SEMFPlaceRoutine.cs 6.8 KB

123456789101112131415161718192021222324252627282930313233343536373839404142434445464748495051525354555657585960616263646566676869707172737475767778798081828384858687888990919293949596979899100101102103104105106107108109110111112113114115116117118119120121122123124125126127128129130131132133134135136137138139140141142143144145146147148149150151152153154155156157158159160161162163164165166167168169170171172173174175176177178179180181182183184185186187188189190191192193194195196197198199200201202203204205
  1. using Aitex.Core.RT.Log;
  2. using Aitex.Core.RT.Routine;
  3. using Aitex.Core.RT.SCCore;
  4. using Aitex.Core.Util;
  5. using Aitex.Sorter.Common;
  6. using MECF.Framework.Common.Equipment;
  7. using MECF.Framework.Common.Schedulers;
  8. using MECF.Framework.Common.SubstrateTrackings;
  9. using System;
  10. using System.Collections.Generic;
  11. using System.Linq;
  12. using System.Text;
  13. using System.Threading.Tasks;
  14. using Venus_Core;
  15. using Venus_RT.Devices;
  16. using Venus_RT.Devices.PreAligner;
  17. using Venus_RT.Devices.VCE;
  18. using Venus_RT.Modules.VCE;
  19. namespace Venus_RT.Modules.TM.VenusEntity
  20. {
  21. public class SEMFPlaceRoutine : ModuleRoutineBase, IRoutine
  22. {
  23. private enum PlaceStep
  24. {
  25. seWaitModuleReady,
  26. sePrepareModule,
  27. sePlacing,
  28. seNotifyDone
  29. }
  30. private HongHuTM _tm;
  31. private ITransferRobot _robot;
  32. private IPreAlign _vpa;
  33. private VceEntity _vceModule;
  34. private ModuleName _targetModule;
  35. private int _targetSlot;
  36. private int _placingTimeout;
  37. public int currentStepNo;
  38. Hand _hand;
  39. public SEMFPlaceRoutine(HongHuTM tm, ITransferRobot robot, IPreAlign vpa) : base(ModuleName.TM)
  40. {
  41. _tm = tm;
  42. _robot = robot;
  43. _vpa = vpa;
  44. }
  45. public RState Start(params object[] objs)
  46. {
  47. if (!_robot.IsHomed)
  48. {
  49. LOG.Write(eEvent.ERR_TM, Module, $"TM Robot is not homed, please home it first");
  50. return RState.Failed;
  51. }
  52. //MoveItem placeItem = (MoveItem)objs[0];
  53. Enum.TryParse(objs[0].ToString(), out _targetModule);
  54. _targetSlot = Convert.ToInt32(objs[1]);
  55. Enum.TryParse(objs[2].ToString(), out _hand);
  56. //如果目标是Vce 获取vce
  57. if (ModuleHelper.IsVCE(_targetModule) && ModuleHelper.IsInstalled(_targetModule))
  58. {
  59. _vceModule = Singleton<RouteManager>.Instance.GetVCE(_targetModule);
  60. //如果vce有错误 报错
  61. if (_vceModule.IsError)
  62. {
  63. LOG.Write(eEvent.ERR_TM, Module, $"Invalid target module : {_targetModule} is Error! Please solve Error first!");
  64. return RState.Failed;
  65. }
  66. //如果VCE门是关闭的 说明还未进行pump 无法取片等
  67. //if (_tm.VCESlitDoorClosed)
  68. //{
  69. // LOG.Write(eEvent.ERR_TM, Module, $"Invalid target module : {_targetModule} slitdoor not open! Please pump down vce and open it first!");
  70. // return RState.Failed;
  71. //}
  72. }
  73. //如果目标又不是VPA 报错
  74. else if (!ModuleHelper.IsVPA(_targetModule))
  75. {
  76. LOG.Write(eEvent.ERR_TM, Module, $"Invalid target module : {_targetModule} for placing action");
  77. return RState.Failed;
  78. }
  79. //检查目标手臂上有wafer
  80. if (WaferManager.Instance.CheckNoWafer(ModuleName.TMRobot, (int)_hand))
  81. {
  82. LOG.Write(eEvent.ERR_TM, Module, $"Cannot place as TM Robot Arm: {_hand} has no wafer");
  83. return RState.Failed;
  84. }
  85. //检查目标槽位上没有wafer
  86. if (WaferManager.Instance.CheckHasWafer(_targetModule, _targetSlot))
  87. {
  88. LOG.Write(eEvent.ERR_TM, Module, $"Cannot place as {_targetModule} Slot {_targetSlot + 1} has a wafer");
  89. return RState.Failed;
  90. }
  91. //2023/10/13 朱永吉 atm mode的判断不允许自动pump vent 信号不满足手动pump vent
  92. //if (RouteManager.IsATMMode && _targetModule == ModuleName.VCE1)
  93. //{
  94. // if (!_tm.IsVCEATM)
  95. // {
  96. // LOG.Write(eEvent.ERR_TM, Module, $"System in ATM Mode but VCE is not ATM!");
  97. // return RState.Failed;
  98. // }
  99. //
  100. // if (!_tm.IsTMATM)
  101. // {
  102. // LOG.Write(eEvent.ERR_TM, Module, $"System in ATM Mode but TM is not ATM!");
  103. // return RState.Failed;
  104. // }
  105. //}
  106. //else
  107. //{
  108. // if (_tm.IsVCEATM)
  109. // {
  110. // LOG.Write(eEvent.ERR_TM, Module, $"System not in ATM Mode but VCE is ATM!");
  111. // return RState.Failed;
  112. // }
  113. //
  114. // if (_tm.IsTMATM)
  115. // {
  116. // LOG.Write(eEvent.ERR_TM, Module, $"System not in ATM Mode but TM is ATM!");
  117. // return RState.Failed;
  118. // }
  119. //}
  120. Reset();
  121. _placingTimeout = SC.GetValue<int>($"TM.PlaceTimeout") * 1000;
  122. return Runner.Start(Module, $"Place to {_targetModule}");
  123. }
  124. public RState Monitor()
  125. {
  126. Runner.Wait(PlaceStep.seWaitModuleReady, CheckModuleReady, _delay_60s)
  127. .Run(PlaceStep.sePrepareModule, PrepareModule, CheckModuleReady)
  128. .Run(PlaceStep.sePlacing, Placing, WaitPlaceDone, _placingTimeout)
  129. .End(PlaceStep.seNotifyDone, NullFun, 500);
  130. return Runner.Status;
  131. }
  132. private bool PrepareModule()
  133. {
  134. switch (_targetModule)
  135. {
  136. case ModuleName.VCE1:
  137. _vceModule.PostMsg(VceMSG.Goto, _targetSlot);
  138. return true;//移动到目标槽位
  139. case ModuleName.VPA:
  140. return true;//10/17暂时为true 后可能要求旋转
  141. default:
  142. return false;
  143. }
  144. }
  145. private bool WaitPlaceDone()
  146. {
  147. if (_robot.Status == RState.Running)
  148. {
  149. return false;
  150. }
  151. else if (_robot.Status == RState.End)
  152. {
  153. WaferManager.Instance.WaferMoved(ModuleName.TMRobot, (int)_hand, _targetModule, _targetSlot);
  154. return true;
  155. }
  156. // timeout failed
  157. else
  158. {
  159. Runner.Stop($"TM Robot Placing failed, {_robot.Status}");
  160. return true;
  161. }
  162. }
  163. private bool Placing()
  164. {
  165. return _robot.Place(_targetModule, 0, _hand);
  166. }
  167. private bool CheckModuleReady()
  168. {
  169. switch (_targetModule)
  170. {
  171. case ModuleName.VCE1:
  172. return _vceModule.IsIdle;
  173. case ModuleName.VPA:
  174. return _vpa.Status == RState.End;
  175. default:
  176. return false;
  177. }
  178. }
  179. public void Abort()
  180. {
  181. }
  182. }
  183. }