| 123456789101112131415161718192021222324252627282930313233343536373839404142434445464748495051525354555657585960616263646566676869707172737475767778798081828384858687888990919293949596979899100101102103104105106107108109110111112113114115116117118119120121122123124125126127128129130131132133134135136137138139140141142143144145146147148149150151152153154155156157158159160161162163164165166167168169170171172173174175176177178179180181182183184185186187188189190191192193194195196197198199200201202203204205206207208209210211212213214215216217218219220221222223224225226227228229230231232233234235236237238239240241242243244245246247248249250251252253254255256257258259260261262263264265266267268269270271272273274275276277278279280281282283284285286287288289290291292293294295296297298299300301302303304305306307308309310311312313314315316317318319320321322323324325326327328329330331332333334335336337338339340341342343344345346347348349350351352353354355356357358359360361362363364365366367368369370371372373374375376377378379380381382383384385386387388389390391392393394395396397398399400401402403404405406407408409410411412413414415416417418419420421422423424425426427428429430431432433434435436437438439440441442443444445 | using System;using System.Collections.Generic;using System.Linq;using Aitex.Core.Common;using Aitex.Core.RT.Routine;using Aitex.Core.RT.SCCore;using Aitex.Sorter.Common;using Aitex.Core.RT.Log;using Aitex.Core.Util;using Aitex.Core.RT.DataCenter;using Aitex.Core.RT.RecipeCenter;using Aitex.Core.RT.Fsm;using MECF.Framework.Common.Jobs;using MECF.Framework.Common.Routine;using MECF.Framework.Common.Equipment;using MECF.Framework.Common.SubstrateTrackings;using MECF.Framework.Common.Schedulers;using MECF.Framework.Common.DBCore;using Venus_Core;using Venus_RT.Modules.Schedulers;using Venus_RT.Scheduler;namespace Venus_RT.Modules{    public class ManualTransfer : IRoutine    {        SchedulerTMRobot _tmRobot = (SchedulerTMRobot)Singleton<TransferModule>.Instance.GetScheduler(ModuleName.TMRobot);        SchedulerEfemRobot _efemRobot = (SchedulerEfemRobot)Singleton<TransferModule>.Instance.GetScheduler(ModuleName.EfemRobot);        private Queue<MoveItem> _moveTaskQueue = new Queue<MoveItem>();        private MoveItem _move_item = new MoveItem(ModuleName.System, 0, ModuleName.System, 0, Hand.None);        private MoveItem _current_item = new MoveItem(ModuleName.System, 0, ModuleName.System, 0, Hand.None);        private Guid _wafer_id;        private R_TRIG _wafer_arrive_trig = new R_TRIG();        private MovingStatus _moving_status = MovingStatus.Idle;        private int _tmRobotSingleArmOption = 0;        private int _efemRobotSingleArmOption = 0;        public ManualTransfer()        {            _tmRobotSingleArmOption = SC.GetValue<int>("TM.SingleArmOption");            _efemRobotSingleArmOption = SC.GetValue<int>("EFEM.SingleArmOption");        }        public RState Start(params object[] objs)        {            _tmRobotSingleArmOption = SC.GetValue<int>("TM.SingleArmOption");            _efemRobotSingleArmOption = SC.GetValue<int>("EFEM.SingleArmOption");            // rounding the single arm option            if (_tmRobotSingleArmOption > 2)                _tmRobotSingleArmOption = 0;            if (_efemRobotSingleArmOption > 2)                _efemRobotSingleArmOption = 0;            // RESET            _moveTaskQueue.Clear();            _moving_status = MovingStatus.Idle;            _wafer_arrive_trig.RST = true ;            _move_item.SourceModule = (ModuleName)objs[0];            _move_item.SourceSlot = (int)objs[1];            _move_item.DestinationModule = (ModuleName)objs[2];            _move_item.DestinationSlot = (int)objs[3];            _wafer_id = WaferManager.Instance.GetWafer(_move_item.SourceModule, _move_item.SourceSlot).InnerId;            if (ModuleHelper.IsLoadPort(_move_item.DestinationModule) && !Singleton<TransferModule>.Instance.GetScheduler(_move_item.DestinationModule).IsAvailable)            {                LOG.Write(eEvent.ERR_ROUTER, _move_item.DestinationModule, $"The destination Loadport {_move_item.DestinationModule} is not ready for move wafer.");                return RState.Failed;            }            if (!CheckSingleArmOption(_move_item.DestinationModule, _move_item.DestinationSlot))                return RState.Failed;            if (!CheckSingleArmOption(_move_item.SourceModule, _move_item.SourceSlot))                return RState.Failed;            if (IsCrossTransfer(_move_item))            {                var slot = SelectLLFreeSlot();                if (slot.Module == ModuleName.System)                    return RState.Failed;                // vac to atm                if (ModuleHelper.IsPm(_move_item.SourceModule) || ModuleHelper.IsTMRobot(_move_item.SourceModule))                {                    _moveTaskQueue.Enqueue(new MoveItem(_move_item.SourceModule, _move_item.SourceSlot, slot.Module, slot.Slot, Hand.Blade1));                    if(ModuleHelper.IsEFEMRobot(_move_item.DestinationModule))                    {                        _moveTaskQueue.Enqueue(new MoveItem(slot.Module, slot.Slot, _move_item.DestinationModule, _move_item.DestinationSlot, (Hand)_move_item.DestinationSlot));                    }                    else                    {                        Hand hand = SelectEfemRobotFreeHand();                        if(hand == Hand.None)                        {                            LOG.Write(eEvent.WARN_ROUTER, ModuleName.EfemRobot, "No free efem robot arm for wafer move.");                            return RState.Failed;                        }                        _moveTaskQueue.Enqueue(new MoveItem(slot.Module, slot.Slot, ModuleName.EfemRobot, (int)hand, hand));                        _moveTaskQueue.Enqueue(new MoveItem(ModuleName.EfemRobot, (int)hand, _move_item.DestinationModule, _move_item.DestinationSlot, hand));                    }                }                // atm to vac                else                {                    if (ModuleHelper.IsEFEMRobot(_move_item.SourceModule))                    {                        _moveTaskQueue.Enqueue(new MoveItem(_move_item.SourceModule, _move_item.SourceSlot, slot.Module, slot.Slot, (Hand)_move_item.SourceSlot));                    }                    else                    {                        Hand hand = SelectEfemRobotFreeHand();                        if (hand == Hand.None)                        {                            LOG.Write(eEvent.WARN_ROUTER, ModuleName.EfemRobot, "No free efem robot arm for wafer move.");                            return RState.Failed;                        }                        _moveTaskQueue.Enqueue(new MoveItem(_move_item.SourceModule, _move_item.SourceSlot, ModuleName.EfemRobot, (int)hand, hand));                        _moveTaskQueue.Enqueue(new MoveItem(ModuleName.EfemRobot, (int)hand, slot.Module, slot.Slot, hand));                    }                    _moveTaskQueue.Enqueue(new MoveItem(slot.Module, slot.Slot, _move_item.DestinationModule, _move_item.DestinationSlot, Hand.Blade1));                }            }            else if(IsVacTransfer(_move_item))            {                _moveTaskQueue.Enqueue(_move_item);            }            else // atm transfer            {                if(ModuleHelper.IsEFEMRobot(_move_item.SourceModule))                {                    _moveTaskQueue.Enqueue(new MoveItem(_move_item.SourceModule, _move_item.SourceSlot, _move_item.DestinationModule, _move_item.DestinationSlot, (Hand)_move_item.SourceSlot));                }                else if (ModuleHelper.IsEFEMRobot(_move_item.DestinationModule))                {                    _moveTaskQueue.Enqueue(new MoveItem(_move_item.SourceModule, _move_item.SourceSlot, _move_item.DestinationModule, _move_item.DestinationSlot, (Hand)_move_item.DestinationSlot));                }                else                {                    Hand hand = SelectEfemRobotFreeHand();                    if (hand == Hand.None)                    {                        LOG.Write(eEvent.WARN_ROUTER, ModuleName.EfemRobot, "No free efem robot arm for wafer move.");                        return RState.Failed;                    }                    _moveTaskQueue.Enqueue(new MoveItem(_move_item.SourceModule, _move_item.SourceSlot, ModuleName.EfemRobot, (int)hand, hand));                    _moveTaskQueue.Enqueue(new MoveItem(ModuleName.EfemRobot, (int)hand, _move_item.DestinationModule, _move_item.DestinationSlot, hand));                }            }            _current_item = _moveTaskQueue.Dequeue();            _moving_status = MovingStatus.Waiting;            return RState.Running;        }        public RState Monitor()        {            return MoveWaferForward();        }        public void Abort()        {        }        public void Clear()        {            _moveTaskQueue.Clear();            Singleton<TransferModule>.Instance.GetScheduler(ModuleName.TMRobot).ResetTask();            Singleton<TransferModule>.Instance.GetScheduler(ModuleName.EfemRobot).ResetTask();        }        private RState MoveWaferForward()        {            switch(_moving_status)            {                case MovingStatus.Waiting:                    {                        if(IsCurrentModuleReady())                        {                            // Post current item                            if(IsVacTransfer(_current_item))                            {                                _tmRobot.PostMoveItems(new MoveItem[1] { _current_item });                            }                            else                            {                                _efemRobot.PostMoveItems(new MoveItem[1] { _current_item });                            }                            _moving_status = MovingStatus.Moving;                        }                    }                    break;                case MovingStatus.Moving:                    {                        _wafer_arrive_trig.CLK = IsArriveCurrentTarget();                        if (_wafer_arrive_trig.Q)                        {                            _moving_status = MovingStatus.Idle;                        }                    }                    break;                case MovingStatus.Idle:                    {                        if(IsCurrentModuleReady())                        {                            if(_moveTaskQueue.Count > 0)                            {                                _current_item = _moveTaskQueue.Dequeue();                                _moving_status = MovingStatus.Waiting;                            }                        }                        break;                    }            }            return TransferStatus();        }        private bool IsVacTransfer(MoveItem item)        {            return ModuleHelper.IsPm(item.SourceModule) ||                 ModuleHelper.IsTMRobot(item.SourceModule) ||                 ModuleHelper.IsPm(item.DestinationModule) ||                 ModuleHelper.IsTMRobot(item.DestinationModule);        }        private bool IsCrossTransfer(MoveItem item)        {            if (ModuleHelper.IsLoadLock(item.DestinationModule) || ModuleHelper.IsLoadLock(item.SourceModule))                return false;            if (((ModuleHelper.IsPm(item.SourceModule) || ModuleHelper.IsTMRobot(item.SourceModule)) &&                !ModuleHelper.IsPm(item.DestinationModule) && !ModuleHelper.IsTMRobot(item.DestinationModule)) ||                ((ModuleHelper.IsPm(item.DestinationModule) || ModuleHelper.IsTMRobot(item.DestinationModule)) &&                !ModuleHelper.IsPm(item.SourceModule) && !ModuleHelper.IsTMRobot(item.SourceModule)))                return true;            return false;        }        private bool IsArriveCurrentTarget()        {            var wafer = WaferManager.Instance.GetWafer(_current_item.DestinationModule, _current_item.DestinationSlot);            return !wafer.IsEmpty && wafer.InnerId == _wafer_id;        }        private bool IsCurrentModuleReady()        {            return (IsVacTransfer(_current_item) ? _tmRobot.IsAvailable : _efemRobot.IsAvailable) &&                 _isModuleReady(_current_item.SourceModule) &&                 _isModuleReady(_current_item.DestinationModule);        }        private bool IsTransferError()        {            return (IsVacTransfer(_current_item) ? _tmRobot.IsError : _efemRobot.IsError) ||                _isModuleError(_current_item.SourceModule) ||                _isModuleError(_current_item.DestinationModule);        }        private bool _isModuleReady(ModuleName module)        {            return Singleton<TransferModule>.Instance.GetScheduler(module).IsAvailable;        }        private bool _isModuleError(ModuleName module)        {            return Singleton<TransferModule>.Instance.GetScheduler(module).IsError;        }        private Hand SelectEfemRobotFreeHand()        {            if (WaferManager.Instance.CheckNoWafer(ModuleName.EfemRobot, 0))                return Hand.Blade1;            else if (WaferManager.Instance.CheckNoWafer(ModuleName.EfemRobot, 1))                return Hand.Blade2;            else                return Hand.None;        }        private SlotItem SelectLLFreeSlot()        {            foreach(var ll in new ModuleName[2] { ModuleName.LLA, ModuleName.LLB})            {                if (ModuleHelper.IsInstalled(ll) && _isModuleReady(ll))                {                    for (int i = 0; i < 4; i++)                    {                        if (WaferManager.Instance.CheckNoWafer(ll, i))                            return new SlotItem(ll, i);                    }                }            }            LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, "Cannot move wafer as no valid Loadlock slot");            return new SlotItem(ModuleName.System, -1);        }        private RState TransferStatus()        {            if (IsTransferError())                return RState.Failed;            if (IsCurrentModuleReady() && _moveTaskQueue.Count == 0 && _moving_status == MovingStatus.Idle)                return RState.End;            return RState.Running;        }        private bool CheckSingleArmOption(ModuleName robot, int slot)        {            if(ModuleHelper.IsTMRobot(robot))            {                if (_tmRobotSingleArmOption != 0 && _tmRobotSingleArmOption != slot + 1)                {                    LOG.Write(eEvent.ERR_ROUTER, ModuleName.TMRobot, $"Cannot move the wafer as TM Robot {(Hand)slot} is disabled.");                    return false;                }            }            else if(ModuleHelper.IsEFEMRobot(robot))            {                if (_efemRobotSingleArmOption != 0 && _efemRobotSingleArmOption != slot + 1)                {                    LOG.Write(eEvent.ERR_ROUTER, ModuleName.EfemRobot, $"Cannot move the wafer as EFEM Robot {(Hand)slot} is disabled.");                    return false;                }            }            return true;        }        public int GetSingleArmOption(ModuleName robot)        {            return ModuleHelper.IsTMRobot(robot) ? _tmRobotSingleArmOption : _efemRobotSingleArmOption;        }    }    public class ReturnAllWafer : IRoutine    {        private List<ModuleName> _moduleList = new List<ModuleName> { ModuleName.EfemRobot, ModuleName.Aligner1, ModuleName.Aligner, ModuleName.LLA, ModuleName.LLB, ModuleName.TMRobot, ModuleName.PMA, ModuleName.PMB, ModuleName.PMC, ModuleName.PMD };        private ManualTransfer _manualTransfer;        private Queue<MoveItem> _returnTaskQueue = new Queue<MoveItem>();        private MoveItem _current_item;        public ReturnAllWafer(ManualTransfer manualTransfer)        {            _manualTransfer = manualTransfer;        }        public RState Start(params object[] objs)        {            Singleton<TransferModule>.Instance.GetScheduler(ModuleName.TMRobot).ResetTask();            Singleton<TransferModule>.Instance.GetScheduler(ModuleName.EfemRobot).ResetTask();            foreach(var mod in _moduleList)            {                if (ModuleHelper.IsInstalled(mod) && Singleton<TransferModule>.Instance.GetScheduler(mod).IsAvailable)                {                    if (ModuleHelper.IsEFEMRobot(mod) || ModuleHelper.IsTMRobot(mod))                    {                        if (_manualTransfer.GetSingleArmOption(mod) != 2)                            PushWaferToReturnQueqe(mod, 0);                        if (_manualTransfer.GetSingleArmOption(mod) != 1)                            PushWaferToReturnQueqe(mod, 1);                    }                    else if (ModuleHelper.IsLoadLock(mod))                    {                        int nSlotNumber = SC.GetValue<int>($"{mod}.SlotNumber");                        for (int i = 0; i < nSlotNumber; i++)                        {                            PushWaferToReturnQueqe(mod, i);                        }                    }                    else                    {                        PushWaferToReturnQueqe(mod, 0);                    }                }            }            if (_returnTaskQueue.Count == 0)                return RState.Failed;            _current_item = _returnTaskQueue.Dequeue();            _manualTransfer.Start(_current_item.SourceModule, _current_item.SourceSlot, _current_item.DestinationModule, _current_item.DestinationSlot);            return RState.Running;        }        public RState Monitor()        {            var ret = _manualTransfer.Monitor();            if (ret == RState.End)            {                if (_returnTaskQueue.Count > 0)                {                    _current_item = _returnTaskQueue.Dequeue();                    _manualTransfer.Start(_current_item.SourceModule, _current_item.SourceSlot, _current_item.DestinationModule, _current_item.DestinationSlot);                }                else                    return RState.End;            }            else if (ret == RState.Failed || ret == RState.Timeout)            {                LOG.Write(eEvent.ERR_ROUTINE_FAILED, ModuleName.System,"Manual Transfer",  $"Return Wafer {_current_item.SourceModule}{_current_item.SourceSlot} failed");                return RState.Failed;            }            return RState.Running;        }        public void Abort()        {        }        public void Clear()        {            _returnTaskQueue.Clear();            Singleton<TransferModule>.Instance.GetScheduler(ModuleName.TMRobot).ResetTask();            Singleton<TransferModule>.Instance.GetScheduler(ModuleName.EfemRobot).ResetTask();        }        private void PushWaferToReturnQueqe(ModuleName mod, int nSlot)        {            var wafer = WaferManager.Instance.GetWafer(mod, nSlot);            if (!wafer.IsEmpty)            {                _returnTaskQueue.Enqueue(new MoveItem(mod, nSlot, (ModuleName)wafer.OriginStation, wafer.OriginSlot, Hand.Blade1));            }        }    }}
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