OverKepler2200AViewModel.cs 67 KB

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  1. using Aitex.Core.Common.DeviceData;
  2. using MECF.Framework.Common.DataCenter;
  3. using MECF.Framework.Common.OperationCenter;
  4. using Prism.Commands;
  5. using Prism.Mvvm;
  6. using System;
  7. using System.Collections.Generic;
  8. using System.Windows;
  9. using System.Windows.Threading;
  10. using Venus_Core;
  11. using Venus_MainPages.Views;
  12. using System.Linq;
  13. using System.Threading.Tasks;
  14. using Microsoft.Win32;
  15. using System.IO;
  16. using Venus_Themes.CustomControls;
  17. using Venus_MainPages.Unity;
  18. using Venus_Unity;
  19. using MECF.Framework.Common.CommonData.DeviceData;
  20. using System.Windows.Shapes;
  21. using Path = System.IO.Path;
  22. using MECF.Framework.Common.Equipment;
  23. using System.Windows.Controls;
  24. namespace Venus_MainPages.ViewModels
  25. {
  26. internal class OverKepler2200AViewModel : BindableBase
  27. {
  28. #region 私有字段
  29. private double m_TurboN2FlowSetPoint;
  30. private List<string> m_CurrentModuleRecipes=new List<string>();
  31. private bool m_PVN21ValveIsOpen;
  32. private bool m_PVN22ValveIsOpen;
  33. private bool m_N2ValveIsOpen;
  34. private bool m_PV11ValveIsOpen;
  35. private bool m_PV12ValveIsOpen;
  36. private bool m_PV21ValveIsOpen;
  37. private bool m_PV22ValveIsOpen;
  38. private bool m_PV31ValveIsOpen;
  39. private bool m_PV32ValveIsOpen;
  40. private bool m_PV41ValveIsOpen;
  41. private bool m_PV42ValveIsOpen;
  42. private bool m_MFC1ValveIsOpen;
  43. private bool m_MFC2ValveIsOpen;
  44. private bool m_MFC3ValveIsOpen;
  45. private bool m_MFC4ValveIsOpen;
  46. private bool m_MFC5ValveIsOpen;
  47. private bool m_MFC6ValveIsOpen;
  48. private bool m_MFC7ValveIsOpen;
  49. private bool m_MFC8ValveIsOpen;
  50. private bool m_GasFinalValveIsOpen;
  51. private bool m_SoftPumpValveIsOpen;
  52. private bool m_FastPumpValveIsOpen;
  53. private bool m_PVHe1ValveIsOpen;
  54. private bool m_PVHe2ValveIsOpen;
  55. private bool m_TurboPumpPumpingValveIsOpen;
  56. private bool m_TurboPumpPurgeValveIsOpen;
  57. private bool m_GuageValveIsOpen;
  58. private bool m_PendulumValveIsOpen;
  59. //private bool m_BRFIsOn;
  60. //private bool m_SRFIsOn;
  61. private double m_HeGasSetpoint;
  62. private int m_HePressureSetpoint;
  63. private float m_SRFFwdPowerSetpoint;
  64. private float m_BRFFwdPowerSetpoint;
  65. private float m_SRFMatchC1;
  66. private float m_SRFMatchC2;
  67. private float m_BRFMatchC1;
  68. private float m_BRFMatchC2;
  69. private double m_MFC1SetPoint;
  70. private double m_MFC2SetPoint;
  71. private double m_MFC3SetPoint;
  72. private double m_MFC4SetPoint;
  73. private double m_MFC5SetPoint;
  74. private double m_MFC6SetPoint;
  75. private double m_MFC7SetPoint;
  76. private double m_MFC8SetPoint;
  77. private double m_N2SetPoint;
  78. private AITMfcData m_MFC1Data;
  79. private AITMfcData m_MFC2Data;
  80. private AITMfcData m_MFC3Data;
  81. private AITMfcData m_MFC4Data;
  82. private AITMfcData m_MFC5Data;
  83. private AITMfcData m_MFC6Data;
  84. private AITMfcData m_MFC7Data;
  85. private AITMfcData m_MFC8Data;
  86. private AITMfcData m_MFCHeData;
  87. private AITMfcData m_MFCN2Data;
  88. //private AITHeaterData m_ValveHeaterData;
  89. //private AITHeaterData m_ForelineHeaterData;
  90. //private AITHeaterData m_WallHeaterData;
  91. private AITHeaterData m_PendulumHeaterData;
  92. private AITRfData m_SRFData;
  93. private AITRfData m_BRFData;
  94. private AITPendulumValveData m_PendulumValveData;
  95. //private AITHVData m_ESCHVData;
  96. private PMState m_PMCurrentState;
  97. private bool m_SourceRFFanInterlock;
  98. private bool m_IsWLK;
  99. private bool m_IsWaterFlowOk;
  100. private bool m_IsTurboPumpInterlock;
  101. private bool m_IsCDAOK;
  102. private bool m_SensorGasBoxDoor;
  103. private bool m_SensorGasBoxPressure;
  104. private bool m_PumpIsOpen;
  105. private bool m_TurboIsOpen;
  106. private bool m_IsATM;
  107. private bool m_IsVAC;
  108. private List<string> m_RtDataKeys;
  109. private Dictionary<string, object> m_RtDataValues;
  110. private int m_PositionValue;
  111. private bool m_IsPositionMode;
  112. private int m_ESCVoltage;
  113. private bool m_GasIsFlowing;
  114. private bool m_IsProcessing;
  115. private bool m_IsAutoMode;
  116. private string m_SelectedRecipe;
  117. private float m_ChillerTempSetpoint;
  118. private float m_WallTempSetpoint;
  119. private bool m_HeIsPressureMode=true;
  120. private bool m_ChillerIsOn;
  121. private float m_ProcessHighPressure;
  122. private float m_ProcessLowPressure;
  123. private float m_ForelinePressurePressure;
  124. private float m_ESCHePressure;
  125. ButterflyValveView butterflyValveMessageBox;
  126. HeaterView heaterView;
  127. private int m_TurboPumpRotationalSpeed;
  128. private bool m_LiftPinIsUp;
  129. private bool m_IsSlitDoorClosed;
  130. private bool m_IsLidClosed;
  131. private float m_ChillerTemperature;
  132. //private float m_HVTemperature;
  133. private int m_ESCHVOutputVoltage;
  134. //private float m_SRfReflectPower;
  135. //private float m_SRfForwardPowerFeedBack;
  136. //private float m_BRfReflectPower;
  137. //private float m_BRfForwardPowerFeedBack;
  138. //private int m_MatchWorkMode;
  139. //private int m_BiasMatchWorkMode;
  140. private float m_MatchC1;
  141. private float m_MatchC2;
  142. private string m_MatchWorkMode;
  143. private float m_BiasMatchC1;
  144. private float m_BiasMatchC2;
  145. private float m_PendulumValvePosition;
  146. private bool m_IsTurboPumpAtSpeed;
  147. private bool m_TurboPumpWaterFlowSwitch;
  148. private bool m_IsHasWafer;
  149. private Recipe m_CurrentRecipe=new Recipe ();
  150. private RecipeResult m_CurrentRecipeResult=new RecipeResult ();
  151. private RecipeStep m_CurrentRecipeStep = new RecipeStep();
  152. private double m_ChamberPressureFeedBack;
  153. private string m_WaferID;
  154. private string m_ModuleName;
  155. private int? currentRecipeNumber;
  156. private AITHighTemperatureHeaterData m_HighTemperatureHeaterData;
  157. private ComboBoxItem m_SelectedPosition;
  158. private int m_HighTemperatureHeaterTemperatureSetpoint;
  159. #endregion
  160. #region 属性
  161. public double TurboN2FlowSetPoint
  162. {
  163. get { return m_TurboN2FlowSetPoint; }
  164. set
  165. {
  166. if (value != m_TurboN2FlowSetPoint)
  167. {
  168. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", value);
  169. }
  170. SetProperty(ref m_TurboN2FlowSetPoint, value);
  171. }
  172. }
  173. public List<string> CurrentModuleRecipes
  174. {
  175. get { return m_CurrentModuleRecipes; }
  176. set { SetProperty(ref m_CurrentModuleRecipes, value); }
  177. }
  178. public Recipe CurrentRecipe
  179. {
  180. get { return m_CurrentRecipe; }
  181. set { SetProperty(ref m_CurrentRecipe, value); }
  182. }
  183. public RecipeResult CurrentRecipeResult
  184. {
  185. get { return m_CurrentRecipeResult; }
  186. set { SetProperty(ref m_CurrentRecipeResult, value); }
  187. }
  188. public RecipeStep CurrentRecipeStep
  189. {
  190. get { return m_CurrentRecipeStep; }
  191. set { SetProperty(ref m_CurrentRecipeStep, value); }
  192. }
  193. public bool IsHasWafer
  194. {
  195. get { return m_IsHasWafer; }
  196. set { SetProperty(ref m_IsHasWafer, value); }
  197. }
  198. public bool IsTurboPumpAtSpeed
  199. {
  200. get { return m_IsTurboPumpAtSpeed; }
  201. set { SetProperty(ref m_IsTurboPumpAtSpeed, value); }
  202. }
  203. public bool TurboPumpWaterFlowSwitch
  204. {
  205. get { return m_TurboPumpWaterFlowSwitch; }
  206. set { SetProperty(ref m_TurboPumpWaterFlowSwitch, value); }
  207. }
  208. public float PendulumValvePosition
  209. {
  210. get { return m_PendulumValvePosition; }
  211. set{SetProperty(ref m_PendulumValvePosition, value);}
  212. }
  213. public float BiasMatchC1
  214. {
  215. get { return m_BiasMatchC1; }
  216. set
  217. {
  218. SetProperty(ref m_BiasMatchC1, value);
  219. }
  220. }
  221. public float BiasMatchC2
  222. {
  223. get { return m_BiasMatchC2; }
  224. set
  225. {
  226. SetProperty(ref m_BiasMatchC2, value);
  227. }
  228. }
  229. public float MatchC1
  230. {
  231. get { return m_MatchC1; }
  232. set
  233. {
  234. SetProperty(ref m_MatchC1, value);
  235. }
  236. }
  237. public float MatchC2
  238. {
  239. get { return m_MatchC2; }
  240. set
  241. {
  242. SetProperty(ref m_MatchC2, value);
  243. }
  244. }
  245. public AITPendulumValveData PendulumValveData
  246. {
  247. get { return m_PendulumValveData; }
  248. set
  249. {
  250. SetProperty(ref m_PendulumValveData, value);
  251. }
  252. }
  253. //public AITHVData ESCHVData
  254. //{
  255. // get { return m_ESCHVData; }
  256. // set
  257. // {
  258. // SetProperty(ref m_ESCHVData, value);
  259. // }
  260. //}
  261. public int ESCHVOutputVoltage
  262. {
  263. get { return m_ESCHVOutputVoltage; }
  264. set
  265. {
  266. SetProperty(ref m_ESCHVOutputVoltage, value);
  267. }
  268. }
  269. public float ChillerTemperature
  270. {
  271. get { return m_ChillerTemperature; }
  272. set
  273. {
  274. SetProperty(ref m_ChillerTemperature, value);
  275. }
  276. }
  277. //public float HVTemperature
  278. //{
  279. // get { return m_HVTemperature; }
  280. // set
  281. // {
  282. // SetProperty(ref m_HVTemperature, value);
  283. // }
  284. //}
  285. public bool IsLidClosed
  286. {
  287. get { return m_IsLidClosed; }
  288. set
  289. {
  290. SetProperty(ref m_IsLidClosed, value);
  291. }
  292. }
  293. public bool IsSlitDoorClosed
  294. {
  295. get { return m_IsSlitDoorClosed; }
  296. set
  297. {
  298. SetProperty(ref m_IsSlitDoorClosed, value);
  299. }
  300. }
  301. public bool LiftPinIsUp
  302. {
  303. get { return m_LiftPinIsUp; }
  304. set
  305. {
  306. SetProperty(ref m_LiftPinIsUp, value);
  307. }
  308. }
  309. public int TurboPumpRotationalSpeed
  310. {
  311. get { return m_TurboPumpRotationalSpeed; }
  312. set
  313. {
  314. SetProperty(ref m_TurboPumpRotationalSpeed, value);
  315. }
  316. }
  317. public float ESCHePressure
  318. {
  319. get { return m_ESCHePressure; }
  320. set
  321. {
  322. SetProperty(ref m_ESCHePressure, value);
  323. }
  324. }
  325. public float ProcessHighPressure
  326. {
  327. get { return m_ProcessHighPressure; }
  328. set
  329. {
  330. SetProperty(ref m_ProcessHighPressure, value);
  331. }
  332. }
  333. public float ProcessLowPressure
  334. {
  335. get { return m_ProcessLowPressure; }
  336. set
  337. {
  338. SetProperty(ref m_ProcessLowPressure, value);
  339. }
  340. }
  341. public float ForelinePressure
  342. {
  343. get { return m_ForelinePressurePressure; }
  344. set
  345. {
  346. SetProperty(ref m_ForelinePressurePressure, value);
  347. }
  348. }
  349. public bool SourceRFFanInterlock
  350. {
  351. get { return m_SourceRFFanInterlock; }
  352. set
  353. {
  354. SetProperty(ref m_SourceRFFanInterlock, value);
  355. }
  356. }
  357. public bool IsWLK
  358. {
  359. get { return m_IsWLK; }
  360. set
  361. {
  362. SetProperty(ref m_IsWLK, value);
  363. }
  364. }
  365. public bool IsWaterFlowOk
  366. {
  367. get { return m_IsWaterFlowOk; }
  368. set
  369. {
  370. SetProperty(ref m_IsWaterFlowOk, value);
  371. }
  372. }
  373. public bool IsCDAOK
  374. {
  375. get { return m_IsCDAOK; }
  376. set
  377. {
  378. SetProperty(ref m_IsCDAOK, value);
  379. }
  380. }
  381. public bool SensorGasBoxDoor
  382. {
  383. get { return m_SensorGasBoxDoor; }
  384. set
  385. {
  386. SetProperty(ref m_SensorGasBoxDoor, value);
  387. }
  388. }
  389. public bool SensorGasBoxPressure
  390. {
  391. get { return m_SensorGasBoxPressure; }
  392. set
  393. {
  394. SetProperty(ref m_SensorGasBoxPressure, value);
  395. }
  396. }
  397. public bool IsTurboPumpInterlock
  398. {
  399. get { return m_IsTurboPumpInterlock; }
  400. set
  401. {
  402. SetProperty(ref m_IsTurboPumpInterlock, value);
  403. }
  404. }
  405. public string ModuleName
  406. {
  407. get { return m_ModuleName; }
  408. set
  409. {
  410. SetProperty(ref m_ModuleName, value);
  411. }
  412. }
  413. public double MFC1SetPoint
  414. {
  415. get { return m_MFC1SetPoint; }
  416. set { SetProperty(ref m_MFC1SetPoint, value); }
  417. }
  418. public double MFC2SetPoint
  419. {
  420. get { return m_MFC2SetPoint; }
  421. set { SetProperty(ref m_MFC2SetPoint, value); }
  422. }
  423. public double MFC3SetPoint
  424. {
  425. get { return m_MFC3SetPoint; }
  426. set { SetProperty(ref m_MFC3SetPoint, value); }
  427. }
  428. public double MFC4SetPoint
  429. {
  430. get { return m_MFC4SetPoint; }
  431. set { SetProperty(ref m_MFC4SetPoint, value); }
  432. }
  433. public double MFC5SetPoint
  434. {
  435. get { return m_MFC5SetPoint; }
  436. set { SetProperty(ref m_MFC5SetPoint, value); }
  437. }
  438. public double MFC6SetPoint
  439. {
  440. get { return m_MFC6SetPoint; }
  441. set { SetProperty(ref m_MFC6SetPoint, value); }
  442. }
  443. public double MFC7SetPoint
  444. {
  445. get { return m_MFC7SetPoint; }
  446. set { SetProperty(ref m_MFC7SetPoint, value); }
  447. }
  448. public double MFC8SetPoint
  449. {
  450. get { return m_MFC8SetPoint; }
  451. set { SetProperty(ref m_MFC8SetPoint, value); }
  452. }
  453. public double N2SetPoint
  454. {
  455. get { return m_N2SetPoint; }
  456. set { SetProperty(ref m_N2SetPoint, value); }
  457. }
  458. public AITMfcData MFC1Data
  459. {
  460. get { return m_MFC1Data; }
  461. set { SetProperty(ref m_MFC1Data, value); }
  462. }
  463. public AITMfcData MFC2Data
  464. {
  465. get { return m_MFC2Data; }
  466. set { SetProperty(ref m_MFC2Data, value); }
  467. }
  468. public AITMfcData MFC3Data
  469. {
  470. get { return m_MFC3Data; }
  471. set { SetProperty(ref m_MFC3Data, value); }
  472. }
  473. public AITMfcData MFC4Data
  474. {
  475. get { return m_MFC4Data; }
  476. set { SetProperty(ref m_MFC4Data, value); }
  477. }
  478. public AITMfcData MFC5Data
  479. {
  480. get { return m_MFC5Data; }
  481. set { SetProperty(ref m_MFC5Data, value); }
  482. }
  483. public AITMfcData MFC6Data
  484. {
  485. get { return m_MFC6Data; }
  486. set { SetProperty(ref m_MFC6Data, value); }
  487. }
  488. public AITMfcData MFC7Data
  489. {
  490. get { return m_MFC7Data; }
  491. set { SetProperty(ref m_MFC7Data, value); }
  492. }
  493. public AITMfcData MFC8Data
  494. {
  495. get { return m_MFC8Data; }
  496. set { SetProperty(ref m_MFC8Data, value); }
  497. }
  498. public AITMfcData MFCHeData
  499. {
  500. get { return m_MFCHeData; }
  501. set { SetProperty(ref m_MFCHeData, value); }
  502. }
  503. public AITMfcData MFCN2Data
  504. {
  505. get { return m_MFCN2Data; }
  506. set { SetProperty(ref m_MFCN2Data, value); }
  507. }
  508. //public AITHeaterData ValveHeaterData
  509. //{
  510. // get { return m_ValveHeaterData; }
  511. // set { SetProperty(ref m_ValveHeaterData, value); }
  512. //}
  513. //public AITHeaterData ForelineHeaterData
  514. //{
  515. // get { return m_ForelineHeaterData; }
  516. // set { SetProperty(ref m_ForelineHeaterData, value); }
  517. //}
  518. //public AITHeaterData WallHeaterData
  519. //{
  520. // get { return m_WallHeaterData; }
  521. // set { SetProperty(ref m_WallHeaterData, value); }
  522. //}
  523. public AITRfData SRFData
  524. {
  525. get { return m_SRFData; }
  526. set { SetProperty(ref m_SRFData, value); }
  527. }
  528. public AITRfData BRFData
  529. {
  530. get { return m_BRFData; }
  531. set { SetProperty(ref m_BRFData, value); }
  532. }
  533. public PMState PMCurrentState
  534. {
  535. get { return m_PMCurrentState; }
  536. set { SetProperty(ref m_PMCurrentState, value); }
  537. }
  538. #region 阀
  539. public bool GasFinalValveIsOpen
  540. {
  541. get { return m_GasFinalValveIsOpen; }
  542. set { SetProperty(ref m_GasFinalValveIsOpen, value); }
  543. }
  544. public bool PVN21ValveIsOpen
  545. {
  546. get { return m_PVN21ValveIsOpen; }
  547. set { SetProperty(ref m_PVN21ValveIsOpen, value); }
  548. }
  549. public bool PVN22ValveIsOpen
  550. {
  551. get { return m_PVN22ValveIsOpen; }
  552. set { SetProperty(ref m_PVN22ValveIsOpen, value); }
  553. }
  554. public bool N2ValveIsOpen
  555. {
  556. get { return m_N2ValveIsOpen; }
  557. set { SetProperty(ref m_N2ValveIsOpen, value); }
  558. }
  559. public bool PV11ValveIsOpen
  560. {
  561. get { return m_PV11ValveIsOpen; }
  562. set { SetProperty(ref m_PV11ValveIsOpen, value); }
  563. }
  564. public bool PV12ValveIsOpen
  565. {
  566. get { return m_PV12ValveIsOpen; }
  567. set { SetProperty(ref m_PV12ValveIsOpen, value); }
  568. }
  569. public bool MFC1ValveIsOpen
  570. {
  571. get { return m_MFC1ValveIsOpen; }
  572. set { SetProperty(ref m_MFC1ValveIsOpen, value); }
  573. }
  574. public bool PV21ValveIsOpen
  575. {
  576. get { return m_PV21ValveIsOpen; }
  577. set { SetProperty(ref m_PV21ValveIsOpen, value); }
  578. }
  579. public bool PV22ValveIsOpen
  580. {
  581. get { return m_PV22ValveIsOpen; }
  582. set { SetProperty(ref m_PV22ValveIsOpen, value); }
  583. }
  584. public bool MFC2ValveIsOpen
  585. {
  586. get { return m_MFC2ValveIsOpen; }
  587. set { SetProperty(ref m_MFC2ValveIsOpen, value); }
  588. }
  589. public bool PV31ValveIsOpen
  590. {
  591. get { return m_PV31ValveIsOpen; }
  592. set { SetProperty(ref m_PV31ValveIsOpen, value); }
  593. }
  594. public bool PV32ValveIsOpen
  595. {
  596. get { return m_PV32ValveIsOpen; }
  597. set { SetProperty(ref m_PV32ValveIsOpen, value); }
  598. }
  599. public bool MFC3ValveIsOpen
  600. {
  601. get { return m_MFC3ValveIsOpen; }
  602. set { SetProperty(ref m_MFC3ValveIsOpen, value); }
  603. }
  604. public bool PV41ValveIsOpen
  605. {
  606. get { return m_PV41ValveIsOpen; }
  607. set { SetProperty(ref m_PV41ValveIsOpen, value); }
  608. }
  609. public bool PV42ValveIsOpen
  610. {
  611. get { return m_PV42ValveIsOpen; }
  612. set { SetProperty(ref m_PV42ValveIsOpen, value); }
  613. }
  614. public bool MFC4ValveIsOpen
  615. {
  616. get { return m_MFC4ValveIsOpen; }
  617. set { SetProperty(ref m_MFC4ValveIsOpen, value); }
  618. }
  619. public bool MFC5ValveIsOpen
  620. {
  621. get { return m_MFC5ValveIsOpen; }
  622. set { SetProperty(ref m_MFC5ValveIsOpen, value); }
  623. }
  624. public bool MFC6ValveIsOpen
  625. {
  626. get { return m_MFC6ValveIsOpen; }
  627. set { SetProperty(ref m_MFC6ValveIsOpen, value); }
  628. }
  629. public bool MFC7ValveIsOpen
  630. {
  631. get { return m_MFC7ValveIsOpen; }
  632. set { SetProperty(ref m_MFC7ValveIsOpen, value); }
  633. }
  634. public bool MFC8ValveIsOpen
  635. {
  636. get { return m_MFC8ValveIsOpen; }
  637. set { SetProperty(ref m_MFC8ValveIsOpen, value); }
  638. }
  639. public bool PVHe1ValveIsOpen
  640. {
  641. get { return m_PVHe1ValveIsOpen; }
  642. set { SetProperty(ref m_PVHe1ValveIsOpen, value); }
  643. }
  644. public bool PVHe2ValveIsOpen
  645. {
  646. get { return m_PVHe2ValveIsOpen; }
  647. set { SetProperty(ref m_PVHe2ValveIsOpen, value); }
  648. }
  649. public bool TurboPumpPumpingValveIsOpen
  650. {
  651. get { return m_TurboPumpPumpingValveIsOpen; }
  652. set { SetProperty(ref m_TurboPumpPumpingValveIsOpen, value); }
  653. }
  654. public bool TurboPumpPurgeValveIsOpen
  655. {
  656. get { return m_TurboPumpPurgeValveIsOpen; }
  657. set { SetProperty(ref m_TurboPumpPurgeValveIsOpen, value); }
  658. }
  659. public bool SoftPumpValveIsOpen
  660. {
  661. get { return m_SoftPumpValveIsOpen; }
  662. set { SetProperty(ref m_SoftPumpValveIsOpen, value); }
  663. }
  664. public bool FastPumpValveIsOpen
  665. {
  666. get { return m_FastPumpValveIsOpen; }
  667. set { SetProperty(ref m_FastPumpValveIsOpen, value); }
  668. }
  669. public bool GuageValveIsOpen
  670. {
  671. get { return m_GuageValveIsOpen; }
  672. set { SetProperty(ref m_GuageValveIsOpen, value); }
  673. }
  674. #endregion
  675. public Dictionary<string, object> RtDataValues
  676. {
  677. get { return m_RtDataValues; }
  678. set { SetProperty(ref m_RtDataValues, value); }
  679. }
  680. public bool PumpIsOpen
  681. {
  682. get { return m_PumpIsOpen; }
  683. set { SetProperty(ref m_PumpIsOpen, value); }
  684. }
  685. public bool PendulumValveIsOpen
  686. {
  687. get { return m_PendulumValveIsOpen; }
  688. set { SetProperty(ref m_PendulumValveIsOpen, value); }
  689. }
  690. public bool TurboIsOpen
  691. {
  692. get { return m_TurboIsOpen; }
  693. set { SetProperty(ref m_TurboIsOpen, value); }
  694. }
  695. public bool IsATM
  696. {
  697. get { return m_IsATM; }
  698. set { SetProperty(ref m_IsATM, value); }
  699. }
  700. public bool IsVAC
  701. {
  702. get { return m_IsVAC; }
  703. set { SetProperty(ref m_IsVAC, value); }
  704. }
  705. //public bool BRFIsOn
  706. //{
  707. // get { return m_BRFIsOn; }
  708. // set { SetProperty(ref m_BRFIsOn, value); }
  709. //}
  710. //public bool SRFIsOn
  711. //{
  712. // get { return m_SRFIsOn; }
  713. // set { SetProperty(ref m_SRFIsOn, value); }
  714. //}
  715. public int PositionValue
  716. {
  717. get { return m_PositionValue; }
  718. set { SetProperty(ref m_PositionValue, value); }
  719. }
  720. public bool IsPositionMode
  721. {
  722. get { return m_IsPositionMode; }
  723. set { SetProperty(ref m_IsPositionMode, value); }
  724. }
  725. public double HeGasSetpoint
  726. {
  727. get { return m_HeGasSetpoint; }
  728. set
  729. {
  730. SetProperty(ref m_HeGasSetpoint, value);
  731. }
  732. }
  733. public int HePressureSetpoint
  734. {
  735. get { return m_HePressureSetpoint; }
  736. set
  737. {
  738. SetProperty(ref m_HePressureSetpoint, value);
  739. }
  740. }
  741. public float SRFFwdPowerSetpoint
  742. {
  743. get { return m_SRFFwdPowerSetpoint; }
  744. set { SetProperty(ref m_SRFFwdPowerSetpoint, value); }
  745. }
  746. public float BRFFwdPowerSetpoint
  747. {
  748. get { return m_BRFFwdPowerSetpoint; }
  749. set { SetProperty(ref m_BRFFwdPowerSetpoint, value); }
  750. }
  751. public int ESCVoltage
  752. {
  753. get { return m_ESCVoltage; }
  754. set { SetProperty(ref m_ESCVoltage, value); }
  755. }
  756. public float SRFMatchC1
  757. {
  758. get { return m_SRFMatchC1; }
  759. set { SetProperty(ref m_SRFMatchC1, value); }
  760. }
  761. public float SRFMatchC2
  762. {
  763. get { return m_SRFMatchC2; }
  764. set { SetProperty(ref m_SRFMatchC2, value); }
  765. }
  766. public string MatchWorkMode
  767. {
  768. get { return m_MatchWorkMode; }
  769. set
  770. {
  771. SetProperty(ref m_MatchWorkMode, value);
  772. }
  773. }
  774. public float BRFMatchC1
  775. {
  776. get { return m_BRFMatchC1; }
  777. set { SetProperty(ref m_BRFMatchC1, value); }
  778. }
  779. public float BRFMatchC2
  780. {
  781. get { return m_BRFMatchC2; }
  782. set { SetProperty(ref m_BRFMatchC2, value); }
  783. }
  784. public bool GasIsFlowing
  785. {
  786. get { return m_GasIsFlowing; }
  787. set { SetProperty(ref m_GasIsFlowing, value); }
  788. }
  789. public bool IsProcessing
  790. {
  791. get { return m_IsProcessing; }
  792. set { SetProperty(ref m_IsProcessing, value); }
  793. }
  794. public bool IsAutoMode
  795. {
  796. get { return m_IsAutoMode; }
  797. set { SetProperty(ref m_IsAutoMode, value); }
  798. }
  799. public string SelectedRecipe
  800. {
  801. get { return m_SelectedRecipe; }
  802. set { SetProperty(ref m_SelectedRecipe, value); }
  803. }
  804. public float ChillerTempSetpoint
  805. {
  806. get { return m_ChillerTempSetpoint; }
  807. set { SetProperty(ref m_ChillerTempSetpoint, value); }
  808. }
  809. public float WallTempSetpoint
  810. {
  811. get { return m_WallTempSetpoint; }
  812. set { SetProperty(ref m_WallTempSetpoint, value); }
  813. }
  814. public bool HeIsPressureMode
  815. {
  816. get { return m_HeIsPressureMode; }
  817. set { SetProperty(ref m_HeIsPressureMode, value); }
  818. }
  819. public bool ChillerIsOn
  820. {
  821. get { return m_ChillerIsOn; }
  822. set { SetProperty(ref m_ChillerIsOn, value); }
  823. }
  824. public double ChamberPressureFeedBack
  825. {
  826. get { return m_ChamberPressureFeedBack; }
  827. set { SetProperty(ref m_ChamberPressureFeedBack, value); }
  828. }
  829. public string WaferID
  830. {
  831. get { return m_WaferID; }
  832. set { SetProperty(ref m_WaferID, value); }
  833. }
  834. public AITHighTemperatureHeaterData HighTemperatureHeaterData
  835. {
  836. get { return m_HighTemperatureHeaterData; }
  837. set { SetProperty(ref m_HighTemperatureHeaterData, value); }
  838. }
  839. public ComboBoxItem SelectedPosition
  840. {
  841. get { return m_SelectedPosition; }
  842. set { SetProperty(ref m_SelectedPosition, value); }
  843. }
  844. public int HighTemperatureHeaterTemperatureSetpoint
  845. {
  846. get { return m_HighTemperatureHeaterTemperatureSetpoint; }
  847. set { SetProperty(ref m_HighTemperatureHeaterTemperatureSetpoint, value); }
  848. }
  849. public AITHeaterData PendulumHeaterData
  850. {
  851. get { return m_PendulumHeaterData; }
  852. set { SetProperty(ref m_PendulumHeaterData, value); }
  853. }
  854. #endregion
  855. #region 命令
  856. private DelegateCommand _PMInitCommnad;
  857. public DelegateCommand PMInitCommnad =>
  858. _PMInitCommnad ?? (_PMInitCommnad = new DelegateCommand(OnPMInit));
  859. private DelegateCommand _PMAbortCommnad;
  860. public DelegateCommand PMAbortCommnad =>
  861. _PMAbortCommnad ?? (_PMAbortCommnad = new DelegateCommand(OnPMAbort));
  862. private DelegateCommand _GasCommand;
  863. public DelegateCommand GasCommand =>
  864. _GasCommand ?? (_GasCommand = new DelegateCommand(OnGas));
  865. private DelegateCommand _HeCommand;
  866. public DelegateCommand HeCommand =>
  867. _HeCommand ?? (_HeCommand = new DelegateCommand(OnHe));
  868. private DelegateCommand _RfCommand;
  869. public DelegateCommand RfCommand =>
  870. _RfCommand ?? (_RfCommand = new DelegateCommand(OnRf));
  871. private DelegateCommand _PurgeCommand;
  872. public DelegateCommand PurgeCommand =>
  873. _PurgeCommand ?? (_PurgeCommand = new DelegateCommand(OnPurge));
  874. private DelegateCommand _VentCommand;
  875. public DelegateCommand VentCommand =>
  876. _VentCommand ?? (_VentCommand = new DelegateCommand(OnVent));
  877. private DelegateCommand _PumpCommand;
  878. public DelegateCommand PumpCommand =>
  879. _PumpCommand ?? (_PumpCommand = new DelegateCommand(OnPump));
  880. private DelegateCommand _OpenPumpCommand;
  881. public DelegateCommand OpenPumpCommand =>
  882. _OpenPumpCommand ?? (_OpenPumpCommand = new DelegateCommand(OnOpenPump));
  883. private DelegateCommand _ClosePumpCommand;
  884. public DelegateCommand ClosePumpCommand =>
  885. _ClosePumpCommand ?? (_ClosePumpCommand = new DelegateCommand(OnClosePump));
  886. private DelegateCommand _OpenTurboPumpCommand;
  887. public DelegateCommand OpenTurboPumpCommand =>
  888. _OpenTurboPumpCommand ?? (_OpenTurboPumpCommand = new DelegateCommand(OnOpenTurboPump));
  889. private DelegateCommand _CloseTurboPumpCommand;
  890. public DelegateCommand CloseTurboPumpCommand =>
  891. _CloseTurboPumpCommand ?? (_CloseTurboPumpCommand = new DelegateCommand(OnCloseTurboPump));
  892. private DelegateCommand _OpenPendulumValveCommand;
  893. public DelegateCommand OpenPendulumValveCommand =>
  894. _OpenPendulumValveCommand ?? (_OpenPendulumValveCommand = new DelegateCommand(OnOpenPendulumValve));
  895. private DelegateCommand _ClosePendulumValveCommand;
  896. public DelegateCommand ClosePendulumValveCommand =>
  897. _ClosePendulumValveCommand ?? (_ClosePendulumValveCommand = new DelegateCommand(OnClosePendulumValve));
  898. private DelegateCommand<object> _PinUpDownCommand;
  899. public DelegateCommand<object> PinUpDownCommand =>
  900. _PinUpDownCommand ?? (_PinUpDownCommand = new DelegateCommand<object>(OnPinUpDown));
  901. private DelegateCommand<object> _LidUpDownCommand;
  902. public DelegateCommand<object> LidUpDownCommand =>
  903. _LidUpDownCommand ?? (_LidUpDownCommand = new DelegateCommand<object>(OnLidUpDown));
  904. private DelegateCommand _SetSRfCommand;
  905. public DelegateCommand SetSRfCommand =>
  906. _SetSRfCommand ?? (_SetSRfCommand = new DelegateCommand(OnSetSRf));
  907. private DelegateCommand _SetBRfCommand;
  908. public DelegateCommand SetBRfCommand =>
  909. _SetBRfCommand ?? (_SetBRfCommand = new DelegateCommand(OnSetBRf));
  910. private DelegateCommand _OpenButterflyValveViewCommand;
  911. public DelegateCommand OpenButterflyValveViewCommand =>
  912. _OpenButterflyValveViewCommand ?? (_OpenButterflyValveViewCommand = new DelegateCommand(OnOpenButterflyValveView));
  913. //private DelegateCommand _HVCommand;
  914. //public DelegateCommand HVCommand =>
  915. // _HVCommand ?? (_HVCommand = new DelegateCommand(OnHV));
  916. private DelegateCommand _HVSetCommand;
  917. public DelegateCommand HVSetCommand =>
  918. _HVSetCommand ?? (_HVSetCommand = new DelegateCommand(OnHVSet));
  919. private DelegateCommand _LoadRecipeCommand;
  920. public DelegateCommand LoadRecipeCommand =>
  921. _LoadRecipeCommand ?? (_LoadRecipeCommand = new DelegateCommand(OnLoadRecipe));
  922. private DelegateCommand<object> _ControlValveCommand;
  923. public DelegateCommand<object> ControlValveCommand =>
  924. _ControlValveCommand ?? (_ControlValveCommand = new DelegateCommand<object>(OnControlValve));
  925. private DelegateCommand<object> _RunRecipeCommand;
  926. public DelegateCommand<object> RunRecipeCommand =>
  927. _RunRecipeCommand ?? (_RunRecipeCommand = new DelegateCommand<object>(OnRunRecipe));
  928. private DelegateCommand _SetChillerTempCommand;
  929. public DelegateCommand SetChillerTempCommand =>
  930. _SetChillerTempCommand ?? (_SetChillerTempCommand = new DelegateCommand(OnSetChillerTemp));
  931. private DelegateCommand _OnOffChillerCommand;
  932. public DelegateCommand OnOffChillerCommand =>
  933. _OnOffChillerCommand ?? (_OnOffChillerCommand = new DelegateCommand(OnOffChiller));
  934. private DelegateCommand<object> _HeaterCommand;
  935. public DelegateCommand<object> HeaterCommand =>
  936. _HeaterCommand ?? (_HeaterCommand = new DelegateCommand<object>(OnHeater));
  937. private DelegateCommand _EndStepCommand;
  938. public DelegateCommand EndStepCommand =>
  939. _EndStepCommand ?? (_EndStepCommand = new DelegateCommand(OnEndStep));
  940. private DelegateCommand _GotoPositionCommand;
  941. public DelegateCommand GotoPositionCommand =>
  942. _GotoPositionCommand ?? (_GotoPositionCommand = new DelegateCommand(OnGotoPosition));
  943. private DelegateCommand _SwitchHighTemperatureHeaterCommand;
  944. public DelegateCommand SwitchHighTemperatureHeaterCommand =>
  945. _SwitchHighTemperatureHeaterCommand ?? (_SwitchHighTemperatureHeaterCommand = new DelegateCommand(OnSwitchHighTemperatureHeater));
  946. private DelegateCommand<object> _AbortRecipeCommnad;
  947. public DelegateCommand<object> AbortRecipeCommnad =>
  948. _AbortRecipeCommnad ?? (_AbortRecipeCommnad = new DelegateCommand<object>(OnAbortRecipe));
  949. #endregion
  950. #region 构造函数
  951. public OverKepler2200AViewModel()
  952. {
  953. m_RtDataKeys = new List<string>();
  954. m_IsATM = true;
  955. ModuleName = "PMA";
  956. //CurrentModuleRecipes = GetFilesNames(Path.Combine(QueryDataClient.Instance.Service.GetData("GetRTPath").ToString(), "Recipes", ModuleName)).ToList();
  957. DispatcherTimer timer = new DispatcherTimer();
  958. timer.Interval = TimeSpan.FromSeconds(0.5);
  959. timer.Tick += timer_Tick;
  960. timer.Start();
  961. }
  962. #endregion
  963. #region 命令方法
  964. private void OnControlValve(object obj)
  965. {
  966. CommonValveControl commonValveControl = (CommonValveControl)obj;
  967. if (commonValveControl.IsCanEdit == true)
  968. {
  969. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ControlValve",Convert.ToInt32( commonValveControl.Tag.ToString()), !commonValveControl.Status);
  970. }
  971. }
  972. private void OnPMInit()
  973. {
  974. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Home");
  975. }
  976. private async void OnGas()
  977. {
  978. await Task.Run(async () =>
  979. {
  980. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas1.SetPoint", MFC1SetPoint);
  981. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas2.SetPoint", MFC2SetPoint);
  982. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas3.SetPoint", MFC3SetPoint);
  983. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas4.SetPoint", MFC4SetPoint);
  984. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas5.SetPoint", MFC5SetPoint);
  985. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas6.SetPoint", MFC6SetPoint);
  986. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas7.SetPoint", MFC7SetPoint);
  987. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas8.SetPoint", MFC8SetPoint);
  988. await Task.Delay(1000);
  989. object[] mfc = new object[8];
  990. string[] mfcSetPoint = new string[8];
  991. mfc[0] = MFC1Data.SetPoint;
  992. mfc[1] = MFC2Data.SetPoint;
  993. mfc[2] = MFC3Data.SetPoint;
  994. mfc[3] = MFC4Data.SetPoint;
  995. mfc[4] = MFC5Data.SetPoint;
  996. mfc[5] = MFC6Data.SetPoint;
  997. mfc[6] = MFC7Data.SetPoint;
  998. mfc[7] = MFC8Data.SetPoint;
  999. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.GasFlow}", mfc);
  1000. });
  1001. }
  1002. private void OnHe()
  1003. {
  1004. if (PVHe1ValveIsOpen == true)
  1005. {
  1006. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBacksideHeFlow", 0.0d);
  1007. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBacksideHePressure", 0);
  1008. }
  1009. else
  1010. {
  1011. if (HeIsPressureMode)
  1012. {
  1013. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBacksideHePressure", HeGasSetpoint);
  1014. }
  1015. else
  1016. {
  1017. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBacksideHeFlow", HeGasSetpoint);
  1018. }
  1019. }
  1020. }
  1021. private void OnRf()
  1022. {
  1023. if (PMCurrentState == PMState.RfPowering)
  1024. {
  1025. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1026. }
  1027. else
  1028. {
  1029. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.RfPower}");
  1030. }
  1031. }
  1032. private void OnPurge()
  1033. {
  1034. //if (RtDataValues[$"{ModuleName}.FsmState"].ToString() ==PMState.Purge.ToString())
  1035. //if (PMCurrentState == PMState.Purging || N2SetPoint<=0)
  1036. //{
  1037. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", 0);
  1038. // await Task.Delay(1000);
  1039. // //InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StopPurge");
  1040. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1041. //}
  1042. //else
  1043. //{
  1044. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", N2SetPoint);
  1045. // await Task.Delay(1000);
  1046. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Purge");
  1047. //}
  1048. if (PMCurrentState == PMState.Purging)
  1049. {
  1050. //InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", 0);
  1051. //await Task.Delay(1000);
  1052. ////InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StopPurge");
  1053. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1054. }
  1055. else
  1056. {
  1057. //InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", N2SetPoint);
  1058. //await Task.Delay(1000);
  1059. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Purge");
  1060. }
  1061. }
  1062. private void OnVent()
  1063. {
  1064. //if (RtDataValues[$"{ModuleName}.FsmState"].ToString()==PMState.Venting.ToString())
  1065. if (PMCurrentState == PMState.Venting)
  1066. {
  1067. //InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StopVent");
  1068. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1069. }
  1070. else
  1071. {
  1072. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Vent");
  1073. }
  1074. }
  1075. private void OnPump()
  1076. {
  1077. //if (RtDataValues[$"{ModuleName}.FsmState"].ToString() == PMState.Pumping.ToString())
  1078. if (PMCurrentState==PMState.Pumping)
  1079. {
  1080. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1081. return;
  1082. }
  1083. //if (PMCurrentState == PMState.pum)
  1084. //{
  1085. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StopPump");
  1086. // return;
  1087. //}
  1088. //string BasePressureSetPoint= RtConfigValues[$"{ModuleName}.Pump.PumpBasePressure"].ToString(); ;
  1089. //{
  1090. // get { return RtConfigValues[$"{ModuleName}.Pump.PumpBasePressure"].ToString(); }
  1091. //}
  1092. //string PumpLimitSetPoint= RtConfigValues[$"{ModuleName}.Pump.PumpTimeLimit"].ToString();
  1093. //{
  1094. // get { return RtConfigValues[$"{ModuleName}.Pump.PumpTimeLimit"].ToString(); }
  1095. //}
  1096. string BasePressureSetPoint = QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.Pump.PumpBasePressure").ToString();
  1097. string PumpLimitSetPoint= QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.Pump.PumpTimeLimit").ToString();
  1098. // 设置底压
  1099. double basePressure = string.IsNullOrEmpty(BasePressureSetPoint) ? 0 : Convert.ToDouble(BasePressureSetPoint);
  1100. if (basePressure <= 0.01 || basePressure >= 1000)
  1101. {
  1102. MessageBox.Show($"基准压力设定值 {basePressure} 无效,应该在0到1000毫托之间");
  1103. return;
  1104. }
  1105. double pumpLimit = string.IsNullOrEmpty(PumpLimitSetPoint) ? 0 : Convert.ToDouble(PumpLimitSetPoint);
  1106. if (pumpLimit <= 0.01 || pumpLimit >= 1200)
  1107. {
  1108. MessageBox.Show($"抽气时间应该在0到1200之间,当前设定值{pumpLimit}");
  1109. return;
  1110. }
  1111. InvokeClient.Instance.Service.DoOperation("System.SetConfig", $"{ModuleName}.Pump.PumpBasePressure", basePressure.ToString());
  1112. InvokeClient.Instance.Service.DoOperation("System.SetConfig", $"{ModuleName}.Pump.PumpTimeLimit", pumpLimit.ToString());
  1113. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Pump");
  1114. }
  1115. private void OnOpenPump()
  1116. {
  1117. //if (RtDataValues[$"{ModuleName}.FsmState"].ToString() == "LaunchingPump")
  1118. if (PMCurrentState==PMState.LaunchingPump)
  1119. {
  1120. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1121. return;
  1122. }
  1123. //if (PumpIsOpen == true)
  1124. //{
  1125. // return;
  1126. //}
  1127. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StartPump");
  1128. }
  1129. private void OnClosePump()
  1130. {
  1131. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ClosePump");
  1132. }
  1133. private void OnOpenTurboPump()
  1134. {
  1135. //TurboIsOpen = true;
  1136. //if (RtDataValues[$"{ModuleName}.FsmState"].ToString() == "LaunchingTurbo")
  1137. if (PMCurrentState == PMState.LaunchingTurboPump)
  1138. {
  1139. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1140. return;
  1141. }
  1142. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StartTurboPump");
  1143. }
  1144. private void OnCloseTurboPump()
  1145. {
  1146. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.CloseTurboPump");
  1147. }
  1148. private void OnOpenPendulumValve()
  1149. {
  1150. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.TurnPendulumValve",true);
  1151. }
  1152. private void OnClosePendulumValve()
  1153. {
  1154. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.TurnPendulumValve",false);
  1155. }
  1156. private void OnPinUpDown(object upDown)
  1157. {
  1158. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetLiftPin", Convert.ToBoolean(upDown));
  1159. }
  1160. private void OnLidUpDown(object upDown)
  1161. {
  1162. //var value = (bool)upDown;
  1163. if (upDown.ToString()== "Up")
  1164. {
  1165. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.Lid}.{AITCylinderOperation.Open}");
  1166. }
  1167. else
  1168. {
  1169. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.Lid}.{AITCylinderOperation.Close}");
  1170. }
  1171. }
  1172. private async void OnSetSRf()
  1173. {
  1174. if (SRFData.IsRfOn == true)
  1175. {
  1176. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetSRf", SRFFwdPowerSetpoint, false);
  1177. }
  1178. else
  1179. {
  1180. if (GasIsFlowing == true)
  1181. {
  1182. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.Match}.{AITRfOperation.SetMatchPosition}", SRFMatchC1, SRFMatchC2);
  1183. await Task.Delay(100);
  1184. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetSRf", SRFFwdPowerSetpoint, true);
  1185. }
  1186. }
  1187. }
  1188. private async void OnSetBRf()
  1189. {
  1190. if (BRFData.IsRfOn == true)
  1191. {
  1192. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBRf", BRFFwdPowerSetpoint, false);
  1193. }
  1194. else
  1195. {
  1196. if (GasIsFlowing == true)
  1197. {
  1198. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.BiasMatch}.{AITRfOperation.SetMatchPosition}", BRFMatchC1, BRFMatchC2);
  1199. await Task.Delay(100);
  1200. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBRf", BRFFwdPowerSetpoint, true);
  1201. }
  1202. }
  1203. }
  1204. private void OnPMAbort()
  1205. {
  1206. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Abort");
  1207. }
  1208. private void OnOpenButterflyValveView()
  1209. {
  1210. //if (butterflyValveMessageBox == null)
  1211. //{
  1212. var _mainWindow = Application.Current.Windows.Cast<Window>().FirstOrDefault(window => window is Window) as Window;
  1213. butterflyValveMessageBox = new ButterflyValveView(ModuleName.ToString());
  1214. butterflyValveMessageBox.WindowStartupLocation = WindowStartupLocation.Manual;
  1215. butterflyValveMessageBox.Left = 700;
  1216. butterflyValveMessageBox.Top = 600;
  1217. butterflyValveMessageBox.Show();
  1218. butterflyValveMessageBox.Owner = _mainWindow;
  1219. //}
  1220. }
  1221. private void OnLoadRecipe()
  1222. {
  1223. CurrentModuleRecipes = GetFilesNames(Path.Combine(QueryDataClient.Instance.Service.GetData("GetRTPath").ToString(), "Recipes", ModuleName, "Process")).ToList();
  1224. }
  1225. //private async void OnHV()
  1226. //{
  1227. // if (ESCHVData.IsOn == true)
  1228. // {
  1229. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetESCHVIsOn", false);
  1230. // }
  1231. // else
  1232. // {
  1233. // await Task.Run(async () =>
  1234. // {
  1235. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetESCHVIsOn", true);
  1236. // await Task.Delay(1000);
  1237. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetESCHV", ESCVoltage);
  1238. // });
  1239. // }
  1240. //}
  1241. private void OnHVSet()
  1242. {
  1243. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetESCHV", ESCVoltage);
  1244. }
  1245. private void OnRunRecipe(object obj)
  1246. {
  1247. string recipeName = SelectedRecipe;
  1248. if (recipeName == null)
  1249. {
  1250. return;
  1251. }
  1252. ClearData();
  1253. var recipePath = Path.Combine(QueryDataClient.Instance.Service.GetData("GetRTPath").ToString(), "Recipes", ModuleName, "Process", recipeName + ".rcp");
  1254. CurrentRecipe = Recipe.Load(File.ReadAllText(recipePath));
  1255. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.RunRecipe}",recipeName, ModuleManager.ModuleInfos[ModuleName].WaferManager.Wafers[0].WaferID, "Process");
  1256. }
  1257. private void OnOffChiller()
  1258. {
  1259. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.OnOffChiller", ChillerType.Chiller.ToString(),!ChillerIsOn);
  1260. }
  1261. private void OnHeater(object obj)
  1262. {
  1263. if (IsAutoMode == true)
  1264. {
  1265. return;
  1266. }
  1267. AITHeaterData heaterData = obj as AITHeaterData;
  1268. var _mainWindow = Application.Current.Windows.Cast<Window>().FirstOrDefault(window => window is Window) as Window;
  1269. heaterView = new HeaterView(heaterData, ModuleName);
  1270. heaterView.WindowStartupLocation = WindowStartupLocation.CenterScreen;
  1271. heaterView.Owner = _mainWindow;
  1272. heaterView.Show();
  1273. }
  1274. private void OnOnline()
  1275. {
  1276. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.PmOnline}");
  1277. }
  1278. private void OnOffline()
  1279. {
  1280. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.PmOffline}");
  1281. }
  1282. private void OnEndStep()
  1283. {
  1284. if (CurrentRecipeResult?.RecipeStepNumber != null && CurrentRecipeResult?.RecipeStepNumber != CurrentRecipeResult?.RecipeStepCount)
  1285. {
  1286. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ManualEndStep");
  1287. }
  1288. else if (CurrentRecipeResult?.RecipeStepNumber != null && CurrentRecipeResult?.RecipeStepNumber == CurrentRecipeResult?.RecipeStepCount)
  1289. {
  1290. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Abort");
  1291. }
  1292. }
  1293. private void OnGotoPosition()
  1294. {
  1295. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.HighTemperatureHeater.GotoPosition", SelectedPosition.Content);
  1296. }
  1297. private void OnSwitchHighTemperatureHeater()
  1298. {
  1299. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.HighTemperatureHeater.SwitchHighTemperatureHeater", !HighTemperatureHeaterData.HighTemperatureHeaterIson);
  1300. }
  1301. private void OnSetChillerTemp()
  1302. {
  1303. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.HighTemperatureHeater.SetHighTemperatureHeaterTemperature", HighTemperatureHeaterTemperatureSetpoint);
  1304. }
  1305. private DelegateCommand _OnlineCommand;
  1306. public DelegateCommand OnlineCommand =>
  1307. _OnlineCommand ?? (_OnlineCommand = new DelegateCommand(OnOnline));
  1308. private DelegateCommand _OfflineCommand;
  1309. public DelegateCommand OfflineCommand =>
  1310. _OfflineCommand ?? (_OfflineCommand = new DelegateCommand(OnOffline));
  1311. private async void OnAbortRecipe(object obj)
  1312. {
  1313. if (PMCurrentState != PMState.Processing)
  1314. {
  1315. return;
  1316. }
  1317. switch (obj.ToString())
  1318. {
  1319. case "0":
  1320. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Abort");
  1321. break;
  1322. case "1":
  1323. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Abort");
  1324. //if (ESCHVData.IsOn == true)
  1325. //{
  1326. // await Task.Delay(3000);
  1327. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetESCHVIsOn", false);
  1328. //}
  1329. break;
  1330. case "2":
  1331. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Abort");
  1332. await Task.Delay(3000);
  1333. InvokeClient.Instance.Service.DoOperation("ReturnWafer", ModuleName, 0);
  1334. break;
  1335. }
  1336. }
  1337. #endregion
  1338. #region 私有方法
  1339. private void ClearData()
  1340. {
  1341. ESCVoltage = 0;
  1342. SRFFwdPowerSetpoint = 0;
  1343. SRFMatchC1 = 0;
  1344. SRFMatchC2 = 0;
  1345. BRFFwdPowerSetpoint = 0;
  1346. BRFMatchC1 = 0;
  1347. BRFMatchC2 = 0;
  1348. HeGasSetpoint = 0;
  1349. MFC1SetPoint = 0;
  1350. MFC2SetPoint = 0;
  1351. MFC3SetPoint = 0;
  1352. MFC4SetPoint = 0;
  1353. MFC5SetPoint = 0;
  1354. MFC6SetPoint = 0;
  1355. MFC7SetPoint = 0;
  1356. MFC8SetPoint = 0;
  1357. }
  1358. private IEnumerable<string> GetFilesNames(string path)
  1359. {
  1360. if (Directory.Exists(path))
  1361. {
  1362. return Directory.GetFiles(path, "*.rcp")?
  1363. .Select(Path.GetFileNameWithoutExtension);
  1364. }
  1365. else
  1366. {
  1367. return new List<string>();
  1368. }
  1369. }
  1370. void timer_Tick(object sender, EventArgs e)
  1371. {
  1372. RtDataValues = QueryDataClient.Instance.Service.PollData(m_RtDataKeys);
  1373. if (RtDataValues==null)
  1374. {
  1375. return;
  1376. }
  1377. //var N2SetPoint =Convert.ToInt32( QueryDataClient.Instance.Service.GetConfig("System.TurboN2FlowSetPoint"));
  1378. //InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", N2SetPoint);
  1379. TurboN2FlowSetPoint = Convert.ToInt32(QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.TurboN2FlowSetPoint"));
  1380. PVN21ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVN21.IsOpen");
  1381. GasFinalValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveGasFinal.IsOpen");
  1382. PV11ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV11.IsOpen");
  1383. PV12ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV12.IsOpen");
  1384. PV21ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV21.IsOpen");
  1385. PV22ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV22.IsOpen");
  1386. PV31ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV31.IsOpen");
  1387. PV32ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV32.IsOpen");
  1388. PV41ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV41.IsOpen");
  1389. PV42ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV42.IsOpen");
  1390. MFC1ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc1.IsOpen");
  1391. MFC2ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc2.IsOpen");
  1392. MFC3ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc3.IsOpen");
  1393. MFC4ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc4.IsOpen");
  1394. MFC5ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc5.IsOpen");
  1395. MFC6ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc6.IsOpen");
  1396. MFC7ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc7.IsOpen");
  1397. MFC8ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc8.IsOpen");
  1398. N2ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveN2.IsOpen");
  1399. SoftPumpValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveSoftPump.IsOpen");
  1400. FastPumpValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveFastPump.IsOpen");
  1401. GuageValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveGuage.IsOpen");
  1402. PVHe1ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVHe1.IsOpen");
  1403. PVHe2ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVHe2.IsOpen");
  1404. PVN21ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVN21.IsOpen");
  1405. PVN22ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVN22.IsOpen");
  1406. TurboPumpPumpingValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveTurboPumpPumping.IsOpen");
  1407. TurboPumpPurgeValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveTurboPumpPurge.IsOpen");
  1408. PumpIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.PumpIsRunning");
  1409. TurboIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.TurboPumpIsRunning");
  1410. LiftPinIsUp= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.LiftPinIsUp");
  1411. IsSlitDoorClosed = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsSlitDoorClosed");
  1412. IsLidClosed = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsLidClosed");
  1413. PendulumValvePosition = CommonFunction.GetValue<float>(RtDataValues,$"{ModuleName}.GetPVPosition");
  1414. TurboPumpRotationalSpeed = Convert.ToInt32( RtDataValues[$"{ModuleName}.TurboPumpRotationalSpeed"].ToString());
  1415. PositionValue = -((int)((PendulumValvePosition) * 0.09));
  1416. PMCurrentState = (PMState)Enum.Parse(typeof(PMState), RtDataValues[$"{ModuleName}.FsmState"].ToString());
  1417. GasIsFlowing = PMCurrentState == PMState.GasFlowing;
  1418. IsProcessing=PMCurrentState == PMState.Processing;
  1419. MFC1Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas1");
  1420. MFC2Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas2");
  1421. MFC3Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas3");
  1422. MFC4Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas4");
  1423. MFC5Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas5");
  1424. MFC6Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas6");
  1425. MFC7Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas7");
  1426. MFC8Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas8");
  1427. MFCHeData = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcHe");
  1428. MFCN2Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcN2");
  1429. SRFData = CommonFunction.GetValue<AITRfData>(RtDataValues, $"{ModuleName}.{VenusDevice.Rf}.DeviceData");
  1430. BRFData = CommonFunction.GetValue<AITRfData>(RtDataValues, $"{ModuleName}.{VenusDevice.BiasRf}.DeviceData");
  1431. PendulumValveData = CommonFunction.GetValue<AITPendulumValveData>(RtDataValues, $"{ModuleName}.{VenusDevice.PendulumValve}.DeviceData");
  1432. //ESCHVData= CommonFunction.GetValue<AITHVData>(RtDataValues, $"{ModuleName}.{VenusDevice.ESCHV}.DeviceData");
  1433. //ValveHeaterData = (AITHeaterData)RtDataValues[$"{ModuleName}.ValveHeater.DeviceData"];
  1434. //ForelineHeaterData = (AITHeaterData)RtDataValues[$"{ModuleName}.ForelineHeater.DeviceData"];
  1435. //WallHeaterData = (AITHeaterData)RtDataValues[$"{ModuleName}.WallHeater.DeviceData"];
  1436. PendulumHeaterData = (AITHeaterData)RtDataValues[$"{ModuleName}.PendulumHeater.DeviceData"];
  1437. ProcessHighPressure = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.ProcessHighPressure");
  1438. ProcessLowPressure = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.ProcessLowPressure");
  1439. ForelinePressure = float.Parse(RtDataValues[$"{ModuleName}.ForelinePressure"].ToString());
  1440. ESCHePressure = float.Parse(RtDataValues[$"{ModuleName}.ESCHePressure"].ToString());
  1441. ChillerTemperature = float.Parse(RtDataValues[$"{ModuleName}.Chiller.Temp"].ToString());
  1442. //HVTemperature = float.Parse(RtDataValues[$"{ModuleName}.{VenusDevice.ESCHV}.Temp"].ToString());
  1443. ChillerIsOn = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.Chiller.IsOn");
  1444. SourceRFFanInterlock= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.SourceRFFanInterlock");
  1445. IsWLK= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsWLK");
  1446. IsWaterFlowOk= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsWaterFlowOk");
  1447. IsTurboPumpInterlock= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsTurboPumpInterlock");
  1448. IsCDAOK= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsCDA_OK");
  1449. SensorGasBoxDoor= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.GasBoxDoorSW.Value");
  1450. SensorGasBoxPressure= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.GasBoxPressureSW.Value");
  1451. IsATM= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsATM");
  1452. IsVAC = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsVAC");
  1453. ESCHVOutputVoltage= CommonFunction.GetValue<int>(RtDataValues, $"{ModuleName}.ESCHV.OutputVoltage");
  1454. MatchC1 = CommonFunction.GetValue<float>(RtDataValues,$"{ModuleName}.{VenusDevice.Match}.C1");
  1455. MatchC2 = CommonFunction.GetValue<float>(RtDataValues,$"{ModuleName}.{VenusDevice.Match}.C2");
  1456. MatchWorkMode= CommonFunction.GetValue<string>(RtDataValues, $"{ModuleName}.{VenusDevice.Match}.WorkMode");
  1457. TurboPumpWaterFlowSwitch = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.TurboPumpWaterFlowSwitch.Value");
  1458. IsTurboPumpAtSpeed = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsTurboPumpAtSpeed");
  1459. IsHasWafer= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.HasWafer");
  1460. WaferID = IsHasWafer ? ModuleManager.ModuleInfos[ModuleName].WaferManager.Wafers[0].SourceName : "";
  1461. if (PMCurrentState == PMState.Processing || PMCurrentState == PMState.Clean)
  1462. {
  1463. CurrentRecipeResult = CommonFunction.GetValue<RecipeResult>(RtDataValues, $"{ModuleName}.CurrentRecipeResult");
  1464. if (CurrentRecipeResult.RecipeStepNumber != null && CurrentRecipeResult.RecipeStepNumber != currentRecipeNumber)
  1465. {
  1466. var recipePath = Path.Combine(QueryDataClient.Instance.Service.GetData("GetRTPath").ToString(), "Recipes", ModuleName,"Process", CurrentRecipeResult.RecipeName + ".rcp");
  1467. CurrentRecipe = Recipe.Load(File.ReadAllText(recipePath));
  1468. CurrentRecipeStep = CurrentRecipe.Steps[Convert.ToInt32(CurrentRecipeResult.RecipeStepNumber) - 1];
  1469. }
  1470. currentRecipeNumber = CurrentRecipeResult.RecipeStepNumber;
  1471. }
  1472. else
  1473. {
  1474. CurrentRecipeResult = null;
  1475. CurrentRecipeStep = null;
  1476. }
  1477. if (Math.Abs(100 - ProcessLowPressure) > 1 && ProcessLowPressure<100)
  1478. {
  1479. ChamberPressureFeedBack = ProcessLowPressure;
  1480. }
  1481. else
  1482. {
  1483. ChamberPressureFeedBack = ProcessHighPressure;
  1484. }
  1485. HighTemperatureHeaterData = CommonFunction.GetValue<AITHighTemperatureHeaterData>(RtDataValues, $"{ModuleName}.HighTemperatureHeater.DeviceData");
  1486. }
  1487. public void addDataKeys()
  1488. {
  1489. m_RtDataKeys.Clear();
  1490. m_RtDataKeys.Add($"{ModuleName}.MfcGas1");
  1491. m_RtDataKeys.Add($"{ModuleName}.MfcGas2");
  1492. m_RtDataKeys.Add($"{ModuleName}.MfcGas3");
  1493. m_RtDataKeys.Add($"{ModuleName}.MfcGas4");
  1494. m_RtDataKeys.Add($"{ModuleName}.MfcGas5");
  1495. m_RtDataKeys.Add($"{ModuleName}.MfcGas6");
  1496. m_RtDataKeys.Add($"{ModuleName}.MfcGas7");
  1497. m_RtDataKeys.Add($"{ModuleName}.MfcGas8");
  1498. m_RtDataKeys.Add($"{ModuleName}.MfcHe");
  1499. m_RtDataKeys.Add($"{ModuleName}.MfcN2");
  1500. m_RtDataKeys.Add($"{ModuleName}.ForelinePressure");
  1501. m_RtDataKeys.Add($"{ModuleName}.ProcessHighPressure");
  1502. m_RtDataKeys.Add($"{ModuleName}.ProcessLowPressure");
  1503. m_RtDataKeys.Add($"{ModuleName}.ChamberPressure");
  1504. m_RtDataKeys.Add($"{ModuleName}.ESCHePressure");
  1505. m_RtDataKeys.Add($"{ModuleName}.IsATM");
  1506. m_RtDataKeys.Add($"{ModuleName}.IsVAC");
  1507. m_RtDataKeys.Add($"{ModuleName}.ValvePVN21.IsOpen");
  1508. m_RtDataKeys.Add($"{ModuleName}.ValvePVN22.IsOpen");
  1509. m_RtDataKeys.Add($"{ModuleName}.ValvePV11.IsOpen");
  1510. m_RtDataKeys.Add($"{ModuleName}.ValvePV12.IsOpen");
  1511. m_RtDataKeys.Add($"{ModuleName}.ValvePV21.IsOpen");
  1512. m_RtDataKeys.Add($"{ModuleName}.ValvePV22.IsOpen");
  1513. m_RtDataKeys.Add($"{ModuleName}.ValvePV31.IsOpen");
  1514. m_RtDataKeys.Add($"{ModuleName}.ValvePV32.IsOpen");
  1515. m_RtDataKeys.Add($"{ModuleName}.ValvePV41.IsOpen");
  1516. m_RtDataKeys.Add($"{ModuleName}.ValvePV42.IsOpen");
  1517. m_RtDataKeys.Add($"{ModuleName}.ValveMfc1.IsOpen");
  1518. m_RtDataKeys.Add($"{ModuleName}.ValveMfc2.IsOpen");
  1519. m_RtDataKeys.Add($"{ModuleName}.ValveMfc3.IsOpen");
  1520. m_RtDataKeys.Add($"{ModuleName}.ValveMfc4.IsOpen");
  1521. m_RtDataKeys.Add($"{ModuleName}.ValveMfc5.IsOpen");
  1522. m_RtDataKeys.Add($"{ModuleName}.ValveMfc6.IsOpen");
  1523. m_RtDataKeys.Add($"{ModuleName}.ValveMfc7.IsOpen");
  1524. m_RtDataKeys.Add($"{ModuleName}.ValveMfc8.IsOpen");
  1525. m_RtDataKeys.Add($"{ModuleName}.ValveGasFinal.IsOpen");
  1526. m_RtDataKeys.Add($"{ModuleName}.ValveSoftPump.IsOpen");
  1527. m_RtDataKeys.Add($"{ModuleName}.ValveFastPump.IsOpen");
  1528. m_RtDataKeys.Add($"{ModuleName}.ValveN2.IsOpen");
  1529. m_RtDataKeys.Add($"{ModuleName}.ValvePVHe1.IsOpen");
  1530. m_RtDataKeys.Add($"{ModuleName}.ValvePVHe2.IsOpen");
  1531. m_RtDataKeys.Add($"{ModuleName}.ValveTurboPumpPumping.IsOpen");
  1532. m_RtDataKeys.Add($"{ModuleName}.ValveTurboPumpPurge.IsOpen");
  1533. m_RtDataKeys.Add($"{ModuleName}.ValvePVN21.IsOpen");
  1534. m_RtDataKeys.Add($"{ModuleName}.ValvePVN22.IsOpen");
  1535. m_RtDataKeys.Add($"{ModuleName}.ValveGuage.IsOpen");
  1536. m_RtDataKeys.Add($"{ModuleName}.TurboPumpIsRunning");
  1537. m_RtDataKeys.Add($"{ModuleName}.PumpIsRunning");
  1538. m_RtDataKeys.Add($"{ModuleName}.IsSlitDoorClosed");
  1539. m_RtDataKeys.Add($"{ModuleName}.IsLidClosed");
  1540. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Rf}.DeviceData");
  1541. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.BiasRf}.DeviceData");
  1542. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Match}.C1");
  1543. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Match}.C2");
  1544. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Match}.WorkMode");
  1545. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.PendulumValve}.DeviceData");
  1546. //m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.ESCHV}.DeviceData");
  1547. m_RtDataKeys.Add($"{ModuleName}.TurboPumpRotationalSpeed");
  1548. m_RtDataKeys.Add($"{ModuleName}.GetPVPosition");
  1549. m_RtDataKeys.Add($"{ModuleName}.Chiller.Temp");
  1550. m_RtDataKeys.Add($"{ModuleName}.IsWaterFlowOk");
  1551. m_RtDataKeys.Add($"{ModuleName}.IsWLK");
  1552. m_RtDataKeys.Add($"{ModuleName}.IsCDA_OK");
  1553. m_RtDataKeys.Add($"{ModuleName}.SourceRFFanInterlock");
  1554. m_RtDataKeys.Add($"{ModuleName}.IsTurboPumpInterlock");
  1555. m_RtDataKeys.Add($"{ModuleName}.GasBoxDoorSW.Value");
  1556. m_RtDataKeys.Add($"{ModuleName}.GasBoxPressureSW.Value");
  1557. //m_RtDataKeys.Add($"{ModuleName}.WallTempFeedBack");
  1558. m_RtDataKeys.Add($"{ModuleName}.Chiller.IsOn");
  1559. //m_RtDataKeys.Add($"{ModuleName}.ValveHeater.DeviceData");
  1560. //m_RtDataKeys.Add($"{ModuleName}.ForelineHeater.DeviceData");
  1561. //m_RtDataKeys.Add($"{ModuleName}.WallHeater.DeviceData");
  1562. m_RtDataKeys.Add($"{ModuleName}.PendulumHeater.DeviceData");
  1563. m_RtDataKeys.Add($"{ModuleName}.FsmState");
  1564. m_RtDataKeys.Add($"{ModuleName}.IsTurboPumpAtSpeed");
  1565. m_RtDataKeys.Add($"{ModuleName}.TurboPumpWaterFlowSwitch.Value");
  1566. m_RtDataKeys.Add($"{ModuleName}.HasWafer");
  1567. m_RtDataKeys.Add($"{ModuleName}.CurrentRecipeResult");
  1568. m_RtDataKeys.Add($"{ModuleName}.HighTemperatureHeater.DeviceData");
  1569. }
  1570. #endregion
  1571. }
  1572. }