| .. |
|
EFEM
|
e61f018b66
Manual Return wafer while running cycle.
|
il y a 2 ans |
|
LLs
|
c3bef13a6e
Enhance Auto pump/vent algorithm.
|
il y a 2 ans |
|
LPs
|
03063bae6a
Enhance the routine framework.
|
il y a 2 ans |
|
PMs
|
a5ba0d3c6b
add Process in PMChamber for SEOpertaion
|
il y a 2 ans |
|
Schedulers
|
1b999083c8
add WaferTransfer for VenusSE && fix bug in VceControl as param is null && fix bug in Pick,Place as target slot is negative.
|
il y a 2 ans |
|
TM
|
26a6aa8f41
fix bug in SE Swap && SE Cycle
|
il y a 2 ans |
|
VCE
|
f5a709d29f
enhance ReturnWafer for VenusSE && fix bugs in VCE Routine, HongHuTM
|
il y a 2 ans |
|
AutoCycle.cs
|
6ac9eafd1d
FIX minor bug for log.
|
il y a 2 ans |
|
Autotransfer_LP_FA.cs
|
a5542b5c2c
add SETMCycle|SESequence|SE Swap| => UI+RT && Update the Config items' visible by PM.ChamberType, item keyword of "typeflag" and InstalledModule
|
il y a 2 ans |
|
EntityTaskBase.cs
|
5b037046f9
Add TM/LL modules.
|
il y a 2 ans |
|
ManualTransfer.cs
|
501997ac38
TM/EFEM robot single arm option.
|
il y a 2 ans |
|
ResourceMonitor.cs
|
0ed42d17d1
fix bugs for WaferOffset
|
il y a 2 ans |
|
RouteManager.cs
|
26a6aa8f41
fix bug in SE Swap && SE Cycle
|
il y a 2 ans |
|
SEManualTransfer.cs
|
f5a709d29f
enhance ReturnWafer for VenusSE && fix bugs in VCE Routine, HongHuTM
|
il y a 2 ans |
|
SETMCycle.cs
|
26a6aa8f41
fix bug in SE Swap && SE Cycle
|
il y a 2 ans |
|
TMCycle.cs
|
a5542b5c2c
add SETMCycle|SESequence|SE Swap| => UI+RT && Update the Config items' visible by PM.ChamberType, item keyword of "typeflag" and InstalledModule
|
il y a 2 ans |
zhouhr
a5ba0d3c6b
add Process in PMChamber for SEOpertaion