. {
  1395. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = true;
  1396. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = false;
  1397. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = false;
  1398. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = false;
  1399. }
  1400. if (IO.DO[$"{mod}.DO_Lift_Servo_Go_Position2"].Value)
  1401. {
  1402. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = false;
  1403. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = true;
  1404. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = false;
  1405. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = false;
  1406. }
  1407. if (IO.DO[$"{mod}.DO_Lift_Servo_Go_Position3"].Value)
  1408. {
  1409. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = false;
  1410. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = false;
  1411. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = true;
  1412. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = false;
  1413. }
  1414. if (IO.DO[$"{mod}.DO_Lift_Servo_Origin"].Value)
  1415. {
  1416. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = false;
  1417. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = false;
  1418. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = false;
  1419. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = true;
  1420. }
  1421. IO.DI[$"{mod}.DI_CHB_H-HT_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_CHB_H-HT_Heater_On"].Value;
  1422. var sp = GetAoValue($"{mod}.AO_CHB_H-HT_Temperature_Setpoint");
  1423. var mock_fb = _rd.Next((int)sp - 1, (int)sp + 1) + _rd.NextDouble();
  1424. //var mock_sp = _rd.Next(sp - 3, sp + 3);
  1425. SetAiValue($"{mod}.AI_CHB_H-HT_Control_TC_Temp", (float)mock_fb);
  1426. }
  1427. public void Terminate()
  1428. {
  1429. _thread.Stop();
  1430. }
  1431. public void SetCoolantOutletTemp(string module, int Temp)
  1432. {
  1433. //if (SimulatorJetChamber.CurrentChamber == JetChamber.Venus)
  1434. //{
  1435. //SetAiValue($"{module}.AI_Coolant_Outlet_Temp", Temp);
  1436. //}
  1437. }
  1438. }
  1439. }