SimulatorSystem.cs 70 KB

1234567891011121314151617181920212223242526272829303132333435363738394041424344454647484950515253545556575859606162636465666768697071727374757677787980818283848586878889909192939495969798991001011021031041051061071081091101111121131141151161171181191201211221231241251261271281291301311321331341351361371381391401411421431441451461471481491501511521531541551561571581591601611621631641651661671681691701711721731741751761771781791801811821831841851861871881891901911921931941951961971981992002012022032042052062072082092102112122132142152162172182192202212222232242252262272282292302312322332342352362372382392402412422432442452462472482492502512522532542552562572582592602612622632642652662672682692702712722732742752762772782792802812822832842852862872882892902912922932942952962972982993003013023033043053063073083093103113123133143153163173183193203213223233243253263273283293303313323333343353363373383393403413423433443453463473483493503513523533543553563573583593603613623633643653663673683693703713723733743753763773783793803813823833843853863873883893903913923933943953963973983994004014024034044054064074084094104114124134144154164174184194204214224234244254264274284294304314324334344354364374384394404414424434444454464474484494504514524534544554564574584594604614624634644654664674684694704714724734744754764774784794804814824834844854864874884894904914924934944954964974984995005015025035045055065075085095105115125135145155165175185195205215225235245255265275285295305315325335345355365375385395405415425435445455465475485495505515525535545555565575585595605615625635645655665675685695705715725735745755765775785795805815825835845855865875885895905915925935945955965975985996006016026036046056066076086096106116126136146156166176186196206216226236246256266276286296306316326336346356366376386396406416426436446456466476486496506516526536546556566576586596606616626636646656666676686696706716726736746756766776786796806816826836846856866876886896906916926936946956966976986997007017027037047057067077087097107117127137147157167177187197207217227237247257267277287297307317327337347357367377387397407417427437447457467477487497507517527537547557567577587597607617627637647657667677687697707717727737747757767777787797807817827837847857867877887897907917927937947957967977987998008018028038048058068078088098108118128138148158168178188198208218228238248258268278288298308318328338348358368378388398408418428438448458468478488498508518528538548558568578588598608618628638648658668678688698708718728738748758768778788798808818828838848858868878888898908918928938948958968978988999009019029039049059069079089099109119129139149159169179189199209219229239249259269279289299309319329339349359369379389399409419429439449459469479489499509519529539549559569579589599609619629639649659669679689699709719729739749759769779789799809819829839849859869879889899909919929939949959969979989991000100110021003100410051006100710081009101010111012101310141015101610171018101910201021102210231024102510261027102810291030103110321033103410351036103710381039104010411042104310441045104610471048104910501051105210531054105510561057105810591060106110621063106410651066106710681069107010711072107310741075107610771078107910801081108210831084108510861087108810891090109110921093109410951096109710981099110011011102110311041105110611071108110911101111111211131114111511161117111811191120112111221123112411251126112711281129113011311132113311341135113611371138113911401141114211431144114511461147114811491150115111521153115411551156115711581159116011611162116311641165116611671168116911701171117211731174117511761177117811791180118111821183118411851186118711881189119011911192119311941195119611971198119912001201120212031204120512061207120812091210121112121213121412151216121712181219122012211222122312241225122612271228122912301231123212331234123512361237123812391240124112421243124412451246124712481249125012511252125312541255125612571258125912601261126212631264126512661267126812691270127112721273127412751276127712781279128012811282128312841285128612871288128912901291129212931294129512961297129812991300130113021303130413051306130713081309131013111312131313141315131613171318131913201321132213231324132513261327132813291330133113321333133413351336133713381339134013411342134313441345134613471348134913501351135213531354135513561357135813591360136113621363136413651366136713681369137013711372137313741375137613771378137913801381138213831384138513861387138813891390139113921393139413951396139713981399140014011402140314041405140614071408140914101411141214131414141514161417141814191420142114221423142414251426142714281429143014311432143314341435143614371438143914401441144214431444144514461447144814491450145114521453145414551456
  1. using Aitex.Core.RT.DataCenter;
  2. using Aitex.Core.RT.IOCore;
  3. using Aitex.Core.RT.Log;
  4. using Aitex.Core.Util;
  5. using MECF.Framework.Common.Equipment;
  6. using MECF.Framework.Simulator.Core.Driver;
  7. using System;
  8. using System.Collections.Generic;
  9. using Venus_Simulator.Devices;
  10. using System.Threading;
  11. using Venus_Core;
  12. using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.PMs;
  13. namespace Venus_Simulator.Instances
  14. {
  15. public class SimulatorSystem : Singleton<SimulatorSystem>
  16. {
  17. private PeriodicJob _thread;
  18. private Random _rd = new Random();
  19. private RD_TRIG _trigATM = new RD_TRIG();
  20. private RD_TRIG _trigVAC = new RD_TRIG();
  21. private R_TRIG _trigLLExtend = new R_TRIG();
  22. private R_TRIG _trigLLRetract = new R_TRIG();
  23. private static int count = 0;
  24. private readonly float ATM_THRESHOLD = 750000;
  25. private readonly float ATM_PRESSURE = 760000;
  26. private readonly float ATM_LoadLock_PRESSURE = 760000;
  27. private readonly uint VAC_SW_PRESSURE = 9500;
  28. private readonly uint PROCESS_GAUGE = 10000;
  29. private Dictionary<ModuleName, DeviceSimulator> _MockDevices = new Dictionary<ModuleName, DeviceSimulator>();
  30. public SimulatorSystem()
  31. {
  32. //_MockDevices.Add(ModuleName.PMB, new SkyPumpMock());
  33. //_MockDevices.Add(ModuleName.PMB, new AdTecGeneratorMock());
  34. //_MockDevices.Add(ModuleName.PMB, new AdTecMatchMock());
  35. // TODO
  36. }
  37. ~SimulatorSystem()
  38. {
  39. _thread?.Stop();
  40. }
  41. public void Initialize()
  42. {
  43. SetDefaultValue(ModuleName.PMA, SimulatorJetChamber.CurrentPMAChamber);
  44. SetDefaultValue(ModuleName.PMB, SimulatorJetChamber.CurrentPMBChamber);
  45. SetDefaultValue(ModuleName.PMC, SimulatorJetChamber.CurrentPMCChamber);
  46. SetDefaultValue(ModuleName.PMD, SimulatorJetChamber.CurrentPMDChamber);
  47. SetTMDefaultValue();
  48. Singleton<DataManager>.Instance.Initialize(false);
  49. _thread = new PeriodicJob(500, OnMonitor, nameof(SimulatorSystem), true);
  50. }
  51. private void SetDefaultValue(ModuleName mod,JetChamber jetChamber)
  52. {
  53. switch (jetChamber)
  54. {
  55. case JetChamber.Venus:
  56. IO.DI[$"{mod}.DI_PM_Lid_Closed"].Value = true;
  57. IO.DI[$"{mod}.DI_PM_ATM_SW"].Value = true;
  58. IO.DI[$"{mod}.DI_PM_VAC_SW"].Value = false;
  59. IO.DI[$"{mod}.DI_PCW_Flow_SW"].Value = true;
  60. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  61. IO.DI[$"{mod}.DI_Lift_Pin_Up_POS"].Value = false;
  62. IO.DI[$"{mod}.DI_Lift_Pin_Down_POS"].Value = true;
  63. IO.DI[$"{mod}.DI_RF_Generator_Interlock"].Value = true;
  64. IO.DI[$"{mod}.DI_Source_RF_Fan"].Value = true;
  65. IO.DI[$"{mod}.DI_Turbo_Pump_Interlock"].Value = true;
  66. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = false;
  67. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = true;
  68. IO.DI[$"{mod}.DI_CDA_Pressure"].Value = true;
  69. IO.DI[$"{mod}.DI_Coolant_Inlet_TC_Broken_Alarm"].Value = false;
  70. IO.DI[$"{mod}.DI_Coolant_Outlet_TC_Broken_Alarm"].Value = true;
  71. IO.DI[$"{mod}.DI_Chamber_Pressure_10t_Gauge_Alarm"].Value = false;
  72. IO.DI[$"{mod}.DI_Process_Pressure_100mt_Gauge_Alarm"].Value = false;
  73. IO.DI[$"{mod}.DI_Chamber_Pressure_760t_Gauge_Alarm"].Value = false;
  74. IO.DI[$"{mod}.DI_Foreline_Pressure_760t_Gauge_Alarm"].Value = false;
  75. IO.DI[$"{mod}.DI_LL_Pressure_760t_Gauge_Alarm"].Value = false;
  76. IO.DI[$"{mod}.DI_ESC_He_Pressure_100t_Gauge_Alarm"].Value = false;
  77. IO.DI[$"{mod}.DI_Valve_TC_Deviation_out_of_range"].Value = false;
  78. IO.DI[$"{mod}.DI_Valve_Control_TC_Broken_Alarm"].Value = false;
  79. IO.DI[$"{mod}.DI_Valve_Monitor_TC_Broken_Alarm"].Value = false;
  80. IO.DI[$"{mod}.DI_Valve_Heater_On_FB"].Value = false;
  81. IO.DI[$"{mod}.DI_Foreline_TC_Deviation_out_of_range"].Value = false;
  82. IO.DI[$"{mod}.DI_Foreline_Control_TC_Broken_Alarm"].Value = false;
  83. IO.DI[$"{mod}.DI_Foreline_Monitor_TC_Broken_Alarm"].Value = false;
  84. IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = false;
  85. IO.DI[$"{mod}.DI_CHB_Wall_TC_Deviation_out_of_range"].Value = false;
  86. IO.DI[$"{mod}.DI_CHB_Wall_Control_TC_Broken_Alarm"].Value = false;
  87. IO.DI[$"{mod}.DI_CHB_Wall_Monitor_TC_Broken_Alarm"].Value = false;
  88. IO.DI[$"{mod}.DI_CHB_Wall_Heater_On_FB"].Value = false;
  89. IO.DI[$"{mod}.DI_CHB_Wall_OT_SW_Alarm"].Value = false;
  90. IO.DI[$"{mod}.DI_PN2_Pressure_SW"].Value = true;
  91. IO.DI[$"{mod}.DI_MFC1_Pressure_SW"].Value = true;
  92. IO.DI[$"{mod}.DI_MFC2_Pressure_SW"].Value = true;
  93. IO.DI[$"{mod}.DI_MFC3_Pressure_SW"].Value = true;
  94. IO.DI[$"{mod}.DI_MFC4_Pressure_SW"].Value = true;
  95. IO.DI[$"{mod}.DI_MFC5_Pressure_SW"].Value = true;
  96. IO.DI[$"{mod}.DI_MFC6_Pressure_SW"].Value = true;
  97. IO.DI[$"{mod}.DI_MFC7_Pressure_SW"].Value = true;
  98. IO.DI[$"{mod}.DI_MFC8_Pressure_SW"].Value = true;
  99. IO.DI[$"{mod}.DI_He_Pressure_SW"].Value = true;
  100. IO.DI[$"{mod}.DI_ESC_He_Pressure_100t_Gauge_Alarm"].Value = false;
  101. IO.DI[$"{mod}.DI_Loadlock_Lid_Closed"].Value = true;
  102. IO.DI[$"{mod}.DI_Loadlock_Arm_Extend_POS"].Value = false;
  103. IO.DI[$"{mod}.DI_Loadlock_Arm_Retract_POS"].Value = true;
  104. IO.DI[$"{mod}.DI_Small_Wafer_In_POS"].Value = false;
  105. IO.DI[$"{mod}.DI_Big_Wafer_In_POS"].Value = false;
  106. IO.DI[$"{mod}.DI_Loadlock_ATM_SW"].Value = false;
  107. IO.DI[$"{mod}.DI_Gas_Box_Door_SW"].Value = true;
  108. IO.DI[$"{mod}.DI_Gas_Box_Pressure_SW"].Value = true;
  109. //// pressure
  110. SetAiValue($"{mod}.AI_Foreline_Pressure_760t", 5001);
  111. //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5000);
  112. SetAiValue($"{mod}.AI_Process_Pressure_100mt", 1000);
  113. //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  114. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  115. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5000);
  116. SetAiValue($"{mod}.AI_LL_Pressure_760t", ATM_LoadLock_PRESSURE);
  117. //// Temperature
  118. SetAiValue($"{mod}.AI_Valve_Control_TC_Temp", 28);
  119. SetAiValue($"{mod}.AI_Valve_Monitor_TC_Temp", 27);
  120. SetAiValue($"{mod}.AI_Fline_Control_TC_Temp", 28);
  121. SetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp", 27);
  122. SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", 28);
  123. SetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp", 27);
  124. SetAiValue($"{mod}.AI_Coolant_Inlet_Temp", 28);
  125. //if (mod == ModuleName.PMA)
  126. //{
  127. // SetAiValue($"{mod}.AI_Coolant_Outlet_Temp", 29);
  128. //}
  129. //else if (mod == ModuleName.PMB)
  130. //{
  131. // SetAiValue($"{mod}.AI_Coolant_Outlet_Temp", 30);
  132. //}
  133. // Datetime
  134. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  135. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  136. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  137. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  138. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  139. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  140. break;
  141. case JetChamber.Kepler2300:
  142. // chamber
  143. IO.DI[$"{mod}.DI_Lid_Closed"].Value = true;
  144. IO.DI[$"{mod}.DI_ATM_Switch"].Value = true;
  145. IO.DI[$"{mod}.DI_VAC_Switch"].Value = false;
  146. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  147. IO.DI[$"{mod}.DI_Lift_Pin_Up_POS"].Value = false;
  148. IO.DI[$"{mod}.DI_Lift_Pin_Down_POS"].Value = true;
  149. IO.DI[$"{mod}.DI_Source_RF_Generator_Interlock"].Value = true;
  150. IO.DI[$"{mod}.DI_Source_RF_Fan"].Value = true;
  151. IO.DI[$"{mod}.DI_Turbo_Pump_Interlock"].Value = true;
  152. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = false;
  153. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = true;
  154. IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
  155. IO.DI[$"{mod}.DI_S_Valve_TC_Deviation_out_of_range"].Value = false;
  156. IO.DI[$"{mod}.DI_S_Valve_Control_TC_Broken_Alarm"].Value = false;
  157. IO.DI[$"{mod}.DI_S_Valve_Monitor_TC_Broken_Alarm"].Value = false;
  158. IO.DI[$"{mod}.DI_S_Valve_Heater_On_FB"].Value = false;
  159. IO.DI[$"{mod}.DI_Foreline_TC_Deviation_out_of_range"].Value = false;
  160. IO.DI[$"{mod}.DI_Foreline_Control_TC_Broken_Alarm"].Value = false;
  161. IO.DI[$"{mod}.DI_Foreline_Monitor_TC_Broken_Alarm"].Value = false;
  162. IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = false;
  163. IO.DI[$"{mod}.DI_CHB_Wall_TC_Deviation_out_of_range"].Value = false;
  164. IO.DI[$"{mod}.DI_CHB_Wall_Control_TC_Broken_Alarm"].Value = false;
  165. IO.DI[$"{mod}.DI_CHB_Wall_Monitor_TC_Broken_Alarm"].Value = false;
  166. IO.DI[$"{mod}.DI_CHB_Wall_Heater_On_FB"].Value = false;
  167. IO.DI[$"{mod}.DI_CHB_Wall_OT_Switch_Alarm"].Value = false;
  168. IO.DI[$"{mod}.DI_PN2_Pressure_Switch"].Value = true;
  169. IO.DI[$"{mod}.DI_MFC1_Pressure_Switch"].Value = true;
  170. IO.DI[$"{mod}.DI_MFC2_Pressure_Switch"].Value = true;
  171. IO.DI[$"{mod}.DI_MFC3_Pressure_Switch"].Value = true;
  172. IO.DI[$"{mod}.DI_MFC4_Pressure_Switch"].Value = true;
  173. IO.DI[$"{mod}.DI_MFC5_Pressure_Switch"].Value = true;
  174. IO.DI[$"{mod}.DI_MFC6_Pressure_Switch"].Value = true;
  175. IO.DI[$"{mod}.DI_MFC7_Pressure_Switch"].Value = true;
  176. IO.DI[$"{mod}.DI_MFC8_Pressure_Switch"].Value = true;
  177. IO.DI[$"{mod}.DI_ESC_He_Pressure_Switch"].Value = true;
  178. IO.DI[$"{mod}.DI_ESC_He_Pressure_100t_Guage_Alarm"].Value = false;
  179. IO.DI[$"{mod}.DI_Gas_Box_Door_Switch"].Value = true;
  180. IO.DI[$"{mod}.DI_Gas_Box_Pressure_Switch"].Value = true;
  181. IO.DI[$"{mod}.DI_Source_RF_Water_Flow_Switch"].Value = true;
  182. IO.DI[$"{mod}.DI_S_Valve_OT_Switch_Alarm"].Value = false;
  183. IO.DI[$"{mod}.DI_Foreline_OT_Switch_Alarm"].Value = false;
  184. IO.DI[$"{mod}.DI_Arm_Not_Extend_to_PM"].Value = true;
  185. IO.DI[$"{mod}.DI_EFEM_Door_Colse"].Value = true;
  186. IO.DI[$"{mod}.DI_ESC_Inner_Coolant_Flow_SW"].Value = true;
  187. IO.DI[$"{mod}.DI_ESC_Outer_Coolant_Flow_SW"].Value = true;
  188. //// pressure
  189. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 5001);
  190. //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5000);
  191. SetAiValue($"{mod}.AI_Process_Pressure_100mt", 1000);
  192. //SetAiValue($"{mod}.AI_Chamber_Pressure_760t", ATM_PRESSURE);
  193. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  194. //// Temperature
  195. SetAiValue($"{mod}.AI_S_Valve_Control_TC_Temp", 28);
  196. SetAiValue($"{mod}.AI_Foreline_Control_TC_Temp", 28);
  197. SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", 28);
  198. // Datetime
  199. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  200. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  201. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  202. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  203. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  204. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  205. break;
  206. case JetChamber.Kepler2200A:
  207. IO.DI[$"{mod}.DI_Lid_Closed"].Value = true;
  208. IO.DI[$"{mod}.DI_ATM_Switch"].Value = true;
  209. IO.DI[$"{mod}.DI_VAC_Switch"].Value = false;
  210. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  211. IO.DI[$"{mod}.DI_Lift_Pin_Up_POS"].Value = false;
  212. IO.DI[$"{mod}.DI_Lift_Pin_Down_POS"].Value = true;
  213. IO.DI[$"{mod}.DI_Source_RF_Generator_Interlock"].Value = true;
  214. IO.DI[$"{mod}.DI_Source_RF_Fan"].Value = true;
  215. IO.DI[$"{mod}.DI_Turbo_Pump_Interlock"].Value = true;
  216. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = false;
  217. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = true;
  218. IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
  219. IO.DI[$"{mod}.DI_S_Valve_TC_Deviation_out_of_range"].Value = false;
  220. IO.DI[$"{mod}.DI_S_Valve_Control_TC_Broken_Alarm"].Value = false;
  221. IO.DI[$"{mod}.DI_S_Valve_Monitor_TC_Broken_Alarm"].Value = false;
  222. IO.DI[$"{mod}.DI_S_Valve_Heater_On_FB"].Value = false;
  223. IO.DI[$"{mod}.DI_Foreline_TC_Deviation_out_of_range"].Value = false;
  224. IO.DI[$"{mod}.DI_Foreline_Control_TC_Broken_Alarm"].Value = false;
  225. IO.DI[$"{mod}.DI_Foreline_Monitor_TC_Broken_Alarm"].Value = false;
  226. IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = false;
  227. IO.DI[$"{mod}.DI_CHB_Wall_TC_Deviation_out_of_range"].Value = false;
  228. IO.DI[$"{mod}.DI_CHB_H-HT_Control_TC_Broken_Alarm"].Value = false;
  229. IO.DI[$"{mod}.DI_CHB_Wall_Monitor_TC_Broken_Alarm"].Value = false;
  230. IO.DI[$"{mod}.DI_CHB_H-HT_Heater_On_FB"].Value = false;
  231. IO.DI[$"{mod}.DI_CHB_H-HT_OT_Switch_Alarm"].Value = false;
  232. IO.DI[$"{mod}.DI_PN2_Pressure_Switch"].Value = true;
  233. IO.DI[$"{mod}.DI_MFC1_Pressure_Switch"].Value = true;
  234. IO.DI[$"{mod}.DI_MFC2_Pressure_Switch"].Value = true;
  235. IO.DI[$"{mod}.DI_MFC3_Pressure_Switch"].Value = true;
  236. IO.DI[$"{mod}.DI_MFC4_Pressure_Switch"].Value = true;
  237. IO.DI[$"{mod}.DI_MFC5_Pressure_Switch"].Value = true;
  238. IO.DI[$"{mod}.DI_MFC6_Pressure_Switch"].Value = true;
  239. IO.DI[$"{mod}.DI_MFC7_Pressure_Switch"].Value = true;
  240. IO.DI[$"{mod}.DI_MFC8_Pressure_Switch"].Value = true;
  241. IO.DI[$"{mod}.DI_N2_Purge_Pressure_Switch"].Value = true;
  242. IO.DI[$"{mod}.DI_ESC_He_Pressure_100t_Guage_Alarm"].Value = false;
  243. IO.DI[$"{mod}.DI_Gas_Box_Door_Switch"].Value = true;
  244. IO.DI[$"{mod}.DI_Lid_Up_Limit_Pos_SW"].Value = true;
  245. IO.DI[$"{mod}.DI_S_Valve_OT_Switch_Alarm"].Value = false;
  246. IO.DI[$"{mod}.DI_Lid_Down_Limit_Pos_SW"].Value = true;
  247. IO.DI[$"{mod}.DI_Gas_Box_Pressure_Switch"].Value = true;
  248. IO.DI[$"{mod}.DI_TM_Safety_Door_Colse"].Value = true;
  249. IO.DI[$"{mod}.DI_ESC_Inner_Coolant_Flow_SW"].Value = true;
  250. IO.DI[$"{mod}.DI_ESC_Outer_Coolant_Flow_SW"].Value = true;
  251. IO.DI[$"{mod}.DI_Arm_Not_Extend_to_PM"].Value = true;
  252. IO.DI[$"{mod}.DI_Source_RF_Water_Flow_Switch"].Value = true;
  253. //// pressure
  254. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 5001);
  255. SetAiValue($"{mod}.AI_Process_Pressure_100mt", 1000);
  256. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  257. //// Temperature
  258. SetAiValue($"{mod}.AI_S_Valve_Control_TC_Temp", 28);
  259. SetAiValue($"{mod}.AI_Foreline_Control_TC_Temp", 28);
  260. SetAiValue($"{mod}.AI_CHB_H-HT_Control_TC_Temp", 28);
  261. // Datetime
  262. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  263. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  264. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  265. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  266. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  267. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  268. break;
  269. }
  270. }
  271. private void SetTMDefaultValue()
  272. {
  273. ModuleName mod = ModuleName.TM;
  274. IO.DI[$"{mod}.DI_TM_Power_On"].Value = true;
  275. IO.DI[$"{mod}.DI_TM_In_Safety"].Value = true;
  276. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  277. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMA"].Value = true;
  278. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMB"].Value = true;
  279. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMC"].Value = true;
  280. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMD"].Value = true;
  281. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_LLA"].Value = true;
  282. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_LLB"].Value = true;
  283. IO.DI[$"{mod}.DI_EFEM_RB_Not_Extend_LLA"].Value = true;
  284. IO.DI[$"{mod}.DI_EFEM_RB_Not_Extend_LLB"].Value = true;
  285. IO.DI[$"{mod}.DI_EFEM_Side_Door_Closed"].Value = true;
  286. IO.DI[$"{mod}.DI_TM_CHB_PCW_Flow_Switch"].Value = true;
  287. IO.DI[$"{mod}.DI_LLA_PCW_Flow_Switch"].Value = true;
  288. IO.DI[$"{mod}.DI_LLB_PCW_Flow_Switch"].Value = true;
  289. IO.DI[$"{mod}.DI_TM_CHB_Door_Closed"].Value = true;
  290. IO.DI[$"{mod}.DI_LLA_Lid_Door_Closed"].Value = true;
  291. IO.DI[$"{mod}.DI_LLB_Lid_Door_Closed"].Value = true;
  292. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_open_Position"].Value = false;
  293. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_close_Position"].Value = true;
  294. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_open_Position"].Value = false;
  295. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_close_Position"].Value = true;
  296. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_open_Position"].Value = false;
  297. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_close_Position"].Value = true;
  298. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_open_Position"].Value = false;
  299. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_close_Position"].Value = true;
  300. IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
  301. IO.DI[$"{mod}.DI_Vaccum_Pressure_Switch"].Value = true;
  302. IO.DI[$"{mod}.DI_N2_Pressure_Switch"].Value = true;
  303. IO.DI[$"{mod}.DI_TM_Chamber_VAC_Gauge_Alarm"].Value = true;
  304. IO.DI[$"{mod}.DI_TM_Foreline_VAC_Gauge_Alarm"].Value = true;
  305. IO.DI[$"{mod}.DI_LLA_Chamber_VAC_Gauge_Alarm"].Value = true;
  306. IO.DI[$"{mod}.DI_LLA_Foreline_VAC_Gauge_Alarm"].Value = true;
  307. IO.DI[$"{mod}.DI_LLB_Chamber_VAC_Gauge_Alarm"].Value = true;
  308. IO.DI[$"{mod}.DI_LLB_Foreline_VAC_Gauge_Alarm"].Value = true;
  309. IO.DI[$"{mod}.DI_TM_ATM_Switch"].Value = true;
  310. IO.DI[$"{mod}.DI_LLA_ATM_Switch"].Value = true;
  311. IO.DI[$"{mod}.DI_LLB_ATM_Switch"].Value = true;
  312. // Datetime
  313. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  314. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  315. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  316. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  317. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  318. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  319. SetAiValue($"{mod}.AI_TM_CHB_Pressure", 5000);
  320. SetAiValue($"{mod}.AI_TM_Foreline_Pressure", 5001);
  321. SetAiValue($"{mod}.AI_LLA_CHB_Pressure", 5002);
  322. SetAiValue($"{mod}.AI_LLA_LLB_Foreline_Pressure", 5003);
  323. SetAiValue($"{mod}.AI_LLB_CHB_Pressure", 5004);
  324. }
  325. private bool OnMonitor()
  326. {
  327. try
  328. {
  329. switch (SimulatorJetChamber.CurrentPMAChamber)
  330. {
  331. case JetChamber.Venus:
  332. // PMA
  333. MonitorSlitDoor(ModuleName.PMA);
  334. MonitorPin(ModuleName.PMA);
  335. MonitorPressure(ModuleName.PMA);
  336. MonitorExtendAndRetract(ModuleName.PMA);
  337. //MonitorTemperature(ModuleName.PMA);
  338. MonitorGas(ModuleName.PMA);
  339. //MonitorRF(ModuleName.PMA);
  340. ChangeTime(ModuleName.PMA);
  341. //MonitorIOPumpCtrl(ModuleName.PMA);
  342. break;
  343. case JetChamber.Kepler2300:
  344. case JetChamber.Kepler2200A:
  345. case JetChamber.Kepler2200B:
  346. // PMA
  347. MonitorSlitDoor(ModuleName.PMA);
  348. MonitorPin(ModuleName.PMA);
  349. MonitorPressure_Kepler(ModuleName.PMA);
  350. //MonitorTemperature(ModuleName.PMA);
  351. MonitorGas(ModuleName.PMA);
  352. //MonitorRF(ModuleName.PMA);
  353. ChangeTime(ModuleName.PMA);
  354. //MonitorIOPumpCtrl(ModuleName.PMA);
  355. MonitorLid(ModuleName.PMA);
  356. break;
  357. }
  358. switch (SimulatorJetChamber.CurrentPMBChamber)
  359. {
  360. case JetChamber.Venus:
  361. // PMB
  362. MonitorSlitDoor(ModuleName.PMB);
  363. MonitorPin(ModuleName.PMB);
  364. MonitorPressure(ModuleName.PMB);
  365. //MonitorTemperature(ModuleName.PMB);
  366. MonitorGas(ModuleName.PMB);
  367. // MonitorRF(ModuleName.PMB);
  368. ChangeTime(ModuleName.PMB);
  369. //MonitorIOPumpCtrl(ModuleName.PMB);
  370. break;
  371. case JetChamber.Kepler2300:
  372. case JetChamber.Kepler2200A:
  373. case JetChamber.Kepler2200B:
  374. // PMB
  375. MonitorSlitDoor(ModuleName.PMB);
  376. MonitorPin(ModuleName.PMB);
  377. MonitorPressure_Kepler(ModuleName.PMB);
  378. //MonitorTemperature(ModuleName.PMB);
  379. MonitorGas(ModuleName.PMB);
  380. // MonitorRF(ModuleName.PMB);
  381. ChangeTime(ModuleName.PMB);
  382. //MonitorIOPumpCtrl(ModuleName.PMB);
  383. MonitorLid(ModuleName.PMB);
  384. break;
  385. }
  386. switch (SimulatorJetChamber.CurrentPMCChamber)
  387. {
  388. case JetChamber.Venus:
  389. // PMC
  390. MonitorSlitDoor(ModuleName.PMC);
  391. MonitorPin(ModuleName.PMC);
  392. MonitorPressure(ModuleName.PMC);
  393. //MonitorTemperature(ModuleName.PMB);
  394. MonitorGas(ModuleName.PMC);
  395. // MonitorRF(ModuleName.PMB);
  396. ChangeTime(ModuleName.PMC);
  397. //MonitorIOPumpCtrl(ModuleName.PMB);
  398. break;
  399. case JetChamber.Kepler2300:
  400. case JetChamber.Kepler2200A:
  401. case JetChamber.Kepler2200B:
  402. // PMC
  403. MonitorSlitDoor(ModuleName.PMC);
  404. MonitorPin(ModuleName.PMC);
  405. MonitorPressure_Kepler(ModuleName.PMC);
  406. //MonitorTemperature(ModuleName.PMB);
  407. MonitorGas(ModuleName.PMC);
  408. // MonitorRF(ModuleName.PMB);
  409. ChangeTime(ModuleName.PMC);
  410. //MonitorIOPumpCtrl(ModuleName.PMB);
  411. MonitorLid(ModuleName.PMC);
  412. break;
  413. }
  414. switch (SimulatorJetChamber.CurrentPMDChamber)
  415. {
  416. case JetChamber.Venus:
  417. // PMC
  418. MonitorSlitDoor(ModuleName.PMD);
  419. MonitorPin(ModuleName.PMD);
  420. MonitorPressure(ModuleName.PMD);
  421. //MonitorTemperature(ModuleName.PMB);
  422. MonitorGas(ModuleName.PMD);
  423. // MonitorRF(ModuleName.PMB);
  424. ChangeTime(ModuleName.PMD);
  425. //MonitorIOPumpCtrl(ModuleName.PMB);
  426. break;
  427. case JetChamber.Kepler2300:
  428. case JetChamber.Kepler2200A:
  429. case JetChamber.Kepler2200B:
  430. // PMC
  431. MonitorSlitDoor(ModuleName.PMD);
  432. MonitorPin(ModuleName.PMD);
  433. MonitorPressure_Kepler(ModuleName.PMD);
  434. //MonitorTemperature(ModuleName.PMB);
  435. MonitorGas(ModuleName.PMD);
  436. // MonitorRF(ModuleName.PMB);
  437. ChangeTime(ModuleName.PMD);
  438. //MonitorIOPumpCtrl(ModuleName.PMB);
  439. MonitorLid(ModuleName.PMD);
  440. break;
  441. }
  442. ChangeTime(ModuleName.TM);
  443. MonitorMFSlitDoor();
  444. MonitorMFPressure();
  445. }
  446. catch (Exception e)
  447. {
  448. LOG.WriteExeption(e);
  449. }
  450. return true;
  451. }
  452. private void ChangeTime(ModuleName mod)
  453. {
  454. // Heartbeat with PLC
  455. SetAiValue($"{mod}.AI_Heartbeat_FB", GetAoValue($"{mod}.AO_Heartbeat"));
  456. SetAiValue($"{mod}.AI_Year", DateTime.Now.Year);
  457. SetAiValue($"{mod}.AI_Month", DateTime.Now.Month);
  458. SetAiValue($"{mod}.AI_Day", DateTime.Now.Day);
  459. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  460. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  461. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  462. }
  463. void MonitorSlitDoor(ModuleName mod)
  464. {
  465. // slit door open
  466. if (IO.DO[$"{mod}.DO_Slit_Door_Open"].Value)
  467. {
  468. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = true;
  469. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = false;
  470. }
  471. // slit door close
  472. if (IO.DO[$"{mod}.DO_Slit_Door_Close"].Value)
  473. {
  474. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = false;
  475. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = true;
  476. }
  477. }
  478. void MonitorMFSlitDoor()
  479. {
  480. ModuleName mod = ModuleName.TM;
  481. // LLA T door open
  482. if (IO.DO[$"{mod}.DO_LLA_Slit_Door_T_Open"].Value)
  483. {
  484. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_open_Position"].Value = true;
  485. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_close_Position"].Value = false;
  486. }
  487. // LLB T door open
  488. if (IO.DO[$"{mod}.DO_LLB_Slit_Door_T_Open"].Value)
  489. {
  490. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_open_Position"].Value = true;
  491. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_close_Position"].Value = false;
  492. }
  493. // LLA E door open
  494. if (IO.DO[$"{mod}.DO_LLA_Slit_Door_E_Open"].Value)
  495. {
  496. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_open_Position"].Value = true;
  497. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_close_Position"].Value = false;
  498. }
  499. // LLB E door open
  500. if (IO.DO[$"{mod}.DO_LLB_Slit_Door_E_Open"].Value)
  501. {
  502. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_open_Position"].Value = true;
  503. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_close_Position"].Value = false;
  504. }
  505. // LLA T door close
  506. if (IO.DO[$"{mod}.DO_LLA_Slit_Door_T_Close"].Value)
  507. {
  508. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_open_Position"].Value = false;
  509. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_close_Position"].Value = true;
  510. }
  511. // LLB T door close
  512. if (IO.DO[$"{mod}.DO_LLB_Slit_Door_T_Close"].Value)
  513. {
  514. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_open_Position"].Value = false;
  515. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_close_Position"].Value = true;
  516. }
  517. // LLA E door close
  518. if (IO.DO[$"{mod}.DO_LLA_Slit_Door_E_Close"].Value)
  519. {
  520. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_open_Position"].Value = false;
  521. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_close_Position"].Value = true;
  522. }
  523. // LLB E door close
  524. if (IO.DO[$"{mod}.DO_LLB_Slit_Door_E_Close"].Value)
  525. {
  526. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_open_Position"].Value = false;
  527. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_close_Position"].Value = true;
  528. }
  529. }
  530. void MonitorPin(ModuleName mod)
  531. {
  532. // lift pin up
  533. if (IO.DO[$"{mod}.DO_Lift_Pin_Up"].Value != IO.DO[$"{mod}.DO_Lift_Pin_Down"].Value)
  534. {
  535. IO.DI[$"{mod}.DI_Lift_Pin_Up_POS"].Value = IO.DO[$"{mod}.DO_Lift_Pin_Up"].Value;
  536. IO.DI[$"{mod}.DI_Lift_Pin_Down_POS"].Value = IO.DO[$"{mod}.DO_Lift_Pin_Down"].Value;
  537. }
  538. }
  539. void MonitorLid(ModuleName mod)
  540. {
  541. // lift pin up
  542. if (IO.DO[$"{mod}.DO_Lid_Up"].Value != IO.DO[$"{mod}.DO_Lid_Down"].Value)
  543. {
  544. IO.DI[$"{mod}.DI_Lid_Closed"].Value = IO.DO[$"{mod}.DO_Lid_Down"].Value;
  545. }
  546. }
  547. void MonitorExtendAndRetract(ModuleName mod)
  548. {
  549. // Extend
  550. _trigLLExtend.CLK = IO.DO[$"{mod}.DO_Loadlock_Arm_Extend"].Value;
  551. if (_trigLLExtend.Q)
  552. {
  553. _trigLLRetract.RST = true;
  554. Thread.Sleep(500);
  555. IO.DI[$"{mod}.DI_Loadlock_Arm_Extend_POS"].Value = true;
  556. IO.DI[$"{mod}.DI_Loadlock_Arm_Retract_POS"].Value = false;
  557. IO.DI[$"{mod}.DI_Small_Wafer_In_POS"].Value = false;
  558. IO.DI[$"{mod}.DI_Big_Wafer_In_POS"].Value = false;
  559. }
  560. // Retract
  561. _trigLLRetract.CLK = IO.DO[$"{mod}.DO_Loadlock_Arm_Retract"].Value;
  562. if (_trigLLRetract.Q)
  563. {
  564. count++;
  565. _trigLLExtend.RST = true;
  566. Thread.Sleep(500);
  567. IO.DI[$"{mod}.DI_Loadlock_Arm_Extend_POS"].Value = false;
  568. IO.DI[$"{mod}.DI_Loadlock_Arm_Retract_POS"].Value = true;
  569. if (count == 1)
  570. {
  571. IO.DI[$"{mod}.DI_Small_Wafer_In_POS"].Value = false;
  572. IO.DI[$"{mod}.DI_Big_Wafer_In_POS"].Value = false;
  573. }
  574. else if (count == 2)
  575. {
  576. count = 0;
  577. IO.DI[$"{mod}.DI_Small_Wafer_In_POS"].Value = true;
  578. IO.DI[$"{mod}.DI_Big_Wafer_In_POS"].Value = false;
  579. }
  580. }
  581. }
  582. void MonitorPressure(ModuleName mod)
  583. {
  584. string sAI_Foreline = "AI_Foreline_Pressure_760t";
  585. // Loadlock pressure
  586. string sAI_LoadLockPressure = "AI_LL_Pressure_760t";
  587. // Foreline
  588. if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open)
  589. {
  590. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(500, 600));
  591. }
  592. else
  593. {
  594. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(500, 600));
  595. }
  596. // PLC 模拟量范围[0,4000], 电压[0, 10V], 压力[0, 760Torr]
  597. string sAI_ChamberPressure = "AI_Chamber_Pressure_10t";
  598. string sAI_ProcessPressure = "AI_Chamber_Pressure_Virtual";
  599. //float chamber_pressure = GetMockChamberPressure(mod);
  600. //float process_pressure = GetAiValue($"{mod}.AI_Chamber_Pressure_Virtual");
  601. // soft pump & fast pump
  602. DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"];
  603. DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"];
  604. DOAccessor turbo_pump_vlv = IO.DO[$"{mod}.DO_Turbo_Pump_Pumping_Valve"];
  605. if (fast_pump_vlv.Value || soft_pump_vlv.Value || turbo_pump_vlv.Value)
  606. {
  607. if (fast_pump_vlv.Value && soft_pump_vlv.Value)
  608. {
  609. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  610. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  611. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  612. {
  613. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - 30000);
  614. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  615. }
  616. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  617. {
  618. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  619. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1500);
  620. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1500);
  621. }
  622. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(15000, 16000));
  623. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(150, 160));
  624. }
  625. else if (fast_pump_vlv.Value)
  626. {
  627. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  628. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  629. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  630. {
  631. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - 25000);
  632. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  633. }
  634. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  635. {
  636. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  637. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1300);
  638. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1300);
  639. }
  640. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(12000, 13000));
  641. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(120, 130));
  642. }
  643. else if (soft_pump_vlv.Value)
  644. {
  645. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  646. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  647. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  648. {
  649. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - 22000);
  650. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  651. }
  652. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  653. {
  654. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  655. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1100);
  656. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1100);
  657. }
  658. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(13000, 14000));
  659. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(100, 110));
  660. }
  661. else if (turbo_pump_vlv.Value)
  662. {
  663. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  664. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  665. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  666. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  667. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  668. }
  669. }
  670. // fast vent & purge
  671. DOAccessor vent_vlv = IO.DO[$"{mod}.DO_N2_Valve"];
  672. //DOAccessor purge_vlv = IO.DO[$"{mod}.DO_Chamber_purge_valve"];
  673. //if (vent_vlv.Value || purge_vlv.Value)
  674. //{
  675. // if (vent_vlv.Value && purge_vlv.Value)
  676. // {
  677. // float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  678. // float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  679. // if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  680. // {
  681. // SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 30000);
  682. // //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  683. // }
  684. // else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  685. // {
  686. // getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  687. // SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1500);
  688. // SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1500);
  689. // }
  690. // //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(45000, 50000));
  691. // //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(150, 160));
  692. // }
  693. // else
  694. //
  695. if (vent_vlv.Value)
  696. {
  697. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  698. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  699. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  700. {
  701. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  702. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  703. }
  704. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  705. {
  706. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  707. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  708. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  709. }
  710. else
  711. {
  712. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  713. }
  714. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(25000, 30000));
  715. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(130, 150));
  716. }
  717. // Loadlock Pumping Valve
  718. DOAccessor Loadlock_pump_vlv = IO.DO[$"{mod}.DO_Loadlock_Pumping_Valve"];
  719. if (Loadlock_pump_vlv.Value)
  720. {
  721. SetAiValue($"{mod}.{sAI_LoadLockPressure}", GetAiValue($"{mod}.{sAI_LoadLockPressure}") - 30000);
  722. }
  723. // Loadlock vent
  724. DOAccessor Loadlock_vent_vlv = IO.DO[$"{mod}.DO_Loadlock_Vent_Valve"];
  725. if (Loadlock_vent_vlv.Value)
  726. {
  727. SetAiValue($"{mod}.{sAI_LoadLockPressure}", GetAiValue($"{mod}.{sAI_LoadLockPressure}") + 30000);
  728. }
  729. // 压力值越界,复位
  730. float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  731. if (chamber_pressure1 > ATM_PRESSURE)
  732. {
  733. SetAiValue($"{mod}.AI_Chamber_Pressure_760t", ATM_PRESSURE);
  734. }
  735. else if (chamber_pressure1 < 20)
  736. {
  737. SetAiValue($"{mod}.AI_Chamber_Pressure_760t", 20);
  738. }
  739. float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  740. if (process_pressure1 > PROCESS_GAUGE)
  741. {
  742. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  743. }
  744. else if (process_pressure1 < 20)
  745. {
  746. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", 20);
  747. }
  748. float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}");
  749. if (foreline_pressure > 10000)
  750. {
  751. SetAiValue($"{mod}.AI_Foreline_Pressure_760t", 10000);
  752. }
  753. else if (foreline_pressure < 150)
  754. {
  755. SetAiValue($"{mod}.AI_Foreline_Pressure_760t", 150);
  756. }
  757. // 模拟压力计漂移
  758. //int p1 = (int)GetMockChamberPressure(mod);
  759. //int new_p1 = _rd.Next(p1 - 2, p1 + 2);
  760. //SetAiValue($"{mod}.AI_Chamber_Pressure_760t", new_p1);
  761. //int p2 = (int)GetAiValue($"{mod}.AI_Foreline_Pressure_10t");
  762. //int new_p2 = _rd.Next(p2 - 1, p2 + 1);
  763. //SetAiValue($"{mod}.AI_Foreline_Pressure_10t", new_p2);
  764. //int p3 = (int)GetAiValue($"{mod}.AI_Chamber_Pressure_Virtual");
  765. //int new_p3 = _rd.Next(p3 - 1, p3 + 1);
  766. //SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", new_p3);
  767. // 根据当前压力值设定信号
  768. //float chamber_pressure2 = GetMockChamberPressure(mod);
  769. // ATM switch
  770. IO.DI[$"{mod}.DI_PM_ATM_SW"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ATM_THRESHOLD;
  771. // VAC switch
  772. IO.DI[$"{mod}.DI_PM_VAC_SW"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < VAC_SW_PRESSURE;
  773. // Throttle valve
  774. //var pos_sp = IO.AO[$"{mod}.AO_Throttle_Valve_Pressure_Setpoint"].Value;
  775. //var mock_pos_fb = _rd.Next(pos_sp - 2, pos_sp + 2);
  776. ////IO.AI[$"{mod}.AI_Throttle_Valve_Real_Pressure"].Value = (short)mock_pos_fb;
  777. //SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", mock_pos_fb);
  778. // 压力值
  779. //if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") < GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"))
  780. //{
  781. // short increase = (short)_rd.Next(20, 30);
  782. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") + increase);
  783. // if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") > GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"))
  784. // {
  785. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"));
  786. // }
  787. //}
  788. //else
  789. //{
  790. // short increase = (short)_rd.Next(20, 30);
  791. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") - increase);
  792. // if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") < GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"))
  793. // {
  794. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"));
  795. // }
  796. //}
  797. //// 位置值
  798. //if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") < GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"))
  799. //{
  800. // short increase = (short)_rd.Next(20, 30);
  801. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") + increase);
  802. // if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") > GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"))
  803. // {
  804. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"));
  805. // }
  806. //}
  807. //else
  808. //{
  809. // short increase = (short)_rd.Next(20, 30);
  810. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") - increase);
  811. // if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") < GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"))
  812. // {
  813. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"));
  814. // }
  815. //}
  816. }
  817. void MonitorPressure_Kepler(ModuleName mod)
  818. {
  819. string sAI_Foreline = "AI_Foreline_Pressure_10t";
  820. if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open)
  821. {
  822. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(500, 600));
  823. }
  824. else
  825. {
  826. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(500, 600));
  827. }
  828. // PLC 模拟量范围[0,4000], 电压[0, 10V], 压力[0, 760Torr]
  829. string sAI_ChamberPressure = "AI_Chamber_Pressure_10t";
  830. string sAI_ProcessPressure = "AI_Chamber_Pressure_Virtual";
  831. //float chamber_pressure = GetMockChamberPressure(mod);
  832. //float process_pressure = GetAiValue($"{mod}.AI_Chamber_Pressure_Virtual");
  833. // soft pump & fast pump
  834. DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"];
  835. DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"];
  836. DOAccessor turbo_pump_vlv = IO.DO[$"{mod}.DO_Turbo_Pump_Pumping_Valve"];
  837. if (fast_pump_vlv.Value || soft_pump_vlv.Value || turbo_pump_vlv.Value)
  838. {
  839. if (fast_pump_vlv.Value && soft_pump_vlv.Value)
  840. {
  841. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  842. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  843. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  844. {
  845. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - 30000);
  846. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  847. }
  848. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  849. {
  850. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  851. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1500);
  852. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1500);
  853. }
  854. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(15000, 16000));
  855. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(150, 160));
  856. }
  857. else if (fast_pump_vlv.Value)
  858. {
  859. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  860. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  861. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  862. {
  863. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - 25000);
  864. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  865. }
  866. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  867. {
  868. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  869. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1300);
  870. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1300);
  871. }
  872. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(12000, 13000));
  873. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(120, 130));
  874. }
  875. else if (soft_pump_vlv.Value)
  876. {
  877. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  878. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  879. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  880. {
  881. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - 22000);
  882. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  883. }
  884. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  885. {
  886. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  887. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1100);
  888. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1100);
  889. }
  890. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(13000, 14000));
  891. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(100, 110));
  892. }
  893. else if (turbo_pump_vlv.Value)
  894. {
  895. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  896. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  897. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  898. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  899. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  900. }
  901. }
  902. // fast vent & purge
  903. DOAccessor vent_vlv = IO.DO[$"{mod}.DO_N2_Valve"];
  904. if (vent_vlv.Value)
  905. {
  906. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  907. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  908. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  909. {
  910. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  911. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  912. }
  913. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  914. {
  915. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  916. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  917. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  918. }
  919. else
  920. {
  921. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  922. }
  923. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(25000, 30000));
  924. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(130, 150));
  925. }
  926. // Loadlock Pumping Valve
  927. // 压力值越界,复位
  928. float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  929. if (chamber_pressure1 > ATM_PRESSURE)
  930. {
  931. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  932. }
  933. else if (chamber_pressure1 < 20)
  934. {
  935. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 20);
  936. }
  937. float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  938. if (process_pressure1 > PROCESS_GAUGE)
  939. {
  940. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  941. }
  942. else if (process_pressure1 < 20)
  943. {
  944. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", 20);
  945. }
  946. float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}");
  947. if (foreline_pressure > 10000)
  948. {
  949. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 10000);
  950. }
  951. else if (foreline_pressure < 150)
  952. {
  953. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 150);
  954. }
  955. // ATM switch
  956. IO.DI[$"{mod}.DI_ATM_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ATM_THRESHOLD;
  957. // VAC switch
  958. IO.DI[$"{mod}.DI_VAC_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < VAC_SW_PRESSURE;
  959. }
  960. void MonitorMFPressure()
  961. {
  962. string LLA_AI_ChamberPressure = "AI_LLA_CHB_Pressure";
  963. string LLB_AI_ChamberPressure = "AI_LLB_CHB_Pressure";
  964. string TM_AI_ChamberPressure = "AI_TM_CHB_Pressure";
  965. ModuleName mod = ModuleName.TM;
  966. DOAccessor LLA_fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve_LLA"];
  967. DOAccessor LLA_soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve_LLA"];
  968. DOAccessor LLB_fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve_LLB"];
  969. DOAccessor LLB_soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve_LLB"];
  970. DOAccessor TM_fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve_TM"];
  971. DOAccessor TM_soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve_TM"];
  972. DOAccessor LLA_fast_Vent_vlv = IO.DO[$"{mod}.DO_Vent_Valve_LLA"];
  973. DOAccessor LLA_soft_Vent_vlv = IO.DO[$"{mod}.DO_Purge_Valve_LLA"];
  974. DOAccessor LLB_fast_Vent_vlv = IO.DO[$"{mod}.DO_Vent_Valve_LLB"];
  975. DOAccessor LLB_soft_Vent_vlv = IO.DO[$"{mod}.DO_Purge_Valve_LLB"];
  976. DOAccessor TM_fast_Vent_vlv = IO.DO[$"{mod}.DO_Vent_Valve_TM"];
  977. DOAccessor TM_soft_Vent_vlv = IO.DO[$"{mod}.DO_Purge_Valve_TM"];
  978. float getAiValue_LLA_ChamberPressure = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}");
  979. float getAiValue_LLB_ChamberPressure = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}");
  980. float getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  981. if (LLA_fast_pump_vlv.Value || LLA_soft_pump_vlv.Value)
  982. {
  983. if ( getAiValue_LLA_ChamberPressure > 10000)
  984. {
  985. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") - 30000);
  986. }
  987. else if (getAiValue_LLA_ChamberPressure <= 10000)
  988. {
  989. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") - 1500);
  990. }
  991. }
  992. if (LLB_fast_pump_vlv.Value || LLB_soft_pump_vlv.Value)
  993. {
  994. if (getAiValue_LLB_ChamberPressure > 10000)
  995. {
  996. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") - 30000);
  997. }
  998. else if (getAiValue_LLB_ChamberPressure <= 10000)
  999. {
  1000. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") - 1500);
  1001. }
  1002. }
  1003. if (TM_fast_pump_vlv.Value || TM_soft_pump_vlv.Value)
  1004. {
  1005. if (getAiValue_TM_ChamberPressure > 10000)
  1006. {
  1007. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 30000);
  1008. }
  1009. else if (getAiValue_TM_ChamberPressure <= 10000)
  1010. {
  1011. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 1500);
  1012. }
  1013. }
  1014. if (LLA_fast_Vent_vlv.Value || LLA_soft_Vent_vlv.Value)
  1015. {
  1016. if (getAiValue_LLA_ChamberPressure > 10000)
  1017. {
  1018. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") + 30000);
  1019. }
  1020. else if (getAiValue_LLA_ChamberPressure <= 10000)
  1021. {
  1022. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") + 1500);
  1023. }
  1024. }
  1025. if (LLB_fast_Vent_vlv.Value || LLB_soft_Vent_vlv.Value)
  1026. {
  1027. if (getAiValue_LLB_ChamberPressure > 10000)
  1028. {
  1029. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") + 30000);
  1030. }
  1031. else if (getAiValue_LLB_ChamberPressure <= 10000)
  1032. {
  1033. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") + 1500);
  1034. }
  1035. }
  1036. if (TM_fast_Vent_vlv.Value || TM_soft_Vent_vlv.Value)
  1037. {
  1038. if (getAiValue_TM_ChamberPressure > 10000)
  1039. {
  1040. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 30000);
  1041. }
  1042. else if (getAiValue_TM_ChamberPressure <= 10000)
  1043. {
  1044. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 1500);
  1045. }
  1046. }
  1047. getAiValue_LLA_ChamberPressure = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}");
  1048. if (getAiValue_LLA_ChamberPressure > ATM_PRESSURE)
  1049. {
  1050. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", ATM_PRESSURE);
  1051. }
  1052. else if (getAiValue_LLA_ChamberPressure < 20)
  1053. {
  1054. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", 20);
  1055. }
  1056. getAiValue_LLB_ChamberPressure = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}");
  1057. if (getAiValue_LLB_ChamberPressure > ATM_PRESSURE)
  1058. {
  1059. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", ATM_PRESSURE);
  1060. }
  1061. else if (getAiValue_LLB_ChamberPressure < 20)
  1062. {
  1063. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", 20);
  1064. }
  1065. getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  1066. if (getAiValue_TM_ChamberPressure > ATM_PRESSURE)
  1067. {
  1068. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", ATM_PRESSURE);
  1069. }
  1070. else if (getAiValue_TM_ChamberPressure < 20)
  1071. {
  1072. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", 20);
  1073. }
  1074. // ATM switch
  1075. IO.DI[$"{mod}.DI_TM_ATM_Switch"].Value = GetAiValue($"{mod}.{TM_AI_ChamberPressure}") > ATM_THRESHOLD;
  1076. // VAC switch
  1077. IO.DI[$"{mod}.DI_TM_VAC_Switch"].Value = GetAiValue($"{mod}.{TM_AI_ChamberPressure}") < VAC_SW_PRESSURE;
  1078. // ATM switch
  1079. IO.DI[$"{mod}.DI_LLA_ATM_Switch"].Value = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") > ATM_THRESHOLD;
  1080. // VAC switch
  1081. IO.DI[$"{mod}.DI_LLA_VAC_Switch"].Value = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") < VAC_SW_PRESSURE;
  1082. // ATM switch
  1083. IO.DI[$"{mod}.DI_LLB_ATM_Switch"].Value = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") > ATM_THRESHOLD;
  1084. // VAC switch
  1085. IO.DI[$"{mod}.DI_LLB_VAC_Switch"].Value = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") < VAC_SW_PRESSURE;
  1086. }
  1087. void SetAiValue(string name, float value)
  1088. {
  1089. byte[] flow = BitConverter.GetBytes(value);
  1090. short high1 = BitConverter.ToInt16(flow, 0);
  1091. short low1 = BitConverter.ToInt16(flow, 2);
  1092. IO.AI[name].Buffer[IO.AI[name].Index] = BitConverter.ToInt16(flow, 0);
  1093. IO.AI[name].Buffer[IO.AI[name].Index + 1] = BitConverter.ToInt16(flow, 2);
  1094. byte[] high = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index]);
  1095. byte[] low = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index + 1]);
  1096. float readback = BitConverter.ToSingle(new[] { high[0], high[1], low[0], low[1] }, 0);
  1097. }
  1098. float GetAiValue(string name)
  1099. {
  1100. byte[] high = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index]);
  1101. byte[] low = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index + 1]);
  1102. float flow = BitConverter.ToSingle(new[] { high[0], high[1], low[0], low[1] }, 0);
  1103. return flow;
  1104. }
  1105. float GetAoValue(string name)
  1106. {
  1107. byte[] high = BitConverter.GetBytes(IO.AO[name].Buffer[IO.AO[name].Index]);
  1108. byte[] low = BitConverter.GetBytes(IO.AO[name].Buffer[IO.AO[name].Index + 1]);
  1109. float flow = BitConverter.ToSingle(new[] { high[0], high[1], low[0], low[1] }, 0);
  1110. return flow;
  1111. }
  1112. void MonitorTemperature(ModuleName mod)
  1113. {
  1114. //IO.DI[$"{mod}.DI_Substrate_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_Substrate_Heater_On"].Value;
  1115. IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_Forline_Heater_On"].Value;
  1116. IO.DI[$"{mod}.DI_CHB_Wall_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_CHB_Wall_Heater_On"].Value;
  1117. IO.DI[$"{mod}.DI_Foreline_TC_Deviation_out_of_range"].Value = false;
  1118. IO.DI[$"{mod}.DI_Substrate_TC_Deviation_out_of_range"].Value = false;
  1119. // 底座
  1120. //if (IO.DO[$"{mod}.DO_Substrate_Heater_On"].Value &&
  1121. // GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") < GetAoValue($"{mod}.AO_Substrate_Temperature_Setpoint"))
  1122. //{
  1123. // SetAiValue($"{mod}.AI_Substrate_Control_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") + _rd.Next(1, 2));
  1124. // SetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp") + _rd.Next(1, 2));
  1125. //}
  1126. //else if (IO.DO[$"{mod}.DO_Substrate_Heater_On"].Value &&
  1127. // GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") > GetAoValue($"{mod}.AO_Substrate_Temperature_Setpoint"))
  1128. //{
  1129. // SetAiValue($"{mod}.AI_Substrate_Control_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") - _rd.Next(1, 2));
  1130. // SetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp") - _rd.Next(1, 2));
  1131. //}
  1132. // Foreline
  1133. if (IO.DO[$"{mod}.DO_Forline_Heater_On"].Value &&
  1134. GetAiValue($"{mod}.AI_Fline_Control_TC_Temp") < GetAoValue($"{mod}.AO_Foreline_Temperature_Setpoint"))
  1135. {
  1136. SetAiValue($"{mod}.AI_Fline_Control_TC_Temp", GetAiValue($"{mod}.AI_Fline_Control_TC_Temp") + _rd.Next(1, 2));
  1137. SetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp") + _rd.Next(1, 2));
  1138. }
  1139. else if (IO.DO[$"{mod}.DO_Forline_Heater_On"].Value &&
  1140. GetAiValue($"{mod}.AI_Fline_Control_TC_Temp") > GetAoValue($"{mod}.AO_Foreline_Temperature_Setpoint"))
  1141. {
  1142. SetAiValue($"{mod}.AI_Fline_Control_TC_Temp", GetAiValue($"{mod}.AI_Fline_Control_TC_Temp") - _rd.Next(1, 2));
  1143. SetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp") - _rd.Next(1, 2));
  1144. }
  1145. // Wall
  1146. if (IO.DO[$"{mod}.DO_CHB_Wall_Heater_On"].Value &&
  1147. GetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp") < GetAoValue($"{mod}.AO_CHB_Wall_Temperature_Setpoint"))
  1148. {
  1149. SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp") + _rd.Next(1, 2));
  1150. SetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp") + _rd.Next(1, 2));
  1151. }
  1152. else if (IO.DO[$"{mod}.DO_CHB_Wall_Heater_On"].Value &&
  1153. GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") > GetAoValue($"{mod}.AO_CHB_Wall_Temperature_Setpoint"))
  1154. {
  1155. SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp") - _rd.Next(1, 2));
  1156. SetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp") - _rd.Next(1, 2));
  1157. }
  1158. }
  1159. void MonitorGas(ModuleName mod)
  1160. {
  1161. // gas
  1162. this.SimulateMFC(ModuleName.PMA, 1);
  1163. this.SimulateMFC(ModuleName.PMA, 2);
  1164. this.SimulateMFC(ModuleName.PMA, 3);
  1165. this.SimulateMFC(ModuleName.PMA, 4);
  1166. this.SimulateMFC(ModuleName.PMA, 5);
  1167. this.SimulateMFC(ModuleName.PMA, 6);
  1168. this.SimulateMFC(ModuleName.PMA, 7);
  1169. this.SimulateMFC(ModuleName.PMA, 8);
  1170. this.SimulateN2(ModuleName.PMA);
  1171. this.SimulateHe(ModuleName.PMA);
  1172. }
  1173. private void SimulateMFC(ModuleName mod, byte gasNum)
  1174. {
  1175. var sp = GetAoValue($"{mod}.AO_MFC{gasNum}_Flow_Setpoint");
  1176. var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  1177. SetAiValue($"{mod}.AI_MFC{gasNum}_Flow", (float)mock_fb);
  1178. }
  1179. private void SimulateN2(ModuleName mod)
  1180. {
  1181. var sp = GetAoValue($"{mod}.AO_Turbo_Pump_N2_Flow_Setpoint");
  1182. var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  1183. SetAiValue($"{mod}.AI_Turbo_Pump_N2_Flow", (float)mock_fb);
  1184. }
  1185. private void SimulateHe(ModuleName mod)
  1186. {
  1187. var sp = GetAoValue($"{mod}.AO_He_Flow_Setpoint");
  1188. var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  1189. SetAiValue($"{mod}.AI_ESC_He_Flow", (float)mock_fb);
  1190. }
  1191. void MonitorRF(ModuleName mod)
  1192. {
  1193. // RF generator
  1194. var sp = GetAoValue($"{mod}.AO_Generator_Power_Setpoint");
  1195. var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  1196. //var mock_sp = _rd.Next(sp - 3, sp + 3);
  1197. SetAiValue($"{mod}.AI_Generator_Forward_Power", (float)mock_fb);
  1198. //IO.DI[$"{mod}.DI_Generator_Power_Status"].Value = IO.DO[$"{mod}.DO_Generator_Power_ON"].Value;
  1199. }
  1200. void MonitorIOPumpCtrl(ModuleName mod)
  1201. {
  1202. if (IO.DO[$"{mod}.DO_Pump_Run"].Value) IO.DI[$"{mod}.DI_Dry_Pump_Running"].Value = true;
  1203. if (IO.DO[$"{mod}.DO_Pump_Stop"].Value) IO.DI[$"{mod}.DI_Dry_Pump_Running"].Value = false;
  1204. }
  1205. public void Terminate()
  1206. {
  1207. _thread.Stop();
  1208. }
  1209. public void SetCoolantOutletTemp(string module, int Temp)
  1210. {
  1211. //if (SimulatorJetChamber.CurrentChamber == JetChamber.Venus)
  1212. //{
  1213. //SetAiValue($"{module}.AI_Coolant_Outlet_Temp", Temp);
  1214. //}
  1215. }
  1216. }
  1217. }