Kepler-Release/Venus/Venus_RT/Modules/TM/VenusEntity/SEMFPMSwapRoutine.cs

using Aitex.Core.Common.DeviceData;
using Aitex.Core.RT.DataCenter;
using Aitex.Core.RT.Device;
using Aitex.Core.RT.Log;
using Aitex.Core.RT.Routine;
using Aitex.Core.RT.SCCore;
using Aitex.Core.Util;
using Aitex.Sorter.Common;
using MECF.Framework.Common.Equipment;
using MECF.Framework.Common.Schedulers;
using MECF.Framework.Common.SubstrateTrackings;
using System;
using System.Collections.Generic;
using System.Linq;
using System.Text;
using System.Threading.Tasks;
using System.Windows.Documents;
using Venus_Core;
using Venus_RT.Devices;
using Venus_RT.Devices.TM;
using Venus_RT.Modules.PMs;

namespace Venus_RT.Modules.TM.VenusEntity
{
    public class SEMFPMSwapRoutine : ModuleRoutineBase, IRoutine
    {
        private enum SwapStep
        {
            WaitPMReady,
            WaitforControlPressure,
            PreRotation,
            PickPrepare,
            PickExtend,
            DropDownWafer,
            PickDelay,
            PickRetract,
            PlacePrepare,
            PlaceExtend,
            LiftUpWafer,
            PlaceDelay,
            PlaceRetract,
            NotifyDone,
            EndDone,
            EndDelay
        }

        private readonly TMBase _TM;
        private readonly ITransferRobot _robot;

        private int _swapingTimeout = 120 * 1000;
        private int _placeDelayTime = 0;
        private int _pickDelayTime = 0;
        private ModuleName _targetModule;
        private PMEntity _pmModule;
        private int _targetSlot;
        private Hand _pickHand;
        private Hand _placeHand;
        private JetPMBase _chamber;
        private bool NeedControlPressure;
        private int _controlPressureSetPoint = 90;
        private int _controlFlowSetPoint = 90;

        public SEMFPMSwapRoutine(TMBase tm, ITransferRobot robot, ModuleName module) : base(module)
        {
            _TM = tm;
            _robot = robot;
            Name = "swap for pm";
        }

        public RState Start(params object[] objs)
        {
            if (!_robot.IsHomed)
            {
                LOG.Write(eEvent.ERR_TM, Module, $"TM Robot is not homed, please home it first");
                return RState.Failed;
            }
            var swapItem = (Queue<MoveItem>)objs[0];
            _targetModule = swapItem.Peek().SourceModule;
            _targetSlot = swapItem.Peek().SourceSlot;
            _pickHand = swapItem.Peek().RobotHand;
            _placeHand = _pickHand == Hand.Blade2 ? Hand.Blade1 : Hand.Blade2;

            if (ModuleHelper.IsPm(_targetModule) && ModuleHelper.IsInstalled(_targetModule))
            {
                _pmModule = Singleton<RouteManager>.Instance.GetPM(_targetModule);
            }
            else
            {
                LOG.Write(eEvent.ERR_TM, Module, $"Invalid target module : {_targetModule} for swap action");
                return RState.Failed;
            }

            if (WaferManager.Instance.CheckNoWafer(ModuleName.TMRobot, (int)_placeHand))
            {
                LOG.Write(eEvent.ERR_TM, Module, $"Cannot Swap Wafer as TM Robot Arm: {_placeHand} has no wafer");
                return RState.Failed;
            }

            if (WaferManager.Instance.CheckHasWafer(ModuleName.TMRobot, (int)_pickHand))
            {
                LOG.Write(eEvent.ERR_TM, Module, $"Cannot Swap Wafer as TM Robot Arm: {_pickHand} has a wafer");
                return RState.Failed;
            }

            if (WaferManager.Instance.CheckNoWafer(_targetModule, _targetSlot))
            {
                LOG.Write(eEvent.ERR_TM, Module, $"Cannot Swap Wafer as {_targetModule} Slot {_targetSlot + 1} has no wafer");
                return RState.Failed;
            }

            Reset();
            _swapingTimeout = SC.GetValue<int>($"{Module}.SwapTimeout") * 1000;
            _pickDelayTime = SC.GetValue<int>($"{_targetModule}.PickDelayTime");
            _placeDelayTime = SC.GetValue<int>($"{_targetModule}.PlaceDelayTime");
            if (Singleton<RouteManager>.Instance.GetPM(_targetModule).IsOnline)
            {
                NeedControlPressure = true;
            }
            else
            {
                NeedControlPressure = false;
            }
            return Runner.Start(Module, $"Swap with {_targetModule}");

        }

        public RState Monitor()
        {
            Runner.Wait(SwapStep.WaitPMReady, () => _pmModule.IsIdle, _delay_60s)
                 .RunIf(SwapStep.WaitforControlPressure, NeedControlPressure, StartControlPressure, IsPressureReady, _delay_60s)
                //.RunIf(SwapStep.PreRotation, _JetTM.PreRotateModules.ContainsKey(_targetModule), RotateArm, WaitRotateDone)
                .Run(SwapStep.PickPrepare, PickPrepare, IsModuleReadyForPick)
                .Run(SwapStep.PickExtend, PickExtend, WaitRobotExtendDone)
                .Run(SwapStep.DropDownWafer, NotifyPMPickWafer, WaitPMWaferDropDown)
                .Delay(SwapStep.PickDelay, _pickDelayTime)
                .Run(SwapStep.PickRetract, PickRetract, WaitRobotRetractDone)
                .Run(SwapStep.PlacePrepare, PlacePrepare, IsModuleReadyForPlace)
                .Run(SwapStep.PlaceExtend, PlaceExtend, WaitRobotExtendDone)
                .Run(SwapStep.LiftUpWafer, NotifyLiftUpWafer, WaitPMWaferLiftUp)
                .Delay(SwapStep.PlaceDelay, _placeDelayTime)
                .Run(SwapStep.PlaceRetract, PlaceRetract, WaitRobotRetractDone)
                .Run(SwapStep.NotifyDone, NotifyPMDone, _delay_50ms)
                .Delay(SwapStep.PlaceDelay, _delay_50ms)
                .Run(SwapStep.EndDone, CheckDoorClose, WaitPMDoorClose, 5000)
                .End(SwapStep.EndDelay, NullFun, _delay_50ms);


            return Runner.Status;
        }

        private bool StartControlPressure()
        {
            _chamber = DEVICE.GetDevice<JetPMBase>(_targetModule.ToString());
            _controlPressureSetPoint = SC.GetValue<int>($"{_targetModule}.ControlPressureSetPoint");
            _controlFlowSetPoint = SC.GetValue<int>($"{_targetModule}.ControlPressureN2FlowSetPoint");
            _chamber.StartControlPressure(_controlPressureSetPoint, _controlFlowSetPoint);
            return true;
        }

        private bool IsPressureReady()
        {
            double ControlPressure = SC.GetValue<int>($"{_targetModule}.ControlPressureSetPoint");
            //double PMPressure = Singleton<RouteManager>.Instance.GetPM(_targetModule).ChamberPressure;
            double PMPressure = (double)DATA.Poll($"{_targetModule}.ChamberPressure");
            double range = SC.GetValue<int>($"{_targetModule}.ControlPressureOffset");
            if ((PMPressure >= (ControlPressure - range)) && (PMPressure <= (ControlPressure + range)))
            {

                //LOG.Write(eEvent.WARN_DEFAULT_WARN, _targetModule, "current pmpressure" + PMPressure);
                //LOG.Write(eEvent.WARN_DEFAULT_WARN, _targetModule, "DATA current pmpressure" + DATA.Poll($"{_targetModule}.ChamberPressure"));
                //string reason = $"{Module} and TM pressure difference exceeds the max limit {maxPressureDifference}, TMPressure:{TMPressure}, {Module}Pressure:{PMPressure}";
                //LOG.Write(eEvent.ERR_DEVICE_INFO, Module, reason);
                return true;
            }
            else return false;
        }

        private bool PickPrepare()
        {
            _pmModule.PostMsg(PMEntity.MSG.PreparePick);
            //_TM.TurnSlitDoor(_targetModule, true);
            return true;
        }
        private bool PlacePrepare()
        {
            _pmModule.PostMsg(PMEntity.MSG.PreparePlace);
            //_TM.TurnSlitDoor(_targetModule, true);
            return true;
        }

        private bool IsModuleReadyForPick()
        {
            return _pmModule.Status == PMEntity.PMStatus.Ready_For_Pick && _pmModule.IsSlitDoorOpen;
        }

        private bool PickExtend()
        {
            return _robot.PickExtend(_targetModule, _targetSlot, _pickHand);
        }
        private bool PickRetract()
        {
            return _robot.PickRetract(_targetModule, _targetSlot, _pickHand);
        }

        private bool IsModuleReadyForPlace()
        {
            return _pmModule.Status == PMEntity.PMStatus.Ready_For_Place && _pmModule.IsSlitDoorOpen;
        }

        private bool PlaceExtend()
        {
            return _robot.PlaceExtend(_targetModule, _targetSlot, _placeHand);
        }
        private bool PlaceRetract()
        {
            return _robot.PlaceRetract(_targetModule, _targetSlot, _placeHand);
        }

        private bool WaitRobotExtendDone()
        {
            if (_robot.Status == RState.Running)
            {
                return false;
            }
            else if (_robot.Status == RState.End)
            {
                return true;
            }
            else
            {
                Runner.Stop($"TM Robot Place Extend failed, {_robot.Status}");
                Singleton<RouteManager>.Instance.GetPM(_targetModule).PostMsg(PMEntity.MSG.Error);
                return true;
            }
        }

        //private bool RotateArm()
        //{
        //    _pmModule.PostMsg(PMEntity.MSG.PreparePick); // Notify PM to Serv pressure in advance for throughput enhancement
        //    return _robot.Goto(_JetTM.PreRotateModules[_targetModule], 0, _placeHand);
        //}

        //private bool WaitRotateDone()
        //{
        //    if (_robot.Status == RState.Running)
        //    {
        //        return false;
        //    }
        //    else if (_robot.Status == RState.End)
        //    {
        //        return true;
        //    }
        //    else
        //    {
        //        Runner.Stop($"TM Robot Rotate Arm failed, {_robot.Status}");
        //        return true;
        //    }
        //}
        private bool NotifyPMPickWafer()
        {
            _pmModule.PostMsg(PMEntity.MSG.DropDownWafer);
            return true;
        }

        private bool WaitPMWaferDropDown()
        {
            if (_pmModule.Status == PMEntity.PMStatus.Exchange_Ready)
            {
                WaferManager.Instance.WaferMoved(_targetModule, _targetSlot, ModuleName.TMRobot, (int)_pickHand);
                return true;
            }

            return false;
        }

        private bool WaitRobotRetractDone()
        {
            if (_robot.Status == RState.Running)
            {
                return false;
            }
            else if (_robot.Status == RState.End)
            {
                return true;
            }
            else
            {
                Runner.Stop($"TM Robot Swap Retract failed, {_robot.Status}");
                Singleton<RouteManager>.Instance.GetPM(_targetModule).PostMsg(PMEntity.MSG.Error);
                return true;
            }
        }

        private bool NotifyLiftUpWafer()
        {
            _pmModule.PostMsg(PMEntity.MSG.LiftUpWafer);
            return true;
        }

        private bool WaitPMWaferLiftUp()
        {
            if (_pmModule.Status == PMEntity.PMStatus.Exchange_Ready)
            {
                WaferManager.Instance.WaferMoved(ModuleName.TMRobot, (int)_placeHand, _targetModule, _targetSlot);
                return true;
            }

            return false;
        }

        private bool NotifyPMDone()
        {
            _pmModule.PostMsg(PMEntity.MSG.PlaceReady);
            //_TM.TurnSlitDoor(_targetModule, false);
            return true;
        }

        private bool CheckDoorClose()
        {
            LOG.Write(eEvent.WARN_TM, Module, $"PMSwap Close Door Again");
            return _TM.TurnSlitDoor(_targetModule, false);
        }

        private bool WaitPMDoorClose()
        {
            if (_TM.CheckSlitValveClose(_targetModule))
            {
                LOG.Write(eEvent.WARN_TM, Module, $"PMSwap Check Door Close");
                return true;
            }
            else
            {
                if (DEVICE.GetDevice<IoCylinder>($"{Module}.{_targetModule}SlitDoor").SetPoint != (int)CylinderState.Close)
                {
                    LOG.Write(eEvent.WARN_TM, Module, $"PMSwap {_targetModule}SlitDoor set close again");
                    DEVICE.GetDevice<IoCylinder>($"{Module}.{_targetModule}SlitDoor").SetCylinder(false, out string reason);
                }
                //LOG.Write(eEvent.WARN_TM, Module, $"PMSwap Check not Close Door");
                return false;
            }
        }

        public void Abort()
        {
            _robot.Halt();
        }
    }
}