EfemEntity.cs 33 KB

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  1. using System;
  2. using System.Collections.Generic;
  3. using Aitex.Core.Common;
  4. using Aitex.Core.RT.DataCenter;
  5. using Aitex.Core.RT.Event;
  6. using Aitex.Core.RT.Fsm;
  7. using Aitex.Core.RT.OperationCenter;
  8. using Aitex.Core.RT.SCCore;
  9. using Aitex.Core.Utilities;
  10. using Aitex.Sorter.Common;
  11. using MECF.Framework.Common.Equipment;
  12. using MECF.Framework.Common.Schedulers;
  13. using MECF.Framework.Common.SubstrateTrackings;
  14. using Venus_Core;
  15. using Venus_RT;
  16. using Venus_RT.Devices;
  17. using Venus_RT.Devices.YASKAWA;
  18. using Venus_RT.Devices.EFEM;
  19. using Venus_RT.Modules.LPs;
  20. using Venus_RT.Modules.EFEM;
  21. namespace Venus_RT.Modules
  22. {
  23. class EfemEntity : Entity, IEntity, IModuleEntity
  24. {
  25. //private int _bigWafer = 0;
  26. //private int _midWafer = 0;
  27. //private int _smallWafer = 0;
  28. public enum STATE
  29. {
  30. Unknown, // 0
  31. Initializing, // 1
  32. Idle, // 2
  33. Error, // 3
  34. Picking, // 4
  35. Placing, // 5
  36. Aligning, // 6
  37. Mapping, // 7
  38. Init, // 8
  39. Orgshing, // 9
  40. Lifting, // 10
  41. InitingAL, // 11
  42. InitingRB, // 12
  43. Extending, // 13
  44. Retracting, // 14
  45. //SettingLamp, // 15
  46. Swapping,
  47. Gotoing,
  48. Gripping,
  49. Ungripping,
  50. Fliping,
  51. }
  52. public enum MSG
  53. {
  54. HomeAll, // 0
  55. Pick, // 1
  56. Place, // 2
  57. Align, // 3
  58. ActionDone, // 4
  59. MoveCmd, // 6
  60. Recover, // 8
  61. Goto, // 9
  62. Error, // 10
  63. Online, // 11
  64. CommReady, // 12
  65. Lift, // 13
  66. HomeAL, // 14
  67. HomeRB, // 15
  68. Extend, // 16
  69. Retract, // 17
  70. PMLiftPinUp, // 18
  71. PMLiftPinDown, // 19
  72. TurnOffBuzzer,
  73. Abort,
  74. Map,
  75. ToInit,
  76. Cool,
  77. Swap,
  78. Grip,
  79. Ungrip,
  80. Flip,
  81. LiftActionDone,
  82. }
  83. public enum EfemType
  84. {
  85. FutureEfem = 1,
  86. JetEfem = 2,
  87. BrooksEFEM = 3,
  88. }
  89. public bool IsIdle
  90. {
  91. get { return fsm.State == (int)STATE.Idle; }
  92. }
  93. public bool IsError
  94. {
  95. get { return fsm.State == (int)STATE.Error; }
  96. }
  97. public bool IsInit
  98. {
  99. get { return fsm.State == (int)STATE.Unknown || fsm.State == (int)STATE.Init; }
  100. }
  101. public bool IsBusy
  102. {
  103. get { return !IsInit && !IsError && !IsIdle; }
  104. }
  105. public bool IsOnline { get; internal set; }
  106. public bool Check(int msg, out string reason, params object[] args)
  107. {
  108. throw new NotImplementedException();
  109. }
  110. // Fields
  111. //
  112. private readonly string Name;
  113. private readonly EfemBase _efem;
  114. private readonly LoadPortModule[] _lpms = new LoadPortModule[3];
  115. private readonly EfemType _efemType;
  116. public EfemBase EfemDevice => _efem;
  117. public EfemType EFEMType => _efemType;
  118. // routine
  119. private readonly EfemPickRoutine _pickRoutine;
  120. private readonly EfemPlaceRoutine _placeRoutine;
  121. private readonly EfemSwapRoutine _swapRoutine;
  122. private readonly EfemHomeRoutine _homeRoutine;
  123. private readonly EFEMAlignRoutine _alignRoutine;
  124. private string LiftMessage;
  125. // Constructor
  126. //
  127. public EfemEntity()
  128. {
  129. _efemType = (EfemType)SC.GetValue<int>($"EFEM.EfemType");
  130. _efem = new JetEfem();
  131. Name = ModuleName.EFEM.ToString();
  132. _homeRoutine = new EfemHomeRoutine(_efem);
  133. _pickRoutine = new EfemPickRoutine(_efem);
  134. _placeRoutine = new EfemPlaceRoutine(_efem);
  135. _swapRoutine = new EfemSwapRoutine(_efem);
  136. _alignRoutine = new EFEMAlignRoutine(_efem);
  137. InitFsmMap();
  138. }
  139. public void NotifyLP(ModuleName mod, LoadportEntity.MSG msg)
  140. {
  141. _lpms[mod - ModuleName.LP1].PostMsg(msg);
  142. }
  143. public void NotifyLPError(ModuleName mod )
  144. {
  145. _lpms[mod - ModuleName.LP1].PostMsg(LoadportEntity.MSG.ActionDone);
  146. //_lpms[mod - ModuleName.LP1]..OnError();
  147. }
  148. protected override bool Init()
  149. {
  150. _lpms[0] = new LoadPortModule(ModuleName.LP1, _efem);
  151. _lpms[1] = new LoadPortModule(ModuleName.LP2, _efem);
  152. _lpms[2] = new LoadPortModule(ModuleName.LP3, _efem);
  153. _lpms[0].Initialize();
  154. _lpms[1].Initialize();
  155. _lpms[2].Initialize();
  156. OP.Subscribe($"{ModuleName.EFEM}.{EfemOperation.Home}", (cmd, args) => { PostMsg(MSG.HomeAll); return true; });
  157. OP.Subscribe($"{ModuleName.EFEM}.{EfemOperation.ClearError}", (cmd, args) => { PostMsg(MSG.Recover); return true; });
  158. OP.Subscribe($"{ModuleName.EFEM}.{EfemOperation.TurnOffBuzzer}", (cmd, args) => { PostMsg(MSG.TurnOffBuzzer); return true; });
  159. //OP.Subscribe($"{ModuleName.EFEM}.{EfemOperation.SwitchOnBuzzerAndRed}", (cmd, args) => { PostMsg(MSG.SwitchOnBuzzerAndRed); return true; });
  160. OP.Subscribe($"{ModuleName.EFEM}.Online", (cmd, args) => { PostMsg(MSG.Online); return true; });
  161. OP.Subscribe($"{ModuleName.EfemRobot}.{EfemOperation.Pick}", (cmd, args) => { PostMsg(MSG.Pick, args[0]); return true; });
  162. OP.Subscribe($"{ModuleName.EfemRobot}.{EfemOperation.Place}", (cmd, args) => { PostMsg(MSG.Place, args[0]); return true; });
  163. OP.Subscribe($"{ModuleName.EfemRobot}.{EfemOperation.Swap}", (cmd, args) => { PostMsg(MSG.Swap, args[0]); return true; });
  164. OP.Subscribe($"{ModuleName.EfemRobot}.{EfemOperation.Abort}", (cmd, args) => { PostMsg(MSG.Abort); return true; });
  165. OP.Subscribe($"{ModuleName.EfemRobot}.{EfemOperation.Home}", (cmd, args) => { PostMsg(MSG.HomeRB); return true; });
  166. OP.Subscribe($"{ModuleName.EfemRobot}.{EfemOperation.Grip}", (cmd, args) =>
  167. {
  168. bool isGrip = ((string)args[0]).ToLower() == "on";
  169. PostMsg(isGrip ? MSG.Grip : MSG.Ungrip, args[1]);
  170. return true;
  171. });
  172. //OP.Subscribe($"{ModuleName.EfemRobot}.{EfemOperation.Flip}", (cmd, args) => { PostMsg(MSG.Flip, args[0]); return true; });
  173. OP.Subscribe($"{ModuleName.Aligner1}.{EfemOperation.Home}", (cmd, args) => { PostMsg(MSG.HomeAL, ModuleName.Aligner1); return true; });
  174. OP.Subscribe($"{ModuleName.Aligner2}.{EfemOperation.Home}", (cmd, args) => { PostMsg(MSG.HomeAL, ModuleName.Aligner2); return true; });
  175. OP.Subscribe($"{ModuleName.Cooling1}.{EfemOperation.Home}", (cmd, args) => { PostMsg(MSG.HomeAL, ModuleName.Cooling1); return true; });
  176. OP.Subscribe($"{ModuleName.Cooling2}.{EfemOperation.Home}", (cmd, args) => { PostMsg(MSG.HomeAL, ModuleName.Cooling2); return true; });
  177. OP.Subscribe($"{ModuleName.Aligner1}.{EfemOperation.Align}", (cmd, args) => { PostMsg(MSG.Align, ModuleName.Aligner1, args[0], args[1]); return true; });
  178. OP.Subscribe($"{ModuleName.Aligner2}.{EfemOperation.Align}", (cmd, args) => { PostMsg(MSG.Align, ModuleName.Aligner2); return true; });
  179. OP.Subscribe($"{ModuleName.Cooling1}.{EfemOperation.Align}", (cmd, args) => { PostMsg(MSG.Align, ModuleName.Cooling1); return true; });
  180. OP.Subscribe($"{ModuleName.Cooling2}.{EfemOperation.Align}", (cmd, args) => { PostMsg(MSG.Align, ModuleName.Cooling2); return true; });
  181. OP.Subscribe($"{ModuleName.Aligner1}.{EfemOperation.Lift}", (cmd, args) => { PostMsg(MSG.Lift, ModuleName.Aligner1); return true; });
  182. OP.Subscribe($"{ModuleName.Aligner2}.{EfemOperation.Lift}", (cmd, args) => { PostMsg(MSG.Lift, ModuleName.Aligner2); return true; });
  183. OP.Subscribe($"{ModuleName.Cooling1}.{EfemOperation.Lift}", (cmd, args) => { PostMsg(MSG.Lift, ModuleName.Cooling1); return true; });
  184. OP.Subscribe($"{ModuleName.Cooling2}.{EfemOperation.Lift}", (cmd, args) => { PostMsg(MSG.Lift, ModuleName.Cooling2); return true; });
  185. DATA.Subscribe($"{Name}.FsmState", () => ((STATE)fsm.State).ToString());
  186. DATA.Subscribe($"{Name}.FsmPrevState", () => ((STATE)fsm.PrevState).ToString());
  187. DATA.Subscribe($"{Name}.FsmLastMessage", GetFsmLastMessage);
  188. return true;
  189. }
  190. private void InitFsmMap()
  191. {
  192. fsm = new StateMachine<EfemEntity>("EFEM", (int)STATE.Unknown, 50);
  193. fsm.EnableRepeatedMsg(true);
  194. //AnyStateTransition(FSM_MSG.TIMER, fnMonitor, FSM_STATE.SAME);
  195. AnyStateTransition(MSG.TurnOffBuzzer, fnTurnOffBuzzer, FSM_STATE.SAME);
  196. AnyStateTransition(MSG.Recover, fnRecover, STATE.Idle);
  197. AnyStateTransition(MSG.Error, fnError, STATE.Error);
  198. AnyStateTransition(MSG.Online, fnOnline, FSM_STATE.SAME);
  199. AnyStateTransition(MSG.Abort, fnAbortRobot, STATE.Idle);
  200. AnyStateTransition(MSG.ToInit, fnToInit, STATE.Init);
  201. AnyStateTransition(MSG.CommReady, fnCommReady, STATE.Init);
  202. Transition(STATE.Init, FSM_MSG.TIMER, fnMonitor, STATE.Init);
  203. Transition(STATE.Idle, FSM_MSG.TIMER, fnMonitor, STATE.Idle);
  204. Transition(STATE.Error, FSM_MSG.TIMER, fnMonitor, STATE.Error);
  205. // Home
  206. Transition(STATE.Init, MSG.HomeAll, fnHomeAll, STATE.Initializing);
  207. Transition(STATE.Idle, MSG.HomeAll, fnHomeAll, STATE.Initializing);
  208. Transition(STATE.Error, MSG.HomeAll, fnHomeAll, STATE.Initializing);
  209. Transition(STATE.Initializing, FSM_MSG.TIMER, fnHomingTimeout, STATE.Idle);
  210. // Home Robot
  211. Transition(STATE.Idle, MSG.HomeRB, fnHomeRobot, STATE.InitingRB);
  212. Transition(STATE.InitingRB, FSM_MSG.TIMER, fnHomingTimeout, STATE.Idle);
  213. // Home Aligner
  214. Transition(STATE.Idle, MSG.HomeAL, fnHomeAligner, STATE.InitingAL);
  215. Transition(STATE.InitingAL, FSM_MSG.TIMER, fnHomingTimeout, STATE.Idle);
  216. // Pick wafer
  217. Transition(STATE.Idle, MSG.Pick, FnStartPick, STATE.Picking);
  218. Transition(STATE.Picking, FSM_MSG.TIMER, FnPickTimeout, STATE.Idle);
  219. Transition(STATE.Picking, MSG.Abort, FnAbortPick, STATE.Idle);
  220. // Place wafer
  221. Transition(STATE.Idle, MSG.Place, FnStartPlace, STATE.Placing);
  222. Transition(STATE.Placing, FSM_MSG.TIMER, FnPlaceTimeout, STATE.Idle);
  223. Transition(STATE.Placing, MSG.Abort, FnAbortPlace, STATE.Idle);
  224. // Swap wafer with LL sequence
  225. Transition(STATE.Idle, MSG.Swap, FnStartSwap, STATE.Swapping);
  226. Transition(STATE.Swapping, FSM_MSG.TIMER, FnSwapTimeout, STATE.Idle);
  227. Transition(STATE.Swapping, MSG.Abort, FnAbortSwap, STATE.Idle);
  228. // Goto
  229. Transition(STATE.Idle, MSG.Goto, fnGoto, STATE.Gotoing);
  230. Transition(STATE.Gotoing, MSG.ActionDone, fnActionDone, STATE.Idle);
  231. // Map
  232. Transition(STATE.Idle, MSG.Map, fnMap, STATE.Mapping);
  233. Transition(STATE.Mapping, MSG.ActionDone, fnActionDone, STATE.Idle);
  234. // Grip
  235. Transition(STATE.Idle, MSG.Grip, fnGrip, STATE.Gripping);
  236. Transition(STATE.Gripping, MSG.ActionDone, fnActionDone, STATE.Idle);
  237. // Ungrip
  238. Transition(STATE.Idle, MSG.Ungrip, fnUngrip, STATE.Ungripping);
  239. Transition(STATE.Ungripping, MSG.ActionDone, fnActionDone, STATE.Idle);
  240. // Aligner
  241. Transition(STATE.Idle, MSG.Lift, fnLift, STATE.Lifting);
  242. //Transition(STATE.Lifting, MSG.LiftActionDone, fnActionDone, STATE.Idle);
  243. Transition(STATE.Lifting, FSM_MSG.TIMER, fnLiftTimeout, STATE.Idle);
  244. Transition(STATE.Idle, MSG.Align, fnAlign, STATE.Aligning);
  245. Transition(STATE.Aligning, FSM_MSG.TIMER, fnAlignTimeout, STATE.Idle);
  246. Transition(STATE.Aligning, MSG.ActionDone, fnActionDone, STATE.Idle);
  247. EnumLoop<STATE>.ForEach((item) => { fsm.MapState((int)item, item.ToString()); });
  248. EnumLoop<MSG>.ForEach((item) => { fsm.MapMessage((int)item, item.ToString()); });
  249. Running = true;
  250. }
  251. private bool fnCommReady(object[] param)
  252. {
  253. return true;
  254. }
  255. private bool fnHomeAll(object[] param)
  256. {
  257. return _homeRoutine.Start(ModuleName.EFEM) == RState.Running;
  258. }
  259. private bool fnHomingTimeout(object[] param)
  260. {
  261. RState ret = _homeRoutine.Monitor();
  262. if (ret == RState.Failed || ret == RState.Timeout)
  263. {
  264. PostMsg(MSG.Error);
  265. return false;
  266. }
  267. return ret == RState.End;
  268. }
  269. private bool fnHomeRobot(object[] param)
  270. {
  271. return _homeRoutine.Start(ModuleName.EfemRobot) == RState.Running;
  272. }
  273. private bool fnHomeAligner(object[] param)
  274. {
  275. // module
  276. ModuleName unit = ModuleName.EFEM;
  277. if (param[0] is string s1)
  278. unit = ModuleNameString.ToEnum(s1);
  279. else if (param[0] is ModuleName mod)
  280. unit = mod;
  281. else
  282. throw new ArgumentException("Argument error");
  283. return _homeRoutine.Start(unit) == RState.Running;
  284. }
  285. private bool fnActionDone(object[] param)
  286. {
  287. return false;
  288. }
  289. public bool CheckToPostMessage(int msg, params object[] args)
  290. {
  291. if (!fsm.FindTransition(fsm.State, msg))
  292. {
  293. EV.PostWarningLog(Name, $"{Name} is in {(STATE)fsm.State} state,can not do {(MSG)msg}");
  294. return false;
  295. }
  296. Running = true;
  297. fsm.PostMsg(msg, args);
  298. return true;
  299. }
  300. private bool fnMonitor(object[] param)
  301. {
  302. _efem.Monitor();
  303. _debugRoutine();
  304. return true;
  305. }
  306. private bool fnOnline(object[] param)
  307. {
  308. bool bOnlineFlag = (bool)param[0];
  309. if (_efem is EfemBase efem)
  310. {
  311. efem.SetOnline(bOnlineFlag);
  312. }
  313. return true;
  314. }
  315. private string GetFsmLastMessage()
  316. {
  317. int msg = fsm.LastMsg;
  318. if (msg >= (int)MSG.HomeAll && msg <= (int)MSG.Error)
  319. return ((MSG)msg).ToString();
  320. if (msg == (int)FSM_MSG.TIMER)
  321. return "Timer";
  322. return msg.ToString();
  323. }
  324. private bool fnError(object[] param)
  325. {
  326. return true;
  327. }
  328. private bool fnToInit(object[] param)
  329. {
  330. return true;
  331. }
  332. private bool fnRecover(object[] param)
  333. {
  334. _efem.ClearError();
  335. //_efem.ExecuteAction();
  336. return true;
  337. }
  338. private bool fnAbortRobot(object[] param)
  339. {
  340. //_efem.ExecuteAction();
  341. return true;
  342. }
  343. private bool fnSetLED(object[] param)
  344. {
  345. LightType light = (LightType)param[0];
  346. LightStatus st = (LightStatus)param[1];
  347. _efem.SetLamp(light, st);
  348. return true;
  349. }
  350. private bool fnTurnOffBuzzer(object[] param)
  351. {
  352. return false;
  353. }
  354. private bool FnStartPick(object[] param)
  355. {
  356. return _pickRoutine.Start(param) == RState.Running;
  357. }
  358. private bool FnPickTimeout(object[] param)
  359. {
  360. RState ret = _pickRoutine.Monitor();
  361. if (ret == RState.Failed || ret == RState.Timeout)
  362. {
  363. PostMsg(MSG.Error);
  364. return false;
  365. }
  366. return ret == RState.End;
  367. }
  368. private bool FnAbortPick(object[] param)
  369. {
  370. _pickRoutine.Abort();
  371. return true;
  372. }
  373. private bool FnStartPlace(object[] param)
  374. {
  375. return _placeRoutine.Start(param) == RState.Running;
  376. }
  377. private bool FnPlaceTimeout(object[] param)
  378. {
  379. RState ret = _placeRoutine.Monitor();
  380. if (ret == RState.Failed || ret == RState.Timeout)
  381. {
  382. PostMsg(MSG.Error);
  383. return false;
  384. }
  385. return ret == RState.End;
  386. }
  387. private bool FnAbortPlace(object[] param)
  388. {
  389. _placeRoutine.Abort();
  390. return true;
  391. }
  392. private bool FnStartSwap(object[] param)
  393. {
  394. return _swapRoutine.Start(param) == RState.Running;
  395. }
  396. private bool FnSwapTimeout(object[] param)
  397. {
  398. RState ret = _swapRoutine.Monitor();
  399. if (ret == RState.Failed || ret == RState.Timeout)
  400. {
  401. PostMsg(MSG.Error);
  402. return false;
  403. }
  404. return ret == RState.End;
  405. }
  406. private bool FnAbortSwap(object[] param)
  407. {
  408. _swapRoutine.Abort();
  409. return true;
  410. }
  411. private bool fnGoto(object[] param)
  412. {
  413. // module
  414. ModuleName unit = ModuleName.EFEM;
  415. if (param[0] is string s1)
  416. unit = ModuleNameString.ToEnum(s1);
  417. else if (param[0] is ModuleName mod)
  418. unit = mod;
  419. else
  420. throw new ArgumentException("Argument error");
  421. _efem.Goto(unit, Hand.Blade1);
  422. return true;
  423. }
  424. private bool fnLift(object[] param)
  425. {
  426. // module
  427. ModuleName unit = ModuleName.EFEM;
  428. if (param[0] is string s1)
  429. unit = ModuleNameString.ToEnum(s1);
  430. else if (param[0] is ModuleName mod)
  431. unit = mod;
  432. else
  433. throw new ArgumentException("Argument error");
  434. bool isUp = true;
  435. if (param.Length > 1)
  436. {
  437. isUp = (bool) param[1];
  438. }
  439. if (isUp)
  440. {
  441. if (!_efem.SetPinUp(unit))
  442. return false;
  443. }
  444. else
  445. {
  446. if (!_efem.SetPinDown(unit))
  447. return false;
  448. }
  449. LiftMessage = isUp ? "Up" : "Down";
  450. return true;
  451. }
  452. private bool fnLiftTimeout(object[] param)
  453. {
  454. if (LiftMessage == "Up")
  455. {
  456. return _efem.LiftIsDown == false && _efem.LiftIsUp == true;
  457. }
  458. else if (LiftMessage == "Down")
  459. {
  460. return _efem.LiftIsDown == true && _efem.LiftIsUp == false;
  461. }
  462. return false;
  463. }
  464. private bool fnAlign(object[] param)
  465. {
  466. // module
  467. //ModuleName unit = ModuleName.EFEM;
  468. //if (param.Length < 2)
  469. //{
  470. // return _efem.Align(unit, 180, 1000, WaferSize.WS12);
  471. //}
  472. //if (param[0] is string s1)
  473. // unit = ModuleNameString.ToEnum(s1);
  474. //else if (param[0] is ModuleName mod)
  475. // unit = mod;
  476. //else
  477. // throw new ArgumentException("Argument error");
  478. //// wafer size
  479. //WaferSize ws1 = WaferSize.WS0;
  480. //if (param[1] is string s2)
  481. //{
  482. // if (Enum.TryParse(s2, out WaferSize p5))
  483. // ws1 = p5;
  484. //}
  485. //else if (param[1] is WaferSize p6)
  486. //{
  487. // ws1 = p6;
  488. //}
  489. //if (!_efem.Align(unit, 180,1000, ws1))
  490. // return false;
  491. return _alignRoutine.Start(param) == RState.Running;
  492. }
  493. private bool fnAlignTimeout(object[] param)
  494. {
  495. RState ret = _alignRoutine.Monitor();
  496. if (ret == RState.Failed || ret == RState.Timeout)
  497. {
  498. PostMsg(MSG.Error);
  499. return false;
  500. }
  501. return ret == RState.End;
  502. }
  503. private bool fnMap(object[] param)
  504. {
  505. // module
  506. ModuleName unit = ModuleName.EFEM;
  507. if (param[0] is string s1)
  508. unit = ModuleNameString.ToEnum(s1);
  509. else if (param[0] is ModuleName mod)
  510. unit = mod;
  511. else
  512. throw new ArgumentException("Argument error");
  513. if (!_efem.Map(unit))
  514. return false;
  515. return true;
  516. }
  517. private bool fnGrip(object[] param)
  518. {
  519. Hand arm = (Hand)Enum.Parse(typeof(Hand), (string)param[0]);
  520. if (!_efem.Grip(arm, true))
  521. return false;
  522. return true;
  523. }
  524. private bool fnUngrip(object[] param)
  525. {
  526. Hand arm = (Hand)Enum.Parse(typeof(Hand), (string)param[0]);
  527. if (!_efem.Grip(arm, false))
  528. return false;
  529. return true;
  530. }
  531. public int Invoke(string function, params object[] args)
  532. {
  533. switch (function)
  534. {
  535. case "Home":
  536. CheckToPostMessage((int)MSG.HomeAll);
  537. return (int)MSG.HomeAll;
  538. }
  539. return (int)FSM_MSG.NONE;
  540. }
  541. public bool CheckAcked(int msg)
  542. {
  543. return fsm.CheckExecuted(msg);
  544. }
  545. internal void InvokeReset()
  546. {
  547. if (fsm.State == (int) STATE.Error)
  548. {
  549. PostMsg((int)MSG.Recover);
  550. }
  551. }
  552. public int InvokeAlign(string module, float time)
  553. {
  554. if (CheckToPostMessage((int)MSG.Align, module, time))
  555. return (int)MSG.Align;
  556. return (int)FSM_MSG.NONE;
  557. }
  558. public int InvokeLiftDown(string module)
  559. {
  560. if (CheckToPostMessage((int)MSG.Lift, module, false))
  561. return (int)MSG.Lift;
  562. return (int)FSM_MSG.NONE;
  563. }
  564. public int InvokePick(ModuleName source, int slot, Hand hand, WaferSize size)
  565. {
  566. if (CheckToPostMessage((int)MSG.Pick, source, slot, hand, size))
  567. return (int)MSG.Pick;
  568. return (int)FSM_MSG.NONE;
  569. }
  570. public int InvokeGoto(ModuleName source, int slot)
  571. {
  572. if (CheckToPostMessage((int)MSG.Goto, source, slot))
  573. return (int)MSG.Goto;
  574. return (int)FSM_MSG.NONE;
  575. }
  576. public int InvokePlace(ModuleName target, int slot, Hand hand, WaferSize size)
  577. {
  578. if (CheckToPostMessage((int)MSG.Place, target, slot, hand, size))
  579. return (int)MSG.Place;
  580. return (int)FSM_MSG.NONE;
  581. }
  582. public int InvokePickAndPlace(ModuleName targetModule, Hand pickHand, int pickSlot, Hand placeHand, int placeSlot, WaferSize size)
  583. {
  584. if (CheckToPostMessage((int)MSG.Swap, targetModule, pickSlot, pickHand, placeHand, placeSlot, size))
  585. return (int)MSG.Swap;
  586. return (int)FSM_MSG.NONE;
  587. }
  588. public int InvokeMap(string target )
  589. {
  590. if (CheckToPostMessage((int)MSG.Map, target ))
  591. return (int)MSG.Map;
  592. return (int)FSM_MSG.NONE;
  593. }
  594. public int InvokeFlip(Hand hand)
  595. {
  596. if (CheckToPostMessage((int)MSG.Flip, hand))
  597. return (int)MSG.Flip;
  598. return (int)FSM_MSG.NONE;
  599. }
  600. public bool IsPrepareTransferReady(ModuleName module, EnumTransferType type, int slot)
  601. {
  602. //if (type == EnumTransferType.Pick)
  603. //{
  604. // //需要补充:判断LP 放好了,而且已经map过。
  605. // return _efem[module].HasCassette && _efem[module].IsMapped;
  606. //}
  607. //else if (type == EnumTransferType.Place)
  608. //{
  609. // //需要补充:判断LP 放好了,而且已经map过。
  610. // return _efem[module].HasCassette && _efem[module].IsMapped;
  611. //}
  612. return false;
  613. }
  614. internal bool CheckReadyRunNewJob(ModuleName module)
  615. {
  616. //???
  617. return true;
  618. }
  619. internal bool CheckReadyTransfer(ModuleName module)
  620. {
  621. //return _efem[module].HasCassette && _efem[module].IsMapped;
  622. return true;
  623. }
  624. internal bool CheckPlaced(ModuleName module)
  625. {
  626. //return _efem[module].HasCassette;
  627. return true;
  628. }
  629. internal void NoteJobStart(ModuleName module)
  630. {
  631. //_efem[module].NoteJobStart();
  632. }
  633. internal void NoteJobComplete(ModuleName module)
  634. {
  635. //_efem[module].NoteJobComplete();
  636. }
  637. private void _debugRoutine()
  638. {
  639. int flag = 0;
  640. // Test Home routine
  641. if (flag == 1)
  642. {
  643. PostMsg(MSG.HomeAll);
  644. }
  645. else if (flag == 2)
  646. {
  647. WaferManager.Instance.CreateWafer(ModuleName.Aligner1, 0, WaferStatus.Normal);
  648. WaferManager.Instance.DeleteWafer(ModuleName.EfemRobot, 0);
  649. var item = new MoveItem(ModuleName.Aligner1, 0, ModuleName.EfemRobot, 0, Hand.Blade1);
  650. var items = new Queue<MoveItem>();
  651. items.Enqueue(item);
  652. PostMsg(MSG.Pick, items);
  653. }
  654. else if (flag == 3)
  655. {
  656. var item = new MoveItem( ModuleName.EfemRobot, 0, ModuleName.Aligner1, 0, Hand.Blade1);
  657. var items = new Queue<MoveItem>();
  658. items.Enqueue(item);
  659. PostMsg(MSG.Place, items);
  660. }
  661. else if (flag == 4)
  662. {
  663. WaferManager.Instance.CreateWafer(ModuleName.LLA, 0, WaferStatus.Normal);
  664. WaferManager.Instance.CreateWafer(ModuleName.LLA, 1, WaferStatus.Normal);
  665. WaferManager.Instance.DeleteWafer(ModuleName.LLA, 2);
  666. WaferManager.Instance.DeleteWafer(ModuleName.LLA, 3);
  667. WaferManager.Instance.CreateWafer(ModuleName.EfemRobot, 0, WaferStatus.Normal);
  668. WaferManager.Instance.CreateWafer(ModuleName.EfemRobot, 1, WaferStatus.Normal);
  669. var item = new MoveItem(ModuleName.EfemRobot, 0, ModuleName.LLA, 2, Hand.Blade1);
  670. var items = new Queue<MoveItem>();
  671. items.Enqueue(item);
  672. item = new MoveItem(ModuleName.EfemRobot, 1, ModuleName.LLA, 3, Hand.Blade2);
  673. items.Enqueue(item);
  674. item = new MoveItem(ModuleName.LLA, 0, ModuleName.EfemRobot, 0, Hand.Blade1);
  675. items.Enqueue(item);
  676. item = new MoveItem(ModuleName.LLA, 1, ModuleName.EfemRobot, 1, Hand.Blade2);
  677. items.Enqueue(item);
  678. PostMsg(MSG.Swap, items);
  679. }
  680. else if (flag == 5)
  681. {
  682. PostMsg(MSG.HomeRB);
  683. }
  684. else if (flag == 6)
  685. {
  686. PostMsg(MSG.HomeAL, ModuleName.Aligner1);
  687. }
  688. else if (flag == 8)
  689. {
  690. OP.DoOperation("LP1.Load");
  691. }
  692. else if(flag == 9)
  693. {
  694. OP.DoOperation("LP1.Unload");
  695. }
  696. }
  697. }
  698. /// <summary>
  699. /// LP entity
  700. /// </summary>
  701. class LoadportEntity : Entity, IEntity
  702. {
  703. private enum STATE
  704. {
  705. Unknown,
  706. Idle, // 1
  707. Initializing, // 2
  708. Initialized, // 3
  709. Mapping, // 4
  710. Mapped, // 5
  711. }
  712. public enum MSG
  713. {
  714. Home, // 0
  715. Map, // 1
  716. ActionDone, // 2
  717. RecHwMsg, // 3
  718. Recover, // 4
  719. Abort, // 5
  720. Online, // 6
  721. Error // 7
  722. }
  723. private readonly EfemBase _efem;
  724. private ModuleName Module { get; }
  725. public LoadportEntity(ModuleName mod, EfemBase efem)
  726. {
  727. this.Module = mod;
  728. _efem = efem;
  729. InitFsmMap();
  730. OP.Subscribe($"{Module}.Home", (cmd, args) => { PostMsg(MSG.Home); return true; });
  731. OP.Subscribe($"{Module}.Abort", (cmd, args) => { PostMsg(MSG.Abort); return true; });
  732. //OP.Subscribe($"{Module}.Map", (cmd, args) => { PostMsg(MSG.Map); return true; });
  733. OP.Subscribe($"{Module}.Online", (cmd, args) => { PostMsg(MSG.Online); return true; });
  734. DATA.Subscribe($"{Module}.Status", () => ((STATE)fsm.State).ToString());
  735. DATA.Subscribe($"{Module}.FsmState", () => ((STATE)fsm.State).ToString());
  736. DATA.Subscribe($"{Module}.FsmPrevState", () => ((STATE)fsm.PrevState).ToString());
  737. DATA.Subscribe($"{Module}.FsmLastMessage", GetFsmLastMessage);
  738. }
  739. private string GetFsmLastMessage()
  740. {
  741. int msg = fsm.LastMsg;
  742. if (msg >= (int)MSG.Home && msg <= (int)MSG.Error)
  743. return ((MSG)msg).ToString();
  744. if (msg == (int)FSM_MSG.TIMER)
  745. return "Timer";
  746. return msg.ToString();
  747. }
  748. private void InitFsmMap()
  749. {
  750. fsm = new StateMachine<LoadportEntity>($"LPM_{Module}", (int)STATE.Idle, 500);
  751. AnyStateTransition(FSM_MSG.TIMER, fnMonitor, FSM_STATE.SAME);
  752. //AnyStateTransition(MSG.RecHwMsg, fnRecMsg, FSM_STATE.SAME);
  753. AnyStateTransition(MSG.Online, fnOnline, FSM_STATE.SAME);
  754. AnyStateTransition(MSG.Recover, fnRecover, STATE.Idle);
  755. AnyStateTransition(MSG.Abort, fnRecover, STATE.Idle);
  756. EnterExitTransition<STATE, FSM_MSG>(STATE.Initializing, fnEnterExecute, FSM_MSG.NONE, fnExitExecute);
  757. // Home
  758. AnyStateTransition(MSG.Home, fnHome, STATE.Initializing);
  759. Transition(STATE.Initializing, MSG.ActionDone, fnActionDone, STATE.Idle);
  760. }
  761. private bool fnOnline(object[] param)
  762. {
  763. bool online = (bool)param[0];
  764. //_efem.SetOnline(Module, online);
  765. return true;
  766. }
  767. private bool fnRecover(object[] param)
  768. {
  769. return true;
  770. }
  771. private bool fnMonitor(object[] param)
  772. {
  773. STATE curSt = (STATE)fsm.State;
  774. if (curSt == STATE.Initializing || curSt == STATE.Mapping)
  775. {
  776. if (fsm.ElapsedTime > 20 * 1000)
  777. {
  778. PostMsg(MSG.Recover);
  779. }
  780. }
  781. return true;
  782. }
  783. private bool fnEnterExecute(object[] param)
  784. {
  785. return true;
  786. }
  787. private bool fnExitExecute(object[] param)
  788. {
  789. return true;
  790. }
  791. private bool fnActionDone(object[] param)
  792. {
  793. return true;
  794. }
  795. private bool fnHome(object[] param)
  796. {
  797. _efem.Home(Module);
  798. return true;
  799. }
  800. public bool Check(int msg, out string reason, params object[] args)
  801. {
  802. throw new NotImplementedException();
  803. }
  804. }
  805. }