VenusDispatcher.cs 91 KB

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  1. using System;
  2. using System.Collections.Generic;
  3. using System.Linq;
  4. using System.Diagnostics;
  5. using Aitex.Core.Common;
  6. using Aitex.Core.RT.Routine;
  7. using Aitex.Core.RT.SCCore;
  8. using Aitex.Sorter.Common;
  9. using Aitex.Core.RT.Log;
  10. using Aitex.Core.Util;
  11. using Aitex.Core.RT.DataCenter;
  12. using Aitex.Core.RT.RecipeCenter;
  13. using Aitex.Core.RT.Fsm;
  14. using MECF.Framework.Common.Jobs;
  15. using MECF.Framework.Common.Routine;
  16. using MECF.Framework.Common.Equipment;
  17. using MECF.Framework.Common.SubstrateTrackings;
  18. using MECF.Framework.Common.Schedulers;
  19. using MECF.Framework.Common.DBCore;
  20. using Venus_Core;
  21. using Venus_RT.Modules.Schedulers;
  22. using Venus_RT.Scheduler;
  23. using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robot;
  24. namespace Venus_RT.Modules
  25. {
  26. class VCETask : ModuleTask
  27. {
  28. public VCETask(ModuleName mod) : base(mod)
  29. {
  30. }
  31. }
  32. class VenusPMTask : ModuleTask
  33. {
  34. public enum RecipeJobType
  35. {
  36. PreClean,
  37. Process,
  38. PostClean,
  39. WtwClean,
  40. }
  41. public override int TimeToReady
  42. {
  43. get
  44. {
  45. switch (Status)
  46. {
  47. case ModuleStatus.Idle:
  48. case ModuleStatus.IdleClean:
  49. case ModuleStatus.PreJobClean:
  50. case ModuleStatus.PostJobClean:
  51. case ModuleStatus.WTWClean:
  52. case ModuleStatus.Processing:
  53. {
  54. return Scheduler.IsAvailable ? 0 : (Scheduler.TimeToReady + 500) / 1000;
  55. }
  56. }
  57. return int.MaxValue / 2;
  58. }
  59. }
  60. private WaferTask _wafer;
  61. private SchedulerPM _pmScheduler => Scheduler as SchedulerPM;
  62. Queue<KeyValuePair<Guid, Queue<KeyValuePair<RecipeJobType, string>>>> _pendingWaferTasks = new Queue<KeyValuePair<Guid, Queue<KeyValuePair<RecipeJobType, string>>>> ();
  63. KeyValuePair<Guid, Queue<KeyValuePair <RecipeJobType, string>>> _runingWaferTask = new KeyValuePair<Guid, Queue<KeyValuePair<RecipeJobType, string>>> (Guid.Empty, new Queue<KeyValuePair<RecipeJobType, string>>());
  64. public VenusPMTask(ModuleName mod) : base(mod)
  65. { }
  66. public override RState Run()
  67. {
  68. if(_runingWaferTask.Value.Count == 0)
  69. {
  70. if(_pendingWaferTasks.Count > 0)
  71. {
  72. _runingWaferTask = _pendingWaferTasks.Dequeue();
  73. }
  74. else
  75. {
  76. if(Scheduler.IsIdle && Status == ModuleStatus.Idle)
  77. {
  78. if (WaferManager.Instance.CheckNoWafer(Module, 0) && Scheduler.IsOnline)
  79. {
  80. if (_pmScheduler.RunIdleCleanTask()) // Check Idle Clean
  81. {
  82. Status = ModuleStatus.StartIdleClean;
  83. }
  84. }
  85. }
  86. }
  87. }
  88. else
  89. {
  90. if(Scheduler.IsIdle && Status == ModuleStatus.Idle)
  91. {
  92. switch(_runingWaferTask.Value.First().Key)
  93. {
  94. case RecipeJobType.PreClean:
  95. {
  96. if(WaferManager.Instance.CheckNoWafer(Module,0))
  97. {
  98. if (_pmScheduler.RunJobCleanTask(_runingWaferTask.Value.First().Value))
  99. {
  100. Status = ModuleStatus.StartPreJobClean;
  101. }
  102. else
  103. {
  104. LOG.Write(eEvent.WARN_ROUTER, Module, $"Run Prejob clean recipe {_runingWaferTask.Value.First().Value} failed");
  105. TryDequeueRuningTask(Status);
  106. Status = ModuleStatus.Idle;
  107. }
  108. }
  109. }
  110. break;
  111. case RecipeJobType.Process:
  112. {
  113. if (WaferManager.Instance.CheckHasWafer(Module, 0))
  114. {
  115. if(_wafer.waferId == _runingWaferTask.Key)
  116. {
  117. Scheduler.EventWaferArrived?.Invoke(this, new WaferMoveArgs(ModuleName.TMRobot, 0, Module, 0));
  118. Status = ModuleStatus.StartProcess;
  119. }
  120. else
  121. {
  122. LOG.Write(eEvent.WARN_ROUTER, Module, $"wafer id dismatch while launch {_wafer.sourceMod}.{_wafer.sourceSlot + 1} process recipe");
  123. }
  124. }
  125. }
  126. break;
  127. case RecipeJobType.PostClean:
  128. {
  129. if (WaferManager.Instance.CheckNoWafer(Module, 0))
  130. {
  131. if (_pmScheduler.RunJobCleanTask(_runingWaferTask.Value.First().Value))
  132. {
  133. Status = ModuleStatus.StartPostJobClean;
  134. }
  135. else
  136. {
  137. LOG.Write(eEvent.WARN_ROUTER, Module, $"Run Postjob clean recipe {_runingWaferTask.Value.First().Value} failed");
  138. TryDequeueRuningTask(Status);
  139. Status = ModuleStatus.Idle;
  140. }
  141. }
  142. }
  143. break;
  144. case RecipeJobType.WtwClean:
  145. {
  146. if (WaferManager.Instance.CheckNoWafer(Module, 0))
  147. {
  148. if (_pmScheduler.RunJobCleanTask(_runingWaferTask.Value.First().Value))
  149. {
  150. Status = ModuleStatus.StartWTWClean;
  151. }
  152. else
  153. {
  154. LOG.Write(eEvent.WARN_ROUTER, Module, $"Run WTW clean recipe {_runingWaferTask.Value.First().Value} failed");
  155. TryDequeueRuningTask(Status);
  156. Status = ModuleStatus.Idle;
  157. }
  158. }
  159. }
  160. break;
  161. }
  162. }
  163. }
  164. if(_runingWaferTask.Value.Count > 0 || Status != ModuleStatus.Idle)
  165. {
  166. if (Scheduler.IsIdle)
  167. {
  168. switch (Status)
  169. {
  170. case ModuleStatus.Processing:
  171. {
  172. var wafer = WaferManager.Instance.GetWafer(Module, 0);
  173. if (Scheduler.IsOnline)
  174. {
  175. if (!wafer.IsEmpty && wafer.ProcessState == EnumWaferProcessStatus.Completed)
  176. {
  177. _wafer.Return();
  178. TryDequeueRuningTask(Status);
  179. Status = ModuleStatus.Idle;
  180. }
  181. }
  182. else // handle offline exception situation
  183. {
  184. TryDequeueRuningTask(Status);
  185. Status = ModuleStatus.Idle;
  186. }
  187. }
  188. break;
  189. case ModuleStatus.PreJobClean:
  190. case ModuleStatus.PostJobClean:
  191. case ModuleStatus.WTWClean:
  192. {
  193. TryDequeueRuningTask(Status);
  194. Status = ModuleStatus.Idle;
  195. }
  196. break;
  197. case ModuleStatus.IdleClean:
  198. {
  199. Status = ModuleStatus.Idle;
  200. }
  201. break;
  202. case ModuleStatus.StartProcess:
  203. {
  204. if (RouteManager.IsATMMode)
  205. {
  206. Status = ModuleStatus.Processing;
  207. }
  208. }
  209. break;
  210. }
  211. }
  212. else
  213. {
  214. switch (Status)
  215. {
  216. case ModuleStatus.StartProcess:
  217. Status = ModuleStatus.Processing;
  218. break;
  219. case ModuleStatus.StartIdleClean:
  220. Status = ModuleStatus.IdleClean;
  221. break;
  222. case ModuleStatus.StartPreJobClean:
  223. Status = ModuleStatus.PreJobClean;
  224. break;
  225. case ModuleStatus.StartPostJobClean:
  226. Status = ModuleStatus.PostJobClean;
  227. break;
  228. case ModuleStatus.StartWTWClean:
  229. Status = ModuleStatus.WTWClean;
  230. break;
  231. }
  232. }
  233. }
  234. return RState.Running;
  235. }
  236. void TryDequeueRuningTask( ModuleStatus status)
  237. {
  238. bool bMatch = false;
  239. if (_runingWaferTask.Value.Count > 0)
  240. {
  241. switch(status)
  242. {
  243. case ModuleStatus.PreJobClean:
  244. if(_runingWaferTask.Value.First().Key == RecipeJobType.PreClean)
  245. {
  246. _runingWaferTask.Value.Dequeue();
  247. bMatch = true;
  248. }
  249. break;
  250. case ModuleStatus.Processing:
  251. if(_runingWaferTask.Value.First().Key == RecipeJobType.Process)
  252. {
  253. _runingWaferTask.Value.Dequeue();
  254. bMatch = true;
  255. }
  256. break;
  257. case ModuleStatus.PostJobClean:
  258. if(_runingWaferTask.Value.First().Key == RecipeJobType.PostClean)
  259. {
  260. _runingWaferTask.Value.Dequeue();
  261. bMatch = true;
  262. }
  263. break;
  264. case ModuleStatus.WTWClean:
  265. if(_runingWaferTask.Value.First().Key == RecipeJobType.WtwClean)
  266. {
  267. _runingWaferTask.Value.Dequeue();
  268. bMatch = true;
  269. }
  270. break;
  271. case ModuleStatus.WaitPreJobClean:
  272. case ModuleStatus.WaitProcess:
  273. case ModuleStatus.WaitPostJobClean:
  274. case ModuleStatus.WaitWTWClean:
  275. case ModuleStatus.Idle:
  276. _runingWaferTask.Value.Dequeue();
  277. break;
  278. }
  279. }
  280. if(!bMatch)
  281. {
  282. string runingTask = _runingWaferTask.Value.Count > 0 ? _runingWaferTask.Value.First().ToString() : "Empty";
  283. LOG.Write(eEvent.WARN_ROUTER, Module, $"TryDequeueRuningTask() failed, PM Status: {status}, runing task : {runingTask}");
  284. }
  285. if(_runingWaferTask.Value.Count == 0 && _runingWaferTask.Key != Guid.Empty)
  286. {
  287. _runingWaferTask = new KeyValuePair<Guid, Queue<KeyValuePair<RecipeJobType, string>>>(Guid.Empty, new Queue<KeyValuePair<RecipeJobType, string>>());
  288. }
  289. }
  290. public override void WaferArrived(WaferTask wafer, int slot)
  291. {
  292. _wafer = wafer;
  293. }
  294. public override void WaferLeaved(WaferTask wafer, int slot)
  295. {
  296. _wafer = null;
  297. }
  298. public void SubscribeWaferTask(WaferTask waferTask)
  299. {
  300. var waferRecipes = new Queue<KeyValuePair<RecipeJobType, string>>();
  301. if (!string.IsNullOrWhiteSpace(waferTask.processRecipe))
  302. {
  303. waferRecipes.Enqueue(new KeyValuePair<RecipeJobType, string>(RecipeJobType.Process, waferTask.processRecipe));
  304. }
  305. if (!string.IsNullOrWhiteSpace(waferTask.wtwCleanRecipe))
  306. {
  307. waferRecipes.Enqueue(new KeyValuePair<RecipeJobType, string>(RecipeJobType.WtwClean, waferTask.wtwCleanRecipe));
  308. }
  309. if(_runingWaferTask.Key == waferTask.waferId || _pendingWaferTasks.ToList().Exists(kv => kv.Key == waferTask.waferId))
  310. {
  311. LOG.Write(eEvent.WARN_ROUTER, Module, $"wafer {waferTask.sourceMod}.{waferTask.sourceSlot + 1} already subscribe job task.");
  312. }
  313. else if (_runingWaferTask.Key == Guid.Empty || _runingWaferTask.Value.Count == 0)
  314. {
  315. _runingWaferTask = new KeyValuePair<Guid, Queue<KeyValuePair<RecipeJobType, string>>>(waferTask.waferId, waferRecipes);
  316. }
  317. else
  318. {
  319. _pendingWaferTasks.Enqueue(new KeyValuePair<Guid, Queue<KeyValuePair<RecipeJobType, string>>>(waferTask.waferId, waferRecipes));
  320. }
  321. }
  322. public void SubscribeLotCleanTask(ControlJobInfo cj, RecipeJobType cleanType)
  323. {
  324. var lotCleanRecipes = new Queue<KeyValuePair<RecipeJobType, string>>();
  325. if(cleanType == RecipeJobType.PreClean && !string.IsNullOrWhiteSpace(cj.PreJobClean))
  326. {
  327. lotCleanRecipes.Enqueue(new KeyValuePair<RecipeJobType, string>(cleanType, cj.PreJobClean));
  328. }
  329. else if(cleanType == RecipeJobType.PostClean && !string.IsNullOrWhiteSpace (cj.PostJobClean))
  330. {
  331. lotCleanRecipes.Enqueue(new KeyValuePair<RecipeJobType, string>(cleanType, cj.PostJobClean));
  332. }
  333. else
  334. {
  335. return;
  336. }
  337. if ((_runingWaferTask.Key == cj.InnerId && _runingWaferTask.Value.ToList().Exists(pv => pv.Key == cleanType)) || _pendingWaferTasks.ToList().Exists(task => task.Key == cj.InnerId && task.Value.ToList().Exists(pv => pv.Key == cleanType)))
  338. {
  339. LOG.Write(eEvent.WARN_ROUTER, Module, $"Control job {cj.Name} already subscribe {cleanType} task.");
  340. }
  341. else if (_runingWaferTask.Key == Guid.Empty || _runingWaferTask.Value.Count == 0)
  342. {
  343. _runingWaferTask = new KeyValuePair<Guid, Queue<KeyValuePair<RecipeJobType, string>>>(cj.InnerId, lotCleanRecipes);
  344. }
  345. else
  346. {
  347. _pendingWaferTasks.Enqueue(new KeyValuePair<Guid, Queue<KeyValuePair<RecipeJobType, string>>>(cj.InnerId, lotCleanRecipes));
  348. }
  349. }
  350. public bool ReadyMoveIn(WaferTask wafer)
  351. {
  352. return _runingWaferTask.Key == wafer.waferId && _runingWaferTask.Value.Count > 0 && _runingWaferTask.Value.First().Key == RecipeJobType.Process;
  353. }
  354. public bool IsAllJobCompleted()
  355. {
  356. return Status == ModuleStatus.Idle && (_runingWaferTask.Key == Guid.Empty || _runingWaferTask.Value.Count == 0) && _pendingWaferTasks.Count == 0;
  357. }
  358. public bool IsRecipeJobDone(RecipeJobType job)
  359. {
  360. return (_runingWaferTask.Key == Guid.Empty || !_runingWaferTask.Value.ToList().Exists(kv => kv.Key == job)) && (_pendingWaferTasks.Count == 0 || !_pendingWaferTasks.ToList().Exists(kv => kv.Value.Count > 0 && kv.Value.ToList().Exists(kvv => kvv.Key == job)));
  361. }
  362. public override void ResetTask()
  363. {
  364. base.ResetTask();
  365. _wafer = null;
  366. _pendingWaferTasks.Clear();
  367. _runingWaferTask = new KeyValuePair<Guid, Queue<KeyValuePair<RecipeJobType, string>>>(Guid.Empty, new Queue<KeyValuePair<RecipeJobType, string>>());
  368. }
  369. }
  370. class PreAlignTask : ModuleTask
  371. {
  372. private WaferTask _wafer;
  373. public PreAlignTask(ModuleName aligner) : base(aligner)
  374. {
  375. }
  376. public override RState Run()
  377. {
  378. var tmRobot = Singleton<TransferModule>.Instance.GetScheduler(ModuleName.TMRobot) as SchedulerSETMRobot;
  379. if (tmRobot == null || !tmRobot.IsAvailable)
  380. return RState.Running;
  381. switch (Status)
  382. {
  383. case ModuleStatus.WaitAlign:
  384. {
  385. tmRobot.Align(0);
  386. Status = ModuleStatus.Aligning;
  387. }
  388. break;
  389. case ModuleStatus.Aligning:
  390. {
  391. _wafer.IsAligned = true;
  392. Status = ModuleStatus.Idle;
  393. }
  394. break;
  395. }
  396. return RState.Running;
  397. }
  398. public override void WaferArrived(WaferTask wafer, int slot)
  399. {
  400. _wafer = wafer;
  401. Status = ModuleStatus.WaitAlign;
  402. }
  403. public override void WaferLeaved(WaferTask wafer, int slot)
  404. {
  405. _wafer = null;
  406. }
  407. }
  408. class VenusTMRobotTask : ModuleTask
  409. {
  410. public VenusTMRobotTask(ModuleName mod) : base(mod) { }
  411. public override RState Run()
  412. {
  413. return base.Run();
  414. }
  415. }
  416. class VenusDispatcher : ICycle
  417. {
  418. private RState _tmRobotStatus { get { return (_dictModuleTask[ModuleName.TMRobot].Scheduler as SchedulerSETMRobot).RobotStatus; } }
  419. private List<ControlJobInfo> _lstControlJobs = new List<ControlJobInfo>();
  420. private List<ProcessJobInfo> _lstProcessJobs = new List<ProcessJobInfo>();
  421. private List<WaferTask> _lstWaferTasks = new List<WaferTask>();
  422. private Dictionary<ModuleName, ModuleTask> _dictModuleTask = new Dictionary<ModuleName, ModuleTask>();
  423. private Queue<WaferInfo> _qeReturnWafers = new Queue<WaferInfo>();
  424. private Queue<List<MoveItem>> _tmSchdActions = new Queue<List<MoveItem>>();
  425. private List<MoveItem> _curTmAction = new List<MoveItem>();
  426. private bool _isCycleMode;
  427. private int _cycleSetPoint = 0;
  428. //private int _cycledCount = 0;
  429. //private int _cycledWafer = 0;
  430. //private float _throughput = 0.0f;
  431. private int _tmRobotSingleArmOption = 0;
  432. private Dictionary<ModuleName, int> _lpCycleWafer = new Dictionary<ModuleName, int>() { { ModuleName.LP1, 0 },{ ModuleName.LP2, 0 }, { ModuleName.LP3, 0 } };
  433. private Dictionary<ModuleName, int> _lpCycleCount = new Dictionary<ModuleName, int>() { { ModuleName.LP1, 0 }, { ModuleName.LP2, 0 }, { ModuleName.LP3, 0 } };
  434. private Dictionary<ModuleName, int> _lpCycleSP = new Dictionary<ModuleName, int>() { { ModuleName.LP1, 0 }, { ModuleName.LP2, 0 }, { ModuleName.LP3, 0 } };
  435. private Dictionary<ModuleName, float> _lpThroughput = new Dictionary<ModuleName, float>() { { ModuleName.LP1, 0 }, { ModuleName.LP2, 0 }, { ModuleName.LP3, 0 } };
  436. private Stopwatch _cycleWatch = new Stopwatch();
  437. private SchedulerFACallback _faCallback;
  438. private SchedulerDBCallback _dbCallback;
  439. public SequenceLLInOutPath LLInOutPath => SequenceLLInOutPath.DInDOut;
  440. public bool HasJobRunning => _lstControlJobs.Count > 0;
  441. private RState _cycleState = RState.Init;
  442. public RState CycleState => _cycleState;
  443. private Dictionary<string, ControlJobInfo> _loadportControlJobDic = new Dictionary<string, ControlJobInfo>();
  444. public List<string> InUseRecipes = new List<string>();
  445. public VenusDispatcher()
  446. {
  447. _faCallback = new SchedulerFACallback();
  448. _dbCallback = new SchedulerDBCallback();
  449. InitModules();
  450. DATA.Subscribe("Scheduler.PjIdList", () => Array.ConvertAll(_lstProcessJobs.ToArray(), x => x.InnerId.ToString()).ToList());
  451. DATA.Subscribe("Scheduler.PjNameList", () => Array.ConvertAll(_lstProcessJobs.ToArray(), x => x.LotName.ToString()).ToList());
  452. DATA.Subscribe("Scheduler.InUsingRecipe", () => InUseRecipes);
  453. _isCycleMode = SC.GetValue<bool>("System.IsCycleMode");
  454. _cycleSetPoint = _isCycleMode ? SC.GetValue<int>("System.CycleCount") : 0;
  455. foreach (var lp in new List<ModuleName> { ModuleName.LP1, ModuleName.LP2, ModuleName.LP3 })
  456. {
  457. _loadportControlJobDic[lp.ToString()] = null;
  458. DATA.Subscribe($"{lp}.CurrentControlJob", () => _loadportControlJobDic[lp.ToString()], SubscriptionAttribute.FLAG.IgnoreSaveDB);
  459. DATA.Subscribe($"{lp}.CycledCount", () => _lpCycleCount[lp], SubscriptionAttribute.FLAG.IgnoreSaveDB);
  460. DATA.Subscribe($"{lp}.CycledWafer", () => _lpCycleWafer[lp], SubscriptionAttribute.FLAG.IgnoreSaveDB);
  461. DATA.Subscribe($"{lp}.CycleSetPoint", () => _lpCycleSP[lp], SubscriptionAttribute.FLAG.IgnoreSaveDB);
  462. DATA.Subscribe($"{lp}.Throughput", () => _lpThroughput[lp], SubscriptionAttribute.FLAG.IgnoreSaveDB);
  463. }
  464. }
  465. #region public interface
  466. /// <summary>
  467. /// 获取lp当前的ControlJob
  468. /// </summary>
  469. /// <param name="lp"></param>
  470. /// <returns></returns>
  471. public ControlJobInfo GetLoadPortCurrentControlJob(ModuleName lp)
  472. {
  473. if (ModuleHelper.IsLoadPort(lp))
  474. {
  475. return _loadportControlJobDic.ContainsKey(lp.ToString()) ? _loadportControlJobDic[lp.ToString()] : null;
  476. }
  477. else
  478. {
  479. return null;
  480. }
  481. }
  482. public RState Start(params object[] objs)
  483. {
  484. if (WaferManager.Instance.HasDuplicatedWafer)
  485. {
  486. LOG.Write(eEvent.ERR_ROUTER, ModuleName.System, "System has dummy wafers, please verify all the wafer position, and delete the invalid wafer");
  487. return RState.Failed;
  488. }
  489. _tmRobotSingleArmOption = SC.GetValue<int>("TM.SingleArmOption");
  490. _isCycleMode = SC.GetValue<bool>("System.IsCycleMode");
  491. _cycleSetPoint = _isCycleMode ? SC.GetValue<int>("System.CycleCount") : 0;
  492. //_cycledWafer = 0;
  493. //_cycledCount = 0;
  494. //_throughput = 0;
  495. Clear();
  496. _cycleWatch.Stop();
  497. _lpCycleWafer.Clear();
  498. _lpCycleCount.Clear();
  499. return RState.Running;
  500. }
  501. public bool CreateJob(Dictionary<string, object> param, out string reason)
  502. {
  503. reason = "";
  504. //_isCycleMode = SC.GetValue<bool>("System.IsCycleMode");
  505. //_cycleSetPoint = _isCycleMode ? SC.GetValue<int>("System.CycleCount") : 0;
  506. string[] slotSequence = (string[])param["SlotSequence"];
  507. string jobId = (string)param["JobId"];
  508. string module = (string)param["Module"];
  509. if (string.IsNullOrEmpty(jobId))
  510. {
  511. jobId = "CJ_Local_" + module;
  512. }
  513. //bool autoStart = (bool)param["AutoStart"];
  514. string lotId = jobId;
  515. if (param.ContainsKey("LotId"))
  516. lotId = (string)param["LotId"];
  517. if (slotSequence.Length != SC.GetValue<int>("EFEM.LoadPort.SlotNumber"))
  518. {
  519. reason = $"slot sequence parameter not valid, length is {slotSequence.Length}, should be {SC.GetValue<int>("EFEM.LoadPort.SlotNumber")}";
  520. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, reason);
  521. _faCallback.JobCreateFailed(module, lotId, jobId, "");
  522. return false;
  523. }
  524. if (!ModuleHelper.IsLoadPort(ModuleHelper.Converter(module)))
  525. {
  526. reason = $"{module} should be LoadPort";
  527. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, reason);
  528. _faCallback.JobCreateFailed(module, lotId, jobId, "");
  529. return false;
  530. }
  531. if (_lstControlJobs.Exists(x => x.Name == jobId))
  532. {
  533. reason = $"{jobId} already created";
  534. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, reason);
  535. _faCallback.JobCreateFailed(module, lotId, jobId, "");
  536. return false;
  537. }
  538. ControlJobInfo cj = new ControlJobInfo();
  539. cj.Name = jobId;
  540. cj.Module = module;
  541. cj.LotName = lotId;
  542. cj.LotInnerId = Guid.NewGuid();
  543. cj.LotWafers = new List<WaferInfo>();
  544. cj.SetState(EnumControlJobState.WaitingForStart);
  545. cj.JetState = EnumJetCtrlJobState.Quequed;
  546. cj.SequenceNameList = slotSequence;
  547. cj.CycleNumber = _cycleSetPoint; // only for temperary debug
  548. _lpCycleSP[ModuleHelper.Converter(module)] = _cycleSetPoint;
  549. Dictionary<string, bool[]> seqSlot = new Dictionary<string, bool[]>();
  550. Dictionary<string, List<Tuple<ModuleName, int>>> seqSlotWafers = new Dictionary<string, List<Tuple<ModuleName, int>>>();
  551. Dictionary<string, string> indexSequence = new Dictionary<string, string>();
  552. bool enableGroupBySequence = SC.GetValue<bool>("Scheduler.GroupWaferBySequence");
  553. for (int i = 0; i < SC.GetValue<int>("EFEM.LoadPort.SlotNumber"); i++)
  554. {
  555. if (string.IsNullOrEmpty(slotSequence[i]) || string.IsNullOrEmpty(slotSequence[i].Trim()))
  556. continue;
  557. string groupName = enableGroupBySequence ? slotSequence[i].Trim() : i.ToString();
  558. indexSequence[groupName] = slotSequence[i];
  559. if (!seqSlot.ContainsKey(groupName))
  560. {
  561. seqSlot[groupName] = new bool[SC.GetValue<int>("EFEM.LoadPort.SlotNumber")];
  562. }
  563. if (!seqSlotWafers.ContainsKey(groupName))
  564. {
  565. seqSlotWafers[groupName] = new List<Tuple<ModuleName, int>>();
  566. }
  567. seqSlot[groupName][i] = true;
  568. if (!WaferManager.Instance.CheckHasWafer(module, i))
  569. {
  570. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"job wafer: {module} slot {i + 1} not in the carrier");
  571. return false;
  572. }
  573. if (!WaferManager.Instance.CheckWafer(ModuleHelper.Converter(module), i, WaferStatus.Normal))
  574. {
  575. reason = $"job wafer: {module} slot {i + 1} status is {WaferManager.Instance.GetWafer(ModuleHelper.Converter(module), i).Status}";
  576. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, reason);
  577. _faCallback.JobCreateFailed(module, lotId, jobId, "");
  578. return false;
  579. }
  580. if (WaferManager.Instance.GetWafer(ModuleHelper.Converter(module), i).ProcessState != EnumWaferProcessStatus.Idle)
  581. {
  582. reason = $"job wafer: {module} slot {i + 1} process status is {WaferManager.Instance.GetWafer(ModuleHelper.Converter(module), i).ProcessState}";
  583. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, reason);
  584. _faCallback.JobCreateFailed(module, lotId, jobId, "");
  585. return false;
  586. }
  587. //--- 2024-03-21 增加了waferinfo 相应的lotId信息 start---
  588. WaferInfo waferInfo = WaferManager.Instance.GetWafer(ModuleHelper.Converter(module), i);
  589. cj.LotWafers.Add(waferInfo);
  590. waferInfo.SequenceName = slotSequence[i];
  591. waferInfo.LotId = lotId;
  592. //--- 2024-03-21 增加了waferinfo 相应的lotId信息 end---
  593. seqSlotWafers[groupName].Add(Tuple.Create(ModuleHelper.Converter(module), i));
  594. cj.JobWaferSize = WaferManager.Instance.GetWafer(ModuleHelper.Converter(module), i).Size;
  595. LOG.Write(eEvent.EV_ROUTER, ModuleName.System, $"Assigned wafer job, wafer {module}.{i + 1}, sequence: {slotSequence[i]}");
  596. }
  597. if (seqSlotWafers.Count == 0)
  598. {
  599. reason = $"job has not assign wafer";
  600. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, reason);
  601. _faCallback.JobCreateFailed(module, lotId, jobId, "");
  602. return false;
  603. }
  604. List<ProcessJobInfo> pjs = new List<ProcessJobInfo>();
  605. string[] seqs = seqSlot.Keys.ToArray();
  606. for (int i = 0; i < seqs.Length; i++)
  607. {
  608. ProcessJobInfo pj = new ProcessJobInfo();
  609. pj.Name = jobId + "_" + (i + 1);
  610. pj.Sequence = SequenceInfoHelper.GetInfo(indexSequence[seqs[i]]);
  611. if (pj.Sequence == null)
  612. {
  613. reason = $"invalid sequence[{indexSequence[seqs[i]]}]";
  614. return false;
  615. }
  616. pj.ControlJobName = cj.Name;
  617. pj.LotName = lotId;
  618. pj.SlotWafers = seqSlotWafers[seqs[i]];
  619. pj.SetState(EnumProcessJobState.Queued);
  620. if (!CheckSequencePmReady(pj.Sequence, out reason))
  621. {
  622. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"no valid chamber for the {reason}");
  623. _faCallback.JobCreateFailed(module, lotId, jobId, "");
  624. return false;
  625. }
  626. if (!RouteManager.IsATMMode && !CheckSequenceRecipeFileValid(pj.Sequence, out reason))
  627. {
  628. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"recipe file not valid in the sequence, {reason}");
  629. _faCallback.JobCreateFailed(module, lotId, jobId, "");
  630. return false;
  631. }
  632. pjs.Add(pj);
  633. }
  634. _dbCallback.LotUpdate(cj);
  635. foreach (var pj in pjs)
  636. {
  637. cj.ProcessJobNameList.Add(pj.Name);
  638. _lstProcessJobs.Add(pj);
  639. }
  640. _lstControlJobs.Add(cj);
  641. //AssociatedPMWithLP(cj);
  642. _loadportControlJobDic[cj.Module] = cj;
  643. _faCallback.JobCreated(cj, GetFirstProcessJob(cj));
  644. return true;
  645. }
  646. public bool CheckAllJobDone()
  647. {
  648. foreach (var cj in _lstControlJobs)
  649. {
  650. if (cj.State != EnumControlJobState.Completed)
  651. return false;
  652. }
  653. InUseRecipes.Clear();
  654. return true;
  655. }
  656. public bool CheckJobJustDone(out string sJobName)
  657. {
  658. foreach (var cj in _lstControlJobs)
  659. {
  660. if (cj.State == EnumControlJobState.Completed && !cj.BeenPosted)
  661. {
  662. //LP;WaferSize;Lot;Number;Start;End;
  663. sJobName = $"{cj.Module};{cj.JobWaferSize};{cj.LotName};{cj.LotWafers.Count};{cj.StartTime:T};{cj.EndTime:T}";
  664. cj.BeenPosted = true;
  665. return true;
  666. }
  667. }
  668. sJobName = "NULL";
  669. return false;
  670. }
  671. public ProcessJobInfo GetFirstProcessJob(ControlJobInfo cj)
  672. {
  673. foreach (var pj in _lstProcessJobs)
  674. {
  675. if (pj.ControlJobName == cj.Name)
  676. return pj;
  677. }
  678. return null;
  679. }
  680. public bool AbortJob(string jobName, out string reason)
  681. {
  682. reason = "";
  683. ControlJobInfo cj = _lstControlJobs.Find(x => x.Name == jobName);
  684. if (cj == null)
  685. {
  686. reason = $"abort job rejected, not found job with id {jobName}";
  687. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, reason);
  688. return false;
  689. }
  690. List<ProcessJobInfo> pjAbortList = new List<ProcessJobInfo>();
  691. foreach (var pj in _lstProcessJobs)
  692. {
  693. if (pj.ControlJobName == cj.Name)
  694. {
  695. pj.SetState(EnumProcessJobState.Aborting);
  696. pjAbortList.Add(pj);
  697. int unprocessed = 0;
  698. int aborted = 0;
  699. WaferInfo[] wafers = WaferManager.Instance.GetWaferByProcessJob(pj.Name);
  700. foreach (var waferInfo in wafers)
  701. {
  702. waferInfo.ProcessJob = null;
  703. waferInfo.NextSequenceStep = 0;
  704. if (waferInfo.ProcessState != EnumWaferProcessStatus.Completed)
  705. unprocessed++;
  706. }
  707. JobDataRecorder.EndPJ(pj.InnerId.ToString(), aborted, unprocessed);
  708. }
  709. }
  710. _faCallback.JobAborted(cj, GetFirstProcessJob(cj));
  711. _dbCallback.LotFinished(cj);
  712. foreach (var pj in pjAbortList)
  713. {
  714. _lstProcessJobs.Remove(pj);
  715. }
  716. _lstControlJobs.Remove(cj);
  717. if (_loadportControlJobDic.ContainsKey(cj.Module))
  718. {
  719. _loadportControlJobDic[cj.Module] = null;
  720. }
  721. return true;
  722. }
  723. public bool StopJob(string jobName, out string reason)
  724. {
  725. reason = "";
  726. ControlJobInfo cj = _lstControlJobs.Find(x => x.Name == jobName);
  727. if (cj == null)
  728. {
  729. reason = $"stop job rejected, not found job with id {jobName}";
  730. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, reason);
  731. return false;
  732. }
  733. foreach (var pj in _lstProcessJobs)
  734. {
  735. if (pj.ControlJobName == cj.Name)
  736. {
  737. pj.SetState(EnumProcessJobState.Stopping);
  738. }
  739. }
  740. _faCallback.JobStopped(cj, GetFirstProcessJob(cj));
  741. _dbCallback.LotFinished(cj);
  742. if (_loadportControlJobDic.ContainsKey(cj.Module))
  743. {
  744. _loadportControlJobDic[cj.Module] = null;
  745. }
  746. return true;
  747. }
  748. public bool ResumeJob(string jobName, out string reason)
  749. {
  750. reason = "";
  751. ControlJobInfo cj = _lstControlJobs.Find(x => x.Name == jobName);
  752. if (cj == null)
  753. {
  754. reason = $"resume job rejected, not found job with id {jobName}";
  755. //LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"resume job rejected, not found job with id {jobName}");
  756. return false;
  757. }
  758. if (cj.State == EnumControlJobState.Paused)
  759. {
  760. cj.SetState(EnumControlJobState.Executing);
  761. }
  762. _faCallback.JobResumed(cj, GetFirstProcessJob(cj));
  763. _cycleState = RState.Running;
  764. return true;
  765. }
  766. public bool PauseJob(string jobName, out string reason)
  767. {
  768. reason = "";
  769. ControlJobInfo cj = _lstControlJobs.Find(x => x.Name == jobName);
  770. if (cj == null)
  771. {
  772. reason = $"pause job rejected, not found job with id {jobName}";
  773. //LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"pause job rejected, not found job with id {jobName}");
  774. return false;
  775. }
  776. if (cj.State == EnumControlJobState.Executing)
  777. {
  778. cj.SetState(EnumControlJobState.Paused);
  779. }
  780. _faCallback.JobPaused(cj, GetFirstProcessJob(cj));
  781. if (!_lstControlJobs.Exists(job => job.State == EnumControlJobState.Executing))
  782. _cycleState = RState.Paused;
  783. return true;
  784. }
  785. public bool StartJob(string jobName, out string reason)
  786. {
  787. reason = "";
  788. ControlJobInfo cj = _lstControlJobs.Find(x => x.Name == jobName);
  789. if (cj == null)
  790. {
  791. reason = $"start job rejected, not found job with id {jobName}";
  792. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, reason);
  793. return false;
  794. }
  795. if (cj.State == EnumControlJobState.WaitingForStart)
  796. {
  797. cj.SetState(EnumControlJobState.Queued);
  798. //PreJobClean(cj);
  799. cj.StartTime = DateTime.Now;
  800. _dbCallback.LotCreated(cj);
  801. _faCallback.JobStarted(cj, GetFirstProcessJob(cj));
  802. //if (!_blockingWatcher.IsRunning)
  803. // _blockingWatcher.Restart();
  804. //ResetTraceFlag();
  805. }
  806. if (!_cycleWatch.IsRunning)
  807. {
  808. _cycleWatch.Restart();
  809. }
  810. if (!_lpCycleWafer.Keys.Contains(ModuleHelper.Converter(cj.Module)))
  811. {
  812. _lpCycleCount.Add(ModuleHelper.Converter(cj.Module), 0);
  813. _lpCycleWafer.Add(ModuleHelper.Converter(cj.Module), 0);
  814. }
  815. _cycleState = RState.Running;
  816. return true;
  817. }
  818. public RState Monitor()
  819. {
  820. prelude();
  821. RunWaferTask();
  822. RunModuleTasks();
  823. RoutingWafers();
  824. epilogue();
  825. return _cycleState;
  826. }
  827. public void Abort()
  828. {
  829. }
  830. public void Clear()
  831. {
  832. foreach (var module in _dictModuleTask)
  833. {
  834. module.Value.Status = ModuleStatus.Idle;
  835. module.Value.Scheduler.ResetTask();
  836. module.Value.ResetTask();
  837. }
  838. List<string> keys = _loadportControlJobDic.Keys.ToList();
  839. foreach (var key in keys)
  840. {
  841. _loadportControlJobDic[key] = null;
  842. }
  843. _lstWaferTasks.Clear();
  844. _tmSchdActions.Clear();
  845. _curTmAction.Clear();
  846. _lstControlJobs.Clear();
  847. _lstProcessJobs.Clear();
  848. InUseRecipes.Clear();
  849. _lpCycleWafer[ModuleName.LP1] = 0;
  850. _lpCycleWafer[ModuleName.LP2] = 0;
  851. _lpCycleCount[ModuleName.LP1] = 0;
  852. _lpCycleCount[ModuleName.LP2] = 0;
  853. _lpThroughput[ModuleName.LP1] = 0;
  854. _lpThroughput[ModuleName.LP2] = 0;
  855. _cycleState = RState.End;
  856. }
  857. #endregion
  858. #region manual return wafer
  859. // manual return one wafer while system is auto running
  860. public bool ManualReturnWafer(object[] objs)
  861. {
  862. ModuleName SourceModule = (ModuleName)objs[0];
  863. int SourceSlot = (int)objs[1];
  864. if (!_dictModuleTask.Keys.Contains(SourceModule))
  865. {
  866. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"Invalid source module {SourceModule} for manual return wafer");
  867. return false;
  868. }
  869. if (WaferManager.Instance.CheckNoWafer(SourceModule, SourceSlot))
  870. {
  871. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"Can not return wafer as {SourceModule} {SourceSlot} has no wafer");
  872. return false;
  873. }
  874. if (!_dictModuleTask[SourceModule].Scheduler.IsIdle)
  875. {
  876. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"The module: {SourceModule} is not ready for return wafer");
  877. return false;
  878. }
  879. var wafer = WaferManager.Instance.GetWafer(SourceModule, SourceSlot);
  880. LOG.Write(eEvent.EV_ROUTER, ModuleName.System, $"Manual return wafer: {wafer.WaferOrigin} at {SourceModule} {SourceSlot} while system is auto running");
  881. _qeReturnWafers.Enqueue(wafer);
  882. return true;
  883. }
  884. public RState CheckManualReturnWafer()
  885. {
  886. var pmWaferCount = _dictModuleTask.Where(mod => ModuleHelper.IsPm(mod.Key) && WaferManager.Instance.CheckHasWafer(mod.Key, 0)).Count();
  887. var tmRobotWaferCount = (WaferManager.Instance.CheckHasWafer(ModuleName.TMRobot, 0) ? 1 : 0) + (WaferManager.Instance.CheckHasWafer(ModuleName.TMRobot, 1) ? 1 : 0);
  888. if (!_dictModuleTask[ModuleName.TMRobot].Scheduler.IsIdle && (pmWaferCount > 0 || tmRobotWaferCount > 0))
  889. {
  890. LOG.Write(eEvent.ERR_ROUTER, ModuleName.TMRobot, $"The TM Robot is not ready for return wafer.");
  891. return RState.Failed;
  892. }
  893. foreach (var mod in _dictModuleTask)
  894. {
  895. if (ModuleHelper.IsLoadPort(mod.Key))
  896. continue;
  897. if (!ModuleHelper.IsAligner(mod.Key) && !mod.Value.Scheduler.IsIdle)
  898. {
  899. LOG.Write(eEvent.ERR_ROUTER, mod.Key, $"{mod.Key} is not ready for return wafer.");
  900. return RState.Failed;
  901. }
  902. int nSlotNumber = (ModuleHelper.IsTMRobot(mod.Key) ? 2 : 1);
  903. for (int slot = 0; slot < nSlotNumber; slot++)
  904. {
  905. var wafer = WaferManager.Instance.GetWafer(mod.Key, slot);
  906. if (wafer.IsEmpty)
  907. continue;
  908. var destLP = (ModuleName)wafer.OriginStation;
  909. if (!_dictModuleTask[destLP].Scheduler.IsAvailable)
  910. {
  911. LOG.Write(eEvent.ERR_ROUTER, destLP, $"The destination Loadport {destLP} is not ready for return wafer.");
  912. return RState.Failed;
  913. }
  914. if (!ModuleHelper.IsLoadPort(destLP))
  915. {
  916. LOG.Write(eEvent.ERR_ROUTER, ModuleName.System, $"The wafer {wafer.WaferOrigin} cannot be return, please manually drag it.");
  917. return RState.Failed;
  918. }
  919. }
  920. }
  921. Clear();
  922. return RState.Running;
  923. }
  924. public RState ReturnAllWafers()
  925. {
  926. int systemWaferCount = 0;
  927. foreach (var mod in _dictModuleTask)
  928. {
  929. if (ModuleHelper.IsLoadPort(mod.Key))
  930. continue;
  931. int nSlotNumber = ModuleHelper.IsTMRobot(mod.Key) ? 2 : 1;
  932. for (int slot = 0; slot < nSlotNumber; slot++)
  933. {
  934. var wafer = WaferManager.Instance.GetWafer(mod.Key, slot);
  935. if (!wafer.IsEmpty)
  936. systemWaferCount++;
  937. }
  938. }
  939. if (systemWaferCount == 0)
  940. return RState.End;
  941. ReturnInternalWafers();
  942. return RState.Running;
  943. }
  944. #endregion
  945. #region internal implementation
  946. private void InitModules()
  947. {
  948. foreach (var module in ModuleHelper.InstalledModules)
  949. {
  950. if (ModuleHelper.IsInstalled(module))
  951. {
  952. if (ModuleHelper.IsPm(module))
  953. {
  954. _dictModuleTask[module] = new VenusPMTask(module);
  955. }
  956. else if (ModuleHelper.IsTMRobot(module))
  957. {
  958. _dictModuleTask[module] = new VenusTMRobotTask(module);
  959. }
  960. else if (ModuleHelper.IsAligner(module))
  961. {
  962. _dictModuleTask[module] = new PreAlignTask(module);
  963. }
  964. else if (ModuleHelper.IsLoadPort(module))
  965. {
  966. _dictModuleTask[module] = new LoadPortTask(module);
  967. }
  968. }
  969. }
  970. }
  971. private void prelude()
  972. {
  973. bool available = true;
  974. foreach (var mod in _dictModuleTask)
  975. {
  976. available = mod.Value.Scheduler.IsAvailable; // force scheduler update
  977. }
  978. }
  979. private void epilogue()
  980. {
  981. UpdateProcessJobStatus();
  982. UpdateControlJobStatus();
  983. CreateNewWaferTask();
  984. _lstWaferTasks.RemoveAll(item => ModuleHelper.IsLoadPort(item.destMod) && ModuleHelper.IsLoadPort(item.currentMod) && item.pressureStatus == RState.End);
  985. }
  986. private void RunWaferTask()
  987. {
  988. foreach (var task in _lstWaferTasks)
  989. {
  990. task.Run();
  991. }
  992. }
  993. private void RunModuleTasks()
  994. {
  995. foreach (var task in _dictModuleTask)
  996. {
  997. task.Value.Run();
  998. }
  999. }
  1000. private void RoutingWafers()
  1001. {
  1002. if (_tmSchdActions.Count > 0 || _curTmAction.Count > 0)
  1003. {
  1004. RunSchdTMActions();
  1005. return;
  1006. }
  1007. if (_tmRobotStatus != RState.End)
  1008. return;
  1009. if (_tmRobotSingleArmOption != 0)
  1010. {
  1011. RoutingWaferWithSingleArm();
  1012. return;
  1013. }
  1014. var waitInWafers = _lstWaferTasks.Where(wt => ModuleHelper.IsLoadPort(wt.currentMod) && ModuleHelper.IsPm(wt.destMod)).OrderBy(wt => wt.currentSlot).ToList();
  1015. var readyReturnWafers = _lstWaferTasks.Where(wt => ModuleHelper.IsPm(wt.currentMod) && ModuleHelper.IsLoadPort(wt.destMod)).ToList();
  1016. var emptyAndReadyIn20sPMs = _dictModuleTask.Where(pm => ModuleHelper.IsPm(pm.Key) && !_lstWaferTasks.Exists(wt => wt.currentMod == pm.Key) && pm.Value.TimeToReady < 20).OrderBy(pm => pm.Value.TimeToReady).Select(pm => pm.Key).ToList();
  1017. var robotWafers = _lstWaferTasks.Where(wt => ModuleHelper.IsTMRobot(wt.currentMod)).ToList();
  1018. var aligner = _dictModuleTask.Where(mod => ModuleHelper.IsAligner(mod.Key)).ToList();
  1019. if(robotWafers.Count == 0)
  1020. {
  1021. if(readyReturnWafers.Count > 0)
  1022. {
  1023. if(readyReturnWafers.Count == 1 || readyReturnWafers[0].destMod != readyReturnWafers[1].destMod)
  1024. {
  1025. // return one wafer
  1026. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(readyReturnWafers.First().currentMod, 0, ModuleName.TMRobot, (int)Hand.Blade1, Hand.Blade1) });
  1027. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, (int)Hand.Blade1, readyReturnWafers.First().destMod, readyReturnWafers.First().destSlot, Hand.Blade1) });
  1028. }
  1029. else
  1030. {
  1031. // return two wafer
  1032. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(readyReturnWafers[0].currentMod, 0, ModuleName.TMRobot, (int)Hand.Blade1, Hand.Blade1) });
  1033. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(readyReturnWafers[1].currentMod, 0, ModuleName.TMRobot, (int)Hand.Blade2, Hand.Blade2) });
  1034. var doublePlaceActions = new List<MoveItem>
  1035. {
  1036. new MoveItem(ModuleName.TMRobot, (int)Hand.Blade1, readyReturnWafers[0].destMod, readyReturnWafers[0].destSlot, Hand.Blade1),
  1037. new MoveItem(ModuleName.TMRobot, (int)Hand.Blade2, readyReturnWafers[1].destMod, readyReturnWafers[1].destSlot, Hand.Blade2)
  1038. };
  1039. _tmSchdActions.Enqueue(doublePlaceActions);
  1040. }
  1041. }
  1042. else if (_lstWaferTasks.Exists(wt => ModuleHelper.IsAligner(wt.currentMod)))
  1043. {
  1044. var alignerWafer = _lstWaferTasks.Where(wt => ModuleHelper.IsAligner(wt.currentMod)).First();
  1045. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(alignerWafer.currentMod, alignerWafer.currentSlot, ModuleName.TMRobot, (int)Hand.Blade1, Hand.Blade1) });
  1046. if (emptyAndReadyIn20sPMs.Contains(alignerWafer.destMod))
  1047. {
  1048. var pmTask = _dictModuleTask[alignerWafer.destMod] as VenusPMTask;
  1049. if(pmTask.ReadyMoveIn(alignerWafer))
  1050. {
  1051. // move aligner wafer to PM
  1052. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, (int)Hand.Blade1, alignerWafer.destMod, alignerWafer.destSlot, Hand.Blade1) });
  1053. }
  1054. }
  1055. }
  1056. else
  1057. {
  1058. if(emptyAndReadyIn20sPMs.Count >= 2 && waitInWafers.Count >= 2 && waitInWafers[0].currentMod == waitInWafers[1].currentMod)
  1059. {
  1060. var doublePickActions = new List<MoveItem>()
  1061. {
  1062. new MoveItem(waitInWafers[0].currentMod, waitInWafers[0].currentSlot, ModuleName.TMRobot, (int)Hand.Blade1, Hand.Blade1),
  1063. new MoveItem(waitInWafers[1].currentMod, waitInWafers[1].currentSlot, ModuleName.TMRobot, (int)Hand.Blade2, Hand.Blade2)
  1064. };
  1065. _tmSchdActions.Enqueue(doublePickActions);
  1066. if(aligner.Count > 0)
  1067. {
  1068. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, (int)Hand.Blade1, aligner.First().Key, 0, Hand.Blade1) });
  1069. }
  1070. }
  1071. else if(emptyAndReadyIn20sPMs.Count >= 1 && waitInWafers.Count >= 1)
  1072. {
  1073. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(waitInWafers[0].currentMod, waitInWafers[0].currentSlot, ModuleName.TMRobot, (int)Hand.Blade1, Hand.Blade1) });
  1074. if (aligner.Count > 0)
  1075. {
  1076. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, (int)Hand.Blade1, aligner.First().Key, 0, Hand.Blade1) });
  1077. }
  1078. }
  1079. }
  1080. }
  1081. else if(robotWafers.Count == 1)
  1082. {
  1083. var freeHand = robotWafers.First().currentSlot == 0 ? Hand.Blade2 : Hand.Blade1;
  1084. if (readyReturnWafers.Count >= 1)
  1085. {
  1086. // return one wafer
  1087. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(readyReturnWafers.First().currentMod, 0, ModuleName.TMRobot, (int)freeHand, freeHand) });
  1088. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, (int)freeHand, readyReturnWafers.First().destMod, readyReturnWafers.First().destSlot, freeHand) });
  1089. }
  1090. else
  1091. {
  1092. if (_lstWaferTasks.Exists(wt => ModuleHelper.IsAligner(wt.currentMod)))
  1093. {
  1094. var alignerWafer = _lstWaferTasks.Where(wt => ModuleHelper.IsAligner(wt.currentMod)).First();
  1095. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(alignerWafer.currentMod, alignerWafer.currentSlot, ModuleName.TMRobot, (int)freeHand, freeHand) });
  1096. if(!robotWafers.First().IsAligned)
  1097. {
  1098. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, robotWafers.First().currentSlot, aligner.First().Key, 0, (Hand)robotWafers.First().currentSlot) });
  1099. }
  1100. if (emptyAndReadyIn20sPMs.Contains(alignerWafer.destMod))
  1101. {
  1102. var pmTask = _dictModuleTask[alignerWafer.destMod] as VenusPMTask;
  1103. if (pmTask.ReadyMoveIn(alignerWafer))
  1104. {
  1105. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, (int)freeHand, alignerWafer.destMod, alignerWafer.destSlot, freeHand) });
  1106. }
  1107. }
  1108. }
  1109. else
  1110. {
  1111. if (ModuleHelper.IsPm(robotWafers.First().destMod))
  1112. {
  1113. if (!robotWafers.First().IsAligned)
  1114. {
  1115. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, robotWafers.First().currentSlot, aligner.First().Key, 0, (Hand)robotWafers.First().currentSlot) });
  1116. }
  1117. else if (emptyAndReadyIn20sPMs.Contains(robotWafers.First().destMod))
  1118. {
  1119. var pmTask = _dictModuleTask[robotWafers.First().destMod] as VenusPMTask;
  1120. if (pmTask.ReadyMoveIn(robotWafers.First()))
  1121. {
  1122. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, robotWafers.First().currentSlot, robotWafers.First().destMod, robotWafers.First().destSlot, (Hand)(robotWafers.First().currentSlot)) });
  1123. }
  1124. }
  1125. }
  1126. else if (ModuleHelper.IsLoadPort(robotWafers.First().destMod) && _dictModuleTask[robotWafers.First().destMod].Scheduler.IsAvailable)
  1127. {
  1128. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, robotWafers.First().currentSlot, robotWafers.First().destMod, robotWafers.First().destSlot, (Hand)(robotWafers.First().currentSlot)) });
  1129. }
  1130. }
  1131. }
  1132. }
  1133. else // had better not go here
  1134. {
  1135. foreach(var wafer in robotWafers)
  1136. {
  1137. if (ModuleHelper.IsPm(wafer.destMod))
  1138. {
  1139. if (!wafer.IsAligned)
  1140. {
  1141. if (!_lstWaferTasks.Exists(wt => ModuleHelper.IsAligner(wt.currentMod)))
  1142. {
  1143. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, wafer.currentSlot, aligner.First().Key, 0, (Hand)wafer.currentSlot) });
  1144. }
  1145. }
  1146. else if (emptyAndReadyIn20sPMs.Contains(wafer.destMod))
  1147. {
  1148. var pmTask = _dictModuleTask[wafer.destMod] as VenusPMTask;
  1149. if (pmTask.ReadyMoveIn(wafer))
  1150. {
  1151. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, wafer.currentSlot, wafer.destMod, wafer.destSlot, (Hand)(wafer.currentSlot)) });
  1152. }
  1153. }
  1154. }
  1155. else if (ModuleHelper.IsLoadPort(wafer.destMod) && _dictModuleTask[wafer.destMod].Scheduler.IsAvailable)
  1156. {
  1157. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, wafer.currentSlot, wafer.destMod, wafer.destSlot, (Hand)(wafer.currentSlot)) });
  1158. }
  1159. }
  1160. }
  1161. }
  1162. private void RoutingWaferWithSingleArm()
  1163. {
  1164. var waitInWafers = _lstWaferTasks.Where(wt => ModuleHelper.IsLoadPort(wt.currentMod) && ModuleHelper.IsPm(wt.destMod)).OrderBy(wt => wt.currentSlot).ToList();
  1165. var readyReturnWafers = _lstWaferTasks.Where(wt => ModuleHelper.IsPm(wt.currentMod) && ModuleHelper.IsLoadPort(wt.destMod)).ToList();
  1166. var emptyAndReadyIn20sPMs = _dictModuleTask.Where(pm => ModuleHelper.IsPm(pm.Key) && !_lstWaferTasks.Exists(wt => wt.currentMod == pm.Key) && pm.Value.TimeToReady < 20).OrderBy(pm => pm.Value.TimeToReady).Select(pm => pm.Key).ToList();
  1167. var aligner = _dictModuleTask.Where(mod => ModuleHelper.IsAligner(mod.Key)).ToList();
  1168. var validHand = _tmRobotSingleArmOption == 1 ? Hand.Blade1 : Hand.Blade2;
  1169. var robotWafers = _lstWaferTasks.Where(wt => wt.currentMod == ModuleName.TMRobot && wt.currentSlot == (int)validHand).ToList();
  1170. if (robotWafers.Count == 0)
  1171. {
  1172. if (readyReturnWafers.Count > 0)
  1173. {
  1174. // return one wafer
  1175. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(readyReturnWafers.First().currentMod, 0, ModuleName.TMRobot, (int)validHand, validHand) });
  1176. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, (int)validHand, readyReturnWafers.First().destMod, readyReturnWafers.First().destSlot, validHand) });
  1177. }
  1178. else
  1179. {
  1180. if(_lstWaferTasks.Exists(wt => ModuleHelper.IsAligner(wt.currentMod)))
  1181. {
  1182. var alignerWafer = _lstWaferTasks.Find(wt => ModuleHelper.IsAligner(wt.currentMod));
  1183. if(emptyAndReadyIn20sPMs.Contains(alignerWafer.destMod))
  1184. {
  1185. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(alignerWafer.currentMod, 0, ModuleName.TMRobot, (int)validHand, validHand) });
  1186. // move aligner wafer to PM
  1187. var pmTask = _dictModuleTask[alignerWafer.destMod] as VenusPMTask;
  1188. if (pmTask.ReadyMoveIn(alignerWafer))
  1189. {
  1190. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, (int)validHand, alignerWafer.destMod, alignerWafer.destSlot, validHand) });
  1191. }
  1192. }
  1193. }
  1194. else
  1195. {
  1196. foreach(var wafer in waitInWafers)
  1197. {
  1198. if(emptyAndReadyIn20sPMs.Contains(wafer.destMod))
  1199. {
  1200. // move one wafer from LP to aligner
  1201. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(wafer.currentMod, wafer.currentSlot, ModuleName.TMRobot, (int)validHand, validHand) });
  1202. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, (int)validHand, aligner.First().Key, 0, validHand) });
  1203. }
  1204. }
  1205. }
  1206. }
  1207. }
  1208. else
  1209. {
  1210. var wafer = robotWafers[0];
  1211. if (ModuleHelper.IsPm(wafer.destMod))
  1212. {
  1213. if (!wafer.IsAligned)
  1214. {
  1215. if (!_lstWaferTasks.Exists(wt => ModuleHelper.IsAligner(wt.currentMod)))
  1216. {
  1217. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, wafer.currentSlot, aligner.First().Key, 0, (Hand)wafer.currentSlot) });
  1218. }
  1219. }
  1220. else if (emptyAndReadyIn20sPMs.Contains(wafer.destMod))
  1221. {
  1222. var pmTask = _dictModuleTask[wafer.destMod] as VenusPMTask;
  1223. if (pmTask.ReadyMoveIn(wafer))
  1224. {
  1225. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, wafer.currentSlot, wafer.destMod, wafer.destSlot, (Hand)(wafer.currentSlot)) });
  1226. }
  1227. }
  1228. }
  1229. else if (ModuleHelper.IsLoadPort(wafer.destMod) && _dictModuleTask[wafer.destMod].Scheduler.IsAvailable)
  1230. {
  1231. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, wafer.currentSlot, wafer.destMod, wafer.destSlot, (Hand)(wafer.currentSlot)) });
  1232. }
  1233. }
  1234. }
  1235. private void RunSchdTMActions()
  1236. {
  1237. if (_dictModuleTask[ModuleName.TMRobot].IsIdle)
  1238. {
  1239. if (_tmSchdActions.Count > 0)
  1240. {
  1241. if (_curTmAction.Count == 0 || IsMovingActionsDone(_curTmAction))
  1242. {
  1243. var nextActions = _tmSchdActions.First();
  1244. if (nextActions.Exists(action => !_lstWaferTasks.Exists(wafer => (wafer.movingStatus == RState.End || wafer.movingStatus == RState.Init) && wafer.currentMod == action.SourceModule && wafer.currentSlot == action.SourceSlot)))
  1245. return;
  1246. if (ModuleHelper.IsPm(nextActions.First().Module) && !_dictModuleTask[nextActions.First().Module].IsIdle) /// wait PMTask status update to idle
  1247. return;
  1248. _curTmAction = _tmSchdActions.Dequeue();
  1249. foreach (var action in _curTmAction)
  1250. {
  1251. var waferTask = _lstWaferTasks.Find(wafer => (wafer.movingStatus == RState.End || wafer.movingStatus == RState.Init) && wafer.currentMod == action.SourceModule && wafer.currentSlot == action.SourceSlot);
  1252. waferTask.MoveTo(action.DestinationModule, action.DestinationSlot);
  1253. }
  1254. (_dictModuleTask[ModuleName.TMRobot].Scheduler as SchedulerSETMRobot).SendMoveItems(_curTmAction.ToArray());
  1255. }
  1256. }
  1257. else if (_curTmAction.Count >= 0 && IsMovingActionsDone(_curTmAction)) // all scheduled actions done
  1258. {
  1259. _curTmAction.Clear();
  1260. }
  1261. }
  1262. }
  1263. private bool isReturnActionsDone(List<MoveItem> items)
  1264. {
  1265. foreach (var item in items)
  1266. {
  1267. if (WaferManager.Instance.CheckHasWafer(item.SourceModule, item.SourceSlot) || WaferManager.Instance.CheckNoWafer(item.DestinationModule, item.DestinationSlot))
  1268. return false;
  1269. }
  1270. return true;
  1271. }
  1272. private bool IsMovingActionsDone(List<MoveItem> actions)
  1273. {
  1274. bool CheckWaferExistence(ModuleName mod, int slot)
  1275. {
  1276. return ModuleHelper.IsLoadPort(mod) ? WaferManager.Instance.CheckHasWafer(mod, slot) : _lstWaferTasks.Exists(wt => wt.currentMod == mod && wt.currentSlot == slot);
  1277. }
  1278. if (actions.Count == 1)
  1279. {
  1280. if (CheckWaferExistence(actions.First().SourceModule, actions.First().SourceSlot) ||
  1281. !CheckWaferExistence(actions.First().DestinationModule, actions.First().DestinationSlot))
  1282. return false;
  1283. }
  1284. else
  1285. {
  1286. // initialize all the wafer existance before move
  1287. var slotWafers = new Dictionary<KeyValuePair<ModuleName, int>, bool>();
  1288. foreach (var ac in actions)
  1289. {
  1290. var scrSlot = new KeyValuePair<ModuleName, int>(ac.SourceModule, ac.SourceSlot);
  1291. var destSlot = new KeyValuePair<ModuleName, int>(ac.DestinationModule, ac.DestinationSlot);
  1292. if (!slotWafers.ContainsKey(scrSlot))
  1293. {
  1294. slotWafers[scrSlot] = true;
  1295. }
  1296. if (!slotWafers.ContainsKey(destSlot))
  1297. {
  1298. slotWafers[destSlot] = false;
  1299. }
  1300. }
  1301. // simulate moved result
  1302. foreach (var ac in actions)
  1303. {
  1304. var scrSlot = new KeyValuePair<ModuleName, int>(ac.SourceModule, ac.SourceSlot);
  1305. var destSlot = new KeyValuePair<ModuleName, int>(ac.DestinationModule, ac.DestinationSlot);
  1306. if (!slotWafers[scrSlot])
  1307. {
  1308. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"{slotWafers[scrSlot]} do not has a wafer");
  1309. }
  1310. else
  1311. {
  1312. slotWafers[scrSlot] = false;
  1313. }
  1314. if (slotWafers[destSlot])
  1315. {
  1316. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"{slotWafers[destSlot]} has a wafer");
  1317. }
  1318. else
  1319. {
  1320. slotWafers[destSlot] = true;
  1321. }
  1322. }
  1323. foreach (var slot in slotWafers)
  1324. {
  1325. if (slot.Value != CheckWaferExistence(slot.Key.Key, slot.Key.Value))
  1326. return false;
  1327. }
  1328. }
  1329. return true;
  1330. }
  1331. private void WaferArrived(WaferTask wafer, MoveItem item)
  1332. {
  1333. _dictModuleTask[item.DestinationModule].WaferArrived(wafer, item.DestinationSlot);
  1334. //--2024-03-21 增加了PortJobWaferEnd 上报事件 start--
  1335. if (ModuleHelper.IsLoadPort(item.DestinationModule))
  1336. {
  1337. ControlJobInfo currentControlJob = GetLoadPortCurrentControlJob(item.DestinationModule);
  1338. if (currentControlJob != null)
  1339. {
  1340. _faCallback.JobWaferEnd(currentControlJob, item.SourceSlot);
  1341. }
  1342. }
  1343. //--2024-03-21 增加了PortJobWaferEnd 上报事件 end--
  1344. }
  1345. private void WaferLeaved(WaferTask wafer, MoveItem item)
  1346. {
  1347. _dictModuleTask[item.SourceModule].WaferLeaved(wafer, item.DestinationSlot);
  1348. //--2024-03-21 增加了PortJobWaferStart 上报事件 start--
  1349. if (ModuleHelper.IsLoadPort(item.SourceModule))
  1350. {
  1351. (_dictModuleTask[wafer.destMod] as VenusPMTask).SubscribeWaferTask(wafer);
  1352. ControlJobInfo currentControlJob = GetLoadPortCurrentControlJob(item.SourceModule);
  1353. if (currentControlJob != null)
  1354. {
  1355. _faCallback.JobWaferStart(currentControlJob, item.SourceSlot);
  1356. }
  1357. }
  1358. //--2024-03-21 增加了PortJobWaferStart 上报事件 end--
  1359. }
  1360. private bool CheckAllWaferReturned(ProcessJobInfo pj, bool checkAllProcessed)
  1361. {
  1362. bool allWaferReturn = true;
  1363. foreach (var slot in pj.SlotWafers)
  1364. {
  1365. var wafer = WaferManager.Instance.GetWafer(slot.Item1, slot.Item2);
  1366. if (wafer.IsEmpty || (wafer.ProcessState != EnumWaferProcessStatus.Completed && checkAllProcessed))
  1367. {
  1368. allWaferReturn = false;
  1369. break;
  1370. }
  1371. }
  1372. return allWaferReturn;
  1373. }
  1374. private void ReturnInternalWafers()
  1375. {
  1376. if (_tmSchdActions.Count > 0 || _curTmAction.Count > 0)
  1377. {
  1378. RunSchdTMReturnActions();
  1379. return;
  1380. }
  1381. if (_tmRobotStatus != RState.End)
  1382. return;
  1383. for (int i = 0; i < 2; i++)
  1384. {
  1385. if(WaferManager.Instance.CheckHasWafer(ModuleName.TMRobot, i))
  1386. {
  1387. var wafer = WaferManager.Instance.GetWafer(ModuleName.TMRobot, i);
  1388. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, i, (ModuleName)wafer.OriginStation, wafer.OriginSlot, (Hand)i) });
  1389. return;
  1390. }
  1391. }
  1392. foreach(var mod in _dictModuleTask)
  1393. {
  1394. if (ModuleHelper.IsTMRobot(mod.Key) || ModuleHelper.IsLoadPort(mod.Key))
  1395. continue;
  1396. if(WaferManager.Instance.CheckHasWafer(mod.Key, 0))
  1397. {
  1398. var wafer = WaferManager.Instance.GetWafer(mod.Key, 0);
  1399. var freeHands = GetTMFreeHand();
  1400. if(freeHands.Count > 0)
  1401. {
  1402. var hand = freeHands[0];
  1403. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(mod.Key, 0, ModuleName.TMRobot, (int)hand, hand) });
  1404. _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, (int)hand, (ModuleName)wafer.OriginStation, wafer.OriginSlot, hand) });
  1405. return;
  1406. }
  1407. }
  1408. }
  1409. }
  1410. private List<Hand> GetTMFreeHand()
  1411. {
  1412. var lstHands = new List<Hand>();
  1413. if (WaferManager.Instance.CheckNoWafer(ModuleName.TMRobot, 0) && _tmRobotSingleArmOption != 2)
  1414. lstHands.Add(Hand.Blade1);
  1415. if (WaferManager.Instance.CheckNoWafer(ModuleName.TMRobot, 1) && _tmRobotSingleArmOption != 1)
  1416. lstHands.Add(Hand.Blade2);
  1417. return lstHands;
  1418. }
  1419. private void UpdateProcessJobStatus()
  1420. {
  1421. if (_tmRobotStatus == RState.Running)
  1422. return;
  1423. foreach (var pj in _lstProcessJobs)
  1424. {
  1425. if (CheckAllWaferReturned(pj, pj.State != EnumProcessJobState.Stopping))
  1426. {
  1427. pj.SetState(EnumProcessJobState.ProcessingComplete);
  1428. JobDataRecorder.EndPJ(pj.InnerId.ToString(), 0, 0);
  1429. }
  1430. }
  1431. }
  1432. private void UpdateControlJobStatus()
  1433. {
  1434. if (_lstControlJobs.Count == 0 || _tmRobotStatus == RState.Running)
  1435. return;
  1436. var runningJobs = _lstControlJobs.FindAll(cj => cj.State == EnumControlJobState.Executing);
  1437. var queueJobs = _lstControlJobs.FindAll(cj => cj.State == EnumControlJobState.Queued).OrderBy(cj => cj.StartTime);
  1438. if (runningJobs.Count == 0)
  1439. {
  1440. if (queueJobs.Count() > 0)
  1441. {
  1442. // start the first waiting job
  1443. RunControlJob(queueJobs.First());
  1444. }
  1445. }
  1446. else
  1447. {
  1448. foreach (var runningjob in runningJobs)
  1449. {
  1450. // update the running job
  1451. RunControlJob(runningjob);
  1452. }
  1453. foreach (var queueJob in queueJobs)
  1454. {
  1455. if (!runningJobs.Exists(cj => IsControlJobIntersect(cj, queueJob)))
  1456. {
  1457. // parallelly start the not intersect job
  1458. RunControlJob(queueJob);
  1459. }
  1460. }
  1461. }
  1462. // update system cycle status
  1463. if (_lstControlJobs.All(cj => cj.State == EnumControlJobState.Completed))
  1464. _cycleState = RState.End;
  1465. List<ControlJobInfo> cjRemoveList = new List<ControlJobInfo>();
  1466. foreach (var cj in _lstControlJobs)
  1467. {
  1468. LoadportCassetteState state = (LoadportCassetteState)DATA.Poll($"{cj.Module}.CassetteState");
  1469. if (cj.State == EnumControlJobState.Completed && state != LoadportCassetteState.Normal)
  1470. {
  1471. cjRemoveList.Add(cj);
  1472. }
  1473. }
  1474. foreach (var cj in cjRemoveList)
  1475. {
  1476. List<ProcessJobInfo> pjRemoveList = new List<ProcessJobInfo>();
  1477. foreach (var pj in _lstProcessJobs)
  1478. {
  1479. if (pj.ControlJobName == cj.Name)
  1480. pjRemoveList.Add(pj);
  1481. }
  1482. foreach (var pj in pjRemoveList)
  1483. {
  1484. _lstProcessJobs.Remove(pj);
  1485. }
  1486. _lstControlJobs.Remove(cj);
  1487. }
  1488. }
  1489. private bool RunControlJob(ControlJobInfo cj)
  1490. {
  1491. switch (cj.JetState)
  1492. {
  1493. case EnumJetCtrlJobState.Quequed:
  1494. {
  1495. if (IsCtrlJobNeedPreClean(cj))
  1496. {
  1497. cj.JetState = EnumJetCtrlJobState.PreJobClean;
  1498. var PMs = GetWaitPreCleanPMsByCtrlJob(cj);
  1499. foreach (var pm in PMs)
  1500. {
  1501. var pmTask = _dictModuleTask[pm] as VenusPMTask;
  1502. if (pmTask != null && pmTask.Scheduler.IsOnline)
  1503. {
  1504. pmTask.SubscribeLotCleanTask(cj, VenusPMTask.RecipeJobType.PreClean);
  1505. }
  1506. }
  1507. }
  1508. else
  1509. {
  1510. ActiveControlJob(cj);
  1511. }
  1512. cj.SetState(EnumControlJobState.Executing);
  1513. }
  1514. break;
  1515. case EnumJetCtrlJobState.PreJobClean:
  1516. {
  1517. if (IsPreJobCleanDone(cj))
  1518. {
  1519. ActiveControlJob(cj);
  1520. }
  1521. }
  1522. break;
  1523. case EnumJetCtrlJobState.Processing:
  1524. {
  1525. if (IsCtrlJobNeedPostClean(cj))
  1526. {
  1527. if (IsAllJobWaferProcessedOrProcessing(cj))
  1528. {
  1529. cj.JetState = EnumJetCtrlJobState.PostJobClean;
  1530. var PMs = GetWaitPreCleanPMsByCtrlJob(cj);
  1531. foreach (var pm in PMs)
  1532. {
  1533. var pmTask = _dictModuleTask[pm] as VenusPMTask;
  1534. if (pmTask != null && pmTask.Scheduler.IsOnline)
  1535. {
  1536. pmTask.SubscribeLotCleanTask(cj, VenusPMTask.RecipeJobType.PostClean);
  1537. }
  1538. }
  1539. }
  1540. }
  1541. else
  1542. {
  1543. if (IsAllProcessJobComplete(cj))
  1544. {
  1545. cj.JetState = EnumJetCtrlJobState.Completed;
  1546. }
  1547. }
  1548. }
  1549. break;
  1550. case EnumJetCtrlJobState.PostJobClean:
  1551. {
  1552. if (IsPostJobCleanDone(cj))
  1553. {
  1554. cj.JetState = EnumJetCtrlJobState.Completed;
  1555. }
  1556. }
  1557. break;
  1558. }
  1559. // caculate processed wafer by control job
  1560. var lp = ModuleHelper.Converter(cj.Module);
  1561. int countProcessed = 0;
  1562. foreach (var pjName in cj.ProcessJobNameList)
  1563. {
  1564. var pj = _lstProcessJobs.Find(x => x.Name == pjName);
  1565. if (pj == null)
  1566. {
  1567. LOG.Write(eEvent.ERR_ROUTER, ModuleName.System, $"Not find pj named {pjName} in {cj.Name}");
  1568. continue;
  1569. }
  1570. // caculate process wafer by process
  1571. if (_lpCycleCount[lp] < cj.CycleNumber)
  1572. {
  1573. foreach (var pjSlotWafer in pj.SlotWafers)
  1574. {
  1575. WaferInfo wafer = WaferManager.Instance.GetWafer(pjSlotWafer.Item1, pjSlotWafer.Item2);
  1576. if (!wafer.IsEmpty && wafer.ProcessState == EnumWaferProcessStatus.Completed)
  1577. countProcessed++;
  1578. }
  1579. }
  1580. }
  1581. int lpCycleWafer = 0;
  1582. if (cj.JetState == EnumJetCtrlJobState.Completed)
  1583. {
  1584. cj.EndTime = DateTime.Now;
  1585. _faCallback.JobFinished(cj, GetFirstProcessJob(cj));
  1586. _dbCallback.LotFinished(cj);
  1587. if (_lpCycleCount[lp] >= cj.CycleNumber)
  1588. (Singleton<TransferModule>.Instance.GetScheduler(lp) as SchedulerLoadPort).NoteJobComplete();
  1589. _lpCycleCount[lp]++;
  1590. lpCycleWafer = _lpCycleCount[lp] * cj.LotWafers.Count;
  1591. _lpThroughput[lp] = (float)(lpCycleWafer / (DateTime.Now - cj.StartTime).TotalHours);
  1592. LOG.Write(eEvent.EV_ROUTER, lp, $"Cycle Count: {_lpCycleCount[lp]}, Total Processed Wafer: {lpCycleWafer}, Throughput: {_lpThroughput[lp]}");
  1593. if (_lpCycleCount[lp] < cj.CycleNumber)
  1594. {
  1595. cj.SetState(EnumControlJobState.Executing);
  1596. cj.JetState = EnumJetCtrlJobState.Quequed;
  1597. cj.LotInnerId = Guid.NewGuid();
  1598. _dbCallback.LotCreated(cj);
  1599. foreach (var pj in _lstProcessJobs)
  1600. {
  1601. if (pj.ControlJobName == cj.Name)
  1602. {
  1603. pj.SetState(EnumProcessJobState.Queued);
  1604. pj.InnerId = Guid.NewGuid();
  1605. foreach (var pjSlotWafer in pj.SlotWafers)
  1606. {
  1607. WaferInfo wafer = WaferManager.Instance.GetWafer(pjSlotWafer.Item1, pjSlotWafer.Item2);
  1608. wafer.ProcessJob = null;
  1609. wafer.NextSequenceStep = 0;
  1610. wafer.ProcessState = EnumWaferProcessStatus.Idle;
  1611. }
  1612. }
  1613. }
  1614. _lstWaferTasks.RemoveAll(wt => wt.currentMod == lp);
  1615. }
  1616. else
  1617. {
  1618. cj.SetState(EnumControlJobState.Completed);
  1619. }
  1620. }
  1621. else
  1622. {
  1623. lpCycleWafer = _lpCycleCount[lp] * cj.LotWafers.Count + countProcessed;
  1624. }
  1625. if (lpCycleWafer != _lpCycleWafer[lp])
  1626. {
  1627. _lpCycleWafer[lp] = lpCycleWafer;
  1628. if (_lpCycleCount[lp] > 0)
  1629. {
  1630. _lpThroughput[lp] = (float)(lpCycleWafer / (DateTime.Now - cj.StartTime).TotalHours);
  1631. }
  1632. }
  1633. return cj.State == EnumControlJobState.Completed;
  1634. }
  1635. private bool IsControlJobIntersect(ControlJobInfo cj1, ControlJobInfo cj2)
  1636. {
  1637. var cj1Pms = GetWaitPreCleanPMsByCtrlJob(cj1);
  1638. var cj2Pms = GetWaitPreCleanPMsByCtrlJob(cj2);
  1639. return cj1Pms.Intersect(cj2Pms).Count() > 0;
  1640. }
  1641. private bool IsCtrlJobNeedPreClean(ControlJobInfo cj)
  1642. {
  1643. return !string.IsNullOrWhiteSpace(cj.PreJobClean);
  1644. }
  1645. private bool IsCtrlJobNeedPostClean(ControlJobInfo cj)
  1646. {
  1647. return !string.IsNullOrWhiteSpace(cj.PostJobClean.Trim());
  1648. }
  1649. private bool IsPreJobCleanDone(ControlJobInfo cj)
  1650. {
  1651. var pms = GetWaitPreCleanPMsByCtrlJob(cj);
  1652. foreach (var pm in pms)
  1653. {
  1654. var pmTask = _dictModuleTask[pm] as VenusPMTask;
  1655. if (pmTask.Scheduler.IsOnline && !pmTask.IsRecipeJobDone(VenusPMTask.RecipeJobType.PreClean))
  1656. return false;
  1657. }
  1658. return true;
  1659. }
  1660. private bool IsPostJobCleanDone(ControlJobInfo cj)
  1661. {
  1662. var pms = GetWaitPreCleanPMsByCtrlJob(cj);
  1663. foreach (var pm in pms)
  1664. {
  1665. var pmTask = _dictModuleTask[pm] as VenusPMTask;
  1666. if (pmTask.Scheduler.IsOnline && !pmTask.IsRecipeJobDone(VenusPMTask.RecipeJobType.PostClean))
  1667. return false;
  1668. }
  1669. return true;
  1670. }
  1671. private bool ActiveProcessJob(ProcessJobInfo pj)
  1672. {
  1673. foreach (var pjSlotWafer in pj.SlotWafers)
  1674. {
  1675. WaferInfo wafer = WaferManager.Instance.GetWafer(pjSlotWafer.Item1, pjSlotWafer.Item2);
  1676. wafer.ProcessJob = pj;
  1677. wafer.NextSequenceStep = 0;
  1678. WaferDataRecorder.SetPjInfo(wafer.InnerId.ToString(), pj.InnerId.ToString());
  1679. }
  1680. ControlJobInfo cj = _lstControlJobs.Find(x => x.Name == pj.ControlJobName);
  1681. CarrierInfo carrier = CarrierManager.Instance.GetCarrier(cj.Module);
  1682. JobDataRecorder.StartPJ(pj.InnerId.ToString(), carrier.InnerId.ToString(), cj.InnerId.ToString(), pj.Name, cj.Module, cj.Module, pj.SlotWafers.Count);
  1683. pj.SetState(EnumProcessJobState.Processing);
  1684. return true;
  1685. }
  1686. private bool ActiveControlJob(ControlJobInfo cj)
  1687. {
  1688. cj.JetState = EnumJetCtrlJobState.Processing;
  1689. foreach (var pjName in cj.ProcessJobNameList)
  1690. {
  1691. var pj = _lstProcessJobs.Find(x => x.Name == pjName);
  1692. if (pj == null)
  1693. {
  1694. LOG.Write(eEvent.ERR_ROUTER, ModuleName.System, $"Not find pj named {pjName} in {cj.Name}");
  1695. continue;
  1696. }
  1697. if (pj.State == EnumProcessJobState.Queued)
  1698. {
  1699. ActiveProcessJob(pj);
  1700. }
  1701. }
  1702. return true;
  1703. }
  1704. private bool IsAllProcessJobComplete(ControlJobInfo cj)
  1705. {
  1706. foreach (var pj in _lstProcessJobs)
  1707. {
  1708. if (pj.ControlJobName == cj.Name && pj.State != EnumProcessJobState.ProcessingComplete)
  1709. {
  1710. return false;
  1711. }
  1712. }
  1713. return true;
  1714. }
  1715. private bool IsAllJobWaferProcessedOrProcessing(ControlJobInfo cj)
  1716. {
  1717. List<ModuleName> allModules = _dictModuleTask.Keys.ToList();
  1718. int original = (int)ModuleHelper.Converter(cj.Module);
  1719. foreach (var mod in allModules)
  1720. {
  1721. if (ModuleHelper.IsLoadPort(mod) && (int)mod != original)
  1722. continue;
  1723. var wafers = WaferManager.Instance.GetWafers(mod);
  1724. foreach (var wafer in wafers)
  1725. {
  1726. if (wafer.IsEmpty || wafer.ProcessJob == null || wafer.ProcessJob.Sequence == null || wafer.ProcessJob.ControlJobName != cj.Name)
  1727. continue;
  1728. if (wafer.ProcessState != EnumWaferProcessStatus.Completed && wafer.ProcessState != EnumWaferProcessStatus.InProcess)
  1729. return false; ;
  1730. }
  1731. }
  1732. return true;
  1733. }
  1734. private ModuleName GetComingAvailablePM(ControlJobInfo cj)
  1735. {
  1736. var lstInProcessPMs = new List<ModuleName>();
  1737. foreach (var wafer in cj.LotWafers)
  1738. {
  1739. if (!wafer.IsEmpty && wafer.NextSequenceStep == 0 && wafer.ProcessJob != null)
  1740. {
  1741. foreach (var pm in wafer.ProcessJob.Sequence.PMs)
  1742. {
  1743. if (!lstInProcessPMs.Contains(pm) && _dictModuleTask[pm].Scheduler.IsOnline)
  1744. lstInProcessPMs.Add(pm);
  1745. }
  1746. }
  1747. }
  1748. Dictionary<ModuleName, int> pmAssociatedWaferCount = new Dictionary<ModuleName, int>();
  1749. foreach (var mod in _dictModuleTask)
  1750. {
  1751. if (ModuleHelper.IsPm(mod.Key) && mod.Value.Scheduler.IsOnline && lstInProcessPMs.Contains(mod.Key))
  1752. {
  1753. pmAssociatedWaferCount[mod.Key] = 0;
  1754. }
  1755. }
  1756. var unprocessedWafer = _lstWaferTasks.Where(task => ModuleHelper.IsPm(task.destMod));
  1757. foreach (var wafer in unprocessedWafer)
  1758. {
  1759. if (ModuleHelper.IsPm(wafer.destMod) && _dictModuleTask[wafer.destMod].Scheduler.IsOnline && lstInProcessPMs.Contains(wafer.destMod))
  1760. {
  1761. pmAssociatedWaferCount[wafer.destMod]++;
  1762. }
  1763. }
  1764. var oderedPMCount = pmAssociatedWaferCount.OrderBy(p => p.Value).ToDictionary(p => p.Key, o => o.Value);
  1765. if (oderedPMCount.Count > 0 && oderedPMCount.First().Value < 2)
  1766. return oderedPMCount.First().Key;
  1767. return ModuleName.System;
  1768. }
  1769. private void CreateNewWaferTask()
  1770. {
  1771. var runningJobs = _lstControlJobs.FindAll(cj => cj.JetState == EnumJetCtrlJobState.PreJobClean || cj.JetState == EnumJetCtrlJobState.Processing);
  1772. var onDutyPms = new Dictionary<ModuleName, int>();
  1773. foreach (var job in runningJobs)
  1774. {
  1775. var pms = GetWaitPreCleanPMsByCtrlJob(job);
  1776. foreach (var pm in pms)
  1777. {
  1778. if (_dictModuleTask[pm].Scheduler.IsOnline && !onDutyPms.ContainsKey(pm))
  1779. {
  1780. onDutyPms[pm] = _lstWaferTasks.Where(wt => wt.destMod == pm).Count();
  1781. }
  1782. }
  1783. }
  1784. if (runningJobs.Count == 0 || onDutyPms.Count == 0)
  1785. return;
  1786. var oderedPMs = onDutyPms.OrderBy(kv => kv.Value).OrderBy(kv => _dictModuleTask[kv.Key].TimeToReady);
  1787. if (oderedPMs.First().Value < 1)
  1788. {
  1789. foreach (var runningJob in runningJobs)
  1790. {
  1791. foreach (var wafer in runningJob.LotWafers)
  1792. {
  1793. if (wafer.IsEmpty || wafer.ProcessJob == null)
  1794. continue;
  1795. if (wafer.ProcessJob.Sequence.PMs.Contains(oderedPMs.First().Key) && wafer.NextSequenceStep == 0 && !_lstWaferTasks.Exists(task => task.sourceMod == (ModuleName)wafer.OriginStation && task.sourceSlot == wafer.OriginSlot))
  1796. {
  1797. CreateWaferTasks(wafer, oderedPMs.First().Key);
  1798. return;
  1799. }
  1800. }
  1801. }
  1802. }
  1803. }
  1804. private void CreateWaferTasks(WaferInfo wafer, ModuleName pm)
  1805. {
  1806. var recipeName = wafer.ProcessJob.Sequence.GetRecipe(pm);
  1807. var recipeContent = RecipeFileManager.Instance.LoadRecipe(pm.ToString(), recipeName, false, RecipeType.Process.ToString());
  1808. Recipe recipe = Recipe.Load(recipeContent);
  1809. int temperature = 0;
  1810. if (int.TryParse(recipe.Header.Temperature, out int temp))
  1811. {
  1812. temperature = temp;
  1813. }
  1814. var waferTask = new WaferTask((ModuleName)wafer.OriginStation,
  1815. wafer.OriginSlot,
  1816. pm,
  1817. 0,
  1818. temperature,
  1819. wafer.InnerId,
  1820. wafer.ProcessJob.Sequence.InnerId,
  1821. recipeName,
  1822. wafer.ProcessJob.Sequence.WTWCleanRecipe,
  1823. wafer.ProcessJob.Sequence.LLInOutPath,
  1824. wafer.ProcessJob.Sequence.LLDelayTime,
  1825. IsSequenceNeedAlign(wafer.ProcessJob.Sequence)); // post clean
  1826. waferTask.OnWaferArrived += WaferArrived;
  1827. waferTask.OnWaferLeaved += WaferLeaved;
  1828. _lstWaferTasks.Add(waferTask);
  1829. }
  1830. private bool IsSequenceNeedAlign(SequenceInfo sequence)
  1831. {
  1832. // check wether need align
  1833. foreach (var step in sequence.Steps)
  1834. {
  1835. foreach (var mod in step.StepModules)
  1836. {
  1837. if (ModuleHelper.IsAligner(mod))
  1838. return true;
  1839. }
  1840. }
  1841. return false;
  1842. }
  1843. private void RunSchdTMReturnActions()
  1844. {
  1845. var tmRobot = Singleton<TransferModule>.Instance.GetScheduler(ModuleName.TMRobot) as SchedulerSETMRobot;
  1846. if (tmRobot == null || !tmRobot.IsAvailable)
  1847. return;
  1848. if (_tmSchdActions.Count > 0)
  1849. {
  1850. if (_curTmAction.Count == 0 || isReturnActionsDone(_curTmAction))
  1851. {
  1852. var nextActions = _tmSchdActions.First();
  1853. var nextModule = nextActions.First().Module;
  1854. if (!_dictModuleTask[nextModule].IsIdle)
  1855. return;
  1856. _curTmAction = _tmSchdActions.Dequeue();
  1857. tmRobot.SendMoveItems(_curTmAction.ToArray());
  1858. }
  1859. }
  1860. else if (_curTmAction.Count >= 0 && isReturnActionsDone(_curTmAction)) // all scheduled actions done
  1861. {
  1862. _curTmAction.Clear();
  1863. }
  1864. }
  1865. #endregion internal implementation
  1866. #region sequence/recipe validation
  1867. private bool CheckSequencePmReady(SequenceInfo seq, out string reason)
  1868. {
  1869. reason = "";
  1870. foreach (var pm in seq.PMs)
  1871. {
  1872. if (ModuleHelper.IsInstalled(pm) && (_dictModuleTask[pm].Scheduler.IsOnline || !Singleton<RouteManager>.Instance.IsAutoMode))
  1873. return true;
  1874. }
  1875. reason = $"Sequence {seq.Name} no valid PM, " + string.Join("|", seq.PMs);
  1876. return false;
  1877. }
  1878. private bool CheckSequenceRecipeFileValid(SequenceInfo seq, out string reason)
  1879. {
  1880. for (int i = 0; i < seq.Steps.Count; i++)
  1881. {
  1882. SequenceStepInfo stepInfo = seq.Steps[i];
  1883. foreach (var module in stepInfo.StepModules)
  1884. {
  1885. if (ModuleHelper.IsPm(module))
  1886. {
  1887. string attr = $"{module}Recipe";
  1888. if (stepInfo.StepParameter.ContainsKey(attr)
  1889. && !string.IsNullOrWhiteSpace((string)stepInfo.StepParameter[attr]))
  1890. {
  1891. var recipeName = (string)stepInfo.StepParameter[attr];
  1892. if (!string.IsNullOrWhiteSpace(recipeName))
  1893. {
  1894. var recipeContent =
  1895. RecipeFileManager.Instance.LoadRecipe($"{module}", recipeName, false, "Process");
  1896. if (string.IsNullOrWhiteSpace(recipeContent))
  1897. {
  1898. reason = $"Can not find recipe file{recipeName}";
  1899. return false;
  1900. }
  1901. }
  1902. }
  1903. }
  1904. }
  1905. }
  1906. reason = "";
  1907. return true;
  1908. }
  1909. private List<ModuleName> GetWaitPreCleanPMsByCtrlJob(ControlJobInfo cj)
  1910. {
  1911. var pmlist = new List<ModuleName>();
  1912. foreach (var pj in _lstProcessJobs)
  1913. {
  1914. if (pj.ControlJobName == cj.Name)
  1915. {
  1916. foreach (var pm in pj.Sequence.PMs)
  1917. {
  1918. if (!pmlist.Contains(pm))
  1919. pmlist.Add(pm);
  1920. }
  1921. }
  1922. }
  1923. return pmlist;
  1924. }
  1925. #endregion
  1926. }
  1927. }