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Kepler-Release
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Kepler-Release
/
Venus
/
Venus_RT
/
Config
/
System.sccfg

System.sccfg 19 KB
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  1. <?xml version="1.0" encoding="utf-8"?>
    2. 

  2. <root system="Venus">
    3. 

  3.   <configs name="System">
    4. 

  4.     <config default="false" name="IsSimulatorMode" description="仿真模式" max="" min="" paramter="" tag="" unit="" type="Bool" />
    5. 

  5.     <config default="false" name="IsATMMode" description="大气压调试模式" max="" min="" paramter="" tag="" unit="" type="Bool" />
    6. 

  6.     <config default="false" name="IsCycleMode" description="循环跑片模式" max="" min="" paramter="" tag="" unit="" type="Bool" />
    7. 

  7.     <config default="3" name="CycleCount" description="CycleCount" max="999999" min="1" paramter="" tag="" unit="" type="Integer" />
    8. 

  8.     <config default="true" name="PMAIsInstalled" description="Enable PMA" max="" min="" paramter="" tag="" unit="" type="Bool" />
    9. 

  9.     <config default="false" name="PMBIsInstalled" description="Enable PMB" max="" min="" paramter="" tag="" unit="" type="Bool" />
    10. 

  10.     <config default="5" name="ATMCyclePMDelayTime" description="ATMCyclePMDelayTime" max="9999" min="1" paramter="" tag="" unit="s" type="Integer" />
    11. 

  11.     <config default="25" name="MaxTemperatureToleranceTransferWafer" description="MaxTemperatureToleranceTransferWafer" max="100" min="1" paramter="" tag="" unit="℃" type="Double" />
    12. 

  12.     <config default="1" name="MaxTemperatureToleranceToTarget" description="MaxTemperatureToleranceToTarget" max="100" min="1" paramter="" tag="" unit="℃" type="Double" />
    13. 

  13.     <config default="3000" name="BuzzerBlinkingTime" description="BuzzerBlinkingTime" max="60000" min="1" paramter="" tag="" unit="s" type="Double" />
    14. 

  14.     <config default="3" name="SmallWafer" nameView="Small Wafer" description="小晶圆尺寸" max="100" min="0" paramter="" tag="" unit="" visible="false" type="Integer" />
    15. 

  15.     <config default="4" name="MidWafer" nameView="Mid Wafer" description="中晶圆尺寸" max="100" min="0" paramter="" tag="" unit="" visible="false" type="Integer" />
    16. 

  16.     <config default="6" name="BigWafer" nameView="Big Wafer" description="大晶圆尺寸" max="100" min="0" paramter="" tag="" unit="" visible="false" type="Integer" />
    17. 

  17.   </configs>
    18. 

  18. 

  19. 

  20.   <!--Router-->
    21. 

  21.   <configs name="Scheduler">
    22. 

  22.     <config default="true" name="GroupWaferBySequence" description="GroupWaferBySequence" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    23. 

  23.     <config default="true" name="IsRunInParallelMode" description="并行模式1对1，串行模式按顺序" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    24. 

  24.   </configs>
    25. 

  25. 

  26.   <!--PMA-->
    27. 

  27.   <configs name="PMA">
    28. 

  28.     <config default="120" name="PrepareTransferTimeout" description="prepare transfer time out" max="99999" min="1" paramter="" tag="" unit="s" type="Integer" />
    29. 

  29.     <config default="1" name="OpenGasValveTimeout" description="开阀超时" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    30. 

  30.     <config default="1" name="TimeLimitOfCloseGasValve" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    31. 

  31.     <config default="1" name="OpenCloseSlitValveTimeout" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    32. 

  32.     <config default="180" name="VentTime" description="" max="600" min="0" paramter="" tag="" unit="second" type="Integer" />
    33. 

  33.     <config default="3" name="GasCount" description="Gas stick count" max="5" min="0" paramter="" tag="" unit="" type="Integer" />
    34. 

  34.     <config default="100" name="GasFlowPressureAlarmRange" description="" max="760000" min="0" paramter="" tag="" unit="sccm" type="Double" />
    35. 

  35.     <config default="60" name="GasFlowPressureAlarmTime" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Double" />
    36. 

  36.     <config default="true" name="EnableThrottleValve" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    37. 

  37.     <config default="150" name="ChamberHeaterSetPointLimit" description="" max="500" min="0" paramter="" tag="" unit="" type="Integer" />
    38. 

  38.     <config default="140" name="ForeLineHeaterSetPointLimit" description="" max="500" min="0" paramter="" tag="" unit="" type="Integer" />
    39. 

  39.     <config default="120" name="CheckSubstrateTempTimeout" description="" max="3600" min="0" paramter="" tag="" unit="" type="Integer" />
    40. 

  40.     <config default="90" name="CheckATMTimeout" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
    41. 

  41.     <config default="1" name="VentTimeDelay" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
    42. 

  42.     
    43. 

  43.     <configs name="DryPump">
    44. 

  44.       <config default="1" name="MFG" description="厂商, 1:Sky; 2:Edwards" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    45. 

  45.       <config default="1" name="CommunicationType" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    46. 

  46.       <config default="COM21" name="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
    47. 

  47.       <config default="1000" name="ChamberForelinePressureThreshold" description="Chamber Foreline Pressure Threshold" max="10000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
    48. 

  48.       <config default="20" name="ChamberForelinePressureTimeout" description="Chamber Foreline Pressure Timeout" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
    49. 

  49.     </configs>
    50. 

  50.     <configs name="Rf">
    51. 

  51.       <config default="1" name="MFG" description="厂商, 1:AdTec; 2:MKS" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    52. 

  52.       <config default="1" name="model" description="型号, 1:AdTec-TX20, 2:AdTec-TX30" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    53. 

  53.       <config default="1" name="CommunicationType" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    54. 

  54.       <config default="COM22" name="Port" description="serial port name of RFG" max="" min="" paramter="" tag="" unit="" type="String" />
    55. 

  55.       <config default="500" name="PowerAlarmRange" description="Power Alarm Range" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
    56. 

  56.       <config default="10" name="PowerAlarmTime" description="Power Alarm Time" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    57. 

  57.       <config default="1" name="ReflectPowerAlarmRange" description="Reflect Power Alarm Range" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
    58. 

  58.       <config default="1" name="ReflectPowerAlarmTime" description="Reflect Power Alarm Time" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    59. 

  59.       <config default="3000" name="PowerRange" description="Power Range" max="30000" min="0" paramter="" tag="" unit="" type="Double" />
    60. 

  60.       <config default="1" name="Coefficient" description="Coefficient" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    61. 

  61.       <config default="false" name="EnablePulsingFunction" description="Enable Pulsing Function" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    62. 

  62.       <config default="false" name="EnableReflectPower" description="Enable Reflect Power" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    63. 

  63.       <config default="false" name="EnableVoltageCurrent" description="Enable Voltage Current" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    64. 

  64.       <config default="1" name="PowerRegulationFactor" description="Power Regulation Factor" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    65. 

  65.       <config default="1000" name="RfPowerAlarmRange" description="Rf Power Alarm Range" max="10000" min="0" paramter="" tag="" unit="" type="Integer" />
    66. 

  66.       <config default="3000" name="RfPowerAlarmTime" description="Rf Power Alarm Time" max="10000" min="0" paramter="" tag="" unit="" type="Integer" />
    67. 

  67.     </configs>
    68. 

  68.     <configs name="match">
    69. 

  69.       <config default="false" name="EnableMatch" description="enable match or not" max="1" min="0" tag="" unit="" type="Bool" />
    70. 

  70.       <config default="1" name="MFG" description="厂商" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    71. 

  71.       <config default="1" name="CommunicationType" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    72. 

  72.       <config default="COM23" name="Port" description="serial port name of match" max="" min="" paramter="" tag="" unit="" type="String" />
    73. 

  73.       <config default="1" name="MatchMode" description="Match Mode" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    74. 

  74.       <config default="false" name="EnableC1C2Position" description="Enable C1 C2 Position" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    75. 

  75.       <config default="10" name="MatchPositionC1" description="Match Position C1" max="100" min="0" paramter="" tag="" unit="" type="Double" />
    76. 

  76.       <config default="10" name="MatchPositionC2" description="Match Position C2" max="100" min="0" paramter="" tag="" unit="" type="Double" />
    77. 

  77.     </configs>
    78. 

  78.     <configs name="MfcGas1">
    79. 

  79.       <config default="true" name="MfcEnableAlarm" description="Mfc Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    80. 

  80.       <config default="10" name="MfcAlarmRange" description="Mfc Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    81. 

  81.       <config default="10" name="MfcAlarmTime" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    82. 

  82.       <config default="O2" name="GasName" description="Name of NO.1 gas stick" tag="" unit="" type="String" />
    83. 

  83.       <config default="true" name="Enable" description="Enable gas 1 or not" tag="" unit="" type="Bool" />
    84. 

  84.       <config default="100" name="MfcN2Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
    85. 

  85.       <config default="1" name="MfcScaleFactor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
    86. 

  86.       <config default="100" name="DefaultSetPoint" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
    87. 

  87.       <config default="1" name="FlowRegulationFactor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
    88. 

  88.     </configs>
    89. 

  89.     <configs name="MfcGas2">
    90. 

  90.       <config default="true" name="MfcEnableAlarm" description="Mfc Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    91. 

  91.       <config default="10" name="MfcAlarmRange" description="Mfc Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    92. 

  92.       <config default="10" name="MfcAlarmTime" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    93. 

  93.       <config default="N2" name="GasName" description="Name of NO.2 gas stick" tag="" unit="" type="String" />
    94. 

  94.       <config default="true" name="Enable" description="Enable gas 2 or not" tag="" unit="" type="Bool" />
    95. 

  95.       <config default="100" name="MfcN2Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
    96. 

  96.       <config default="1" name="MfcScaleFactor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
    97. 

  97.       <config default="100" name="DefaultSetPoint" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
    98. 

  98.       <config default="1" name="FlowRegulationFactor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
    99. 

  99.     </configs>
    100. 

  100.     <configs name="MfcGas3">
    101. 

  101.       <config default="true" name="MfcEnableAlarm" description="Mfc Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    102. 

  102.       <config default="10" name="MfcAlarmRange" description="Mfc Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    103. 

  103.       <config default="10" name="MfcAlarmTime" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    104. 

  104.       <config default="AR" name="GasName" description="Name of NO.3 gas stick" tag="" unit="" type="String" />
    105. 

  105.       <config default="true" name="Enable" description="Enable gas 3 or not" tag="" unit="" type="Bool" />
    106. 

  106.       <config default="100" name="MfcN2Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
    107. 

  107.       <config default="1" name="MfcScaleFactor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
    108. 

  108.       <config default="100" name="DefaultSetPoint" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
    109. 

  109.       <config default="1" name="FlowRegulationFactor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
    110. 

  110.     </configs>
    111. 

  111.     <configs name="MfcGas4">
    112. 

  112.       <config default="true" name="MfcEnableAlarm" description="Mfc Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    113. 

  113.       <config default="10" name="MfcAlarmRange" description="Mfc Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    114. 

  114.       <config default="10" name="MfcAlarmTime" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    115. 

  115.       <config default="Gas4" name="GasName" description="Name of NO.4 gas stick" tag="" unit="" type="String" />
    116. 

  116.       <config default="true" name="Enable" description="Enable gas 4 or not" tag="" unit="" type="Bool" />
    117. 

  117.       <config default="100" name="MfcN2Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
    118. 

  118.       <config default="1" name="MfcScaleFactor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
    119. 

  119.       <config default="100" name="DefaultSetPoint" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
    120. 

  120.       <config default="1" name="FlowRegulationFactor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
    121. 

  121.     </configs>
    122. 

  122.     <configs name="Pump">
    123. 

  123.       <config default="30" name="LeakRate" description="Leak Rate" max="756000" min="0" paramter="" tag="" unit="mTorrPerMin" type="Double" />
    124. 

  124.       <config default="180" name="LeakCheckPumpingTime" description="Leak Check Pumping Time" max="3000" min="0" paramter="" tag="" unit="" type="Integer" />
    125. 

  125.       <config default="180" name="LeakCheckWaitTime" description="Leak Check Wait Time" max="3000" min="0" paramter="" tag="" unit="" type="Integer" />
    126. 

  126.       <config default="150" name="PumpBasePressure" description="PM Pump Base Pressure" max="756000" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
    127. 

  127.       <config default="120" name="PumpTimeLimit" description="PM Pump Time Limit" max="3000" min="0" paramter="" tag="" unit="" type="Double" />
    128. 

  128.       <config default="5" name="PumpValveDelay" description="PM Pump Valve Delay" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
    129. 

  129.       <config default="150" name="LoadLockPumpBasePressure" description="LoadLock Pump Base Pressure" max="756000" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
    130. 

  130.       <config default="120" name="LoadLockPumpTimeLimit" description="LoadLock Pump Time Limit" max="3000" min="0" paramter="" tag="" unit="" type="Double" />
    131. 

  131.     </configs>
    132. 

  132.     <configs name="Purge">
    133. 

  133.       <config default="3" name="PurgeCycleCount" description="Purge Cycle Count" max="30" min="0" paramter="" tag="" unit="times" type="Double" />
    134. 

  134.       <config default="700000" name="PurgeVentPressure" description="Purge Vent Pressure" max="760000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
    135. 

  135.       <config default="10" name="PurgePumpPressure" description="Purge Pump Pressure" max="760000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
    136. 

  136.       <config default="60" name="PurgeVentTimeLimit" description="Purge Vent Time Limit" max="3600" min="0" paramter="" tag="" unit="second" type="Double" />
    137. 

  137.       <config default="60" name="PurgePumpTimeLimit" description="Purge Pump Time Limit" max="3600" min="0" paramter="" tag="" unit="second" type="Double" />
    138. 

  138.       <config default="10" name="PurgeVentStableTime" description="Purge Vent Stable Time" max="600" min="0" paramter="" tag="" unit="second" type="Double" />
    139. 

  139.       <config default="10" name="PurgePumpStableTime" description="Purge Pump Stable Time" max="600" min="0" paramter="" tag="" unit="second" type="Double" />
    140. 

  140.     </configs>
    141. 

  141.     <configs name="HeaterChamber">
    142. 

  142.       <config default="0" name="HeaterOffset25-50" description="25&lt;=设定值&lt;50" max="20" min="0" paramter="" tag="" unit="degree" type="Integer" />
    143. 

  143.       <config default="0" name="HeaterOffset50-75" description="50&lt;=设定值&lt;75" max="20" min="0" paramter="" tag="" unit="degree" type="Integer" />
    144. 

  144.       <config default="0" name="HeaterOffset75-100" description="75&lt;=设定值&lt;100" max="20" min="0" paramter="" tag="" unit="degree" type="Integer" />
    145. 

  145.       <config default="0" name="HeaterOffset100-125" description="100&lt;=设定值&lt;125" max="20" min="0" paramter="" tag="" unit="degree" type="Integer" />
    146. 

  146.       <config default="0" name="HeaterOffset125-150" description="125&lt;=设定值&lt;150" max="20" min="0" paramter="" tag="" unit="degree" type="Integer" />
    147. 

  147.       <config default="0" name="HeaterOffset150-175" description="150&lt;=设定值&lt;175" max="20" min="0" paramter="" tag="" unit="degree" type="Integer" />
    148. 

  148.       <config default="0" name="HeaterOffset175-200" description="175&lt;=设定值&lt;200" max="20" min="0" paramter="" tag="" unit="degree" type="Integer" />
    149. 

  149.       <config default="0" name="HeaterOffset200+" description="200&lt;=设定值" max="20" min="0" paramter="" tag="" unit="degree" type="Integer" />
    150. 

  150.     </configs>
    151. 

  151.   </configs>
    152. 

  152. 

  153.   <!--FA-->
    154. 

  154.   <configs name="FA">
    155. 

  155.     <config default="Passive" name="ConnectionMode" description="Passive  Active" max="0" min="0" paramter="" tag="" unit="" type="String" />
    156. 

  156.     <config default="127.0.0.1" name="LocalIpAddress" description=" " max="0" min="0" paramter="" tag="" unit="" type="String" />
    157. 

  157.     <config default="5021" name="LocalPortNumber" description="LocalPortNumber" max="99999" min="0" paramter="" tag="" unit="" type="Integer" />
    158. 

  158.     <config default="127.0.0.1" name="RemoteIpAddress" description=" " max="0" min="0" paramter="" tag="" unit="" type="String" />
    159. 

  159.     <config default="5020" name="RemotePortNumber" description=" " max="99999" min="0" paramter="" tag="" unit="" type="Integer" />
    160. 

  160.     <config default="45" name="T3Timeout" description=" " max="999" min="0" paramter="" tag="" unit="s" type="Integer" />
    161. 

  161.     <config default="10" name="T5Timeout" description=" " max="999" min="0" paramter="" tag="" unit="s" type="Integer" />
    162. 

  162.     <config default="5" name="T6Timeout" description=" " max="999" min="0" paramter="" tag="" unit="s" type="Integer" />
    163. 

  163.     <config default="10" name="T7Timeout" description=" " max="999" min="0" paramter="" tag="" unit="s" type="Integer" />
    164. 

  164.     <config default="5" name="T8Timeout" description=" " max="999" min="0" paramter="" tag="" unit="s" type="Integer" />
    165. 

  165.     <config default="false" name="EnableSpooling" description="EnableSpooling" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    166. 

  166.     <config default="30" name="LinkTestInterval" description="LinkTestInterval" max="999" min="0" paramter="" tag="" unit="s" type="Integer" />
    167. 

  167.     <config default="Enabled" name="DefaultCommunicationState" description="Enabled /Disabled" max="0" min="0" paramter="" tag="" unit="" type="String" />
    168. 

  168.     <config default="Online" name="DefaultControlState" description="Online / Offline" max="0" min="0" paramter="" tag="" unit="" type="String" />
    169. 

  169.     <config default="Local" name="DefaultControlSubState" description="Local / Remote" max="0" min="0" paramter="" tag="" unit="" type="String" />
    170. 

  170.     <config default="0" name="DeviceId" description="DeviceId" max="0" min="0" paramter="" tag="" unit="" type="String" />
    171. 

  171.   </configs>
    172. 

  172. </root>
    173.