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PM
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b67769ec2c
ui优化
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8 months ago |
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TM
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b67769ec2c
ui优化
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8 months ago |
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ClusterGemModel.xml
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60e9a04892
Simulator LP3 Update
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1 year ago |
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DBModel.sql
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1c2b8b53bb
1.添加用户权限功能
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8 months ago |
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DESequenceFormat.xml
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afa8662437
Changed from VPA to Aligner1 && Removed PreClean, PostClean in SequenceInfo
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10 months ago |
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DataGroup.xml
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a98efc8a0b
1.修改kepler2300 FDC 运行报错bug
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1 year ago |
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DeviceModel.xsd
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d8e5f1dc2c
2022 last update
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2 years ago |
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EquipmentVariables.xml
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2241125f83
fixed EquipmentVariables.xml eventset cannot be empty
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8 months ago |
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EventDefine.xml
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3f9c41937a
update for event module enhancement
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2 years ago |
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IoProviderConfig.xml
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dd99f38e54
change the system by configtype in App.config in RT,Simulator && change the temp by chillertype in VenusDE
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10 months ago |
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LogDefine.json
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99d939492e
1.加登出界面
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9 months ago |
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RecipeFormat.xml
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9760d40cf7
port simulator
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2 years ago |
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SESequenceFormat.xml
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afa8662437
Changed from VPA to Aligner1 && Removed PreClean, PostClean in SequenceInfo
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10 months ago |
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SVID.xls
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25954d684c
update EquipmentVariables.xml and Secsgem dll
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10 months ago |
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SequenceFormat.xml
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33d0cd73dd
1.修复Pump Counter 显示错误bug
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8 months ago |
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SignalTower.xml
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33d0cd73dd
1.修复Pump Counter 显示错误bug
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8 months ago |
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System.sccfg
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afa8662437
Changed from VPA to Aligner1 && Removed PreClean, PostClean in SequenceInfo
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10 months ago |
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System_Kepler2200.sccfg
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a850db5a2d
Enhance the cooling algorithm to avoid processed wafer stay loadlock too long.
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7 months ago |
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System_Kepler2300.sccfg
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a850db5a2d
Enhance the cooling algorithm to avoid processed wafer stay loadlock too long.
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7 months ago |
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System_VenusDE.sccfg
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3b9c2c346d
1. add missing item in SE/DE Sccfg
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9 months ago |
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System_VenusSE.sccfg
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3b9c2c346d
1. add missing item in SE/DE Sccfg
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9 months ago |
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VenusPreProcess.py
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64c7ef574e
log
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2 years ago |
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VenusSignalTower.xml
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7a07ffa5ca
1. add SignalTower for Venus System by VenusSignalTower.xml
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9 months ago |
sangwq
a850db5a2d
Enhance the cooling algorithm to avoid processed wafer stay loadlock too long.