OverVenusViewModel.cs 64 KB

1234567891011121314151617181920212223242526272829303132333435363738394041424344454647484950515253545556575859606162636465666768697071727374757677787980818283848586878889909192939495969798991001011021031041051061071081091101111121131141151161171181191201211221231241251261271281291301311321331341351361371381391401411421431441451461471481491501511521531541551561571581591601611621631641651661671681691701711721731741751761771781791801811821831841851861871881891901911921931941951961971981992002012022032042052062072082092102112122132142152162172182192202212222232242252262272282292302312322332342352362372382392402412422432442452462472482492502512522532542552562572582592602612622632642652662672682692702712722732742752762772782792802812822832842852862872882892902912922932942952962972982993003013023033043053063073083093103113123133143153163173183193203213223233243253263273283293303313323333343353363373383393403413423433443453463473483493503513523533543553563573583593603613623633643653663673683693703713723733743753763773783793803813823833843853863873883893903913923933943953963973983994004014024034044054064074084094104114124134144154164174184194204214224234244254264274284294304314324334344354364374384394404414424434444454464474484494504514524534544554564574584594604614624634644654664674684694704714724734744754764774784794804814824834844854864874884894904914924934944954964974984995005015025035045055065075085095105115125135145155165175185195205215225235245255265275285295305315325335345355365375385395405415425435445455465475485495505515525535545555565575585595605615625635645655665675685695705715725735745755765775785795805815825835845855865875885895905915925935945955965975985996006016026036046056066076086096106116126136146156166176186196206216226236246256266276286296306316326336346356366376386396406416426436446456466476486496506516526536546556566576586596606616626636646656666676686696706716726736746756766776786796806816826836846856866876886896906916926936946956966976986997007017027037047057067077087097107117127137147157167177187197207217227237247257267277287297307317327337347357367377387397407417427437447457467477487497507517527537547557567577587597607617627637647657667677687697707717727737747757767777787797807817827837847857867877887897907917927937947957967977987998008018028038048058068078088098108118128138148158168178188198208218228238248258268278288298308318328338348358368378388398408418428438448458468478488498508518528538548558568578588598608618628638648658668678688698708718728738748758768778788798808818828838848858868878888898908918928938948958968978988999009019029039049059069079089099109119129139149159169179189199209219229239249259269279289299309319329339349359369379389399409419429439449459469479489499509519529539549559569579589599609619629639649659669679689699709719729739749759769779789799809819829839849859869879889899909919929939949959969979989991000100110021003100410051006100710081009101010111012101310141015101610171018101910201021102210231024102510261027102810291030103110321033103410351036103710381039104010411042104310441045104610471048104910501051105210531054105510561057105810591060106110621063106410651066106710681069107010711072107310741075107610771078107910801081108210831084108510861087108810891090109110921093109410951096109710981099110011011102110311041105110611071108110911101111111211131114111511161117111811191120112111221123112411251126112711281129113011311132113311341135113611371138113911401141114211431144114511461147114811491150115111521153115411551156115711581159116011611162116311641165116611671168116911701171117211731174117511761177117811791180118111821183118411851186118711881189119011911192119311941195119611971198119912001201120212031204120512061207120812091210121112121213121412151216121712181219122012211222122312241225122612271228122912301231123212331234123512361237123812391240124112421243124412451246124712481249125012511252125312541255125612571258125912601261126212631264126512661267126812691270127112721273127412751276127712781279128012811282128312841285128612871288128912901291129212931294129512961297129812991300130113021303130413051306130713081309131013111312131313141315131613171318131913201321132213231324132513261327132813291330133113321333133413351336133713381339134013411342134313441345134613471348134913501351135213531354135513561357135813591360136113621363136413651366136713681369137013711372137313741375137613771378137913801381138213831384138513861387138813891390139113921393139413951396139713981399140014011402140314041405140614071408140914101411141214131414141514161417141814191420142114221423142414251426142714281429143014311432143314341435143614371438143914401441144214431444144514461447144814491450145114521453145414551456145714581459146014611462146314641465146614671468146914701471147214731474147514761477147814791480148114821483148414851486148714881489149014911492149314941495149614971498149915001501150215031504150515061507150815091510151115121513151415151516151715181519152015211522152315241525152615271528152915301531153215331534153515361537153815391540154115421543154415451546154715481549155015511552155315541555155615571558155915601561156215631564156515661567156815691570157115721573157415751576157715781579158015811582158315841585158615871588158915901591159215931594159515961597159815991600160116021603160416051606160716081609161016111612161316141615161616171618161916201621162216231624162516261627162816291630163116321633163416351636163716381639164016411642164316441645164616471648164916501651165216531654165516561657165816591660166116621663166416651666166716681669167016711672167316741675167616771678167916801681168216831684168516861687168816891690169116921693169416951696169716981699170017011702170317041705170617071708170917101711171217131714171517161717171817191720172117221723172417251726172717281729
  1. using Aitex.Core.Common.DeviceData;
  2. using MECF.Framework.Common.DataCenter;
  3. using MECF.Framework.Common.OperationCenter;
  4. using Prism.Commands;
  5. using Prism.Mvvm;
  6. using System;
  7. using System.Collections.Generic;
  8. using System.Windows;
  9. using System.Windows.Threading;
  10. using Venus_Core;
  11. using Venus_MainPages.Views;
  12. using System.Linq;
  13. using System.Threading.Tasks;
  14. using Microsoft.Win32;
  15. using System.IO;
  16. using Venus_Themes.CustomControls;
  17. using Venus_MainPages.Unity;
  18. using Venus_Unity;
  19. using MECF.Framework.Common.CommonData.DeviceData;
  20. using System.Windows.Shapes;
  21. using Path = System.IO.Path;
  22. using Aitex.Core.RT.Log;
  23. using MECF.Framework.Common.Equipment;
  24. namespace Venus_MainPages.ViewModels
  25. {
  26. internal class OverVenusViewModel : BindableBase
  27. {
  28. #region 私有字段
  29. private List<string> m_CurrentModuleRecipes=new List<string>();
  30. private bool m_PVN21ValveIsOpen;
  31. private bool m_PVN22ValveIsOpen;
  32. private bool m_N2ValveIsOpen;
  33. private bool m_PV11ValveIsOpen;
  34. private bool m_PV12ValveIsOpen;
  35. private bool m_PV21ValveIsOpen;
  36. private bool m_PV22ValveIsOpen;
  37. private bool m_PV31ValveIsOpen;
  38. private bool m_PV32ValveIsOpen;
  39. private bool m_PV41ValveIsOpen;
  40. private bool m_PV42ValveIsOpen;
  41. private bool m_MFC1ValveIsOpen;
  42. private bool m_MFC2ValveIsOpen;
  43. private bool m_MFC3ValveIsOpen;
  44. private bool m_MFC4ValveIsOpen;
  45. private bool m_MFC5ValveIsOpen;
  46. private bool m_MFC6ValveIsOpen;
  47. private bool m_MFC7ValveIsOpen;
  48. private bool m_MFC8ValveIsOpen;
  49. private bool m_GasFinalValveIsOpen;
  50. private bool m_SoftPumpValveIsOpen;
  51. private bool m_FastPumpValveIsOpen;
  52. private bool m_PVHe1ValveIsOpen;
  53. private bool m_PVHe2ValveIsOpen;
  54. private bool m_PVHe3ValveIsOpen;
  55. private bool m_HeISOValveIsOpen;
  56. private bool m_TurboPumpPumpingValveIsOpen;
  57. private bool m_TurboPumpPurgeValveIsOpen;
  58. private bool m_GuageValveIsOpen;
  59. private bool m_PendulumValveIsOpen;
  60. //private bool m_BRFIsOn;
  61. //private bool m_SRFIsOn;
  62. private double m_HeGasSetpoint;
  63. private int m_HePressureSetpoint;
  64. private float m_SRFFwdPowerSetpoint;
  65. private float m_BRFFwdPowerSetpoint;
  66. private float m_SRFMatchC1;
  67. private float m_SRFMatchC2;
  68. private float m_BRFMatchC1;
  69. private float m_BRFMatchC2;
  70. private double m_MFC1SetPoint;
  71. private double m_MFC2SetPoint;
  72. private double m_MFC3SetPoint;
  73. private double m_MFC4SetPoint;
  74. private double m_MFC5SetPoint;
  75. private double m_MFC6SetPoint;
  76. private double m_MFC7SetPoint;
  77. private double m_MFC8SetPoint;
  78. private double m_N2SetPoint;
  79. private double m_TurboN2FlowSetPoint;
  80. private AITMfcData m_MFC1Data;
  81. private AITMfcData m_MFC2Data;
  82. private AITMfcData m_MFC3Data;
  83. private AITMfcData m_MFC4Data;
  84. private AITMfcData m_MFC5Data;
  85. private AITMfcData m_MFC6Data;
  86. private AITMfcData m_MFC7Data;
  87. private AITMfcData m_MFC8Data;
  88. private AITMfcData m_MFCHeData;
  89. private AITMfcData m_MFCN2Data;
  90. private AITHeaterData m_ValveHeaterData;
  91. private AITHeaterData m_ForelineHeaterData;
  92. private AITHeaterData m_WallHeaterData;
  93. private AITRfData m_SRFData;
  94. private AITRfData m_BRFData;
  95. private AITPendulumValveData m_PendulumValveData;
  96. private AITHVData m_ESCHVData;
  97. private PMState m_PMCurrentState;
  98. private bool m_SourceRFFanInterlock;
  99. private bool m_IsWLK;
  100. private bool m_IsWaterFlowOk;
  101. private bool m_IsTurboPumpInterlock;
  102. private bool m_IsCDAOK;
  103. private bool m_SensorGasBoxDoor;
  104. private bool m_SensorGasBoxPressure;
  105. private bool m_PumpIsOpen;
  106. private bool m_TurboIsOpen;
  107. private bool m_IsATM;
  108. private bool m_IsVAC;
  109. private List<string> m_RtDataKeys;
  110. private Dictionary<string, object> m_RtDataValues;
  111. private int m_PositionValue;
  112. private bool m_IsPositionMode;
  113. private int m_ESCVoltage;
  114. private bool m_GasIsFlowing;
  115. private bool m_IsProcessing;
  116. private bool m_IsAutoMode;
  117. private string m_SelectedRecipe;
  118. private float m_ChillerTempSetpoint;
  119. private float m_WallTempSetpoint;
  120. private bool m_HeIsPressureMode=true;
  121. private bool m_ChillerIsOn;
  122. private float m_ProcessHighPressure;
  123. private float m_ProcessLowPressure;
  124. private float m_ForelinePressurePressure;
  125. private float m_ESCHePressure;
  126. ButterflyValveView butterflyValveMessageBox;
  127. HeaterView heaterView;
  128. private int m_TurboPumpRotationalSpeed;
  129. private bool m_LiftPinIsUp;
  130. private bool m_IsSlitDoorClosed;
  131. private bool m_IsLidClosed;
  132. private float m_ChillerTemperature;
  133. private float m_HVTemperature;
  134. private int m_ESCHVOutputVoltage;
  135. //private float m_SRfReflectPower;
  136. //private float m_SRfForwardPowerFeedBack;
  137. //private float m_BRfReflectPower;
  138. //private float m_BRfForwardPowerFeedBack;
  139. //private int m_MatchWorkMode;
  140. //private int m_BiasMatchWorkMode;
  141. private float m_MatchC1;
  142. private float m_MatchC2;
  143. private float m_BiasMatchC1;
  144. private float m_BiasMatchC2;
  145. private float m_PendulumValvePosition;
  146. private bool m_IsTurboPumpAtSpeed;
  147. private bool m_TurboPumpWaterFlowSwitch;
  148. private bool m_IsHasWafer;
  149. private Recipe m_CurrentRecipe=new Recipe ();
  150. private RecipeResult m_CurrentRecipeResult=new RecipeResult ();
  151. private RecipeStep m_CurrentRecipeStep = new RecipeStep();
  152. private double m_ChamberPressureFeedBack;
  153. private string m_WaferID;
  154. private string m_ModuleName;
  155. #endregion
  156. #region 属性
  157. public List<string> CurrentModuleRecipes
  158. {
  159. get { return m_CurrentModuleRecipes; }
  160. set { SetProperty(ref m_CurrentModuleRecipes, value); }
  161. }
  162. public Recipe CurrentRecipe
  163. {
  164. get { return m_CurrentRecipe; }
  165. set { SetProperty(ref m_CurrentRecipe, value); }
  166. }
  167. public RecipeResult CurrentRecipeResult
  168. {
  169. get { return m_CurrentRecipeResult; }
  170. set { SetProperty(ref m_CurrentRecipeResult, value); }
  171. }
  172. public RecipeStep CurrentRecipeStep
  173. {
  174. get { return m_CurrentRecipeStep; }
  175. set { SetProperty(ref m_CurrentRecipeStep, value); }
  176. }
  177. public bool IsHasWafer
  178. {
  179. get { return m_IsHasWafer; }
  180. set { SetProperty(ref m_IsHasWafer, value); }
  181. }
  182. public bool IsTurboPumpAtSpeed
  183. {
  184. get { return m_IsTurboPumpAtSpeed; }
  185. set { SetProperty(ref m_IsTurboPumpAtSpeed, value); }
  186. }
  187. public bool TurboPumpWaterFlowSwitch
  188. {
  189. get { return m_TurboPumpWaterFlowSwitch; }
  190. set { SetProperty(ref m_TurboPumpWaterFlowSwitch, value); }
  191. }
  192. public float PendulumValvePosition
  193. {
  194. get { return m_PendulumValvePosition; }
  195. set{SetProperty(ref m_PendulumValvePosition, value);}
  196. }
  197. public float BiasMatchC1
  198. {
  199. get { return m_BiasMatchC1; }
  200. set
  201. {
  202. SetProperty(ref m_BiasMatchC1, value);
  203. }
  204. }
  205. public float BiasMatchC2
  206. {
  207. get { return m_BiasMatchC2; }
  208. set
  209. {
  210. SetProperty(ref m_BiasMatchC2, value);
  211. }
  212. }
  213. public float MatchC1
  214. {
  215. get { return m_MatchC1; }
  216. set
  217. {
  218. SetProperty(ref m_MatchC1, value);
  219. }
  220. }
  221. public float MatchC2
  222. {
  223. get { return m_MatchC2; }
  224. set
  225. {
  226. SetProperty(ref m_MatchC2, value);
  227. }
  228. }
  229. public AITPendulumValveData PendulumValveData
  230. {
  231. get { return m_PendulumValveData; }
  232. set
  233. {
  234. SetProperty(ref m_PendulumValveData, value);
  235. }
  236. }
  237. public AITHVData ESCHVData
  238. {
  239. get { return m_ESCHVData; }
  240. set
  241. {
  242. SetProperty(ref m_ESCHVData, value);
  243. }
  244. }
  245. public int ESCHVOutputVoltage
  246. {
  247. get { return m_ESCHVOutputVoltage; }
  248. set
  249. {
  250. SetProperty(ref m_ESCHVOutputVoltage, value);
  251. }
  252. }
  253. public float ChillerTemperature
  254. {
  255. get { return m_ChillerTemperature; }
  256. set
  257. {
  258. SetProperty(ref m_ChillerTemperature, value);
  259. }
  260. }
  261. public float HVTemperature
  262. {
  263. get { return m_HVTemperature; }
  264. set
  265. {
  266. SetProperty(ref m_HVTemperature, value);
  267. }
  268. }
  269. public bool IsLidClosed
  270. {
  271. get { return m_IsLidClosed; }
  272. set
  273. {
  274. SetProperty(ref m_IsLidClosed, value);
  275. }
  276. }
  277. public bool IsSlitDoorClosed
  278. {
  279. get { return m_IsSlitDoorClosed; }
  280. set
  281. {
  282. SetProperty(ref m_IsSlitDoorClosed, value);
  283. }
  284. }
  285. public bool LiftPinIsUp
  286. {
  287. get { return m_LiftPinIsUp; }
  288. set
  289. {
  290. SetProperty(ref m_LiftPinIsUp, value);
  291. }
  292. }
  293. public int TurboPumpRotationalSpeed
  294. {
  295. get { return m_TurboPumpRotationalSpeed; }
  296. set
  297. {
  298. SetProperty(ref m_TurboPumpRotationalSpeed, value);
  299. }
  300. }
  301. public float ESCHePressure
  302. {
  303. get { return m_ESCHePressure; }
  304. set
  305. {
  306. SetProperty(ref m_ESCHePressure, value);
  307. }
  308. }
  309. public float ProcessHighPressure
  310. {
  311. get { return m_ProcessHighPressure; }
  312. set
  313. {
  314. SetProperty(ref m_ProcessHighPressure, value);
  315. }
  316. }
  317. public float ProcessLowPressure
  318. {
  319. get { return m_ProcessLowPressure; }
  320. set
  321. {
  322. SetProperty(ref m_ProcessLowPressure, value);
  323. }
  324. }
  325. public float ForelinePressure
  326. {
  327. get { return m_ForelinePressurePressure; }
  328. set
  329. {
  330. SetProperty(ref m_ForelinePressurePressure, value);
  331. }
  332. }
  333. public bool SourceRFFanInterlock
  334. {
  335. get { return m_SourceRFFanInterlock; }
  336. set
  337. {
  338. SetProperty(ref m_SourceRFFanInterlock, value);
  339. }
  340. }
  341. public bool IsWLK
  342. {
  343. get { return m_IsWLK; }
  344. set
  345. {
  346. SetProperty(ref m_IsWLK, value);
  347. }
  348. }
  349. public bool IsWaterFlowOk
  350. {
  351. get { return m_IsWaterFlowOk; }
  352. set
  353. {
  354. SetProperty(ref m_IsWaterFlowOk, value);
  355. }
  356. }
  357. public bool IsCDAOK
  358. {
  359. get { return m_IsCDAOK; }
  360. set
  361. {
  362. SetProperty(ref m_IsCDAOK, value);
  363. }
  364. }
  365. public bool SensorGasBoxDoor
  366. {
  367. get { return m_SensorGasBoxDoor; }
  368. set
  369. {
  370. SetProperty(ref m_SensorGasBoxDoor, value);
  371. }
  372. }
  373. public bool SensorGasBoxPressure
  374. {
  375. get { return m_SensorGasBoxPressure; }
  376. set
  377. {
  378. SetProperty(ref m_SensorGasBoxPressure, value);
  379. }
  380. }
  381. public bool IsTurboPumpInterlock
  382. {
  383. get { return m_IsTurboPumpInterlock; }
  384. set
  385. {
  386. SetProperty(ref m_IsTurboPumpInterlock, value);
  387. }
  388. }
  389. public string ModuleName
  390. {
  391. get { return m_ModuleName; }
  392. set
  393. {
  394. SetProperty(ref m_ModuleName, value);
  395. }
  396. }
  397. public double MFC1SetPoint
  398. {
  399. get { return m_MFC1SetPoint; }
  400. set { SetProperty(ref m_MFC1SetPoint, value); }
  401. }
  402. public double MFC2SetPoint
  403. {
  404. get { return m_MFC2SetPoint; }
  405. set { SetProperty(ref m_MFC2SetPoint, value); }
  406. }
  407. public double MFC3SetPoint
  408. {
  409. get { return m_MFC3SetPoint; }
  410. set { SetProperty(ref m_MFC3SetPoint, value); }
  411. }
  412. public double MFC4SetPoint
  413. {
  414. get { return m_MFC4SetPoint; }
  415. set { SetProperty(ref m_MFC4SetPoint, value); }
  416. }
  417. public double MFC5SetPoint
  418. {
  419. get { return m_MFC5SetPoint; }
  420. set { SetProperty(ref m_MFC5SetPoint, value); }
  421. }
  422. public double MFC6SetPoint
  423. {
  424. get { return m_MFC6SetPoint; }
  425. set { SetProperty(ref m_MFC6SetPoint, value); }
  426. }
  427. public double MFC7SetPoint
  428. {
  429. get { return m_MFC7SetPoint; }
  430. set { SetProperty(ref m_MFC7SetPoint, value); }
  431. }
  432. public double MFC8SetPoint
  433. {
  434. get { return m_MFC8SetPoint; }
  435. set { SetProperty(ref m_MFC8SetPoint, value); }
  436. }
  437. public double N2SetPoint
  438. {
  439. get { return m_N2SetPoint; }
  440. set { SetProperty(ref m_N2SetPoint, value); }
  441. }
  442. public double TurboN2FlowSetPoint
  443. {
  444. get { return m_TurboN2FlowSetPoint; }
  445. set
  446. {
  447. if (value != m_TurboN2FlowSetPoint)
  448. {
  449. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", value);
  450. }
  451. SetProperty(ref m_TurboN2FlowSetPoint, value);
  452. }
  453. }
  454. public AITMfcData MFC1Data
  455. {
  456. get { return m_MFC1Data; }
  457. set { SetProperty(ref m_MFC1Data, value); }
  458. }
  459. public AITMfcData MFC2Data
  460. {
  461. get { return m_MFC2Data; }
  462. set { SetProperty(ref m_MFC2Data, value); }
  463. }
  464. public AITMfcData MFC3Data
  465. {
  466. get { return m_MFC3Data; }
  467. set { SetProperty(ref m_MFC3Data, value); }
  468. }
  469. public AITMfcData MFC4Data
  470. {
  471. get { return m_MFC4Data; }
  472. set { SetProperty(ref m_MFC4Data, value); }
  473. }
  474. public AITMfcData MFC5Data
  475. {
  476. get { return m_MFC5Data; }
  477. set { SetProperty(ref m_MFC5Data, value); }
  478. }
  479. public AITMfcData MFC6Data
  480. {
  481. get { return m_MFC6Data; }
  482. set { SetProperty(ref m_MFC6Data, value); }
  483. }
  484. public AITMfcData MFC7Data
  485. {
  486. get { return m_MFC7Data; }
  487. set { SetProperty(ref m_MFC7Data, value); }
  488. }
  489. public AITMfcData MFC8Data
  490. {
  491. get { return m_MFC8Data; }
  492. set { SetProperty(ref m_MFC8Data, value); }
  493. }
  494. public AITMfcData MFCHeData
  495. {
  496. get { return m_MFCHeData; }
  497. set { SetProperty(ref m_MFCHeData, value); }
  498. }
  499. public AITMfcData MFCN2Data
  500. {
  501. get { return m_MFCN2Data; }
  502. set { SetProperty(ref m_MFCN2Data, value); }
  503. }
  504. public AITHeaterData ValveHeaterData
  505. {
  506. get { return m_ValveHeaterData; }
  507. set { SetProperty(ref m_ValveHeaterData, value); }
  508. }
  509. public AITHeaterData ForelineHeaterData
  510. {
  511. get { return m_ForelineHeaterData; }
  512. set { SetProperty(ref m_ForelineHeaterData, value); }
  513. }
  514. public AITHeaterData WallHeaterData
  515. {
  516. get { return m_WallHeaterData; }
  517. set { SetProperty(ref m_WallHeaterData, value); }
  518. }
  519. public AITRfData SRFData
  520. {
  521. get { return m_SRFData; }
  522. set { SetProperty(ref m_SRFData, value); }
  523. }
  524. public AITRfData BRFData
  525. {
  526. get { return m_BRFData; }
  527. set { SetProperty(ref m_BRFData, value); }
  528. }
  529. public PMState PMCurrentState
  530. {
  531. get { return m_PMCurrentState; }
  532. set { SetProperty(ref m_PMCurrentState, value); }
  533. }
  534. #region 阀
  535. public bool GasFinalValveIsOpen
  536. {
  537. get { return m_GasFinalValveIsOpen; }
  538. set { SetProperty(ref m_GasFinalValveIsOpen, value); }
  539. }
  540. public bool PVN21ValveIsOpen
  541. {
  542. get { return m_PVN21ValveIsOpen; }
  543. set { SetProperty(ref m_PVN21ValveIsOpen, value); }
  544. }
  545. public bool PVN22ValveIsOpen
  546. {
  547. get { return m_PVN22ValveIsOpen; }
  548. set { SetProperty(ref m_PVN22ValveIsOpen, value); }
  549. }
  550. public bool N2ValveIsOpen
  551. {
  552. get { return m_N2ValveIsOpen; }
  553. set { SetProperty(ref m_N2ValveIsOpen, value); }
  554. }
  555. public bool PV11ValveIsOpen
  556. {
  557. get { return m_PV11ValveIsOpen; }
  558. set { SetProperty(ref m_PV11ValveIsOpen, value); }
  559. }
  560. public bool PV12ValveIsOpen
  561. {
  562. get { return m_PV12ValveIsOpen; }
  563. set { SetProperty(ref m_PV12ValveIsOpen, value); }
  564. }
  565. public bool MFC1ValveIsOpen
  566. {
  567. get { return m_MFC1ValveIsOpen; }
  568. set { SetProperty(ref m_MFC1ValveIsOpen, value); }
  569. }
  570. public bool PV21ValveIsOpen
  571. {
  572. get { return m_PV21ValveIsOpen; }
  573. set { SetProperty(ref m_PV21ValveIsOpen, value); }
  574. }
  575. public bool PV22ValveIsOpen
  576. {
  577. get { return m_PV22ValveIsOpen; }
  578. set { SetProperty(ref m_PV22ValveIsOpen, value); }
  579. }
  580. public bool MFC2ValveIsOpen
  581. {
  582. get { return m_MFC2ValveIsOpen; }
  583. set { SetProperty(ref m_MFC2ValveIsOpen, value); }
  584. }
  585. public bool PV31ValveIsOpen
  586. {
  587. get { return m_PV31ValveIsOpen; }
  588. set { SetProperty(ref m_PV31ValveIsOpen, value); }
  589. }
  590. public bool PV32ValveIsOpen
  591. {
  592. get { return m_PV32ValveIsOpen; }
  593. set { SetProperty(ref m_PV32ValveIsOpen, value); }
  594. }
  595. public bool MFC3ValveIsOpen
  596. {
  597. get { return m_MFC3ValveIsOpen; }
  598. set { SetProperty(ref m_MFC3ValveIsOpen, value); }
  599. }
  600. public bool PV41ValveIsOpen
  601. {
  602. get { return m_PV41ValveIsOpen; }
  603. set { SetProperty(ref m_PV41ValveIsOpen, value); }
  604. }
  605. public bool PV42ValveIsOpen
  606. {
  607. get { return m_PV42ValveIsOpen; }
  608. set { SetProperty(ref m_PV42ValveIsOpen, value); }
  609. }
  610. public bool MFC4ValveIsOpen
  611. {
  612. get { return m_MFC4ValveIsOpen; }
  613. set { SetProperty(ref m_MFC4ValveIsOpen, value); }
  614. }
  615. public bool MFC5ValveIsOpen
  616. {
  617. get { return m_MFC5ValveIsOpen; }
  618. set { SetProperty(ref m_MFC5ValveIsOpen, value); }
  619. }
  620. public bool MFC6ValveIsOpen
  621. {
  622. get { return m_MFC6ValveIsOpen; }
  623. set { SetProperty(ref m_MFC6ValveIsOpen, value); }
  624. }
  625. public bool MFC7ValveIsOpen
  626. {
  627. get { return m_MFC7ValveIsOpen; }
  628. set { SetProperty(ref m_MFC7ValveIsOpen, value); }
  629. }
  630. public bool MFC8ValveIsOpen
  631. {
  632. get { return m_MFC8ValveIsOpen; }
  633. set { SetProperty(ref m_MFC8ValveIsOpen, value); }
  634. }
  635. public bool PVHe1ValveIsOpen
  636. {
  637. get { return m_PVHe1ValveIsOpen; }
  638. set { SetProperty(ref m_PVHe1ValveIsOpen, value); }
  639. }
  640. public bool PVHe2ValveIsOpen
  641. {
  642. get { return m_PVHe2ValveIsOpen; }
  643. set { SetProperty(ref m_PVHe2ValveIsOpen, value); }
  644. }
  645. public bool PVHe3ValveIsOpen
  646. {
  647. get { return m_PVHe3ValveIsOpen; }
  648. set { SetProperty(ref m_PVHe3ValveIsOpen, value); }
  649. }
  650. public bool HeISOValveIsOpen
  651. {
  652. get { return m_HeISOValveIsOpen; }
  653. set { SetProperty(ref m_HeISOValveIsOpen, value); }
  654. }
  655. public bool TurboPumpPumpingValveIsOpen
  656. {
  657. get { return m_TurboPumpPumpingValveIsOpen; }
  658. set { SetProperty(ref m_TurboPumpPumpingValveIsOpen, value); }
  659. }
  660. public bool TurboPumpPurgeValveIsOpen
  661. {
  662. get { return m_TurboPumpPurgeValveIsOpen; }
  663. set { SetProperty(ref m_TurboPumpPurgeValveIsOpen, value); }
  664. }
  665. public bool SoftPumpValveIsOpen
  666. {
  667. get { return m_SoftPumpValveIsOpen; }
  668. set { SetProperty(ref m_SoftPumpValveIsOpen, value); }
  669. }
  670. public bool FastPumpValveIsOpen
  671. {
  672. get { return m_FastPumpValveIsOpen; }
  673. set { SetProperty(ref m_FastPumpValveIsOpen, value); }
  674. }
  675. public bool GuageValveIsOpen
  676. {
  677. get { return m_GuageValveIsOpen; }
  678. set { SetProperty(ref m_GuageValveIsOpen, value); }
  679. }
  680. #endregion
  681. public Dictionary<string, object> RtDataValues
  682. {
  683. get { return m_RtDataValues; }
  684. set { SetProperty(ref m_RtDataValues, value); }
  685. }
  686. public bool PumpIsOpen
  687. {
  688. get { return m_PumpIsOpen; }
  689. set { SetProperty(ref m_PumpIsOpen, value); }
  690. }
  691. public bool PendulumValveIsOpen
  692. {
  693. get { return m_PendulumValveIsOpen; }
  694. set { SetProperty(ref m_PendulumValveIsOpen, value); }
  695. }
  696. public bool TurboIsOpen
  697. {
  698. get { return m_TurboIsOpen; }
  699. set { SetProperty(ref m_TurboIsOpen, value); }
  700. }
  701. public bool IsATM
  702. {
  703. get { return m_IsATM; }
  704. set { SetProperty(ref m_IsATM, value); }
  705. }
  706. public bool IsVAC
  707. {
  708. get { return m_IsVAC; }
  709. set { SetProperty(ref m_IsVAC, value); }
  710. }
  711. //public bool BRFIsOn
  712. //{
  713. // get { return m_BRFIsOn; }
  714. // set { SetProperty(ref m_BRFIsOn, value); }
  715. //}
  716. //public bool SRFIsOn
  717. //{
  718. // get { return m_SRFIsOn; }
  719. // set { SetProperty(ref m_SRFIsOn, value); }
  720. //}
  721. public int PositionValue
  722. {
  723. get { return m_PositionValue; }
  724. set { SetProperty(ref m_PositionValue, value); }
  725. }
  726. public bool IsPositionMode
  727. {
  728. get { return m_IsPositionMode; }
  729. set { SetProperty(ref m_IsPositionMode, value); }
  730. }
  731. public double HeGasSetpoint
  732. {
  733. get { return m_HeGasSetpoint; }
  734. set
  735. {
  736. SetProperty(ref m_HeGasSetpoint, value);
  737. }
  738. }
  739. public int HePressureSetpoint
  740. {
  741. get { return m_HePressureSetpoint; }
  742. set
  743. {
  744. SetProperty(ref m_HePressureSetpoint, value);
  745. }
  746. }
  747. public float SRFFwdPowerSetpoint
  748. {
  749. get { return m_SRFFwdPowerSetpoint; }
  750. set { SetProperty(ref m_SRFFwdPowerSetpoint, value); }
  751. }
  752. public float BRFFwdPowerSetpoint
  753. {
  754. get { return m_BRFFwdPowerSetpoint; }
  755. set { SetProperty(ref m_BRFFwdPowerSetpoint, value); }
  756. }
  757. public int ESCVoltage
  758. {
  759. get { return m_ESCVoltage; }
  760. set { SetProperty(ref m_ESCVoltage, value); }
  761. }
  762. public float SRFMatchC1
  763. {
  764. get { return m_SRFMatchC1; }
  765. set { SetProperty(ref m_SRFMatchC1, value); }
  766. }
  767. public float SRFMatchC2
  768. {
  769. get { return m_SRFMatchC2; }
  770. set { SetProperty(ref m_SRFMatchC2, value); }
  771. }
  772. public float BRFMatchC1
  773. {
  774. get { return m_BRFMatchC1; }
  775. set { SetProperty(ref m_BRFMatchC1, value); }
  776. }
  777. public float BRFMatchC2
  778. {
  779. get { return m_BRFMatchC2; }
  780. set { SetProperty(ref m_BRFMatchC2, value); }
  781. }
  782. public bool GasIsFlowing
  783. {
  784. get { return m_GasIsFlowing; }
  785. set { SetProperty(ref m_GasIsFlowing, value); }
  786. }
  787. public bool IsProcessing
  788. {
  789. get { return m_IsProcessing; }
  790. set { SetProperty(ref m_IsProcessing, value); }
  791. }
  792. public bool IsAutoMode
  793. {
  794. get { return m_IsAutoMode; }
  795. set { SetProperty(ref m_IsAutoMode, value); }
  796. }
  797. public string SelectedRecipe
  798. {
  799. get { return m_SelectedRecipe; }
  800. set { SetProperty(ref m_SelectedRecipe, value); }
  801. }
  802. public float ChillerTempSetpoint
  803. {
  804. get { return m_ChillerTempSetpoint; }
  805. set { SetProperty(ref m_ChillerTempSetpoint, value); }
  806. }
  807. public float WallTempSetpoint
  808. {
  809. get { return m_WallTempSetpoint; }
  810. set { SetProperty(ref m_WallTempSetpoint, value); }
  811. }
  812. public bool HeIsPressureMode
  813. {
  814. get { return m_HeIsPressureMode; }
  815. set { SetProperty(ref m_HeIsPressureMode, value); }
  816. }
  817. public bool ChillerIsOn
  818. {
  819. get { return m_ChillerIsOn; }
  820. set { SetProperty(ref m_ChillerIsOn, value); }
  821. }
  822. public double ChamberPressureFeedBack
  823. {
  824. get { return m_ChamberPressureFeedBack; }
  825. set { SetProperty(ref m_ChamberPressureFeedBack, value); }
  826. }
  827. public string WaferID
  828. {
  829. get { return m_WaferID; }
  830. set { SetProperty(ref m_WaferID, value); }
  831. }
  832. #endregion
  833. #region 命令
  834. private DelegateCommand _PMInitCommnad;
  835. public DelegateCommand PMInitCommnad =>
  836. _PMInitCommnad ?? (_PMInitCommnad = new DelegateCommand(OnPMInit));
  837. private DelegateCommand _PMAbortCommnad;
  838. public DelegateCommand PMAbortCommnad =>
  839. _PMAbortCommnad ?? (_PMAbortCommnad = new DelegateCommand(OnPMAbort));
  840. private DelegateCommand _GasCommand;
  841. public DelegateCommand GasCommand =>
  842. _GasCommand ?? (_GasCommand = new DelegateCommand(OnGas));
  843. private DelegateCommand _HeCommand;
  844. public DelegateCommand HeCommand =>
  845. _HeCommand ?? (_HeCommand = new DelegateCommand(OnHe));
  846. private DelegateCommand _RfCommand;
  847. public DelegateCommand RfCommand =>
  848. _RfCommand ?? (_RfCommand = new DelegateCommand(OnRf));
  849. private DelegateCommand _PurgeCommand;
  850. public DelegateCommand PurgeCommand =>
  851. _PurgeCommand ?? (_PurgeCommand = new DelegateCommand(OnPurge));
  852. private DelegateCommand _VentCommand;
  853. public DelegateCommand VentCommand =>
  854. _VentCommand ?? (_VentCommand = new DelegateCommand(OnVent));
  855. private DelegateCommand _PumpCommand;
  856. public DelegateCommand PumpCommand =>
  857. _PumpCommand ?? (_PumpCommand = new DelegateCommand(OnPump));
  858. private DelegateCommand _OpenPumpCommand;
  859. public DelegateCommand OpenPumpCommand =>
  860. _OpenPumpCommand ?? (_OpenPumpCommand = new DelegateCommand(OnOpenPump));
  861. private DelegateCommand _ClosePumpCommand;
  862. public DelegateCommand ClosePumpCommand =>
  863. _ClosePumpCommand ?? (_ClosePumpCommand = new DelegateCommand(OnClosePump));
  864. private DelegateCommand _OpenTurboPumpCommand;
  865. public DelegateCommand OpenTurboPumpCommand =>
  866. _OpenTurboPumpCommand ?? (_OpenTurboPumpCommand = new DelegateCommand(OnOpenTurboPump));
  867. private DelegateCommand _CloseTurboPumpCommand;
  868. public DelegateCommand CloseTurboPumpCommand =>
  869. _CloseTurboPumpCommand ?? (_CloseTurboPumpCommand = new DelegateCommand(OnCloseTurboPump));
  870. private DelegateCommand _OpenPendulumValveCommand;
  871. public DelegateCommand OpenPendulumValveCommand =>
  872. _OpenPendulumValveCommand ?? (_OpenPendulumValveCommand = new DelegateCommand(OnOpenPendulumValve));
  873. private DelegateCommand _ClosePendulumValveCommand;
  874. public DelegateCommand ClosePendulumValveCommand =>
  875. _ClosePendulumValveCommand ?? (_ClosePendulumValveCommand = new DelegateCommand(OnClosePendulumValve));
  876. private DelegateCommand<object> _PinUpDownCommand;
  877. public DelegateCommand<object> PinUpDownCommand =>
  878. _PinUpDownCommand ?? (_PinUpDownCommand = new DelegateCommand<object>(OnPinUpDown));
  879. private DelegateCommand _SetSRfCommand;
  880. public DelegateCommand SetSRfCommand =>
  881. _SetSRfCommand ?? (_SetSRfCommand = new DelegateCommand(OnSetSRf));
  882. private DelegateCommand _SetBRfCommand;
  883. public DelegateCommand SetBRfCommand =>
  884. _SetBRfCommand ?? (_SetBRfCommand = new DelegateCommand(OnSetBRf));
  885. private DelegateCommand _OpenButterflyValveViewCommand;
  886. public DelegateCommand OpenButterflyValveViewCommand =>
  887. _OpenButterflyValveViewCommand ?? (_OpenButterflyValveViewCommand = new DelegateCommand(OnOpenButterflyValveView));
  888. private DelegateCommand _HVCommand;
  889. public DelegateCommand HVCommand =>
  890. _HVCommand ?? (_HVCommand = new DelegateCommand(OnHV));
  891. private DelegateCommand _HVSetCommand;
  892. public DelegateCommand HVSetCommand =>
  893. _HVSetCommand ?? (_HVSetCommand = new DelegateCommand(OnHVSet));
  894. private DelegateCommand _LoadRecipeCommand;
  895. public DelegateCommand LoadRecipeCommand =>
  896. _LoadRecipeCommand ?? (_LoadRecipeCommand = new DelegateCommand(OnLoadRecipe));
  897. private DelegateCommand<object> _ControlValveCommand;
  898. public DelegateCommand<object> ControlValveCommand =>
  899. _ControlValveCommand ?? (_ControlValveCommand = new DelegateCommand<object>(OnControlValve));
  900. private DelegateCommand<object> _RunRecipeCommand;
  901. public DelegateCommand<object> RunRecipeCommand =>
  902. _RunRecipeCommand ?? (_RunRecipeCommand = new DelegateCommand<object>(OnRunRecipe));
  903. private DelegateCommand _SetChillerTempCommand;
  904. public DelegateCommand SetChillerTempCommand =>
  905. _SetChillerTempCommand ?? (_SetChillerTempCommand = new DelegateCommand(OnSetChillerTemp));
  906. private DelegateCommand _OnOffChillerCommand;
  907. public DelegateCommand OnOffChillerCommand =>
  908. _OnOffChillerCommand ?? (_OnOffChillerCommand = new DelegateCommand(OnOffChiller));
  909. private DelegateCommand<object> _HeaterCommand;
  910. public DelegateCommand<object> HeaterCommand =>
  911. _HeaterCommand ?? (_HeaterCommand = new DelegateCommand<object>(OnHeater));
  912. private DelegateCommand _EndStepCommand;
  913. public DelegateCommand EndStepCommand =>
  914. _EndStepCommand ?? (_EndStepCommand = new DelegateCommand(OnEndStep));
  915. #endregion
  916. #region 构造函数
  917. public OverVenusViewModel()
  918. {
  919. m_RtDataKeys = new List<string>();
  920. m_IsATM = true;
  921. ModuleName = "PMA";
  922. CurrentModuleRecipes = GetFilesNames(Path.Combine(QueryDataClient.Instance.Service.GetData("GetRTPath").ToString(), "Recipes", ModuleName)).ToList();
  923. DispatcherTimer timer = new DispatcherTimer();
  924. timer.Interval = TimeSpan.FromSeconds(0.5);
  925. timer.Tick += timer_Tick;
  926. timer.Start();
  927. }
  928. #endregion
  929. #region 命令方法
  930. private void OnControlValve(object obj)
  931. {
  932. CommonValveControl commonValveControl = (CommonValveControl)obj;
  933. if (commonValveControl.IsCanEdit == true)
  934. {
  935. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ControlValve",Convert.ToInt32( commonValveControl.Tag.ToString()), !commonValveControl.Status);
  936. }
  937. }
  938. private void OnPMInit()
  939. {
  940. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Home");
  941. }
  942. private async void OnGas()
  943. {
  944. await Task.Run(async () =>
  945. {
  946. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas1.SetPoint", MFC1SetPoint);
  947. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas2.SetPoint", MFC2SetPoint);
  948. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas3.SetPoint", MFC3SetPoint);
  949. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas4.SetPoint", MFC4SetPoint);
  950. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas5.SetPoint", MFC5SetPoint);
  951. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas6.SetPoint", MFC6SetPoint);
  952. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas7.SetPoint", MFC7SetPoint);
  953. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas8.SetPoint", MFC8SetPoint);
  954. await Task.Delay(1000);
  955. object[] mfc = new object[8];
  956. string[] mfcSetPoint = new string[8];
  957. mfc[0] = MFC1Data.SetPoint;
  958. mfc[1] = MFC2Data.SetPoint;
  959. mfc[2] = MFC3Data.SetPoint;
  960. mfc[3] = MFC4Data.SetPoint;
  961. mfc[4] = MFC5Data.SetPoint;
  962. mfc[5] = MFC6Data.SetPoint;
  963. mfc[6] = MFC7Data.SetPoint;
  964. mfc[7] = MFC8Data.SetPoint;
  965. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.GasFlow}", mfc);
  966. });
  967. }
  968. private void OnHe()
  969. {
  970. if (PVHe1ValveIsOpen == true)
  971. {
  972. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBacksideHeFlow", 0.0d);
  973. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBacksideHePressure", 0);
  974. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ControlValve", (int)ValveType.PVHe3, false);
  975. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ControlValve", (int)ValveType.HeISO, false);
  976. }
  977. else
  978. {
  979. if (HeIsPressureMode)
  980. {
  981. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBacksideHePressure", HeGasSetpoint);
  982. }
  983. else
  984. {
  985. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBacksideHeFlow", HeGasSetpoint);
  986. }
  987. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ControlValve", (int)ValveType.PVHe3, true);
  988. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ControlValve", (int)ValveType.HeISO, true);
  989. }
  990. }
  991. private void OnRf()
  992. {
  993. if (PMCurrentState == PMState.RfPowering)
  994. {
  995. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  996. }
  997. else
  998. {
  999. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.RfPower}");
  1000. }
  1001. }
  1002. private void OnPurge()
  1003. {
  1004. //if (RtDataValues[$"{ModuleName}.FsmState"].ToString() ==PMState.Purge.ToString())
  1005. //if (PMCurrentState == PMState.Purging || N2SetPoint<=0)
  1006. //{
  1007. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", 0);
  1008. // await Task.Delay(1000);
  1009. // //InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StopPurge");
  1010. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1011. //}
  1012. //else
  1013. //{
  1014. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", N2SetPoint);
  1015. // await Task.Delay(1000);
  1016. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Purge");
  1017. //}
  1018. if (PMCurrentState == PMState.Purging)
  1019. {
  1020. //InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", 0);
  1021. //await Task.Delay(1000);
  1022. ////InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StopPurge");
  1023. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1024. }
  1025. else
  1026. {
  1027. //InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", N2SetPoint);
  1028. //await Task.Delay(1000);
  1029. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Purge");
  1030. }
  1031. }
  1032. private void OnVent()
  1033. {
  1034. //if (RtDataValues[$"{ModuleName}.FsmState"].ToString()==PMState.Venting.ToString())
  1035. if (PMCurrentState == PMState.Venting)
  1036. {
  1037. //InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StopVent");
  1038. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1039. }
  1040. else
  1041. {
  1042. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Vent");
  1043. }
  1044. }
  1045. private void OnPump()
  1046. {
  1047. //if (RtDataValues[$"{ModuleName}.FsmState"].ToString() == PMState.Pumping.ToString())
  1048. if (PMCurrentState==PMState.Pumping)
  1049. {
  1050. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1051. return;
  1052. }
  1053. //if (PMCurrentState == PMState.pum)
  1054. //{
  1055. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StopPump");
  1056. // return;
  1057. //}
  1058. //string BasePressureSetPoint= RtConfigValues[$"{ModuleName}.Pump.PumpBasePressure"].ToString(); ;
  1059. //{
  1060. // get { return RtConfigValues[$"{ModuleName}.Pump.PumpBasePressure"].ToString(); }
  1061. //}
  1062. //string PumpLimitSetPoint= RtConfigValues[$"{ModuleName}.Pump.PumpTimeLimit"].ToString();
  1063. //{
  1064. // get { return RtConfigValues[$"{ModuleName}.Pump.PumpTimeLimit"].ToString(); }
  1065. //}
  1066. string BasePressureSetPoint = QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.Pump.PumpBasePressure").ToString();
  1067. string PumpLimitSetPoint= QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.Pump.PumpTimeLimit").ToString();
  1068. // 设置底压
  1069. double basePressure = string.IsNullOrEmpty(BasePressureSetPoint) ? 0 : Convert.ToDouble(BasePressureSetPoint);
  1070. if (basePressure <= 0.01 || basePressure >= 1000)
  1071. {
  1072. MessageBox.Show($"基准压力设定值 {basePressure} 无效,应该在0到1000毫托之间");
  1073. return;
  1074. }
  1075. double pumpLimit = string.IsNullOrEmpty(PumpLimitSetPoint) ? 0 : Convert.ToDouble(PumpLimitSetPoint);
  1076. if (pumpLimit <= 0.01 || pumpLimit >= 1200)
  1077. {
  1078. MessageBox.Show($"抽气时间应该在0到1200之间,当前设定值{pumpLimit}");
  1079. return;
  1080. }
  1081. InvokeClient.Instance.Service.DoOperation("System.SetConfig", $"{ModuleName}.Pump.PumpBasePressure", basePressure.ToString());
  1082. InvokeClient.Instance.Service.DoOperation("System.SetConfig", $"{ModuleName}.Pump.PumpTimeLimit", pumpLimit.ToString());
  1083. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Pump");
  1084. }
  1085. private void OnOpenPump()
  1086. {
  1087. //if (RtDataValues[$"{ModuleName}.FsmState"].ToString() == "LaunchingPump")
  1088. if (PMCurrentState==PMState.LaunchingPump)
  1089. {
  1090. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1091. return;
  1092. }
  1093. //if (PumpIsOpen == true)
  1094. //{
  1095. // return;
  1096. //}
  1097. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StartPump");
  1098. }
  1099. private void OnClosePump()
  1100. {
  1101. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ClosePump");
  1102. }
  1103. private void OnOpenTurboPump()
  1104. {
  1105. //TurboIsOpen = true;
  1106. //if (RtDataValues[$"{ModuleName}.FsmState"].ToString() == "LaunchingTurbo")
  1107. if (PMCurrentState == PMState.LaunchingTurboPump)
  1108. {
  1109. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1110. return;
  1111. }
  1112. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StartTurboPump");
  1113. }
  1114. private void OnCloseTurboPump()
  1115. {
  1116. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.CloseTurboPump");
  1117. }
  1118. private void OnOpenPendulumValve()
  1119. {
  1120. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.TurnPendulumValve",true);
  1121. }
  1122. private void OnClosePendulumValve()
  1123. {
  1124. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.TurnPendulumValve",false);
  1125. }
  1126. private void OnPinUpDown(object upDown)
  1127. {
  1128. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetLiftPin", Convert.ToBoolean(upDown));
  1129. }
  1130. private async void OnSetSRf()
  1131. {
  1132. if (SRFData.IsRfOn == true)
  1133. {
  1134. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetSRf", SRFFwdPowerSetpoint, false);
  1135. }
  1136. else
  1137. {
  1138. if (GasIsFlowing == true)
  1139. {
  1140. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.Match}.{AITRfOperation.SetMatchPosition}", SRFMatchC1, SRFMatchC2);
  1141. await Task.Delay(100);
  1142. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetSRf", SRFFwdPowerSetpoint, true);
  1143. }
  1144. }
  1145. }
  1146. private async void OnSetBRf()
  1147. {
  1148. if (BRFData.IsRfOn == true)
  1149. {
  1150. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBRf", BRFFwdPowerSetpoint, false);
  1151. }
  1152. else
  1153. {
  1154. if (GasIsFlowing == true)
  1155. {
  1156. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.BiasMatch}.{AITRfOperation.SetMatchPosition}", BRFMatchC1, BRFMatchC2);
  1157. await Task.Delay(100);
  1158. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBRf", BRFFwdPowerSetpoint, true);
  1159. }
  1160. }
  1161. }
  1162. private void OnPMAbort()
  1163. {
  1164. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Abort");
  1165. }
  1166. private void OnOpenButterflyValveView()
  1167. {
  1168. //if (butterflyValveMessageBox == null)
  1169. //{
  1170. var _mainWindow = Application.Current.Windows.Cast<Window>().FirstOrDefault(window => window is Window) as Window;
  1171. butterflyValveMessageBox = new ButterflyValveView(ModuleName.ToString());
  1172. butterflyValveMessageBox.WindowStartupLocation = WindowStartupLocation.Manual;
  1173. butterflyValveMessageBox.Left = 700;
  1174. butterflyValveMessageBox.Top = 600;
  1175. butterflyValveMessageBox.Show();
  1176. butterflyValveMessageBox.Owner = _mainWindow;
  1177. //}
  1178. }
  1179. private void OnLoadRecipe()
  1180. {
  1181. CurrentModuleRecipes = GetFilesNames(Path.Combine(QueryDataClient.Instance.Service.GetData("GetRTPath").ToString(), "Recipes", ModuleName)).ToList();
  1182. }
  1183. private void OnHV()
  1184. {
  1185. if (ESCHVData.IsOn == true)
  1186. {
  1187. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetESCHVIsOn", false);
  1188. }
  1189. else
  1190. {
  1191. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetESCHV", ESCVoltage);
  1192. //await Task.Run(async () =>
  1193. //{
  1194. // //InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetESCHVIsOn", true);
  1195. // //await Task.Delay(1000);
  1196. //});
  1197. }
  1198. }
  1199. private void OnHVSet()
  1200. {
  1201. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetESCHV", ESCVoltage);
  1202. }
  1203. private void OnRunRecipe(object obj)
  1204. {
  1205. string recipeName = SelectedRecipe;
  1206. if (recipeName == null)
  1207. {
  1208. return;
  1209. }
  1210. ClearData();
  1211. var recipePath = Path.Combine(QueryDataClient.Instance.Service.GetData("GetRTPath").ToString(), "Recipes", ModuleName, recipeName + ".rcp");
  1212. CurrentRecipe = Recipe.Load(File.ReadAllText(recipePath));
  1213. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.RunRecipe}",recipeName);
  1214. }
  1215. private void OnSetChillerTemp()
  1216. {
  1217. var value = (QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.Chiller.ChillerTemperatureOffset").ToString());
  1218. float x;
  1219. float.TryParse(value, out x);
  1220. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.HeatChiller", ChillerType.Chiller.ToString(),ChillerTempSetpoint, x);
  1221. }
  1222. private void OnOffChiller()
  1223. {
  1224. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.OnOffChiller", ChillerType.Chiller.ToString(),!ChillerIsOn);
  1225. }
  1226. private void OnHeater(object obj)
  1227. {
  1228. AITHeaterData heaterData = obj as AITHeaterData;
  1229. var _mainWindow = Application.Current.Windows.Cast<Window>().FirstOrDefault(window => window is Window) as Window;
  1230. heaterView = new HeaterView(heaterData);
  1231. heaterView.WindowStartupLocation = WindowStartupLocation.CenterScreen;
  1232. heaterView.Owner = _mainWindow;
  1233. heaterView.Show();
  1234. }
  1235. private void OnEndStep()
  1236. {
  1237. if (CurrentRecipeResult?.RecipeStepNumber != null && CurrentRecipeResult?.RecipeStepNumber != CurrentRecipeResult?.RecipeStepCount)
  1238. {
  1239. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ManualEndStep");
  1240. }
  1241. else if (CurrentRecipeResult?.RecipeStepNumber != null && CurrentRecipeResult?.RecipeStepNumber == CurrentRecipeResult?.RecipeStepCount)
  1242. {
  1243. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Abort");
  1244. }
  1245. }
  1246. #endregion
  1247. #region 私有方法
  1248. private void ClearData()
  1249. {
  1250. ESCVoltage = 0;
  1251. SRFFwdPowerSetpoint = 0;
  1252. SRFMatchC1 = 0;
  1253. SRFMatchC2 = 0;
  1254. BRFFwdPowerSetpoint = 0;
  1255. BRFMatchC1 = 0;
  1256. BRFMatchC2 = 0;
  1257. HeGasSetpoint = 0;
  1258. MFC1SetPoint = 0;
  1259. MFC2SetPoint = 0;
  1260. MFC3SetPoint = 0;
  1261. MFC4SetPoint = 0;
  1262. MFC5SetPoint = 0;
  1263. MFC6SetPoint = 0;
  1264. MFC7SetPoint = 0;
  1265. MFC8SetPoint = 0;
  1266. }
  1267. private IEnumerable<string> GetFilesNames(string path)
  1268. {
  1269. return Directory.GetFiles(path, "*.rcp")?
  1270. .Select(Path.GetFileNameWithoutExtension);
  1271. }
  1272. void timer_Tick(object sender, EventArgs e)
  1273. {
  1274. try
  1275. {
  1276. RtDataValues = QueryDataClient.Instance.Service.PollData(m_RtDataKeys);
  1277. if (RtDataValues == null)
  1278. {
  1279. return;
  1280. }
  1281. TurboN2FlowSetPoint = Convert.ToInt32(QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.TurboN2FlowSetPoint"));
  1282. PVN21ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVN21.IsOpen");
  1283. GasFinalValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveGasFinal.IsOpen");
  1284. PV11ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV11.IsOpen");
  1285. PV12ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV12.IsOpen");
  1286. PV21ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV21.IsOpen");
  1287. PV22ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV22.IsOpen");
  1288. PV31ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV31.IsOpen");
  1289. PV32ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV32.IsOpen");
  1290. PV41ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV41.IsOpen");
  1291. PV42ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV42.IsOpen");
  1292. MFC1ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc1.IsOpen");
  1293. MFC2ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc2.IsOpen");
  1294. MFC3ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc3.IsOpen");
  1295. MFC4ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc4.IsOpen");
  1296. MFC5ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc5.IsOpen");
  1297. MFC6ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc6.IsOpen");
  1298. MFC7ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc7.IsOpen");
  1299. MFC8ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc8.IsOpen");
  1300. N2ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveN2.IsOpen");
  1301. SoftPumpValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveSoftPump.IsOpen");
  1302. FastPumpValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveFastPump.IsOpen");
  1303. GuageValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveGuage.IsOpen");
  1304. PVHe1ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVHe1.IsOpen");
  1305. PVHe2ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVHe2.IsOpen");
  1306. PVN21ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVN21.IsOpen");
  1307. PVN22ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVN22.IsOpen");
  1308. TurboPumpPumpingValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveTurboPumpPumping.IsOpen");
  1309. TurboPumpPurgeValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveTurboPumpPurge.IsOpen");
  1310. PVHe3ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVHe3.IsOpen");
  1311. HeISOValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveHeISO.IsOpen");
  1312. PumpIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.PumpIsRunning");
  1313. TurboIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.TurboPumpIsRunning");
  1314. LiftPinIsUp = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.LiftPinIsUp");
  1315. IsSlitDoorClosed = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsSlitDoorClosed");
  1316. IsLidClosed = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsLidClosed");
  1317. PendulumValvePosition = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.GetPVPosition");
  1318. TurboPumpRotationalSpeed = Convert.ToInt32(RtDataValues[$"{ModuleName}.TurboPumpRotationalSpeed"].ToString());
  1319. PositionValue = -((int)((PendulumValvePosition) * 0.09));
  1320. PMCurrentState = (PMState)Enum.Parse(typeof(PMState), RtDataValues[$"{ModuleName}.FsmState"].ToString());
  1321. GasIsFlowing = PMCurrentState == PMState.GasFlowing;
  1322. IsProcessing = PMCurrentState == PMState.Processing;
  1323. MFC1Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas1");
  1324. MFC2Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas2");
  1325. MFC3Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas3");
  1326. MFC4Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas4");
  1327. MFC5Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas5");
  1328. MFC6Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas6");
  1329. MFC7Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas7");
  1330. MFC8Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas8");
  1331. MFCHeData = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcHe");
  1332. MFCN2Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcN2");
  1333. SRFData = CommonFunction.GetValue<AITRfData>(RtDataValues, $"{ModuleName}.{VenusDevice.Rf}.DeviceData");
  1334. BRFData = CommonFunction.GetValue<AITRfData>(RtDataValues, $"{ModuleName}.{VenusDevice.BiasRf}.DeviceData");
  1335. PendulumValveData = CommonFunction.GetValue<AITPendulumValveData>(RtDataValues, $"{ModuleName}.{VenusDevice.PendulumValve}.DeviceData");
  1336. ESCHVData = CommonFunction.GetValue<AITHVData>(RtDataValues, $"{ModuleName}.{VenusDevice.ESCHV}.DeviceData");
  1337. ValveHeaterData = (AITHeaterData)RtDataValues[$"{ModuleName}.ValveHeater.DeviceData"];
  1338. ForelineHeaterData = (AITHeaterData)RtDataValues[$"{ModuleName}.ForelineHeater.DeviceData"];
  1339. WallHeaterData = (AITHeaterData)RtDataValues[$"{ModuleName}.WallHeater.DeviceData"];
  1340. ProcessHighPressure = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.ProcessHighPressure");
  1341. ProcessLowPressure = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.ProcessLowPressure");
  1342. ForelinePressure = float.Parse(RtDataValues[$"{ModuleName}.ForelinePressure"].ToString());
  1343. ESCHePressure = float.Parse(RtDataValues[$"{ModuleName}.ESCHePressure"].ToString());
  1344. ChillerTemperature = float.Parse(RtDataValues[$"{ModuleName}.Chiller.Temp"].ToString());
  1345. HVTemperature = float.Parse(RtDataValues[$"{ModuleName}.{VenusDevice.ESCHV}.Temp"].ToString());
  1346. ChillerIsOn = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.Chiller.IsOn");
  1347. SourceRFFanInterlock = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.SourceRFFanInterlock");
  1348. IsWLK = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsWLK");
  1349. IsWaterFlowOk = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsWaterFlowOk");
  1350. IsTurboPumpInterlock = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsTurboPumpInterlock");
  1351. IsCDAOK = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsCDA_OK");
  1352. SensorGasBoxDoor = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.GasBoxDoorSW.Value");
  1353. SensorGasBoxPressure = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.GasBoxPressureSW.Value");
  1354. IsATM = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsATM");
  1355. IsVAC = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsVAC");
  1356. ESCHVOutputVoltage = CommonFunction.GetValue<int>(RtDataValues, $"{ModuleName}.ESCHV.OutputVoltage");
  1357. MatchC1 = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.{VenusDevice.Match}.C1");
  1358. MatchC2 = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.{VenusDevice.Match}.C2");
  1359. BiasMatchC1 = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.{VenusDevice.BiasMatch}.C1");
  1360. BiasMatchC2 = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.{VenusDevice.BiasMatch}.C2");
  1361. TurboPumpWaterFlowSwitch = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.TurboPumpWaterFlowSwitch.Value");
  1362. IsTurboPumpAtSpeed = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsTurboPumpAtSpeed");
  1363. IsHasWafer = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.HasWafer");
  1364. WaferID = IsHasWafer ? ModuleManager.ModuleInfos[ModuleName].WaferManager.Wafers[0].SourceName : "";
  1365. if (PMCurrentState == PMState.Processing)
  1366. {
  1367. CurrentRecipeResult = CommonFunction.GetValue<RecipeResult>(RtDataValues, $"{ModuleName}.CurrentRecipeResult");
  1368. if (CurrentRecipeResult.RecipeStepNumber != null)
  1369. {
  1370. var recipePath = Path.Combine(QueryDataClient.Instance.Service.GetData("GetRTPath").ToString(), "Recipes", ModuleName, CurrentRecipeResult.RecipeName + ".rcp");
  1371. CurrentRecipe = Recipe.Load(File.ReadAllText(recipePath));
  1372. CurrentRecipeStep = CurrentRecipe.Steps[Convert.ToInt32(CurrentRecipeResult.RecipeStepNumber) - 1];
  1373. }
  1374. }
  1375. else
  1376. {
  1377. CurrentRecipeResult = null;
  1378. CurrentRecipeStep = null;
  1379. }
  1380. if (Math.Abs(100 - ProcessLowPressure) > 1 && ProcessLowPressure < 100)
  1381. {
  1382. ChamberPressureFeedBack = ProcessLowPressure;
  1383. }
  1384. else
  1385. {
  1386. ChamberPressureFeedBack = ProcessHighPressure;
  1387. }
  1388. }
  1389. catch (Exception ex)
  1390. {
  1391. LOG.WriteExeption(ex.Message, ex);
  1392. }
  1393. }
  1394. public void addDataKeys()
  1395. {
  1396. m_RtDataKeys.Clear();
  1397. m_RtDataKeys.Add($"{ModuleName}.MfcGas1");
  1398. m_RtDataKeys.Add($"{ModuleName}.MfcGas2");
  1399. m_RtDataKeys.Add($"{ModuleName}.MfcGas3");
  1400. m_RtDataKeys.Add($"{ModuleName}.MfcGas4");
  1401. m_RtDataKeys.Add($"{ModuleName}.MfcGas5");
  1402. m_RtDataKeys.Add($"{ModuleName}.MfcGas6");
  1403. m_RtDataKeys.Add($"{ModuleName}.MfcGas7");
  1404. m_RtDataKeys.Add($"{ModuleName}.MfcGas8");
  1405. m_RtDataKeys.Add($"{ModuleName}.MfcHe");
  1406. m_RtDataKeys.Add($"{ModuleName}.MfcN2");
  1407. m_RtDataKeys.Add($"{ModuleName}.ForelinePressure");
  1408. m_RtDataKeys.Add($"{ModuleName}.ProcessHighPressure");
  1409. m_RtDataKeys.Add($"{ModuleName}.ProcessLowPressure");
  1410. m_RtDataKeys.Add($"{ModuleName}.ChamberPressure");
  1411. m_RtDataKeys.Add($"{ModuleName}.ESCHePressure");
  1412. m_RtDataKeys.Add($"{ModuleName}.IsATM");
  1413. m_RtDataKeys.Add($"{ModuleName}.IsVAC");
  1414. m_RtDataKeys.Add($"{ModuleName}.LiftPinIsUp");
  1415. m_RtDataKeys.Add($"{ModuleName}.LiftPinIsDown");
  1416. m_RtDataKeys.Add($"{ModuleName}.ValvePVN21.IsOpen");
  1417. m_RtDataKeys.Add($"{ModuleName}.ValvePVN22.IsOpen");
  1418. m_RtDataKeys.Add($"{ModuleName}.ValvePV11.IsOpen");
  1419. m_RtDataKeys.Add($"{ModuleName}.ValvePV12.IsOpen");
  1420. m_RtDataKeys.Add($"{ModuleName}.ValvePV21.IsOpen");
  1421. m_RtDataKeys.Add($"{ModuleName}.ValvePV22.IsOpen");
  1422. m_RtDataKeys.Add($"{ModuleName}.ValvePV31.IsOpen");
  1423. m_RtDataKeys.Add($"{ModuleName}.ValvePV32.IsOpen");
  1424. m_RtDataKeys.Add($"{ModuleName}.ValvePV41.IsOpen");
  1425. m_RtDataKeys.Add($"{ModuleName}.ValvePV42.IsOpen");
  1426. m_RtDataKeys.Add($"{ModuleName}.ValveMfc1.IsOpen");
  1427. m_RtDataKeys.Add($"{ModuleName}.ValveMfc2.IsOpen");
  1428. m_RtDataKeys.Add($"{ModuleName}.ValveMfc3.IsOpen");
  1429. m_RtDataKeys.Add($"{ModuleName}.ValveMfc4.IsOpen");
  1430. m_RtDataKeys.Add($"{ModuleName}.ValveMfc5.IsOpen");
  1431. m_RtDataKeys.Add($"{ModuleName}.ValveMfc6.IsOpen");
  1432. m_RtDataKeys.Add($"{ModuleName}.ValveMfc7.IsOpen");
  1433. m_RtDataKeys.Add($"{ModuleName}.ValveMfc8.IsOpen");
  1434. m_RtDataKeys.Add($"{ModuleName}.ValveGasFinal.IsOpen");
  1435. m_RtDataKeys.Add($"{ModuleName}.ValveSoftPump.IsOpen");
  1436. m_RtDataKeys.Add($"{ModuleName}.ValveFastPump.IsOpen");
  1437. m_RtDataKeys.Add($"{ModuleName}.ValveN2.IsOpen");
  1438. m_RtDataKeys.Add($"{ModuleName}.ValvePVHe1.IsOpen");
  1439. m_RtDataKeys.Add($"{ModuleName}.ValvePVHe2.IsOpen");
  1440. m_RtDataKeys.Add($"{ModuleName}.ValveTurboPumpPumping.IsOpen");
  1441. m_RtDataKeys.Add($"{ModuleName}.ValveTurboPumpPurge.IsOpen");
  1442. m_RtDataKeys.Add($"{ModuleName}.ValvePVN21.IsOpen");
  1443. m_RtDataKeys.Add($"{ModuleName}.ValvePVN22.IsOpen");
  1444. m_RtDataKeys.Add($"{ModuleName}.ValveGuage.IsOpen");
  1445. m_RtDataKeys.Add($"{ModuleName}.ValvePVHe3.IsOpen");
  1446. m_RtDataKeys.Add($"{ModuleName}.ValveHeISO.IsOpen");
  1447. m_RtDataKeys.Add($"{ModuleName}.TurboPumpIsRunning");
  1448. m_RtDataKeys.Add($"{ModuleName}.PumpIsRunning");
  1449. m_RtDataKeys.Add($"{ModuleName}.IsSlitDoorClosed");
  1450. m_RtDataKeys.Add($"{ModuleName}.IsLidClosed");
  1451. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Rf}.DeviceData");
  1452. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.BiasRf}.DeviceData");
  1453. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Match}.C1");
  1454. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Match}.C2");
  1455. // m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Match}.WorkMode");
  1456. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.BiasMatch}.C1");
  1457. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.BiasMatch}.C2");
  1458. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.PendulumValve}.DeviceData");
  1459. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.ESCHV}.DeviceData");
  1460. m_RtDataKeys.Add($"{ModuleName}.TurboPumpRotationalSpeed");
  1461. m_RtDataKeys.Add($"{ModuleName}.GetPVPosition");
  1462. m_RtDataKeys.Add($"{ModuleName}.Chiller.Temp");
  1463. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.ESCHV}.Temp");
  1464. //m_RtDataKeys.Add($"{ModuleName}.ESCHV.OutputVoltage");
  1465. //m_RtDataKeys.Add($"{ModuleName}.ESCHV.IsOn");
  1466. m_RtDataKeys.Add($"{ModuleName}.IsWaterFlowOk");
  1467. m_RtDataKeys.Add($"{ModuleName}.IsWLK");
  1468. m_RtDataKeys.Add($"{ModuleName}.IsCDA_OK");
  1469. m_RtDataKeys.Add($"{ModuleName}.SourceRFFanInterlock");
  1470. m_RtDataKeys.Add($"{ModuleName}.IsTurboPumpInterlock");
  1471. m_RtDataKeys.Add($"{ModuleName}.GasBoxDoorSW.Value");
  1472. m_RtDataKeys.Add($"{ModuleName}.GasBoxPressureSW.Value");
  1473. //m_RtDataKeys.Add($"{ModuleName}.WallTempFeedBack");
  1474. m_RtDataKeys.Add($"{ModuleName}.Chiller.IsOn");
  1475. m_RtDataKeys.Add($"{ModuleName}.ValveHeater.DeviceData");
  1476. m_RtDataKeys.Add($"{ModuleName}.ForelineHeater.DeviceData");
  1477. m_RtDataKeys.Add($"{ModuleName}.WallHeater.DeviceData");
  1478. m_RtDataKeys.Add($"{ModuleName}.FsmState");
  1479. m_RtDataKeys.Add($"{ModuleName}.IsTurboPumpAtSpeed");
  1480. m_RtDataKeys.Add($"{ModuleName}.TurboPumpWaterFlowSwitch.Value");
  1481. m_RtDataKeys.Add($"{ModuleName}.HasWafer");
  1482. m_RtDataKeys.Add($"{ModuleName}.CurrentRecipeResult");
  1483. }
  1484. #endregion
  1485. }
  1486. }