| 123456789101112131415161718192021222324252627282930313233343536373839404142434445464748495051525354555657585960616263646566676869707172737475767778798081828384858687888990919293949596979899100101102103104105106107108109110111112113114115116117118119120121122123124125126127128129130131132133134135136 | 
							- using System;
 
- using Aitex.Core.RT.Routine;
 
- using Aitex.Core.RT.SCCore;
 
- using Venus_RT.Devices;
 
- using MECF.Framework.Common.Routine;
 
- using Venus_Core;
 
- namespace Venus_RT.Modules.PMs
 
- {
 
-     class PumpDownRoutine : PMRoutineBase, IRoutine
 
-     {
 
-         private enum PumpStep
 
-         {
 
-             kDelay_2s,
 
-             kCloseISOValve,
 
-             kSoftPump,
 
-             kFastPump,
 
-             kPVHe2,
 
-             kISOValve,
 
-             kTurboN2Purge,
 
-             kVATValve,
 
-             kOpenTurboPumpPurgeGasFinal,
 
-             kFinalStep,
 
-             kEnd,
 
-         }
 
-         //private int _ventTime;
 
-         private int _pump_delay = 5000;
 
-         private int _roughPumpPressure = 75000;
 
-         private int _vHe2FlowPressure = 200;
 
-         private int _basePressure = 10;
 
-         private JetChamber jetChamber = JetChamber.None;
 
-         public PumpDownRoutine(JetPMBase chamber) : base(chamber)
 
-         {
 
-             jetChamber = (JetChamber)SC.GetValue<int>($"{chamber.Name}.ChamberType");
 
-             Name = "PumpDown";
 
-         }
 
-         public RState Start(params object[] objs)
 
-         {
 
-             if (CheckLid() &&
 
-                 CheckSlitDoor())
 
-             {
 
-                 Reset();
 
-                 _chamber.CloseValves();
 
-                 _roughPumpPressure = SC.GetValue<int>($"{Module}.Pump.RoughPumpDownPressure") * 1000;
 
-                 _vHe2FlowPressure = SC.GetValue<int>($"{Module}.Pump.PumpVHe2FlowPressure");
 
-                 _pump_delay = SC.GetValue<int>($"{Module}.Pump.PumpValveDelay") * 1000;
 
-                 _basePressure = (objs.Length >= 1) ? Convert.ToInt32(objs[0]) : SC.GetValue<int>($"{Module}.Pump.PumpBasePressure");
 
-                 _chamber.OpenValve(ValveType.PVN22, true);
 
-                 _chamber.OpenValve(ValveType.TurboPumpPumping, true);
 
-                 _chamber.TurnPendulumValve(false);
 
-                 if (jetChamber == JetChamber.Venus)
 
-                 {
 
-                     _chamber.OpenValve(ValveType.HeISO, false);
 
-                     _chamber.OpenValve(ValveType.PVHe3, false);
 
-                 }
 
-                 return Runner.Start(Module, Name);
 
-             }
 
-             return RState.Failed;
 
-         }
 
-         public RState Monitor()
 
-         {
 
-             Runner.Delay((int)PumpStep.kDelay_2s, _delay_2s)
 
-                 .Run((int)PumpStep.kCloseISOValve, HOFs.WrapAction(_chamber.OpenValve, ValveType.TurboPumpPumping, false), _delay_2s)
 
-                 .Run((int)PumpStep.kSoftPump, HOFs.WrapAction(_chamber.OpenValve, ValveType.SoftPump, true), () => { return _chamber.ChamberPressure < _roughPumpPressure; })
 
-                 .Run((int)PumpStep.kFastPump, OpenFastPump, () => { return _chamber.ChamberPressure < _vHe2FlowPressure; })
 
-                 .Run((int)PumpStep.kPVHe2, OpenHe2Valve, _delay_2s)
 
-                 .Run((int)PumpStep.kISOValve, OpenISOValve, _delay_2s)
 
-                 .Run((int)PumpStep.kVATValve, OpenVATValve, _delay_5s)
 
-                 .Run((int)PumpStep.kOpenTurboPumpPurgeGasFinal, () => 
 
-                 {
 
-                     _chamber.OpenValve(ValveType.TurboPumpPurge, true);
 
-                     _chamber.OpenValve(ValveType.GasFinal, true);
 
-                     return true;
 
-                 }, 3000)
 
-                 .Run((int)PumpStep.kFinalStep,      FinalStep,                                                              () => { return _chamber.ChamberPressure < _basePressure; })
 
-                 .End((int)PumpStep.kEnd,            NullFun,                                                                _delay_1s);
 
-             return Runner.Status;
 
-         }
 
-         private bool OpenFastPump()
 
-         {
 
-             _chamber.OpenValve(ValveType.SoftPump, false);
 
-             _chamber.OpenValve(ValveType.FastPump, true);
 
-             return true;
 
-         }
 
-         private bool OpenHe2Valve()
 
-         {
 
-             _chamber.OpenValve(ValveType.FastPump, false);
 
-             _chamber.OpenValve(ValveType.PVHe2, true);
 
-             return true;
 
-         }
 
-         private bool OpenISOValve()
 
-         {
 
-             
 
-             _chamber.OpenValve(ValveType.PVHe2, false);
 
-             // ISO Valve
 
-             _chamber.OpenValve(ValveType.TurboPumpPumping, true);
 
-             return true;
 
-         }
 
-         private bool OpenVATValve()
 
-         {
 
-             return _chamber.TurnPendulumValve(true);
 
-         }
 
-         private bool FinalStep()
 
-         {
 
-             _chamber.OpenValve(ValveType.Guage, true);
 
-             //2023/04/25修改
 
-             //_chamber.OpenValve(ValveType.TurboPumpPurge, true);
 
-             //_chamber.OpenValve(ValveType.GasFinal, true);
 
-             return true;
 
-         }
 
-         public void Abort()
 
-         {
 
-             CloseAllValves();
 
-         }
 
-     }
 
- }
 
 
  |