IoPressureControl.cs 10 KB

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  1. using System;
  2. using System.Xml;
  3. using Aitex.Core.Common.DeviceData;
  4. using Aitex.Core.RT.Device;
  5. using Aitex.Core.RT.Event;
  6. using Aitex.Core.RT.IOCore;
  7. using Aitex.Core.RT.OperationCenter;
  8. using Aitex.Core.RT.SCCore;
  9. using Aitex.Core.RT.Tolerance;
  10. using Aitex.Core.Util;
  11. using Venus_RT.Devices.IODevices;
  12. using Aitex.Core.RT.Log;
  13. using Venus_Core;
  14. using Venus_RT.Modules;
  15. namespace Venus_RT.Devices
  16. {
  17. public class IoPressureControl : BaseDevice, IDevice
  18. {
  19. private bool _enableTolerance;
  20. public bool EnableTolerance
  21. {
  22. get
  23. {
  24. return _enableTolerance;
  25. }
  26. set
  27. {
  28. if (_enableTolerance != value)
  29. {
  30. LOG.Write(eEvent.EV_DEVICE_INFO, Module, value ? "Start monitor pressure stability" : "Stop monitor pressure stability");
  31. if (value)
  32. {
  33. _tolerance.Reset(_scAlarmTime.DoubleValue);
  34. }
  35. }
  36. _enableTolerance = value;
  37. }
  38. }
  39. public bool IsIndependentControl
  40. {
  41. get
  42. {
  43. if (_scIsIndependentControl != null)
  44. return _scIsIndependentControl.BoolValue;
  45. return false;
  46. }
  47. }
  48. //public bool IsTvInstalled
  49. //{
  50. // get
  51. // {
  52. // if (_scTvInstalled != null)
  53. // return _scTvInstalled.BoolValue;
  54. // return false;
  55. // }
  56. //}
  57. //public bool IsBoostPumpInstalled
  58. //{
  59. // get
  60. // {
  61. // if (_scIsBoostPumpInstalled != null)
  62. // return _scIsBoostPumpInstalled.BoolValue;
  63. // return false;
  64. // }
  65. //}
  66. //public bool EnableBoostControl
  67. //{
  68. // get
  69. // {
  70. // return _diLogicProcessGasFlowing == null || _diLogicProcessGasFlowing.Value;
  71. // }
  72. //}
  73. //public readonly IoThrottleValve ThrottleValve;
  74. public readonly IoPressureMeter PressureGauge;
  75. public readonly IoPressureMeter ProcessGauge;
  76. public readonly IoPressureMeter ForelineGauge;
  77. //public readonly IoPressureMeter LoadLockGauge;
  78. public readonly IoPressureMeter ESCHeGauge;
  79. public readonly IoPressureMeter ESCHeOutGauge;
  80. public readonly IoPressureMeter PenningGauge;
  81. //public readonly IoBoostPump _boost;
  82. //public readonly IoPump DryPump;
  83. private readonly ToleranceChecker _tolerance = new ToleranceChecker();
  84. private readonly SCConfigItem _scAlarmRange;
  85. private readonly SCConfigItem _scAlarmTime;
  86. private readonly SCConfigItem _scIsIndependentControl;
  87. //private readonly SCConfigItem _scIsBoostPumpInstalled;
  88. //private readonly SCConfigItem _scTvInstalled;
  89. private readonly DIAccessor _diLogicProcessGasFlowing;
  90. private readonly R_TRIG _trigPressureGauge = new R_TRIG();
  91. private readonly R_TRIG _trigProcessGauge = new R_TRIG();
  92. private readonly R_TRIG _trigForelineGauge = new R_TRIG();
  93. //private readonly R_TRIG _trigProcessHighGauge = new R_TRIG();
  94. //private readonly R_TRIG _trigProcessLowGauge = new R_TRIG();
  95. private readonly R_TRIG _trigESCHePressureGauge = new R_TRIG();
  96. private readonly R_TRIG _trigESCHeOutPressureGauge = new R_TRIG();
  97. private readonly R_TRIG _trigLoadLockGaugePressureGauge = new R_TRIG();
  98. private readonly AOAccessor _aoMFPressureSP;
  99. // Properties
  100. //
  101. public double TargetPressure { get; set; }
  102. private string PressureOutOfTolerance = "PressureOutOfTolerance";
  103. // Constructor
  104. //
  105. public IoPressureControl(string module, XmlElement node, string ioModule = "")
  106. {
  107. base.Module = module;
  108. base.Name = node.GetAttribute("id");
  109. base.Display = node.GetAttribute("display");
  110. base.DeviceID = node.GetAttribute("schematicId");
  111. _diLogicProcessGasFlowing = ParseDiNode("diLogicProcessGasFlowing", node, ioModule);
  112. _scAlarmRange = SC.GetConfigItem($"{Module}.GasFlowPressureAlarmRange");
  113. _scAlarmTime = SC.GetConfigItem($"{Module}.GasFlowPressureAlarmTime");
  114. _scIsIndependentControl = SC.GetConfigItem($"{Module}.IsIndependentControl");
  115. //_scIsBoostPumpInstalled = SC.GetConfigItem($"{Module}.EnableBoosterPump");
  116. //_scTvInstalled = SC.GetConfigItem($"{Module}.EnableThrottleValve");
  117. //_enableTolerance = true;
  118. PressureGauge = ParseDeviceNode<IoPressureMeter>(Module, "pressureMeter", node);
  119. ProcessGauge = ParseDeviceNode<IoPressureMeter>(Module, "processMeter", node);
  120. ForelineGauge = ParseDeviceNode<IoPressureMeter>(Module, "forelineMeter", node);
  121. //LoadLockGauge = ParseDeviceNode<IoPressureMeter>(Module, "loadlockMeter", node);
  122. ESCHeGauge = ParseDeviceNode<IoPressureMeter>(Module, "escHeGauge", node);
  123. ESCHeOutGauge = ParseDeviceNode<IoPressureMeter>(Module, "escHeOutGauge", node);
  124. //ProcessHigh = ParseDeviceNode<IoPressureMeter>(Module, "processPressureHigh", node);
  125. //ProcessLow = ParseDeviceNode<IoPressureMeter>(Module, "processPressureLow", node);
  126. _aoMFPressureSP = ParseAoNode("tmPressureSetPoint", node, ioModule);
  127. //DryPump = ParseDeviceNode<IoPump>(Module, "drypump", node);
  128. PenningGauge = ParseDeviceNode<IoPressureMeter>(Module, "penningMeter", node);
  129. }
  130. public bool Initialize()
  131. {
  132. //DEVICE.Register($"{Module}.{Name}.{AITPressureControlOperation.SetBoostPressure}", _setBoostPressure);
  133. DEVICE.Register($"{Module}.{Name}.{AITPressureControlOperation.SetChamberPressure}", _setChamberPressure);
  134. OP.Subscribe($"{Module}.{Name}.{AITPressureControlOperation.SetChamberPressure}", (out string reason, int time, object[] param) =>
  135. {
  136. _setChamberPressure(out reason, 0, param);
  137. return true;
  138. });
  139. EV.Subscribe(new EventItem("Event", PressureOutOfTolerance, "Pressure Out Of Tolerance", EventLevel.Alarm, EventType.HostNotification));
  140. return true;
  141. }
  142. //public void StartPump(bool on)
  143. //{
  144. // this.DryPump?.Start(on);
  145. //}
  146. private bool? _setChamberPressure(out string reason, int time, object[] param)
  147. {
  148. double setpoint = Convert.ToDouble((string)param[0]);
  149. TargetPressure = setpoint;
  150. reason = $"Chamber pressure set to {setpoint} mTorr";
  151. return true;
  152. }
  153. public void Terminate()
  154. {
  155. }
  156. public void Monitor()
  157. {
  158. CheckTolerance();
  159. //JetChamber jetChamber = (JetChamber)(SC.GetValue<int>("System.ChamberSelect"));//Venus or Kepler
  160. //if (RtInstance.CurrentChamber == JetChamber.Venus)
  161. //{
  162. // _trigPressureGauge.CLK = PressureGauge.GaugeAlarm;
  163. // if (_trigPressureGauge.Q) LOG.Write(eEvent.ERR_DEVICE_INFO, Module, "Chamber pressure gauge Alarm");
  164. // _trigLoadLockGaugePressureGauge.CLK = LoadLockGauge.GaugeAlarm;
  165. // if (_trigLoadLockGaugePressureGauge.Q) LOG.Write(eEvent.ERR_DEVICE_INFO, Module, "LoadLock Pressure Gauge Alarm");
  166. //}
  167. _trigProcessGauge.CLK = ProcessGauge.GaugeAlarm;
  168. if (_trigProcessGauge.Q) LOG.Write(eEvent.ERR_DEVICE_INFO, Module, "Process pressure gauge Alarm");
  169. _trigForelineGauge.CLK = ForelineGauge.GaugeAlarm;
  170. if (_trigForelineGauge.Q) LOG.Write(eEvent.ERR_DEVICE_INFO, Module, "Foreline pressure gauge Alarm");
  171. //_trigProcessHighGauge.CLK = ProcessHigh.GaugeAlarm;
  172. //if (_trigProcessHighGauge.Q) LOG.Write(eEvent.ERR_DEVICE_INFO, Module, "Process High Gauge Alarm");
  173. //_trigProcessLowGauge.CLK = ProcessLow.GaugeAlarm;
  174. //if (_trigProcessLowGauge.Q) LOG.Write(eEvent.ERR_DEVICE_INFO, Module, "Process Low Gauge Alarm");
  175. if (ESCHeGauge != null)
  176. {
  177. _trigESCHePressureGauge.CLK = ESCHeGauge.GaugeAlarm;
  178. if (_trigESCHePressureGauge.Q) LOG.Write(eEvent.ERR_DEVICE_INFO, Module, "ESC He Pressure Gauge Alarm");
  179. }
  180. if (ESCHeOutGauge != null)
  181. {
  182. _trigESCHeOutPressureGauge.CLK = ESCHeOutGauge.GaugeAlarm;
  183. if (_trigESCHeOutPressureGauge.Q) LOG.Write(eEvent.ERR_DEVICE_INFO, Module, "ESC He out Pressure Gauge Alarm");
  184. }
  185. //MFPressureWrite();
  186. }
  187. public void CheckTolerance()
  188. {
  189. if (!EnableTolerance)
  190. return;
  191. //if (ThrottleValve != null && IsTvInstalled && ThrottleValve.PressureMode == PressureCtrlMode.TVPositionCtrl)
  192. // return;
  193. _tolerance.Monitor(PressureGauge.Value,
  194. TargetPressure - Math.Abs(_scAlarmRange.DoubleValue),
  195. TargetPressure + Math.Abs(_scAlarmRange.DoubleValue), _scAlarmTime.DoubleValue);
  196. if (_tolerance.Trig)
  197. {
  198. EV.Notify(PressureOutOfTolerance);
  199. LOG.Write(eEvent.ERR_DEVICE_INFO, Module, $"Gas Flow Pressure Alarm Out of range in {_scAlarmTime.Value:0} seconds");
  200. }
  201. }
  202. public void Reset()
  203. {
  204. _trigProcessGauge.RST = true;
  205. _trigPressureGauge.RST = true;
  206. _trigForelineGauge.RST = true;
  207. if (_scAlarmTime != null)
  208. {
  209. _tolerance.Reset(_scAlarmTime.DoubleValue);
  210. }
  211. }
  212. //private void MFPressureWrite()
  213. //{
  214. // if (_aoMFPressureSP == null)
  215. // return;
  216. // _SetRealFloat(_aoMFPressureSP, 100);
  217. //}
  218. }
  219. }