OverVenusViewModel.cs 62 KB

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  1. using Aitex.Core.Common.DeviceData;
  2. using MECF.Framework.Common.DataCenter;
  3. using MECF.Framework.Common.OperationCenter;
  4. using Prism.Commands;
  5. using Prism.Mvvm;
  6. using System;
  7. using System.Collections.Generic;
  8. using System.Windows;
  9. using System.Windows.Threading;
  10. using Venus_Core;
  11. using Venus_MainPages.Views;
  12. using System.Linq;
  13. using System.Threading.Tasks;
  14. using Microsoft.Win32;
  15. using System.IO;
  16. using Venus_Themes.CustomControls;
  17. using Venus_MainPages.Unity;
  18. using Venus_Unity;
  19. using MECF.Framework.Common.CommonData.DeviceData;
  20. using System.Windows.Shapes;
  21. using Path = System.IO.Path;
  22. namespace Venus_MainPages.ViewModels
  23. {
  24. internal class OverVenusViewModel : BindableBase
  25. {
  26. #region 私有字段
  27. private List<string> m_CurrentModuleRecipes=new List<string>();
  28. private bool m_PVN21ValveIsOpen;
  29. private bool m_PVN22ValveIsOpen;
  30. private bool m_N2ValveIsOpen;
  31. private bool m_PV11ValveIsOpen;
  32. private bool m_PV12ValveIsOpen;
  33. private bool m_PV21ValveIsOpen;
  34. private bool m_PV22ValveIsOpen;
  35. private bool m_PV31ValveIsOpen;
  36. private bool m_PV32ValveIsOpen;
  37. private bool m_PV41ValveIsOpen;
  38. private bool m_PV42ValveIsOpen;
  39. private bool m_MFC1ValveIsOpen;
  40. private bool m_MFC2ValveIsOpen;
  41. private bool m_MFC3ValveIsOpen;
  42. private bool m_MFC4ValveIsOpen;
  43. private bool m_MFC5ValveIsOpen;
  44. private bool m_MFC6ValveIsOpen;
  45. private bool m_MFC7ValveIsOpen;
  46. private bool m_MFC8ValveIsOpen;
  47. private bool m_GasFinalValveIsOpen;
  48. private bool m_SoftPumpValveIsOpen;
  49. private bool m_FastPumpValveIsOpen;
  50. private bool m_PVHe1ValveIsOpen;
  51. private bool m_PVHe2ValveIsOpen;
  52. private bool m_PVHe3ValveIsOpen;
  53. private bool m_HeISOValveIsOpen;
  54. private bool m_TurboPumpPumpingValveIsOpen;
  55. private bool m_TurboPumpPurgeValveIsOpen;
  56. private bool m_GuageValveIsOpen;
  57. private bool m_PendulumValveIsOpen;
  58. //private bool m_BRFIsOn;
  59. //private bool m_SRFIsOn;
  60. private double m_HeGasSetpoint;
  61. private int m_HePressureSetpoint;
  62. private float m_SRFFwdPowerSetpoint;
  63. private float m_BRFFwdPowerSetpoint;
  64. private float m_SRFMatchC1;
  65. private float m_SRFMatchC2;
  66. private float m_BRFMatchC1;
  67. private float m_BRFMatchC2;
  68. private double m_MFC1SetPoint;
  69. private double m_MFC2SetPoint;
  70. private double m_MFC3SetPoint;
  71. private double m_MFC4SetPoint;
  72. private double m_MFC5SetPoint;
  73. private double m_MFC6SetPoint;
  74. private double m_MFC7SetPoint;
  75. private double m_MFC8SetPoint;
  76. private double m_N2SetPoint;
  77. private AITMfcData m_MFC1Data;
  78. private AITMfcData m_MFC2Data;
  79. private AITMfcData m_MFC3Data;
  80. private AITMfcData m_MFC4Data;
  81. private AITMfcData m_MFC5Data;
  82. private AITMfcData m_MFC6Data;
  83. private AITMfcData m_MFC7Data;
  84. private AITMfcData m_MFC8Data;
  85. private AITMfcData m_MFCHeData;
  86. private AITMfcData m_MFCN2Data;
  87. private AITHeaterData m_ValveHeaterData;
  88. private AITHeaterData m_ForelineHeaterData;
  89. private AITHeaterData m_WallHeaterData;
  90. private AITRfData m_SRFData;
  91. private AITRfData m_BRFData;
  92. private AITPendulumValveData m_PendulumValveData;
  93. private AITHVData m_ESCHVData;
  94. private PMState m_PMCurrentState;
  95. private bool m_SourceRFFanInterlock;
  96. private bool m_IsWLK;
  97. private bool m_IsWaterFlowOk;
  98. private bool m_IsTurboPumpInterlock;
  99. private bool m_IsCDAOK;
  100. private bool m_SensorGasBoxDoor;
  101. private bool m_SensorGasBoxPressure;
  102. private bool m_PumpIsOpen;
  103. private bool m_TurboIsOpen;
  104. private bool m_IsATM;
  105. private bool m_IsVAC;
  106. private List<string> m_RtDataKeys;
  107. private Dictionary<string, object> m_RtDataValues;
  108. private int m_PositionValue;
  109. private bool m_IsPositionMode;
  110. private int m_ESCVoltage;
  111. private bool m_GasIsFlowing;
  112. private bool m_IsProcessing;
  113. private bool m_IsAutoMode;
  114. private string m_SelectedRecipe;
  115. private float m_ChillerTempSetpoint;
  116. private float m_WallTempSetpoint;
  117. private bool m_HeIsPressureMode=true;
  118. private bool m_ChillerIsOn;
  119. private float m_ProcessHighPressure;
  120. private float m_ProcessLowPressure;
  121. private float m_ForelinePressurePressure;
  122. private float m_ESCHePressure;
  123. ButterflyValveView butterflyValveMessageBox;
  124. HeaterView heaterView;
  125. private int m_TurboPumpRotationalSpeed;
  126. private bool m_LiftPinIsUp;
  127. private bool m_IsSlitDoorClosed;
  128. private bool m_IsLidClosed;
  129. private float m_ChillerTemperature;
  130. private float m_HVTemperature;
  131. private int m_ESCHVOutputVoltage;
  132. //private float m_SRfReflectPower;
  133. //private float m_SRfForwardPowerFeedBack;
  134. //private float m_BRfReflectPower;
  135. //private float m_BRfForwardPowerFeedBack;
  136. //private int m_MatchWorkMode;
  137. //private int m_BiasMatchWorkMode;
  138. private float m_MatchC1;
  139. private float m_MatchC2;
  140. private float m_BiasMatchC1;
  141. private float m_BiasMatchC2;
  142. private float m_PendulumValvePosition;
  143. private bool m_IsTurboPumpAtSpeed;
  144. private bool m_TurboPumpWaterFlowSwitch;
  145. private bool m_IsHasWafer;
  146. private Recipe m_CurrentRecipe=new Recipe ();
  147. private RecipeResult m_CurrentRecipeResult=new RecipeResult ();
  148. private RecipeStep m_CurrentRecipeStep = new RecipeStep();
  149. private double m_ChamberPressureFeedBack;
  150. #endregion
  151. #region 属性
  152. public List<string> CurrentModuleRecipes
  153. {
  154. get { return m_CurrentModuleRecipes; }
  155. set { SetProperty(ref m_CurrentModuleRecipes, value); }
  156. }
  157. public Recipe CurrentRecipe
  158. {
  159. get { return m_CurrentRecipe; }
  160. set { SetProperty(ref m_CurrentRecipe, value); }
  161. }
  162. public RecipeResult CurrentRecipeResult
  163. {
  164. get { return m_CurrentRecipeResult; }
  165. set { SetProperty(ref m_CurrentRecipeResult, value); }
  166. }
  167. public RecipeStep CurrentRecipeStep
  168. {
  169. get { return m_CurrentRecipeStep; }
  170. set { SetProperty(ref m_CurrentRecipeStep, value); }
  171. }
  172. public bool IsHasWafer
  173. {
  174. get { return m_IsHasWafer; }
  175. set { SetProperty(ref m_IsHasWafer, value); }
  176. }
  177. public bool IsTurboPumpAtSpeed
  178. {
  179. get { return m_IsTurboPumpAtSpeed; }
  180. set { SetProperty(ref m_IsTurboPumpAtSpeed, value); }
  181. }
  182. public bool TurboPumpWaterFlowSwitch
  183. {
  184. get { return m_TurboPumpWaterFlowSwitch; }
  185. set { SetProperty(ref m_TurboPumpWaterFlowSwitch, value); }
  186. }
  187. public float PendulumValvePosition
  188. {
  189. get { return m_PendulumValvePosition; }
  190. set{SetProperty(ref m_PendulumValvePosition, value);}
  191. }
  192. public float BiasMatchC1
  193. {
  194. get { return m_BiasMatchC1; }
  195. set
  196. {
  197. SetProperty(ref m_BiasMatchC1, value);
  198. }
  199. }
  200. public float BiasMatchC2
  201. {
  202. get { return m_BiasMatchC2; }
  203. set
  204. {
  205. SetProperty(ref m_BiasMatchC2, value);
  206. }
  207. }
  208. public float MatchC1
  209. {
  210. get { return m_MatchC1; }
  211. set
  212. {
  213. SetProperty(ref m_MatchC1, value);
  214. }
  215. }
  216. public float MatchC2
  217. {
  218. get { return m_MatchC2; }
  219. set
  220. {
  221. SetProperty(ref m_MatchC2, value);
  222. }
  223. }
  224. public AITPendulumValveData PendulumValveData
  225. {
  226. get { return m_PendulumValveData; }
  227. set
  228. {
  229. SetProperty(ref m_PendulumValveData, value);
  230. }
  231. }
  232. public AITHVData ESCHVData
  233. {
  234. get { return m_ESCHVData; }
  235. set
  236. {
  237. SetProperty(ref m_ESCHVData, value);
  238. }
  239. }
  240. public int ESCHVOutputVoltage
  241. {
  242. get { return m_ESCHVOutputVoltage; }
  243. set
  244. {
  245. SetProperty(ref m_ESCHVOutputVoltage, value);
  246. }
  247. }
  248. public float ChillerTemperature
  249. {
  250. get { return m_ChillerTemperature; }
  251. set
  252. {
  253. SetProperty(ref m_ChillerTemperature, value);
  254. }
  255. }
  256. public float HVTemperature
  257. {
  258. get { return m_HVTemperature; }
  259. set
  260. {
  261. SetProperty(ref m_HVTemperature, value);
  262. }
  263. }
  264. public bool IsLidClosed
  265. {
  266. get { return m_IsLidClosed; }
  267. set
  268. {
  269. SetProperty(ref m_IsLidClosed, value);
  270. }
  271. }
  272. public bool IsSlitDoorClosed
  273. {
  274. get { return m_IsSlitDoorClosed; }
  275. set
  276. {
  277. SetProperty(ref m_IsSlitDoorClosed, value);
  278. }
  279. }
  280. public bool LiftPinIsUp
  281. {
  282. get { return m_LiftPinIsUp; }
  283. set
  284. {
  285. SetProperty(ref m_LiftPinIsUp, value);
  286. }
  287. }
  288. public int TurboPumpRotationalSpeed
  289. {
  290. get { return m_TurboPumpRotationalSpeed; }
  291. set
  292. {
  293. SetProperty(ref m_TurboPumpRotationalSpeed, value);
  294. }
  295. }
  296. public float ESCHePressure
  297. {
  298. get { return m_ESCHePressure; }
  299. set
  300. {
  301. SetProperty(ref m_ESCHePressure, value);
  302. }
  303. }
  304. public float ProcessHighPressure
  305. {
  306. get { return m_ProcessHighPressure; }
  307. set
  308. {
  309. SetProperty(ref m_ProcessHighPressure, value);
  310. }
  311. }
  312. public float ProcessLowPressure
  313. {
  314. get { return m_ProcessLowPressure; }
  315. set
  316. {
  317. SetProperty(ref m_ProcessLowPressure, value);
  318. }
  319. }
  320. public float ForelinePressure
  321. {
  322. get { return m_ForelinePressurePressure; }
  323. set
  324. {
  325. SetProperty(ref m_ForelinePressurePressure, value);
  326. }
  327. }
  328. public bool SourceRFFanInterlock
  329. {
  330. get { return m_SourceRFFanInterlock; }
  331. set
  332. {
  333. SetProperty(ref m_SourceRFFanInterlock, value);
  334. }
  335. }
  336. public bool IsWLK
  337. {
  338. get { return m_IsWLK; }
  339. set
  340. {
  341. SetProperty(ref m_IsWLK, value);
  342. }
  343. }
  344. public bool IsWaterFlowOk
  345. {
  346. get { return m_IsWaterFlowOk; }
  347. set
  348. {
  349. SetProperty(ref m_IsWaterFlowOk, value);
  350. }
  351. }
  352. public bool IsCDAOK
  353. {
  354. get { return m_IsCDAOK; }
  355. set
  356. {
  357. SetProperty(ref m_IsCDAOK, value);
  358. }
  359. }
  360. public bool SensorGasBoxDoor
  361. {
  362. get { return m_SensorGasBoxDoor; }
  363. set
  364. {
  365. SetProperty(ref m_SensorGasBoxDoor, value);
  366. }
  367. }
  368. public bool SensorGasBoxPressure
  369. {
  370. get { return m_SensorGasBoxPressure; }
  371. set
  372. {
  373. SetProperty(ref m_SensorGasBoxPressure, value);
  374. }
  375. }
  376. public bool IsTurboPumpInterlock
  377. {
  378. get { return m_IsTurboPumpInterlock; }
  379. set
  380. {
  381. SetProperty(ref m_IsTurboPumpInterlock, value);
  382. }
  383. }
  384. public string ModuleName { get; set; }
  385. public double MFC1SetPoint
  386. {
  387. get { return m_MFC1SetPoint; }
  388. set { SetProperty(ref m_MFC1SetPoint, value); }
  389. }
  390. public double MFC2SetPoint
  391. {
  392. get { return m_MFC2SetPoint; }
  393. set { SetProperty(ref m_MFC2SetPoint, value); }
  394. }
  395. public double MFC3SetPoint
  396. {
  397. get { return m_MFC3SetPoint; }
  398. set { SetProperty(ref m_MFC3SetPoint, value); }
  399. }
  400. public double MFC4SetPoint
  401. {
  402. get { return m_MFC4SetPoint; }
  403. set { SetProperty(ref m_MFC4SetPoint, value); }
  404. }
  405. public double MFC5SetPoint
  406. {
  407. get { return m_MFC5SetPoint; }
  408. set { SetProperty(ref m_MFC5SetPoint, value); }
  409. }
  410. public double MFC6SetPoint
  411. {
  412. get { return m_MFC6SetPoint; }
  413. set { SetProperty(ref m_MFC6SetPoint, value); }
  414. }
  415. public double MFC7SetPoint
  416. {
  417. get { return m_MFC7SetPoint; }
  418. set { SetProperty(ref m_MFC7SetPoint, value); }
  419. }
  420. public double MFC8SetPoint
  421. {
  422. get { return m_MFC8SetPoint; }
  423. set { SetProperty(ref m_MFC8SetPoint, value); }
  424. }
  425. public double N2SetPoint
  426. {
  427. get { return m_N2SetPoint; }
  428. set { SetProperty(ref m_N2SetPoint, value); }
  429. }
  430. public AITMfcData MFC1Data
  431. {
  432. get { return m_MFC1Data; }
  433. set { SetProperty(ref m_MFC1Data, value); }
  434. }
  435. public AITMfcData MFC2Data
  436. {
  437. get { return m_MFC2Data; }
  438. set { SetProperty(ref m_MFC2Data, value); }
  439. }
  440. public AITMfcData MFC3Data
  441. {
  442. get { return m_MFC3Data; }
  443. set { SetProperty(ref m_MFC3Data, value); }
  444. }
  445. public AITMfcData MFC4Data
  446. {
  447. get { return m_MFC4Data; }
  448. set { SetProperty(ref m_MFC4Data, value); }
  449. }
  450. public AITMfcData MFC5Data
  451. {
  452. get { return m_MFC5Data; }
  453. set { SetProperty(ref m_MFC5Data, value); }
  454. }
  455. public AITMfcData MFC6Data
  456. {
  457. get { return m_MFC6Data; }
  458. set { SetProperty(ref m_MFC6Data, value); }
  459. }
  460. public AITMfcData MFC7Data
  461. {
  462. get { return m_MFC7Data; }
  463. set { SetProperty(ref m_MFC7Data, value); }
  464. }
  465. public AITMfcData MFC8Data
  466. {
  467. get { return m_MFC8Data; }
  468. set { SetProperty(ref m_MFC8Data, value); }
  469. }
  470. public AITMfcData MFCHeData
  471. {
  472. get { return m_MFCHeData; }
  473. set { SetProperty(ref m_MFCHeData, value); }
  474. }
  475. public AITMfcData MFCN2Data
  476. {
  477. get { return m_MFCN2Data; }
  478. set { SetProperty(ref m_MFCN2Data, value); }
  479. }
  480. public AITHeaterData ValveHeaterData
  481. {
  482. get { return m_ValveHeaterData; }
  483. set { SetProperty(ref m_ValveHeaterData, value); }
  484. }
  485. public AITHeaterData ForelineHeaterData
  486. {
  487. get { return m_ForelineHeaterData; }
  488. set { SetProperty(ref m_ForelineHeaterData, value); }
  489. }
  490. public AITHeaterData WallHeaterData
  491. {
  492. get { return m_WallHeaterData; }
  493. set { SetProperty(ref m_WallHeaterData, value); }
  494. }
  495. public AITRfData SRFData
  496. {
  497. get { return m_SRFData; }
  498. set { SetProperty(ref m_SRFData, value); }
  499. }
  500. public AITRfData BRFData
  501. {
  502. get { return m_BRFData; }
  503. set { SetProperty(ref m_BRFData, value); }
  504. }
  505. public PMState PMCurrentState
  506. {
  507. get { return m_PMCurrentState; }
  508. set { SetProperty(ref m_PMCurrentState, value); }
  509. }
  510. #region 阀
  511. public bool GasFinalValveIsOpen
  512. {
  513. get { return m_GasFinalValveIsOpen; }
  514. set { SetProperty(ref m_GasFinalValveIsOpen, value); }
  515. }
  516. public bool PVN21ValveIsOpen
  517. {
  518. get { return m_PVN21ValveIsOpen; }
  519. set { SetProperty(ref m_PVN21ValveIsOpen, value); }
  520. }
  521. public bool PVN22ValveIsOpen
  522. {
  523. get { return m_PVN22ValveIsOpen; }
  524. set { SetProperty(ref m_PVN22ValveIsOpen, value); }
  525. }
  526. public bool N2ValveIsOpen
  527. {
  528. get { return m_N2ValveIsOpen; }
  529. set { SetProperty(ref m_N2ValveIsOpen, value); }
  530. }
  531. public bool PV11ValveIsOpen
  532. {
  533. get { return m_PV11ValveIsOpen; }
  534. set { SetProperty(ref m_PV11ValveIsOpen, value); }
  535. }
  536. public bool PV12ValveIsOpen
  537. {
  538. get { return m_PV12ValveIsOpen; }
  539. set { SetProperty(ref m_PV12ValveIsOpen, value); }
  540. }
  541. public bool MFC1ValveIsOpen
  542. {
  543. get { return m_MFC1ValveIsOpen; }
  544. set { SetProperty(ref m_MFC1ValveIsOpen, value); }
  545. }
  546. public bool PV21ValveIsOpen
  547. {
  548. get { return m_PV21ValveIsOpen; }
  549. set { SetProperty(ref m_PV21ValveIsOpen, value); }
  550. }
  551. public bool PV22ValveIsOpen
  552. {
  553. get { return m_PV22ValveIsOpen; }
  554. set { SetProperty(ref m_PV22ValveIsOpen, value); }
  555. }
  556. public bool MFC2ValveIsOpen
  557. {
  558. get { return m_MFC2ValveIsOpen; }
  559. set { SetProperty(ref m_MFC2ValveIsOpen, value); }
  560. }
  561. public bool PV31ValveIsOpen
  562. {
  563. get { return m_PV31ValveIsOpen; }
  564. set { SetProperty(ref m_PV31ValveIsOpen, value); }
  565. }
  566. public bool PV32ValveIsOpen
  567. {
  568. get { return m_PV32ValveIsOpen; }
  569. set { SetProperty(ref m_PV32ValveIsOpen, value); }
  570. }
  571. public bool MFC3ValveIsOpen
  572. {
  573. get { return m_MFC3ValveIsOpen; }
  574. set { SetProperty(ref m_MFC3ValveIsOpen, value); }
  575. }
  576. public bool PV41ValveIsOpen
  577. {
  578. get { return m_PV41ValveIsOpen; }
  579. set { SetProperty(ref m_PV41ValveIsOpen, value); }
  580. }
  581. public bool PV42ValveIsOpen
  582. {
  583. get { return m_PV42ValveIsOpen; }
  584. set { SetProperty(ref m_PV42ValveIsOpen, value); }
  585. }
  586. public bool MFC4ValveIsOpen
  587. {
  588. get { return m_MFC4ValveIsOpen; }
  589. set { SetProperty(ref m_MFC4ValveIsOpen, value); }
  590. }
  591. public bool MFC5ValveIsOpen
  592. {
  593. get { return m_MFC5ValveIsOpen; }
  594. set { SetProperty(ref m_MFC5ValveIsOpen, value); }
  595. }
  596. public bool MFC6ValveIsOpen
  597. {
  598. get { return m_MFC6ValveIsOpen; }
  599. set { SetProperty(ref m_MFC6ValveIsOpen, value); }
  600. }
  601. public bool MFC7ValveIsOpen
  602. {
  603. get { return m_MFC7ValveIsOpen; }
  604. set { SetProperty(ref m_MFC7ValveIsOpen, value); }
  605. }
  606. public bool MFC8ValveIsOpen
  607. {
  608. get { return m_MFC8ValveIsOpen; }
  609. set { SetProperty(ref m_MFC8ValveIsOpen, value); }
  610. }
  611. public bool PVHe1ValveIsOpen
  612. {
  613. get { return m_PVHe1ValveIsOpen; }
  614. set { SetProperty(ref m_PVHe1ValveIsOpen, value); }
  615. }
  616. public bool PVHe2ValveIsOpen
  617. {
  618. get { return m_PVHe2ValveIsOpen; }
  619. set { SetProperty(ref m_PVHe2ValveIsOpen, value); }
  620. }
  621. public bool PVHe3ValveIsOpen
  622. {
  623. get { return m_PVHe3ValveIsOpen; }
  624. set { SetProperty(ref m_PVHe3ValveIsOpen, value); }
  625. }
  626. public bool HeISOValveIsOpen
  627. {
  628. get { return m_HeISOValveIsOpen; }
  629. set { SetProperty(ref m_HeISOValveIsOpen, value); }
  630. }
  631. public bool TurboPumpPumpingValveIsOpen
  632. {
  633. get { return m_TurboPumpPumpingValveIsOpen; }
  634. set { SetProperty(ref m_TurboPumpPumpingValveIsOpen, value); }
  635. }
  636. public bool TurboPumpPurgeValveIsOpen
  637. {
  638. get { return m_TurboPumpPurgeValveIsOpen; }
  639. set { SetProperty(ref m_TurboPumpPurgeValveIsOpen, value); }
  640. }
  641. public bool SoftPumpValveIsOpen
  642. {
  643. get { return m_SoftPumpValveIsOpen; }
  644. set { SetProperty(ref m_SoftPumpValveIsOpen, value); }
  645. }
  646. public bool FastPumpValveIsOpen
  647. {
  648. get { return m_FastPumpValveIsOpen; }
  649. set { SetProperty(ref m_FastPumpValveIsOpen, value); }
  650. }
  651. public bool GuageValveIsOpen
  652. {
  653. get { return m_GuageValveIsOpen; }
  654. set { SetProperty(ref m_GuageValveIsOpen, value); }
  655. }
  656. #endregion
  657. public Dictionary<string, object> RtDataValues
  658. {
  659. get { return m_RtDataValues; }
  660. set { SetProperty(ref m_RtDataValues, value); }
  661. }
  662. public bool PumpIsOpen
  663. {
  664. get { return m_PumpIsOpen; }
  665. set { SetProperty(ref m_PumpIsOpen, value); }
  666. }
  667. public bool PendulumValveIsOpen
  668. {
  669. get { return m_PendulumValveIsOpen; }
  670. set { SetProperty(ref m_PendulumValveIsOpen, value); }
  671. }
  672. public bool TurboIsOpen
  673. {
  674. get { return m_TurboIsOpen; }
  675. set { SetProperty(ref m_TurboIsOpen, value); }
  676. }
  677. public bool IsATM
  678. {
  679. get { return m_IsATM; }
  680. set { SetProperty(ref m_IsATM, value); }
  681. }
  682. public bool IsVAC
  683. {
  684. get { return m_IsVAC; }
  685. set { SetProperty(ref m_IsVAC, value); }
  686. }
  687. //public bool BRFIsOn
  688. //{
  689. // get { return m_BRFIsOn; }
  690. // set { SetProperty(ref m_BRFIsOn, value); }
  691. //}
  692. //public bool SRFIsOn
  693. //{
  694. // get { return m_SRFIsOn; }
  695. // set { SetProperty(ref m_SRFIsOn, value); }
  696. //}
  697. public int PositionValue
  698. {
  699. get { return m_PositionValue; }
  700. set { SetProperty(ref m_PositionValue, value); }
  701. }
  702. public bool IsPositionMode
  703. {
  704. get { return m_IsPositionMode; }
  705. set { SetProperty(ref m_IsPositionMode, value); }
  706. }
  707. public double HeGasSetpoint
  708. {
  709. get { return m_HeGasSetpoint; }
  710. set
  711. {
  712. SetProperty(ref m_HeGasSetpoint, value);
  713. }
  714. }
  715. public int HePressureSetpoint
  716. {
  717. get { return m_HePressureSetpoint; }
  718. set
  719. {
  720. SetProperty(ref m_HePressureSetpoint, value);
  721. }
  722. }
  723. public float SRFFwdPowerSetpoint
  724. {
  725. get { return m_SRFFwdPowerSetpoint; }
  726. set { SetProperty(ref m_SRFFwdPowerSetpoint, value); }
  727. }
  728. public float BRFFwdPowerSetpoint
  729. {
  730. get { return m_BRFFwdPowerSetpoint; }
  731. set { SetProperty(ref m_BRFFwdPowerSetpoint, value); }
  732. }
  733. public int ESCVoltage
  734. {
  735. get { return m_ESCVoltage; }
  736. set { SetProperty(ref m_ESCVoltage, value); }
  737. }
  738. public float SRFMatchC1
  739. {
  740. get { return m_SRFMatchC1; }
  741. set { SetProperty(ref m_SRFMatchC1, value); }
  742. }
  743. public float SRFMatchC2
  744. {
  745. get { return m_SRFMatchC2; }
  746. set { SetProperty(ref m_SRFMatchC2, value); }
  747. }
  748. public float BRFMatchC1
  749. {
  750. get { return m_BRFMatchC1; }
  751. set { SetProperty(ref m_BRFMatchC1, value); }
  752. }
  753. public float BRFMatchC2
  754. {
  755. get { return m_BRFMatchC2; }
  756. set { SetProperty(ref m_BRFMatchC2, value); }
  757. }
  758. public bool GasIsFlowing
  759. {
  760. get { return m_GasIsFlowing; }
  761. set { SetProperty(ref m_GasIsFlowing, value); }
  762. }
  763. public bool IsProcessing
  764. {
  765. get { return m_IsProcessing; }
  766. set { SetProperty(ref m_IsProcessing, value); }
  767. }
  768. public bool IsAutoMode
  769. {
  770. get { return m_IsAutoMode; }
  771. set { SetProperty(ref m_IsAutoMode, value); }
  772. }
  773. public string SelectedRecipe
  774. {
  775. get { return m_SelectedRecipe; }
  776. set { SetProperty(ref m_SelectedRecipe, value); }
  777. }
  778. public float ChillerTempSetpoint
  779. {
  780. get { return m_ChillerTempSetpoint; }
  781. set { SetProperty(ref m_ChillerTempSetpoint, value); }
  782. }
  783. public float WallTempSetpoint
  784. {
  785. get { return m_WallTempSetpoint; }
  786. set { SetProperty(ref m_WallTempSetpoint, value); }
  787. }
  788. public bool HeIsPressureMode
  789. {
  790. get { return m_HeIsPressureMode; }
  791. set { SetProperty(ref m_HeIsPressureMode, value); }
  792. }
  793. public bool ChillerIsOn
  794. {
  795. get { return m_ChillerIsOn; }
  796. set { SetProperty(ref m_ChillerIsOn, value); }
  797. }
  798. public double ChamberPressureFeedBack
  799. {
  800. get { return m_ChamberPressureFeedBack; }
  801. set { SetProperty(ref m_ChamberPressureFeedBack, value); }
  802. }
  803. #endregion
  804. #region 命令
  805. private DelegateCommand _PMInitCommnad;
  806. public DelegateCommand PMInitCommnad =>
  807. _PMInitCommnad ?? (_PMInitCommnad = new DelegateCommand(OnPMInit));
  808. private DelegateCommand _PMAbortCommnad;
  809. public DelegateCommand PMAbortCommnad =>
  810. _PMAbortCommnad ?? (_PMAbortCommnad = new DelegateCommand(OnPMAbort));
  811. private DelegateCommand _GasCommand;
  812. public DelegateCommand GasCommand =>
  813. _GasCommand ?? (_GasCommand = new DelegateCommand(OnGas));
  814. private DelegateCommand _HeCommand;
  815. public DelegateCommand HeCommand =>
  816. _HeCommand ?? (_HeCommand = new DelegateCommand(OnHe));
  817. private DelegateCommand _RfCommand;
  818. public DelegateCommand RfCommand =>
  819. _RfCommand ?? (_RfCommand = new DelegateCommand(OnRf));
  820. private DelegateCommand _PurgeCommand;
  821. public DelegateCommand PurgeCommand =>
  822. _PurgeCommand ?? (_PurgeCommand = new DelegateCommand(OnPurge));
  823. private DelegateCommand _VentCommand;
  824. public DelegateCommand VentCommand =>
  825. _VentCommand ?? (_VentCommand = new DelegateCommand(OnVent));
  826. private DelegateCommand _PumpCommand;
  827. public DelegateCommand PumpCommand =>
  828. _PumpCommand ?? (_PumpCommand = new DelegateCommand(OnPump));
  829. private DelegateCommand _OpenPumpCommand;
  830. public DelegateCommand OpenPumpCommand =>
  831. _OpenPumpCommand ?? (_OpenPumpCommand = new DelegateCommand(OnOpenPump));
  832. private DelegateCommand _ClosePumpCommand;
  833. public DelegateCommand ClosePumpCommand =>
  834. _ClosePumpCommand ?? (_ClosePumpCommand = new DelegateCommand(OnClosePump));
  835. private DelegateCommand _OpenTurboPumpCommand;
  836. public DelegateCommand OpenTurboPumpCommand =>
  837. _OpenTurboPumpCommand ?? (_OpenTurboPumpCommand = new DelegateCommand(OnOpenTurboPump));
  838. private DelegateCommand _CloseTurboPumpCommand;
  839. public DelegateCommand CloseTurboPumpCommand =>
  840. _CloseTurboPumpCommand ?? (_CloseTurboPumpCommand = new DelegateCommand(OnCloseTurboPump));
  841. private DelegateCommand _OpenPendulumValveCommand;
  842. public DelegateCommand OpenPendulumValveCommand =>
  843. _OpenPendulumValveCommand ?? (_OpenPendulumValveCommand = new DelegateCommand(OnOpenPendulumValve));
  844. private DelegateCommand _ClosePendulumValveCommand;
  845. public DelegateCommand ClosePendulumValveCommand =>
  846. _ClosePendulumValveCommand ?? (_ClosePendulumValveCommand = new DelegateCommand(OnClosePendulumValve));
  847. private DelegateCommand<object> _PinUpDownCommand;
  848. public DelegateCommand<object> PinUpDownCommand =>
  849. _PinUpDownCommand ?? (_PinUpDownCommand = new DelegateCommand<object>(OnPinUpDown));
  850. private DelegateCommand _SetSRfCommand;
  851. public DelegateCommand SetSRfCommand =>
  852. _SetSRfCommand ?? (_SetSRfCommand = new DelegateCommand(OnSetSRf));
  853. private DelegateCommand _SetBRfCommand;
  854. public DelegateCommand SetBRfCommand =>
  855. _SetBRfCommand ?? (_SetBRfCommand = new DelegateCommand(OnSetBRf));
  856. private DelegateCommand _OpenButterflyValveViewCommand;
  857. public DelegateCommand OpenButterflyValveViewCommand =>
  858. _OpenButterflyValveViewCommand ?? (_OpenButterflyValveViewCommand = new DelegateCommand(OnOpenButterflyValveView));
  859. private DelegateCommand _HVCommand;
  860. public DelegateCommand HVCommand =>
  861. _HVCommand ?? (_HVCommand = new DelegateCommand(OnHV));
  862. private DelegateCommand _HVSetCommand;
  863. public DelegateCommand HVSetCommand =>
  864. _HVSetCommand ?? (_HVSetCommand = new DelegateCommand(OnHVSet));
  865. private DelegateCommand _LoadRecipeCommand;
  866. public DelegateCommand LoadRecipeCommand =>
  867. _LoadRecipeCommand ?? (_LoadRecipeCommand = new DelegateCommand(OnLoadRecipe));
  868. private DelegateCommand<object> _ControlValveCommand;
  869. public DelegateCommand<object> ControlValveCommand =>
  870. _ControlValveCommand ?? (_ControlValveCommand = new DelegateCommand<object>(OnControlValve));
  871. private DelegateCommand<object> _RunRecipeCommand;
  872. public DelegateCommand<object> RunRecipeCommand =>
  873. _RunRecipeCommand ?? (_RunRecipeCommand = new DelegateCommand<object>(OnRunRecipe));
  874. private DelegateCommand _SetChillerTempCommand;
  875. public DelegateCommand SetChillerTempCommand =>
  876. _SetChillerTempCommand ?? (_SetChillerTempCommand = new DelegateCommand(OnSetChillerTemp));
  877. private DelegateCommand _OnOffChillerCommand;
  878. public DelegateCommand OnOffChillerCommand =>
  879. _OnOffChillerCommand ?? (_OnOffChillerCommand = new DelegateCommand(OnOffChiller));
  880. private DelegateCommand<object> _HeaterCommand;
  881. public DelegateCommand<object> HeaterCommand =>
  882. _HeaterCommand ?? (_HeaterCommand = new DelegateCommand<object>(OnHeater));
  883. private DelegateCommand _EndStepCommand;
  884. public DelegateCommand EndStepCommand =>
  885. _EndStepCommand ?? (_EndStepCommand = new DelegateCommand(OnEndStep));
  886. #endregion
  887. #region 构造函数
  888. public OverVenusViewModel()
  889. {
  890. m_RtDataKeys = new List<string>();
  891. m_IsATM = true;
  892. ModuleName = "PMA";
  893. CurrentModuleRecipes = GetFilesNames(Path.Combine(QueryDataClient.Instance.Service.GetData("GetRTPath").ToString(), "Recipes", ModuleName)).ToList();
  894. DispatcherTimer timer = new DispatcherTimer();
  895. timer.Interval = TimeSpan.FromSeconds(0.5);
  896. timer.Tick += timer_Tick;
  897. timer.Start();
  898. }
  899. #endregion
  900. #region 命令方法
  901. private void OnControlValve(object obj)
  902. {
  903. CommonValveControl commonValveControl = (CommonValveControl)obj;
  904. if (commonValveControl.IsCanEdit == true)
  905. {
  906. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ControlValve",Convert.ToInt32( commonValveControl.Tag.ToString()), !commonValveControl.Status);
  907. }
  908. }
  909. private void OnPMInit()
  910. {
  911. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Home");
  912. }
  913. private async void OnGas()
  914. {
  915. await Task.Run(async () =>
  916. {
  917. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas1.SetPoint", MFC1SetPoint);
  918. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas2.SetPoint", MFC2SetPoint);
  919. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas3.SetPoint", MFC3SetPoint);
  920. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas4.SetPoint", MFC4SetPoint);
  921. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas5.SetPoint", MFC5SetPoint);
  922. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas6.SetPoint", MFC6SetPoint);
  923. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas7.SetPoint", MFC7SetPoint);
  924. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas8.SetPoint", MFC8SetPoint);
  925. await Task.Delay(1000);
  926. object[] mfc = new object[8];
  927. string[] mfcSetPoint = new string[8];
  928. mfc[0] = MFC1Data.SetPoint;
  929. mfc[1] = MFC2Data.SetPoint;
  930. mfc[2] = MFC3Data.SetPoint;
  931. mfc[3] = MFC4Data.SetPoint;
  932. mfc[4] = MFC5Data.SetPoint;
  933. mfc[5] = MFC6Data.SetPoint;
  934. mfc[6] = MFC7Data.SetPoint;
  935. mfc[7] = MFC8Data.SetPoint;
  936. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.GasFlow}", mfc);
  937. });
  938. }
  939. private void OnHe()
  940. {
  941. if (PVHe1ValveIsOpen == true)
  942. {
  943. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBacksideHeFlow", 0.0d);
  944. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBacksideHePressure", 0);
  945. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ControlValve", (int)ValveType.PVHe3, false);
  946. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ControlValve", (int)ValveType.HeISO, false);
  947. }
  948. else
  949. {
  950. if (HeIsPressureMode)
  951. {
  952. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBacksideHePressure", HeGasSetpoint);
  953. }
  954. else
  955. {
  956. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBacksideHeFlow", HeGasSetpoint);
  957. }
  958. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ControlValve", (int)ValveType.PVHe3, true);
  959. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ControlValve", (int)ValveType.HeISO, true);
  960. }
  961. }
  962. private void OnRf()
  963. {
  964. if (PMCurrentState == PMState.RfPowering)
  965. {
  966. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  967. }
  968. else
  969. {
  970. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.RfPower}");
  971. }
  972. }
  973. private void OnPurge()
  974. {
  975. //if (RtDataValues[$"{ModuleName}.FsmState"].ToString() ==PMState.Purge.ToString())
  976. //if (PMCurrentState == PMState.Purging || N2SetPoint<=0)
  977. //{
  978. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", 0);
  979. // await Task.Delay(1000);
  980. // //InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StopPurge");
  981. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  982. //}
  983. //else
  984. //{
  985. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", N2SetPoint);
  986. // await Task.Delay(1000);
  987. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Purge");
  988. //}
  989. if (PMCurrentState == PMState.Purging)
  990. {
  991. //InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", 0);
  992. //await Task.Delay(1000);
  993. ////InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StopPurge");
  994. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  995. }
  996. else
  997. {
  998. //InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", N2SetPoint);
  999. //await Task.Delay(1000);
  1000. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Purge");
  1001. }
  1002. }
  1003. private void OnVent()
  1004. {
  1005. //if (RtDataValues[$"{ModuleName}.FsmState"].ToString()==PMState.Venting.ToString())
  1006. if (PMCurrentState == PMState.Venting)
  1007. {
  1008. //InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StopVent");
  1009. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1010. }
  1011. else
  1012. {
  1013. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Vent");
  1014. }
  1015. }
  1016. private void OnPump()
  1017. {
  1018. //if (RtDataValues[$"{ModuleName}.FsmState"].ToString() == PMState.Pumping.ToString())
  1019. if (PMCurrentState==PMState.Pumping)
  1020. {
  1021. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1022. return;
  1023. }
  1024. //if (PMCurrentState == PMState.pum)
  1025. //{
  1026. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StopPump");
  1027. // return;
  1028. //}
  1029. //string BasePressureSetPoint= RtConfigValues[$"{ModuleName}.Pump.PumpBasePressure"].ToString(); ;
  1030. //{
  1031. // get { return RtConfigValues[$"{ModuleName}.Pump.PumpBasePressure"].ToString(); }
  1032. //}
  1033. //string PumpLimitSetPoint= RtConfigValues[$"{ModuleName}.Pump.PumpTimeLimit"].ToString();
  1034. //{
  1035. // get { return RtConfigValues[$"{ModuleName}.Pump.PumpTimeLimit"].ToString(); }
  1036. //}
  1037. string BasePressureSetPoint = QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.Pump.PumpBasePressure").ToString();
  1038. string PumpLimitSetPoint= QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.Pump.PumpTimeLimit").ToString();
  1039. // 设置底压
  1040. double basePressure = string.IsNullOrEmpty(BasePressureSetPoint) ? 0 : Convert.ToDouble(BasePressureSetPoint);
  1041. if (basePressure <= 0.01 || basePressure >= 1000)
  1042. {
  1043. MessageBox.Show($"基准压力设定值 {basePressure} 无效,应该在0到1000毫托之间");
  1044. return;
  1045. }
  1046. double pumpLimit = string.IsNullOrEmpty(PumpLimitSetPoint) ? 0 : Convert.ToDouble(PumpLimitSetPoint);
  1047. if (pumpLimit <= 0.01 || pumpLimit >= 1200)
  1048. {
  1049. MessageBox.Show($"抽气时间应该在0到1200之间,当前设定值{pumpLimit}");
  1050. return;
  1051. }
  1052. InvokeClient.Instance.Service.DoOperation("System.SetConfig", $"{ModuleName}.Pump.PumpBasePressure", basePressure.ToString());
  1053. InvokeClient.Instance.Service.DoOperation("System.SetConfig", $"{ModuleName}.Pump.PumpTimeLimit", pumpLimit.ToString());
  1054. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Pump");
  1055. }
  1056. private void OnOpenPump()
  1057. {
  1058. //if (RtDataValues[$"{ModuleName}.FsmState"].ToString() == "LaunchingPump")
  1059. if (PMCurrentState==PMState.LaunchingPump)
  1060. {
  1061. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1062. return;
  1063. }
  1064. //if (PumpIsOpen == true)
  1065. //{
  1066. // return;
  1067. //}
  1068. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StartPump");
  1069. }
  1070. private void OnClosePump()
  1071. {
  1072. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ClosePump");
  1073. }
  1074. private void OnOpenTurboPump()
  1075. {
  1076. //TurboIsOpen = true;
  1077. //if (RtDataValues[$"{ModuleName}.FsmState"].ToString() == "LaunchingTurbo")
  1078. if (PMCurrentState == PMState.LaunchingTurboPump)
  1079. {
  1080. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1081. return;
  1082. }
  1083. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StartTurboPump");
  1084. }
  1085. private void OnCloseTurboPump()
  1086. {
  1087. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.CloseTurboPump");
  1088. }
  1089. private void OnOpenPendulumValve()
  1090. {
  1091. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.TurnPendulumValve",true);
  1092. }
  1093. private void OnClosePendulumValve()
  1094. {
  1095. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.TurnPendulumValve",false);
  1096. }
  1097. private void OnPinUpDown(object upDown)
  1098. {
  1099. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetLiftPin", Convert.ToBoolean(upDown));
  1100. }
  1101. private async void OnSetSRf()
  1102. {
  1103. if (SRFData.IsRfOn == true)
  1104. {
  1105. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetSRf", SRFFwdPowerSetpoint, false);
  1106. }
  1107. else
  1108. {
  1109. if (GasIsFlowing == true)
  1110. {
  1111. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.Match}.{AITRfOperation.SetMatchPosition}", SRFMatchC1, SRFMatchC2);
  1112. await Task.Delay(100);
  1113. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetSRf", SRFFwdPowerSetpoint, true);
  1114. }
  1115. }
  1116. }
  1117. private async void OnSetBRf()
  1118. {
  1119. if (BRFData.IsRfOn == true)
  1120. {
  1121. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBRf", BRFFwdPowerSetpoint, false);
  1122. }
  1123. else
  1124. {
  1125. if (GasIsFlowing == true)
  1126. {
  1127. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.BiasMatch}.{AITRfOperation.SetMatchPosition}", BRFMatchC1, BRFMatchC2);
  1128. await Task.Delay(100);
  1129. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBRf", BRFFwdPowerSetpoint, true);
  1130. }
  1131. }
  1132. }
  1133. private void OnPMAbort()
  1134. {
  1135. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Abort");
  1136. }
  1137. private void OnOpenButterflyValveView()
  1138. {
  1139. //if (butterflyValveMessageBox == null)
  1140. //{
  1141. var _mainWindow = Application.Current.Windows.Cast<Window>().FirstOrDefault(window => window is Window) as Window;
  1142. butterflyValveMessageBox = new ButterflyValveView();
  1143. butterflyValveMessageBox.WindowStartupLocation = WindowStartupLocation.Manual;
  1144. butterflyValveMessageBox.Left = 700;
  1145. butterflyValveMessageBox.Top = 600;
  1146. butterflyValveMessageBox.Show();
  1147. butterflyValveMessageBox.Owner = _mainWindow;
  1148. //}
  1149. }
  1150. private void OnLoadRecipe()
  1151. {
  1152. CurrentModuleRecipes = GetFilesNames(Path.Combine(QueryDataClient.Instance.Service.GetData("GetRTPath").ToString(), "Recipes", ModuleName)).ToList();
  1153. }
  1154. private async void OnHV()
  1155. {
  1156. if (ESCHVData.IsOn == true)
  1157. {
  1158. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetESCHVIsOn", false);
  1159. }
  1160. else
  1161. {
  1162. await Task.Run(async () =>
  1163. {
  1164. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetESCHVIsOn", true);
  1165. await Task.Delay(1000);
  1166. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetESCHV", ESCVoltage);
  1167. });
  1168. }
  1169. }
  1170. private void OnHVSet()
  1171. {
  1172. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetESCHV", ESCVoltage);
  1173. }
  1174. private void OnRunRecipe(object obj)
  1175. {
  1176. string recipeName = SelectedRecipe;
  1177. if (recipeName == null)
  1178. {
  1179. return;
  1180. }
  1181. ClearData();
  1182. var recipePath = Path.Combine(QueryDataClient.Instance.Service.GetData("GetRTPath").ToString(), "Recipes", ModuleName, recipeName + ".rcp");
  1183. CurrentRecipe = Recipe.Load(File.ReadAllText(recipePath));
  1184. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.RunRecipe}",recipeName);
  1185. }
  1186. private void OnSetChillerTemp()
  1187. {
  1188. var value = (QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.Chiller.ChillerTemperatureOffset").ToString());
  1189. float x;
  1190. float.TryParse(value, out x);
  1191. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.HeatChiller", ChillerTempSetpoint, x);
  1192. }
  1193. private void OnOffChiller()
  1194. {
  1195. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.OnOffChiller", !ChillerIsOn);
  1196. }
  1197. private void OnHeater(object obj)
  1198. {
  1199. AITHeaterData heaterData = obj as AITHeaterData;
  1200. var _mainWindow = Application.Current.Windows.Cast<Window>().FirstOrDefault(window => window is Window) as Window;
  1201. heaterView = new HeaterView(heaterData);
  1202. heaterView.WindowStartupLocation = WindowStartupLocation.CenterScreen;
  1203. heaterView.Owner = _mainWindow;
  1204. heaterView.Show();
  1205. }
  1206. private void OnEndStep()
  1207. {
  1208. if (CurrentRecipeResult?.RecipeStepNumber != null && CurrentRecipeResult?.RecipeStepNumber != CurrentRecipeResult?.RecipeStepCount)
  1209. {
  1210. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ManualEndStep");
  1211. }
  1212. else if (CurrentRecipeResult?.RecipeStepNumber != null && CurrentRecipeResult?.RecipeStepNumber == CurrentRecipeResult?.RecipeStepCount)
  1213. {
  1214. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Abort");
  1215. }
  1216. }
  1217. #endregion
  1218. #region 私有方法
  1219. private void ClearData()
  1220. {
  1221. ESCVoltage = 0;
  1222. SRFFwdPowerSetpoint = 0;
  1223. SRFMatchC1 = 0;
  1224. SRFMatchC2 = 0;
  1225. BRFFwdPowerSetpoint = 0;
  1226. BRFMatchC1 = 0;
  1227. BRFMatchC2 = 0;
  1228. HeGasSetpoint = 0;
  1229. MFC1SetPoint = 0;
  1230. MFC2SetPoint = 0;
  1231. MFC3SetPoint = 0;
  1232. MFC4SetPoint = 0;
  1233. MFC5SetPoint = 0;
  1234. MFC6SetPoint = 0;
  1235. MFC7SetPoint = 0;
  1236. MFC8SetPoint = 0;
  1237. }
  1238. private IEnumerable<string> GetFilesNames(string path)
  1239. {
  1240. return Directory.GetFiles(path, "*.rcp")
  1241. .Select(Path.GetFileNameWithoutExtension);
  1242. }
  1243. void timer_Tick(object sender, EventArgs e)
  1244. {
  1245. RtDataValues = QueryDataClient.Instance.Service.PollData(m_RtDataKeys);
  1246. if (RtDataValues==null)
  1247. {
  1248. return;
  1249. }
  1250. var N2SetPoint =Convert.ToInt32( QueryDataClient.Instance.Service.GetConfig("System.TurboN2FlowSetPoint"));
  1251. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", N2SetPoint);
  1252. PVN21ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVN21.IsOpen");
  1253. GasFinalValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveGasFinal.IsOpen");
  1254. PV11ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV11.IsOpen");
  1255. PV12ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV12.IsOpen");
  1256. PV21ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV21.IsOpen");
  1257. PV22ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV22.IsOpen");
  1258. PV31ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV31.IsOpen");
  1259. PV32ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV32.IsOpen");
  1260. PV41ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV41.IsOpen");
  1261. PV42ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV42.IsOpen");
  1262. MFC1ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc1.IsOpen");
  1263. MFC2ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc2.IsOpen");
  1264. MFC3ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc3.IsOpen");
  1265. MFC4ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc4.IsOpen");
  1266. MFC5ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc5.IsOpen");
  1267. MFC6ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc6.IsOpen");
  1268. MFC7ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc7.IsOpen");
  1269. MFC8ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc8.IsOpen");
  1270. N2ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveN2.IsOpen");
  1271. SoftPumpValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveSoftPump.IsOpen");
  1272. FastPumpValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveFastPump.IsOpen");
  1273. GuageValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveGuage.IsOpen");
  1274. PVHe1ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVHe1.IsOpen");
  1275. PVHe2ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVHe2.IsOpen");
  1276. PVN21ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVN21.IsOpen");
  1277. PVN22ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVN22.IsOpen");
  1278. TurboPumpPumpingValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveTurboPumpPumping.IsOpen");
  1279. TurboPumpPurgeValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveTurboPumpPurge.IsOpen");
  1280. PVHe3ValveIsOpen= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVHe3.IsOpen");
  1281. HeISOValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveHeISO.IsOpen");
  1282. PumpIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.PumpIsRunning");
  1283. TurboIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.TurboPumpIsRunning");
  1284. LiftPinIsUp= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.LiftPinIsUp");
  1285. IsSlitDoorClosed = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsSlitDoorClosed");
  1286. IsLidClosed = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsLidClosed");
  1287. PendulumValvePosition = CommonFunction.GetValue<float>(RtDataValues,$"{ModuleName}.GetPVPosition");
  1288. TurboPumpRotationalSpeed = Convert.ToInt32( RtDataValues[$"{ModuleName}.TurboPumpRotationalSpeed"].ToString());
  1289. PositionValue = -((int)((PendulumValvePosition) * 0.09));
  1290. PMCurrentState = (PMState)Enum.Parse(typeof(PMState), RtDataValues[$"{ModuleName}.FsmState"].ToString());
  1291. GasIsFlowing = PMCurrentState == PMState.GasFlowing;
  1292. IsProcessing=PMCurrentState == PMState.Processing;
  1293. MFC1Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas1");
  1294. MFC2Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas2");
  1295. MFC3Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas3");
  1296. MFC4Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas4");
  1297. MFC5Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas5");
  1298. MFC6Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas6");
  1299. MFC7Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas7");
  1300. MFC8Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas8");
  1301. MFCHeData = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcHe");
  1302. MFCN2Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcN2");
  1303. SRFData = CommonFunction.GetValue<AITRfData>(RtDataValues, $"{ModuleName}.{VenusDevice.Rf}.DeviceData");
  1304. BRFData = CommonFunction.GetValue<AITRfData>(RtDataValues, $"{ModuleName}.{VenusDevice.BiasRf}.DeviceData");
  1305. PendulumValveData = CommonFunction.GetValue<AITPendulumValveData>(RtDataValues, $"{ModuleName}.{VenusDevice.PendulumValve}.DeviceData");
  1306. ESCHVData= CommonFunction.GetValue<AITHVData>(RtDataValues, $"{ModuleName}.{VenusDevice.ESCHV}.DeviceData");
  1307. ValveHeaterData = (AITHeaterData)RtDataValues[$"{ModuleName}.ValveHeater.DeviceData"];
  1308. ForelineHeaterData = (AITHeaterData)RtDataValues[$"{ModuleName}.ForelineHeater.DeviceData"];
  1309. WallHeaterData = (AITHeaterData)RtDataValues[$"{ModuleName}.WallHeater.DeviceData"];
  1310. ProcessHighPressure = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.ProcessHighPressure");
  1311. ProcessLowPressure = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.ProcessLowPressure");
  1312. ForelinePressure = float.Parse(RtDataValues[$"{ModuleName}.ForelinePressure"].ToString());
  1313. ESCHePressure = float.Parse(RtDataValues[$"{ModuleName}.ESCHePressure"].ToString());
  1314. ChillerTemperature = float.Parse(RtDataValues[$"{ModuleName}.Chiller.Temp"].ToString());
  1315. HVTemperature = float.Parse(RtDataValues[$"{ModuleName}.{VenusDevice.ESCHV}.Temp"].ToString());
  1316. ChillerIsOn = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.Chiller.IsOn");
  1317. SourceRFFanInterlock= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.SourceRFFanInterlock");
  1318. IsWLK= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsWLK");
  1319. IsWaterFlowOk= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsWaterFlowOk");
  1320. IsTurboPumpInterlock= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsTurboPumpInterlock");
  1321. IsCDAOK= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsCDA_OK");
  1322. SensorGasBoxDoor= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.GasBoxDoorSW.Value");
  1323. SensorGasBoxPressure= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.GasBoxPressureSW.Value");
  1324. IsATM= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsATM");
  1325. IsVAC = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsVAC");
  1326. ESCHVOutputVoltage= CommonFunction.GetValue<int>(RtDataValues, $"{ModuleName}.ESCHV.OutputVoltage");
  1327. MatchC1 = CommonFunction.GetValue<float>(RtDataValues,$"{ModuleName}.{VenusDevice.Match}.C1");
  1328. MatchC2 = CommonFunction.GetValue<float>(RtDataValues,$"{ModuleName}.{VenusDevice.Match}.C2");
  1329. BiasMatchC1 = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.{VenusDevice.BiasMatch}.C1");
  1330. BiasMatchC2 = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.{VenusDevice.BiasMatch}.C2");
  1331. TurboPumpWaterFlowSwitch = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.TurboPumpWaterFlowSwitch.Value");
  1332. IsTurboPumpAtSpeed = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsTurboPumpAtSpeed");
  1333. IsHasWafer= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.HasWafer");
  1334. if (PMCurrentState == PMState.Processing)
  1335. {
  1336. CurrentRecipeResult = CommonFunction.GetValue<RecipeResult>(RtDataValues, $"{ModuleName}.CurrentRecipeResult");
  1337. if (CurrentRecipeResult.RecipeStepNumber != null)
  1338. {
  1339. CurrentRecipeStep = CurrentRecipe.Steps[Convert.ToInt32( CurrentRecipeResult.RecipeStepNumber) - 1];
  1340. }
  1341. }
  1342. else
  1343. {
  1344. CurrentRecipeResult = null;
  1345. CurrentRecipeStep = null;
  1346. }
  1347. if (Math.Abs(100 - ProcessLowPressure) > 1 && ProcessLowPressure<100)
  1348. {
  1349. ChamberPressureFeedBack = ProcessLowPressure;
  1350. }
  1351. else
  1352. {
  1353. ChamberPressureFeedBack = ProcessHighPressure;
  1354. }
  1355. }
  1356. public void addDataKeys()
  1357. {
  1358. m_RtDataKeys.Clear();
  1359. m_RtDataKeys.Add($"{ModuleName}.MfcGas1");
  1360. m_RtDataKeys.Add($"{ModuleName}.MfcGas2");
  1361. m_RtDataKeys.Add($"{ModuleName}.MfcGas3");
  1362. m_RtDataKeys.Add($"{ModuleName}.MfcGas4");
  1363. m_RtDataKeys.Add($"{ModuleName}.MfcGas5");
  1364. m_RtDataKeys.Add($"{ModuleName}.MfcGas6");
  1365. m_RtDataKeys.Add($"{ModuleName}.MfcGas7");
  1366. m_RtDataKeys.Add($"{ModuleName}.MfcGas8");
  1367. m_RtDataKeys.Add($"{ModuleName}.MfcHe");
  1368. m_RtDataKeys.Add($"{ModuleName}.MfcN2");
  1369. m_RtDataKeys.Add($"{ModuleName}.ForelinePressure");
  1370. m_RtDataKeys.Add($"{ModuleName}.ProcessHighPressure");
  1371. m_RtDataKeys.Add($"{ModuleName}.ProcessLowPressure");
  1372. m_RtDataKeys.Add($"{ModuleName}.ChamberPressure");
  1373. m_RtDataKeys.Add($"{ModuleName}.ESCHePressure");
  1374. m_RtDataKeys.Add($"{ModuleName}.IsATM");
  1375. m_RtDataKeys.Add($"{ModuleName}.IsVAC");
  1376. m_RtDataKeys.Add($"{ModuleName}.LiftPinIsUp");
  1377. m_RtDataKeys.Add($"{ModuleName}.LiftPinIsDown");
  1378. m_RtDataKeys.Add($"{ModuleName}.ValvePVN21.IsOpen");
  1379. m_RtDataKeys.Add($"{ModuleName}.ValvePVN22.IsOpen");
  1380. m_RtDataKeys.Add($"{ModuleName}.ValvePV11.IsOpen");
  1381. m_RtDataKeys.Add($"{ModuleName}.ValvePV12.IsOpen");
  1382. m_RtDataKeys.Add($"{ModuleName}.ValvePV21.IsOpen");
  1383. m_RtDataKeys.Add($"{ModuleName}.ValvePV22.IsOpen");
  1384. m_RtDataKeys.Add($"{ModuleName}.ValvePV31.IsOpen");
  1385. m_RtDataKeys.Add($"{ModuleName}.ValvePV32.IsOpen");
  1386. m_RtDataKeys.Add($"{ModuleName}.ValvePV41.IsOpen");
  1387. m_RtDataKeys.Add($"{ModuleName}.ValvePV42.IsOpen");
  1388. m_RtDataKeys.Add($"{ModuleName}.ValveMfc1.IsOpen");
  1389. m_RtDataKeys.Add($"{ModuleName}.ValveMfc2.IsOpen");
  1390. m_RtDataKeys.Add($"{ModuleName}.ValveMfc3.IsOpen");
  1391. m_RtDataKeys.Add($"{ModuleName}.ValveMfc4.IsOpen");
  1392. m_RtDataKeys.Add($"{ModuleName}.ValveMfc5.IsOpen");
  1393. m_RtDataKeys.Add($"{ModuleName}.ValveMfc6.IsOpen");
  1394. m_RtDataKeys.Add($"{ModuleName}.ValveMfc7.IsOpen");
  1395. m_RtDataKeys.Add($"{ModuleName}.ValveMfc8.IsOpen");
  1396. m_RtDataKeys.Add($"{ModuleName}.ValveGasFinal.IsOpen");
  1397. m_RtDataKeys.Add($"{ModuleName}.ValveSoftPump.IsOpen");
  1398. m_RtDataKeys.Add($"{ModuleName}.ValveFastPump.IsOpen");
  1399. m_RtDataKeys.Add($"{ModuleName}.ValveN2.IsOpen");
  1400. m_RtDataKeys.Add($"{ModuleName}.ValvePVHe1.IsOpen");
  1401. m_RtDataKeys.Add($"{ModuleName}.ValvePVHe2.IsOpen");
  1402. m_RtDataKeys.Add($"{ModuleName}.ValveTurboPumpPumping.IsOpen");
  1403. m_RtDataKeys.Add($"{ModuleName}.ValveTurboPumpPurge.IsOpen");
  1404. m_RtDataKeys.Add($"{ModuleName}.ValvePVN21.IsOpen");
  1405. m_RtDataKeys.Add($"{ModuleName}.ValvePVN22.IsOpen");
  1406. m_RtDataKeys.Add($"{ModuleName}.ValveGuage.IsOpen");
  1407. m_RtDataKeys.Add($"{ModuleName}.ValvePVHe3.IsOpen");
  1408. m_RtDataKeys.Add($"{ModuleName}.ValveHeISO.IsOpen");
  1409. m_RtDataKeys.Add($"{ModuleName}.TurboPumpIsRunning");
  1410. m_RtDataKeys.Add($"{ModuleName}.PumpIsRunning");
  1411. m_RtDataKeys.Add($"{ModuleName}.IsSlitDoorClosed");
  1412. m_RtDataKeys.Add($"{ModuleName}.IsLidClosed");
  1413. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Rf}.DeviceData");
  1414. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.BiasRf}.DeviceData");
  1415. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Match}.C1");
  1416. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Match}.C2");
  1417. // m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Match}.WorkMode");
  1418. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.BiasMatch}.C1");
  1419. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.BiasMatch}.C2");
  1420. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.PendulumValve}.DeviceData");
  1421. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.ESCHV}.DeviceData");
  1422. m_RtDataKeys.Add($"{ModuleName}.TurboPumpRotationalSpeed");
  1423. m_RtDataKeys.Add($"{ModuleName}.GetPVPosition");
  1424. m_RtDataKeys.Add($"{ModuleName}.Chiller.Temp");
  1425. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.ESCHV}.Temp");
  1426. //m_RtDataKeys.Add($"{ModuleName}.ESCHV.OutputVoltage");
  1427. //m_RtDataKeys.Add($"{ModuleName}.ESCHV.IsOn");
  1428. m_RtDataKeys.Add($"{ModuleName}.IsWaterFlowOk");
  1429. m_RtDataKeys.Add($"{ModuleName}.IsWLK");
  1430. m_RtDataKeys.Add($"{ModuleName}.IsCDA_OK");
  1431. m_RtDataKeys.Add($"{ModuleName}.SourceRFFanInterlock");
  1432. m_RtDataKeys.Add($"{ModuleName}.IsTurboPumpInterlock");
  1433. m_RtDataKeys.Add($"{ModuleName}.GasBoxDoorSW.Value");
  1434. m_RtDataKeys.Add($"{ModuleName}.GasBoxPressureSW.Value");
  1435. //m_RtDataKeys.Add($"{ModuleName}.WallTempFeedBack");
  1436. m_RtDataKeys.Add($"{ModuleName}.Chiller.IsOn");
  1437. m_RtDataKeys.Add($"{ModuleName}.ValveHeater.DeviceData");
  1438. m_RtDataKeys.Add($"{ModuleName}.ForelineHeater.DeviceData");
  1439. m_RtDataKeys.Add($"{ModuleName}.WallHeater.DeviceData");
  1440. m_RtDataKeys.Add($"{ModuleName}.FsmState");
  1441. m_RtDataKeys.Add($"{ModuleName}.IsTurboPumpAtSpeed");
  1442. m_RtDataKeys.Add($"{ModuleName}.TurboPumpWaterFlowSwitch.Value");
  1443. m_RtDataKeys.Add($"{ModuleName}.HasWafer");
  1444. m_RtDataKeys.Add($"{ModuleName}.CurrentRecipeResult");
  1445. }
  1446. #endregion
  1447. }
  1448. }