| 123456789101112131415161718192021222324252627282930313233343536373839404142434445464748495051525354555657585960616263646566676869707172737475767778798081828384858687888990919293949596979899100101102103104105106107108109 | 
							- using Aitex.Core.RT.Routine;
 
- using Aitex.Core.RT.SCCore;
 
- using System;
 
- using System.Collections.Generic;
 
- using System.Linq;
 
- using System.Text;
 
- using System.Threading.Tasks;
 
- using Venus_Core;
 
- using Venus_RT.Devices;
 
- using Venus_Unity;
 
- namespace Venus_RT.Modules.PMs
 
- {
 
-     class PMPartialPressureRoutine : PMRoutineBase, IRoutine
 
-     {
 
-         int gasIndex;
 
-         int GasMaxScale;
 
-         public int counter;
 
-         int gasTime;
 
-         ValveType[] valveTypes = new ValveType[4] { ValveType.PV11, ValveType.PV21, ValveType.PV31, ValveType.PV41 };
 
-         public PartialPressureResult m_PartialPressureResult=new PartialPressureResult ();
 
-         public StringBuilder m_sb = new StringBuilder();
 
-         private enum PartialPressureStep
 
-         {
 
-             kDelay_1s,
 
-             kStartGas,
 
-             kReadChamberPressure,
 
-             kEnd,
 
-         }
 
-         public PMPartialPressureRoutine(JetPMBase chamber) : base(chamber)
 
-         {
 
-             Name = "PMPartialPressure";
 
-         }
 
-         public RState Start(params object[] objs)
 
-         {
 
-             if (!CheckTurboPump())
 
-             {
 
-                 return RState.Failed;
 
-             }
 
-             if (_chamber.GetPVPosition() == 0)
 
-             {
 
-                 Stop("钟摆阀没有打开");
 
-                 return RState.Failed;
 
-             }
 
-             _chamber.OpenValve(ValveType.Guage, true);
 
-             _chamber.OpenValve(ValveType.TurboPumpPumping, true);
 
-             _chamber.OpenValve(ValveType.TurboPumpPurge, true);
 
-             counter = 1;
 
-             Reset();
 
-             gasIndex = (int)objs[0];
 
-             gasTime  = (int)objs[1];
 
-             GasMaxScale = SC.GetValue<int>($"{Module}.MfcGas{gasIndex.ToString()}.MfcN2Scale");
 
-             //_chamber.CloseValves();
 
-             _chamber.SetPVPostion(1000);
 
-             m_PartialPressureResult.StartTime= DateTime.Now.ToString("yyyyMMddHHmm");
 
-             m_PartialPressureResult.FlowTime = gasTime;
 
-             m_PartialPressureResult.GasName= $"Gas{gasIndex.ToString()}";
 
-             m_PartialPressureResult.ValuePairs.Clear();
 
-             m_sb.Clear();
 
-             return Runner.Start(Module, Name);
 
-         }
 
-         public RState Monitor()
 
-         {
 
-             Runner.Delay((int)PartialPressureStep.kDelay_1s, 1000 * 1)
 
-                   .LoopStart((int)PartialPressureStep.kStartGas, "Partial Pressure Test", 10, () => SetGasPoint(), gasTime)
 
-                   .LoopEnd((int)PartialPressureStep.kReadChamberPressure, ReadChamberPressure, _delay_1s)
 
-                   .End((int)PartialPressureStep.kEnd, () => 
 
-                   {
 
-                       _chamber.CloseValves();
 
-                       m_PartialPressureResult.EndTime = DateTime.Now.ToString("yyyyMMddHHmm");
 
-                       SerializeHelper.Instance.WriteToJsonFile<PartialPressureResult>(m_PartialPressureResult, $"PartialPressureResult/{m_PartialPressureResult.GasName}/{m_PartialPressureResult.StartTime}.json");
 
-                       return true; 
 
-                   }, 500);            
 
-             return Runner.Status;
 
-         }
 
-         private bool SetGasPoint()
 
-         {
 
-             if (gasIndex <= 4)
 
-             {
 
-                 _chamber.OpenValve(valveTypes[gasIndex - 1], true);
 
-             }
 
-             _chamber.OpenValve(ValveType.GasFinal, true);
 
-             _chamber.FlowGas(gasIndex - 1, GasMaxScale * 0.1 * counter);
 
-             return true;
 
-         }
 
-         private bool ReadChamberPressure()
 
-         {
 
-             var pressure = Math.Round(_chamber.ProcessLowPressure, 3);
 
-             m_PartialPressureResult.ValuePairs.Add(new Value() { Flow = (GasMaxScale * 0.1 * counter).ToString(), Pressure = pressure });
 
-             m_sb.Append(pressure.ToString());
 
-             m_sb.Append(',');
 
-             counter += 1;
 
-             return true;
 
-         }
 
-         public void Abort()
 
-         {
 
-             _chamber.CloseValves();
 
-         }
 
-     }
 
- }
 
 
  |