SimulatorSystem.cs 78 KB

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  1. using Aitex.Core.RT.DataCenter;
  2. using Aitex.Core.RT.IOCore;
  3. using Aitex.Core.RT.Log;
  4. using Aitex.Core.Util;
  5. using MECF.Framework.Common.Equipment;
  6. using MECF.Framework.Simulator.Core.Driver;
  7. using System;
  8. using System.Collections.Generic;
  9. using Venus_Simulator.Devices;
  10. using System.Threading;
  11. using Venus_Core;
  12. using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.PMs;
  13. namespace Venus_Simulator.Instances
  14. {
  15. public class SimulatorSystem : Singleton<SimulatorSystem>
  16. {
  17. private PeriodicJob _thread;
  18. private Random _rd = new Random();
  19. private RD_TRIG _trigATM = new RD_TRIG();
  20. private RD_TRIG _trigVAC = new RD_TRIG();
  21. private R_TRIG _trigLLExtend = new R_TRIG();
  22. private R_TRIG _trigLLRetract = new R_TRIG();
  23. private static int count = 0;
  24. private readonly float ATM_THRESHOLD = 750000;
  25. private readonly float ATM_PRESSURE = 760000;
  26. private readonly float ATM_LoadLock_PRESSURE = 760000;
  27. private readonly uint VAC_SW_PRESSURE = 9500;
  28. private readonly uint PROCESS_GAUGE = 10000;
  29. private Dictionary<ModuleName, DeviceSimulator> _MockDevices = new Dictionary<ModuleName, DeviceSimulator>();
  30. private Dictionary<ModuleName,JetChamber> jetChambers = new Dictionary<ModuleName,JetChamber>();
  31. public SimulatorSystem()
  32. {
  33. //_MockDevices.Add(ModuleName.PMB, new SkyPumpMock());
  34. //_MockDevices.Add(ModuleName.PMB, new AdTecGeneratorMock());
  35. //_MockDevices.Add(ModuleName.PMB, new AdTecMatchMock());
  36. // TODO
  37. jetChambers.Add(ModuleName.PMA, SimulatorJetChamber.CurrentPMAChamber);
  38. jetChambers.Add(ModuleName.PMB, SimulatorJetChamber.CurrentPMBChamber);
  39. jetChambers.Add(ModuleName.PMC, SimulatorJetChamber.CurrentPMCChamber);
  40. jetChambers.Add(ModuleName.PMD, SimulatorJetChamber.CurrentPMDChamber);
  41. }
  42. ~SimulatorSystem()
  43. {
  44. _thread?.Stop();
  45. }
  46. public void Initialize()
  47. {
  48. SetDefaultValue(ModuleName.PMA, SimulatorJetChamber.CurrentPMAChamber);
  49. SetDefaultValue(ModuleName.PMB, SimulatorJetChamber.CurrentPMBChamber);
  50. SetDefaultValue(ModuleName.PMC, SimulatorJetChamber.CurrentPMCChamber);
  51. SetDefaultValue(ModuleName.PMD, SimulatorJetChamber.CurrentPMDChamber);
  52. SetTMDefaultValue();
  53. Singleton<DataManager>.Instance.Initialize(false);
  54. _thread = new PeriodicJob(500, OnMonitor, nameof(SimulatorSystem), true);
  55. }
  56. private void SetDefaultValue(ModuleName mod,JetChamber jetChamber)
  57. {
  58. switch (jetChamber)
  59. {
  60. case JetChamber.Venus:
  61. IO.DI[$"{mod}.DI_PM_Lid_Closed"].Value = true;
  62. IO.DI[$"{mod}.DI_PM_ATM_SW"].Value = true;
  63. IO.DI[$"{mod}.DI_PM_VAC_SW"].Value = false;
  64. IO.DI[$"{mod}.DI_PCW_Flow_SW"].Value = true;
  65. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  66. IO.DI[$"{mod}.DI_Lift_Pin_Up_POS"].Value = false;
  67. IO.DI[$"{mod}.DI_Lift_Pin_Down_POS"].Value = true;
  68. IO.DI[$"{mod}.DI_RF_Generator_Interlock"].Value = true;
  69. IO.DI[$"{mod}.DI_Source_RF_Fan"].Value = true;
  70. IO.DI[$"{mod}.DI_Turbo_Pump_Interlock"].Value = true;
  71. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = false;
  72. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = true;
  73. IO.DI[$"{mod}.DI_CDA_Pressure"].Value = true;
  74. IO.DI[$"{mod}.DI_Coolant_Inlet_TC_Broken_Alarm"].Value = false;
  75. IO.DI[$"{mod}.DI_Coolant_Outlet_TC_Broken_Alarm"].Value = true;
  76. IO.DI[$"{mod}.DI_Chamber_Pressure_10t_Gauge_Alarm"].Value = false;
  77. IO.DI[$"{mod}.DI_Process_Pressure_100mt_Gauge_Alarm"].Value = false;
  78. IO.DI[$"{mod}.DI_Chamber_Pressure_760t_Gauge_Alarm"].Value = false;
  79. IO.DI[$"{mod}.DI_Foreline_Pressure_760t_Gauge_Alarm"].Value = false;
  80. IO.DI[$"{mod}.DI_LL_Pressure_760t_Gauge_Alarm"].Value = false;
  81. IO.DI[$"{mod}.DI_ESC_He_Pressure_100t_Gauge_Alarm"].Value = false;
  82. IO.DI[$"{mod}.DI_Valve_TC_Deviation_out_of_range"].Value = false;
  83. IO.DI[$"{mod}.DI_Valve_Control_TC_Broken_Alarm"].Value = false;
  84. IO.DI[$"{mod}.DI_Valve_Monitor_TC_Broken_Alarm"].Value = false;
  85. IO.DI[$"{mod}.DI_Valve_Heater_On_FB"].Value = false;
  86. IO.DI[$"{mod}.DI_Foreline_TC_Deviation_out_of_range"].Value = false;
  87. IO.DI[$"{mod}.DI_Foreline_Control_TC_Broken_Alarm"].Value = false;
  88. IO.DI[$"{mod}.DI_Foreline_Monitor_TC_Broken_Alarm"].Value = false;
  89. IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = false;
  90. IO.DI[$"{mod}.DI_CHB_Wall_TC_Deviation_out_of_range"].Value = false;
  91. IO.DI[$"{mod}.DI_CHB_Wall_Control_TC_Broken_Alarm"].Value = false;
  92. IO.DI[$"{mod}.DI_CHB_Wall_Monitor_TC_Broken_Alarm"].Value = false;
  93. IO.DI[$"{mod}.DI_CHB_Wall_Heater_On_FB"].Value = false;
  94. IO.DI[$"{mod}.DI_CHB_Wall_OT_SW_Alarm"].Value = false;
  95. IO.DI[$"{mod}.DI_PN2_Pressure_SW"].Value = true;
  96. IO.DI[$"{mod}.DI_MFC1_Pressure_SW"].Value = true;
  97. IO.DI[$"{mod}.DI_MFC2_Pressure_SW"].Value = true;
  98. IO.DI[$"{mod}.DI_MFC3_Pressure_SW"].Value = true;
  99. IO.DI[$"{mod}.DI_MFC4_Pressure_SW"].Value = true;
  100. IO.DI[$"{mod}.DI_MFC5_Pressure_SW"].Value = true;
  101. IO.DI[$"{mod}.DI_MFC6_Pressure_SW"].Value = true;
  102. IO.DI[$"{mod}.DI_MFC7_Pressure_SW"].Value = true;
  103. IO.DI[$"{mod}.DI_MFC8_Pressure_SW"].Value = true;
  104. IO.DI[$"{mod}.DI_He_Pressure_SW"].Value = true;
  105. IO.DI[$"{mod}.DI_ESC_He_Pressure_100t_Gauge_Alarm"].Value = false;
  106. IO.DI[$"{mod}.DI_Loadlock_Lid_Closed"].Value = true;
  107. IO.DI[$"{mod}.DI_Loadlock_Arm_Extend_POS"].Value = false;
  108. IO.DI[$"{mod}.DI_Loadlock_Arm_Retract_POS"].Value = true;
  109. IO.DI[$"{mod}.DI_Small_Wafer_In_POS"].Value = false;
  110. IO.DI[$"{mod}.DI_Big_Wafer_In_POS"].Value = false;
  111. IO.DI[$"{mod}.DI_Loadlock_ATM_SW"].Value = false;
  112. IO.DI[$"{mod}.DI_Gas_Box_Door_SW"].Value = true;
  113. IO.DI[$"{mod}.DI_Gas_Box_Pressure_SW"].Value = true;
  114. //// pressure
  115. SetAiValue($"{mod}.AI_Foreline_Pressure_760t", 5001);
  116. //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5000);
  117. SetAiValue($"{mod}.AI_Process_Pressure_100mt", 100);
  118. //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  119. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  120. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5000);
  121. SetAiValue($"{mod}.AI_LL_Pressure_760t", ATM_LoadLock_PRESSURE);
  122. //// Temperature
  123. SetAiValue($"{mod}.AI_Valve_Control_TC_Temp", 28);
  124. SetAiValue($"{mod}.AI_Valve_Monitor_TC_Temp", 27);
  125. SetAiValue($"{mod}.AI_Fline_Control_TC_Temp", 28);
  126. SetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp", 27);
  127. SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", 28);
  128. SetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp", 27);
  129. SetAiValue($"{mod}.AI_Coolant_Inlet_Temp", 28);
  130. //if (mod == ModuleName.PMA)
  131. //{
  132. // SetAiValue($"{mod}.AI_Coolant_Outlet_Temp", 29);
  133. //}
  134. //else if (mod == ModuleName.PMB)
  135. //{
  136. // SetAiValue($"{mod}.AI_Coolant_Outlet_Temp", 30);
  137. //}
  138. // Datetime
  139. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  140. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  141. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  142. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  143. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  144. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  145. break;
  146. case JetChamber.Kepler2300:
  147. // chamber
  148. IO.DI[$"{mod}.DI_Lid_Closed"].Value = true;
  149. IO.DI[$"{mod}.DI_ATM_Switch"].Value = true;
  150. IO.DI[$"{mod}.DI_VAC_Switch"].Value = false;
  151. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  152. IO.DI[$"{mod}.DI_Lift_Pin_Up_POS"].Value = false;
  153. IO.DI[$"{mod}.DI_Lift_Pin_Down_POS"].Value = true;
  154. IO.DI[$"{mod}.DI_Source_RF_Generator_Interlock"].Value = true;
  155. IO.DI[$"{mod}.DI_Source_RF_Fan"].Value = true;
  156. IO.DI[$"{mod}.DI_Turbo_Pump_Interlock"].Value = true;
  157. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = false;
  158. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = true;
  159. IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
  160. IO.DI[$"{mod}.DI_S_Valve_TC_Deviation_out_of_range"].Value = false;
  161. IO.DI[$"{mod}.DI_S_Valve_Control_TC_Broken_Alarm"].Value = false;
  162. IO.DI[$"{mod}.DI_S_Valve_Monitor_TC_Broken_Alarm"].Value = false;
  163. IO.DI[$"{mod}.DI_S_Valve_Heater_On_FB"].Value = false;
  164. IO.DI[$"{mod}.DI_Foreline_TC_Deviation_out_of_range"].Value = false;
  165. IO.DI[$"{mod}.DI_Foreline_Control_TC_Broken_Alarm"].Value = false;
  166. IO.DI[$"{mod}.DI_Foreline_Monitor_TC_Broken_Alarm"].Value = false;
  167. IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = false;
  168. IO.DI[$"{mod}.DI_CHB_Wall_TC_Deviation_out_of_range"].Value = false;
  169. IO.DI[$"{mod}.DI_CHB_Wall_Control_TC_Broken_Alarm"].Value = false;
  170. IO.DI[$"{mod}.DI_CHB_Wall_Monitor_TC_Broken_Alarm"].Value = false;
  171. IO.DI[$"{mod}.DI_CHB_Wall_Heater_On_FB"].Value = false;
  172. IO.DI[$"{mod}.DI_CHB_Wall_OT_Switch_Alarm"].Value = false;
  173. IO.DI[$"{mod}.DI_PN2_Pressure_Switch"].Value = true;
  174. IO.DI[$"{mod}.DI_MFC1_Pressure_Switch"].Value = true;
  175. IO.DI[$"{mod}.DI_MFC2_Pressure_Switch"].Value = true;
  176. IO.DI[$"{mod}.DI_MFC3_Pressure_Switch"].Value = true;
  177. IO.DI[$"{mod}.DI_MFC4_Pressure_Switch"].Value = true;
  178. IO.DI[$"{mod}.DI_MFC5_Pressure_Switch"].Value = true;
  179. IO.DI[$"{mod}.DI_MFC6_Pressure_Switch"].Value = true;
  180. IO.DI[$"{mod}.DI_MFC7_Pressure_Switch"].Value = true;
  181. IO.DI[$"{mod}.DI_MFC8_Pressure_Switch"].Value = true;
  182. IO.DI[$"{mod}.DI_ESC_He_Pressure_Switch"].Value = true;
  183. IO.DI[$"{mod}.DI_ESC_He_Pressure_100t_Guage_Alarm"].Value = false;
  184. IO.DI[$"{mod}.DI_Gas_Box_Door_Switch"].Value = true;
  185. IO.DI[$"{mod}.DI_Gas_Box_Pressure_Switch"].Value = true;
  186. IO.DI[$"{mod}.DI_Source_RF_Water_Flow_Switch"].Value = true;
  187. IO.DI[$"{mod}.DI_S_Valve_OT_Switch_Alarm"].Value = false;
  188. IO.DI[$"{mod}.DI_Foreline_OT_Switch_Alarm"].Value = false;
  189. IO.DI[$"{mod}.DI_Arm_Not_Extend_to_PM"].Value = true;
  190. IO.DI[$"{mod}.DI_EFEM_Door_Colse"].Value = true;
  191. IO.DI[$"{mod}.DI_ESC_Inner_Coolant_Flow_SW"].Value = true;
  192. IO.DI[$"{mod}.DI_ESC_Outer_Coolant_Flow_SW"].Value = true;
  193. //// pressure
  194. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 5001);
  195. //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5000);
  196. SetAiValue($"{mod}.AI_Process_Pressure_100mt", 100);
  197. //SetAiValue($"{mod}.AI_Chamber_Pressure_760t", ATM_PRESSURE);
  198. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  199. //// Temperature
  200. SetAiValue($"{mod}.AI_S_Valve_Control_TC_Temp", 28);
  201. SetAiValue($"{mod}.AI_Foreline_Control_TC_Temp", 28);
  202. SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", 28);
  203. SetAiValue($"{mod}.AI_ESC_inner_coolant_outlet_TC_Temp", 20);
  204. SetAiValue($"{mod}.AI_ESC_outer_coolant_outlet_TC_Temp", 30);
  205. SetAiValue($"{mod}.AI_Top_Plate_coolant_outlet_TC_Temp", 40);
  206. // Datetime
  207. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  208. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  209. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  210. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  211. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  212. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  213. break;
  214. case JetChamber.Kepler2200A:
  215. IO.DI[$"{mod}.DI_Lid_Closed"].Value = true;
  216. IO.DI[$"{mod}.DI_ATM_Switch"].Value = true;
  217. IO.DI[$"{mod}.DI_VAC_Switch"].Value = false;
  218. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  219. IO.DI[$"{mod}.DI_Source_RF_Generator_Interlock"].Value = true;
  220. IO.DI[$"{mod}.DI_Source_RF_Fan"].Value = true;
  221. IO.DI[$"{mod}.DI_Turbo_Pump_Interlock"].Value = true;
  222. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = false;
  223. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = true;
  224. IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
  225. IO.DI[$"{mod}.DI_CHB_H-HT_Control_TC_Broken_Alarm"].Value = false;
  226. IO.DI[$"{mod}.DI_CHB_H-HT_Heater_On_FB"].Value = false;
  227. IO.DI[$"{mod}.DI_CHB_H-HT_OT_Switch_Alarm"].Value = false;
  228. IO.DI[$"{mod}.DI_PN2_Pressure_Switch"].Value = true;
  229. IO.DI[$"{mod}.DI_MFC1_Pressure_Switch"].Value = true;
  230. IO.DI[$"{mod}.DI_MFC2_Pressure_Switch"].Value = true;
  231. IO.DI[$"{mod}.DI_MFC3_Pressure_Switch"].Value = true;
  232. IO.DI[$"{mod}.DI_MFC4_Pressure_Switch"].Value = true;
  233. IO.DI[$"{mod}.DI_MFC5_Pressure_Switch"].Value = true;
  234. IO.DI[$"{mod}.DI_MFC6_Pressure_Switch"].Value = true;
  235. IO.DI[$"{mod}.DI_MFC7_Pressure_Switch"].Value = true;
  236. IO.DI[$"{mod}.DI_MFC8_Pressure_Switch"].Value = true;
  237. IO.DI[$"{mod}.DI_N2_Purge_Pressure_Switch"].Value = true;
  238. IO.DI[$"{mod}.DI_Gas_Box_Door_Switch"].Value = true;
  239. IO.DI[$"{mod}.DI_Lid_Up_Limit_Pos_SW"].Value = true;
  240. IO.DI[$"{mod}.DI_S_Valve_OT_Switch_Alarm"].Value = false;
  241. IO.DI[$"{mod}.DI_Lid_Down_Limit_Pos_SW"].Value = true;
  242. IO.DI[$"{mod}.DI_Gas_Box_Pressure_Switch"].Value = true;
  243. IO.DI[$"{mod}.DI_TM_Safety_Door_Colse"].Value = true;
  244. IO.DI[$"{mod}.DI_Arm_Not_Extend_to_PM"].Value = true;
  245. IO.DI[$"{mod}.DI_Source_RF_Water_Flow_Switch"].Value = true;
  246. //// pressure
  247. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 5001);
  248. //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5000);
  249. SetAiValue($"{mod}.AI_Process_Pressure_100mt", 100);
  250. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  251. //// Temperature
  252. SetAiValue($"{mod}.AI_S_Valve_Control_TC_Temp", 28);
  253. SetAiValue($"{mod}.AI_CHB_H-HT_Control_TC_Temp", 28);
  254. // Datetime
  255. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  256. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  257. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  258. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  259. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  260. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  261. break;
  262. }
  263. }
  264. private void SetTMDefaultValue()
  265. {
  266. ModuleName mod = ModuleName.TM;
  267. IO.DI[$"{mod}.DI_TM_Power_On"].Value = true;
  268. IO.DI[$"{mod}.DI_TM_In_Safety"].Value = true;
  269. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  270. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMA"].Value = true;
  271. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMB"].Value = true;
  272. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMC"].Value = true;
  273. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMD"].Value = true;
  274. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_LLA"].Value = true;
  275. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_LLB"].Value = true;
  276. IO.DI[$"{mod}.DI_EFEM_RB_Not_Extend_LLA"].Value = true;
  277. IO.DI[$"{mod}.DI_EFEM_RB_Not_Extend_LLB"].Value = true;
  278. IO.DI[$"{mod}.DI_EFEM_Side_Door_Closed"].Value = true;
  279. IO.DI[$"{mod}.DI_TM_CHB_PCW_Flow_Switch"].Value = true;
  280. IO.DI[$"{mod}.DI_LLA_PCW_Flow_Switch"].Value = true;
  281. IO.DI[$"{mod}.DI_LLB_PCW_Flow_Switch"].Value = true;
  282. IO.DI[$"{mod}.DI_TM_CHB_Door_Closed"].Value = true;
  283. IO.DI[$"{mod}.DI_LLA_Lid_Door_Closed"].Value = true;
  284. IO.DI[$"{mod}.DI_LLB_Lid_Door_Closed"].Value = true;
  285. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_open_Position"].Value = false;
  286. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_close_Position"].Value = true;
  287. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_open_Position"].Value = false;
  288. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_close_Position"].Value = true;
  289. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_open_Position"].Value = false;
  290. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_close_Position"].Value = true;
  291. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_open_Position"].Value = false;
  292. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_close_Position"].Value = true;
  293. IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
  294. IO.DI[$"{mod}.DI_Vaccum_Pressure_Switch"].Value = true;
  295. IO.DI[$"{mod}.DI_N2_Pressure_Switch"].Value = true;
  296. IO.DI[$"{mod}.DI_TM_Chamber_VAC_Gauge_Alarm"].Value = true;
  297. IO.DI[$"{mod}.DI_TM_Foreline_VAC_Gauge_Alarm"].Value = true;
  298. IO.DI[$"{mod}.DI_LLA_Chamber_VAC_Gauge_Alarm"].Value = true;
  299. IO.DI[$"{mod}.DI_LLA_Foreline_VAC_Gauge_Alarm"].Value = true;
  300. IO.DI[$"{mod}.DI_LLB_Chamber_VAC_Gauge_Alarm"].Value = true;
  301. IO.DI[$"{mod}.DI_LLB_Foreline_VAC_Gauge_Alarm"].Value = true;
  302. IO.DI[$"{mod}.DI_TM_ATM_Switch"].Value = true;
  303. IO.DI[$"{mod}.DI_LLA_ATM_Switch"].Value = true;
  304. IO.DI[$"{mod}.DI_LLB_ATM_Switch"].Value = true;
  305. // Datetime
  306. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  307. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  308. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  309. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  310. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  311. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  312. SetAiValue($"{mod}.AI_TM_CHB_Pressure", 760000);
  313. SetAiValue($"{mod}.AI_TM_Foreline_Pressure", 5001);
  314. SetAiValue($"{mod}.AI_LLA_CHB_Pressure", 5002);
  315. SetAiValue($"{mod}.AI_LLA_LLB_Foreline_Pressure", 5003);
  316. SetAiValue($"{mod}.AI_LLB_CHB_Pressure", 5004);
  317. }
  318. private bool OnMonitor()
  319. {
  320. try
  321. {
  322. foreach (var item in jetChambers)
  323. {
  324. switch (item.Value)
  325. {
  326. case JetChamber.Venus:
  327. MonitorSlitDoor(item.Key);
  328. MonitorPin(item.Key);
  329. MonitorPressure(item.Key);
  330. MonitorExtendAndRetract(item.Key);
  331. MonitorGas(item.Key);
  332. this.SimulateHe(item.Key);
  333. //MonitorRF(item.Key);
  334. ChangeTime(item.Key);
  335. //MonitorIOPumpCtrl(item.Key);
  336. break;
  337. case JetChamber.Kepler2300:
  338. MonitorSlitDoor(item.Key);
  339. MonitorPin(item.Key);
  340. MonitorPressure_Kepler(item.Key);
  341. //MonitorTemperature(item.Key);
  342. MonitorGas(item.Key);
  343. this.SimulateHe(item.Key);
  344. //MonitorRF(item.Key);
  345. ChangeTime(item.Key);
  346. //MonitorIOPumpCtrl(item.Key);
  347. MonitorLid(item.Key);
  348. break;
  349. case JetChamber.Kepler2200A:
  350. MonitorSlitDoor(item.Key);
  351. MonitorPressure_Kepler2200A(item.Key);
  352. //MonitorTemperature(item.Key);
  353. MonitorGas(item.Key);
  354. // MonitorRF(item.Key);
  355. ChangeTime(item.Key);
  356. //MonitorIOPumpCtrl(item.Key);
  357. MonitorLid(item.Key);
  358. MonitorIOHighTemperatureHeater(item.Key);
  359. break;
  360. case JetChamber.Kepler2200B:
  361. break;
  362. }
  363. }
  364. ChangeTime(ModuleName.TM);
  365. MonitorMFSlitDoor();
  366. MonitorMFPressure();
  367. }
  368. catch (Exception e)
  369. {
  370. LOG.WriteExeption(e);
  371. }
  372. return true;
  373. }
  374. private void ChangeTime(ModuleName mod)
  375. {
  376. // Heartbeat with PLC
  377. SetAiValue($"{mod}.AI_Heartbeat_FB", GetAoValue($"{mod}.AO_Heartbeat"));
  378. SetAiValue($"{mod}.AI_Year", DateTime.Now.Year);
  379. SetAiValue($"{mod}.AI_Month", DateTime.Now.Month);
  380. SetAiValue($"{mod}.AI_Day", DateTime.Now.Day);
  381. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  382. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  383. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  384. }
  385. void MonitorSlitDoor(ModuleName mod)
  386. {
  387. // slit door open
  388. if (IO.DO[$"{mod}.DO_Slit_Door_Open"].Value)
  389. {
  390. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = true;
  391. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = false;
  392. }
  393. // slit door close
  394. if (IO.DO[$"{mod}.DO_Slit_Door_Close"].Value)
  395. {
  396. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = false;
  397. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = true;
  398. }
  399. }
  400. void MonitorMFSlitDoor()
  401. {
  402. ModuleName mod = ModuleName.TM;
  403. // LLA T door open
  404. if (IO.DO[$"{mod}.DO_LLA_Slit_Door_T_Open"].Value)
  405. {
  406. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_open_Position"].Value = true;
  407. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_close_Position"].Value = false;
  408. }
  409. // LLB T door open
  410. if (IO.DO[$"{mod}.DO_LLB_Slit_Door_T_Open"].Value)
  411. {
  412. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_open_Position"].Value = true;
  413. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_close_Position"].Value = false;
  414. }
  415. // LLA E door open
  416. if (IO.DO[$"{mod}.DO_LLA_Slit_Door_E_Open"].Value)
  417. {
  418. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_open_Position"].Value = true;
  419. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_close_Position"].Value = false;
  420. }
  421. // LLB E door open
  422. if (IO.DO[$"{mod}.DO_LLB_Slit_Door_E_Open"].Value)
  423. {
  424. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_open_Position"].Value = true;
  425. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_close_Position"].Value = false;
  426. }
  427. // LLA T door close
  428. if (IO.DO[$"{mod}.DO_LLA_Slit_Door_T_Close"].Value)
  429. {
  430. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_open_Position"].Value = false;
  431. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_close_Position"].Value = true;
  432. }
  433. // LLB T door close
  434. if (IO.DO[$"{mod}.DO_LLB_Slit_Door_T_Close"].Value)
  435. {
  436. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_open_Position"].Value = false;
  437. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_close_Position"].Value = true;
  438. }
  439. // LLA E door close
  440. if (IO.DO[$"{mod}.DO_LLA_Slit_Door_E_Close"].Value)
  441. {
  442. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_open_Position"].Value = false;
  443. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_close_Position"].Value = true;
  444. }
  445. // LLB E door close
  446. if (IO.DO[$"{mod}.DO_LLB_Slit_Door_E_Close"].Value)
  447. {
  448. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_open_Position"].Value = false;
  449. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_close_Position"].Value = true;
  450. }
  451. }
  452. void MonitorPin(ModuleName mod)
  453. {
  454. // lift pin up
  455. if (IO.DO[$"{mod}.DO_Lift_Pin_Up"].Value != IO.DO[$"{mod}.DO_Lift_Pin_Down"].Value)
  456. {
  457. IO.DI[$"{mod}.DI_Lift_Pin_Up_POS"].Value = IO.DO[$"{mod}.DO_Lift_Pin_Up"].Value;
  458. IO.DI[$"{mod}.DI_Lift_Pin_Down_POS"].Value = IO.DO[$"{mod}.DO_Lift_Pin_Down"].Value;
  459. }
  460. }
  461. void MonitorLid(ModuleName mod)
  462. {
  463. // lift pin up
  464. if (IO.DO[$"{mod}.DO_Lid_Up"].Value != IO.DO[$"{mod}.DO_Lid_Down"].Value)
  465. {
  466. IO.DI[$"{mod}.DI_Lid_Closed"].Value = IO.DO[$"{mod}.DO_Lid_Down"].Value;
  467. }
  468. }
  469. void MonitorExtendAndRetract(ModuleName mod)
  470. {
  471. // Extend
  472. _trigLLExtend.CLK = IO.DO[$"{mod}.DO_Loadlock_Arm_Extend"].Value;
  473. if (_trigLLExtend.Q)
  474. {
  475. _trigLLRetract.RST = true;
  476. Thread.Sleep(500);
  477. IO.DI[$"{mod}.DI_Loadlock_Arm_Extend_POS"].Value = true;
  478. IO.DI[$"{mod}.DI_Loadlock_Arm_Retract_POS"].Value = false;
  479. IO.DI[$"{mod}.DI_Small_Wafer_In_POS"].Value = false;
  480. IO.DI[$"{mod}.DI_Big_Wafer_In_POS"].Value = false;
  481. }
  482. // Retract
  483. _trigLLRetract.CLK = IO.DO[$"{mod}.DO_Loadlock_Arm_Retract"].Value;
  484. if (_trigLLRetract.Q)
  485. {
  486. count++;
  487. _trigLLExtend.RST = true;
  488. Thread.Sleep(500);
  489. IO.DI[$"{mod}.DI_Loadlock_Arm_Extend_POS"].Value = false;
  490. IO.DI[$"{mod}.DI_Loadlock_Arm_Retract_POS"].Value = true;
  491. if (count == 1)
  492. {
  493. IO.DI[$"{mod}.DI_Small_Wafer_In_POS"].Value = false;
  494. IO.DI[$"{mod}.DI_Big_Wafer_In_POS"].Value = false;
  495. }
  496. else if (count == 2)
  497. {
  498. count = 0;
  499. IO.DI[$"{mod}.DI_Small_Wafer_In_POS"].Value = true;
  500. IO.DI[$"{mod}.DI_Big_Wafer_In_POS"].Value = false;
  501. }
  502. }
  503. }
  504. void MonitorPressure(ModuleName mod)
  505. {
  506. string sAI_Foreline = "AI_Foreline_Pressure_760t";
  507. // Loadlock pressure
  508. string sAI_LoadLockPressure = "AI_LL_Pressure_760t";
  509. // Foreline
  510. if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open)
  511. {
  512. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(500, 600));
  513. }
  514. else
  515. {
  516. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(500, 600));
  517. }
  518. // PLC 模拟量范围[0,4000], 电压[0, 10V], 压力[0, 760Torr]
  519. string sAI_ChamberPressure = "AI_Chamber_Pressure_10t";
  520. string sAI_ProcessPressure = "AI_Chamber_Pressure_Virtual";
  521. //float chamber_pressure = GetMockChamberPressure(mod);
  522. //float process_pressure = GetAiValue($"{mod}.AI_Chamber_Pressure_Virtual");
  523. // soft pump & fast pump
  524. DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"];
  525. DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"];
  526. DOAccessor turbo_pump_vlv = IO.DO[$"{mod}.DO_Turbo_Pump_Pumping_Valve"];
  527. if (fast_pump_vlv.Value || soft_pump_vlv.Value || turbo_pump_vlv.Value)
  528. {
  529. //任意泵打开
  530. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  531. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  532. if (fast_pump_vlv.Value && soft_pump_vlv.Value)
  533. {//开双泵
  534. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  535. {
  536. float targetChamberPressure = getAiValue_ChamberPressure - 30000 > 0 ? getAiValue_ChamberPressure - 30000 : 0;
  537. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  538. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  539. }
  540. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  541. {
  542. float targetChamberPressure = getAiValue_ProcessPressure - 1500 > 0 ? getAiValue_ProcessPressure - 1500 : 0;
  543. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  544. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  545. }
  546. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(15000, 16000));
  547. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(150, 160));
  548. }
  549. else if (fast_pump_vlv.Value)//开
  550. {
  551. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  552. {
  553. float targetChamberPressure = getAiValue_ChamberPressure - 25000 > 0 ? getAiValue_ChamberPressure - 25000 : 0;
  554. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  555. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  556. }
  557. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  558. {
  559. float targetChamberPressure = getAiValue_ProcessPressure - 1300 > 0 ? getAiValue_ProcessPressure - 1300 : 0;
  560. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  561. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  562. }
  563. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(12000, 13000));
  564. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(120, 130));
  565. }
  566. else if (soft_pump_vlv.Value)
  567. {
  568. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  569. {
  570. float targetChamberPressure = getAiValue_ChamberPressure - 10000 > 0 ? getAiValue_ChamberPressure - 10000 : 0;
  571. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  572. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  573. }
  574. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  575. {
  576. float targetChamberPressure = getAiValue_ProcessPressure - 1100 > 0 ? getAiValue_ProcessPressure - 1100 : 0;
  577. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  578. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  579. }
  580. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(13000, 14000));
  581. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(100, 110));
  582. }
  583. else if (turbo_pump_vlv.Value)
  584. {
  585. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  586. if ((getAiValue_ChamberPressure - 500) >= 0)
  587. SetAiValue($"{mod}.{sAI_ChamberPressure}", getAiValue_ChamberPressure - 500);
  588. else
  589. SetAiValue($"{mod}.{sAI_ChamberPressure}", 0);
  590. if ((getAiValue_ProcessPressure - 500) >= 0)
  591. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  592. else
  593. SetAiValue($"{mod}.{sAI_ProcessPressure}", 0);
  594. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  595. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  596. }
  597. }
  598. // fast vent & purge
  599. DOAccessor vent_vlv = IO.DO[$"{mod}.DO_N2_Valve"];
  600. //DOAccessor purge_vlv = IO.DO[$"{mod}.DO_Chamber_purge_valve"];
  601. //if (vent_vlv.Value || purge_vlv.Value)
  602. //{
  603. // if (vent_vlv.Value && purge_vlv.Value)
  604. // {
  605. // float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  606. // float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  607. // if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  608. // {
  609. // SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 30000);
  610. // //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  611. // }
  612. // else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  613. // {
  614. // getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  615. // SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1500);
  616. // SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1500);
  617. // }
  618. // //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(45000, 50000));
  619. // //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(150, 160));
  620. // }
  621. // else
  622. //
  623. if (vent_vlv.Value)
  624. {
  625. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  626. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  627. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  628. {
  629. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  630. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  631. }
  632. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  633. {
  634. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  635. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  636. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  637. }
  638. else
  639. {
  640. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  641. }
  642. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(25000, 30000));
  643. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(130, 150));
  644. }
  645. // Loadlock Pumping Valve
  646. DOAccessor Loadlock_pump_vlv = IO.DO[$"{mod}.DO_Loadlock_Pumping_Valve"];
  647. if (Loadlock_pump_vlv.Value)
  648. {
  649. SetAiValue($"{mod}.{sAI_LoadLockPressure}", GetAiValue($"{mod}.{sAI_LoadLockPressure}") - 30000);
  650. }
  651. // Loadlock vent
  652. DOAccessor Loadlock_vent_vlv = IO.DO[$"{mod}.DO_Loadlock_Vent_Valve"];
  653. if (Loadlock_vent_vlv.Value)
  654. {
  655. SetAiValue($"{mod}.{sAI_LoadLockPressure}", GetAiValue($"{mod}.{sAI_LoadLockPressure}") + 30000);
  656. }
  657. // 压力值越界,复位
  658. float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  659. if (chamber_pressure1 > ATM_PRESSURE)
  660. {
  661. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  662. }
  663. else if (chamber_pressure1 < 20)
  664. {
  665. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 20);
  666. }
  667. float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  668. if (process_pressure1 > PROCESS_GAUGE)
  669. {
  670. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  671. }
  672. else if (process_pressure1 < 20)
  673. {
  674. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", 20);
  675. }
  676. float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}");
  677. if (foreline_pressure > 10000)
  678. {
  679. SetAiValue($"{mod}.AI_Foreline_Pressure_760t", 10000);
  680. }
  681. else if (foreline_pressure < 150)
  682. {
  683. SetAiValue($"{mod}.AI_Foreline_Pressure_760t", 150);
  684. }
  685. // 模拟压力计漂移
  686. //int p1 = (int)GetMockChamberPressure(mod);
  687. //int new_p1 = _rd.Next(p1 - 2, p1 + 2);
  688. //SetAiValue($"{mod}.AI_Chamber_Pressure_760t", new_p1);
  689. //int p2 = (int)GetAiValue($"{mod}.AI_Foreline_Pressure_10t");
  690. //int new_p2 = _rd.Next(p2 - 1, p2 + 1);
  691. //SetAiValue($"{mod}.AI_Foreline_Pressure_10t", new_p2);
  692. //int p3 = (int)GetAiValue($"{mod}.AI_Chamber_Pressure_Virtual");
  693. //int new_p3 = _rd.Next(p3 - 1, p3 + 1);
  694. //SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", new_p3);
  695. // 根据当前压力值设定信号
  696. //float chamber_pressure2 = GetMockChamberPressure(mod);
  697. // ATM switch
  698. IO.DI[$"{mod}.DI_PM_ATM_SW"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ATM_THRESHOLD;
  699. // VAC switch
  700. IO.DI[$"{mod}.DI_PM_VAC_SW"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < VAC_SW_PRESSURE;
  701. // Throttle valve
  702. //var pos_sp = IO.AO[$"{mod}.AO_Throttle_Valve_Pressure_Setpoint"].Value;
  703. //var mock_pos_fb = _rd.Next(pos_sp - 2, pos_sp + 2);
  704. ////IO.AI[$"{mod}.AI_Throttle_Valve_Real_Pressure"].Value = (short)mock_pos_fb;
  705. //SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", mock_pos_fb);
  706. // 压力值
  707. //if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") < GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"))
  708. //{
  709. // short increase = (short)_rd.Next(20, 30);
  710. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") + increase);
  711. // if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") > GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"))
  712. // {
  713. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"));
  714. // }
  715. //}
  716. //else
  717. //{
  718. // short increase = (short)_rd.Next(20, 30);
  719. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") - increase);
  720. // if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") < GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"))
  721. // {
  722. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"));
  723. // }
  724. //}
  725. //// 位置值
  726. //if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") < GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"))
  727. //{
  728. // short increase = (short)_rd.Next(20, 30);
  729. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") + increase);
  730. // if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") > GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"))
  731. // {
  732. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"));
  733. // }
  734. //}
  735. //else
  736. //{
  737. // short increase = (short)_rd.Next(20, 30);
  738. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") - increase);
  739. // if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") < GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"))
  740. // {
  741. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"));
  742. // }
  743. //}
  744. }
  745. void MonitorPressure_Kepler(ModuleName mod)
  746. {
  747. string sAI_Foreline = "AI_Foreline_Pressure_10t";
  748. if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open)
  749. {
  750. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(500, 600));
  751. }
  752. else
  753. {
  754. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(500, 600));
  755. }
  756. // PLC 模拟量范围[0,4000], 电压[0, 10V], 压力[0, 760Torr]
  757. string sAI_ChamberPressure = "AI_Chamber_Pressure_10t";
  758. string sAI_ProcessPressure = "AI_Chamber_Pressure_Virtual";
  759. //float chamber_pressure = GetMockChamberPressure(mod);
  760. //float process_pressure = GetAiValue($"{mod}.AI_Chamber_Pressure_Virtual");
  761. // soft pump & fast pump
  762. DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"];
  763. DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"];
  764. DOAccessor turbo_pump_vlv = IO.DO[$"{mod}.DO_Turbo_Pump_Pumping_Valve"];
  765. if (fast_pump_vlv.Value || soft_pump_vlv.Value || turbo_pump_vlv.Value)
  766. {
  767. if (fast_pump_vlv.Value && soft_pump_vlv.Value)
  768. {
  769. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  770. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  771. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  772. {
  773. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - 30000);
  774. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  775. }
  776. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  777. {
  778. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  779. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1500);
  780. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1500);
  781. }
  782. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(15000, 16000));
  783. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(150, 160));
  784. }
  785. else if (fast_pump_vlv.Value)
  786. {
  787. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  788. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  789. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  790. {
  791. float targetPressure = getAiValue_ChamberPressure > 26000 ? GetAiValue($"{mod}.{sAI_ChamberPressure}") - 25000 : 20;
  792. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetPressure);
  793. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  794. }
  795. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  796. {
  797. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  798. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1300);
  799. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1300);
  800. }
  801. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(12000, 13000));
  802. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(120, 130));
  803. }
  804. else if (soft_pump_vlv.Value)
  805. {
  806. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  807. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  808. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  809. {
  810. float targetPressure = getAiValue_ChamberPressure > 23000 ? GetAiValue($"{mod}.{sAI_ChamberPressure}") - 22000 : 20;
  811. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetPressure);
  812. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  813. }
  814. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  815. {
  816. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  817. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1100);
  818. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1100);
  819. }
  820. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(13000, 14000));
  821. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(100, 110));
  822. }
  823. else if (turbo_pump_vlv.Value)
  824. {
  825. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  826. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  827. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  828. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  829. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  830. }
  831. }
  832. // fast vent & purge
  833. DOAccessor vent_vlv = IO.DO[$"{mod}.DO_N2_Valve"];
  834. if (vent_vlv.Value)
  835. {
  836. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  837. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  838. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  839. {
  840. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  841. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  842. }
  843. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  844. {
  845. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  846. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  847. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  848. }
  849. else
  850. {
  851. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  852. }
  853. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(25000, 30000));
  854. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(130, 150));
  855. }
  856. // Loadlock Pumping Valve
  857. // 压力值越界,复位
  858. float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  859. if (chamber_pressure1 > ATM_PRESSURE)
  860. {
  861. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  862. }
  863. else if (chamber_pressure1 < 20)
  864. {
  865. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 20);
  866. }
  867. float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  868. if (process_pressure1 > PROCESS_GAUGE)
  869. {
  870. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  871. }
  872. else if (process_pressure1 < 20)
  873. {
  874. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", 20);
  875. }
  876. float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}");
  877. if (foreline_pressure > 10000)
  878. {
  879. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 10000);
  880. }
  881. else if (foreline_pressure < 150)
  882. {
  883. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 150);
  884. }
  885. // ATM switch
  886. IO.DI[$"{mod}.DI_ATM_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ATM_THRESHOLD;
  887. // VAC switch
  888. IO.DI[$"{mod}.DI_VAC_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < VAC_SW_PRESSURE;
  889. }
  890. void MonitorPressure_Kepler2200A(ModuleName mod)
  891. {
  892. string sAI_Foreline = "AI_Foreline_Pressure_10t";
  893. if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open)
  894. {
  895. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(500, 600));
  896. }
  897. else
  898. {
  899. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(500, 600));
  900. }
  901. // PLC 模拟量范围[0,4000], 电压[0, 10V], 压力[0, 760Torr]
  902. string sAI_ChamberPressure = "AI_Chamber_Pressure_10t";
  903. string sAI_ProcessPressure = "AI_Chamber_Pressure_Virtual";
  904. //float chamber_pressure = GetMockChamberPressure(mod);
  905. //float process_pressure = GetAiValue($"{mod}.AI_Chamber_Pressure_Virtual");
  906. // soft pump & fast pump
  907. DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"];
  908. DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"];
  909. DOAccessor turbo_pump_vlv = IO.DO[$"{mod}.DO_Turbo_Pump_Pumping_Valve"];
  910. if (fast_pump_vlv.Value || soft_pump_vlv.Value || turbo_pump_vlv.Value)
  911. {
  912. if (fast_pump_vlv.Value && soft_pump_vlv.Value)
  913. {
  914. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  915. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  916. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  917. {
  918. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - 30000);
  919. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  920. }
  921. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  922. {
  923. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  924. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1500);
  925. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1500);
  926. }
  927. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(15000, 16000));
  928. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(150, 160));
  929. }
  930. else if (fast_pump_vlv.Value)
  931. {
  932. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  933. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  934. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  935. {
  936. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - 25000);
  937. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  938. }
  939. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  940. {
  941. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  942. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1300);
  943. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1300);
  944. }
  945. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(12000, 13000));
  946. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(120, 130));
  947. }
  948. else if (soft_pump_vlv.Value)
  949. {
  950. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  951. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  952. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  953. {
  954. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - 22000);
  955. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  956. }
  957. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  958. {
  959. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  960. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1100);
  961. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1100);
  962. }
  963. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(13000, 14000));
  964. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(100, 110));
  965. }
  966. else if (turbo_pump_vlv.Value)
  967. {
  968. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  969. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  970. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  971. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  972. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  973. }
  974. }
  975. // fast vent & purge
  976. DOAccessor vent_vlv = IO.DO[$"{mod}.DO_N2_Valve"];
  977. if (vent_vlv.Value)
  978. {
  979. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  980. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  981. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  982. {
  983. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  984. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  985. }
  986. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  987. {
  988. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  989. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  990. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  991. }
  992. else
  993. {
  994. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  995. }
  996. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(25000, 30000));
  997. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(130, 150));
  998. }
  999. // Loadlock Pumping Valve
  1000. // 压力值越界,复位
  1001. float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1002. if (chamber_pressure1 > ATM_PRESSURE)
  1003. {
  1004. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  1005. }
  1006. else if (chamber_pressure1 < 20)
  1007. {
  1008. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 20);
  1009. }
  1010. float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1011. if (process_pressure1 > PROCESS_GAUGE)
  1012. {
  1013. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  1014. }
  1015. else if (process_pressure1 < 20)
  1016. {
  1017. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", 20);
  1018. }
  1019. float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}");
  1020. if (foreline_pressure > 10000)
  1021. {
  1022. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 10000);
  1023. }
  1024. else if (foreline_pressure < 150)
  1025. {
  1026. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 150);
  1027. }
  1028. // ATM switch
  1029. IO.DI[$"{mod}.DI_ATM_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ATM_THRESHOLD;
  1030. // VAC switch
  1031. IO.DI[$"{mod}.DI_VAC_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < VAC_SW_PRESSURE;
  1032. }
  1033. void MonitorMFPressure()
  1034. {
  1035. string LLA_AI_ChamberPressure = "AI_LLA_CHB_Pressure";
  1036. string LLB_AI_ChamberPressure = "AI_LLB_CHB_Pressure";
  1037. string TM_AI_ChamberPressure = "AI_TM_CHB_Pressure";
  1038. ModuleName mod = ModuleName.TM;
  1039. DOAccessor LLA_fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve_LLA"];
  1040. DOAccessor LLA_soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve_LLA"];
  1041. DOAccessor LLB_fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve_LLB"];
  1042. DOAccessor LLB_soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve_LLB"];
  1043. DOAccessor TM_fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve_TM"];
  1044. DOAccessor TM_soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve_TM"];
  1045. DOAccessor LLA_fast_Vent_vlv = IO.DO[$"{mod}.DO_Vent_Valve_LLA"];
  1046. DOAccessor LLA_soft_Vent_vlv = IO.DO[$"{mod}.DO_Purge_Valve_LLA"];
  1047. DOAccessor LLB_fast_Vent_vlv = IO.DO[$"{mod}.DO_Vent_Valve_LLB"];
  1048. DOAccessor LLB_soft_Vent_vlv = IO.DO[$"{mod}.DO_Purge_Valve_LLB"];
  1049. DOAccessor TM_fast_Vent_vlv = IO.DO[$"{mod}.DO_Vent_Valve_TM"];
  1050. DOAccessor TM_soft_Vent_vlv = IO.DO[$"{mod}.DO_Purge_Valve_TM"];
  1051. float getAiValue_LLA_ChamberPressure = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}");
  1052. float getAiValue_LLB_ChamberPressure = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}");
  1053. float getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  1054. if (LLA_fast_pump_vlv.Value || LLA_soft_pump_vlv.Value)
  1055. {
  1056. if ( getAiValue_LLA_ChamberPressure > 10000)
  1057. {
  1058. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") - 30000);
  1059. }
  1060. else if (getAiValue_LLA_ChamberPressure <= 10000)
  1061. {
  1062. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") - 1500);
  1063. }
  1064. }
  1065. if (LLB_fast_pump_vlv.Value || LLB_soft_pump_vlv.Value)
  1066. {
  1067. if (getAiValue_LLB_ChamberPressure > 10000)
  1068. {
  1069. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") - 30000);
  1070. }
  1071. else if (getAiValue_LLB_ChamberPressure <= 10000)
  1072. {
  1073. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") - 1500);
  1074. }
  1075. }
  1076. if (TM_fast_pump_vlv.Value || TM_soft_pump_vlv.Value)
  1077. {
  1078. if (getAiValue_TM_ChamberPressure > 10000)
  1079. {
  1080. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 30000);
  1081. }
  1082. else if (getAiValue_TM_ChamberPressure <= 10000)
  1083. {
  1084. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 1500);
  1085. }
  1086. }
  1087. if (LLA_fast_Vent_vlv.Value || LLA_soft_Vent_vlv.Value)
  1088. {
  1089. if (getAiValue_LLA_ChamberPressure > 10000)
  1090. {
  1091. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") + 30000);
  1092. }
  1093. else if (getAiValue_LLA_ChamberPressure <= 10000)
  1094. {
  1095. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") + 1500);
  1096. }
  1097. }
  1098. if (LLB_fast_Vent_vlv.Value || LLB_soft_Vent_vlv.Value)
  1099. {
  1100. if (getAiValue_LLB_ChamberPressure > 10000)
  1101. {
  1102. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") + 30000);
  1103. }
  1104. else if (getAiValue_LLB_ChamberPressure <= 10000)
  1105. {
  1106. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") + 1500);
  1107. }
  1108. }
  1109. if (TM_fast_Vent_vlv.Value || TM_soft_Vent_vlv.Value)
  1110. {
  1111. if (getAiValue_TM_ChamberPressure > 10000)
  1112. {
  1113. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 30000);
  1114. }
  1115. else if (getAiValue_TM_ChamberPressure <= 10000)
  1116. {
  1117. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 1500);
  1118. }
  1119. }
  1120. getAiValue_LLA_ChamberPressure = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}");
  1121. if (getAiValue_LLA_ChamberPressure > ATM_PRESSURE)
  1122. {
  1123. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", ATM_PRESSURE);
  1124. }
  1125. else if (getAiValue_LLA_ChamberPressure < 20)
  1126. {
  1127. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", 20);
  1128. }
  1129. getAiValue_LLB_ChamberPressure = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}");
  1130. if (getAiValue_LLB_ChamberPressure > ATM_PRESSURE)
  1131. {
  1132. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", ATM_PRESSURE);
  1133. }
  1134. else if (getAiValue_LLB_ChamberPressure < 20)
  1135. {
  1136. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", 20);
  1137. }
  1138. getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  1139. if (getAiValue_TM_ChamberPressure > ATM_PRESSURE)
  1140. {
  1141. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", ATM_PRESSURE);
  1142. }
  1143. else if (getAiValue_TM_ChamberPressure < 20)
  1144. {
  1145. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", 20);
  1146. }
  1147. // ATM switch
  1148. IO.DI[$"{mod}.DI_TM_ATM_Switch"].Value = GetAiValue($"{mod}.{TM_AI_ChamberPressure}") > ATM_THRESHOLD;
  1149. // VAC switch
  1150. IO.DI[$"{mod}.DI_TM_VAC_Switch"].Value = GetAiValue($"{mod}.{TM_AI_ChamberPressure}") < VAC_SW_PRESSURE;
  1151. // ATM switch
  1152. IO.DI[$"{mod}.DI_LLA_ATM_Switch"].Value = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") > ATM_THRESHOLD;
  1153. // VAC switch
  1154. IO.DI[$"{mod}.DI_LLA_VAC_Switch"].Value = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") < VAC_SW_PRESSURE;
  1155. // ATM switch
  1156. IO.DI[$"{mod}.DI_LLB_ATM_Switch"].Value = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") > ATM_THRESHOLD;
  1157. // VAC switch
  1158. IO.DI[$"{mod}.DI_LLB_VAC_Switch"].Value = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") < VAC_SW_PRESSURE;
  1159. }
  1160. void SetAiValue(string name, float value)
  1161. {
  1162. byte[] flow = BitConverter.GetBytes(value);
  1163. short high1 = BitConverter.ToInt16(flow, 0);
  1164. short low1 = BitConverter.ToInt16(flow, 2);
  1165. IO.AI[name].Buffer[IO.AI[name].Index] = BitConverter.ToInt16(flow, 0);
  1166. IO.AI[name].Buffer[IO.AI[name].Index + 1] = BitConverter.ToInt16(flow, 2);
  1167. byte[] high = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index]);
  1168. byte[] low = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index + 1]);
  1169. float readback = BitConverter.ToSingle(new[] { high[0], high[1], low[0], low[1] }, 0);
  1170. }
  1171. float GetAiValue(string name)
  1172. {
  1173. byte[] high = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index]);
  1174. byte[] low = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index + 1]);
  1175. float flow = BitConverter.ToSingle(new[] { high[0], high[1], low[0], low[1] }, 0);
  1176. return flow;
  1177. }
  1178. float GetAoValue(string name)
  1179. {
  1180. byte[] high = BitConverter.GetBytes(IO.AO[name].Buffer[IO.AO[name].Index]);
  1181. byte[] low = BitConverter.GetBytes(IO.AO[name].Buffer[IO.AO[name].Index + 1]);
  1182. float flow = BitConverter.ToSingle(new[] { high[0], high[1], low[0], low[1] }, 0);
  1183. return flow;
  1184. }
  1185. void MonitorTemperature(ModuleName mod)
  1186. {
  1187. //IO.DI[$"{mod}.DI_Substrate_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_Substrate_Heater_On"].Value;
  1188. IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_Forline_Heater_On"].Value;
  1189. IO.DI[$"{mod}.DI_CHB_Wall_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_CHB_Wall_Heater_On"].Value;
  1190. IO.DI[$"{mod}.DI_Foreline_TC_Deviation_out_of_range"].Value = false;
  1191. IO.DI[$"{mod}.DI_Substrate_TC_Deviation_out_of_range"].Value = false;
  1192. // 底座
  1193. //if (IO.DO[$"{mod}.DO_Substrate_Heater_On"].Value &&
  1194. // GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") < GetAoValue($"{mod}.AO_Substrate_Temperature_Setpoint"))
  1195. //{
  1196. // SetAiValue($"{mod}.AI_Substrate_Control_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") + _rd.Next(1, 2));
  1197. // SetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp") + _rd.Next(1, 2));
  1198. //}
  1199. //else if (IO.DO[$"{mod}.DO_Substrate_Heater_On"].Value &&
  1200. // GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") > GetAoValue($"{mod}.AO_Substrate_Temperature_Setpoint"))
  1201. //{
  1202. // SetAiValue($"{mod}.AI_Substrate_Control_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") - _rd.Next(1, 2));
  1203. // SetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp") - _rd.Next(1, 2));
  1204. //}
  1205. // Foreline
  1206. if (IO.DO[$"{mod}.DO_Forline_Heater_On"].Value &&
  1207. GetAiValue($"{mod}.AI_Fline_Control_TC_Temp") < GetAoValue($"{mod}.AO_Foreline_Temperature_Setpoint"))
  1208. {
  1209. SetAiValue($"{mod}.AI_Fline_Control_TC_Temp", GetAiValue($"{mod}.AI_Fline_Control_TC_Temp") + _rd.Next(1, 2));
  1210. SetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp") + _rd.Next(1, 2));
  1211. }
  1212. else if (IO.DO[$"{mod}.DO_Forline_Heater_On"].Value &&
  1213. GetAiValue($"{mod}.AI_Fline_Control_TC_Temp") > GetAoValue($"{mod}.AO_Foreline_Temperature_Setpoint"))
  1214. {
  1215. SetAiValue($"{mod}.AI_Fline_Control_TC_Temp", GetAiValue($"{mod}.AI_Fline_Control_TC_Temp") - _rd.Next(1, 2));
  1216. SetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp") - _rd.Next(1, 2));
  1217. }
  1218. // Wall
  1219. if (IO.DO[$"{mod}.DO_CHB_Wall_Heater_On"].Value &&
  1220. GetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp") < GetAoValue($"{mod}.AO_CHB_Wall_Temperature_Setpoint"))
  1221. {
  1222. SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp") + _rd.Next(1, 2));
  1223. SetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp") + _rd.Next(1, 2));
  1224. }
  1225. else if (IO.DO[$"{mod}.DO_CHB_Wall_Heater_On"].Value &&
  1226. GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") > GetAoValue($"{mod}.AO_CHB_Wall_Temperature_Setpoint"))
  1227. {
  1228. SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp") - _rd.Next(1, 2));
  1229. SetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp") - _rd.Next(1, 2));
  1230. }
  1231. }
  1232. void MonitorGas(ModuleName mod)
  1233. {
  1234. // gas
  1235. this.SimulateMFC(mod, 1);
  1236. this.SimulateMFC(mod, 2);
  1237. this.SimulateMFC(mod, 3);
  1238. this.SimulateMFC(mod, 4);
  1239. this.SimulateMFC(mod, 5);
  1240. this.SimulateMFC(mod, 6);
  1241. this.SimulateMFC(mod, 7);
  1242. this.SimulateMFC(mod, 8);
  1243. this.SimulateN2(mod);
  1244. }
  1245. private void SimulateMFC(ModuleName mod, byte gasNum)
  1246. {
  1247. var sp = GetAoValue($"{mod}.AO_MFC{gasNum}_Flow_Setpoint");
  1248. var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  1249. SetAiValue($"{mod}.AI_MFC{gasNum}_Flow", (float)mock_fb);
  1250. }
  1251. private void SimulateN2(ModuleName mod)
  1252. {
  1253. var sp = GetAoValue($"{mod}.AO_Turbo_Pump_N2_Flow_Setpoint");
  1254. var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  1255. SetAiValue($"{mod}.AI_Turbo_Pump_N2_Flow", (float)mock_fb);
  1256. }
  1257. private void SimulateHe(ModuleName mod)
  1258. {
  1259. var sp = GetAoValue($"{mod}.AO_He_Flow_Setpoint");
  1260. var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  1261. SetAiValue($"{mod}.AI_ESC_He_Flow", (float)mock_fb);
  1262. }
  1263. void MonitorRF(ModuleName mod)
  1264. {
  1265. // RF generator
  1266. var sp = GetAoValue($"{mod}.AO_Generator_Power_Setpoint");
  1267. var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  1268. //var mock_sp = _rd.Next(sp - 3, sp + 3);
  1269. SetAiValue($"{mod}.AI_Generator_Forward_Power", (float)mock_fb);
  1270. //IO.DI[$"{mod}.DI_Generator_Power_Status"].Value = IO.DO[$"{mod}.DO_Generator_Power_ON"].Value;
  1271. }
  1272. void MonitorIOPumpCtrl(ModuleName mod)
  1273. {
  1274. if (IO.DO[$"{mod}.DO_Pump_Run"].Value) IO.DI[$"{mod}.DI_Dry_Pump_Running"].Value = true;
  1275. if (IO.DO[$"{mod}.DO_Pump_Stop"].Value) IO.DI[$"{mod}.DI_Dry_Pump_Running"].Value = false;
  1276. }
  1277. void MonitorIOHighTemperatureHeater(ModuleName mod)
  1278. {
  1279. if (IO.DO[$"{mod}.DO_Lift_Servo_Go_Position1"].Value)
  1280. {
  1281. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = true;
  1282. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = false;
  1283. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = false;
  1284. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = false;
  1285. }
  1286. if (IO.DO[$"{mod}.DO_Lift_Servo_Go_Position2"].Value)
  1287. {
  1288. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = false;
  1289. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = true;
  1290. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = false;
  1291. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = false;
  1292. }
  1293. if (IO.DO[$"{mod}.DO_Lift_Servo_Go_Position3"].Value)
  1294. {
  1295. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = false;
  1296. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = false;
  1297. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = true;
  1298. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = false;
  1299. }
  1300. if (IO.DO[$"{mod}.DO_Lift_Servo_Origin"].Value)
  1301. {
  1302. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = false;
  1303. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = false;
  1304. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = false;
  1305. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = true;
  1306. }
  1307. IO.DI[$"{mod}.DI_CHB_H-HT_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_CHB_H-HT_Heater_On"].Value;
  1308. var sp = GetAoValue($"{mod}.AO_CHB_H-HT_Temperature_Setpoint");
  1309. var mock_fb = _rd.Next((int)sp - 1, (int)sp + 1) + _rd.NextDouble();
  1310. //var mock_sp = _rd.Next(sp - 3, sp + 3);
  1311. SetAiValue($"{mod}.AI_CHB_H-HT_Control_TC_Temp", (float)mock_fb);
  1312. }
  1313. public void Terminate()
  1314. {
  1315. _thread.Stop();
  1316. }
  1317. public void SetCoolantOutletTemp(string module, int Temp)
  1318. {
  1319. //if (SimulatorJetChamber.CurrentChamber == JetChamber.Venus)
  1320. //{
  1321. //SetAiValue($"{module}.AI_Coolant_Outlet_Temp", Temp);
  1322. //}
  1323. }
  1324. }
  1325. }